Upper polishing disc device with adjustable polishing pressure

Abstract

An upper polishing disc device with adjustable polishing pressure comprises a base and a polishing assembly, the polishing assembly comprises a rotating rod, a polishing disc mounting assembly and a polishing disc, and the lower end of the rotating rod is connected with the polishing disc through the polishing disc mounting assembly; the moving assembly comprises a cylinder, and the lower end of the movable end of the cylinder is connected with a rotating rod through a rotatable connecting structure. The polishing machine is characterized in that the moving assembly comprises a pressure adjusting device, and the lower end of a piston rod of a balance cylinder is connected with a rotatable connecting structure to bear the gravity of the polishing disc and the rotatable connecting structure; the lower end of a piston rod of the pressure cylinder is connected with a rotatable connecting structure to push the polishing disc to lift up and down and apply polishing pressure; the pressure sensor is arranged between the lower end of the piston rod and the rotatable connecting structure and used for measuring polishing pressure and outputting a pressure signal; the signal input end of the controller receives output pressure signals, correspondingly, the pressure cylinder and the electric control valves corresponding to the balance cylinder are simple in structure, low in cost, convenient to operate and accurate in polishing pressure measurement.

Description

Technical Field

[0001] The present invention relates to the technical field of optical precision machining, and particularly to an upper polishing disc device with adjustable polishing pressure. Background Art

[0002] Double-sided polishing machines are mainly used for precision polishing of the surfaces of flat optical elements. Their main feature is that on the basis of obtaining good flatness of the optical elements through grinding, tiny protrusions, pits, and surface damaged layers on the workpiece surface are removed by chemical and mechanical polishing methods to obtain a bright and flat precision element surface. Existing equipment uses a separate moving device to achieve the up-and-down movement of the polishing disc and the control of the surface pressure of the optical element. The polishing pressure is affected by the gravity of the upper polishing disc, and it is impossible to accurately measure and control the polishing pressure on the surface of the optical element, resulting in excessive processing pressure and uncertainty in processing results. Therefore, it is necessary to propose an upper polishing disc device with adjustable polishing pressure to at least partially solve the problems existing in the prior art. Summary of the Invention

[0003] The present invention mainly aims at the problems of the prior art and proposes an upper polishing disc device with adjustable polishing pressure, which adjusts the pressure according to a pressure sensor, thereby accurately controlling the polishing pressure of the polishing disc, avoiding over-polishing, being convenient to operate, and accurately measuring the polishing pressure.

[0004] The technical solution of the present invention is: an upper polishing disc device with adjustable polishing pressure, comprising:

[0005] A base, having a cylinder mounting seat on the upper part;

[0006] A polishing assembly, including a rotating rod, a polishing disc mounting assembly, and a polishing disc. The lower end of the longitudinally arranged rotating rod is connected with a polishing disc through the polishing disc mounting assembly;

[0007] A rotation driving assembly, including a polishing motor, which drives and connects the rotating rod;

[0008] A moving assembly, including a cylinder, and the movable end at the lower end of the cylinder is connected with the upper end of the rotating rod through a rotatable connection structure;

[0009] It is characterized in that the moving assembly further includes a pressure regulating device, and the pressure regulating device has:

[0010] A balance cylinder, the lower end of the piston rod capable of moving up and down is connected with the rotatable connection structure, and bears the gravity of the polishing disc and the rotatable connection structure;

[0011] A pressure cylinder, the lower end of the piston rod capable of moving up and down is connected with the rotatable connection structure, and pushes the polishing disc to move up and down and applies polishing pressure;

[0012] A pressure sensor is arranged between the lower end of the piston rod of the pressure cylinder and the rotatable connection structure to measure the polishing pressure and output a pressure signal.

[0013] A controller has its signal input end connected to the output end of the pressure sensor to receive the output pressure signal. Correspondingly, its signal output end is connected to the electric control valves corresponding to the pressure cylinder and the balance cylinder in the moving assembly. The controller adjusts the polishing pressure according to the measured value, thereby achieving precise measurement and control of the polishing pressure of the upper polishing disc.

[0014] Further, the rotation drive assembly includes a synchronous pulley and a synchronous belt. The polishing motor drives the synchronous pulley and the rotating rod to rotate together through the synchronous belt.

[0015] Further, the rotation drive assembly is arranged on the mounting seat at the lower part of the base. The middle part of the mounting seat has an opening for installing a spline. The rotating rod is a spline rod, and the spline rod is connected to the spline through a spline groove. The secondary synchronous pulley is arranged on the spline, and the secondary synchronous pulley is concentric with the spline rod. The polishing motor is arranged on the mounting seat, and the polishing motor is electrically connected to the controller. The output end of the polishing motor is equipped with a main synchronous pulley and is rotationally connected to the secondary synchronous pulley through a synchronous belt.

[0016] Further, the polishing disc mounting assembly includes a mounting disc. A ball head seat is provided at the top of the mounting disc, and a ball head fixing cover is fixed to the top of the ball head seat. There is a ball head rod between the ball head seat and the ball head fixing cover. The lower section of the rod of the ball head rod is connected to the ball head fixing cover with a pin, and the upper section of the rod of the ball head rod is detachably connected to the bottom of the rotating rod.

[0017] Further, the detachable connection adopts a threaded connection or a clamping connection with a polygonal hole.

[0018] Further, for the mounting disc, the cross-section of the mounting disc is T-shaped, and a mounting positioning surface is provided at the bottom, which is matched with the fixing groove at the top of the polishing disc and is fixed by bolts.

[0019] Further, the rotatable connection structure includes a connecting plate. A bearing seat is arranged below the connecting plate, and a bearing is provided inside the bearing seat and is connected to the upper end of the rotating rod.

[0020] Further, there is a guiding structure between the cylinder mounting seat and the rotatable connection structure. The guiding seat is arranged at the side of the cylinder mounting seat. Correspondingly, a sliding rod is arranged at the side of the connecting plate of the rotatable connection structure. The sliding rod passes through the guiding hole of the guiding seat and is slidably connected to the guiding seat.

[0021] Further, a pressure cylinder lower pressure check valve and a pressure cylinder lift check valve are respectively provided at the upper end and the lower end of the pressure cylinder. The pressure cylinder lower pressure check valve and the lift check valve are connected to the pressure cylinder control air circuit. The pressure cylinder control air circuit includes:

[0022] A proportional valve of a pressure cylinder is pneumatically connected to a solenoid valve for reversing the pressure cylinder. The solenoid valve for reversing the pressure cylinder is pneumatically connected to a check valve for lifting the pressure cylinder through a throttle valve. The solenoid valve for reversing the pressure cylinder is electrically connected to a controller.

[0023] Another proportional valve of a pressure cylinder is pneumatically connected to the solenoid valve for reversing the pressure cylinder. The solenoid valve for reversing the pressure cylinder is pneumatically connected to a check valve for pressing down the pressure cylinder through a throttle valve. The solenoid valve for reversing the pressure cylinder is electrically connected to the controller.

[0024] A solenoid valve for protecting the air cylinder is pneumatically connected to the control ends of the check valve for lifting the pressure cylinder and the check valve for pressing down the pressure cylinder. The solenoid valve for protecting the air cylinder is electrically connected to the controller.

[0025] Finally: A check valve is provided at the bottom end of the balance cylinder. The check valve of the balance cylinder is connected to a control air path of the balance cylinder. The control air path of the balance cylinder includes:

[0026] A solenoid valve for protecting the air cylinder is pneumatically connected to the check valve of the balance cylinder. The solenoid valve for protecting the air cylinder is electrically connected to the controller.

[0027] A proportional valve of the balance cylinder is pneumatically connected to the check valve of the balance cylinder through a throttle valve. The proportional valve of the balance cylinder is electrically connected to the controller.

[0028] Compared with the prior art, the advantages of this product are as follows:

[0029] (1) While the pressure cylinder provides the polishing pressure, it can also drive the polishing disc to move up and down. Compared with the traditional method of using an independent moving device to complete the movement of the polishing disc, the structure is simple and the operation is convenient.

[0030] (2) The balance cylinder is used to balance the weight of the polishing disc, so that the polishing pressure on the surface of the component is the same as the pressure applied by the pressure cylinder, thereby realizing the accurate measurement and control of the polishing pressure on the upper polishing disc, and avoiding over-polishing caused by inaccurate measurement of the polishing pressure and excessive processing pressure.

[0031] (3) The controller detects the pressure value of the pressure sensor and adjusts the cylinder pressure according to the measured value to ensure that the pressure during the polishing process is always stable.

[0032] (4) The ball head rod and the ball head seat can move freely at a small angle, ensuring that the polishing disc and the lower polishing disc are always parallel during the processing, and avoiding the uncertainty during the processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 is a structural schematic diagram of the present invention,

[0034] Figure 2 is a structural schematic diagram of the pressure regulating device,

[0035] Figure 3 It is a schematic structural diagram of a polishing disc installation component,

[0036] Figure 4 and it is a pneumatic schematic diagram of a pressure regulating device.

[0037] In the figure, 1 is the base; 2 is the mounting seat; 3 is the rotating rod; 4 is the polishing disc installation component; 5 is the connecting plate; 6 is the mounting disc; 7 is the polishing disc; 8 is the driven synchronous pulley; 9 is the polishing motor; 10 is the rotation driving component; 11 is the synchronous belt; 12 is the cylinder; 13 is the balance cylinder; 14 is the pressure cylinder; 15 is the guide seat; 16 is the slide bar; 17 is the piston rod; 18 is the balance cylinder check valve; 19 is the cylinder protection solenoid valve; 20 is the balance cylinder proportional valve; 21 is the throttle valve; 22 is the moving component; 23 is the spline; 24 is the pressure sensor; 25 is the pressure cylinder downward pressure check valve;

[0038] 26 is the pressure cylinder lifting check valve; 27 is the pressure cylinder reversing solenoid valve; 28 is the second throttle valve; 29 is the third throttle valve; 30 is the pressure cylinder proportional valve; 31 is the ball head rod; 32 is the ball head fixing cover; 33 is the rotating connection structure; 34 is the ball head seat; 35 is the air source switch, 36 is the pin, 37 is the cylinder mounting seat, 38 is the bearing, 39 is the bearing seat. Specific embodiments

[0039] The following further describes in detail the embodiments of the present invention in combination with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention. In the description of the present invention, unless otherwise specified, the meaning of "a plurality" is two or more; the terms "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first", "second", "third", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0040] In the description of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0041] The present invention will be further described in detail below in conjunction with the embodiments with reference to the drawings.

[0042] According to Figures 1 to 4 , an upper polishing disc device with adjustable polishing pressure includes main devices or components such as a base 1, a polishing assembly, a rotary drive assembly 10, a moving assembly 22, etc. Among them, the upper part of the base 1 has a cylinder mounting seat 37; the polishing assembly includes a rotating rod 3, a polishing disc mounting assembly 4 and a polishing disc 7. The lower end of the longitudinally arranged rotating rod 3 is connected with the polishing disc 7 through the polishing disc mounting assembly 4; the rotary drive assembly 10 includes a polishing motor 9, which drives and connects the rotating rod 3; the moving assembly 22 includes a cylinder 12, and the movable end at the lower end of the cylinder 12 is connected with the upper end of the rotating rod 3 through a rotatable connection structure 33; the improvement lies in that the moving assembly 22 further includes a pressure regulating device, the pressure regulating device has a balance cylinder 13, the lower end of its vertically movable piston rod 17 is connected with the rotatable connection structure 33, and bears the gravity of the polishing disc 7 and the rotatable connection structure 33; a pressure cylinder 14, the lower end of its vertically movable piston rod 17 is connected with the rotatable connection structure 33, pushes the polishing disc 7 to move up and down and applies polishing pressure; in addition, a pressure sensor 24 is arranged between the lower end of the piston rod 17 of the pressure cylinder 14 and the rotatable connection structure 33, for measuring the polishing pressure and outputting a pressure signal; the signal input end of the controller is connected with the output end of the pressure sensor 24, receives the output pressure signal, correspondingly, the signal output end of the controller is connected with the corresponding electric control valves of the pressure cylinder 14 and the balance cylinder 13 in the moving assembly 22, and the controller adjusts the polishing pressure according to the measured value, so as to realize the accurate measurement and control of the polishing pressure of the upper polishing disc 7.

[0043] The specific structure is: the rotary drive assembly 10 is arranged on the mounting seat 2 at the lower part of the base 1. The middle part of the mounting seat 2 has an opening for mounting a spline 23. The rotating rod 3 is a spline rod, and the spline rod is connected with the spline 23 through a spline groove. A slave synchronous pulley 8 is arranged on the spline 23, and the slave synchronous pulley 8 and the spline rod are arranged at concentric positions. A polishing motor 9 is arranged on the mounting seat 2. The polishing motor 9 is electrically connected with the controller. The output end of the polishing motor 9 is equipped with a main synchronous pulley, and is rotationally connected with the slave synchronous pulley 8 through a synchronous belt 11. The rotary drive assembly 10 includes a synchronous pulley and a synchronous belt. The polishing motor 9 drives the synchronous belt pulley and the rotating rod 3 to rotate together through the synchronous belt. The polishing motor 9 and the rotating rod 3 rotate clockwise or counterclockwise simultaneously through the driven synchronous pulley 8.

[0044] The polishing disc mounting assembly 4 includes a mounting disc 6, a ball head seat 34 is provided on the top of the mounting disc 6, a ball head fixing cover 32 is fixed on the top of the ball head seat 34, a ball head rod 31 is provided between the ball head seat 34 and the ball head fixing cover 32, a rod lower section of the ball head rod 31 and the ball head fixing cover 32 are connected by a pin 36, and the rod upper section of the ball head rod 31 is detachably connected to the bottom of the rotating rod 3. This detachable connection can be a threaded connection or a clamping connection of a polygonal hole between the rod upper section of the ball head rod 31 and the bottom of the rotating rod 3. The cross section of the mounting disc 6 is T-shaped, and a mounting positioning surface is provided at the bottom of the mounting disc 6, which matches the fixing groove at the top of the polishing disc 7 and is fixed by bolts.

[0045] The rotating connection structure 33 includes a connecting plate 5, a bearing seat 39 is arranged below the connecting plate 5, and a bearing 38 is arranged inside the bearing seat 39, which is connected to the upper end of the rotating rod 3, and then axially limited by bolts to prevent it from slipping out. The connecting plate 5 is connected to the rotating rod 3, and when the rotating rod 3 rotates, it will not drive the connecting plate 5 to rotate. In order to improve stability, a guide structure is provided between the cylinder mounting seat 37 and the rotatable connecting structure 33, and the guide seat 15 is arranged on the side of the cylinder mounting seat 2. At the same time, correspondingly, a sliding rod 16 is arranged on the side of the connecting plate 5 of the rotating connection structure 33, and the sliding rod 16 passes through the guide hole of the guide seat 15 and is slidably connected to the guide seat 15. The guide seat 15 and the sliding rod 16 ensure that the connecting plate 5 can stably move up and down in one direction.

[0046] The upper and lower ends of the pressure cylinder 14 are respectively provided with a pressure cylinder downward pressure check valve 25 and a pressure cylinder upward pressure check valve 26, which are connected to the pressure cylinder control gas circuit. The pressure cylinder control gas circuit includes: a first pipeline, a pressure cylinder proportional valve 30 is gas-connected with the pressure cylinder reversing solenoid valve 27, the pressure cylinder reversing solenoid valve 27 is gas-connected with the pressure cylinder upward pressure check valve 26 through a third throttle valve 29, and the pressure cylinder reversing solenoid valve 27 is electrically connected to a controller; another pipeline, a pressure cylinder proportional valve 30 is gas-connected with the pressure cylinder reversing solenoid valve 27, the pressure cylinder reversing solenoid valve 27 is gas-connected with the pressure cylinder downward pressure check valve 25 through a second throttle valve 28, and the pressure cylinder reversing solenoid valve 27 is electrically connected to the controller; finally, a cylinder protection solenoid valve 19 is gas-connected with the control ends of the pressure cylinder upward pressure check valve 26 and the pressure cylinder downward pressure check valve 25, and the cylinder protection solenoid valve 19 is electrically connected to the controller.

[0047] A balancing cylinder check valve 18 is provided at the bottom end of the balancing cylinder 13, and the balancing cylinder check valve 18 is connected to the control air circuit of the balancing cylinder 13. The control air circuit of the balancing cylinder 13 includes: a first pipeline, a cylinder protection solenoid valve 19 is gas-connected to the balancing cylinder check valve 18, and the cylinder protection solenoid valve 19 is electrically connected to the controller; another pipeline, a balancing cylinder proportional valve 20 is gas-connected to the balancing cylinder check valve 18 through a throttle valve 21, and the balancing cylinder proportional valve 20 is electrically connected to the controller.

[0048] Finally, the intake pipeline is respectively connected to the inlets of the cylinder protection solenoid valve 19, the pressure cylinder proportional valve 30, and the balance cylinder proportional valve 20 through the air source switch 35.

[0049] The working principle of this product is as follows: The thrust of the balance cylinder 13 is equal to the gravity of the polishing disc 7. The moving device can freely slide up and down under the guiding action of the sliding rod 16 and the rotating rod 3. The piston rod 17 of the pressure cylinder 14 drives the rotating rod 3 to move up and down through the connecting plate 5 under the action of compressed air. The rotating rod 3 drives the polishing disc 7 to move up and down through the mounting disc 6. By adjusting the opening degrees of the three different throttle valves 21, the second throttle valve 28, and the third throttle valve 29, the lifting and lowering speeds of the polishing disc 7 are changed to the most suitable values. After the polishing disc 7 contacts the surface of the component and the pressure of the pressure cylinder 14 is set, the polishing motor 9 is started. The polishing motor 9 drives the rotating rod 3 to rotate through the synchronous belt pulley. The rotating rod 3 drives the polishing disc 7 to rotate through the mounting disc 6 to polish the optical component.

[0050] During the actual working process, after determining the polishing disc 7 and calibrating the intake pressure of the balance cylinder 13, the air source switch 35 is turned on, the balance cylinder proportional valve 20 is turned on, and the cylinder protection solenoid valve 19 is turned on. At this time, the thrust of the balance cylinder 13 is equal to the gravity of the polishing disc 7, and the rotary connection structure 33 can freely slide up and down. The pressure cylinder proportional valve 30 is turned on, and the pressure cylinder downward solenoid valve group of the pressure cylinder reversing solenoid valve 27 is turned on. The piston rod 17 of the pressure cylinder 14 drives the polishing disc 7 to move downward and contact the surface of the component. The piston rod 17 of the pressure cylinder 14 is connected to the pressure sensor 24, and the pressure sensor 24 is connected to the rotatable connection structure 33. The measured value of the pressure sensor 24 is the surface pressure of the component. By setting the opening degree of the pressure cylinder proportional valve 30 according to the processing requirements, accurate measurement and control of the polishing pressure can be achieved, avoiding over-polishing caused by excessive pressure and the uncertainty during the polishing process. After polishing is completed, the pressure cylinder downward solenoid valve group of the pressure cylinder reversing solenoid valve 27 is turned off, and the pressure cylinder 14 lifting solenoid valve group of the pressure cylinder reversing solenoid valve 27 is turned on. The piston rod 17 of the pressure cylinder 14 drives the lower polishing disc 7 to leave the surface of the optical component. After the pressure cylinder 14 reaches the lifting limit, the cylinder protection solenoid valve 19 is turned off to lock the position of the moving device and prevent the accidental fall of the rotary connection structure 33.

[0051] Of course, in this embodiment, the synchronous belt and synchronous belt pulley are used to achieve rotational drive. In fact, gear transmission can also be used to achieve similar effects.

Claims

1. An upper polishing disc device with adjustable polishing pressure, comprising: A base having a cylinder mounting seat at the upper portion; A polishing assembly, comprising a rotating rod, a polishing disc mounting assembly and a polishing disc, wherein the lower end of the longitudinally arranged rotating rod is connected to the polishing disc through the polishing disc mounting assembly; A rotary drive assembly, including a polishing motor, driving and connecting the rotary rod; A moving assembly includes a cylinder, wherein a movable end at the lower end of the cylinder is connected to the upper end of a rotating rod via a rotatable connecting structure; Features The mobile assembly also includes a pressure regulating device, which has: A balancing cylinder, the lower end of the piston rod of which can move up and down is connected to the rotatable connecting structure and bears the gravity of the polishing plate and the rotatable connecting structure; A pressure cylinder, the lower end of which is connected to a rotatable connection structure with a piston rod that can move up and down, so as to push the polishing disc up and down and apply polishing pressure; A pressure sensor is arranged between the lower end of the piston rod of the pressure cylinder and the rotatable connection structure, and is used to measure the polishing pressure and output a pressure signal; A controller, whose signal input end is connected to the output end of the pressure sensor, receives the output pressure signal, and correspondingly, executes the signal output end to connect the electric control valves corresponding to the pressure cylinder and the balance cylinder in the moving component. The controller adjusts the polishing pressure according to the measured value, thereby realizing accurate measurement and control of the polishing pressure of the upper polishing plate.

2. The upper polishing disc device with adjustable polishing pressure according to claim 1, characterized in that: The rotary drive assembly comprises a synchronous pulley and a synchronous belt, and the polishing motor drives the synchronous pulley and the rotating rod to rotate together through the synchronous belt.

3. The upper polishing disc device with adjustable polishing pressure according to claim 2, characterized in that: The rotary drive assembly is arranged on a mounting seat at the lower part of the base. The middle part of the mounting seat has an opening for mounting a spline. The rotating rod adopts a spline rod. The spline rod is connected to the spline through a spline groove. The slave synchronous pulley is arranged on the spline. The slave synchronous pulley and the spline rod are arranged concentrically. The polishing motor is arranged on the mounting seat. The polishing motor is electrically connected to the controller. The output end of the polishing motor is equipped with a main synchronous pulley, which is rotationally connected to the slave synchronous pulley through a synchronous belt.

4. The upper polishing disc device with adjustable polishing pressure according to claim 1, characterized in that: The polishing disc mounting assembly includes a mounting disc, a ball head seat is provided on the top of the mounting disc, a ball head fixing cover is fixed on the top of the ball head seat, a ball head rod is provided between the ball head seat and the ball head fixing cover, the lower section of the rod of the ball head rod and the ball head fixing cover are connected by a pin, and the upper section of the rod of the ball head rod is detachably connected to the bottom of the rotating rod.

5. The upper polishing disc device with adjustable polishing pressure according to claim 4, characterized in that: The detachable connection is a threaded connection or a polygonal hole snap-on connection.

6. The upper polishing disc device with adjustable polishing pressure according to claim 4, characterized in that: The mounting plate has a T-shaped cross section, a mounting positioning surface is provided at the bottom, matches the fixing groove at the top of the polishing plate, and is fixed by bolts.

7. The upper polishing disc device with adjustable polishing pressure according to claim 1, characterized in that: The rotary connection structure comprises a connecting plate, a bearing seat is arranged under the connecting plate, a bearing is arranged in the bearing seat and is connected to the upper end of the rotating rod.

8. The upper polishing disc device with adjustable polishing pressure according to claim 7, characterized in that: A guide structure is provided between the cylinder mounting seat and the rotatable connection structure. The guide seat is arranged on the side of the cylinder mounting seat. Correspondingly, a sliding rod is arranged on the side of the connecting plate of the rotatable connection structure. The sliding rod passes through the guide hole of the guide seat and is slidably connected to the guide seat.

9. The upper polishing disk device with adjustable polishing pressure according to claim 1, characterized in that: The upper end and the lower end of the pressure cylinder are respectively provided with a pressure cylinder pressure check valve and a pressure cylinder lifting check valve, the pressure cylinder pressure check valve and the lifting check valve are connected to the pressure cylinder control gas circuit, and the pressure cylinder control gas circuit includes: A pressure cylinder proportional valve is gas-connected to a pressure cylinder reversing solenoid valve, the pressure cylinder reversing solenoid valve is gas-connected to a pressure cylinder lifting check valve through a throttle valve, and the pressure cylinder reversing solenoid valve is electrically connected to a controller; Another pressure cylinder proportional valve is gas-connected to the pressure cylinder reversing solenoid valve, the pressure cylinder reversing solenoid valve is gas-connected to the pressure cylinder down-pressure check valve through a throttle valve, and the pressure cylinder reversing solenoid valve is electrically connected to the controller; A cylinder protection solenoid valve is gas-connected to the control ends of the pressure cylinder lifting check valve and the pressure cylinder pressing check valve, and the cylinder protection solenoid valve is electrically connected to the controller.

10. The upper polishing disc device with adjustable polishing pressure according to claim 1, characterized in that: A balance cylinder check valve is provided at the bottom end of the balance cylinder, and the balance cylinder check valve is connected to the balance cylinder control gas circuit, and the balance cylinder control gas circuit includes: a cylinder protection solenoid valve gas-connected to the balance cylinder check valve, and the cylinder protection solenoid valve is electrically connected to the controller; A balancing cylinder proportional valve is gas-connected to the balancing cylinder check valve through a throttle valve, and the balancing cylinder proportional valve is electrically connected to the controller.

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