Vacuum presoaking tank of vertical continuous electroplating equipment

Abstract

The invention discloses a vacuum presoaking tank of vertical continuous electroplating equipment, and relates to the technical field of electroplating. Comprising a machine body, a first connecting pipe, a second connecting pipe and a liquid storage tank, the upper end of the left wall of an inner cavity of the machine body is movably connected with a top cover and a liquid immersion tank through a sealing air cylinder, the liquid immersion tank is arranged below the top cover, a bottom block is fixed to the bottom of an inner cavity of the liquid immersion tank, and a first liquid flowing tank and a second liquid flowing tank are formed in the left side of the top of the bottom block; the bottom block, the fixing frame and the mounting frame are arranged, so that the size of a pre-infiltrated cavity where the packaging carrier plates with different thicknesses are located is adjusted in a self-adaptive mode along with the pressure intensity change during vacuum suction, and the size of the pre-infiltrated cavity is adjusted in a self-adaptive mode, so that the size of the pre-infiltrated cavity is adjusted in a self-adaptive mode, and the size of the pre-infiltrated cavity is adjusted in a self-adaptive mode. By arranging the fixing frame, the mounting frame, the opening and closing pore plate assembly and the opening and closing pore plate assembly, in the process that the cavity of the pre-impregnation tank is filled with the pre-impregnation liquid, the fluidity of the pre-impregnation liquid in the cavity of the pre-impregnation tank is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of electroplating, and specifically to a vacuum pre-impregnation tank for a vertical continuous electroplating device. Background Art

[0002] A vacuum pre-impregnation tank for a vertical continuous electroplating device is an important device used in the electronic manufacturing process, mainly for metal deposition on printed circuit boards (PCBs) and other similar substrates. This device can, before electroplating the package carrier board, drain the internal air bubbles in the holes such as through-silicon vias (TSVs) engraved on the board-level package carrier board through pre-wetting with plasma water or a specific electroplating pretreatment solution, and at the same time make the substrate surface more active, which is beneficial to improving the adsorption efficiency and quality of metal ions in the subsequent electroplating process.

[0003] However, in the actual production and use process of the existing vacuum pre-impregnation tank, during the vacuum pre-wetting process of the pre-impregnation tank with a fixed cavity size for package carrier boards of different thicknesses, the vacuum suction link in the pre-impregnation tank takes a relatively long time, reducing the efficiency of continuous electroplating production of the package carrier board. As a result, the existing vacuum pre-impregnation tank is not convenient to adaptively adjust the cavity size in the pre-impregnation tank according to the pressure change during vacuum suction in combination with the thickness of the package carrier board to improve the vacuum pumping speed. On the other hand, after the existing pre-impregnation tank finishes vacuum pumping, it needs to be filled with the pre-impregnation solution, and then equipment such as shaking and swinging is used to increase the fluidity of the pre-impregnation solution in the pre-impregnation tank to improve the pre-wetting effect. The use of the shaking and swinging equipment in this process further reduces the efficiency of continuous electroplating production. As a result, the existing pre-impregnation tank is not convenient to increase the fluidity of the pre-impregnation solution by setting multiple adaptively adjustable cavities in combination with the pressure and liquid flow changes in the pre-impregnation tank during the process of filling the pre-impregnation solution. Summary of the Invention

[0004] The purpose of the present invention is to provide a vacuum pre-impregnation tank for a vertical continuous electroplating device to solve the problems raised in the above background art, that is, the existing vacuum pre-impregnation tank is not convenient to adaptively adjust the cavity size in the pre-impregnation tank according to the pressure change during vacuum suction in combination with the thickness of the package carrier board to improve the vacuum pumping speed, and the existing pre-impregnation tank is not convenient to increase the fluidity of the pre-impregnation solution by setting multiple adaptively adjustable cavities in combination with the pressure and liquid flow changes in the pre-impregnation tank during the process of filling the pre-impregnation solution. The technical solution of the present invention provides a solution significantly different from the prior art for the technical problem of the overly single solution of the prior art.

[0005] To achieve the above object, the present invention provides the following technical solution: A vertical continuous electroplating equipment vacuum pre-impregnation tank, comprising a machine body, a first connecting pipe, a second connecting pipe and a liquid storage tank. The upper end of the left wall of the inner cavity of the machine body is movably connected with a top cover and an immersion tank through a sealing cylinder. The immersion tank is arranged below the top cover. A bottom block is fixed at the bottom of the inner cavity of the immersion tank. A first liquid flow groove and a second liquid flow groove are formed at the top left side of the bottom block. The second liquid flow groove is arranged on the right side of the first liquid flow groove. A third liquid flow groove is formed at the front side of the bottom block. A plug block is movably connected to the inner rear wall of the third liquid flow groove through an electric push rod. A fixing frame is fixed at the top left side of the bottom block. The fixing frame is connected to the right side wall of the inner cavity of the immersion tank through the convex blocks on the upper right side. Slide columns are fixed at the notch positions of the two convex blocks on the upper right side of the fixing frame. An installation frame is slidably sleeved on the outer sides of the two slide columns. The installation frame is slidably arranged between the bottom block and the fixing frame. A clamping strip is arranged between the fixing frame and the installation frame. The clamping strip is slidably placed between the two slide columns. An opening and closing orifice plate assembly is arranged on the right side of the inner frame of the fixing frame. The opening and closing orifice plate assembly is connected to the installation frame through an adjusting assembly.

[0006] Preferably, the immersion tank is installed at the upper end of the left partition layer in the inner cavity of the machine body. The left port of the first connecting pipe is connected to a vacuum pump through a pipeline. The vacuum pump is installed in the left partition layer in the inner cavity of the machine body. The first connecting pipe is installed through the left side wall of the immersion tank and the bottom of the fixing frame. The lower front port of the immersion tank is connected to the liquid storage tank through a pipeline. The right port of the second connecting pipe is sequentially connected to a filtering mechanism and a suction pump through a pipeline and an electric control valve. The second connecting pipe is fixedly installed through the bottom of the installation frame and the right side wall of the immersion tank. The suction pump is connected to the liquid storage tank through a pipeline. The filtering mechanism is installed in the upper part of the inner cavity of the machine body. The liquid storage tank and the suction pump are sequentially installed from back to front at the bottom of the middle partition layer in the inner cavity of the machine body.

[0007] Preferably, the first liquid flow groove, the second liquid flow groove and the third liquid flow groove are mutually communicated. The communicating position of the first liquid flow groove, the second liquid flow groove and the third liquid flow groove is located at the inner top of the third liquid flow groove. The position where the third liquid flow groove is formed is located between the fixing frame and the installation frame. The design shape of the plug block corresponds to the third liquid flow groove. The plug block is used to block the communicating position of the first liquid flow groove, the second liquid flow groove and the third liquid flow groove. A notch is designed at the bottom of the plug block. The plug block is used for liquid outflow.

[0008] Preferably, the opening and closing orifice plate assembly includes a panel. The panel is installed on the right side inside the fixing frame. A slide plate is slidably connected to the left groove of the panel. A top block is arranged at the rear of the bottom of the slide plate. The top block is installed on the adjusting assembly.

[0009] Preferably, the panel and the slide plate are both provided with multiple rows of tiny holes in an array. The holes formed on the panel and the slide plate are opened and closed by overlapping and staggering.

[0010] Preferably, the adjustment assembly includes a plug plate No. 1, a first opening, a plug plate No. 2, a second opening and a third opening, the plug plate No. 1 being slidably disposed in a groove on the inner side of a fixed frame, a top block being fixed on the right side of the bottom of the plug plate No. 1, the first opening being provided at the inner bottom of the fixed frame, the plug plate No. 2 being slidably disposed in a groove on the right side of the installation frame, a top strip being fixed on the right side of the plug plate No. 2, the second opening being provided at the upper right end of the inner side of the fixed frame, and the third opening being provided at the upper left wall of the installation frame.

[0011] Preferably, the cavity between the groove of the No. 2 plug plate and the mounting frame is connected to the cavity between the No. 1 plug plate and the immersion tank through a hose, and the opening position of the first opening corresponds to the position of the No. 2 flow tank.

[0012] Preferably, the top block is designed as an inclined surface structure, and the inclined surface structure of the top block is used to overlap and penetrate with the hole of the skateboard after the skateboard slides.

[0013] Preferably, the second opening is used for the cavity between the top block and the mounting frame and the cavity between the top block and the first plug plate to pass through, the third opening is used for the cavity between the top block and the mounting frame and the cavity between the inner side of the right groove of the mounting frame and the second plug plate to pass through, the top of the fixed frame is in seal contact with the top cover, and the mounting frame and the top cover are seal-slidable.

[0014] Compared with the prior art, the present invention has the following beneficial effects: The present invention provides a bottom block, a fixing frame and an installation frame in an immersion tank. When the clamping strips clamp and fix the packaging carriers of different thicknesses and place them on two sliding columns, the cavity between the panel and the installation frame is evacuated. The installation frame slides leftward on the bottom block and the fixing frame, and resists and drives the clamping strips to slide synchronously at a limit position, so that the size of the cavity between the panel and the installation frame is adaptively adjusted to the corresponding cavity size as the clamping strips clamp the packaging carriers of different thicknesses. In the process of evacuating the cavity, the size of the cavity where the packaging carrier is located is reduced, the speed of vacuum suction is increased, and the speed of pre-wetting of the packaging carrier during the pre-wetting process is accelerated.

[0015] The present invention provides a No. 1 plug plate and a No. 2 plug plate in a fixed frame and an installation frame respectively, so that the fixed frame and the installation frame separate a plurality of cavities in the inner cavity of the immersion tank which are automatically adjusted as the pre-immersion liquid increases. In the process of injecting the pre-immersion liquid into the plurality of cavities, the pressure is coordinated to change the order of injecting the pre-immersion liquid into the plurality of cavities, and the positions of the No. 1 plug plate and the No. 2 plug plate in the fixed frame and the installation frame are changed respectively. In combination with the opening and closing hole plate assembly, in the process of filling all the cavities in the immersion tank with the pre-immersion liquid, the fluidity of the pre-immersion liquid inside the immersion tank is increased, so that the ion water or specific electroplating pretreatment liquid in the flowing pre-immersion liquid can fully penetrate into the pores on the surface of the packaging carrier board to achieve sufficient pre-wetting, and further improve the pre-wetting speed of the packaging carrier board. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the front cross-sectional structure of the body of the present invention; Figure 2 This is a schematic diagram of the rear cross-sectional structure of the body of the present invention; Figure 3 This is a schematic diagram of the top view structure of the body of the present invention; Figure 4 This is a schematic diagram of the structures of the immersion tank, vacuum pump, liquid storage tank, suction pump, and filtration mechanism of the present invention; Figure 5 This is a schematic diagram of the upper cross-sectional and front cross-sectional structures of the immersion tank of the present invention; Figure 6 This is a schematic diagram of the front cross-sectional structure of the immersion tank of the present invention; Figure 7 It is Figure 6 a schematic diagram at position A in Figure 8 This is a schematic diagram of the left-view split structure of the cross-section, bottom block, fixed frame, mounting frame, and clamping strip of the immersion tank of the present invention; Figure 9 It is Figure 8 an enlarged schematic diagram at position B in Figure 10 This is a schematic diagram of the right-view split structure of the cross-section, bottom block, fixed frame, mounting frame, and clamping strip of the immersion tank of the present invention; Figure 11 It is Figure 10 an enlarged schematic diagram at position C in Figure 12 This is a schematic diagram of the structures of the bottom block, fixed frame, and mounting frame of the present invention; Figure 13 It is Figure 12 an enlarged schematic diagram at position D in Figure 14 This is a schematic diagram of the top-view split structure of the bottom block, fixed frame, opening and closing orifice plate assembly, and adjustment assembly of the present invention; Figure 15 It is Figure 14 an enlarged schematic diagram at position E in Figure 16 This is a schematic diagram of the bottom-view split structure of the bottom block, fixed frame, opening and closing orifice plate assembly, and adjustment assembly of the present invention; Figure 17 It is Figure 16 an enlarged schematic diagram at position F in Figure 18 It is Figure 17 an enlarged schematic diagram at position H in Figure 19 This is a schematic diagram of the split structure of the mounting frame and adjustment assembly of the present invention; Figure 20 It is Figure 19Enlarged schematic diagram at position G in China Figure 21 This is a schematic diagram of the top-down split structure of the bottom block, electric push rod, and plug block of the present invention.

[0017] In the figure: 1, body; 2, sealed cylinder; 3, top cover; 4, immersion tank; 41, first connecting pipe; 42, second connecting pipe; 5, bottom block; 6, first liquid flow groove; 7, second liquid flow groove; 8, third liquid flow groove; 9, electric push rod; 10, plug block; 11, fixed frame; 12, sliding column; 13, mounting frame; 14, clamping strip; 15, opening and closing orifice plate assembly; 151, panel; 152, sliding plate; 153, top block; 16, adjusting assembly; 161, first plug plate; 162, first opening; 163, second plug plate; 164, top strip; 165, second opening; 166, third opening; 17, vacuum pump; 18, liquid storage tank; 19, suction pump; 20, filtering mechanism. Specific implementation manners

[0018] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention. Embodiment

[0019] Please refer to Figures 1 to 21The present invention provides a technical solution: a vertical continuous electroplating equipment vacuum prepreg tank, comprising a machine body 1, a No. 1 connecting pipe 41, a No. 2 connecting pipe 42 and a liquid storage tank 18, the upper end of the left wall of the inner cavity of the machine body 1 is movably connected with a top cover 3 and an immersion tank 4 through a sealing cylinder 2, the immersion tank 4 is arranged below the top cover 3, a bottom block 5 is fixed to the bottom of the inner cavity of the immersion tank 4, a No. 1 flow tank 6 and a No. 2 flow tank 7 are arranged on the left side of the top of the bottom block 5, the No. 2 flow tank 7 is arranged on the right side of the No. 1 flow tank 6, a No. 3 flow tank 8 is arranged on the front side of the bottom block 5, the inner rear wall of the No. 3 flow tank 8 is movably connected with a plug 10 through an electric push rod 9, and the left side of the top of the bottom block 5 is fixed There is a fixed frame 11, which is connected to the right side wall of the inner cavity of the immersion tank 4 through the upper right side convex block, and the fixed frame 11 has two sliding posts 12 fixed at the notch positions of the two convex blocks on the upper right side. The two sliding posts 12 are slidably sleeved outside and connected with the installation frame 13, and the installation frame 13 is slidably set between the bottom block 5 and the fixed frame 11. The top of the fixed frame 11 is sealed against the top cover 3, and the installation frame 13 is sealed and slidable with the top cover 3. The first liquid flow tank 6, the second liquid flow tank 7 and the third liquid flow tank 8 are connected to each other, and the connection position of the first liquid flow tank 6, the second liquid flow tank 7 and the third liquid flow tank 8 is located at the inner top of the third liquid flow tank 8, and the opening position of the third liquid flow tank 8 is located at the fixed frame 11 and the mounting frame 13, the design shape of the plug 10 corresponds to the No. 3 flow tank 8, the plug 10 is used to block the No. 1 flow tank 6, the No. 2 flow tank 7 and the No. 3 flow tank 8 through the position, the plug 10 is designed with a notch at the bottom of the plug 10, the plug 10 is used for liquid outflow, a clamping strip 14 is arranged between the fixed frame 11 and the mounting frame 13, the clamping strip 14 is slidably placed between the two sliding columns 12, an opening and closing orifice assembly 15 is arranged on the right side of the inner frame of the fixed frame 11, and the opening and closing orifice assembly 15 is connected to the mounting frame 13 through an adjusting assembly 16, the immersion tank 4 is installed on the upper end of the left side partition of the inner cavity of the body 1, and the left port of the No. 1 connecting pipe 41 is connected to a true The air pump 17 is installed in the left compartment of the inner cavity of the machine body 1. The No. 1 connecting pipe 41 is installed through the left wall of the immersion tank 4 and the bottom of the fixed frame 11. The lower front port of the immersion tank 4 is connected to the liquid storage tank 18 through a pipeline. The right port of the No. 2 connecting pipe 42 is connected to the filter mechanism 20 and the suction pump 19 in sequence through a pipeline and an electric control valve. The No. 2 connecting pipe 42 is fixed through the bottom of the installation frame 13 and the right wall of the immersion tank 4. The suction pump 19 is connected to the liquid storage tank 18 through a pipeline. The filter mechanism 20 is installed on the upper part of the inner cavity of the machine body 1. The liquid storage tank 18 and the suction pump 19 are installed in sequence from back to front at the bottom of the middle compartment of the inner cavity of the machine body 1. When the clamping strip 14 clamps and fixes the packaging substrates of different thicknesses and places them on the two sliding posts 12, and then during the vacuuming process of the cavity between the panel 151 and the mounting frame 13, the mounting frame 13 slides to the left on the bottom block 5 and the fixing frame 11, and contacts and drives the clamping strip 14 to slide synchronously to a limit position, so that the size of the cavity between the panel 151 and the mounting frame 13 is adaptively adjusted to the corresponding cavity size as the clamping strip 14 clamps the packaging substrates of different thicknesses.

[0020] Example 1

[0021] Based on Example 1, please refer to Figures 1 to 21 , an opening and closing orifice plate assembly 15 is provided on the right side of the inner frame of the fixing frame 11. The opening and closing orifice plate assembly 15 is connected to the mounting frame 13 through an adjusting assembly 16. The opening and closing orifice plate assembly 15 includes a panel 151. The panel 151 is installed on the right side inside the fixing frame 11. A sliding plate 152 is slidably connected in the left groove of the panel 151. Multiple rows of tiny holes are arranged in an array on both the panel 151 and the sliding plate 152. The holes opened on the panel 151 and the sliding plate 152 are opened and closed by overlapping and staggering. A top block 153 is provided at the rear of the bottom of the sliding plate 152. The top block 153 is installed on the adjusting assembly 16. The adjusting assembly 16 includes a first plug plate 161, a first opening 162, a second plug plate 163, a second opening 165, and a third opening 166. The first plug plate 161 is slidably arranged in the groove inside the fixing frame 11. A top block 153 is fixed to the right side of the bottom of the first plug plate 161. The top block 153 is designed with an inclined surface structure. The inclined surface structure of the top block 153 is used for the holes of the sliding plate 152 to overlap and penetrate after the sliding plate 152 slides. The first opening 162 is opened at the bottom inside the fixing frame 11. The second plug plate 163 is slidably arranged in the groove on the right side of the mounting frame 13. The cavity between the groove of the second plug plate 163 and the mounting frame 13 is connected to the cavity between the first plug plate 161 and the immersion tank 4 through a hose. The position where the first opening 162 is opened corresponds to the position of the second liquid flow groove 7. A top bar 164 is fixed to the right side of the second plug plate 163. The second opening 165 is opened at the upper right end inside the fixing frame 11. The third opening 166 is opened at the upper part of the left wall of the mounting frame 13. The second opening 165 is used for the cavity between the top block 153 and the mounting frame 13 and the cavity between the top block 153 and the first plug plate 161 to communicate. The third opening 166 is used for the cavity between the top block 153 and the mounting frame 13 and the cavity between the inner side of the right groove of the mounting frame 13 and the second plug plate 163 to communicate; When the encapsulation carrier board is pre-wetted and the pre-impregnation liquid starts to be poured into the cavity between the mounting frame 13 and the panel 151, after the pre-impregnation liquid in the vacuum cavity between the mounting frame 13 and the panel 151 is filled, the pressure in the cavity between the mounting frame 13 and the panel 151 returns to normal. The continuous supply of the pre-impregnation liquid causes the mounting frame 13 to slide to the right on the bottom block 5 and the fixed frame 11. Part of the pre-impregnation liquid simultaneously flows into the cavity between the panel 151 and the first plug plate 161, and the cavity between the second plug plate 163 and the right groove of the mounting frame 13 through the second opening 165 and the third opening 166 respectively, causing the positions of the first plug plate 161 and the second plug plate 163 to change within the fixed frame 11 and the mounting frame 13 respectively, making the top bar 164 protrude from the right side of the mounting frame 13. During this process, when the mounting frame 13 continues to slide to the right on the bottom block 5 and the fixed frame 11 until the top bar 164 abuts against the right inner wall of the inner cavity of the immersion tank 4, the second plug plate 163 slides to the left in the right groove of the mounting frame 13, squeezing the pre-impregnation liquid in the cavity between the second plug plate 163 and the right groove of the mounting frame 13 into the cavity between the first plug plate 161 and the immersion tank 4, causing the first plug plate 161 and the top block 153 to slide to the right within the fixed frame 11. Together with the opening and closing orifice plate assembly 15, the fluidity of the pre-impregnation liquid inside the immersion tank 4 is increased during the process of filling all the cavities in the immersion tank 4 with the pre-impregnation liquid.

[0022] Working principle: When using the vacuum pre-impregnation tank of this vertical continuous electroplating equipment, first, the encapsulation carrier boards of different thicknesses are clamped and fixed by the clamping strip 14, and then the clamping strip 14 is placed on the two sliding columns 12. Then, the sealing cylinder 2 is opened to contract, overlapping and closing the top cover 3 and the immersion tank 4. Then, the vacuum pump 17 is started to perform vacuum suction through the first connecting pipe 41. During the suction process, the first plug plate 161 slides to the right within the fixed frame 11 with the suction and abuts against the panel 151. The second plug plate 163 slides to the left in the groove of the mounting frame 13 and abuts against the right inner wall of the groove of the mounting frame 13. At the same time, the mounting frame 13 slides to the left on the bottom block 5 and the fixed frame 11, and abuts and drives the clamping strip 14 to slide synchronously until the left side of the sliding strip of the clamping strip 14 abuts against the fixed frame 11 and reaches the limit position. At this time, the size of the cavity between the panel 151 and the mounting frame 13 adapts to adjust the corresponding cavity size with the clamping of the encapsulation carrier boards of different thicknesses by the clamping strip 14. Then, the cavity between the panel 151 and the mounting frame 13 continues to be vacuum-sucked until the cavity reaches the corresponding pressure and then the vacuum pump 17 is turned off. During this process, the position adjustment of the mounting frame 13 reduces the size of the cavity where the encapsulation carrier board is located, improving the speed of vacuum suction; When the encapsulation carrier plate is pre-wetted, the suction pump 19 and the electric control valve are opened, and the pre-impregnating liquid in the liquid storage tank 18 is sent into the cavity between the mounting frame 13 and the panel 151 through the pipeline, the filtering mechanism 20 and the second connecting pipe 42. When the cavity between the mounting frame 13 and the panel 151 is filled with the pre-impregnating liquid in the vacuum cavity, the pressure in the cavity between the mounting frame 13 and the panel 151 returns to normal, and the continuous feeding of the pre-impregnating liquid causes the mounting frame 13 to slide to the right on the bottom block 5 and the fixed frame 11. Part of the pre-impregnating liquid synchronously flows into the cavity between the panel 151 and the first plug plate 161 through the second opening 165 and the third opening 166 respectively, and into the cavity between the second plug plate 163 and the right groove of the mounting frame 13, causing the first plug plate 161 to slide to the left to the limit position in the fixed frame 11, and synchronously the second plug plate 163 to slide to the right to the limit position in the right groove of the mounting frame 13. At this time, the top bar 164 protrudes from the right side of the mounting frame 13. During this process, when the mounting frame 13 continues to slide to the right on the bottom block 5 and the fixed frame 11 until the top bar 164 abuts against the right inner wall of the liquid immersion tank 4, the second plug plate 163 slides to the left in the right groove of the mounting frame 13, and squeezes the pre-impregnating liquid in the cavity between the second plug plate 163 and the right groove of the mounting frame 13 into the cavity between the first plug plate 161 and the liquid immersion tank 4 through the hose, causing the first plug plate 161 and the top block 153 to slide to the right in the fixed frame 11. When the moving top block 153 abuts against the slide plate 152, the slide plate 152 slides upward to the limit position in the groove of the panel 151. At this time, the array holes on the panel 151 and the slide plate 152 overlap and penetrate. The pre-impregnating liquid in the cavity between the panel 151 and the first plug plate 161 will flow out from the overlapping and penetrating array holes on the panel 151 and the slide plate 152. These holes are of microporous design and not shown in the figure, so as to increase the fluidity of the pre-impregnating liquid inside the liquid immersion tank 4 during the process of filling all the cavities in the liquid immersion tank 4 with the pre-impregnating liquid; When the pre-wetting of the encapsulation carrier plate is completed, the electric push rod 9 is activated to push the plug block 10 to slide forward in the third liquid flow groove 8, so that the upper end inside the third liquid flow groove 8 is connected to the first liquid flow groove 6 and the second liquid flow groove 7, causing the pre-impregnating liquid in the cavity between the panel 151 and the mounting frame 13 to flow into the third liquid flow groove 8 through the second liquid flow groove 7, and the pre-impregnating liquid in the cavity between the first plug plate 161 and the liquid immersion tank 4 to flow into the third liquid flow groove 8 through the first liquid flow groove 6 and the first opening 162, and then flow into the liquid storage tank 18 through the pipeline from the notch of the plug block 10.

[0023] The content not described in detail in this specification belongs to the prior art well-known to those skilled in the art. In the description of the present invention, unless otherwise specified, the meaning of "a plurality of" is two or more; the orientation or positional relationship indicated by terms such as "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the present invention. In addition, terms such as "first", "second", "third", etc. are only used for descriptive purposes and cannot be construed as indicating or implying relative importance. In the description of the present invention, it should be noted that unless otherwise clearly specified and defined, the terms "connected" and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0024] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A vacuum prepreg tank for vertical continuous electroplating equipment, characterized in that: The invention comprises a machine body (1), a No. 1 connecting pipe (41), a No. 2 connecting pipe (42) and a liquid storage tank (18). The upper end of the left wall of the inner cavity of the machine body (1) is movably connected to a top cover (3) and a liquid immersion tank (4) through a sealing cylinder (2). The liquid immersion tank (4) is arranged below the top cover (3). A bottom block (5) is fixed to the bottom of the inner cavity of the liquid immersion tank (4). A No. 1 liquid flow tank (6) and a No. 2 liquid flow tank (7) are arranged on the left side of the top of the bottom block (5). The No. 2 liquid flow tank (7) is arranged on the right side of the No. 1 liquid flow tank (6). A No. 3 liquid flow tank (8) is arranged on the front side of the bottom block (5). The inner rear wall of the No. 3 liquid flow tank (8) is movably connected to a plug block (10) through an electric push rod (9). A No. 1 liquid flow tank (8) is fixed to the left side of the top of the bottom block (5). A fixed frame (11), the fixed frame (11) is connected to the right side wall of the inner cavity of the immersion tank (4) through a protrusion on the right side of the upper end, sliding columns (12) are fixed at the notch positions of the two protrusions on the right side of the upper end of the fixed frame (11), and a mounting frame (13) is slidably sleeved outside the two sliding columns (12), and the mounting frame (13) is slidably arranged between the bottom block (5) and the fixed frame (11), and a clamping strip (14) is arranged between the fixed frame (11) and the mounting frame (13), and the clamping strip (14) is slidably placed between the two sliding columns (12), and an opening and closing orifice plate assembly (15) is arranged on the right side of the inner frame of the fixed frame (11), and the opening and closing orifice plate assembly (15) is connected to the mounting frame (13) through an adjustment assembly (16).

2. A vacuum prepreg tank for vertical continuous electroplating equipment according to claim 1, characterized in that: The immersion tank (4) is installed at the upper end of the left side partition of the inner cavity of the machine body (1); the left end of the No. 1 connecting pipe (41) is connected to the vacuum pump (17) through a pipeline; the vacuum pump (17) is installed in the left side partition of the inner cavity of the machine body (1); the No. 1 connecting pipe (41) is installed through the left side wall of the immersion tank (4) and the bottom of the fixed frame (11); the lower front end of the immersion tank (4) is connected to the liquid storage tank (18) through a pipeline; the right end of the No. 2 connecting pipe (42) is connected to the liquid storage tank (18) through a pipeline; The side port is connected to a filter mechanism (20) and a suction pump (19) in sequence via a pipeline and an electric control valve; the second connecting pipe (42) penetrates and is fixed to the bottom of the mounting frame (13) and the right side wall of the immersion tank (4); the suction pump (19) is connected to a liquid storage tank (18) via a pipeline; the filter mechanism (20) is installed at the upper part of the inner cavity of the machine body (1); and the liquid storage tank (18) and the suction pump (19) are installed in sequence from back to front at the bottom of the partition in the middle of the inner cavity of the machine body (1).

3. A vacuum prepreg tank for vertical continuous electroplating equipment according to claim 2, characterized in that: The first liquid flow trough (6), the second liquid flow trough (7) and the third liquid flow trough (8) are interconnected; the interconnected position of the first liquid flow trough (6), the second liquid flow trough (7) and the third liquid flow trough (8) is located at the top of the inner side of the third liquid flow trough (8); the opening position of the third liquid flow trough (8) is located between the fixing frame (11) and the mounting frame (13); the design shape of the plug (10) corresponds to that of the third liquid flow trough (8); the plug (10) is used to block the interconnected position of the first liquid flow trough (6), the second liquid flow trough (7) and the third liquid flow trough (8); a notch is designed at the bottom of the plug (10); the plug (10) is used to allow liquid to flow out.

4. A vacuum prepreg tank for vertical continuous electroplating equipment according to claim 3, characterized in that: The opening and closing orifice plate assembly (15) comprises a panel (151), the panel (151) being mounted on the right side of the inner side of the fixing frame (11), a slide plate (152) being slidably connected in a groove on the left side of the panel (151), a top block (153) being arranged at the rear of the bottom of the slide plate (152), and the top block (153) being mounted on the adjusting assembly (16).

5. A vacuum prepreg tank for vertical continuous electroplating equipment according to claim 4, characterized in that: The panel (151) and the slide plate (152) are both provided with a plurality of rows of tiny holes in an array, and the holes provided on the panel (151) and the slide plate (152) are opened and closed by overlapping and interlacing.

6. A vacuum prepreg tank for vertical continuous electroplating equipment according to claim 5, characterized in that: The adjustment assembly (16) comprises a first plug plate (161), a first opening (162), a second plug plate (163), a second opening (165) and a third opening (166); the first plug plate (161) is slidably disposed in a groove on the inner side of the fixed frame (11); a top block (153) is fixed on the right side of the bottom of the first plug plate (161); the first opening (162) is disposed at the bottom of the inner side of the fixed frame (11); the second plug plate (163) is slidably disposed in a groove on the right side of the installation frame (13); a top strip (164) is fixed on the right side of the second plug plate (163); the second opening (165) is disposed at the upper right end of the inner side of the fixed frame (11); and the third opening (166) is disposed at the upper left wall of the installation frame (13).

7. A vacuum prepreg tank for vertical continuous electroplating equipment according to claim 6, characterized in that: The cavity between the groove of the second plug plate (163) and the mounting frame (13) is connected to the cavity between the first plug plate (161) and the immersion tank (4) via a hose, and the opening position of the first opening (162) corresponds to the position of the second flow tank (7).

8. A vacuum prepreg tank for vertical continuous electroplating equipment according to claim 7, characterized in that: The top block (153) is designed as an inclined surface structure, and the inclined surface structure of the top block (153) is used to overlap and penetrate with the hole of the slide plate (152) after the slide plate (152) slides.

9. A vacuum prepreg tank for vertical continuous electroplating equipment according to claim 8, characterized in that: The second opening (165) is used to connect the cavity between the top block (153) and the mounting frame (13) and the cavity between the top block (153) and the first plug plate (161). The third opening (166) is used to connect the cavity between the top block (153) and the mounting frame (13) and the cavity between the inner side of the right groove of the mounting frame (13) and the second plug plate (163). The top of the fixed frame (11) is in sealing contact with the top cover (3), and the mounting frame (13) and the top cover (3) are in sealing sliding contact.

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