Method for manufacturing glass substrate
By using the initial glass substrate formed by cooling the reinforcement components and the glass substrate during the manufacturing process, the problems of fragility and low yield of the glass substrate are solved, and the effect of improving the overall strength and flexural resistance of the glass substrate is achieved.
Patent Information
- Application Number
- CN202510221067.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-26
- Publication Date
- 2025-05-30
AI Technical Summary
The glass substrate is prone to shatter during the manufacturing process and has a low yield, resulting in a decrease in the overall strength and flexural resistance of the glass.
By adding a plurality of reinforcement components, such as reinforcement components composed of the main body and convex portion, in the manufacturing process of the glass substrate, it extends through the accommodating cavity of the mold and is fixedly connected to the side wall of the mold, and is filled with molten glass liquid into the accommodating cavity, cooling it to form an initial glass substrate, and cutting and removing the reinforcement components to obtain the final glass substrate.
The overall strength and flexural resistance of the glass substrate are improved, the stability and durability of the glass substrate are enhanced, and the problems of fragility and low yield of the glass substrate are solved.
Smart Images
Figure CN120058218A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor technology, and relates to, but is not limited to, a method for manufacturing a glass substrate. Background Art
[0002] For a glass substrate, such as a glass substrate applied to electronic devices, due to the high brittleness and small fracture toughness of the glass itself, during the manufacturing process of the glass substrate, there are problems such as the glass being easily broken and the low yield, which will inevitably lead to a reduction in the strength of the glass substrate. Therefore, it is necessary to improve the overall strength and flexural resistance of the glass. Summary of the Invention
[0003] In view of this, an embodiment of this application provides a method for manufacturing a glass substrate.
[0004] An embodiment of this application provides a method for manufacturing a glass substrate. The manufacturing method includes: providing a mold; the mold has a receiving cavity; extending a plurality of reinforcing members through the receiving cavity and fixedly connecting them to the side wall of the mold; filling the receiving cavity with molten glass; cooling the molten glass to form an initial glass substrate; the initial glass substrate includes a first part and a second part surrounding the first part; the area of the second part is smaller than the area of the first part; wherein, the plurality of reinforcing members extend through the second part and are surrounded by the second part, for improving the overall strength and flexural resistance of the initial glass substrate; cutting off the second part and the reinforcing members to obtain the glass substrate; the glass substrate includes a separated second part.
[0005] In some embodiments, the reinforcing member includes a main body portion and a plurality of convex portions integrally connected to the main body portion; the main body portion is columnar and extends axially through the second part, and the convex portions protrude circumferentially from the main body portion; the plurality of convex portions are arranged in an axial and circumferential array; the material of the reinforcing member includes tungsten or ceramic fiber.
[0006] In some embodiments, the cross-sectional shape of the convex portion includes a triangle or an arc shape.
[0007] In some embodiments, the mold includes a first sidewall and a second sidewall that are oppositely disposed along a first direction, and a third sidewall and a fourth sidewall that are oppositely disposed along a second direction; the first direction intersects the second direction; the plurality of reinforcing members include a plurality of first reinforcing members adjacent to the first sidewall, a plurality of second reinforcing members adjacent to the second sidewall, a plurality of third reinforcing members adjacent to the third sidewall, and a plurality of fourth reinforcing members adjacent to the fourth sidewall; extending the plurality of reinforcing members through the accommodating cavity and fixedly connecting them to the sidewalls of the mold includes: extending the plurality of first reinforcing members through the accommodating cavity along an extending direction parallel to the first sidewall, and fixedly connecting them to the sidewalls of the third sidewall and the fourth sidewall; extending the plurality of second reinforcing members through the accommodating cavity along an extending direction parallel to the second sidewall, and fixedly connecting them to the sidewalls of the third sidewall and the fourth sidewall; extending the plurality of third reinforcing members through the accommodating cavity along an extending direction parallel to the third sidewall, and fixedly connecting them to the sidewalls of the first sidewall and the second sidewall; extending the plurality of fourth reinforcing members through the accommodating cavity along an extending direction parallel to the fourth sidewall, and fixedly connecting them to the sidewalls of the first sidewall and the second sidewall.
[0008] In some embodiments, the plurality of first reinforcing members and the plurality of second reinforcing members are arranged side by side along the first direction, and the plurality of third reinforcing members and the plurality of fourth reinforcing members are arranged side by side along the second direction; alternatively, the plurality of first reinforcing members and the plurality of second reinforcing members are arranged side by side along the thickness direction of the mold, and the plurality of third reinforcing members and the plurality of fourth reinforcing members are arranged side by side along the thickness of the mold.
[0009] In some embodiments, the first sidewall and the second sidewall are symmetrically arranged along the first direction, and the third sidewall and the fourth sidewall are symmetrically arranged along the second direction; the plurality of first reinforcing members and the plurality of second reinforcing members are symmetrically arranged along the first direction, and the plurality of third reinforcing members and the plurality of fourth reinforcing members are symmetrically arranged along the second direction.
[0010] In some embodiments, the mold includes a bearing member and a surrounding member located on the bearing member; the bearing member and the surrounding member combination has an accommodating cavity; extending the plurality of reinforcing members through the accommodating cavity and fixedly connecting them to the sidewalls of the mold includes: extending the plurality of reinforcing members through the accommodating cavity and fixedly connecting them to the surrounding member.
[0011] In some embodiments, cutting and removing the second part and the reinforcing members to obtain a glass substrate includes: releasing the fixed connection to separate the plurality of reinforcing members from the surrounding member; removing the bearing member and the surrounding member; cutting and separating the first part and the second part, and removing the second part and the reinforcing members to obtain a separated first part.
[0012] In some embodiments, cutting and removing the second part and the reinforcing members to obtain a glass substrate includes: cutting and separating the first part and the second part; removing the mold to obtain a separated first part.
[0013] In some embodiments, the manufacturing method further includes: releasing the fixed connection to separate the plurality of reinforcing components from around the component; separating the plurality of reinforcing components from the first partial component, and the separated plurality of reinforcing components are for reuse.
[0014] In each embodiment of the present application, by adding a plurality of reinforcing components during the manufacturing process of the glass substrate, the overall strength and flexural resistance of the initial glass substrate are improved. The edge portion (the second part) of the initial glass substrate connected with the plurality of reinforcing components is cut off to obtain the middle portion (the first part) of the initial glass substrate without the plurality of reinforcing components. By improving the overall strength and flexural resistance of the initial glass substrate, the overall strength and flexural resistance of the glass substrate can ultimately be improved. Description of the Drawings
[0015] Figure 1 It is a schematic flowchart of the implementation process of a manufacturing method of a glass substrate provided by an embodiment of the present application;
[0016] Figures 2 to 7 It is a top plan view and a corresponding cross-sectional view of a manufacturing process of a glass substrate provided by an embodiment of the present application;
[0017] Figure 8 It is one of the top plan view and the corresponding cross-sectional view of the initial glass substrate separated provided by an embodiment of the present application;
[0018] Figure 9 It is the other top plan view and the corresponding cross-sectional view of the initial glass substrate separated provided by an embodiment of the present application;
[0019] Figure 10 It is a top plan view and a corresponding cross-sectional view of a mold connected with a reinforcing component provided by an embodiment of the present application;
[0020] Figure 11 It is a top plan view and a corresponding cross-sectional view of another mold connected with a reinforcing component provided by an embodiment of the present application;
[0021] Figures 12 to 14 It is a top plan view and a corresponding cross-sectional view of some reinforcing components provided by an embodiment of the present application. Detailed Embodiments
[0022] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the embodiments of the present application and the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative efforts belong to the scope of protection of the present application.
[0023] In the following description, numerous specific details are given to provide a more thorough understanding of the present application. However, it is obvious to those skilled in the art that the present application may be implemented without one or more of these details. In other examples, in order to avoid confusion with the present application, some well-known technical features are not described; that is, not all features of the actual embodiments are described here, and the well-known functions and structures are not described in detail.
[0024] In the drawings, for clarity, the dimensions of layers, regions, elements, and their relative dimensions may be exaggerated. The same reference numerals throughout the drawings denote the same elements.
[0025] It should be understood that when an element or layer is referred to as "on", "adjacent to", "connected to", or "coupled to" another element or layer, it can be directly on, adjacent to, connected to, or coupled to the other element or layer, or there may be intervening elements or layers. In contrast, when an element is referred to as "directly on", "directly adjacent to", "directly connected to", or "directly coupled to" another element or layer, there are no intervening elements or layers. It should be understood that although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers, and / or parts, these elements, components, regions, layers, and / or parts should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer, or part from another element, component, region, layer, or part. Therefore, without departing from the teachings of the present application, the first element, component, region, layer, or part discussed below may be referred to as the second element, component, region, layer, or part. And when discussing the second element, component, region, layer, or part, it does not mean that the present application necessarily has a first element, component, region, layer, or part.
[0026] Spatial relationship terms such as "under", "below", "lower", "beneath", "above", "upper", etc. may be used herein for convenience of description to describe the relationship of one element or feature shown in the figures with other elements or features. It should be understood that spatial relationship terms are intended to include different orientations of the device in use and operation in addition to the orientation shown in the figures. For example, if the device in the figures is flipped, then an element or feature described as "under other elements" or "beneath them" or "under them" will be oriented "above" the other elements or features. Thus, the exemplary terms "under" and "beneath" can include both the upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or other orientations) and the spatial descriptors used herein are to be interpreted accordingly.
[0027] The purpose of the terms used herein is only to describe specific embodiments and is not a limitation of the present application. As used herein, the singular forms "a", "an" and "the" are also intended to include the plural forms unless the context clearly dictates otherwise. It should also be understood that the terms "comprising" and / or "including", when used in this specification, specify the presence of features, integers, steps, operations, elements and / or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or groups. As used herein, the term "and / or" includes any and all combinations of the related listed items.
[0028] To thoroughly understand the present application, detailed steps and detailed structures will be presented in the following description to illustrate the technical solutions of the present application. The preferred embodiments of the present application are described in detail below. However, in addition to these detailed descriptions, the present application may have other embodiments.
[0029] In the related art, glass substrates can be manufactured by the float process, the slot-draw process, and the overflow fusion process. The glass substrates manufactured by the related art have problems such as being fragile and having a low yield, and it is necessary to improve the overall strength and flexural resistance of the glass.
[0030] Figure 1 The following is a schematic diagram of the implementation process of a manufacturing method for a glass substrate provided by an embodiment of the present application.
[0031] An embodiment of the present application provides a manufacturing method for a glass substrate, referring to Figure 1 , the manufacturing method includes the following steps:
[0032] S101. Provide a mold; the mold has a receiving cavity;
[0033] S102. Extend a plurality of reinforcing members through the receiving cavity and fixedly connect them to the side wall of the mold;
[0034] S103. Fill the accommodating cavity with molten glass liquid;
[0035] S104. Cool the molten glass liquid to form an initial glass substrate; the initial glass substrate includes a first part and a second part surrounding the first part; the area of the second part is smaller than that of the first part; wherein, a plurality of reinforcing members extend through the second part and are surrounded by the second part, for improving the overall strength and flexural resistance of the initial glass substrate;
[0036] S105. Cut off the second part and the reinforcing members to obtain a glass substrate; the glass substrate includes a separated second part.
[0037] Figures 2 to 7 This is a top - plan schematic view of the manufacturing process of a glass substrate provided by an embodiment of the present application and its corresponding cross - sectional schematic view. For example, Figure 2 in Figure 2 (a) is a top - plan schematic view, Figure 2 in Figure 2 (b) is a cross - sectional schematic view of the B - B section (X - Z section) of Figure 2 (a).
[0038] In each embodiment of the present application, the first direction intersects (for example, is orthogonal) with the second direction, both the first direction and the second direction are parallel to the bottom surface of the mold, and the third direction is perpendicular to the bottom surface of the mold. Exemplarily, the first direction is represented as the X direction in the drawings; the second direction is represented as the Y direction in the drawings; the third direction is represented as the Z direction in the drawings, and the Y direction in the drawings is orthogonal to the X direction.
[0039] It should be understood that Figure 1 the steps shown are not exclusive, and other steps can be performed before, after, or between any of the shown operations; Figure 1 the steps shown can be adjusted in order according to actual needs. The manufacturing method of the semiconductor structure provided by the embodiments of the present application will be described in detail below with reference to Figure 1 and Figures 2 to 7 .
[0040] Execute steps S101 and S102 to provide a mold and fixedly connect a plurality of reinforcing members to the mold.
[0041] Referring to Figure 2 and Figure 3 , in some embodiments, the mold 102 includes a bearing member 104 and a surrounding member 106 located on the bearing member 104; the combination of the bearing member 104 and the surrounding member 106 has an accommodating cavity cham1; fixedly connecting a plurality of reinforcing members to extend through the accommodating cavity and between the side walls of the mold includes: extending a plurality of reinforcing members 108 through the accommodating cavity cham1 and fixedly connecting them to the surrounding member 106.
[0042] It should be noted that the fixed connection can be understood as a detachable connection method. After the connection is formed, the multiple reinforcing members 108 and the surrounding member 106 form a fixed whole. For example, the multiple reinforcing members 108 can be fixed on the surrounding member 106 by screw connection, and the multiple reinforcing members 108 and the surrounding member 106 are relatively stationary.
[0043] The mold 102 is a tool for forming a glass substrate from molten glass liquid, and can be composed of a bearing member 104 and a surrounding member 106. The bearing member 104 is used to bear the surrounding member 106. The surrounding member 106 has a specific shape formed by surrounding. The bearing member 104 and the surrounding member 106 are combined to form a receiving cavity cham1 with a specific shape. The bearing member 104 and the surrounding member 106 can be made of alloy steel or cemented carbide. For example, alloy steel includes alloying elements such as chromium, tungsten, molybdenum, and vanadium. For example, cemented carbide includes tungsten carbide, cobalt carbide, niobium carbide, titanium carbide, or tantalum carbide. For example, the bearing member 104 and the surrounding member 106 can be made of high-alloy austenitic heat-resistant steel. In some embodiments, the materials of the bearing member 104 and the surrounding member 106 can be different.
[0044] In some embodiments, the surrounding member 106 and the bearing member 104 are combined to form a receiving cavity cham1, and the receiving cavity cham1 has the specific shape in the X-Y plane; the specific shape of the surrounding member 106 can be set according to the requirements of the process. For example, the specific shape can be a polygon (such as Figure 2 the square shown), a circle (such as Figure 11 shown), or an ellipse. Optionally, the specific shape can also be a shape composed of arcs and line segments, such as a semi-circle or a sector.
[0045] Refer to Figure 2 , the receiving cavity cham1 includes a first region p1 and a second region p2 surrounding the first region p1; the area of the second region p2 is smaller than the area of the first region p1. For example, the area of the second region p2 is less than 10%, 9%, 8%, 7%, 6%, 5%, 4%, 3%, 2%, or 1% of the area of the receiving cavity cham1.
[0046] Refer to Figure 3, the middle part of the strengthening member 108 extends through the second region p2 and is surrounded by the second region p2. The two end parts are fixed to the surrounding member 106. The two end parts of the strengthening member 108 are fixedly connected to the surrounding member 106, and the middle part of the strengthening member 108 can be in a tensile or compressive state. The way of this fixed connection can be flange connection, threaded connection or clamp connection. In some embodiments, the material of the strengthening member 108 includes materials with high tensile strength and high temperature resistance such as tungsten or ceramic fibers.
[0047] In some embodiments, the strengthening member can be fixed to the surrounding member by applying prestress, which is used to improve the overall strength and flexural resistance of the glass substrate during the manufacturing process. For example, the strengthening member and the surrounding member are connected by threaded connection, and a tensile stress is applied to the strengthening member, so that the strengthening member is in a tensile state (or compressive state) and is fixed to the surrounding member, which is used to provide the support strength and flexural resistance for the molten glass liquid to cool into the initial glass substrate during the manufacturing process. After the fixed connection between the strengthening member and the surrounding member is released, the released strengthening member can form a compressive stress (or tensile stress) on the initial glass substrate, which is beneficial to improving the overall strength and flexural resistance of the initial glass substrate.
[0048] Figure 10 FIG. is a top plan view schematic diagram of a mold connected with a strengthening member provided by an embodiment of the present application and its corresponding cross-sectional schematic diagram. Figure 10 in Figure 10 (a) is a top plan view schematic diagram, Figure 10 in Figure 10 (b) is Figure 10 a cross-sectional schematic diagram of the B-B section (X-Z section) of (a). Figure 11 FIG. is another top plan view schematic diagram of a mold connected with a strengthening member provided by an embodiment of the present application and its corresponding cross-sectional schematic diagram. Figure 11 in Figure 11 (a) is a top plan view schematic diagram, Figure 11 in Figure 11 (b) is Figure 11 a cross-sectional schematic diagram of the B-B section (X-Z section) of (a).
[0049] Refer to Figure 3 、 Figure 10 、 Figure 11, in some embodiments, the mold includes a first sidewall s1 and a second sidewall s2 oppositely disposed along a first direction, and a third sidewall s3 and a fourth sidewall s4 oppositely disposed along a second direction; the first direction intersects the second direction; the plurality of reinforcing members includes a plurality of first reinforcing members 1081 adjacent to the first sidewall s1, a plurality of second reinforcing members 1082 adjacent to the second sidewall s2, a plurality of third reinforcing members 1083 adjacent to the third sidewall s3, and a plurality of fourth reinforcing members 1084 adjacent to the fourth sidewall s4; extending the plurality of reinforcing members through the accommodating cavity and fixedly connecting them to the sidewalls of the mold includes: extending the plurality of first reinforcing members 1081 through the accommodating cavity cham1 along the extending direction parallel to the first sidewall s1, and fixedly connecting them to the sidewalls of the third sidewall s3 and the fourth sidewall s4; extending the plurality of second reinforcing members 1082 through the accommodating cavity cham1 along the extending direction parallel to the second sidewall, and fixedly connecting them to the sidewalls of the third sidewall s3 and the fourth sidewall s4; extending the plurality of third reinforcing members 1083 through the accommodating cavity cham1 along the extending direction parallel to the third sidewall s3, and fixedly connecting them to the sidewalls of the first sidewall s1 and the second sidewall s2; extending the plurality of fourth reinforcing members 1084 through the accommodating cavity cham1 along the extending direction parallel to the fourth sidewall s4, and fixedly connecting them to the sidewalls of the first sidewall s1 and the second sidewall s2. In this way, corresponding-shaped reinforcing members can be matched according to the shape of the accommodating cavity during the manufacturing process to improve the overall strength and flexural resistance of the glass substrate.
[0050] For example, referring to Figure 3 , Figure 10 , the shape of the accommodating cavity cham1 is square, the first sidewall s1 and the second sidewall s2 extend linearly along the first direction, and the first reinforcing member 1081 and the second reinforcing member 1082 are linear and extend linearly along the first direction; the third sidewall s3 and the fourth sidewall s4 extend linearly along the second direction, and the third reinforcing member 1083 and the fourth reinforcing member 1084 are linear and extend linearly along the second direction; wherein, the first direction is orthogonal to the second direction.
[0051] For example, referring to Figure 11 , the shape of the accommodating cavity cham1 is circular, the first sidewall s1 and the second sidewall s2 extend along a 1 / 4 arc, and the first reinforcing member 1081 and the second reinforcing member 1082 are arc-shaped and extend along a 1 / 4 arc; the third sidewall s3 and the fourth sidewall s4 extend along a 1 / 4 arc, and the third reinforcing member 1083 and the fourth reinforcing member 1084 are arc-shaped and extend along a 1 / 4 arc; wherein, the sidewalls forming the accommodating cavity cham1 are continuously extending sidewalls, and the first sidewall s1, the second sidewall s2, the third sidewall s3, and the fourth sidewall s4 are respectively defined as partial sidewalls located at four different orientations of the continuously extending sidewall.
[0052] Referring toFigure 3 , Figure 10 , Figure 11 , in some embodiments, a plurality of first reinforcing members 1081 and a plurality of second reinforcing members 1082 are arranged side by side in a first direction, and a plurality of third reinforcing members 1083 and a plurality of fourth reinforcing members 1084 are arranged side by side in a second direction. In this way, the overall strength and flexural resistance of the glass substrate in the first direction and the second direction can be balanced during the manufacturing process.
[0053] Reference Figure 10 , in some embodiments, a plurality of first reinforcing members 1081 and a plurality of second reinforcing members 1082 are arranged side by side in the thickness direction of the mold, and a plurality of third reinforcing members 1083 and a plurality of fourth reinforcing members 1084 are arranged side by side along the thickness of the mold. In this way, the overall strength and flexural resistance of the glass substrate in the thickness direction of the mold can be balanced during the manufacturing process.
[0054] Reference Figure 3 , Figure 10 , Figure 11 , in some embodiments, the first side wall and the second side wall are symmetrically arranged in a first direction, and the third side wall and the fourth side wall are symmetrically arranged in a second direction; the plurality of first reinforcing members 1081 and the plurality of second reinforcing members 1082 are symmetrically arranged in a first direction, and the plurality of third reinforcing members 1083 and the plurality of fourth reinforcing members 1084 are symmetrically arranged in a second direction. In this way, the overall strength and flexural resistance of the glass substrate in all directions can be balanced during the manufacturing process.
[0055] Figures 12 to 14 FIG. is a top plan view of some reinforcing members provided in an embodiment of the present application and a corresponding cross-sectional view thereof. For example, Figure 12 in Figure 12 (a) is a top plan view, Figure 12 in Figure 12 (b) is a Figure 12 cross-sectional view of the B-B section (X-Z section) of (a).
[0056] Combined with reference to Figure 3 and Figure 12 , in some embodiments, the reinforcing member 108 includes a main body portion 108a and a plurality of convex portions 108b integrally connected to the main body portion 108a; the main body portion 108a is columnar and extends axially through the second portion p2, and the convex portions 108b protrude circumferentially from the main body portion 108a; the plurality of convex portions 108b are arranged in an axial and circumferential array; the material of the reinforcing member 108 includes tungsten or ceramic fiber.
[0057] The main body portion 108a can be polygonal columnar (such as a cuboid), cylindrical or elliptical cylindrical. The axial direction is understood as the extending direction of the central axis of the main body portion 108a, and the axial direction can be a straight line as shown in Figure 3 and Figure 10 or an arc line as shown in Figure 11 ; the circumferential direction is understood as the direction of counterclockwise / clockwise around the central axis of the main body portion 108a in a plane perpendicular to the axial direction. In some embodiments, a plurality of convex portions 108b are arranged in an axial and circumferential array, which can increase the contact area with the molten glass liquid while balancing the stress of the glass substrate in all directions. In some embodiments, the number of convex portions 108b arranged in the circumferential direction can be 6, or other numbers more than 6 (such as 8) or less than 6 (such as 2).
[0058] Compared with the strengthening member composed of only one main body portion, the strengthening member including one main body portion and a plurality of convex portions has a larger surface area, can increase the contact area with the molten glass liquid during the manufacturing process, improve the fixing strength between the strengthening member and the molten glass liquid, and is beneficial to improving the overall strength and flexural resistance of the initial glass substrate formed after cooling.
[0059] Refer to Figure 12 , Figure 13 , Figure 14 , in some embodiments, the cross-sectional shape of the convex portion 108b includes a triangle or an arc shape. Refer to Figure 14 , the cross-sectional shape of the convex portion 108b is an arc shape, which can increase the contact area with the molten glass liquid while avoiding tip and sharp structures and stress concentration. Optionally, the cross-sectional shape of the convex portion 108b includes a body region and a top region top1. In order to avoid stress concentration, the top region top1 is set to be rounded ([[]] Figure 12 and Figure 13 not shown).
[0060] Execute step S103 to fill the mold with molten glass liquid.
[0061] Refer to Figure 4 , fill the accommodation cavity cham1 (as shown in Figure 3 ) with molten glass liquid 110. In some embodiments, the raw materials of the molten glass liquid include silicon oxide, aluminum oxide, aluminum oxide, boron oxide and sodium oxide. The raw materials are melted at a high temperature to form the molten glass liquid. Among them, silicon oxide can be used to form silicon-oxygen tetrahedrons as the basic glass network of the glass, ensuring the strength, chemical stability, etc. of the glass substrate. Aluminum oxide can form [AlO 4+Tetrahedrons are joined to silicon-oxygen tetrahedrons to further enhance the strength, chemical stability, etc. of the glass substrate. Boron oxide can also act as a glass network former, capable of forming boron-oxygen tetrahedrons and silicon-oxygen tetrahedrons to form the basic glass network of the glass, contributing to the realization of the microstructure of interlocked crystals and also improving the damage resistance of the glass substrate. Sodium oxide can reduce the viscosity of the molten glass.
[0062] Perform step S104 to cool the molten glass to form an initial glass substrate.
[0063] Reference Figure 5 , cool the molten glass 110 (as Figure 4 shown) to form an initial glass substrate 112. The initial glass substrate 112 includes a first part 114 and a second part 116 surrounding the first part 114; the area of the second part 116 is smaller than the area of the first part 114; wherein, a plurality of reinforcing members 108 extend through the second part 116 and are surrounded by the second part 116, for enhancing the overall strength and flexural resistance of the initial glass substrate. In some embodiments, the cooling rate can be controlled between 100 K / s and 110 K / s, preferably, the cooling rate can be controlled between 102 K / s and 105 K / s. The cooling rate is crucial for forming the initial glass substrate. Too fast cooling may cause stress to generate inside the initial glass substrate, making it fragile and prone to cracking; while too slow cooling will affect the production efficiency and may make the structure of the initial glass substrate too loose, reducing its strength and hardness. In some embodiments, the molten glass can be cooled in a stepwise cooling or segmented cooling manner. For example, first let the glass liquid cool slowly within a specific temperature range to gradually stabilize the internal structure, and then further cool it to room temperature.
[0064] Reference Figure 5 , Figure 6 and Figure 7 , in some embodiments, cutting and removing the second part and the reinforcing members to obtain the glass substrate includes: releasing the fixed connection to separate the plurality of reinforcing members 108 from the surrounding member 106; removing the carrier member 104 and the surrounding member 106; cutting and separating the first part 114 and the second part 116, removing the second part 116 and the reinforcing members 108, to obtain the separated first part 114. After separating the mold 102 from the plurality of reinforcing members 108 and the initial glass substrate 112, the first part 114 and the second part 116 can be separated into two independent parts using a laser cutting process, and the separated first part 114 is used to form the glass substrate.
[0065] Figure 8 This is one of the top view plane schematic diagram and the corresponding cross-sectional schematic diagram of the separated initial glass substrate provided by the embodiment of the present application. Figure 8 in Figure 8(a) is a schematic top - view plan, Figure 8 in Figure 8 (b) is Figure 8 a schematic cross - sectional view of the B - B section (X - Z section) of (a).
[0066] Referring to Figure 6 and Figure 7 and Figure 8 , in some embodiments, the manufacturing method further includes: separating a plurality of reinforcing components 108 from the first part 114, and the separated plurality of reinforcing components 108 are for reuse. The method of separating the plurality of reinforcing components 108 from the first part 114 can be a mechanical crushing method or a thermal stress crushing method. The separated second part 116 has a space cham2, and the space cham2 can be understood as the space corresponding to the position of the first part 114 after the first part 114 of the initial glass substrate 112 is separated.
[0067] Referring to Figure 5 and Figure 9 , in some embodiments, cutting and removing the second part and the reinforcing components to obtain a glass substrate includes: cutting and separating the first part 114 and the second part 116; removing the mold to obtain the separated first part 114. The first part 114 and the second part 116 can be separated into two independent parts by using a laser cutting process in the case where the mold 102 is not separated from the plurality of reinforcing components 108 and the initial glass substrate 112, and the separated first part 114 is used to form the glass substrate; wherein, the mold 102, the plurality of reinforcing components 108, and the separated second part 116 are an integral body.
[0068] Figure 9 This is the second schematic top - view plan and the corresponding cross - sectional view of the initial glass substrate separated according to the embodiment of the present application. Figure 9 in Figure 9 (a) is a schematic top - view plan, Figure 9 in Figure 9 (b) is Figure 9 a schematic cross - sectional view of the B - B section (X - Z section) of (a).
[0069] Referring to Figure 9 and Figure 8 , in some embodiments, the manufacturing method further includes: releasing the fixed connection to separate a plurality of reinforcing components 108 from the surrounding component 106; separating the plurality of reinforcing components 108 from the first part 114, and the separated plurality of reinforcing components 108 are for reuse. After separating the mold 102 from the plurality of reinforcing components 108 and the separated second part 116 (the obtained components after separation can refer to Figure 8As shown, a mechanical crushing method or a thermal stress crushing method can be used to separate a plurality of reinforcing components 108 from the first part 114; the separated second part 116 has a space cham2, which can be understood as the space corresponding to the position of the first part 114 after the first part 114 of the initial glass substrate 112 is separated.
[0070] In some embodiments, the glass substrate after cutting and separation also needs to go through a post-processing process, which includes edge treatment, cleaning and drying, surface treatment, etc. After going through the post-processing process, the glass substrate after cutting and separation forms a glass substrate that can be widely used in multiple fields.
[0071] Glass substrates are widely used in multiple fields, mainly including semiconductor packaging, display technology, and sensor packaging, etc. Glass substrates can be applied to consumer electronic devices and commercial electronic devices, such as displays, computer monitors, etc., and can also be applied to portable electronic devices, such as mobile phones, tablets, etc. Glass substrates can be applied to the field of semiconductor packaging. Due to their high flatness, good thermal stability, low thermal expansion coefficient, low dielectric loss, and good chemical stability, etc., glass substrates are particularly suitable for electronic packaging scenarios with demanding performance requirements. For example, through the Through-Silicon Via (TGV) process to make vertical electrical interconnections through the glass substrate, vertical conduction is made between chips and between wafers to achieve interconnection between chips, thereby reducing the signal transmission distance, increasing bandwidth, and realizing miniaturization of the package.
[0072] In each embodiment of the present application, by adding a plurality of reinforcing components during the manufacturing process of the glass substrate, the overall strength and flexural resistance of the initial glass substrate are improved. The edge part (the second part) of the initial glass substrate connected with the plurality of reinforcing components is cut off to obtain the middle part (the first part) of the initial glass substrate without the plurality of reinforcing components. By improving the overall strength and flexural resistance of the initial glass substrate, the overall strength and flexural resistance of the glass substrate can ultimately be improved.
[0073] It should be understood that the "one embodiment" or "an embodiment" mentioned throughout the specification means that the specific features, structures or characteristics related to the embodiment are included in at least one embodiment of the present application. Therefore, the "in one embodiment" or "in an embodiment" that appears throughout the specification does not necessarily refer to the same embodiment. In addition, these specific features, structures or characteristics may be combined in one or more embodiments in any suitable manner. It should be understood that in various embodiments of the present application, the magnitude of the serial numbers of the above processes does not mean the sequence of execution, and the execution sequence of each process should be determined by its function and internal logic, and should not constitute any limitation to the implementation process of the embodiments of the present application. The serial numbers of the embodiments of the present application above are only for description and do not represent the advantages or disadvantages of the embodiments.
[0074] The above description is only the preferred embodiment of the present application, and does not limit the protection scope of the present application. Any equivalent structural transformation made by using the content of the specification and drawings of the present application under the inventive concept of the present application, or direct / indirect application in other related technical fields is included in the protection scope of the present application.
Claims
1. A method for manufacturing a glass substrate, characterized in that: include: Provide molds; The mold has a containing cavity; Extending a plurality of reinforcing components through the accommodating cavity and fixedly connecting the reinforcing components to the side walls of the mold; Filling the accommodating cavity with molten glass; Cooling the molten glass to form an initial glass substrate; the initial glass substrate comprises a first portion and a second portion surrounding the first portion; the area of the second portion is smaller than the area of the first portion; wherein the plurality of reinforcing components extend through the second portion and are surrounded by the second portion, so as to improve the overall strength and anti-bending ability of the initial glass substrate; The second portion and the reinforcing member are cut and removed to obtain the glass substrate; the glass substrate includes the separated second portion.
2. The manufacturing method according to claim 1, characterized in that: The reinforcing component includes a main body and a plurality of protrusions connected to the main body as a whole; the main body is columnar and extends axially through the second part, and the protrusions protrude circumferentially from the main body; the plurality of protrusions are arranged in an array along the axial direction and the circumferential direction; the material of the reinforcing component includes tungsten or ceramic fiber.
3. The manufacturing method according to claim 2, characterized in that: The cross-sectional shape of the protrusion includes a triangle or an arc.
4. The manufacturing method according to claim 1, characterized in that: The mold comprises a first side wall and a second side wall arranged opposite to each other along a first direction, and a third side wall and a fourth side wall arranged opposite to each other along a second direction; the first direction intersects with the second direction; the plurality of reinforcing components comprises a plurality of first reinforcing components close to the first side wall, a plurality of second reinforcing components close to the second side wall, a plurality of third reinforcing components close to the third side wall, and a plurality of fourth reinforcing components close to the fourth side wall; The method of extending the plurality of reinforcing components through the accommodating cavity and fixedly connecting the plurality of reinforcing components to the side walls of the mold comprises: Extending the plurality of first reinforcing components through the accommodating cavity along an extension direction parallel to the first side wall, and fixedly connecting the first reinforcing components to the side walls of the third side wall and the fourth side wall; Extending a plurality of the second reinforcing components through the accommodating cavity along an extension direction parallel to the second side wall, and fixedly connected to the side walls of the third side wall and the fourth side wall; Extending a plurality of the third reinforcing components through the accommodating cavity along an extension direction parallel to the third side wall, and fixedly connected to the side walls of the first side wall and the second side wall; The plurality of fourth reinforcing components are extended through the accommodating cavity along an extension direction parallel to the fourth side wall, and are fixedly connected to the side walls of the first side wall and the second side wall.
5. The manufacturing method according to claim 4, characterized in that: A plurality of the first reinforcing components and a plurality of the second reinforcing components are arranged side by side along the first direction, and a plurality of the third reinforcing components and a plurality of the fourth reinforcing components are arranged side by side along the second direction; or, a plurality of the first reinforcing components and a plurality of the second reinforcing components are arranged side by side along the thickness direction of the mold, and a plurality of the third reinforcing components and a plurality of the fourth reinforcing components are arranged side by side along the thickness direction of the mold.
6. The manufacturing method according to claim 5, characterized in that: The first side wall and the second side wall are symmetrically arranged along the first direction, and the third side wall and the fourth side wall are symmetrically arranged along the second direction; the plurality of first reinforcing components and the plurality of second reinforcing components are symmetrically arranged along the first direction, and the plurality of third reinforcing components and the plurality of fourth reinforcing components are symmetrically arranged along the second direction.
7. The manufacturing method according to claim 1, characterized in that: The mold comprises a bearing component and a surrounding component located on the bearing component; the bearing component and the surrounding component are combined to form the accommodating cavity; The method of extending the plurality of reinforcing components through the accommodating cavity and fixedly connecting the plurality of reinforcing components to the side walls of the mold comprises: A plurality of reinforcing components are extended through the accommodating cavity and fixedly connected to the surrounding components.
8. The manufacturing method according to claim 7, characterized in that: The step of cutting and removing the second portion and the reinforcing component to obtain the glass substrate comprises: releasing the fixed connection to separate the plurality of reinforcing components from the surrounding component; removing the bearing component and the surrounding component; The first part and the second part are cut and separated, and the second part and the reinforcing component are removed to obtain the separated first part.
9. The manufacturing method according to claim 7, characterized in that: The step of cutting and removing the second portion and the reinforcing component to obtain the glass substrate comprises: Cutting and separating the first part and the second part; The mold is removed to obtain the separated first part.
10. The manufacturing method according to claim 9, characterized in that: The manufacturing method further comprises: releasing the fixed connection to separate the plurality of reinforcing components from the surrounding component; The plurality of reinforcing components are separated from the first portion, and the separated plurality of reinforcing components are used for recycling.