Laser maintained plasma light source, method of using same, and optical apparatus

Abstract

The invention provides a laser-maintained plasma light source, a using method thereof and optical equipment. A laser maintained plasma light source includes a container, a first electrode, a second electrode, and a laser. The container containing the ionizable medium is provided with a first chamber and a second chamber which are communicated with each other. The first electrode and the second electrode can ionize the ionizable medium in the first chamber and form a first luminous point. A laser focus point of the laser can be moved from the first light emitting point to the second chamber such that a second light emitting point is formed in the second chamber. The use method of the laser-maintained plasma light source comprises the following steps of: exciting the ionizable medium in the first chamber of the container to ionize through the electrode, and forming a first luminous point; enabling the laser to move relative to the container, and enabling a laser focus point of the laser to move from the first luminous point to a second cavity communicated with the first cavity, so that the ionizable medium in the second cavity is ionized to form a second luminous point. The light emitting area, the power and the radiation brightness of the light source can be improved.

Description

Technical Field

[0001] This application relates to the technical field of light sources, and particularly to a laser sustained plasma light source, a method for using the same, and an optical device. Background Art

[0002] As an important part of an optical device, the power and radiation brightness of a light source can have a great impact on the performance of the optical device. Currently, through the laser sustained plasma (LSP) technology, a light source with high stability, high radiation brightness, and long life can be obtained. However, in this solution, the light-emitting area, power, and radiation brightness of the light source are still not ideal enough. Summary of the Invention

[0003] This application provides a laser sustained plasma light source, a method for using the same, and an optical device, which can improve the light-emitting area, power, and radiation brightness of the light source.

[0004] In a first aspect, this application provides a method for using a laser sustained plasma light source, including ionizing an ionizable medium in a first chamber of a container through an electrode to form a first light-emitting point; moving a laser relative to the container, and moving a laser focus point of the laser from the first light-emitting point to a second chamber communicating with the first chamber, so that the ionizable medium in the second chamber is ionized to form a second light-emitting point.

[0005] In this solution, by moving the laser focus point of the laser from the first light-emitting point in the first chamber to the second chamber communicating with the first chamber, the ionizable medium on the moving path of the laser focus point of the laser will be ionized in sequence, and thus light emission will be formed at each position on the moving path in sequence, so that the ionizable medium in the second chamber can be ionized to form a second light-emitting point, that is, the movement of the light-emitting point in the light source is realized. In addition, moving the laser away from the first electrode and the second electrode can also prevent the first electrode and the second electrode from sublimating due to the high-temperature environment in the first chamber, thereby avoiding damage to the electrodes.

[0006] In an implementation manner of the first aspect, the method for using includes: focusing the laser of a first laser on the first light-emitting point; moving the first laser relative to the container, and moving the laser focus point of the first laser from the first light-emitting point to the second chamber, so that the ionizable medium in the second chamber is ionized to form a second light-emitting point; focusing the laser of a second laser on the second light-emitting point. In this solution, the movement of the first laser can cause a second light-emitting point to be formed in the second chamber, and the focusing of the laser of the second laser on the second light-emitting point can make the second light-emitting point in the second chamber emit light continuously. Such a design can realize the movement of the light-emitting point in the light source and maintain the continuous light emission of the light-emitting point.

[0007] In an implementation of the first aspect, the usage method includes: moving the first laser relative to the container, and moving the laser focus point of the first laser from the second light-emitting point to the third chamber communicating with the second chamber, so as to ionize the ionizable medium in the third chamber to form a third light-emitting point; focusing the laser of the third laser on the third light-emitting point. In this solution, by designing the relative movement of the first laser with respect to the container, a third light-emitting point is formed in the third chamber, and the laser of the third laser is focused on the third light-emitting point to maintain the sustainable light emission of the third light-emitting point. This enables multiple light-emitting points in the light source to emit light together, that is, an array light source can be formed.

[0008] In an implementation of the first aspect, the usage method includes: focusing the laser of the first laser on the first light-emitting point; moving the second laser relative to the container, and moving the laser focus point of the second laser from the first light-emitting point to the second chamber, so as to ionize the ionizable medium in the second chamber to form a second light-emitting point. In this solution, by designing the laser of the first laser to be focused on the first light-emitting point, the second laser can move relative to the container to form a second light-emitting point in the second chamber, enabling multiple light-emitting points to be formed in the light source.

[0009] In an implementation of the first aspect, the usage method includes: moving the third laser relative to the container, and moving the laser focus point of the third laser from the second light-emitting point to the third chamber communicating with the second chamber, so as to ionize the ionizable medium in the third chamber to form a third light-emitting point. In this solution, by designing the laser of the second laser to be focused on the second light-emitting point in the second chamber, and the third laser moving relative to the container, a third light-emitting point is formed in the third chamber. This enables multiple light-emitting points in the light source to emit light together, that is, an array light source can be formed.

[0010] In an implementation of the first aspect, "moving the laser relative to the container" includes: translating or rotating the laser relative to the fixed container. In this solution, by designing the movement mode of the laser, it is ensured that the laser focus point of the laser can move relative to the container, so that the movement of the light-emitting point in the container can be realized.

[0011] In the second aspect, the present application provides a laser sustained plasma light source, including a container, an ionizable medium, a first electrode, a second electrode, and a laser; the container has a first chamber and a second chamber that communicate with each other, and the ionizable medium is accommodated in the first chamber and the second chamber; the first electrode and the second electrode are arranged at intervals, and the first electrode and the second electrode are used to energize and excite the ionizable medium in the first chamber to ionize and form a first light-emitting point; the laser is used to move relative to the container, so that the laser focus point of the laser moves from the first light-emitting point to the second chamber, and the ionizable medium in the second chamber is ionized to form a second light-emitting point.

[0012] In this solution, by moving the laser focus point of the laser from the first light-emitting point in the first chamber to the second chamber, the ionizable medium in the second chamber can be ionized to form a second light-emitting point. Such a design can make the second light-emitting point far away from the first electrode and the second electrode located in the first chamber. When the second chamber of the light source serves as the chamber for outputting light, it can have a large light-emitting area, thereby effectively improving the power and radiation brightness of the light source. In addition, moving the laser away from the first electrode and the second electrode can prevent the first electrode and the second electrode from sublimating due to the high-temperature environment in the first chamber, thus avoiding electrode damage. It can also prevent the condensed electrode from adhering to the chamber wall of the container after sublimation, thereby avoiding the defect of affecting the performance of the light source.

[0013] In an implementation of the second aspect, the laser includes a first laser and a second laser; the first laser is used to emit laser light focused on the first light-emitting point and is used to move relative to the container so that the laser focus point of the first laser moves from the first light-emitting point to the second chamber; the second laser is fixedly arranged at the second chamber, and the second laser is used to emit laser light focused on the second light-emitting point. In this solution, by moving the first laser, a second light-emitting point can be formed in the second chamber, and the laser light of the second laser focused on the second light-emitting point can make the second light-emitting point in the second chamber continuously emit light. Such a design can realize the movement of the light-emitting point by the laser and the maintenance of the continuous light emission of the light-emitting point, thereby ensuring the reliability and stability of the light source.

[0014] In an implementation of the second aspect, the first laser is used to move relative to the container so that the laser focus point of the first laser moves from the second light-emitting point to the third chamber communicating with the second chamber, so that the ionizable medium in the third chamber is ionized to form a third light-emitting point; the laser includes a third laser, and the third laser is used to emit laser light focused on the third light-emitting point. In this solution, by moving the first laser, light-emitting points can be formed in multiple chambers in the container, so that multiple light-emitting points in the container can emit light together. Such a design can effectively realize the light emission of the light source array, and there can be no obstruction inside and outside the chamber where the light-emitting point is located, so it can have a large light-emitting area, thereby improving the power and radiation brightness of the light source. In addition, it can also make the light-emitting points in the container far away from the electrodes, thereby improving the performance of the light source.

[0015] In an implementation of the second aspect, the laser includes a first laser and a second laser; the first laser is fixedly disposed at the first chamber and is configured to emit a laser beam focused on the first light-emitting point; the second laser is configured to emit a laser beam focused on the first light-emitting point and is configured to move relative to the container so that the laser focus point of the second laser moves from the first light-emitting point to the second chamber, and the ionizable medium in the second chamber is ionized to form a second light-emitting point. In this solution, by designing the laser beam of the first laser to be focused on the first light-emitting point, the second laser can move relative to the container to form a second light-emitting point in the second chamber, so that multiple light-emitting points can be formed in the light source, thereby improving the power and radiation brightness of the light source.

[0016] In an implementation of the second aspect, the laser includes a third laser, the third laser is configured to emit a laser beam focused on the second light-emitting point, and the third laser is further configured to move relative to the container so that the laser focus point of the third laser moves from the second light-emitting point to the third chamber communicating with the second chamber, so that the ionizable medium in the third chamber is ionized to form a third light-emitting point. In this solution, an array light source can be constructed in the container by moving the laser, thereby improving the power and radiation brightness of the light source, which is beneficial to improving the performance of the light source.

[0017] In an implementation of the second aspect, the container is fixed, and the laser is configured to translate or rotate relative to the container. In this solution, by designing the movement mode of the laser relative to the container, it is ensured that the laser focus point of the laser can move relative to the container, so that the movement of the light-emitting point in the container can be realized.

[0018] In an implementation of the second aspect, the chambers of the container include a plurality of working chambers, and the working chambers are chambers other than the first chamber. Each working chamber is configured to form a light-emitting point and emit light outward; the laser sustained plasma light source includes a focusing element and a plurality of collimating elements; a collimating element is correspondingly disposed outside one working chamber, and each collimating element is configured to convert the light emitted from the corresponding working chamber into collimated light; the focusing element is configured to focus the collimated light converted by all the collimating elements. In this solution, by forming an array of light-emitting points and focusing the light of all the light-emitting points, the power and radiation brightness of the light source can be improved without changing the total power of the laser. That is, more laser energy can be converted into the light energy of the light source, improving the energy conversion rate.

[0019] In an implementation of the second aspect, the laser sustained plasma light source includes a plurality of first reflection elements, with one first reflection element arranged corresponding to one collimating element. Each first reflection element is configured to reflect the collimated light converted by the corresponding collimating element to the focusing element; the focusing element is configured to focus the collimated light reflected by all the first reflection elements. By designing the first reflection element to reflect the collimated light converted by the collimating element to the focusing element, the performance of the light source can be made reliable and the mass production performance can be good.

[0020] In an implementation of the second aspect, the laser sustained plasma light source includes a plurality of second reflection elements, with one second reflection element arranged outside one working chamber, and one second reflection element and one collimating element located on both sides of one working chamber respectively; each second reflection element is configured to reflect the light emitted from the corresponding working chamber back into the working chamber. In this solution, through the reflection of the second reflection element, the light loss in the working chamber can be reduced, the light utilization rate can be improved, so that the collimating element can receive more reflected light, and further the radiation brightness and power of the light received by the light receiving device can be further improved.

[0021] In an implementation of the second aspect, the focusing element includes a focusing lens or a focusing mirror. This solution enables the focusing element to be a focusing lens or a focusing mirror, so that the structure of the light source is relatively simple, the performance is relatively reliable, and the mass production performance is good.

[0022] In a third aspect, the present application provides an optical device, including a light receiving device and the above-mentioned laser sustained plasma light source, and the light receiving device is configured to receive the light emitted from the chambers other than the first chamber.

[0023] The laser sustained plasma light source in this solution can have a relatively large light emitting area, so that the power and radiation brightness of the light source can be effectively improved, and further the light receiving device can receive light with a relatively large power and radiation brightness, thereby improving the performance of the optical device.

[0024] In an implementation of the third aspect, the optical device includes the above-mentioned laser sustained plasma light source, and the light receiving device is configured to receive the light after being focused by the focusing element. By designing the light receiving device to receive the light after being focused by the focusing element, the light receiving device can receive light with a relatively large power and radiation brightness, thereby improving the performance of the optical device. Description of the Drawings

[0025] Figure 1 is a schematic diagram of the frame structure of the light source in an embodiment;

[0026] Figure 2 is Figure 1 a schematic diagram of the working principle of the light source shown;

[0027] Figure 3 is Figure 1 Another schematic diagram of the working principle of the light source shown;

[0028] Figure 4 Schematic diagram of the frame structure of the light source in another embodiment;

[0029] Figure 5 is Figure 4 Schematic diagram of the working principle of the light source shown;

[0030] Figure 6 is Figure 4 Another schematic diagram of the working principle of the light source shown;

[0031] Figure 7 is Figure 4 Another schematic diagram of the working principle of the light source shown;

[0032] Figure 8 is Figure 4 Schematic diagram of another movement mode of the laser of the light source shown;

[0033] Figure 9 Schematic diagram of the frame structure of the light source in another embodiment;

[0034] Figure 10 is Figure 9 Schematic diagram of the frame structure of the light source in a working state shown;

[0035] Figure 11 Schematic diagram of the frame structure of the light source in another embodiment;

[0036] Figure 12 Schematic diagram of the frame structure of the light source in another embodiment.

[0037] Explanation of reference numerals:

[0038] 12 - electrode; 13 - laser; 14 - ionizable medium; 15 - light-emitting point; 16 - second reflecting element; 17 - collimating element; 18 - first reflecting element; 20 - focusing mirror;

[0039] 100 - light source; 11a - container; 11b - container; 12a - first electrode; 12b - second electrode; 13a - laser No. 1; 13b - laser No. 2; 13c - laser No. 3; 13d - laser No. 4;

[0040] 11a1 - The first chamber; 11a2 - The second chamber; 11b1 - The first chamber; 11b2 - The second chamber; 11b3 - The third chamber; 11b4 - The fourth chamber; 11d1 - The first chamber; 11d2 - The second chamber; 11d3 - The third chamber; 11d4 - The fourth chamber; 11d5 - The fifth chamber. Detailed implementation manners

[0041] For ease of understanding, the following explains and describes the relevant technical terms and expressions involved in the embodiments of the present application.

[0042] The terms "first", "second", etc. are only used for the purpose of distinguishing descriptions, and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first", "second", etc. may explicitly or implicitly include one or more of such features.

[0043] The following describes the embodiments of the present application in conjunction with the accompanying drawings in the embodiments of the present application.

[0044] The following embodiments of the present application provide an optical device, including but not limited to a thin - film detection device, a defect detection device, a spectrometer, a monochromator, an ambient light detection device, a hyperspectral imager, an optical element detection device, a bio - analysis instrument, an electronic product manufacturing device, etc.

[0045] The optical device may include a light source and a light - receiving device. The light source can emit light through laser - sustained plasma (LSP) technology. The light - receiving device can receive the light emitted by the light source, and the light - receiving device can process the received light (including but not limited to reflection, focusing, filtering, etc.), or use the light for detection or processing. The light - receiving device may include at least one component.

[0046] The light source in the embodiments of the present application will be described in detail below.

[0047] Figure 1 It is a schematic diagram of a frame structure of a light source 100 in an embodiment. As Figure 1 shown, the light source 100 may include a container 11a, an electrode 12, a laser 13, and several optical elements (not shown in the figure), where the optical elements may include but are not limited to mirrors, lenses, optical fibers, etc.

[0048] As Figure 1As shown, the container 11a may include a first chamber 11a1, a chamber passage a12, and a second chamber 11a2. Among them, the chamber passage a12 may connect the first chamber 11a1 and the second chamber 11a2. An ionizable medium 14 may be accommodated in the container 11a. The ionizable medium 14 may be, for example, an inert gas such as helium, neon, argon, krypton, xenon, or radon, or may also be other media that are easily ionized. A plurality of optical elements may be arranged outside the second chamber 11a2 to transmit the light emitted from the second chamber 11a2 to a light receiving device connected to the optical elements, that is, the light receiving device may receive the light emitted from the second chamber 11a2.

[0049] As Figure 1 shown, the electrode 12 may include a first electrode 12a and a second electrode 12b. The first electrode 12a and the second electrode 12b are arranged at intervals in the first chamber 11a1, and at least a part of the first electrode 12a and at least a part of the second electrode 12b may be located in the first chamber 11a1. When the first electrode 12a and the second electrode 12b are energized, the ionizable medium 14 in the first chamber 11a1 may be ionized to form a plasma. The plasma has a light-emitting characteristic, and the plasma may form a light-emitting point 15 that occupies a certain volume. That is, when the first electrode 12a and the second electrode 12b are energized, the ionizable medium 14 in the first chamber 11a1 may be ionized to form a light-emitting point 15. The light-emitting point 15 located in the first chamber 11a1 may be defined as the first light-emitting point.

[0050] As Figure 1 shown, the laser beam emitted by the laser 13 may enter the first chamber 11a1, and the laser focus point of the laser 13 is located at the light-emitting point 15 in the first chamber 11a1 to maintain the continuous emission of the light-emitting point 15. The laser focus point may refer to the light spot formed by the focused laser beam directly emitted by the laser 13, or may also be the focused light spot formed after the laser emitted by the laser 13 is focused by an optical element. The laser 13 may move relative to the container 11a. Among them, the movement means that the focus point of the laser beam emitted by the laser 13 may move relative to the container 11a, that is, the laser focus point of the laser 13 moves between the first chamber 11a1, the chamber passage a12, and the second chamber 11a2.

[0051] Schematically, the container 11a in this embodiment may remain stationary, and the laser 13 may start from the first chamber 11a1 and be translated through the chamber passage a12 to the second chamber 11a2, that is, the laser 13 may Figure 1 translate to the right from a perspective. In other embodiments, it may also be that the laser 13 remains stationary and the container 11a is translated to the left (from a perspective), so that the first chamber 11a1 gradually moves away from the laser 13 and the second chamber 11a2 gradually approaches the laser 13. Figure 1 perspective), so that the first chamber 11a1 gradually moves away from the laser 13 and the second chamber 11a2 gradually approaches the laser 13.

[0052] Schematically, the laser 13 can be a continuous laser or other lasers that can emit light continuously. Figure 1 It is schematically shown that the laser beam emitted by the laser 13 can enter the container 11a and be focused on the light-emitting point 15 in the container 11a, without limiting the way the laser beam emitted by the laser 13 enters the container 11a. The laser beam emitted by the laser 13 can also be deflected, reflected, focused, etc. by one or more optical elements (such as lenses, mirrors, etc.) and then focused on the light-emitting point 15 in the container 11a. In this embodiment, the way the laser 13 emits a laser beam to the light-emitting point 15 is not limited, and those skilled in the art can design it according to requirements.

[0053] In the embodiments of the present application, Figure 1 The shown light source 100 only schematically shows its basic structure, without limiting its specific structure and positional relationship, and those skilled in the art can design the light source 100 according to actual requirements.

[0054] The basic structure of the light source 100 has been described above, and the working principle of the light source 100 will be described below.

[0055] As Figure 1 and Figure 2 shown, the first electrode 12a and the second electrode 12b are energized to ionize the ionizable medium 14 in the first chamber 11a1 to form the light-emitting point 15. The laser 13 is placed at the first chamber 11a1 so that the laser beam emitted by the laser 13 enters the first chamber 11a1 and is focused on the light-emitting point 15 to maintain the light emission of the light-emitting point 15. The laser 13 is moved from the first chamber 11a1 to the second chamber 11a2 so that the laser focus point of the laser 13 moves from the first chamber 11a1 through the chamber channel a12 to the second chamber 11a2. The light-emitting point 15 in the first chamber 11a1 can be defined as the first light-emitting point.

[0056] The first light-emitting point within the first chamber 11a1 can ionize the ionizable medium 14 around it and cause it to emit light. If the laser focus point of the laser 13 moves a certain distance from the first light-emitting point (assuming this distance is still within the range of "around" the first light-emitting point), the ionizable medium 14 at this certain distance will be ionized and continue to emit light, causing a new light-emitting point to form at this certain distance. And the new light-emitting point can in turn ionize the ionizable medium 14 around it and cause it to emit light. If the laser focus point of the laser 13 continues to move, a new light-emitting point will form at the next position. By analogy, as the laser focus point of the laser 13 moves continuously, light-emitting points will be formed successively at each position on its moving path. Macroscopically, it seems that the light-emitting point 15 follows the movement of the focus point of the laser 13. For the sake of concise description, the following will refer to this phenomenon as the movement of the light-emitting point 15.

[0057] When the light-emitting point 15 follows the laser beam focus point of the laser 13 and moves through the chamber channel a12 to the second chamber 11a2, the light-emitting point 15 located in the second chamber 11a2 can be defined as the second light-emitting point. Thus, the second chamber 11a2 can output light to the light-receiving device.

[0058] Illustratively, in the embodiment of the present application, the movement of the light-emitting point 15 from the first chamber 11a1 to the second chamber 11a2 is described by taking the moving laser 13 as an example. In other embodiments, the position of the container 11a can also be moved to achieve the movement of the light-emitting point 15 from the first chamber 11a1 to the second chamber 11a2.

[0059] In this embodiment, the laser 13 can move relative to the container 11a, causing the light-emitting point 15 to move from the first chamber 11a1 to the second chamber 11a2, which enables the second chamber 11a2 to output light. Such a design moves the light-emitting point 15 away from the electrode 12 located in the first chamber 11a1, thereby avoiding the sublimation of the electrode 12 due to the high-temperature environment in the first chamber 11a1 and preventing damage to the electrode 12. Additionally, it can also avoid the defect that the electrode 12 condenses and adheres to the chamber wall of the container 11a after sublimation, thus affecting the performance of the light source. Moreover, compared with the first chamber 11a1 provided with the electrode 12, there can be no obstruction inside and outside the second chamber 11a2. By forming the light-emitting point 15 in the second chamber 11a2, light can be output using the second chamber 11a2 with a larger light-emitting area, which is beneficial for increasing the amount of light received by the light-receiving device located outside the second chamber 11a2, and thus improving the power and radiation brightness of the light source 100.

[0060] Schematically, in this embodiment, the chamber passage a12 connecting the first chamber 11a1 and the second chamber 11a2 in the container 11a may be linear. This enables, during the movement of the laser 13 relative to the container 11a, as long as the laser 13 or the container 11a moves linearly, the light-emitting point 15 can be ensured to move within the container 11a. In other embodiments, the chamber passage a12 connecting the first chamber 11a1 and the second chamber 11a2 in the container 11a may also be curved, such as in an arc shape or other curved shapes. This enables, during the movement of the laser 13 relative to the container 11a, the laser 13 or the container 11a to move along a curved path to ensure that the light-emitting point 15 is within the container 11a, for example Figure 3 As shown, the chamber passage a12 of the container 11a is in an arc shape. At this time, the laser beam emitted by the laser 13 can be focused on the light-emitting point 15 in the first chamber 11a1. When the laser 13 is rotated so that the focus point of its laser beam moves from the first chamber 11a1 to the second chamber 11a2, the light-emitting point 15 located in the first chamber 11a1 will move along the chamber passage a12 to the second chamber 11a2. The embodiments of the present application do not limit the specific shape and structure of the container 11a and the moving manner of the laser 13 relative to the container 11a. Those skilled in the art can design the specific shape and structure of the container 11a and the moving manner of the laser 13 relative to the container 11a according to needs.

[0061] The basic structure and working principle of the point light source in the embodiments of the present application are described above. Based on the above description, the line array light source and the surface array light source in the embodiments of the present application will be described below.

[0062] Figure 4 is a schematic diagram of a frame structure of a light source 110 in an embodiment. As Figure 4 shown, the light source 110 may include a container 11b, an electrode 12, a plurality of lasers, and a plurality of optical elements (not shown in the figure). Among them, the optical elements may include, but are not limited to, mirrors, lenses, optical fibers, etc., to reflect, deflect, and focus the incident light, etc.

[0063] As Figure 4 shown, the container 11b may include a first chamber 11b1, a second chamber 11b2, a third chamber 11b3, and a fourth chamber 11b4 that are connected in sequence. It can be understood that Figure 4 as shown, the container 11b includes four chambers. This is only an example and is not a limitation to this embodiment. In fact, the number of chambers may be at least three. The container 11b can accommodate an ionizable medium 14. Each chamber except the first chamber 11b1 can be called a working chamber, and a plurality of optical elements can be arranged outside the working chamber. The optical elements can transmit the light emitted by the working chamber to a light receiving device connected to the optical elements, and the light receiving device can receive the light transmitted by the optical elements.

[0064] As Figure 4 shown, the electrode 12 may include a first electrode 12a and a second electrode 12b. The first electrode 12a and the second electrode 12b may be arranged at intervals in the first chamber 11b1, and at least a part of the first electrode 12a and at least a part of the second electrode 12b may be located in the first chamber 11b1. When the electrode 12 is energized, the ionizable medium 14 in the first chamber 11b1 may be ionized to form a light-emitting point 15.

[0065] As Figure 4 shown, the light source 110 may include a first laser 13a, a second laser 13b, a third laser 13c, and a fourth laser 13d. Among them, the first laser 13a, the second laser 13b, the third laser 13c, and the fourth laser 13d are respectively located at the first chamber 11b1, the second chamber 11b2, the third chamber 11b3, and the fourth chamber 11b4, and the laser beams emitted by each laser can enter the container 11b. The first laser 13a can move relative to the container 11b, and the positions of the other lasers can be fixed. Schematically, the above lasers may be continuous lasers or other lasers that can continuously emit light.

[0066] Figure 4 Schematically expresses that the laser beam emitted by the laser can enter the container 11b to maintain the light emission of the light-emitting point 15 in the container 11b, and does not limit the way the laser beam emitted by the laser enters the container 11b. The laser beam emitted by the laser can directly enter the container 11b, or can enter the light-emitting point 15 in the container 11b after being deflected, reflected, focused, etc. by one or more optical elements (such as optical elements like lenses and mirrors). This embodiment does not limit the way the laser emits a laser beam to the light-emitting point 15, and those skilled in the art can design it according to requirements.

[0067] In the embodiments of the present application, Figure 4 the light source 110 shown only schematically expresses its basic structure, and does not limit its specific structure, the number of components, and the positional relationship. Those skilled in the art can design the light source 100 according to actual needs.

[0068] The basic structure of the light source 110 has been described above, and the working principle of the light source 110 will be described below.

[0069] As Figure 4 and Figure 5As shown, the first electrode 12a and the second electrode 12b are energized so that the electrode 12 ionizes the ionizable medium 14 in the first chamber 11b1 to form a light-emitting point 15. The laser beam emitted by the first laser 13a located at the first chamber 11b1 is injected into the first chamber 11b1 and focused on the light-emitting point 15 in the first chamber 11b1. Then, the laser focus point of the first laser 13a is moved from the first chamber 11b1 to the second chamber 11b2, so that the ionizable medium 14 at the second chamber 11b2 is ionized to move the light-emitting point 15 into the second chamber 11b2. The laser beam emitted by the second laser 13b is focused on the light-emitting point 15 in the second chamber 11b2, so that the light-emitting point 15 in the second chamber 11b2 can continuously emit light.

[0070] In other embodiments, the laser focus point of the first laser 13a can also be moved from the first chamber 11b1 to the third chamber 11b3 to form a light-emitting point 15 in the third chamber 11b3, and then the laser of the third laser 13c is focused on the light-emitting point 15 in the third chamber 11b3 to maintain the sustainable light emission of the light-emitting point 15. Alternatively, it can also be moved from the first chamber 11b1 to the fourth chamber 11b4 to form a light-emitting point 15 in the fourth chamber 11b4, and then the laser of the fourth laser 13d is focused on the light-emitting point 15 in the fourth chamber 11b4 to maintain the sustainable light emission of the light-emitting point 15.

[0071] In this embodiment, the laser focus point of the first laser 13a located in the first chamber 11b1 can be moved to any one of the working chambers (i.e., any one of the second chamber 11b2 to the fourth chamber 11b4), and those skilled in the art can design the movement of the first laser 13a according to needs.

[0072] Figure 4 and Figure 5 In the embodiment shown, the chamber where the electrode 12 is fixed can be defined as the first chamber. The light-emitting point 15 in the first chamber is defined as the first light-emitting point. The first laser 13a that maintains the light emission of the light-emitting point 15 in the first chamber is defined as the first laser. The first laser is moved from the first chamber to any one of the working chambers, which is defined as the second chamber, that is, any one of the second chamber 11b2 to the fourth chamber 11b4 can be used as the second chamber. The light-emitting point 15 in the second chamber is defined as the second light-emitting point. The laser used to maintain the sustainable light emission of the second light-emitting point is defined as the second laser.

[0073] As Figure 6 and Figure 7As shown, as needed, the laser focus point of the first laser 13a located at the second chamber 11b2 can also be moved to the third chamber 11b3, so that the ionizable medium 14 at the third chamber 11b3 is ionized to move the light-emitting point 15 into the third chamber 11b3. The laser beam emitted by the third laser 13c is focused on the light-emitting point 15 in the third chamber 11b3 to maintain the continuous emission of the light-emitting point 15 in the third chamber 11b3. At this time, the second laser 13b can simultaneously maintain the continuous emission of the light-emitting point 15 in the second chamber 11b2. Therefore, a light-emitting point 15 is formed in each of the second chamber 11b2 and the third chamber 11b3. As needed, the first laser 13a located at the third chamber 11b3 can also be moved to the fourth chamber 11b4, so that the ionizable medium 14 in the fourth chamber 11b4 is ionized to move the light-emitting point 15 into the fourth chamber 11b4. The laser beam emitted by the fourth laser 13d is focused on the light-emitting point 15 in the fourth chamber 11b4 to maintain the continuous emission of the light-emitting point 15 in the fourth chamber 11b4. Thus, a light-emitting point 15 is formed in each of the second chamber 11b2, the third chamber 11b3, and the fourth chamber 11b4.

[0074] In other embodiments, the laser focus point of the first laser 13a located at the second chamber 11b2 can also be first moved to the fourth chamber 11b4 to form a light-emitting point 15 in the fourth chamber 11b4, and the laser of the fourth laser 13d is focused on the light-emitting point 15 in the fourth chamber 11b4 to maintain the continuous emission of this light-emitting point 15. Then, the first laser 13a is moved to the third chamber 11b3 to form a light-emitting point 15, and the third laser 13c is focused on the light-emitting point 15 in the third chamber 11b3 to maintain the continuous emission of this light-emitting point 15.

[0075] In this embodiment, the laser focus point of the first laser 13a located at the second chamber 11b2 can be moved to any other working chamber (i.e., any one of the third chamber 11b3 or the fourth chamber 11b4), and those skilled in the art can design the movement of the first laser 13a as needed.

[0076] Figure 6 and Figure 7In the illustrated embodiment, the chamber with the electrode 12 fixed therein can be defined as the first chamber. The light-emitting point 15 in the first chamber is defined as the first light-emitting point. The first laser 13a that maintains the light emission of the light-emitting point 15 in the first chamber is defined as the first laser. The second chamber 11b2 is defined as the second chamber. The light-emitting point 15 in the second chamber is defined as the second light-emitting point. The second laser 13b that maintains the light emission of the light-emitting point 15 in the second chamber is defined as the second laser. Any working chamber that the first laser moves to from the second chamber is defined as the third chamber, that is, both the third chamber 11b3 and the fourth chamber 11b4 can serve as the third chamber. The light-emitting point 15 in the third chamber is defined as the third light-emitting point. The laser used to maintain the sustainable light emission of the third light-emitting point is defined as the third laser.

[0077] The optical element arranged outside the second chamber 11b2 to the fourth chamber 11b4 can receive the light emitted from each working chamber, and the optical element transmits the received light to the light-receiving device connected to the optical element.

[0078] In other embodiments, the fourth laser 13d may not be provided at the fourth chamber 11b4, and the first laser 13a moved to the fourth chamber 11b4 can be used as the laser to maintain the sustainable light emission of the light-emitting point 15.

[0079] In other embodiments, another maintenance laser may be provided at the first chamber 11b1. When the first laser 13a is moved out of the first chamber 11b1, the first chamber 11b1 can maintain light emission through the maintenance laser.

[0080] In the embodiments of the present application, only the structure of the container 11b is schematically expressed, and the laser beam emitted by the laser can maintain the sustainable light emission of the light-emitting point 15 in the container 11b. The number of chambers included in the container 11b, the number of lasers, and the relationship between the lasers and the chambers are not specifically limited. Those skilled in the art can design the container 11b and the lasers according to needs.

[0081] In the embodiments of the present application, through the movement of the first laser, light-emitting points 15 can be formed in all the working chambers in the container 11b, so that multiple light-emitting points 15 can emit light together in the container 11b. Such a design can effectively realize the linear array light emission of the light source 110, and there can be no occlusion inside and outside the working chamber, so there can be a relatively large light-emitting area, which is beneficial for the light-receiving device to receive more light from the working chamber, thereby improving the power and radiation brightness of the light source 110. In addition, the light-emitting point 15 in the container 11b can be far away from the electrode 12, thereby improving the performance of the light source.

[0082] In another embodiment, the position of the first laser 13a can also be fixed relative to the container 11b, and each of the other lasers can move relative to the container 11b. Different from Figure 4 the embodiment shown, the light source 110 further includes a fifth laser. Before moving the lasers, the first laser 13a and the second laser 13b are located at the first chamber 11b1, and the third laser 13c, the fourth laser 13d and the fifth laser are respectively located at the second chamber 11b2, the third chamber 11b3 and the fourth chamber 11b4.

[0083] During operation, the electrode 12 is energized to ionize the ionizable medium 14 in the first chamber 11b1 to form a light-emitting point 15. The laser beams of the first laser 13a and the second laser 13b located at the first chamber 11b1 are focused on the light-emitting point 15 in the first chamber 11b1. The laser focus point of the second laser 13b is moved from the first chamber 11b1 to the second chamber 11b2, so that the ionizable medium 14 in the second chamber 11b2 is ionized to form a light-emitting point 15, and the second laser 13b is fixed to maintain the sustainable emission of the light-emitting point 15 in the second chamber 11b2.

[0084] It should be noted that the laser focus point of the second laser 13b located in the first chamber 11b1 can be moved to any working chamber (i.e., any one of the second chamber 11b2 to the fourth chamber 11b4). For example, the laser focus point of the second laser 13b can also be moved from the first chamber 11b1 to the third chamber 11b3 to form a light-emitting point 15 in the third chamber 11b3, and the second laser 13b is fixed in the third chamber 11b3 to maintain the sustainable emission of the light-emitting point 15 in the third chamber 11b3. The chamber with the electrode 12 fixed can be defined as the first chamber. The light-emitting point 15 in the first chamber is defined as the first light-emitting point. The first laser 13a that maintains the sustainable emission of the light-emitting point 15 in the first chamber is defined as the first laser. The second laser 13b that focuses the laser beam on the light-emitting point 15 in the first chamber and moves is defined as the second laser. The working chamber to which the second laser moves is defined as the second chamber, and any one of the second chamber 11b2 to the fourth chamber 11b4 can be used as the second chamber. The light-emitting point 15 in the second chamber is defined as the second light-emitting point, and the second laser can be used to maintain the sustainable emission of the second light-emitting point.

[0085] As needed, the laser beam emitted by the third laser 13c can also be focused on the light-emitting point 15 in the second chamber 11b2. Move the laser focus point of the third laser 13c from the second chamber 11b2 to the third chamber 11b3, so that the ionizable medium 14 in the third chamber 11b3 is ionized to form a light-emitting point 15, and fix the third laser 13c to maintain the sustainable light emission of the light-emitting point 15 in the third chamber 11b3. At this time, the second laser 13b can simultaneously maintain the sustainable light emission of the light-emitting point 15 in the second chamber 11b2. Therefore, light-emitting points 15 can be respectively formed in the first chamber 11b1, the second chamber 11b2, and the third chamber 11b3. As needed, the laser beam of the fourth laser 13d can also be focused on the light-emitting point 15 in the third chamber 11b3. Move the laser focus point of the fourth laser 13d to the fourth chamber 11b4, so that a light-emitting point 15 is formed in the fourth chamber 11b4, and fix the fourth laser 13d to maintain the sustainable light emission of the light-emitting point 15 in the fourth chamber 11b4. Thus, sustainable light-emitting points 15 can be respectively formed in the first chamber 11b1 to the fourth chamber 11b4.

[0086] In other embodiments, it should be noted that the laser focus point of the second laser 13b located at the second chamber 11b2 can be moved to any other working chamber (i.e., any one of the third chamber 11b3 or the fourth chamber 11b4). For example, the laser focus point of the third laser 13c can also be first moved to the fourth chamber 11b4, so that a light-emitting point 15 is formed in the fourth chamber 11b4, and fix the third laser 13c to maintain the continuous light-emitting point of the light-emitting point 15 in the fourth chamber 11b4. Then focus the fifth laser located at the fourth chamber 11b4 on the light-emitting point 15 in the fourth chamber 11b4, and move the focus point of this laser to the third chamber 11b3, so that a light-emitting point 15 is formed in the third chamber 11b3, and fix this laser to maintain the continuous light emission of this light-emitting point 15. The chamber with the electrode 12 fixed can be defined as the first chamber. The light-emitting point 15 in the first chamber is defined as the first light-emitting point. The first laser 13a that maintains the sustainable light emission of the light-emitting point 15 in the first chamber is defined as the first laser. The second laser 13b that focuses the laser beam on the light-emitting point 15 in the first chamber and moves is defined as the second laser. The second chamber 11b2 to which the second laser moves is defined as the second chamber. The light-emitting point 15 in the second chamber is defined as the second light-emitting point, and the second laser can be used to maintain the continuous light emission of the second light-emitting point. The third laser 13c that focuses the laser beam on the second light-emitting point and moves is defined as the third laser. The working chamber to which the third laser moves is defined as the third chamber, and any one of the third chamber 11b3 and the fourth chamber 11b4 can be the third chamber. The light-emitting point 15 in the third chamber is defined as the third light-emitting point, and the third laser is used to maintain the continuous light emission of the third light-emitting point.

[0087] Optical elements arranged outside the second chamber 11b2 to the fourth chamber 11b4 can receive the light emitted from each working chamber, and the optical elements transmit the received light to a light receiving device connected to the optical elements.

[0088] In other embodiments, the first laser 13a may not be provided at the first chamber 11b1 either. When the second laser 13b is moved out of the first chamber 11b1, no light-emitting point 15 is formed in the first chamber 11b1.

[0089] In this embodiment, by moving the lasers, a line array light source can be constructed in the container 11b, thereby improving the power and radiation brightness of the light source, which is beneficial for the light receiving device located outside the container 11b to receive more light.

[0090] Schematically, in other embodiments, an array of light-emitting points 15 can also be formed in the chamber by moving the container 11b.

[0091] In other embodiments, each laser can also be focused on the light-emitting point 15 formed in the first chamber 11b1, and then the laser is moved from the first chamber 11b1 to the chamber where the light-emitting point 15 needs to be formed, so as to form a light-emitting point 15 in the corresponding chamber, and the moved laser is fixed to ensure that the laser beam emitted by it can be focused on the formed light-emitting point 15 to maintain the continuous emission of the light-emitting point 15.

[0092] Alternatively, each chamber can correspond to a laser. Move the first laser 13a located in the first chamber 11b1 so that it forms a continuously light-emitting light-emitting point 15 in the second chamber 11b2 and the third chamber 11b3, and then fix it at the third chamber 11b3 to maintain the continuous emission of the light-emitting point 15 in the third chamber 11b3. Then move the third laser 13c whose laser beam is focused on the light-emitting point 15 in the third chamber 11b3 to the fourth chamber 11b4, so that a light-emitting point 15 is formed in the fourth chamber 11b4. Focus the laser emitted by the fourth laser 13d on the light-emitting point 15 in the fourth chamber 11b4 to maintain the continuous emission of the light-emitting point 15 in the fourth chamber 11b4.

[0093] Schematically, the above embodiments of the line array light source only schematically illustrate the process of the laser forming the light-emitting point 15 in the chamber of the container 11b, but do not limit the arrangement of the lasers, the order of movement, and the order of forming the light-emitting point 15 in the container 11b. Those skilled in the art can design the arrangement of the lasers and the moving process according to actual needs, as long as the laser beam emitted by the moved laser can enter the chamber where the light-emitting point 15 has been formed and be focused on the light-emitting point 15 in that chamber. When the laser is moved, the light-emitting point 15 can be moved from the chamber that has emitted light to the chamber to be illuminated.

[0094] In another embodiment, the light source can also move the light-emitting point 15 by rotating the laser. For example Figure 8 As shown, the laser beams of the first laser 13a and the second laser 13b are jointly focused on the light-emitting point 15 in the first chamber ( Figure 8 The chamber is not shown). Rotate the second laser 13b so that the laser focus point of the second laser 13b moves from the light-emitting point 15 in the first chamber to the next chamber, so that a light-emitting point 15 is formed in the next chamber. Then, the second laser 13b can be fixed so that it can maintain the continuous emission of the light-emitting point 15. Rotate the third laser 13c so that the laser focus point of the third laser 13c moves from the light-emitting point 15 at the laser focus point of the second laser 13b to the next chamber, so that a light-emitting point 15 is formed in the next chamber. Then, the third laser 13c can be fixed so that it can maintain the continuous emission of the light-emitting point 15. And so on, rotate the fourth laser 13d so that the laser focus point of the fourth laser 13d moves from the light-emitting point 15 at the laser focus point of the third laser 13c to the next chamber, so that a light-emitting point 15 is formed in the next chamber. Then, the fourth laser 13d can be fixed so that it can maintain the sustainable emission of the light-emitting point 15.

[0095] The working principle of forming a line array of light-emitting points in the light source is described above. Next, the formation of a surface array of light-emitting points in the light source will be described.

[0096] Figure 9 is a schematic diagram of a frame structure of a light source 120 in an embodiment. As Figure 9 shown, the light source 120 may include a container 11c, an electrode 12, a plurality of lasers (not shown in the figure), and a plurality of optical elements (not shown in the figure). Among them, the optical elements may include, but are not limited to, mirrors, lenses, optical fibers, etc., to reflect, deflect, and focus the incident light.

[0097] As Figure 9 shown, the container 11c may include a chamber c10, a chamber c11, a chamber c12, a chamber c13, a chamber c21, a chamber c22, a chamber c23, a chamber c31, a chamber c32, and a chamber c33. Among them, the chamber c11, the chamber c12, the chamber c13, the chamber c21, the chamber c22, the chamber c23, the chamber c31, the chamber c32, and the chamber c33 may form a 3×3 chamber matrix, and adjacent chambers in the chamber matrix are interconnected. The chamber c10 may be connected to the chamber c11 in the chamber matrix. It can be understood that, Figure 9The shown container 11c includes a 3×3 matrix of chambers, which is merely an example and not a limitation of this embodiment. In fact, the number of chambers in the chamber matrix can be at least 2×N, where N is equal to or greater than 1. An ionizable medium 14 can be accommodated in the container 11c. Each chamber in the chamber matrix can be referred to as a working chamber, and several optical elements can be arranged outside the working chamber. The optical elements can transmit the light emitted from the working chamber to a light receiving device connected to the optical elements, and the light receiving device can receive the light transmitted by the optical elements.

[0098] As Figure 9 shown, the electrode 12 can include a first electrode 12a and a second electrode 12b. The first electrode 12a and the second electrode 12b are arranged at intervals in the chamber c10. When the electrode 12 is energized, the ionizable medium 14 in the chamber c10 can be ionized to form a light-emitting point 15.

[0099] The laser can be arranged outside the container 11c, and the laser beam emitted by the laser can be incident into the container 11c. At least part of the laser can move relative to the container 11c. The laser can be used to maintain the continuous light emission of the light-emitting point 15 in the container 11c. In this embodiment, the light-emitting point 15 can also be formed in any working chamber in the chamber matrix by moving the laser in any of the above linear array light source embodiments. As Figure 10 shown, by moving the laser, light-emitting points can be formed in the chamber c11, chamber c13, chamber c22, and chamber c33.

[0100] Specifically, in one implementation, lasers can be arranged at each chamber, and the laser arranged at the chamber c10 can move relative to the container 11c, and the positions of the other lasers relative to the container 11c can be fixed. After the electrode 12 forms the light-emitting point 15 at the chamber c10, the laser beam of the laser located at the chamber c10 is focused on the light-emitting point 15. Move the laser so that its laser focus point moves to the chamber c11, chamber c13, chamber c22, and chamber c33 respectively, so that light-emitting points 15 are respectively formed in the chamber c11, chamber c13, chamber c22, and chamber c33. The lasers located at the chamber c11, chamber c13, chamber c22, and chamber c33 are focused on the light-emitting points 15 in the corresponding chambers to maintain the continuous light emission of the light-emitting points 15 opposite thereto.

[0101] In another embodiment, a laser can be arranged at each chamber in the container 11c, and each laser can move relative to the container 11c. After the electrode 12 forms a light-emitting point 15 at the zero-th chamber c10, the laser located at the zero-th chamber c10 is focused on the light-emitting point 15 to maintain the sustainable emission of the light-emitting point 15. The laser located at the zero-th chamber c10 is moved so that the laser focus point moves to the first chamber c11 to form a light-emitting point 15 at the first chamber c11. The laser is fixed at the first chamber c11 to maintain the continuous emission of the light-emitting point 15. Another laser located at the first chamber c11 is focused on the light-emitting point 15 in the first chamber c11. Moving this laser to the third chamber c13 can form a light-emitting point 15 in the third chamber c13, and the laser is fixed at the third chamber c13 to maintain the sustainable emission of the light-emitting point 15. By analogy, light-emitting points can be formed at the first chamber c11, the third chamber c13, the fifth chamber c22, and the ninth chamber c33.

[0102] In this embodiment, the movement path of the laser for forming the light-emitting point 15 in the chamber matrix can be designed as needed. For example, when the laser moves from the first chamber c11 to the ninth chamber c33, it can reach the ninth chamber c33 via the fourth chamber c21, the seventh chamber c31, and the eighth chamber c32, or it can also reach the ninth chamber c33 via the second chamber c12, the fifth chamber c22, and the eighth chamber c32. In addition, the order of forming the light-emitting point 15 in the working chamber can also be designed as needed. For example, the laser focused on the zero-th chamber c10 can also be moved so that a light-emitting point is first formed in the third chamber c13 and then a light-emitting point 15 is formed in the first chamber c11, or a light-emitting point 15 can be first formed in the fifth chamber c22 and the third chamber c13 and then a light-emitting point is formed in the first chamber c11. Those skilled in the art can design the movement path of the laser and the order of forming the light-emitting point 15 in the working chamber as needed.

[0103] In this embodiment, by moving the laser, a sustainable light-emitting point 15 can be formed in any working chamber in the chamber matrix. Such a design is beneficial to forming a surface array light source with multiple light-emitting points 15, which can improve the power and radiation brightness of the light source 120. In addition, the laser can also be moved to a specific position as needed so that the light emitted by the light source 120 can be received by the light-receiving device at the specific position, thereby enabling the light source 120 to reduce the loss of light energy while meeting the requirements.

[0104] Figure 11 It is a schematic diagram of a frame structure of a light source 130 in an embodiment. As Figure 11As shown, the light source 130 may include a container, an electrode 12, four second reflection elements 16, four collimating elements 17, four first reflection elements 18, a focusing lens 19, and a plurality of lasers (not shown in the figure). Among them, the laser beam emitted by the laser may directly enter the container, or the light emitted by the laser may enter the container after being deflected, reflected, focused, etc. by one or more optical elements (such as lenses, mirrors, etc.).

[0105] As Figure 11 shown, the container may include a first chamber 11d1, a second chamber 11d2, a third chamber 11d3, a fourth chamber 11d4, and a fifth chamber 11d5. The first chamber 11d1, the second chamber 11d2, the third chamber 11d3, the fourth chamber 11d4, and the fifth chamber 11d5 are connected in sequence. The container may accommodate an ionizable medium 14. Defining the first chamber 11b1 as the first chamber, each chamber except the first chamber 11b1 may be called a working chamber, and each working chamber is used to form a light-emitting point and emit light outward.

[0106] It can be understood that Figure 4 the light source 130 shown includes four working chambers, four second reflection elements 16, four collimating elements 17, and four first reflection elements 18, which is only an example and not a limitation of this embodiment. In fact, the number of working chambers may be at least two, and the number of the second reflection elements 16, the collimating elements 17, and the first reflection elements 18 may be equal to the number of working chambers.

[0107] As Figure 11 shown, the electrode 12 may include a first electrode 12a and a second electrode 12b. The first electrode 12a and the second electrode 12b are arranged at intervals in the first chamber 11d1. When the electrode 12 is energized, the ionizable medium 14 in the first chamber 11d1 may be ionized to form a light-emitting point 15. The laser may be used to maintain the sustainable emission of the light-emitting point 15 in the container.

[0108] As Figure 11 shown, the four second reflection elements 16 may be respectively arranged outside each working chamber. The second reflection element 16 is used to reflect the light emitted from the corresponding working chamber back into the working chamber. In other embodiments, the second reflection element 16 may also be located in the chamber opposite thereto.

[0109] As Figure 11 shown, the four collimating elements 17 may be respectively arranged outside each working chamber, and the collimating elements 17 outside the same working chamber are arranged opposite to the second reflection element 16. The collimating element 17 is used to convert the emitted light emitted from the corresponding working chamber into collimated light.

[0110] AsFigure 11 As shown, four first reflection elements 18 can be respectively arranged on the side of the four collimating elements 17 away from the working chamber. The normal directions of the four first reflection elements 18 and the direction of the collimated light emitted from the collimating elements 17 can form a certain angle, which is used to reflect the collimated light converted by the corresponding collimating elements. The four first reflection elements 18 can be parallel to each other, and in the normal direction, the positions where the collimated light is incident on each first reflection element 18 do not overlap, that is, the collimated light reflected by the first reflection element 18 will not be blocked by another first reflection element 18.

[0111] As Figure 11 shown, the focusing lens 19 can be located on the side where the first reflection element 18 reflects the collimated light, and the focusing lens 19 can receive all the collimated light reflected by the first reflection element 18. The focusing lens 19 has a first focal point 19a, and this first focal point 19a is located on the side away from the first reflection element 18. The focusing lens 19 focuses all the collimated light reflected by the first reflection element 18 on the first focal point 19a. The light incident end of the light receiving device of the light source 130 can be located at the first focal point 19a to achieve the transmission of light.

[0112] In the embodiments of the present application, Figure 11 the light source 130 shown only schematically represents its basic structure, and does not limit its specific structure, the number of components, and the positional relationship between the components. Those skilled in the art can design the light source 130 according to actual needs. Figure 11 The chambers shown in [reference] can form a line array or a surface array.

[0113] The basic structure of the light source 130 has been described above, and the working principle of the light source 130 will be described below.

[0114] As Figure 11 shown, by the method of obtaining an array light source by moving the focal point of the laser as described above, the ionizable medium 14 in the working chamber in this embodiment is ionized to form a light-emitting point 15 that can continuously emit light. The first light emitted by the light-emitting point 15 in each working chamber can be emitted from the working chamber and incident on the surface of the second reflection element 16. The second reflection element 16 can reflect the incident light back into the working chamber. The second light emitted by the light-emitting point 15 in each working chamber can be emitted from the working chamber and incident on the collimating element 17. The collimating element 17 converts the incident divergent light into collimated light. The collimated light can be incident on the surface of the first reflection element 18, and the first reflection element 18 reflects the incident collimated light to the focusing lens 19. The focusing lens 19 can focus the incident collimated light on the first focal point 19a on the other side. The light receiving device located at the first focal point 19a receives the focused light, and the light receiving device can process the received light or use the light for detection or processing.

[0115] In the embodiments of the present application, the light emitted from each working chamber in the container can be focused on the first focal point 19a after passing through the collimating element 17, the first reflecting element 18, and the focusing lens 19. Such a design enables the light receiving device located at the first focal point 19a to receive the focused light. When the light source 130 operates, at least two working chambers emit light simultaneously.

[0116] The solution of this embodiment can convert more laser energy into the light energy of the light source, which is beneficial to improving the radiation brightness and power of the light source 130, thereby enhancing the performance of the light source 130. The principle will be described in detail below.

[0117] In the laser sustained plasma technology, the power of the light source is correlated with the power of the laser. In some solutions, a single laser with a relatively high power (e.g., 1000w) is used to maintain a light-emitting point. Limited by the energy absorption capacity of the ionizable medium, the effective power of this laser is relatively small (e.g., 100w), and the power of the light-emitting point that can be maintained is even smaller (e.g., 10w). In this embodiment, by designing multiple working chambers and multiple lasers corresponding to maintaining light emission (e.g., 10 working chambers and 10 lasers), the total power of all lasers can be equivalent to the power of the single laser in the above solution (e.g., 1000w), but each laser has a relatively small power (e.g., 100w), and the power of the light-emitting point that each laser can maintain can be equivalent to the power of the light-emitting point in the above solution (e.g., 10w). After the light of all the light-emitting points is focused, a relatively high power of the light source can be obtained (e.g., 10 * 10w = 100w). Therefore, the solution of this embodiment can enhance the power and radiation brightness of the light source without changing the total power of the lasers by forming an array of light-emitting points and focusing the light of all the light-emitting points. That is to say, the solution of this embodiment can convert more laser energy into the light energy of the light source and improve the energy conversion rate.

[0118] In addition, through the reflection of the second reflecting element 16 in this embodiment, light loss can be reduced and the light utilization rate can be improved, enabling the collimating element 17 to receive more reflected light, and further enhancing the radiation brightness and power of the light received by the light receiving device.

[0119] In other embodiments, the second reflecting element 16 may not be provided on one side of the working chamber.

[0120] In other embodiments, the first reflecting element opposite to the collimating element 17 may not be provided on one side of the collimating element 17. At this time, the focusing lens 19 may be provided on the side of the collimating element 17 away from the working chamber so that the collimated light emitted from the collimating element 17 is incident on the focusing lens 19. The focusing lens 19 can focus the incident collimated light on the first focal point 19a.

[0121] Figure 12 is a schematic diagram of the frame structure of the light source 130 in another embodiment. As Figure 12 shown, the difference from the light source 130 shown in Figure 11 is that the first reflection element 18 and the second reflection element 16 may not be provided, and the focusing mirror 20 is used to replace the focusing lens 19 as the focusing element.

[0122] As Figure 12 shown, the focusing mirror 20 is located in the traveling direction of the collimated light emitted by the collimating element 17. The focusing mirror 20 has a second focal point 20a, and the second focal point 20a is located on the same side of the reflecting surface of the focusing mirror 20. The focusing mirror 20 can reflect and focus the collimated light emitted by the collimating element 17 onto the second focal point 20a. The light incident end of the light receiving device can be located at the second focal point 20a to receive the focused light.

[0123] The solution in this embodiment is not only beneficial to improving the power and radiation brightness of the light source 130. Moreover, under the condition that the total power of the laser used to maintain the continuous emission of the light emitting point 15 is the same, the light source 130 in this design solution can also output light with greater radiation brightness and power, thereby effectively increasing the optical power and radiation brightness received by the light receiving device. In addition, as a focusing element, the focusing mirror 20 can not only effectively focus the light emitted from the working chamber, but also utilize the characteristic that the second focal point 20a is located on the same side of the reflecting surface to reduce the space occupied by the light source 130.

[0124] The above is only the specific implementation manner of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art within the technical scope disclosed in the present application can easily think of changes or substitutions, which should all be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claimed rights.

Claims

1. A method for using a laser-maintained plasma light source, characterized in that: include: ionizing the ionizable medium in the first chamber of the container through the electrode excitation, and forming the first luminous point; The laser is moved relative to the container, and the laser focus of the laser is moved from the first light-emitting point to a second chamber connected to the first chamber, so that the ionizable medium in the second chamber is ionized to form a second light-emitting point.

2. The method of use according to claim 1, characterized in that: Focusing the laser light of the first laser on the first light emitting point; Move the first laser relative to the container, and move the laser focus of the first laser from the first light-emitting point to the second chamber, so that the ionizable medium in the second chamber is ionized to form a second light-emitting point; The laser light of the second laser is focused on the second light emitting point.

3. The method of use according to claim 2, characterized in that: The method of use includes: The first laser moves relative to the container, and the laser focus of the first laser moves from the second light-emitting point to a third chamber connected to the second chamber, so that the ionizable medium in the third chamber is ionized to form a third light-emitting point; The laser light of the third laser is focused on the third light emitting point.

4. The method of use according to claim 1, characterized in that: The method of use includes: Focusing the laser light of the first laser on the first light emitting point; The second laser is moved relative to the container, and the laser focus of the second laser is moved from the first light-emitting point to the second chamber, so that the ionizable medium in the second chamber is ionized to form a second light-emitting point.

5. The method of use according to claim 4, characterized in that: The method of use includes: The third laser is moved relative to the container, and the laser focus of the third laser is moved from the second light-emitting point to a third chamber connected to the second chamber, so that the ionizable medium in the third chamber is ionized to form a third light-emitting point.

6. The method of use according to any one of claims 1 to 5, characterized in that: The “making the laser move relative to the container” includes: making the laser translate or rotate relative to the fixed container.

7. A laser-maintained plasma light source, characterized in that: comprising a container, an ionizable medium, a first electrode, a second electrode and a laser; The container has a first chamber and a second chamber that are connected, and the ionizable medium is contained in the first chamber and the second chamber; The first electrode and the second electrode are arranged at intervals, and the first electrode and the second electrode are used to energize the ionizable medium in the first chamber to ionize and form a first light emitting point; The laser is used to move relative to the container, so that the laser focus of the laser moves from the first light-emitting point to the second chamber, and ionizes the ionizable medium in the second chamber to form a second light-emitting point.

8. The laser-maintained plasma light source according to claim 7, characterized in that: The laser comprises a first laser and a second laser; The first laser is used to emit a laser focused on the first light-emitting point, and is used to move relative to the container so that the laser focal point of the first laser moves from the first light-emitting point to the second chamber; the second laser is fixed in the second chamber, and the second laser is used to emit a laser focused on the second light-emitting point.

9. The laser-maintained plasma light source according to claim 8, characterized in that: The first laser is used to move relative to the container so that the laser focus of the first laser moves from the second light-emitting point to a third chamber connected to the second chamber, so that the ionizable medium in the third chamber is ionized to form a third light-emitting point; The laser includes a third laser configured to emit laser light focused on the third light emitting point.

10. The laser-maintained plasma light source according to claim 7, characterized in that: The laser comprises a first laser and a second laser; The first laser is fixedly mounted in the first chamber and is used to emit laser light focused on the first light-emitting point; The second laser is used to emit laser light focused on the first light-emitting point and to move relative to the container so that the laser focus of the second laser moves from the first light-emitting point to the second chamber and ionizes the ionizable medium in the second chamber to form a second light-emitting point.

11. The laser-maintained plasma light source according to claim 10, characterized in that: The laser includes a third laser, which is used to emit laser light focused on the second light-emitting point. The third laser is also used to move relative to the container so that the laser focal point of the third laser moves from the second light-emitting point to a third chamber connected to the second chamber, so that the ionizable medium in the third chamber is ionized to form a third light-emitting point.

12. The laser-maintained plasma light source according to any one of claims 7 to 11, characterized in that: The container is fixed, and the laser is used for translation or rotation relative to the container.

13. The laser-maintained plasma light source according to any one of claims 7 to 12, characterized in that: The chamber of the container includes a plurality of working chambers, wherein the working chamber is a chamber other than the first chamber, and each of the working chambers is used to form a light-emitting point and emit light outward; The laser-maintained plasma light source comprises a focusing element and a plurality of collimating elements; one collimating element is correspondingly arranged outside one of the working chambers, and each of the collimating elements is used to convert the light emitted from the corresponding working chamber into collimated light; The focusing element is used for focusing the collimated light converted by all the collimating elements.

14. The laser-maintained plasma light source according to claim 13, characterized in that: The laser-maintained plasma light source comprises a plurality of first reflecting elements, one of the first reflecting elements is arranged corresponding to one of the collimating elements, and each of the first reflecting elements is used to reflect the collimated light converted by the collimating element corresponding thereto to the focusing element; The focusing element is used to focus the collimated light reflected by all the first reflecting elements.

15. The laser-maintained plasma light source according to claim 13 or 14, characterized in that: The laser-maintained plasma light source includes a plurality of second reflecting elements, one of the second reflecting elements is correspondingly arranged outside one of the working chambers, and one of the second reflecting elements and one of the collimating elements are respectively located on both sides of one of the working chambers; each of the second reflecting elements is used to reflect the light emitted from the corresponding working chamber back to the working chamber.

16. The laser-maintained plasma light source according to any one of claims 13 to 15, characterized in that: The focusing element includes a focusing lens or a focusing reflector.

17. An optical device, characterized in that: It comprises a light receiving device and the laser-maintained plasma light source according to any one of claims 7 to 12, wherein the light receiving device is used to receive light emitted from a cavity other than the first cavity.

18. The optical device according to claim 17, characterized in that The optical device comprises the laser-maintained plasma light source according to any one of claims 13 to 16, and the light receiving device is used to receive the light focused by the focusing element.

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