Full-automatic quartz boat support feeding and discharging machine

Abstract

The utility model relates to the technical field of quartz processing, and discloses a full-automatic quartz boat support feeding and discharging machine which comprises a box body, the inner bottom end of the box body is connected with a rotating disc through a locking assembly, the top end of the rotating disc is rotatably connected with a mechanical arm, the outer portion of the mechanical arm is rotatably connected with a connecting block, and the connecting block is fixedly connected with the box body. A connecting ring is slidably connected to the interior of one side of the connecting block, a containing box is fixedly connected to the front side of the connecting ring, a motor is fixedly connected to the interior of the front side of the containing box, a supporting frame is fixedly connected to the front side of the containing box, and a worm is fixedly connected to the driving end of the motor; and two worm wheels are rotationally connected to the interior of one side of the supporting frame, and connecting rods are fixedly connected to the exteriors of the worm wheels. According to the utility model, the scraping caused by rigid contact is avoided, the stable placement of the quartz boat and the silicon wafer in the follow-up process is ensured, the risk that the quartz boat and the silicon wafer are damaged is reduced, and the clamping accuracy and stability are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to quartz processing technical field especially relates to a full -automatic quartz boat holds and puts in or takes out the machine. BACKGROUND

[0002] In the modern semiconductor and photovoltaic manufacturing field, the quartz boat holding and putting in or taking out link as the key part in the production process, plays a very important role. With the continuous development of semiconductor and photovoltaic industry technology and the continuous improvement of production scale and high efficiency demand, the automation processing of this link is increasingly critical. In the production process, the quartz boat holder needs to be accurately transferred between multiple processes, for example, in the silicon wafer processing process, it needs to shuttle between different process equipment such as diffusion and coating. It is a basic tool for carrying quartz boat and silicon wafer and other materials, and the accuracy and efficiency of its loading and unloading directly affect the production capacity and product quality of the whole production line.

[0003] Most of the loading and unloading is usually through the mechanical arm to make the clamping jaw clamp the quartz boat holder, then clamp the quartz boat holder from the storage area, then move the quartz boat holder to the conveying belt in the conveying area, so that the quartz boat holder is conveyed to the next step through the conveying belt, completing the loading and unloading of the quartz boat holder.

[0004] In the prior art, part of the quartz boat holding and putting in or taking out machine drives the clamping jaw to clamp the quartz boat holder by using the mechanical arm, which may cause scratches on the surface of the quartz boat holder due to the excessive rigidity of the clamping jaw, affecting the surface flatness of the quartz boat holder, and further affecting the quartz boat and silicon wafer placed on the quartz boat holder, resulting in unstable placement of the silicon wafer and damage to the quartz boat and silicon wafer. Therefore, in view of the above shortcomings, a full -automatic quartz boat holding and putting in or taking out machine is proposed. UTILITY MODEL CONTENTS

[0005] The utility model aims at solving the shortcomings in the prior art and proposes a full -automatic quartz boat holding and putting in or taking out machine, which aims at improving the problem that the quartz boat holder surface is scratched due to the excessive rigidity of the mechanical arm clamping jaw in the prior art, resulting in unstable placement of the silicon wafer and damage to the quartz boat and silicon wafer.

[0006] To achieve the above purpose, the utility model provides the following technical scheme:

[0007] The utility model provides an automatic quartz boat holds up and down material loading and unloading machine, including the box, the inside bottom end of box is connected with rotating disc through locking assembly, the top end of rotating disc is rotatably connected with mechanical arm, the outside of mechanical arm is rotatably connected with link block, the inside one side of link block is slidably connected with connecting ring, the front side of connecting ring is fixedly connected with containing box, the inside front side of containing box is fixedly connected with motor, the front side of containing box is fixedly connected with support frame, the driving end of motor is fixedly connected with worm, the inside one side of support frame is rotatably connected with two worm gears, the outside of worm gear is fixedly connected with link rod, the similar side of two link rods is fixedly connected with connecting block, the inside four corners of connecting block are slidably connected with sliding rod, the far side of plurality of sliding rods is fixedly connected with two clamping plates, the outside of sliding rod is equipped with telescopic spring.

[0008] Further, the inside of the link block is fixedly connected with an electric push rod, the driving end of the electric push rod is fixedly connected with a C-shaped block, the side of the electric push rod is provided with a containing hole, the inside of the containing hole is slidably connected with two L-shaped connecting plates, the side of the two L-shaped connecting plates close to the electric push rod is fixedly connected with a triangular block, the inside of the similar side of the two L-shaped connecting plates is slidably connected with a support rod, the outside of the support rod is equipped with a strong spring, the far side of the two L-shaped connecting plates is fixedly connected with a link plate, and the far side of the two link plates is fixedly connected with a clamping block.

[0009] Further, the front end of the box is fixedly connected with a storage area, the rear end of the box is fixedly connected with a conveying belt, and the bottom end of the box is fixedly connected with a plurality of supporting legs.

[0010] Further, the outside of the worm is rotatably connected in the inside of the support frame, and the worm is in meshing connection with the worm gear.

[0011] Further, one end of the telescopic spring is fixedly connected to one side of the clamping plate, and the other end of the telescopic spring is fixedly connected to one side of the connecting block.

[0012] Further, the left and right ends of the strong spring are respectively fixedly connected to the similar sides of the two L-shaped connecting plates, and the side with curvature of the C-shaped block is in contact with the side with curvature of the two triangular blocks.

[0013] Further, the outside of the clamping block is clamped with the inside of the connecting ring, and the outside of the link plate is in contact with the inside of the connecting ring.

[0014] Further, the locking assembly comprises bolts, the outer threads of the plurality of bolts are connected to the inner bottom end of the box body, the outer part of the bolt is slidably connected with two washers, the proximal side of the two washers is fixedly connected with buffer springs, the outer part of the bolt is threadedly connected with a nut, and the bottom end of the nut is in contact with the top end of the washer.

[0015] The utility model has the advantages of the following:

[0016] In the utility model, the motor drives the worm to rotate the worm wheel, drives the connecting rod to clamp the quartz boat holder by the clamping plate, the telescopic spring is contracted and the sliding rod slides in the connecting block in the process, the telescopic spring generates a rebound force after contraction, plays a buffering role, avoids scratching due to rigid contact, protects the surface flatness of the quartz boat holder, ensures stable placement of the quartz boat and the silicon wafer, reduces the risk of damage of the quartz boat and the silicon wafer, and improves the clamping accuracy and stability.

[0017] In the utility model, the arc on the C-shaped block is extruded with the corresponding arc of the triangular block by starting the electric push rod, the two L-shaped connecting plates are in contact, the powerful spring is stressed, the connecting plate drives the clamping block and the connecting ring to separate, the clamping claw is quickly disassembled, the new clamping claw can be quickly replaced or the damaged part can be repaired, the maintenance cycle is greatly shortened, the equipment downtime is reduced, and the overall maintenance efficiency of the production equipment is improved. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 A perspective view of a full-automatic quartz boat holder feeding and discharging machine is provided for the utility model;

[0019] Figure 2 A connecting block structure schematic view of a full-automatic quartz boat holder feeding and discharging machine is provided for the utility model;

[0020] Figure 3 For Figure 1 A is enlarged in the

[0021] Figure 4 B is an enlarged view in Figure 2

[0022] C is an enlarged view in Figure 5 Figure 2

[0023] Legend:

[0024] ​​1, box; 2, storage area; 3, conveying belt; 4, support leg; 5, support pad; 6, rotating disc; 7, mechanical arm; 8, adapter block; 9, electric push rod; 10, C-shaped block; 11, containing hole; 12, L-shaped connecting plate; 13, triangular block; 14, support rod; 15, strong spring; 16, adapter plate; 17, clamping block; 18, connecting ring; 19, containing box; 20, motor; 21, support frame; 22, worm; 23, worm gear; 24, adapter rod; 25, connecting block; 26, sliding rod; 27, clamping plate; 28, extension spring; 29, bolt; 30, gasket; 31, buffer spring; 32, nut. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0026] Referring to Figures 1 to 3 , the utility model provides an embodiment: a full-automatic quartz boat holds up and down material machine, including box 1, box 1 as the core external architecture of whole device, can effectively protect the interference and collision of various components inside outside, provide stable basic platform. Its front end fixedly connected with storage area 2. The rear end of box 1 is fixedly connected with conveying belt 3, and the conveying belt 3 ensures that it is accurately conveyed to the next production link or designated position. The bottom end of box 1 is fixedly connected with a plurality of support legs 4, and the support legs 4 are evenly distributed at the bottom of box 1 to provide balanced and stable supporting force. The bottom end of the support leg 4 is fixedly connected with the support pad 5, and the support pad 5 is made of a material with good friction and damping performance. It not only can increase the contact area with the ground, prevent the device from sliding or displacement during operation, but also can effectively absorb and alleviate the vibration generated by the equipment running. The inside bottom end of the box 1 is connected with the rotating disc 6 through the locking assembly. A plurality of bolts 29 in the locking assembly are threadedly connected to the inside bottom end of the box 1. Two gaskets 30 are slidingly connected to the outside of the bolt 29. The proximal side of the two gaskets 30 is fixedly connected with the buffer spring 31. The outside of the bolt 29 is threadedly connected with the nut 32. The threads of the nut 32 are closely matched with the bolt 29. The bottom end of the nut 32 is in contact with the top end of the top end gasket 30. By tightening the nut 32, the entire locking assembly can fix the rotating disc 6 to the inside bottom end of the box 1.

[0027] Referring to Figure 1 , Figure 2 and Figure 5The top end of the rotating disc 6 is rotationally connected with the mechanical arm 7. The rotating disc 6 provides a stable rotating platform for the mechanical arm 7. The structure of the rotating connection enables the mechanical arm 7 to rotate flexibly on the horizontal plane, thereby realizing multi-directional operation coverage. The external rotating connection of the mechanical arm 7 has the link block 8. The structure of the link block 8 is designed ingeniously at the connection with the mechanical arm 7, which can ensure that the mechanical arm 7 drives the link block 8 to rotate in the movement process. The inside of one side of the link block 8 is slidingly connected with the connecting ring 18. The outside of the clamping block 17 is clamped with the inside of the connecting ring 18. The shape and size of the clamping block 17 are perfectly matched with the clamping structure in the inside of the connecting ring 18. The outside of the link plate 16 is in contact with the inside of the connecting ring 18. The front side of the containing box 19 is fixedly connected with the motor 20.

[0028] The motor 20 serves as a power source, which can provide strong power support for the whole grabbing and clamping action. The front side of the containing box 19 is fixedly connected with the support frame 21, which can provide a stable and reliable support frame for the rotating connection of the worm 22 and the worm wheel 23. The driving end of the motor 20 is fixedly connected with the worm 22. The outside of the worm 22 is rotationally connected in the inside of the support frame 21. The support frame 21 provides a stable track and support for the rotation of the worm 22. The worm 22 and the worm wheel 23 are in meshing connection. The worm wheel 23 can rotate under the driving of the worm 22. The outside of the worm wheel 23 is fixedly connected with the link rod 24, which can transmit the rotating motion of the worm wheel 23. The proximal side of the two link rods 24 is fixedly connected with the connecting block 25. The inside of the connecting block 25 is slidingly connected with the sliding rod 26 at four corners. The distal side of the plurality of sliding rods 26 is fixedly connected with the two clamping plates 27. The surface of the clamping plate 27 is specially treated, which has good friction and wear resistance, and can clamp the quartz boat without damaging it. The outside of the sliding rod 26 is sleeved with the expansion spring 28. One end of the expansion spring 28 is fixedly connected with one side of the clamping plate 27, and the other end is fixedly connected with one side of the connecting block 25. In the movement process of the clamping plate 27, the expansion spring 28 can produce corresponding elastic deformation according to the displacement change, thereby providing the functions of buffering and resetting.

[0029] Referring to Figure 1 , Figure 2 and Figure 4The inside of the adapter block 8 is fixedly connected with an electric push rod 9, and the driving end of the electric push rod 9 is fixedly connected with a C-shaped block 10. A containing hole 11 is formed in one side of the electric push rod 9, and two L-shaped connecting plates 12 are slidably connected in the containing hole 11. The L-shaped connecting plates 12 are fixedly connected with triangular blocks 13 on the side close to the electric push rod 9. The shape and angle of the triangular blocks 13 can be in good contact and cooperation with the arc surface of the C-shaped block 10. The side with the arc of the C-shaped block 10 is in contact with the side with the arc of the two triangular blocks 13. This contact mode can make the stable and effective force transmission when the electric push rod 9 drives the C-shaped block 10 to move. The inside of the side close to each other of the two L-shaped connecting plates 12 is slidably connected with a supporting rod 14. The outside of the supporting rod 14 is sleeved with a strong spring 15. The left and right ends of the strong spring 15 are fixedly connected to the sides close to each other of the two L-shaped connecting plates 12. The sides far away from each other of the two L-shaped connecting plates 12 are fixedly connected with adapter plates 16. The sides far away from each other of the two adapter plates 16 are fixedly connected with clamping blocks 17.

[0030] Working principle: The box body 1 is stably placed on the working site through the plurality of supporting legs 4 and the supporting pads 5 at the bottom ends thereof, thereby providing a solid support foundation for the entire device. The storage area 2 is located at the front end of the box body 1 and is used for storing the quartz boat holder to be processed or other related materials. The conveying belt 3 is prepared to receive the quartz boat holder after the loading and unloading operations are completed at the rear end of the box body 1. The rotating disc 6 is connected to the inside bottom end of the box body 1 through the locking assembly. A plurality of bolts 29 pass through the inside bottom end of the box body 1 and are threadedly connected with nuts 32. Two washers 30 are slidably connected with the buffer springs 31 on the sides close to each other outside the bolts 29, so as to realize the stable installation and positioning of the rotating disc 6.

[0031] When it is necessary to grab the quartz boat holder, the motor 20 is started. The driving end of the motor 20 drives the worm 22 to rotate in the supporting frame 21. The worm 22 is meshingly connected with the two worm gears 23, so that the worm gears 23 are rotated. The worm gears 23 drive the adapter rods 24 to rotate, and the adapter rods 24 drive the connecting blocks 25 to move. The sliding rods 26 at the four corners in the connecting blocks 25 slide in the connecting blocks 25, and simultaneously drive the clamping plates 27 to move close to each other. In this process, the extension springs 28 are contracted. The sliding of the sliding rods 26 in the connecting blocks 25 provides a guide for the movement of the clamping plates 27. The rebound force generated after the contraction of the extension springs 28 plays a buffering role.

[0032] When the clamping jaw needs to be replaced or repaired, the electric push rod 9 is started, the driving end of the electric push rod 9 pushes the C-shaped block 10 to move forward, the arc surface of the C-shaped block 10 is in contact with and extruded by the arc surfaces of the two triangular blocks 13, so that the two L-shaped connecting plates 12 slide towards each other along the support rod 14, the powerful spring 15 is compressed under force, the sides close to each other of the two L-shaped connecting plates 12 are close, the abutment plate 16 on the side far away from each other drives the clamping block 17 to separate from the connecting ring 18, the quick disassembly of the clamping jaw is completed, a new clamping jaw can be quickly replaced or damaged parts can be repaired, the maintenance cycle is greatly shortened, the equipment downtime is reduced, and the overall maintenance efficiency of the production equipment is improved.

[0033] The mechanical arm 7 moves the clamping jaw clamping the quartz boat holder to the corresponding position under the cooperation of the rotation of the rotating disc 6, carries the quartz boat holder grabbed from the storage area 2 to the designated machining area for loading operation, or carries the quartz boat holder after machining to the conveying belt 3 for unloading operation, realizes the full-automatic quartz boat holder loading and unloading process, and improves the production efficiency and the automation degree.

[0034] Finally, it should be noted that: the above only for the preferred embodiments of the utility model, and does not limit the utility model, although the utility model is described in detail with reference to the foregoing embodiments, for the person skilled in the art, it still can modify the technical scheme recorded in the foregoing each embodiment, or equivalent replacement to part of technical features, any modification, equivalent replacement, improvement etc. within the spirit and principles of the utility model, should be contained in the protection scope of the utility model.

Claims

1. A full-automatic quartz boat supporting loading and unloading machine comprising a box (1), characterized in that: The inner bottom end of the box body (1) is connected with the rotating disc (6) through the locking assembly, the top end of the rotating disc (6) is rotatably connected with the mechanical arm (7), the outer side of the mechanical arm (7) is rotatably connected with the connecting block (8), the inner side of one side of the connecting block (8) is slidably connected with the connecting ring (18), the front side of the connecting ring (18) is fixedly connected with the containing box (19), the inner side of the front side of the containing box (19) is fixedly connected with the motor (20), the front side of the containing box (19) is fixedly connected with the support frame (21), the driving end of the motor (20) is fixedly connected with the worm (22), the inner side of one side of the support frame (21) is rotatably connected with two worm gears (23), the outer side of the worm gear (23) is fixedly connected with the connecting rod (24), the proximal side of the two connecting rods (24) is fixedly connected with the connecting block (25), the inner side of the four corners of the connecting block (25) is slidably connected with the sliding rod (26), the distal side of the plurality of sliding rods (26) is fixedly connected with the two clamping plates (27), and the outer side of the sliding rod (26) is sleeved with the expansion spring (28).

2. The fully automatic quartz boat loading and unloading machine according to claim 1, characterized in that: The inner side of the connecting block (8) is fixedly connected with the electric push rod (9), the driving end of the electric push rod (9) is fixedly connected with the C-shaped block (10), one side of the electric push rod (9) is provided with the containing hole (11), the inner side of the containing hole (11) is slidably connected with the two L-shaped connecting plates (12), the side close to the electric push rod (9) of the two L-shaped connecting plates (12) is fixedly connected with the triangular block (13), the inner side of the proximal side of the two L-shaped connecting plates (12) is slidably connected with the support rod (14), the outer side of the support rod (14) is sleeved with the strong spring (15), the distal side of the two L-shaped connecting plates (12) is fixedly connected with the connecting plate (16), and the distal side of the two connecting plates (16) is fixedly connected with the clamping block (17).

3. The fully automatic quartz boat loading and unloading machine according to claim 1, characterized in that: The front end of the box body (1) is fixedly connected with the storage area (2), the rear end of the box body (1) is fixedly connected with the conveying belt (3), and the bottom end of the box body (1) is fixedly connected with the plurality of supporting legs (4).

4. The fully automatic quartz boat loading and unloading machine according to claim 1, characterized in that: The outer side of the worm (22) is rotatably connected in the inner side of the support frame (21), and the worm (22) and the worm gear (23) are in meshing connection.

5. The fully automatic quartz boat loading and unloading machine according to claim 1, characterized in that: One end of the expansion spring (28) is fixedly connected to one side of the clamping plate (27), and the other end of the expansion spring (28) is fixedly connected to one side of the connecting block (25).

6. The full-automatic quartz boat loading and unloading machine according to claim 2, characterized in that: The left and right ends of the strong spring (15) are respectively fixedly connected to the proximal sides of the two L-shaped connecting plates (12), and the side with the arc of the C-shaped block (10) is in contact with the side with the arc of the two triangular blocks (13).

7. The fully automatic quartz boat loading and unloading machine according to claim 2, characterized in that: The outer side of the clamping block (17) is clamped with the inner side of the connecting ring (18), and the outer side of the connecting plate (16) is in contact with the inner side of the connecting ring (18).

8. The fully automatic quartz boat loading and unloading machine according to claim 1, characterized in that: The locking assembly comprises bolts (29), the outer threads of a plurality of the bolts (29) are connected at the inner bottom end of the box (1), the outer sliding connection of the bolt (29) has two gaskets (30), the proximal side of two gaskets (30) is fixedly connected with buffer springs (31), the outer thread of the bolt (29) is connected with a nut (32), and the bottom end of the nut (32) is in contact with the top end of the gasket (30).

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