Automatic quartz glass production system

Abstract

The invention relates to the field of production quality control, in particular to an automatic quartz glass production system, which is provided with a conversion acquisition module for acquiring conversion production data of a to-be-processed raw material so as to extract conversion characteristics of the to-be-processed raw material within a preset time; the conversion analysis module is used for evaluating conversion quality characterization parameters of the to-be-processed raw materials in combination with the conversion characteristics and the gas discharge flow of the waste gas port so as to mark the to-be-processed raw materials; the reaction evaluation module is used for evaluating and analyzing the to-be-processed raw materials in response to the marking result of the conversion analysis module; and the forming control module is used for calling the corrected forming and mounding characteristics of the to-be-processed raw materials so as to judge whether the to-be-processed raw materials are qualified mounding materials, and the stability and the production efficiency of quartz glass products are effectively improved.

Description

Technical Field

[0001] This invention relates to the field of production quality control, and more particularly to an automated quartz glass production system. Background Technology

[0002] With the rapid development of the semiconductor industry, quartz glass is widely used in the manufacturing of high-tech products such as optoelectronic devices and high-end integrated circuits;

[0003] In the production of quartz glass blanks, chemical vapor deposition (CVD) is one of the core processes. It involves reacting gaseous raw materials (such as silicon tetrachloride) with oxygen and hydrogen at high temperatures through a burner to generate silica particles, which are then deposited on the substrate to form high-purity quartz glass blanks. However, the stability of this process and the deposition quality are affected by a variety of factors. Through an intelligent monitoring and control system, the deposition quality is dynamically evaluated and process parameters are automatically adjusted to ensure the efficient and stable production of quartz glass blanks.

[0004] Chinese Patent Application Publication No. CN113683291A discloses a method for producing large-size, highly uniform synthetic quartz glass boulders. This method employs chemical vapor deposition (CVD), which involves introducing hydrogen and oxygen into multiple burners. The hydrogen and oxygen combust in the burners, preheating the deposition furnace cavity. After preheating, the temperature of the quartz substrate inside the deposition furnace is raised to a specified temperature, and a temperature detector is activated. A gaseous silicon-containing compound is introduced into the deposition furnace through the feed pipe of each burner. The hydrogen and oxygen combust in the burners to produce water vapor, which reacts with the gaseous silicon-containing compound inside the deposition furnace to generate silica particles. The silica particles gradually deposit on the rotating quartz substrate to form quartz glass boulders, and the temperature detector dynamically monitors the temperature distribution on the silica particle deposition surface. This invention ensures the uniformity of the deposition surface temperature by increasing the burner and deposition surface temperature monitoring, thereby guaranteeing the structural uniformity of the quartz glass.

[0005] However, the following problems still exist in the existing technology.

[0006] In the traditional production of quartz glass blanks, the quality of the deposited product needs to be judged by the appearance of the final blank, which is a "post-judgment". If there are potential abnormalities in the early stage of deposition, such as insufficient reaction, they cannot be detected in time, resulting in defects in the overall deposited blanks, leading to waste of materials and time. Summary of the Invention

[0007] To address this issue, the present invention provides an automated quartz glass production system to overcome the problem in the prior art where potential anomalies exist in the early stage of deposition that cannot be detected in time, resulting in defects in the subsequent deposited material and wasting materials and time.

[0008] To achieve the above objectives, the present invention provides an automated quartz glass production system, comprising:

[0009] The conversion acquisition module is used to collect conversion production data of the raw materials to be processed, so as to extract the conversion characteristics of the raw materials to be processed within a predetermined time. The conversion characteristics include the flame offset of the combustion equipment and the difference in flame brightness.

[0010] A conversion analysis module, connected to the conversion acquisition module, is used to evaluate the conversion quality characterization parameters of the raw material to be processed by combining the conversion characteristics and the gas discharge flow rate of the exhaust port, so as to label the raw material to be processed.

[0011] A reaction evaluation module, connected to the conversion analysis module, evaluates and analyzes the raw material to be processed in response to the labeling results of the conversion analysis module, including:

[0012] The flow path of gas inside the deposition equipment is obtained, the airflow symmetry offset and temperature difference of the deposition area are determined, it is determined whether the deposition process of the raw material to be processed has entered the deposition instability stage, the bubble characteristics of the deposition surface in the deposition instability stage are identified, and the deposition fluctuation characterization value of the raw material to be processed is evaluated to determine whether the deposition process needs to be corrected.

[0013] A molding control module, which is connected to the reaction evaluation module, is used to call the modified molding and stamping characteristics of the raw material to be processed in order to determine whether the raw material to be processed is a qualified material.

[0014] The bubble characteristics include the bubble generation rate and bubble density, and the forming and stamping characteristics include the stamping coverage area ratio and the thickness difference of the raw material to be processed.

[0015] Furthermore, the conversion analysis module is used to evaluate the conversion quality characterization parameters of the raw material to be processed, including:

[0016] The sum of the ratio of the flame deviation of the combustion device to the flame deviation threshold and the ratio of the flame brightness difference to the brightness difference threshold is used as the first conversion quality feature.

[0017] The ratio of the exhaust gas flow rate to the exhaust gas flow rate threshold is used as the second conversion quality characteristic.

[0018] The first conversion quality feature and the second conversion quality feature are weighted and summed to determine the conversion quality characterization parameter.

[0019] Furthermore, the conversion analysis module is used to mark the raw materials to be processed, including:

[0020] If the conversion quality characterization parameter of the raw material to be processed is greater than or equal to the preset conversion quality characterization parameter threshold, the conversion analysis module marks the raw material to be processed.

[0021] Furthermore, the reaction evaluation module, in response to the labeling results of the conversion analysis module, evaluates and analyzes the raw material to be processed, including:

[0022] If any batch of raw materials to be processed is marked, then the raw materials to be processed are evaluated and analyzed.

[0023] Furthermore, the reaction evaluation module is used to determine whether the deposition process of the raw material to be processed has entered the deposition instability stage, including:

[0024] If the airflow symmetry offset in the deposition area is greater than the airflow symmetry offset threshold or / and the temperature difference in the deposition area is greater than the temperature difference threshold, then the deposition process of the raw material to be processed is determined to have entered the deposition instability stage.

[0025] Furthermore, the reaction evaluation module is used to evaluate the deposition fluctuation characterization value of the raw material to be processed, including:

[0026] The ratio of the bubble generation rate to the generation rate threshold is used as the first deposition fluctuation feature.

[0027] The ratio of bubble density to bubble density threshold is used as the second deposition fluctuation feature;

[0028] The sum of the first sedimentation fluctuation feature and the second sedimentation fluctuation feature is used as the sedimentation fluctuation characterization value.

[0029] Furthermore, the reaction evaluation module is used to determine whether the deposition process needs to be modified, including:

[0030] If the deposition fluctuation characterization value of the raw material to be processed is greater than or equal to the preset deposition fluctuation characterization threshold, it is determined that the deposition process needs to be corrected.

[0031] Furthermore, the forming control module is used to determine whether the raw material to be processed is a qualified material, including:

[0032] If any batch of raw materials to be processed meets the forming criteria for the ball material, then the raw materials to be processed are determined to be qualified ball materials.

[0033] The forming criteria for the grinding material include a grinding material coverage ratio greater than or equal to a grinding material coverage ratio threshold and a material thickness difference less than a material thickness difference threshold.

[0034] Furthermore, the reaction evaluation module modifies the immersion process by adjusting the supply rate of the raw materials to be processed and the gas flow rate of the combustion equipment.

[0035] Furthermore, it also includes a correction warning module, which is connected to the reaction evaluation module, and issues a correction warning signal in response to the need for correction of the deposition process.

[0036] Compared with existing technologies, this invention collects the conversion production data of the raw materials to be processed to extract the conversion characteristics of the raw materials to be processed within a predetermined time; combines the conversion characteristics with the gas discharge flow rate of the exhaust port to evaluate the conversion quality characterization parameters of the raw materials to be processed, so as to mark the raw materials to be processed; in response to the marking results, the raw materials to be processed are evaluated and analyzed; and the corrected forming and stamping characteristics of the raw materials to be processed are called to determine whether the raw materials to be processed are qualified stamping materials. This invention effectively improves the stability and production efficiency of quartz glass products.

[0037] In particular, this invention incorporates a reaction analysis module that closely aligns with the characteristics of combustion equipment in production scenarios and the core reaction logic of quartz glass vapor deposition. Based on the flame state and exhaust gas flow rate of the combustion equipment, it reflects the conversion effect from both the "reaction process" and "reaction result" perspectives. Flame deviation is directly related to the airflow symmetry of the combustion equipment. Uneven hydrogen / oxygen slit supply on the corresponding side, or hydrogen overflow due to nitrogen curtain failure, will cause uneven raw material conversion due to local reaction zone deviation. Furthermore, the difference in flame brightness reflects the intensity and stability of the conversion reaction. Flame brightness is related to hydrogen combustion efficiency and silicon tetrachloride decomposition rate. Excessive brightness difference indicates fluctuations in local conversion reaction intensity, which can easily lead to variations in deposition thickness. Differences or incompletely converted impurities; the exhaust gas flow rate reflects the overall balance of the conversion reaction. A stable exhaust gas flow rate indicates that the raw material supply and reaction rate are matched. If the flow rate suddenly increases or decreases, it may indicate an interruption in the raw material supply or an abnormal reaction. Therefore, the conversion analysis module identifies potential anomalies in the raw materials to be processed at the initial stage of deposition through the synergistic analysis of "reaction process characteristics + reaction result indicators". Thus, this invention calculates the conversion quality characterization parameters of the raw materials to be processed based on the flame jet situation of the combustion equipment and the exhaust gas flow rate of the exhaust gas outlet to characterize the conversion stability of the raw materials to be processed, providing data support for subsequent labeling of the raw materials to be processed. This invention effectively improves the stability and production efficiency of quartz glass products.

[0038] In particular, this invention considers that the quartz glass deposition process relies on stable gas supply, uniform deposition, and temperature control by the burner to obtain high-quality raw materials. A reaction assessment module is set up to capture "hidden instability signals" through quantitative parameters. Specifically, the uniformity of gas supply through the slit of the combustion equipment is quantified by the symmetrical offset of the airflow, allowing for early judgment of the uniformity of the mixture between the raw material and the gas, avoiding localized over-thickness / under-thinness on the deposition surface. It also considers the temperature difference distribution in the deposition area; excessive temperature differences can lead to uneven quartz glass deposition rates or even localized poor crystallization, thus determining whether the deposition process has entered the deposition instability stage. Due to untimely gas discharge or abnormal local reactions, bubbles appear on the deposition surface. If these bubbles accumulate in the raw material, it will increase the scrap rate of the final product. The degree of interference between the bubble generation rate and density and the final raw material quality is quantified. Therefore, this invention assesses the deposition fluctuation characterization value of the raw material by the bubble characteristics of the deposition surface corresponding to the deposition instability stage, providing data support for subsequent determination of whether the deposition process needs correction. This invention effectively improves the stability and production efficiency of quartz glass products.

[0039] In particular, this invention is based on the core function of the grinding equipment in the quartz glass production process: horizontal oscillation to ensure uniform deposition and stable descent, thereby guaranteeing the quality stability of the final grinding material. A forming control module is set up to quantify the grinding effect of the mechanical actions of the grinding equipment on the final grinding material quality. The grinding coverage area ratio directly reflects the uniformity of the horizontal oscillation of the grinding equipment. Insufficient oscillation range or uncovered local deposition may lead to excessively thin or unevenly dense localized areas of the grinding material. The thickness difference of the raw material to be processed reflects the matching degree between the descent speed of the grinding equipment and the deposition speed. If the descent speed of the grinding machine does not match the deposition speed, it means that the deposition position is not kept constant, which may lead to abnormalities such as "eccentricity" and "uneven thickness" in the grinding material. Based on this, this invention, by quantifying the above two characteristic parameters, can identify "localized missed deposition" problems in advance and promptly screen out grinding materials that do not meet structural requirements, reducing the processing difficulty of subsequent cutting and forming processes. This invention effectively improves the stability and production efficiency of quartz glass products. Attached Figure Description

[0040] Figure 1 A functional block diagram of an automated quartz glass production system according to an embodiment of the invention;

[0041] Figure 2 This is a logic diagram for marking raw materials to be processed according to an embodiment of the invention.

[0042] Figure 3 This is a logic diagram for determining whether the deposition process needs to be modified according to an embodiment of the invention.

[0043] Figure 4This is a logic diagram for determining whether the raw material to be processed is a qualified material in an embodiment of the invention. Detailed Implementation

[0044] To make the objectives and advantages of the present invention clearer, the present invention will be further described below with reference to embodiments; it should be understood that the specific embodiments described herein are merely for explaining the present invention and are not intended to limit the present invention.

[0045] Preferred embodiments of the present invention will now be described with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of the present invention and are not intended to limit the scope of protection of the present invention.

[0046] It should be noted that in the description of this invention, the terms "upper," "inner," "outer," etc., indicating the direction or positional relationship are based on the direction or positional relationship shown in the drawings. This is only for the convenience of description and is not intended to indicate or imply that the device or element must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of this invention.

[0047] Furthermore, it should be noted that, in the description of this invention, unless otherwise explicitly specified and limited, the terms "installation" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0048] Please see Figure 1 As shown, Figure 1 This is a functional block diagram of an automated quartz glass production system according to an embodiment of the present invention. The automated quartz glass production system according to an embodiment of the present invention includes:

[0049] The conversion acquisition module is used to collect conversion production data of the raw materials to be processed, so as to extract the conversion characteristics of the raw materials to be processed within a predetermined time. The conversion characteristics include the flame offset of the combustion equipment and the difference in flame brightness.

[0050] A conversion analysis module, connected to the conversion acquisition module, is used to evaluate the conversion quality characterization parameters of the raw material to be processed by combining the conversion characteristics and the gas discharge flow rate of the exhaust port, so as to label the raw material to be processed.

[0051] A reaction evaluation module, connected to the conversion analysis module, evaluates and analyzes the raw material to be processed in response to the labeling results of the conversion analysis module, including:

[0052] The flow path of gas inside the deposition equipment is obtained, the airflow symmetry offset and temperature difference of the deposition area are determined, it is determined whether the deposition process of the raw material to be processed has entered the deposition instability stage, the bubble characteristics of the deposition surface in the deposition instability stage are identified, and the deposition fluctuation characterization value of the raw material to be processed is evaluated to determine whether the deposition process needs to be corrected.

[0053] A molding control module, which is connected to the reaction evaluation module, is used to call the modified molding and stamping characteristics of the raw material to be processed in order to determine whether the raw material to be processed is a qualified material.

[0054] The bubble characteristics include the bubble generation rate and bubble density, and the forming and stamping characteristics include the stamping coverage area ratio and the thickness difference of the raw material to be processed.

[0055] Specifically, the conversion production data includes the conversion characteristics of the raw materials to be processed, the gas discharge flow rate of the exhaust port, the airflow symmetry offset and corresponding temperature difference in the deposition area, the bubble characteristics of the deposition surface, and the forming and grinding characteristics of the raw materials to be processed.

[0056] Specifically, there are no specific limitations on the acquisition method for the conversion characteristics of the raw materials to be processed (flame offset of the combustion equipment and the amount of brightness difference of the flame). A water-cooled long-wave infrared thermal imager can be installed on the top of the deposition furnace, and the flame can be observed through a high-temperature resistant window. The horizontal distance between the deviation formed by the real-time flame center of gravity and the vertical axis (the position of the central slit) is taken as the flame offset. The maximum difference in brightness in the flame image acquired by the water-cooled long-wave infrared thermal imager within a predetermined time is taken as the amount of brightness difference.

[0057] The temperature of the deposition area can also be obtained by the water-cooled long-wave infrared thermal imager, thereby determining the temperature difference of the deposition area, which will not be elaborated further.

[0058] Specifically, there is no specific limitation on the method for collecting the gas discharge flow rate at the exhaust port. An external clamp-on ultrasonic sensor can be installed on the outer wall of the exhaust port pipe to measure the time difference of ultrasonic waves propagating in the exhaust gas in the direction of flow and in the direction of flow to calculate the gas velocity. Then, the gas discharge flow rate is determined by combining the cross-sectional area of ​​the exhaust port pipe. That is, the gas discharge flow rate is the product of the gas velocity and the cross-sectional area of ​​the exhaust port pipe. Of course, other methods can also be used for collection, which will not be elaborated here.

[0059] Specifically, there is no specific limitation on the method for acquiring the gas flow symmetry offset in the deposition area. The gas flow symmetry offset is acquired by placing a thermal flow meter in a normal temperature pipe upstream of the slit. It can be understood that the placement of the thermal flow meter needs to be closely integrated with the symmetrical structure of the combustion equipment slit (such as a centrally symmetrical oxygen or hydrogen slit). The gas flow symmetry offset is determined by comparing the flow velocities at symmetrical points, and the ratio of the flow velocity difference at symmetrical points to the average flow velocity at symmetrical points is taken as the gas flow symmetry offset.

[0060] Specifically, there are no specific limitations on the method for acquiring bubble characteristics (bubble generation rate and bubble density) on the deposition surface. The bubble generation rate and bubble density on the deposition surface can be acquired in real time using a high-temperature industrial endoscope.

[0061] Specifically, the method for acquiring the forming and grinding characteristics of the raw material to be processed (grinding coverage ratio and thickness difference of the raw material to be processed) is not specifically limited. It can be achieved by fixing a laser sensor on the frame of the grinding equipment, with the laser emission direction perpendicular to the swing direction of the grinding tool, continuously monitoring the position change of a certain "fixed mark point" of the grinding tool, and taking the distance difference between the maximum swing positions corresponding to the left and right of the "fixed mark point" as the swing amplitude of the grinding tool, determining the area of ​​the raw material to be processed covered by the reciprocating swing amplitude, and thus obtaining the grinding coverage ratio; by scanning the surface of the ground raw material to be processed with a laser to generate a three-dimensional thickness distribution image, the thickness difference of the raw material to be processed can be determined.

[0062] The ratio of the area of ​​the raw material to be processed covered by the reciprocating oscillation of the grinding tool to the total area of ​​the raw material to be processed on the platform of the grinding wheel is called the grinding wheel coverage area ratio; the difference between the thickest point and the thinnest point of the raw material to be processed in the same plane is called the thickness difference of the raw material to be processed.

[0063] In practice, a burner is selected as the combustion equipment and is fixedly and sealed on the top of the deposition furnace. At least two air inlets are set at the upper end of the burner to ensure uniform gas output, and at least two exhaust ports are set to ensure uniform exhaust gas output.

[0064] The burner is a long, narrow slit with multiple slits. The central slit carries gaseous silicon tetrachloride with oxygen, and the two sides are filled with oxygen. Hydrogen is located outside the oxygen slits, and the outermost part is the exhaust outlet. Each slit is equipped with a buffer chamber above it to ensure uniform gas supply.

[0065] The deposition equipment uses a deposition furnace, which provides a reaction space and insulation for the deposition of the material. The furnace body has certain heat resistance, heat insulation and heat preservation properties. At the same time, it is equipped with a tail gas treatment system to extract the overflow tail gas in the deposition furnace.

[0066] The grinding equipment uses a grinding machine to carry the continuously deposited quartz glass grinding material. The horizontal swinging motion ensures uniform deposition, and the stable descent keeps the deposition position constant, thus ensuring the stable quality of the grinding material. It consists of a base, column, lifting system, upper and lower moving platform, horizontal swinging system, support rod, clamp, and gasket.

[0067] Among them, the grinding tool can be the grinding head of a grinding wheel.

[0068] Specifically, there are no restrictions on the specific structure of the conversion analysis module, reaction evaluation module, molding control module, and correction early warning module. Each module or its units can be composed of logic components or combinations of logic components. Logic components include field-programmable processors, computers, or microprocessors in computers.

[0069] Specifically, the conversion analysis module is used to evaluate the conversion quality characterization parameters of the raw material to be processed, including:

[0070] The sum of the ratio of the flame deviation of the combustion device to the flame deviation threshold and the ratio of the flame brightness difference to the brightness difference threshold is used as the first conversion quality feature.

[0071] The ratio of the exhaust gas flow rate to the exhaust gas flow rate threshold is used as the second conversion quality characteristic.

[0072] The first conversion quality feature and the second conversion quality feature are weighted and summed to determine the conversion quality characterization parameter.

[0073] Specifically, the deposition of quartz glass is essentially a process in which gaseous raw materials (such as SiCl4) undergo a chemical reaction in a hydrogen-oxygen flame and are deposited into solid quartz glass. The flame state of the combustion equipment directly reflects the normality of the conversion reaction. Flame deviation can cause the mixing area of ​​the raw material (SiCl4) with hydrogen and oxygen to deviate from the designed deposition position (such as the area corresponding to the central slit of the combustion equipment), which may result in insufficient reaction (no deposition) or over-combustion (generating impurities) in some areas, directly affecting the purity and uniformity of the deposited layer. The brightness of the flame is directly related to the combustion temperature and the reaction efficiency of the raw materials. For example, a high-temperature flame with complete hydrogen combustion is brighter, while a flame may be darker when there is insufficient oxygen in some areas. Excessive differences in brightness can lead to uneven temperature distribution in the deposition area, which in turn causes differences in the density and purity of the quartz glass ingot in some areas. For example, dark areas may produce unreacted material due to insufficient temperature. The residual raw materials and the potential for bubbles to form in the bright area due to local overheating are the core factors determining the basic quality of the feedstock. The gas flow rate at the exhaust port, as an auxiliary indicator, has a relatively indirect impact. It mainly reflects the "efficiency of exhaust gas discharge after reaction," avoiding the accumulation of unreacted raw materials or harmful gases in the furnace (preventing secondary pollution) and maintaining stable gas pressure in the furnace (indirectly ensuring stable airflow path). Based on this, in implementation, the conversion characteristics, namely the flame offset of the combustion equipment and the difference in flame brightness, are given priority. Therefore, the first conversion quality state characteristic calculated based on the conversion state characteristics is given a slightly higher weight. Thus, when performing weighted summation, the weight of the first conversion quality characteristic is set to 0.6, and the weight of the second conversion quality characteristic is set to 0.4.

[0074] In this embodiment, the purpose of setting the flame offset threshold, the brightness difference threshold, and the gas discharge flow rate threshold is to characterize situations where the conversion stability of the raw material to be processed is poor, significantly impacting the quality of the final aggregate. By acquiring relevant historical data from several quartz glass deposition operations, and by calling historical data on flame offset, brightness difference, and gas discharge flow rate from the combustion equipment, the average flame offset, average brightness difference, and average gas discharge flow rate are calculated respectively, and these are used as baseline values ​​under normal conditions. Based on the purpose of setting the above three thresholds… The flame offset threshold is determined as the product of the mean flame offset and the flame offset coefficient. The brightness difference threshold is determined as the product of the mean brightness difference and the brightness deviation coefficient. The gas discharge flow rate threshold is determined as the product of the mean gas discharge flow rate and the flow rate deviation coefficient. The flame offset coefficient is selected within the range [1.05, 1.1], preferably 1.05 in practice. The brightness deviation coefficient is selected within the range [1.1, 1.15], preferably 1.1 in practice. The flow rate deviation coefficient is selected within the range [1.2, 1.3], preferably 1.2 in practice.

[0075] Specifically, this invention includes a reaction analysis module that closely aligns with the characteristics of combustion equipment in production scenarios and the core reaction logic of quartz glass vapor deposition. Based on the flame state and exhaust gas flow rate of the combustion equipment, it reflects the conversion effect from two levels: "reaction process" and "reaction result." Flame deviation is directly related to the airflow symmetry of the combustion equipment. Uneven hydrogen / oxygen slit supply on the corresponding side (e.g., pressure fluctuations) or hydrogen overflow due to nitrogen curtain failure will cause uneven raw material conversion due to local reaction zone deviation (excessive reaction on the deviated side, insufficient reaction on the other side). The difference in flame brightness reflects the intensity and stability of the conversion reaction. Flame brightness is related to hydrogen combustion efficiency and silicon tetrachloride decomposition rate (e.g., a bright flame indicates sufficient hydrogen, while excessive silicon tetrachloride supply may lead to a darker flame). Excessive brightness difference indicates fluctuations in the intensity of the local conversion reaction, which can easily lead to deposition. Thickness differences or incompletely converted impurities; the exhaust gas flow rate reflects the overall balance of the conversion reaction. A stable exhaust gas flow rate indicates that the raw material supply (silicon tetrachloride, hydrogen, oxygen) and reaction rate are matched. If the flow rate suddenly increases or decreases, it may be due to an interruption in the raw material supply (such as the interruption of silicon tetrachloride supply in the central slit) or an abnormal reaction (such as the direct discharge of unreacted gas in some areas). Therefore, the conversion analysis module identifies potential anomalies in the raw materials to be processed at the initial deposition stage through the synergistic analysis of "reaction process characteristics (flame) + reaction result indicators (exhaust gas flow rate)". Thus, this invention calculates the conversion quality characterization parameters of the raw materials to be processed based on the flame jet of the combustion equipment and the exhaust gas flow rate of the exhaust gas port to characterize the conversion stability of the raw materials to be processed, providing data support for subsequent labeling of the raw materials to be processed. This invention effectively improves the stability and production efficiency of quartz glass products.

[0076] Specifically, please refer to Figure 2 As shown, this is a logic decision diagram for marking the raw materials to be processed according to an embodiment of the present invention. The conversion analysis module is used to mark the raw materials to be processed, including:

[0077] If the conversion quality characterization parameter of the raw material to be processed is greater than or equal to the preset conversion quality characterization parameter threshold, the conversion analysis module marks the raw material to be processed.

[0078] If the conversion quality characterization parameter of the raw material to be processed is less than the preset conversion quality characterization parameter threshold, then the conversion analysis module does not need to mark the raw material to be processed.

[0079] The conversion quality characterization parameter threshold is predetermined. The conversion quality characterization parameter threshold is determined by calculating the flame offset of the combustion device as equal to the flame offset threshold, the flame brightness difference as equal to the brightness difference threshold, and the exhaust gas flow rate as equal to the exhaust gas flow rate threshold.

[0080] Specifically, the reaction evaluation module, in response to the labeling results of the conversion analysis module, evaluates and analyzes the raw material to be processed, including:

[0081] If any batch of raw materials to be processed is marked, then the raw materials to be processed are evaluated and analyzed.

[0082] Specifically, the reaction evaluation module is used to determine whether the deposition process of the raw material to be processed has entered the deposition instability stage, including:

[0083] If the airflow symmetry offset in the deposition area is greater than the airflow symmetry offset threshold or / and the temperature difference in the deposition area is greater than the temperature difference threshold, then the deposition process of the raw material to be processed is determined to have entered the deposition instability stage.

[0084] In this embodiment, the purpose of setting the airflow symmetry offset threshold and the temperature difference threshold is to characterize the degree of airflow asymmetry and the large temperature difference, which aggravates the abnormal impact on the deposition effect and makes it easier for the deposition thickness to be uneven. By acquiring relevant historical data of several quartz glass depositions, the historical data of airflow symmetry offset and temperature difference of the deposition area are called, and the mean values ​​of airflow symmetry offset and temperature difference are calculated respectively, and the corresponding values ​​are used as the benchmark values ​​under normal conditions. Based on the purpose of setting the above two thresholds, the airflow symmetry offset threshold is determined as the product of the mean airflow symmetry offset and the symmetry deviation coefficient, and the temperature difference threshold is determined as the product of the mean temperature difference and the temperature difference offset coefficient. The symmetry deviation coefficient is selected in the interval [1.1, 1.15], preferably 1.1 in the implementation, and the temperature difference offset coefficient is selected in the interval [1.15, 1.2], preferably 1.15 in the implementation.

[0085] Specifically, the reaction evaluation module is used to evaluate the deposition fluctuation characterization value of the raw material to be processed, including:

[0086] The ratio of the bubble generation rate to the generation rate threshold is used as the first deposition fluctuation feature.

[0087] The ratio of bubble density to bubble density threshold is used as the second deposition fluctuation feature;

[0088] The sum of the first sedimentation fluctuation feature and the second sedimentation fluctuation feature is used as the sedimentation fluctuation characterization value.

[0089] In this embodiment, the purpose of setting the generation rate threshold and the bubble density threshold is to characterize the extent to which the presence of bubbles has a significant interference effect on the final material quality. By acquiring relevant historical data from several quartz glass deposition operations, the historical data of bubble generation rate and bubble density in the deposition area are retrieved, and the average generation rate and average bubble density are calculated respectively. These are then used as the baseline values ​​under normal conditions. Based on the purpose of setting the above two thresholds, the generation rate threshold is determined as the product of the average generation rate and the rate deviation coefficient, and the bubble density threshold is determined as the product of the average bubble density and the density deviation coefficient. The rate deviation coefficient is selected within the interval [1.2, 1.25], preferably 1.2 in practice, and the density deviation coefficient is selected within the interval [1.1, 1.15], preferably 1.1 in practice.

[0090] Specifically, this invention considers the reliance on stable gas supply, uniform deposition, and temperature control during the quartz glass deposition process to obtain high-quality deposits. A reaction evaluation module is incorporated to capture "hidden instability signals" through quantitative parameters. Specifically, the uniformity of gas supply through the slits of the combustion equipment is quantified by measuring the symmetrical deviation of the gas flow (e.g., flow deviations between SiCl4 in the central slit and O2 / H2 on both sides may cause gas flow deviation), allowing for early assessment of the uniformity of the mixture between the raw material and the gas, thus preventing localized over-thickness / under-thinness on the deposition surface (e.g., hydrogen flow deviation may lead to incomplete combustion and incomplete reaction of SiCl4). Furthermore, the invention addresses the temperature difference distribution within the deposition area; excessive temperature differences can lead to… Uneven deposition rates of quartz glass (SiO2) and even localized poor crystallization can lead to instability in the deposition process. This can be used to determine whether the deposition process has entered an unstable stage. Due to untimely gas removal or abnormal local reactions, bubbles appear on the deposition surface. If these bubbles accumulate in the raw material, it increases the scrap rate of the final product. This invention quantifies the interference between bubble generation rate and density on the final raw material quality. Therefore, this invention assesses the deposition fluctuation characteristics of the raw material by analyzing the bubble features on the deposition surface corresponding to the unstable deposition stage, providing data support for determining whether the deposition process needs correction. This invention effectively improves the stability and production efficiency of quartz glass products.

[0091] Specifically, please refer to Figure 3 As shown, this is a logic diagram for determining whether the deposition process needs to be modified according to an embodiment of the present invention. The reaction evaluation module is used to determine whether the deposition process needs to be modified, including:

[0092] If the deposition fluctuation characterization value of the raw material to be processed is greater than or equal to the preset deposition fluctuation characterization threshold, it is determined that the deposition process needs to be corrected.

[0093] If the deposition fluctuation characterization value of the raw material to be processed is less than the preset deposition fluctuation characterization threshold, it is determined that no correction is needed for the deposition process.

[0094] The sedimentation fluctuation characterization threshold is predetermined. The sedimentation fluctuation characterization value calculated when the bubble generation rate is equal to the generation rate threshold and the bubble density is equal to the bubble density threshold is determined as the sedimentation fluctuation characterization threshold.

[0095] Specifically, please refer to Figure 4 As shown, this is a logic diagram for determining whether the raw material to be processed is a qualified material in an embodiment of the present invention. The forming control module is used to determine whether the raw material to be processed is a qualified material, including:

[0096] If any batch of raw materials to be processed meets the forming criteria for the ball material, then the raw materials to be processed are determined to be qualified ball materials.

[0097] The forming criteria for the grinding material include a grinding material coverage ratio greater than or equal to a grinding material coverage ratio threshold and a material thickness difference less than a material thickness difference threshold.

[0098] In this embodiment, the purpose of setting a threshold for the thickness difference of the raw material to be processed is to characterize the situation where the potential quality risk of the material (such as material eccentricity or uneven thickness) is high. By acquiring relevant historical data of several quartz glass depositions, the historical data of the thickness difference of the raw material to be processed is called to solve for the mean thickness difference of the raw material to be processed, and this mean is used as the benchmark value under normal circumstances. Based on the purpose of setting the threshold for the thickness difference of the raw material to be processed, the threshold for the thickness difference of the raw material to be processed is determined as the product of the mean thickness difference of the raw material to be processed and the thickness deviation coefficient. The thickness deviation coefficient is selected in the interval [1.1, 1.2], and is preferably 1.1 in practice.

[0099] Specifically, under normal circumstances, when the grinding tool of the grinding wheel swings back and forth, its range of motion should cover the entire edge area of ​​the raw material to be processed, so as to ensure that the raw material is ground evenly and fully and avoid "missed processing". For example, there may be uncovered areas that retain their original state (protrusions, burrs, rough surfaces during deposition), which may even lead to the scrapping of the raw material or failure of subsequent processing. However, the swing amplitude of the grinding tool should not be too large (far exceeding the size of the raw material to be processed), which may easily lead to an increase in the idle stroke of the grinding tool, a longer processing time, and may also cause vibration due to excessive inertia of the grinding tool, which may affect the edge processing accuracy. Therefore, in this embodiment, the grinding wheel coverage area ratio threshold is selected in the range [1, 1.1], and is preferably 1 in practice, which will not be elaborated further.

[0100] Specifically, the reaction evaluation module modifies the immersion process by adjusting the supply rate of the raw materials to be processed and the gas flow rate of the combustion equipment.

[0101] The supply rate of the raw materials to be processed is reduced, and the amount of reduction in the supply rate is positively correlated with the deposition fluctuation characterization value;

[0102] In this embodiment, optionally,

[0103] The sedimentation fluctuation characterization value is compared with the preset first sedimentation fluctuation characterization comparison threshold and the second sedimentation fluctuation characterization comparison threshold.

[0104] When the sedimentation fluctuation characterization value is greater than the second sedimentation fluctuation characterization comparison threshold, the reduction in the supply rate is determined as the first reduction amount, which is set to 0.55 times the current supply rate.

[0105] When the sedimentation fluctuation characterization value is greater than or equal to the first sedimentation fluctuation characterization comparison threshold and less than or equal to the second sedimentation fluctuation characterization comparison threshold, the reduction in the supply rate is determined to be the second reduction amount, which is set to be 0.45 times the current supply rate.

[0106] When the sedimentation fluctuation characterization value is less than the first sedimentation fluctuation characterization comparison threshold, the reduction in the supply rate is determined to be the third reduction amount, which is set to 0.35 times the current supply rate.

[0107] Reduce the gas flow rate of the combustion equipment, and the amount of reduction in gas flow rate is positively correlated with the deposition fluctuation characterization value;

[0108] In this embodiment, optionally,

[0109] The sedimentation fluctuation characterization value is compared with the preset first sedimentation fluctuation characterization comparison threshold and the second sedimentation fluctuation characterization comparison threshold.

[0110] When the sedimentation fluctuation characterization value is greater than the second sedimentation fluctuation characterization comparison threshold, the reduction in gas flow rate is determined as the first reduction amount, which is set to 0.5 times the current gas flow rate.

[0111] When the sedimentation fluctuation characterization value is greater than or equal to the first sedimentation fluctuation characterization comparison threshold and less than or equal to the second sedimentation fluctuation characterization comparison threshold, the reduction in gas flow rate is determined to be the second reduction amount, which is set to 0.35 times the current gas flow rate.

[0112] When the sedimentation fluctuation characterization value is less than the first sedimentation fluctuation characterization comparison threshold, the reduction in gas flow rate is determined as the third reduction, and the third reduction is set to 0.2 times the current gas flow rate.

[0113] The first sedimentary fluctuation characterization comparison threshold is 1.1 times the sedimentary fluctuation characterization value threshold, and the second sedimentary fluctuation characterization comparison threshold is 1.3 times the sedimentary fluctuation characterization value threshold.

[0114] Specifically, this invention is based on the core function of the grinding equipment in the quartz glass production process: horizontal oscillation to ensure uniform deposition and stable descent, thereby guaranteeing the stable quality of the final grinding material. A forming control module is set up to quantify the grinding effect of the mechanical actions of the grinding equipment on the final grinding material quality. The grinding coverage area ratio directly reflects the uniformity of the horizontal oscillation of the grinding equipment. Insufficient oscillation range or localized uncovered deposition may lead to excessively thin or unevenly dense areas in the grinding material. The thickness difference of the raw material to be processed reflects the matching degree between the descent speed of the grinding equipment and the deposition speed. If the descent speed of the grinding machine does not match the deposition speed, it will also... This means that the deposition position is not kept constant, which may lead to abnormalities such as "eccentricity" and "uneven thickness" in the material. Based on this, the present invention can identify the problem of "local missing deposition" in advance by quantifying the above two characteristic parameters, and promptly screen out the material that does not meet the structural requirements. This can reduce the processing difficulty of subsequent cutting and forming processes. For example, the material with uniform thickness is heated more evenly during subsequent melting and forming, and is less likely to deform due to local thickness differences. The material with the required coverage area can improve the utilization rate of raw materials. The present invention effectively improves the stability and production efficiency of quartz glass products.

[0115] Specifically, it also includes a correction warning module, which is connected to the reaction evaluation module and issues a correction warning signal in response to the need for correction of the deposition process.

[0116] The technical solution of the present invention has been described above with reference to the preferred embodiments shown in the accompanying drawings. However, it will be readily understood by those skilled in the art that the scope of protection of the present invention is obviously not limited to these specific embodiments. Without departing from the principles of the present invention, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will all fall within the scope of protection of the present invention.

Claims

1. An automated quartz glass production system, characterized in that, include: The conversion acquisition module is used to collect conversion production data of the raw materials to be processed, so as to extract the conversion characteristics of the raw materials to be processed within a predetermined time. The conversion characteristics include the flame offset of the combustion equipment and the difference in flame brightness. A conversion analysis module, connected to the conversion acquisition module, is used to evaluate the conversion quality characterization parameters of the raw material to be processed by combining the conversion characteristics and the gas discharge flow rate of the exhaust port, so as to label the raw material to be processed. A reaction evaluation module, connected to the conversion analysis module, evaluates and analyzes the raw material to be processed in response to the labeling results of the conversion analysis module, including: The flow path of gas inside the deposition equipment is obtained, the airflow symmetry offset and temperature difference of the deposition area are determined, it is determined whether the deposition process of the raw material to be processed has entered the deposition instability stage, the bubble characteristics of the deposition surface in the deposition instability stage are identified, and the deposition fluctuation characterization value of the raw material to be processed is evaluated to determine whether the deposition process needs to be corrected. A molding control module, which is connected to the reaction evaluation module, is used to call the modified molding and stamping characteristics of the raw material to be processed in order to determine whether the raw material to be processed is a qualified material. The bubble characteristics include the bubble generation rate and bubble density, and the forming and stamping characteristics include the stamping coverage area ratio and the thickness difference of the raw material to be processed.

2. The automated quartz glass production system according to claim 1, characterized in that, The conversion analysis module is used to evaluate the conversion quality characterization parameters of the raw material to be processed, including: The sum of the ratio of the flame deviation of the combustion device to the flame deviation threshold and the ratio of the flame brightness difference to the brightness difference threshold is used as the first conversion quality feature. The ratio of the exhaust gas flow rate to the exhaust gas flow rate threshold is used as the second conversion quality characteristic. The first conversion quality feature and the second conversion quality feature are weighted and summed to determine the conversion quality characterization parameter.

3. The automated quartz glass production system according to claim 2, characterized in that, The conversion analysis module is used to mark the raw materials to be processed, including: If the conversion quality characterization parameter of the raw material to be processed is greater than or equal to the preset conversion quality characterization parameter threshold, the conversion analysis module marks the raw material to be processed.

4. The automated quartz glass production system according to claim 1, characterized in that, The reaction evaluation module, in response to the labeling results of the conversion analysis module, evaluates and analyzes the raw material to be processed, including: If any batch of raw materials to be processed is marked, then the raw materials to be processed are evaluated and analyzed.

5. The automated quartz glass production system according to claim 1, characterized in that, The reaction evaluation module is used to determine whether the deposition process of the raw material to be processed has entered the deposition instability stage, including: If the airflow symmetry offset in the deposition area is greater than the airflow symmetry offset threshold or / and the temperature difference in the deposition area is greater than the temperature difference threshold, then the deposition process of the raw material to be processed is determined to have entered the deposition instability stage.

6. The automated quartz glass production system according to claim 1, characterized in that, The reaction evaluation module is used to evaluate the deposition fluctuation characterization value of the raw material to be processed, including: The ratio of the bubble generation rate to the generation rate threshold is used as the first deposition fluctuation feature. The ratio of bubble density to bubble density threshold is used as the second deposition fluctuation feature; The sum of the first sedimentation fluctuation feature and the second sedimentation fluctuation feature is used as the sedimentation fluctuation characterization value.

7. The automated quartz glass production system according to claim 6, characterized in that, The reaction evaluation module is used to determine whether the deposition process needs to be modified, including: If the deposition fluctuation characterization value of the raw material to be processed is greater than or equal to the preset deposition fluctuation characterization threshold, it is determined that the deposition process needs to be corrected.

8. The automated quartz glass production system according to claim 1, characterized in that, The forming control module is used to determine whether the raw material to be processed is a qualified material, including: If any batch of raw materials to be processed meets the forming criteria for the ball material, then the raw materials to be processed are determined to be qualified ball materials. The forming criteria for the grinding material include a grinding material coverage ratio greater than or equal to a grinding material coverage ratio threshold and a material thickness difference less than a material thickness difference threshold.

9. The automated quartz glass production system according to claim 1, characterized in that, The reaction evaluation module corrects the immersion process by adjusting the supply rate of the raw materials to be processed and the gas flow rate of the combustion equipment.

10. The automated quartz glass production system according to claim 1, characterized in that, It also includes a correction warning module, which is connected to the reaction evaluation module and issues a correction warning signal in response to the need for correction of the deposition process.

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