Multifunctional heat exchange phosphorane tank

Abstract

The invention relates to the technical field of chemical tanks, in particular to a multifunctional heat exchange phosphine tank. According to the technical scheme, the multifunctional heat exchange phosphine tank comprises a tank body and a control system, the tank body comprises a safety valve, a temperature transmitter, a pressure transmitter and a radar liquid level meter, and the control system is divided into a normal data module and an abnormal data module based on instruments and meters on the tank body. The normal data module collects and summarizes key data of a tank body in real time to form a normal operation parameter system of the tank body, the parameter system forms a tracing path according to classification of key parts of the tank body, a heat exchange system and a pipeline, and the tracing path performs node classification on abnormal data according to classification of the key parts to form path nodes. The control system has the functions of automatic temperature adjustment, temperature feedback, pressure feedback, abnormity alarm, end reminding and the like according to path nodes, it is ensured that the temperature in the container is controllable, and the contained medium is kept in a safe state.

Description

Technical Field

[0001] The present invention relates to the technical field of intelligent chemical tanks, and specifically to a multifunctional heat exchange phosphine tank. Background Art

[0002] Phosphine (also known as phosphorous hydride), an inorganic compound with the chemical formula PH3, is a colorless, highly toxic, and flammable medium. If stored using cryogenic liquefaction technology, the liquid boiling point of phosphine is -87.5°C. To maintain its liquid storage state, the temperature inside the container cannot exceed -87.5°C. With the rapid development of related industries, more stringent requirements have been put forward for the storage and use of phosphine. Traditional phosphine tanks have gradually revealed many limitations when dealing with complex industrial environments and diverse process requirements. For example, in some semiconductor processes that require precise control of reaction temperature, due to the lack of an effective heat exchange function in traditional phosphine tanks, the temperature of phosphine inside the tank cannot be adjusted quickly and accurately, resulting in difficulty in stably controlling the physical properties and chemical activity of phosphine, thereby affecting product quality and production efficiency. In the solar photovoltaic industry, if the phosphine tank cannot maintain a stable working state at different ambient temperatures, it will affect the consistency of the silicon wafer diffusion process and reduce the yield of solar cells.

[0003] Therefore, the present invention designs an intelligent control phosphine tank with a heat exchange function to achieve controllable and adjustable temperature in the container, realize the mutual conversion of phosphine in the phosphine tank from gaseous to liquid state, and at the same time ensure that the contained medium is in a safe state. Summary of the Invention

[0004] To achieve the above objectives, the technical solution adopted in the present invention is as follows:

[0005] A multifunctional heat exchange phosphine tank includes a tank body, and the tank body is equipped with a safety valve, a temperature transmitter, a pressure transmitter, a radar level gauge, and a control system. It is characterized in that: the tank body comprises an inner cylinder and an outer cylinder, the tank body is covered with stainless steel skin, and under the stainless steel skin, there is aerogel felt, and the aerogel felt is attached to the surface of the outer cylinder.

[0006] The outer cylinder is provided with a dual-channel heat exchange structure, and the dual-channel heat exchange structure is provided with a condensate heat exchange channel and a fluorine heat exchange channel, and the condensate heat exchange channel is provided with a continuous spiral surface supporting guide vane. The outer cylinder also includes an outer half-tube of the cylinder, and the outer half-tube of the cylinder is located at the top of the condensate heat exchange channel. When the liquid in the inner cylinder exceeds the lowest gas level line, the outer half-tube of the cylinder is filled with a heating medium to quickly vaporize the liquid at the top of the inner cylinder. The outer half-tube of the cylinder includes an upper head outer half-tube and a plurality of straight arc outer half-tubes, and the straight arc outer half-tube is designed with multiple sections of back and forth bending paths. The upper head outer half-tube is provided with a 180° short radius elbow and a sealing plate, and the straight arc outer half-tube is provided with a 90° short radius elbow.

[0007] An internal coil is provided at the bottom of the inner cylinder, and the internal coil is immersed in the liquid at the bottom of the inner cylinder. The internal coil structure is a concentric serpentine structure divided into several groups, and each group is connected to form a whole by tie rods and pipes. An outer cylinder inlet and an outer cylinder outlet, an internal coil inlet and an internal coil outlet are provided on the tank body. The outer cylinder inlet and the outer cylinder outlet are connected to the dual-channel heat exchange structure, and the internal coil inlet and the internal coil outlet are connected to the internal coil. The internal coil is a whole hollow circular tube filled with a medium, and the pipe is a hollow circular tube, and the diameter of the pipe is smaller than the diameter of the internal coil; a minimum liquid level line and a minimum gas level line are provided on the inner cylinder, and the minimum liquid level line is located at the bottom of the inner cylinder, and the minimum gas level line is located at the top of the inner cylinder.

[0008] The control system includes gas-liquid balance control, heat balance control and tank body operation data control in the tank, and the gas-liquid balance control and heat balance control are combined into a comprehensive control model in the tank.

[0009] The gas-liquid balance control is based on the lowest liquid level line and the lowest gas level line on the inner cylinder. When the liquid is lower than the lowest liquid level line, the control system starts the medium refrigeration of the inner cylinder and the outer cylinder, and fills phosphine into the tank at the same time; when the liquid exceeds the lowest gas level line, the control system starts the medium heating of the inner cylinder and the outer cylinder.

[0010] The gas-liquid balance control can also be controlled based on the pressure inside the inner cylinder. Related to the saturated vapor pressure of phosphine, under ideal conditions ; In actual situations, non-ideality needs to be considered, so the activity coefficient model is used: its expression is , The mole fraction of phosphine in the gas phase, Total pressure in the tank (Pa), The mole fraction of phosphine in the liquid phase, The activity coefficient of phosphine, The saturated vapor pressure (Pa) of phosphine is calculated by the Antoine equation.

[0011] The heat balance control splits the total heat exchange into three parts: heat transfer control of the condensate water channel, heat transfer control of the fluorine channel, and heat transfer control of the internal coil. The heat transfer control of the condensate water channel includes the enhanced control of turbulence by the spiral curved surface supported deflector vanes. The heat transfer control of the internal coil includes the forced convection heat transfer control between the internal concentric coiled pipes and the liquid.

[0012] Furthermore, the operation data control of the tank body is divided into a normal data module and an abnormal data module based on the instruments on the tank body. The normal data module collects key data of the tank body in real time and summarizes it to form a system of normal operation parameters of the tank body. The parameter system forms a traceability path according to the classification of key parts of the tank body, the heat exchange system, and the pipeline. The traceability path classifies the abnormal data according to the key parts to form path nodes. The nodes include nodes based on the key parts of the tank body, nodes based on the key parts of the heat exchange system, and nodes based on the key parts of the pipeline.

[0013] Furthermore, flow regulating valves are provided on the inlet and outlet pipes of the liquid and gas of the tank body. According to the monitored data of the liquid level and pressure, the control system can automatically adjust the opening of the valves to control the inflow and outflow of liquid phosphine and the emission of gaseous phosphine, thereby maintaining the balance of the liquid level and gas level. The tank body can be externally connected to a pressure supplement device. When the gas pressure in the tank is too low and the pressure difference between the inner and outer cylinders is too large, gas can be supplemented into the tank through the pressure supplement device to restore the gas-liquid balance.

[0014] Furthermore, the internal coil includes an outer coil, a middle coil, and an inner coil. The inner coil is provided with a starting point, and the starting point is connected to the inlet of the internal coil. The outer coil is provided with an end point. The middle coil and the inner coil are provided with connecting pipes. The medium rotates clockwise from top to bottom in the inner coil to the bottom, and the connecting pipe at the bottom of the inner coil is connected to the middle coil. The medium rotates clockwise from bottom to top in the middle coil to the top and flows to the outer coil through the connecting pipe designed at the top of the middle coil.

[0015] Furthermore, a pressure branch pipe and a purge branch pipe are provided on the tank body. There is an equal-diameter tee on the pressure branch pipe, a reducing socket on the equal-diameter tee, a 90° elbow on the reducing socket, and an instrument joint on the 90° elbow. A flange is provided on the purge branch pipe, an equal-diameter tee is provided on the flange, a short-stem globe valve is also provided on the purge branch pipe, and an instrument joint is provided on the short-stem globe valve.

[0016] Further, the tank body is provided with a feed inlet, a drain port, and a discharge outlet. An inner extension pipe is provided at the discharge outlet, and the inner extension pipe extends from the discharge outlet to the bottom of the tank. The tank body is also provided with a liquid level gauge interface and legs.

[0017] The beneficial effects of the improved technical solution are as follows:

[0018] 1. Efficient heat exchange system: The double-channel heat exchange structure of the outer cylinder body, including a condensate heat exchange channel and a fluorine heat exchange channel, provides a powerful heat exchange capacity for the phosphine tank. In particular, the spiral curved surface support guide vanes provided in the condensate heat exchange channel effectively enhance the turbulence and improve the heat exchange efficiency. At the same time, the design of the internal coil further optimizes the heat exchange process.

[0019] 2. Intelligent integrated control system: The gas-liquid balance control and the heat balance control are combined to form a complete control system. The model can real-time monitor the state parameters such as the temperature, pressure, and volume of phosphine in the tank, and automatically adjust the flow rates of the double-channel media and the heat transfer efficiency of the internal coil according to these parameters, so as to achieve precise control of the temperature in the tank. The control system generates abnormal paths based on node classification (tank body, pipeline, heat exchange) to ensure timely processing of data traceability and fault diagnosis, and ensure the safety of the tank body.

[0020] 3. Safe and reliable liquid-gas conversion control in the tank: The minimum liquid level line and the minimum gas level line set on the tank body, together with the internal coil at the bottom and the outer half pipe of the cylinder body at the top, form a simplified liquid level control, ensuring the balance of the liquid level and the gas level in the tank. Description of the Drawings

[0021] Figure 1 It is the overall structure diagram of the present invention.

[0022] Figure 2 It is the structure diagram of the condensate heat exchange channel of the present invention.

[0023] Figure 3 It is the structure diagram of the outer half pipe of the cylinder body of the present invention.

[0024] Figure 4 It is the structure diagram of the internal coil of the present invention.

[0025] Figure 5 It is the structure diagram of the outer coil, middle coil, and inner coil of the present invention.

[0026] Figure 6 It is the structure diagram of the pressure branch pipe of the present invention.

[0027] Figure 7 It is the structure diagram of the purge branch pipe of the present invention.

[0028] Figure 8It is a comprehensive control model diagram of the present invention.

[0029] Figure 9 This is a traceability path diagram generated based on the normal data module of the present invention.

[0030] Figure 10 It is an operation flow chart of the present invention. DETAILED DESCRIPTION

[0031] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention is described in detail below in conjunction with the accompanying drawings. The description in this part is only exemplary and explanatory and should not have any limiting effect on the protection scope of the present invention.

[0032] refer to Figure 1-10 The multifunctional heat exchange phosphine tank includes a tank body and a control system. The tank body includes a safety valve a, a temperature transmitter b, a radar level gauge c, and a pressure transmitter d. The control system is divided into a normal data module and an abnormal data module based on the instruments on the tank body. The normal data module collects the key data of the tank body in real time and summarizes them to form a normal operation parameter system of the tank body. The parameter system forms a traceability path according to the classification of the key parts of the tank body, the heat exchange system, and the pipeline. The traceability path classifies the abnormal data according to the key parts to form path nodes. The nodes include nodes based on the key parts of the tank body, nodes based on the key parts of the heat exchange system, and nodes based on the key parts of the pipeline. The control system also includes gas-liquid balance control and thermal balance control in the tank. The gas-liquid balance control and thermal balance control are combined into a comprehensive control model in the tank. The gas-liquid balance control calculates the saturated vapor pressure of phosphine based on the Antoine equation and the UNIQUAC model, and corrects the non-ideality through the activity coefficient to improve the prediction accuracy; the thermal balance control uses multi-source heat exchange quantity splitting and PID algorithm dynamic strategy to adjust the medium flow and control the temperature in the tank.

[0033] The gas-liquid balance control can be based on the lowest liquid level and the lowest gas level on the inner cylinder. When the liquid is lower than the lowest liquid level, the control system starts the medium cooling of the inner cylinder and the outer cylinder, and fills the tank with phosphine at the same time; when the liquid exceeds the lowest gas level, the control system starts the medium heating of the inner cylinder and the outer cylinder. The gas-liquid balance control can also be based on the pressure inside the inner cylinder. Under equilibrium conditions, the pressure inside the tank is related to the saturated vapor pressure of phosphine. Under ideal conditions, ; In actual situations, non-ideality needs to be considered, so the activity coefficient model is used, and its expression is , The mole fraction of phosphine in the gas phase, Total pressure in the tank (Pa), The mole fraction of phosphine in the liquid phase, The activity coefficient of phosphine, The saturated vapor pressure (Pa) of phosphine is calculated by the Antoine equation.

[0034] The total heat exchange amount in the thermal equilibrium control is split into three parts: the heat transfer control of the condensate water channel, the heat transfer control of the fluorine channel, and the heat transfer control of the internal coil. The heat transfer control of the condensate water channel includes the enhanced control of turbulence by the spiral curved surface supporting and guiding vanes. The heat transfer control of the internal coil includes the forced convection heat transfer control between the internal concentric coiled pipes and the liquid.

[0035] As Figure 1-7 shown in the structural diagram, an inner cylinder 1 and an outer cylinder are provided inside the tank. The inner cylinder 1 adopts a cylindrical structure, and the outer cylinder is a dual-channel heat exchange structure, including a condensate water heat exchange channel 2 and a fluorine heat exchange channel 21. As Figure 1 and 2 shown, a continuous spiral curved surface supporting and guiding vane 22 is provided inside the condensate water heat exchange channel 2. A semi-tube 23 is also provided outside the outer cylinder, and a heat insulation structure 20 composed of stainless steel skin and aerogel felt is provided outside the outer cylinder. Inside the inner cylinder 1, a lowest liquid level line 10, a lowest gas level line 11, and an internal coil 3 are provided. The lowest liquid level line 10 is located at the bottom of the inner cylinder 1, the lowest gas level line 11 is located at the top of the inner cylinder 1, and the internal coil 3 is immersed in the liquid at the bottom of the inner cylinder 1. The semi-tube 23 outside the cylinder is a semi-circular tube structure and is evenly distributed in a spiral shape and is wound and welded above the lowest gas level line 11 at the top of the inner cylinder 1. When the liquid in the inner cylinder 1 exceeds the lowest gas level line 11, a heating medium can be filled into the semi-tube 23 outside the cylinder to quickly vaporize the liquid at the top of the inner cylinder 1.

[0036] As Figure 1 and 3 shown, the semi-tube 23 outside the cylinder includes an upper head semi-tube 231 and a plurality of straight-arc semi-tubes 232. An 180° short-radius elbow 234 and a sealing plate 235 are provided on the upper head semi-tube 231, and a 90° short-radius elbow 236 is provided on the straight-arc semi-tube 232. The medium enters from the upper head semi-tube 231, and the heat exchange effect is enhanced through the 180° short-radius elbow 234 and the 90° short-radius elbow 236. The straight-arc semi-tube 232 is designed with multiple sections of back-and-forth bending paths of different sizes to maximize the heat exchange area and improve the heat exchange efficiency, while not occupying the instrument interface space at the top.

[0037] As Figure 1 and 4As shown in the figure, an internal coil 3 is provided inside the inner cylinder 1. The structure of the internal coil 3 is a concentric circle coiled tube structure, which is divided into several groups. Each group is connected by a stay bar 33 and a connecting pipe 34 to form a whole. The connecting pipe 34 is a hollow round tube. The diameter of the connecting pipe 34 is slightly smaller than that of the internal coil 3. A support angle steel 35 is also provided inside the inner cylinder 1. A U-bolt 36 is provided on the support angle steel 35. The internal coil 3 is fixed inside the inner cylinder 1 by combining with the stay bar 33 through the support angle steel 35 and the U-bolt 36, so that no vibration or displacement will occur during the operation of the coil.

[0038] As Figure 4 and 5 shown, the internal coil 3 includes an outer coil 3a, a middle coil 3b and an inner coil 3c. A starting point is provided on the inner coil 3c, and the starting point is connected to the internal coil inlet 31. A terminal point is provided on the outer coil 3a. The middle coil 3b and the inner coil 3c are provided with connecting pipes 34. A 45° elbow 34a is provided at one end of the connecting pipe 34. A 90° elbow 34b is provided at the terminal point position. The 90° elbow is connected to the internal coil outlet 32. The medium rotates clockwise from top to bottom in the inner coil 3c to the bottom. The connecting pipe at the bottom of the inner coil 3c is connected to the middle coil 3b. The medium rotates clockwise from bottom to top in the middle coil 3b to the top and flows to the outer coil 3a through the connecting pipe designed at the top of the middle coil 3b.

[0039] As Figure 1 and Figure 6 shown, a pressure branch pipe d1 is provided on the pressure transmitter d on the tank body. An equal-diameter tee d2 is provided on the pressure branch pipe d1. A reducing socket d3 is provided on the equal-diameter tee d2. A 90° elbow d4 is provided on the reducing socket d3. An instrument joint is provided on the 90° elbow d4.

[0040] As Figure 1 and Figure 7 shown, a purge branch pipe a1 is provided on the safety valve a of the tank body. A flange a2 is provided on the purge branch pipe a1. The equal-diameter tee d2 is provided on the flange a2. A short-stem globe valve a3 is provided on the purge branch pipe a1. An instrument joint is provided on the short-stem globe valve a3.

[0041] As Figure 1 shown, a feed inlet A, a drain port B and a discharge outlet C are provided on the tank body. An inner extension pipe C1 is provided at the discharge outlet C. The inner extension pipe C1 extends from the discharge outlet C to the bottom of the tank. The tank body is also provided with a liquid level gauge interface and legs.

[0042] Among them, the internal coil 3 is made of a whole round tube through specific tooling and bending to the required concentric circular coil structure. This structure can maximize the flow area, enabling the heat exchange medium in the coil to fully contact with the phosphine in the tank body and improving the heat exchange efficiency. Considering that the internal coil comes into contact with the internal medium of the container, the material selected for it is the same as that of the container shell. The internal coil 3 is made into three groups according to different central circle diameters. When manufacturing the coil, due to its long unfolded length, it cannot be formed with only one connecting pipe and requires multiple connecting pipes to be joined. Therefore, it is required that the butt joints between the connecting pipes should be subjected to 100% RT non-destructive testing simultaneously to ensure the welding quality of the welds. Each group is welded together with elbows and connecting pipes to form an integral whole. This design makes full use of the internal space of the container and forms a maximized heat exchange area. The internal coil is fixed inside the tank through U-bolts 36 and support angle steels 35 without contacting the tank wall, enabling the phosphine in the tank to fully exchange heat with the coil and improving the effect of temperature regulation. The internal coil is fixed to the support angle steel 35 with U-bolts 36, so that the coil will not vibrate or move during operation, ensuring the stability and reliability of the coil, avoiding damage to the coil or loosening of the connection parts caused by vibration, and ensuring the normal operation of the heat exchange system. The internal coil 3 operates inside the container. Considering the risk of accidental leakage and the requirement of ultra-low temperature cooling, the medium inside the coil is liquid nitrogen. Due to its characteristics as an inert gas, it will not contaminate the medium inside the container; moreover, the temperature of liquid nitrogen is generally -196°C, providing an excellent refrigerant effect for the low-temperature environment inside the container. When the container needs to maintain a relatively high temperature, a heat medium such as saturated steam or heat transfer oil can be introduced into the internal coil 3. Through these heat media, the temperature inside the container can be better maintained within the designed required range.

[0043] Among them, the outer semi-tube 23 of the cylinder body is mainly used for the circulation of the heat exchange medium. Therefore, a semi-circular tube (which can be spliced into a whole according to the length requirement) structure is selected and welded around the surface of the inner cylinder 1 in a uniformly spaced spiral-like distribution, which can circulate the heat medium or refrigerant medium, enabling the container to adjust the temperature inside the container by heat exchange through the circulation of the medium when the temperature is too low or too high.

[0044] Among them, the thermal insulation structure 20 composed of stainless steel skin and aerogel felt has a thermal conductivity as low as 0.02 W / (m·K), reducing environmental heat interference.

[0045] Among them, the tank body is equipped with flow regulating valves on the inlet and outlet pipes of the liquid and gas. According to the monitoring data of the liquid level and pressure, the control system can automatically adjust the opening of the valves to control the inflow and outflow of liquid phosphine and the emission of gaseous phosphine, thereby maintaining the balance of the liquid level and gas level. The tank body can be externally connected with a pressure supplementing device. When the gas pressure inside the tank is too low and the pressure difference between the inner and outer cylinders is too large, gas can be supplemented into the tank through the pressure supplementing device to restore the gas-liquid balance.

[0046] Among them, instruments such as temperature transmitter b, pressure transmitter d, and radar level gauge c are installed on the tank body. These instruments can timely feedback information such as the temperature and water level of the aqueous solution in the tank to the control system through 4 - 20ma signals. The temperature transmitter b can accurately measure the temperature of phosphine in the tank and convert the temperature signal into an electrical signal for transmission to the control system, enabling operators to understand the temperature situation in the tank in real time. The pressure transmitter d can monitor the pressure changes in the tank to ensure that the pressure is within a safe range. Once the pressure is abnormal, the control system can take timely measures for adjustment. The radar level gauge c can accurately measure the liquid level height of phosphine in the tank, providing important data support for production operations. Through the coordinated work of these instruments, the control system can make timely and correct action feedback on the corresponding working conditions, ensuring the safe operation of the phosphine tank and the smooth progress of the production process. At the same time, a local level gauge is installed on the tank body, which can visually reflect the water level in the tank on-site, facilitating operators to observe and operate on-site. As a backup level monitoring means, it improves the reliability of level monitoring.

[0047] Among them, the process of forming a traceability path based on the normal data module in the control system is as follows:

[0048] (1) Data acquisition and storage

[0049] Sensor network layout: Temperature, pressure, level, flow and other types of sensors are densely deployed at key parts such as the tank body, heat exchange system, and pipeline of the multi-functional heat exchange phosphine tank to ensure comprehensive and real-time collection of operation data.

[0050] Data storage architecture: Using distributed database technology, a large amount of normal data collected by sensors is classified and stored. It is organized according to dimensions such as data type (such as temperature data, pressure data, etc.), collection time, and collection location to build an efficient data index.

[0051] (2) Traceability path construction algorithm

[0052] Data correlation analysis: Introduce data mining algorithms to deeply analyze the correlation relationships between various types of data in the normal data module. By mining frequent item sets, potential connections between different parameter data are discovered. For example, through analysis, it is found that when the tank body temperature rises within a specific time period, the coolant flow rate of the heat exchange system usually increases correspondingly, and the pressure also fluctuates to a certain extent. These correlation relationships provide key clues for constructing the traceability path.

[0053] Path modeling: Based on the results of data correlation analysis, use the method of graph theory to construct a traceability path model. Each data collection point is regarded as a node in the graph, and the correlation relationship between data is regarded as an edge. The weight of the edge can be set according to the tightness of the correlation.

[0054] Among them, the method for classifying nodes of abnormal data in the trace path in the control system is as follows:

[0055] (1) Identification of abnormal data

[0056] Data flow tracking: In the control system of the multifunctional heat exchange phosphine tank, after the data is collected by the sensor, it will be transmitted in each module and system along a specific path. By establishing a data flow model, the flow trajectory of the data can be clearly depicted. When abnormal data appears, it can be traced back along this trajectory to determine where the abnormality occurred in the data. For example, if the liquid level data is found to be abnormal, starting from the liquid level sensor, check the situation of the data in each link such as when it is transmitted to the liquid level display module and the data processing center, to see if it is caused by sensor failure, transmission line interference, or data processing algorithm error, etc.

[0057] Timestamp correlation analysis: Add an accurate timestamp to each data point, so that when tracing the path, the generation process of abnormal data can be analyzed according to the time sequence. For example, when the pressure data suddenly rises and exceeds the threshold, through the timestamp, the changes of other relevant data (such as temperature, flow rate, etc.) before and after the pressure abnormality appears, as well as the operation records of each path node at the corresponding time point, can be viewed to determine whether there are other factors triggering the abnormal change of pressure, or whether a certain node has performed an incorrect operation at a specific time.

[0058] Multi-source data fusion positioning: In addition to the data collected by the sensor, the system may also have data from other sources, such as equipment operation logs and operation instruction records. Fusing these multi-source data can trace the path of abnormal data more comprehensively. For example, by combining the maintenance records in the equipment operation log and the parameter adjustment information in the operation instruction record, it can be judged whether the abnormal data appears due to the most recent equipment maintenance or parameter adjustment, and determine the path nodes related to these operations.

[0059] (2) Node classification method

[0060] Location based on the trace path: When abnormal data appears, through the trace path model, quickly locate the position of the data in the entire data flow process and determine the path node it belongs to. The nodes include nodes based on key parts of the tank body, nodes based on key parts of the heat exchange system, and nodes based on key parts of the pipeline.

[0061] Among them, the node classification based on key parts of the tank body includes the following:

[0062] Temperature-related nodes: If the data of a certain temperature measurement point on the tank body is abnormal, such as the temperature shown by the top temperature sensor exceeding the normal range, it can be classified as an abnormal node of the top temperature of the tank body. Because there may be unique heat dissipation or heat absorption situations at the top of the tank body during the heat exchange process, which is closely related to the heat transfer processes such as convection inside the tank. If the bottom temperature is abnormal, it is a problem of the bottom temperature node of the tank body, and the bottom may be affected by factors such as medium precipitation and uneven heat exchange.

[0063] Pressure-related nodes: If the pressure sensor on the tank wall detects abnormal pressure, it can be determined as an abnormal node of the tank wall pressure according to its position. For example, if the pressure sensor near the feed inlet is abnormal, it may be related to the feed rate, feed pressure, etc.; while the abnormal pressure near the discharge outlet may be related to factors such as poor discharge and internal blockage. If there is abnormal pressure at the pressure relief port on the tank top, it can be regarded as a problem of the tank top pressure relief node, which may involve malfunctions of the pressure relief device, excessive internal pressure and inability to release it normally, etc.

[0064] Liquid level-related nodes: The liquid level sensor on the side of the tank body is used to monitor the liquid level. If the liquid level data is abnormal, it can be divided into abnormal nodes of the high liquid level node, the middle liquid level node and the low liquid level node according to the height where the sensor is located.

[0065] Among them, the node classification based on the key parts of the heat exchange system includes the following:

[0066] Heat exchanger body nodes: If the temperature sensor of the heat exchanger detects abnormal temperature exchange of the hot and cold media, it can be divided into abnormal nodes of the hot side temperature and abnormal nodes of the cold side temperature. For example, if the temperature on the hot side cannot drop, it may be due to fouling inside the heat exchanger, excessive flow rate of the hot medium, etc.; if the temperature on the cold side cannot rise, it may be due to insufficient supply of the cold medium, insufficient heat exchange area, etc. If the pressure sensor of the heat exchanger shows abnormal pressure, such as the inlet pressure of the heat exchanger being abnormally high, it may be due to blockage of the inlet pipeline; the outlet pressure being abnormally low may be due to leakage inside the heat exchanger.

[0067] Circulation pump nodes: If the speed sensor of the circulation pump feedbacks abnormal speed, it can be divided into nodes with too high speed and nodes with too low speed. Too high speed may be due to incorrect control signals, motor failures; too low speed may be due to insufficient motor power, damage to the pump impeller, etc. If the pressure sensor of the circulation pump detects abnormal outlet pressure, such as too high pressure may be due to blockage of the outlet pipeline; too low pressure may be due to poor pump body seal, air in the suction pipeline, etc.

[0068] Coolant / Heating Agent Storage Tank Nodes: If the liquid level sensor of the storage tank shows abnormal liquid level, it is divided into the high liquid level node and the low liquid level node. High liquid level may be due to faults in the replenishment system or poor return flow; low liquid level may be due to leakage, excessive consumption, etc. If the temperature sensor of the storage tank detects abnormal temperature, such as too high temperature may be due to poor heat dissipation or malfunction of the heating device; too low temperature may be due to poor heat preservation effect or malfunction of the cooling device.

[0069] Among them, the node classification based on key parts of the pipeline includes the following:

[0070] Pipeline Connection Part Nodes: If there is leakage at the flange connection of the pipeline, resulting in abnormal pressure or medium flow rate, it can be regarded as an abnormal flange connection node, which may be caused by damaged flange gaskets, loose bolts, etc. If there are cracks or leaks at the welded joints of the pipeline, causing abnormal pressure and flow rate data, it can be classified as a welding node problem, which may be due to welding quality problems, excessive pipeline stress, etc.

[0071] Pipeline Valve Nodes: If the regulating valve cannot regulate the flow rate normally, resulting in abnormal medium flow rate in the pipeline, it can be divided into the abnormal opening degree node of the regulating valve and the node of the regulating valve not closing tightly. Abnormal opening degree may be due to control signal faults, damage to the valve actuator; not closing tightly may be due to damage to the valve sealing surface, foreign objects stuck, etc. If the globe valve cannot be fully opened or closed, resulting in abnormal pipeline pressure and flow rate, it can be regarded as a globe valve node problem, which may be due to damage to the valve spool, valve stem failure, etc.

[0072] Pipeline Branch Nodes: At the branch of the pipeline, if the flow rate distribution is abnormal, it can be divided into different branch node abnormalities according to the specific branch situation. For example, if the flow rate from the main pipeline to a certain branch is too small, it may be due to blockage of the branch pipeline or small opening degree of the branch valve; if the flow rate is too large, it may be due to blockage of other branches or valve closure, etc.

[0073] Node Risk Level Classification: On the basis of classifying according to node functions, etc., it is also possible to further set risk levels for each node category. For critical nodes, such as the temperature and pressure control nodes that directly affect the safe operation of the phosphine tank, the risk level is set to high; for some auxiliary nodes, such as the nodes for monitoring environmental humidity, the risk level is relatively low. When abnormal data appears in nodes with different risk levels, different levels of response measures and attention degrees are taken.

[0074] Dynamic Classification Adjustment: As the phosphine tank operates and the system changes, the importance and correlation of nodes may change, so the classification rules need to have the ability to be dynamically adjusted. For example, when the heat exchange system is upgraded and transformed, the original coolant circulation node may have new correlations with other nodes, or the degree of its influence on the tank temperature control has changed. At this time, it is necessary to re-evaluate and adjust its classification.

[0075] Fault mode association: Associate node classification with possible fault modes. For example, when the temperature node shows abnormalities, possible fault modes include heating system failure, cooling system failure, temperature sensor failure, etc. By analyzing the characteristics of abnormal data, further determine possible fault modes to conduct more targeted troubleshooting and handling.

[0076] Among them, the monitoring of path nodes includes the following:

[0077] Real-time status monitoring: Utilize real-time data acquisition and transmission technologies to continuously monitor the operating status of each path node, including the working parameters of the node, data transmission situation, etc. Ensure that abnormalities of the node can be detected in a timely manner, such as whether the node is offline, whether data transmission is interrupted or delayed, etc.

[0078] Performance index evaluation: Set a series of performance indexes for each path node, such as data processing speed, data accuracy, response time, etc. By evaluating these performance indexes, determine whether the node is working properly. If the data processing speed of a certain data processing node significantly decreases, it may mean that there are hardware failures or software problems with the node.

[0079] Early warning of abnormal behavior: Establish an early warning model for node abnormal behavior. According to historical data and experience, determine the range and pattern of normal node behavior. When the behavior of the node exceeds the normal range, issue an early warning signal in a timely manner to indicate possible problems. For example, if a certain node frequently shows abnormal data fluctuations within a short period of time, and this kind of fluctuation does not conform to the normal operation law, it needs to be concerned and further analyzed.

[0080] The specific implementation work and action sequence of the phosphine tank container are as follows:

[0081] (I) Preparation stage

[0082] 1. Pipeline system inspection: Ensure that all valves in the pipeline are in a normal closed or standby state. The sealing performance and flexibility of the valves need to be strictly inspected to prevent leakage or jamming. All kinds of instruments, such as temperature sensors, pressure sensors, liquid level gauges, etc., need to be in a normal working state, and some instruments should be within the calibration validity period to ensure the accuracy of measurement data. Power equipment, such as refrigerant circulation pumps, also needs to be in a standby state that can be started at any time, and the electrical connections, mechanical components, etc. of the equipment need to be checked without errors.

[0083] 2. Container sealing inspection: Conduct a comprehensive inspection of the connection positions of each interface of the phosphine tank container to confirm that the sealing is intact. Methods such as airtightness tests can be used. Fill the container with an inert gas at a certain pressure, such as nitrogen, and then use a leak detector to detect each connection part to ensure no gas leakage.

[0084] 3. Control System: The control system needs to be debugged in advance to ensure it is in the standby state and can accurately receive and process various sensor signals. The software program of the control system needs to be checked and optimized to ensure its stability and reliability. At the same time, check the operation interface of the control system to ensure that the operator can easily operate and monitor.

[0085] (II) Tank Pre-cooling Stage

[0086] When the tank is at room temperature, open the refrigerant medium inlet valves of the outer cylinder and the internal coil, so that the refrigerant medium, such as liquid nitrogen or other low-temperature coolant, begins to circulate in the coil and the outer cylinder. The refrigerant medium exchanges heat with the tank wall and absorbs the heat of the tank, thereby gradually reducing the temperature of the tank. During the pre-cooling process, it is necessary to closely monitor the temperature change of the tank, and transmit the data to the control system in real time through the temperature sensor, so as to timely adjust the flow rate and circulation speed of the refrigerant medium to ensure uniform and stable cooling of the tank.

[0087] (III) Refrigerated Phosphine Gas Transportation Stage

[0088] When the temperature inside the container is detected by the temperature monitoring system to reach a certain low temperature, such as -50°C (the specific temperature is determined according to the process requirements), open the valve of the feed pipeline and start transporting the refrigerated phosphine gas into the tank. During the transportation process, it is necessary to control the transportation speed to avoid potential safety hazards such as excessive pressure fluctuations in the tank or generation of static electricity due to too fast gas flow rate. At the same time, continuously monitor the temperature and pressure changes inside the container to ensure they are within the safe range.

[0089] (IV) Liquid Phosphine Filling Stage

[0090] As the refrigerated phosphine gas is continuously transported, the temperature inside the container continues to drop. When the temperature inside the container is detected by the temperature to reach near the working low temperature, such as -80°C (the specific temperature is determined according to the process requirements), liquid phosphine can be added to the container. The filling of liquid phosphine needs to strictly control the filling amount, and the liquid level height is monitored in real time through the liquid level gauge. When the normal filling capacity is reached, immediately stop the filling operation and close the filling valve. During the filling process, it is also necessary to closely pay attention to the temperature and pressure changes inside the container to ensure the safety and stability of the entire filling process.

[0091] (V) Normal Operation Monitoring Stage

[0092] After the container enters the normal working state, the temperature, pressure and liquid level inside the container are monitored in real time through an online monitoring system. The temperature sensor, pressure sensor and liquid level gauge transmit the collected data to the control system in real time, and the control system analyzes and processes this data. Once abnormal fluctuations in temperature, pressure or liquid level are detected, the control system will immediately take corresponding measures, such as adjusting the flow rate of the refrigerant medium, starting or stopping relevant equipment, etc., to maintain the stability of the internal state of the container and ensure that the phosphine storage is in a normal working state.

[0093] (6) Continuous circulation stage of the refrigerant medium

[0094] To maintain the low-temperature environment inside the container and keep the refrigerant medium in the outer cylinder and the internal coil continuously circulating. The refrigerant medium circulation pump works continuously, continuously transporting the refrigerant medium to the coil and the outer cylinder. After heat exchange with the tank body, it then flows back to the refrigerant storage device for cooling or replenishment. During the circulation process of the refrigerant medium, parameters such as the liquid level, temperature, and pressure of the refrigerant medium need to be regularly checked to ensure the quality and circulation effect of the refrigerant medium.

[0095] (7) Temperature adjustment stage

[0096] When the temperature inside the container changes due to the filling or discharging of phosphine. At this time, the control system automatically adjusts the flow rate of the refrigerant medium according to the temperature data feedback by the temperature sensor. When the temperature rises, the flow rate and circulation speed of the refrigerant medium are increased to enhance the heat exchange effect and lower the temperature inside the container; when the temperature drops, the flow rate and circulation speed of the refrigerant medium are appropriately reduced to avoid adverse effects on the equipment and phosphine storage caused by too low temperature. Through this automatic adjustment mechanism, the temperature inside the container is always kept within a controllable range. The whole process is automatically controlled through an automated control system, and at the same time, multiple safety protection devices, such as safety valves, emergency cut-off valves, etc., are equipped to ensure the good state of phosphine storage and the safe operation of the equipment.

[0097] It should be noted that in this article, the term "including", "comprising" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0098] In this text, specific examples are used to illustrate the principles and implementation modes of the present invention. The description of the above examples is only for helping to understand the method and its core idea of the present invention. The above description is only the preferred implementation mode of the present invention. It should be noted that due to the limitation of literal expression, objectively there are infinite specific structures. For those of ordinary skill in the art in this technical field, without departing from the principle of the present invention, several improvements, embellishments or changes can be made, or the above technical features can be combined in an appropriate way; these improvements, embellishments, changes or combinations, or directly applying the concept and technical solution of the invention to other occasions without improvement, shall all be regarded as the protection scope of the present invention.

Claims

1. A multifunctional heat exchange phosphine tank, comprising a tank body, wherein the tank body comprises a safety valve, a temperature transmitter, a pressure transmitter, a radar level gauge and a control system, characterized in that: The tank body comprises an inner cylinder body and an outer cylinder body, and the control system comprises gas-liquid balance control, heat balance control and operation data control of the tank body; The outer cylinder is provided with a double-channel heat exchange structure and an outer half-tube of the cylinder. The double-channel heat exchange structure is provided with a condensate heat exchange channel and a fluorine heat exchange channel. The condensate heat exchange channel is provided with a continuous spiral surface supporting guide vane. The outer half-tube of the cylinder is located at the top of the condensate heat exchange channel. The outer half-tube of the cylinder includes an upper head outer half-tube and a plurality of straight arc outer half-tubes. An internal coil is provided at the bottom of the inner cylinder, and the internal coil is immersed in the liquid at the bottom of the inner cylinder. The internal coil structure is a concentric serpentine structure divided into several groups, and each group is connected to form a whole through tie rods and connecting pipes. The internal coil is a whole hollow circular tube filled with a medium, and the connecting pipe is a hollow circular tube, and the diameter of the connecting pipe is smaller than the diameter of the internal coil; the inner cylinder is provided with a minimum liquid level line and a minimum gas level line, the minimum liquid level line is located at the bottom of the inner cylinder, and the minimum gas level line is located at the top of the inner cylinder.

2. A multifunctional heat exchange phosphine tank according to claim 1, characterized in that: The outer half pipe of the upper head is provided with a 180° short radius elbow and a sealing plate, and the outer half pipe of the straight arc is provided with a 90° short radius elbow.

3. The multifunctional heat exchange phosphine tank according to claim 1, characterized in that: The operation data control of the tank body is divided into a normal data module and an abnormal data module based on the instruments on the tank body. The normal data module collects the key data of the tank body in real time and summarizes them to form a normal operation parameter system of the tank body. The parameter system forms a traceability path according to the classification of key parts of the tank body, the heat exchange system, and the pipeline. The traceability path classifies the abnormal data into nodes according to the classification of key parts to form path nodes. The nodes include nodes based on the key parts of the tank body, nodes based on the key parts of the heat exchange system, and nodes based on the key parts of the pipeline.

4. The multifunctional heat exchange phosphine tank according to claim 1, characterized in that: The gas-liquid balance control is based on the lowest liquid level line and the lowest gas level line on the inner cylinder. When the liquid is lower than the lowest liquid level line, the control system starts the medium refrigeration of the inner cylinder and the outer cylinder, and at the same time fills the tank with phosphine; When the liquid exceeds the lowest gas level line, the control system starts heating the media in the inner and outer cylinders.

5. The multifunctional heat exchange phosphine tank according to claim 1, characterized in that: The gas-liquid balance control can also be controlled based on the pressure inside the inner cylinder, and its expression is: , The mole fraction of phosphine in the gas phase, Total pressure in the tank (Pa), The mole fraction of phosphine in the liquid phase, The activity coefficient of phosphine, The saturated vapor pressure (Pa) of phosphine at temperature was calculated by the Antoine equation.

6. The multifunctional heat exchange phosphine tank according to claim 1, characterized in that: The thermal balance control divides the total heat exchange amount into three parts: condensate channel heat transfer control, fluorine channel heat transfer control and internal coil heat transfer control. The condensate channel heat transfer control includes the enhanced control of turbulence by spiral surface supporting guide vanes, and the internal coil heat transfer control includes the forced convection heat exchange control between the internal concentric coils and the liquid.

7. The multifunctional heat exchange phosphine tank according to claim 1, characterized in that: A stainless steel skin is arranged on the tank body, an aerogel felt is arranged under the stainless steel skin, and the aerogel felt is attached to the surface of the outer cylinder body.

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