Microscopic Raman device and control method thereof

Abstract

The microscopic Raman device (100) comprises a light source part (110), an objective lens part (140), a detection device (160), a driving device (180) and a control device (200) for controlling the driving device (180). The light source unit (110) includes a plurality of light sources (111-114) configured so as to generate light having mutually different wavelengths. The objective lens unit (140) focuses the light from the light source unit (110) and irradiates the light onto a sample (SMP) to be analyzed. A detection device (160) detects Raman scattered light generated from a sample (SMP). The drive device (180) changes the relative distance between the sample (SMP) and the objective lens section (140). The control device (200) is configured so as to correct the relative distance in accordance with the wavelength of the light emitted from the used light source device.

Description

Technical Field

[0001] The present disclosure relates to a microscopic Raman device and a control method of the microscopic Raman device, and more particularly, to a focus adjustment control in the microscopic Raman device. Background Art

[0002] A micro-Raman spectroscopic analysis device (hereinafter also referred to as a "micro-Raman device") is disclosed in Japanese Patent Laid-Open No. 2021-117022 (Patent Document 1). The micro-Raman device described in Patent Document 1 includes a laser light source for excitation and a spectroscopic detector. In the micro-Raman device of Patent Document 1, Raman scattered light is generated from the sample by irradiating a laser beam from a laser light source to the sample. The generated Raman scattered light is dispersed by the spectroscopic detector, and the intensity distribution of the dispersed Raman scattered light is detected, thereby analyzing the components contained in the sample, etc.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2021-117022 Summary of the invention

[0006] Problems to be solved by the invention

[0007] In a micro-Raman device, a structure composed of an optical microscope and a Raman spectrometer is generally used. In this structure, the visible light source used in the optical microscope and the laser light source used in the Raman spectrometer are used in the same optical system. In addition, in some micro-Raman devices, it is configured to have multiple laser light sources with different wavelengths, and these laser light sources can be switched for analysis.

[0008] In a Raman microscope, light irradiated from a light source is focused by an objective lens and irradiated onto a sample. As described above, in the case of a Raman microscope using multiple light sources in the same optical system, the focusing position of the objective lens changes according to the relative difference in the wavelength of light from the light source. Therefore, when switching the light source, the focal length (i.e., focus) between the objective lens and the sample needs to be adjusted each time.

[0009] If this adjustment is performed each time the light source is switched, the adjustment will take time, thus increasing the burden on the operator. In addition, since the focus adjustment of the laser light source requires experience and skills, if the focus adjustment is performed manually, the measurement results may be biased by the operator performing the adjustment.

[0010] Furthermore, since the height from the sample stage varies for each measurement object, automatic focus adjustment requires computational processing based on the captured image, and automatic focus adjustment itself is difficult.

[0011] The present disclosure is made to solve such a problem, and an object of the present disclosure is to facilitate focus adjustment accompanying light source switching in a micro-Raman apparatus having a plurality of light source devices and to reduce variations in measurement results.

[0012] Technical means of solving problems

[0013] A microscopic Raman device according to one aspect of the present disclosure includes a light source unit, an objective lens unit, a detection device, a driving device, and a control device for controlling the driving device. The light source unit includes a plurality of light source devices configured to generate light of different wavelengths. The objective lens unit focuses the light from the light source unit and irradiates the light to the sample to be analyzed. The detection device detects the Raman scattered light generated from the sample. The driving device changes the relative distance between the sample and the objective lens unit. The control device is configured to correct the relative distance according to the wavelength of the light irradiated from the light source device used.

[0014] Another aspect of the present disclosure relates to a control method for a microscopic Raman device including a light source unit, an objective unit, a detection device, and a driving device. The light source unit includes a plurality of light source devices configured to generate light of different wavelengths. The objective unit focuses the light from the light source unit and irradiates it to a sample to be analyzed. The detection device detects the Raman scattered light generated from the sample. The driving device changes the relative distance between the sample and the objective unit. The control method includes: (a) a step of acquiring information of a plurality of light source devices; (b) a step of calculating a correction value of the relative distance based on the wavelength of light irradiated from the light source device used; and (c) a step of driving the driving device based on the correction value to change the relative distance.

[0015] Effects of the Invention

[0016] According to the Raman microscope apparatus of the present disclosure, in a configuration including a plurality of light source devices, focus adjustment accompanying switching of light source devices can be easily performed, and variations in measurement results can be reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] [ Figure 1 ] is a schematic diagram showing the structure of the microscopic Raman device of embodiment 1.

[0018] [ Figure 2 ] is a diagram showing an example of the structure of the light source device of embodiment 1.

[0019] [ Figure 3 ] is a diagram for illustrating an overview of focus correction control according to embodiment 1.

[0020] [ Figure 4 ] is a diagram showing an example of information stored in a storage device in Implementation Example 1.

[0021] [ Figure 5 ] is a diagram for explaining the correction of the driving range of the stage accompanying the focus correction control.

[0022] [ Figure 6 ] is a flowchart showing the details of the focus correction control of embodiment 1.

[0023] [ Figure 7 ] is a diagram showing the structure of a microscopic Raman device according to embodiment 2.

[0024] [ Figure 8 ] is a diagram for illustrating an overview of focus correction control according to embodiment 2.

[0025] [ Fig. 9 ] is a diagram showing an example of information stored in a storage device in Implementation Method 2.

[0026] [ Fig.10 ] is a flowchart showing the details of the focus correction control of embodiment 2. DETAILED DESCRIPTION

[0027] Hereinafter, the embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. In addition, the same or corresponding parts in the drawings are denoted by the same reference numerals, and their description will not be repeated.

[0028] [Implementation Method 1]

[0029] (Structure of Micro-Raman Device)

[0030] Figure 1 2 is a schematic diagram showing the structure of a microscopic Raman device 100 according to Embodiment 1. Figure 1 The Raman microscope device 100 includes a light source unit 110, a collimating lens 120, a beam splitter 130, a beam splitter 135, an objective lens unit 140, a stage 150 for mounting a sample SMP, a detection device 160, a filter 162, a focusing lens 164, a focusing lens 175, a slit 166, a camera device 170, and a driving device 180 as a structure of an optical system. In addition, the Raman microscope device 100 also includes a control device 200 for uniformly controlling the entire device. In addition, in Figure 1 In the figure, the mounting surface of the stage 150 is set as the XY plane, and the normal direction of the mounting surface is set as the Z-axis direction.

[0031] like Figure 2 As described later in , the light source unit 110 includes a plurality of light source devices. As the plurality of light source devices, for example, a visible light source, a laser light source, an infrared light source, and / or an ultraviolet light source can be used.

[0032] The light emitted from the light source unit 110 is substantially collimated by the collimating lens 120 and directed toward Figure 1 The light passing through the collimating lens 120 further passes through the beam splitter 130 and the beam splitter 135, and enters the objective lens 140. The light is focused in the objective lens 140, and irradiated to the sample SMP placed on the stage 150.

[0033] When the light source device is a visible light source, the light reflected by the sample SMP passes through the objective lens portion 140 and is reflected on the reflection surface of the beam splitter 135. Then, the light is focused by the focusing lens 175 and irradiated to the imaging device 170. The imaging device 170 is, for example, a charge coupled device (CCD) camera. The image of the sample SMP obtained by the imaging device 170 is output to the control device 200. In this case, the micro Raman device 100 functions as an optical microscope.

[0034] When the light source device is a laser light source, by irradiating the sample SMP with laser light, Raman scattered light corresponding to the irradiated laser light is generated from the sample SMP. The generated Raman scattered light passes through the beam splitter 135 and is reflected by the reflection surface of the beam splitter 130. The Raman scattered light reflected by the beam splitter 130 is incident on the filter 162. In this case, the Raman microscope device 100 functions as a Raman spectrometer.

[0035] The filter 162 is a long pass filter, and is a filter that allows light on the long wavelength side to pass and blocks light on the short wavelength side. The cut-off wavelength of the filter 162 is set to the long wavelength side slightly longer than the wavelength of the laser (irradiation light) irradiated from the light source device. Thus, the filter 162 blocks the reflected light based on the sample SMP and the Raman scattered light (anti-Stokes light) on the short wavelength side compared to the irradiation light, and allows the Raman scattered light (Stokes light) on the long wavelength side compared to the irradiation light to pass. In addition, when using multiple laser light sources with different wavelengths, filters suitable for each laser light source are selectively used.

[0036] The Raman scattered light that has passed through the filter 162 is condensed by the condenser lens 164. An aperture 166 having a microscopic opening (pinhole) is disposed at a condensing point 167 of the Raman scattered light. The Raman scattered light that has passed through the pinhole of the aperture 166 enters the detection device 160.

[0037] In the detection device 160, although not shown in the figure, a spectrometer and a line sensor for detecting the intensity of the scattered light after the spectrometry are provided. The beam splitter is typically a diffraction grating (grating). In addition, as the line sensor, for example, a CCD detector is used. The spectroscopic intensity detected by the detection device 160 is output to the control device 200.

[0038] When an infrared light source or an ultraviolet light source is used as the light source device, the reflected light from the sample SMP is split and measured by the detection device 160, and the substance contained in the sample SMP is identified based on the light absorption by the sample SMP.

[0039] The control device 200 includes a central processing unit (CPU) 201 as a computing device, and a storage device 202. The storage device 202 includes a non-volatile memory or a volatile memory such as a read-only memory (ROM) or a random access memory (RAM), and / or a large-capacity storage device such as a hard disk drive (HDD) or a solid state drive (SSD). The CPU 201 reads out the program and data stored in the storage device 202, and controls the micro-Raman device 100 as a whole.

[0040] The control device 200 is connected to an input device 210 and a display device 220. The input device 210 is, for example, a keyboard, a mouse, a pointing device, a touch screen, etc., and receives user operations. The display device 220 is, for example, a liquid crystal display (LCD) or an organic electroluminescence (EL) display, and displays an image of the sample SMP captured by the camera 170, the intensity distribution of the Raman scattered light detected by the detection device 160, and the operating state of the device.

[0041] The stage 150 is configured to be movable in the X-axis direction, the Y-axis direction, and the Z-axis direction by the driving device 180, and the driving device 180 is operated according to the command from the control device 200. By moving the stage 150 in the X-axis and / or Y-axis direction, the measurement position of the sample SMP can be changed. In addition, by moving the stage 150 in the Z-axis direction, the relative distance between the objective lens part 140 and the sample SMP can be changed to adjust the focus of the objective lens part 140. In addition, it can also be configured to replace the movement of the stage 150, and move the optical system including the objective lens part 140, thereby changing the measurement position and adjusting the focus.

[0042] Figure 2 FIG. 1 is a diagram for explaining an example of the structure of the light source unit 110 in the Raman microscope apparatus 100 according to the first embodiment. Figure 2In the example, the light source unit 110 includes a plurality of light source devices and reflectors M1 to M4. The plurality of light source devices include a visible light source 111, a laser light source 112, a laser light source 113, and an infrared light source 114. The laser light sources 112 and 113 have different wavelengths.

[0043] The reflector M1 is arranged on the optical axis connecting the visible light source 111 and the objective lens unit 140. The reflector M1 allows the visible light L1 from the visible light source 111 to pass through, and reflects the light L2 to the light L4 from the reflectors M2 to M4. The reflector M2 is arranged on the optical axis of the laser light source 112, reflects the laser light L2 from the laser light source 112, and allows the light L3 from the reflector M3 and the light L4 from the reflector M4 to pass through. The reflector M3 is arranged on the optical axis of the laser light source 113, reflects the laser light L3 from the laser light source 113, and allows the infrared light L4 from the reflector M4 to pass through. The reflector M4 is arranged on the optical axis of the infrared light source 114, and reflects the infrared light L4 from the infrared light source 114.

[0044] The visible light L1 that has passed through the reflection mirror M1 , and the laser light L2 , laser light L3 , and infrared light L4 that have been reflected by the reflection mirror M1 pass through the beam splitter 130 , the beam splitter 135 , and the objective lens unit 140 , and are irradiated onto the sample SMP.

[0045] Reflected light L5 from the sample SMP with respect to the visible light L1 from the visible light source 111 passes through the objective lens section 140, is further reflected by the beam splitter 135, and enters the imaging device 170. Raman scattered light L6 based on the laser light L2 from the laser light source 112 and Raman scattered light L7 based on the laser light L3 from the laser light source 113 pass through the objective lens section 140 and the beam splitter 135, are reflected by the beam splitter 130, and enter the detection device 160. Reflected light L8 from the sample SMP with respect to the infrared light L4 from the infrared light source 114 passes through the objective lens section 140 and the beam splitter 135, is reflected by the beam splitter 130, and enters the detection device 160.

[0046] The switching of each light source device can be performed by switching the supply and interruption of power to each light source device, or by opening and closing a shutter (not shown) disposed between each light source device and its corresponding reflector. Figure 2 The structure of the light source unit 110 shown is an example, and any other light source device may be used as long as it can be switched. Figure 2 Other structures.

[0047] (Explanation of focus correction control)

[0048] In the Raman microscope device 100 as described above, a plurality of light source devices such as a visible light source, a laser light source, an infrared light source, and / or an ultraviolet light source are used as the light source unit 110 for irradiating the sample SMP. Since the wavelengths of the light used in these different light source devices are different from each other, when the light source device used is switched, the focusing position (focal length) of the objective lens unit 140 changes due to the relative difference in the wavelength of the light from the light source device. Therefore, when switching the light source device, it is necessary to adjust the focal length (focus adjustment) between the objective lens unit 140 and the sample SMP each time.

[0049] If such focus adjustment is performed each time the light source is switched, the adjustment operation takes time, so the total operation time becomes longer and the burden on the operator becomes greater. In addition, when using a laser light source, it is necessary to perform focus adjustment while observing the peak value of the intensity of the generated Raman scattered light, but since this adjustment operation requires experience and technology, when the focus adjustment is performed manually, the measurement result may be deviated by the operator performing the adjustment.

[0050] Furthermore, since the height from the sample stage varies for each measurement object, automatic focus adjustment requires computational processing based on the captured image, and automatic focus adjustment itself is difficult.

[0051] Therefore, in the first embodiment, the correction value corresponding to the relative wavelength of the light source device to be used is stored in advance in the storage device, and when the light source is switched, the focus correction control is performed to automatically adjust the focus according to the correction value of the light source device to be used. By performing such focus correction control, the workload and the operation time can be reduced compared with the case of manually adjusting the focus, and the deviation in the measurement result can be reduced.

[0052] Figure 3 This is a diagram for explaining an overview of focus correction control according to the first embodiment. Figure 3 The left figure (A) in FIG. 1 is a state where the sample SMP is focused when using the visible light source 111. The coordinate of the stage 150 at this time is defined as z.

[0053] In the state of the left figure (A), when the visible light source 111 is switched to the laser light source 112 (middle figure (B)), due to the difference in wavelength between the visible light L1 and the laser light L2, the focusing position of the laser light L2 based on the objective lens unit 140 changes from the position on the sample SMP in the left figure (A) to a position shifted upward by "a". That is, it becomes a state of focus deviation.

[0054] like Figure 3As shown in the right figure (C), the control device 200 stores the correction amount corresponding to the offset "a" of the focal position of the laser L2 relative to the focal position of the visible light L1 in the storage device 202 in advance, and when the light source device used is switched, the stage 150 is moved to the position (coordinate z+a) taking this correction amount into account.

[0055] Figure 4 FIG. 2 is a diagram showing an example of information stored in the storage device 202. Figure 4 In the example, the information includes the wavelength of light irradiated from each light source device, and a reference correction value of the focus position. Here, regarding the reference correction value, for example, the focus position in the case of the visible light source 111 (light source 1) is used as a reference (correction value = 0), and for each light source device, the offset of the focus distance in the case of the visible light source 111 is set as the correction value. In addition, the correction value of each light source device can be set by calculating it through theoretical calculation based on the relative wavelength of each light source device, or the offset during experimental adjustment using a reference sample can be set as the correction value. In addition, only the wavelength of each light source device can be stored in the storage device 202, and the correction value can be calculated each time the light source device is switched based on the wavelength difference before and after the switching.

[0056] In the initial measurement of the target sample SMP, since the thickness of the sample is unknown, the operator performs focus adjustment manually or using the automatic focus function. Thereafter, when the light source device to be used is switched, the CPU 201 of the control device 200 refers to the information stored in the storage device 202 and drives the stage 150 based on the difference between the reference correction values ​​of the light source device before and after the switching. Through such control, the focus adjustment to the focus position suitable for the light source device used is automatically performed. In addition, the user can set whether the automatic correction function of this focus adjustment is effective (ON) or invalid (OFF) by setting a hardware switch or a software switch in the display screen.

[0057] Here, when the position of stage 150 is automatically adjusted by focus correction control, if the coordinates of stage 150 displayed on display device 220 change, the user may mistakenly believe that the focus position has shifted due to his / her own erroneous operation, etc. Therefore, when focus correction control is performed, it is preferable not to reflect the display of the stage position on display device 220 and not to change the display coordinates of stage 150.

[0058] On the other hand, when the display position of the stage 150 is different from the actual position, if the stage 150 is operated based on the display position, Figure 5 As shown in the upper part of FIG, the movable range of the stage 150 displayed on the display may exceed the movable range of the machine. Figure 3If the focus position is corrected by the correction amount a in the positive direction of the Z axis (the upward direction of the machine), the movable range on the upper limit side may exceed the mechanical upper limit. Figure 5 As shown in the lower part of , when the position of the stage 150 is changed by the correction amount a through the focus correction control, the movable range is changed corresponding to the correction amount a. Specifically, the upper limit value max of the movable range is changed to (max-a), and the lower limit value min is changed to (min-a). Thus, after the focus correction control is implemented, in the case where the user manually raises or lowers the stage 150, the movement exceeding the movable range of the machine can be suppressed, thereby preventing the machine from being damaged.

[0059] Furthermore, the display change of the coordinates of the stage 150 accompanying the focus correction control as described above is preferably automatically reset when the sample to be measured is changed and / or when the focus is adjusted manually or by an automatic focus function. Alternatively, it may be reset by a user's operation.

[0060] Figure 6 This is a flowchart showing the details of the focus correction control according to the first embodiment. Figure 6 and the following Fig.10 The flowchart shown is an example, and is realized by the CPU 201 executing a program stored in the storage device 202 of the control device 200. In addition, a part or all of the processing in the flowchart may be realized by a hardware circuit in the control device 200.

[0061] Reference Figure 6 In step (hereinafter, "step" is referred to as S) 100, the control device 200 determines whether it is the first measurement of the sample SMP to be measured. In the case of the first measurement (YES in S100), since the focus of the objective lens unit 140 has not been adjusted for the sample SMP, the process enters S170, and the control device 200 adjusts the focus of the objective lens unit 140 through the existing automatic focusing function. Alternatively, the control device 200 outputs a display to the display device 220 prompting the user to manually adjust the focus.

[0062] If it is not the first measurement, that is, if the focus adjustment has been performed on the sample SMP to be measured (NO in S100), the control device 200 advances the process to S110 to determine whether the light source device to be used has been switched. The detection of the light source switching can be based on the user's input to the input device 210, or can be automatically detected based on the ON / OFF of the light source device or the opening and closing action of the shutter.

[0063] If the light source is not switched (No in S110), the subsequent processing is skipped, the current setting is maintained and the measurement is continued. If the light source is switched (Yes in S110), the processing proceeds to S120, and the control device 200 determines whether the automatic focus correction function is enabled.

[0064] If the automatic correction function is set to be invalid (No in S120), the subsequent processing is skipped. In this case, the focus adjustment is performed manually by the user. If the automatic correction function is set to be valid (Yes in S120), the processing proceeds to S130, and the control device 200 reads the information stored in the storage device 202 ( Figure 4 ), and obtain the wavelength / or reference correction value for the light source device before and after the switching. Then, in S140, the control device 200 uses the acquired information to calculate a correction value based on the wavelength difference of the light source device before and after the switching. Furthermore, the control device 200 in S150, as in Figure 5 As described in , the movable range of the stage 150 in the Z-axis direction is corrected. Thereafter, in S160, the control device 200 drives the stage 150 in the Z-axis direction based on the calculated correction value to perform focus adjustment.

[0065] By controlling according to the above processing, in a micro Raman apparatus having a plurality of light source devices, focus adjustment can be automatically performed corresponding to the light source device to be used. Thus, compared with the case of manually performing focus adjustment, the operator's workload and operation time can be reduced, and the deviation in the measurement result can be reduced.

[0066] The “visible light source 111” in Embodiment 1 corresponds to the “first light source device” in the present disclosure. The “laser light source 112” and “laser light source 113” in Embodiment 1 correspond to the “second light source device” and “third light source device” in the present disclosure, respectively. The “infrared light source 114” in Embodiment 1 corresponds to the “fourth light source device” in the present disclosure.

[0067] [Implementation Method 2]

[0068] In the first embodiment, the configuration has been described in which, when the light source device to be used is switched, the focus is automatically adjusted according to the wavelength of light from each light source device.

[0069] On the other hand, in a Raman microscope, a plurality of objective lenses are sometimes provided to change the magnification of the measurement area of ​​the sample to be measured. Even when the same light source device is used, if the objective lens is switched, the focus needs to be adjusted again because the size and focal length of the lens used are different.

[0070] In the second embodiment, a configuration is described in which, in a microscopic Raman apparatus provided with a plurality of objective lenses, focus adjustment is automatically performed according to the objective lens used for measurement.

[0071] Figure 7 FIG. 1 is a diagram showing a structure of a Raman microscope apparatus 100A according to Embodiment 2. In the Raman microscope apparatus 100A, Figure 2 The objective lens unit 140 in the Raman microscope device 100 described in the previous section is replaced with the objective lens unit 140A. Figure 7 In the Figure 2 Repeating parts.

[0072] Reference Figure 7 The objective lens unit 140A of the Raman microscope 100A includes objective lenses 141 to 143 having different focal lengths. The objective lenses 141 to 143 are mounted on a rotating or sliding bracket (not shown) and can be switched to a desired objective lens by moving the bracket.

[0073] Generally speaking, the greater the magnification of the objective lens, the longer the focal length. Therefore, even if the focus of a certain objective lens is adjusted, if the objective lens is switched to another one, the focus position will also change.

[0074] For example, Figure 8 As shown in the left figure (A) of FIG. 1 , when the objective lens 142 has completed the focus adjustment, if the objective lens 141 (middle figure (B)) with a shorter focal length than the objective lens 142 is switched, the focusing position changes from the position on the sample SMP in the left figure (A) to a position shifted upward by "b". On the contrary, if the objective lens 143 with a longer focal length than the objective lens 142 is switched, the focusing position changes to a position lower than the position on the sample SMP.

[0075] Since the specifications of the focal positions of the objective lenses are known in advance, the focal position differences between the objective lenses to be used are stored as correction values ​​in the storage device 202, and the stage 150 is moved according to the correction values ​​when switching the objective lenses, thereby Figure 8 The focus is automatically adjusted as shown in the right figure (C).

[0076] Fig. 9 FIG. 2 is a diagram showing an example of information stored in the storage device 202 in Embodiment 2. Fig. 9 In the example of , the information includes the wavelength of light emitted from each light source device and the reference correction value corresponding to each objective lens. Regarding the reference correction value, the focus position when the objective lens 141 (lens 1) with the shortest focus position is used in the visible light source 111 is used as the reference (correction value = 0), and the correction value is set taking into account the offset of the focal length when switching the objective lens and the offset when switching the light source device. The control device 200 can use Fig. 9Focus correction control is automatically performed with the correction value shown.

[0077] In addition, in Embodiment 2, similarly to Embodiment 1, the display of the stage position during focus correction control is maintained and the movable range is corrected. In addition, as described above, since the device size (length in the optical axis direction) of the object lens changes according to the magnification, in the correction of the movable range, it is preferred to also consider the device size of the object lens to set the movable range. The larger the magnification, the larger the device size, so the easier it is for the sample SMP to contact the object lens. Therefore, in particular, for the lower limit of the movable range, in addition to the difference in focal length, it is also necessary to consider the device size to set.

[0078] Fig.10 FIG. 4 is a flowchart showing the details of the focus correction control according to Embodiment 2. Fig.10 In the flowchart of , a case where only the objective lens is switched without switching the light source device to be used is described.

[0079] Reference Fig.10 In S200, the control device 200 determines whether it is the first measurement of the sample SMP as the measurement object. In the case of the first measurement (Yes in S200), since the focus of the objective lens unit 140A has not been adjusted for the sample SMP, the process enters S270, and the control device 200 adjusts the focus of the objective lens unit 140 through the existing automatic focusing function. Alternatively, the control device 200 outputs a display to the display device 220 prompting the user to manually adjust the focus.

[0080] If this is not the first measurement, that is, if the focus of the sample SMP to be measured has already been adjusted (No in S200 ), the control device 200 advances the process to S210 to determine whether the objective lens to be used has been switched.

[0081] If the objective lens is not switched (No in S210), the subsequent processing is skipped, the current setting is maintained and the measurement is continued. If the objective lens is switched (Yes in S210), the processing proceeds to S220, and the control device 200 determines whether the automatic focus correction function is enabled.

[0082] If the automatic correction function is set to be invalid (No in S220), the subsequent processing is skipped. In this case, the focus adjustment is performed manually by the user. If the automatic correction function is set to be valid (Yes in S220), the processing proceeds to S230, and the control device 200 reads the information stored in the storage device 202 ( Fig. 9), obtains the reference correction value corresponding to the type (focal length) of the object lens before and after the switching. Then, in S240, the control device 200 uses the acquired information to calculate the correction value based on the focal length difference of the object lens before and after the switching.

[0083] Furthermore, the control device 200 corrects the movable range of the Z-axis direction of the stage 150 in S250. At this time, in addition to the correction value based on the focal length, the movable range is set in consideration of the device size of the objective lens. Thereafter, the control device 200 drives the stage 150 on the Z-axis based on the calculated correction value in S260 to perform focus adjustment.

[0084] In addition, when the light source device is switched in addition to the objective lens, by using Fig. 9 The correction values ​​shown can also be used to perform focus adjustment corresponding to the wavelength of light irradiated from the light source device and the type of objective lens.

[0085] By controlling according to the above processing, in a microscope Raman device having a plurality of objective lenses, focus adjustment can be automatically performed corresponding to the objective lens used. Thus, compared with the case where the focus adjustment is performed manually, the operator's workload and operation time can be reduced, and the deviation in the measurement result can be reduced.

[0086] [Example]

[0087] Those skilled in the art will appreciate that the exemplary embodiments are specific examples of the following embodiments.

[0088] (Item 1) A microscopic Raman device of one embodiment includes a light source unit, an objective lens unit, a detection device, a driving device, and a control device for controlling the driving device. The light source unit includes a plurality of light source devices configured to generate light of different wavelengths. The objective lens unit focuses the light from the light source unit and irradiates it to a sample to be analyzed. The detection device detects the Raman scattered light generated from the sample. The driving device changes the relative distance between the sample and the objective lens unit. The control device is configured to correct the relative distance according to the wavelength of the light irradiated from the light source device used.

[0089] According to the micro-Raman device described in the first item, in a structure including a plurality of light source devices, the relative distance between the objective lens and the sample is corrected according to the wavelength of the light source device used. That is, when the light source device is switched, the focus adjustment is automatically performed according to the difference in wavelength of the light source before and after the switching. Therefore, in a micro-Raman device having a plurality of light source devices, the focus adjustment accompanying the switching of the light source can be easily performed, and the deviation of the measurement result can be reduced.

[0090] (Second item) According to the Raman microscope device described in the first item, the control device includes: a processor; and a storage device, for each of the plurality of light source devices, storing a correction value relative to a reference distance between the sample and the objective lens unit. The processor obtains the correction value corresponding to the light source device used from the storage device to correct the relative distance.

[0091] According to the micro-Raman device described in the second aspect, the focus can be adjusted based on the correction value stored in the storage device by the processor of the control device. Therefore, the focus adjustment accompanying the switching of the light source can be easily performed, and the variation of the measurement result can be reduced.

[0092] (Item 3) A micro-Raman device according to Item 1, wherein the control device comprises: a processor; and a storage device for storing the wavelengths of the respective light source devices.

[0093] When the light source device to be used is changed, the processor acquires the wavelengths of the light source devices before and after the change from the storage device, and corrects the relative distance based on the relative difference in wavelength between the light source devices.

[0094] According to the micro-Raman device described in the third aspect, the processor can perform focus adjustment based on the information of the wavelength of each light source device stored in the storage device. Therefore, focus adjustment accompanying light source switching can be easily performed, and the deviation of measurement results can be reduced.

[0095] (Item 4) A micro-Raman device according to any one of Items 1 to 3, wherein the plurality of light source devices include: a first light source device that generates visible light; and a second light source device that generates laser light of a first wavelength.

[0096] According to the micro-Raman device described in the fourth item, the focus offset between the visible light source and the laser light source can be automatically adjusted.

[0097] (Item 5) According to the micro-Raman device described in Item 4, the multiple light source devices also include a third light source device, and the third light source device generates a laser with a second wavelength different from the first wavelength.

[0098] According to the micro-Raman device described in the fifth item, the focus offset between the visible light source and the two laser light sources with different wavelengths can be automatically adjusted.

[0099] (Item 6) The micro-Raman device according to Item 4 or Item 5, wherein the plurality of light source devices further includes a fourth light source device that generates infrared light.

[0100] According to the micro-Raman device described in the sixth item, when using an infrared light source, the focus offset between the infrared light source and the visible light source and / or the laser light source can be automatically adjusted.

[0101] (Item 7) A microscopic Raman device according to any one of Items 1 to 3, wherein the plurality of light source devices include: a second light source device that generates laser light of a first wavelength; and a third light source device that generates laser light of a second wavelength different from the first wavelength.

[0102] According to the micro-Raman device described in the seventh item, the focus offset between two laser light sources with different wavelengths can be automatically adjusted.

[0103] (Item 8) The Raman microscope device according to any one of Items 1 to 7, further comprising a stage for mounting the sample, wherein the driving device drives the stage to change the relative distance.

[0104] According to the micro-Raman apparatus described in the eighth aspect, the control device can perform focus adjustment by moving the stage for mounting the sample using the driving device.

[0105] (Item 9) The Raman microscope according to Item 8 further includes a display device for displaying the position of the stage. Even when the control device corrects the relative distance due to a change in the light source device used, the display device does not reflect the correction in the display of the position of the stage.

[0106] According to the Raman microscope device described in item 9, even when the focus is automatically adjusted by switching the light source device, the display of the stage position on the display device is not changed, thereby preventing the user from mistakenly believing that an erroneous operation has been performed.

[0107] (Item 10) The micro-Raman apparatus according to any one of Items 1 to 9, wherein the control device is configured to be able to set whether to perform a relative distance correction corresponding to the light source device used.

[0108] According to the Raman microscope device described in item 10, the user can set whether to perform automatic focus adjustment accompanying the switching of the light source device. Therefore, when performing automatic focus adjustment, if a risk such as collision between the objective lens and the sample is predicted, the risk can be prevented.

[0109] (Item 11) The micro-Raman apparatus according to any one of Items 1 to 10, wherein the objective lens unit includes a plurality of objective lenses having mutually different focal lengths, and the control device is configured to correct the relative distance according to the objective lens used.

[0110] According to the micro-Raman device described in the eleventh item, in a structure having a plurality of objective lenses, focus adjustment can be automatically performed according to the objective lenses. Therefore, in the micro-Raman device having a plurality of objective lenses, focus adjustment accompanying switching of the objective lenses can be easily performed, and deviation of measurement results can be reduced.

[0111] (Item 12) A control method for a microscopic Raman device according to another embodiment relates to a control method for a microscopic Raman device including a light source unit, an objective lens unit, a detection device, and a driving device. The light source unit includes a plurality of light source devices configured to generate light of different wavelengths. The objective lens unit focuses the light from the light source unit and irradiates the light to a sample to be analyzed. The detection device detects the Raman scattered light generated from the sample. The driving device changes the relative distance between the sample and the objective lens unit. The control method includes: (a) a step of acquiring information of a plurality of light source devices; (b) a step of calculating a correction value of the relative distance based on the wavelength of light irradiated from the light source device used; and (c) a step of driving the driving device based on the correction value to change the relative distance.

[0112] According to the control method of the micro-Raman device described in the twelfth item, in a structure including a plurality of light source devices, the relative distance between the objective lens and the sample is corrected according to the wavelength of the light source device used. That is, when the light source device is switched, the focus adjustment is automatically performed according to the difference in wavelength of the light source before and after the switching. Therefore, in a micro-Raman device having a plurality of light source devices, the focus adjustment accompanying the switching of the light source can be easily performed, and the deviation of the measurement result can be reduced.

[0113] The embodiments disclosed this time should be considered as illustrative in all aspects and not restrictive. The scope of the present invention is indicated by the claims rather than the description of the embodiments, and is intended to include all modifications within the meaning and scope equivalent to the claims.

[0114] Description of Figure Numbers

[0115] 100, 100A: Micro Raman device

[0116] 110: Light source

[0117] 111: Visible light source

[0118] 112, 113: Laser light source

[0119] 114: Infrared light source

[0120] 120: Collimating lens

[0121] 130, 135: Beam splitter

[0122] 140, 140A: Objective lens

[0123] 141~143: Objective lens

[0124] 150: Carrier

[0125] 180: Drive device

[0126] 160: Detection device

[0127] 162: Filter

[0128] 164, 175: Focusing lens

[0129] 166: Slit

[0130] 167: Spotlight

[0131] 170: Camera

[0132] 200: Control device

[0133] 201: CPU

[0134] 202: Storage device

[0135] 210: Input device

[0136] 220: Display device

[0137] M1~M4:Reflector

[0138] SMP: Sample.

Claims

1. A microscopic Raman device, include: A light source unit including a plurality of light source devices configured to generate light of different wavelengths; an objective lens unit that focuses the light from the light source unit and irradiates the light to a sample to be analyzed; a detection device for detecting Raman scattered light generated from the sample; A driving device, used to change the relative distance between the sample and the objective lens portion; as well as a control device for controlling the driving device, The control device is configured to correct the relative distance according to the wavelength of light irradiated from the light source device used.

2. The Raman microscope device according to claim 1, wherein The control device include: processor; as well as a storage device storing, for each of the plurality of light source devices, a correction value relative to a reference distance between the sample and the objective lens unit, The processor obtains a correction value corresponding to the light source device in use from the storage device to correct the relative distance.

3. The Raman microscope device according to claim 1, wherein The control device include: processor; as well as a storage device for storing the wavelengths of the plurality of light source devices, When the light source device to be used is changed, the processor acquires the wavelengths of the light source devices before and after the change from the storage device, and corrects the relative distance based on the relative difference in wavelength between the light source devices.

4. The Raman microscope device according to claim 1, wherein The plurality of light source devices include: A first light source device generates visible light; as well as The second light source device generates laser light of a first wavelength. 5 . The micro-Raman device according to claim 4 , wherein the plurality of light source devices further comprises a third light source device, the third light source device generating laser light of a second wavelength different from the first wavelength. The micro-Raman device according to claim 4 , wherein the plurality of light source devices further comprises a fourth light source device for generating infrared light.

7. The Raman microscope device according to claim 1, wherein The plurality of light source devices include: A second light source device generates laser light of a first wavelength; as well as The third light source device generates laser light of a second wavelength different from the first wavelength.

8. The Raman microscope device according to claim 1, further comprising a stage for mounting the sample. The driving device drives the stage to change the relative distance.

9. The Raman microscope device according to claim 8, further comprising a display device for displaying the position of the stage, Even when the control device corrects the relative distance due to a change in the light source device to be used, the correction is not reflected in the display of the position of the stage on the display device. 10 . The Raman microscope apparatus according to claim 1 , wherein the control device is configured to be able to set whether to perform correction of the relative distance corresponding to the light source device used.

11. The Raman microscope device according to claim 1, wherein the objective lens section comprises a plurality of objective lenses having mutually different focal lengths, The control device is configured to correct the relative distance according to the objective lens used.

12. A method for controlling a microscopic Raman device, which is a method for controlling a microscopic Raman device, wherein The Raman microscope include: A light source unit including a plurality of light source devices configured to generate light of different wavelengths; an objective lens unit that focuses the light from the light source unit and irradiates the light to a sample to be analyzed; a detection device for detecting Raman scattered light generated from the sample; as well as a driving device for changing the relative distance between the sample and the objective lens portion, The control method comprises: A step of acquiring information of the plurality of light source devices; A step of calculating a correction value of the relative distance according to the wavelength of light emitted from the light source device used; and A step of driving the driving device based on the correction value to change the relative distance.

Images