An automated quartz glass production system

Abstract

The present application relates to the field of production quality control, and particularly relates to an automatic quartz glass production system, the present application is provided with a conversion collection module, which is used to collect the conversion production data of the raw material to be processed, so as to extract the conversion characteristics of the raw material to be processed within a predetermined time; a conversion analysis module is used to evaluate the conversion quality characterization parameters of the raw material to be processed in combination with the conversion characteristics and the gas discharge flow of the exhaust port, so as to mark the raw material to be processed; a reaction evaluation module responds to the marking result of the conversion analysis module to evaluate and analyze the raw material to be processed; a forming control module is used to call the forming and measuring characteristics of the corrected raw material to be processed, so as to determine whether the raw material to be processed is qualified, and the present application effectively improves the stability and production efficiency of the quartz glass product.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of production quality control, and in particular to an automatic quartz glass production system. BACKGROUND

[0002] With the rapid development of the semiconductor industry, quartz glass is widely used in optoelectronic devices, high-end integrated circuits and other high-tech product manufacturing.

[0003] In the production process of quartz glass ingot, chemical vapor deposition (CVD) is one of the core processes, which generates silicon dioxide particles by reacting gaseous raw materials (such as silicon tetrachloride) with oxygen, hydrogen and other gases at high temperature through a burner, and deposits them on the substrate to form high-purity quartz glass ingot. However, the stability and deposition quality of this process are affected by many factors. Through an intelligent monitoring and control system, the deposition quality is dynamically evaluated, and the process parameters are automatically adjusted to ensure efficient and stable production of quartz glass ingot.

[0004] Chinese patent application publication No. CN113683291A discloses a method for producing large-size, high-uniformity synthetic quartz glass ingot. The method uses a chemical vapor deposition process, i.e., hydrogen and oxygen are introduced into multiple burners, which are then burned to preheat the deposition furnace cavity. After preheating, the temperature of the quartz substrate in the deposition furnace is raised to a specified temperature, and the temperature probe is started to work. Gaseous silicon-containing compounds are introduced into the deposition furnace through the discharge pipe of each burner. Hydrogen and oxygen are burned in the burner to produce water vapor, which reacts with the gaseous silicon-containing compounds in the deposition furnace to form silicon dioxide particles. The silicon dioxide particles gradually deposit on the rotating quartz substrate to form a quartz glass ingot, and the temperature probe dynamically monitors the temperature distribution of the deposition surface. The invention ensures the uniformity of the deposition surface temperature by increasing the number of burners and testing the deposition surface temperature, thereby ensuring the structural uniformity of the quartz glass.

[0005] However, the prior art still has the following problems,

[0006] In traditional quartz glass ingot production, the quality of the deposited product needs to be detected by the appearance of the final ingot, which is a "post-judgment". If there are potential abnormalities in the early deposition period, such as insufficient reaction, it cannot be detected in time, resulting in defects in the subsequent deposition of the ingot as a whole, causing waste of materials and time. SUMMARY

[0007] Therefore, the present application provides an automatic quartz glass production system to overcome the problem of potential abnormalities in the early deposition period in the prior art, which cannot be detected in time, resulting in defects in the subsequent deposition of the ingot as a whole, causing waste of materials and time.

[0008] To achieve the above object, the application provides an automatic quartz glass production system, which comprises:

[0009] a conversion collecting module, which is used to collect conversion production data of raw materials to be processed, so as to extract conversion characteristics of the raw materials to be processed within a predetermined time, wherein the conversion characteristics include a flame offset degree of a combustion device and a light-dark difference amount of a flame;

[0010] a conversion analysis module, which is connected with the conversion collecting module and used to evaluate a conversion quality characteristic parameter of the raw materials to be processed by combining the conversion characteristics and a gas discharge flow rate of a waste gas outlet, so as to mark the raw materials to be processed;

[0011] a reaction evaluation module, which is connected with the conversion analysis module and used to evaluate and analyze the raw materials to be processed in response to a marking result of the conversion analysis module, including,

[0012] acquiring a flow path of gas in a deposition device, determining a gas flow symmetry offset degree of a deposition area and a temperature difference of the deposition area, judging whether a deposition process of the raw materials to be processed enters a deposition instability stage, identifying a bubble characteristic of a deposition surface in the deposition instability stage, and evaluating a deposition fluctuation characteristic value of the raw materials to be processed, so as to determine whether the deposition process needs to be corrected;

[0013] a forming control module, which is connected with the reaction evaluation module and used to call a forming weighing characteristics of the corrected raw materials to be processed, so as to determine whether the raw materials to be processed are qualified weighing materials;

[0014] wherein the bubble characteristic includes a bubble generation rate and a bubble density, and the forming weighing characteristics include a weighing coverage area ratio and a raw material thickness difference.

[0015] Further, the conversion analysis module is used to evaluate the conversion quality characteristic parameter of the raw materials to be processed, including:

[0016] a ratio of the flame offset degree of the combustion device to a flame offset degree threshold value and a ratio of the light-dark difference amount of the flame to a light-dark difference threshold value are summed as a first conversion quality characteristic;

[0017] a ratio of the gas discharge flow rate of the waste gas outlet to a gas discharge flow rate threshold value is taken as a second conversion quality characteristic;

[0018] the first conversion quality characteristic and the second conversion quality characteristic are weighted and summed to determine the conversion quality characteristic parameter.

[0019] Further, the conversion analysis module is used to mark the raw materials to be processed, including:

[0020] If the conversion quality representation parameter of the raw material to be processed is greater than or equal to the preset conversion quality representation parameter threshold, the conversion analysis module marks the raw material to be processed.

[0021] Further, the reaction evaluation module evaluates the raw material to be processed in response to the marking result of the conversion analysis module, including:

[0022] If any batch of the raw material to be processed is marked, the raw material to be processed is evaluated.

[0023] Further, the reaction evaluation module is used to determine whether the deposition process of the raw material to be processed enters a deposition instability stage, including:

[0024] If the airflow symmetry offset degree of the deposition area is greater than the airflow symmetry offset degree threshold or / and the temperature difference of the deposition area is greater than the temperature difference threshold, it is determined that the deposition process of the raw material to be processed enters a deposition instability stage.

[0025] Further, the reaction evaluation module is used to evaluate the deposition fluctuation representation value of the raw material to be processed, including:

[0026] The ratio of the generation rate of the gas bubble to the generation rate threshold is used as a first deposition fluctuation feature;

[0027] The ratio of the gas bubble density to the gas bubble density threshold is used as a second deposition fluctuation feature;

[0028] The sum of the first deposition fluctuation feature and the second deposition fluctuation feature is used as the deposition fluctuation representation value.

[0029] Further, the reaction evaluation module is used to determine whether the deposition process needs to be corrected, including:

[0030] If the deposition fluctuation representation value of the raw material to be processed is greater than or equal to the preset deposition fluctuation representation threshold, it is determined that the deposition process needs to be corrected.

[0031] Further, the molding control module is used to determine whether the raw material to be processed is qualified briquetting material, including:

[0032] If any batch of the raw material to be processed meets the briquetting material molding criterion, the raw material to be processed is determined to be qualified briquetting material.

[0033] The briquetting material molding criterion includes that the ratio of the briquetting coverage area is greater than or equal to the ratio of the briquetting coverage area threshold and the thickness difference of the raw material to be processed is less than the thickness difference threshold of the raw material to be processed.

[0034] Further, the reaction evaluation module corrects the deposition process, including: adjusting the supply rate of the raw material to be processed and the gas flow of the combustion equipment.

[0035] Further, it also includes a correction warning module connected with the reaction evaluation module, which sends a correction warning signal in response to the need to correct the deposition process.

[0036] Compared with the prior art, the present application collects the conversion production data of the raw material to be processed to extract the conversion characteristics of the raw material to be processed within a predetermined time; combines the conversion characteristics and the gas discharge flow of the exhaust port to evaluate the conversion quality characterization parameter of the raw material to be processed, so as to mark the raw material to be processed; responds to the marking result to evaluate and analyze the raw material to be processed; and calls the corrected forming and measuring characteristics of the raw material to be processed to determine whether the raw material to be processed is qualified, thereby effectively improving the stability and production efficiency of the quartz glass product.

[0037] Especially, the present application sets a reaction analysis module, which closely fits the characteristics of the combustion equipment in the production scene and the core reaction logic of the quartz glass vapor deposition, and reflects the conversion effect from two aspects of "reaction process" and "reaction result" according to the flame state and exhaust port flow of the combustion equipment, wherein the flame offset degree is directly related to the gas flow symmetry of the combustion equipment, and the uneven supply of side hydrogen / oxygen slit gas or the failure of nitrogen gas curtain leads to hydrogen overflow, at which time the local reaction area offset will cause uneven conversion of the raw material; the light and dark difference of the flame can reflect the intensity stability of the conversion reaction, and the light and dark of the flame are related to the hydrogen combustion efficiency and the silicon tetrachloride decomposition rate, and the too large light and dark difference can indicate the local conversion reaction intensity fluctuation, which is easy to produce deposition thickness difference or unconverted impurities; the exhaust port gas discharge flow reflects the overall balance degree of the conversion reaction, and the stable exhaust port flow means that the raw material supply and the reaction rate are matched, and if the flow suddenly rises / falls, it may be that the raw material supply is interrupted or the reaction is abnormal, and further, the conversion analysis module identifies the potential abnormalities of the raw material to be processed by the synergistic analysis of "reaction process characteristics + reaction result indicators", so that the present application calculates the conversion quality characterization parameter of the raw material to be processed based on the flame injection of the combustion equipment combined with the gas discharge flow of the exhaust port, so as to characterize the conversion stability of the raw material to be processed, and provides data support for subsequent marking of the raw material to be processed, thereby effectively improving the stability and production efficiency of the quartz glass product.

[0038] Especially, the application considers that, in the quartz glass deposition process, the stable gas supply of the burner, the uniform deposition and the temperature control are relied on to obtain high-quality ingots, and a reaction evaluation module is arranged to capture "implicit instability signals" through quantitative parameters, wherein the uniformity of slit gas supply of the combustion equipment is quantified by airflow symmetry offset, so as to judge in advance the uniformity of the mixture of the raw material to be processed and the gas, and avoid local over-thickness / over-thinness of the deposition surface; the temperature difference distribution difference of the deposition area is associated, and if the temperature difference is too large, the deposition rate of the quartz glass is uneven, and even local poor crystallization occurs, and then it is judged whether the deposition process enters the deposition instability stage, and due to the fact that the gas is not discharged in time or the local reaction is abnormal, bubbles appear on the deposition surface, and if the bubbles accumulate in the ingot, the rejection rate of the finished product in the later stage will be increased, and the interference influence degree of the bubble generation rate and the density on the final ingot quality is quantified, therefore, the application evaluates the deposition fluctuation representation value of the raw material to be processed through the bubble characteristics of the deposition surface corresponding to the deposition instability stage, and provides data support for subsequent judgment whether the deposition process needs to be corrected, and the application effectively improves the stability and production efficiency of the quartz glass product.

[0039] Especially, the application is based on the fact that the core function of the ingot making equipment in the quartz glass production process is horizontal swing to ensure uniform and stable deposition, and the forming control module is arranged to quantify the ingot making effect of the mechanical action of the ingot making equipment on the final ingot quality, and the ingot making coverage area directly reflects the uniformity of the horizontal swing of the ingot making equipment, and insufficient swing range or local deposition not covered may lead to local thickness of the ingot being too thin or density being uneven; the thickness difference of the raw material to be processed reflects the matching degree of the descent of the ingot making equipment and the deposition speed, and if the descent speed of the ingot making machine and the deposition speed are not matched, that is, the deposition position is not kept constant, which may lead to abnormalities such as "eccentricity" and "uneven thickness", based on this, the application can identify the "local missing deposition" problem in advance through the quantification of the above two characteristic parameters, and the ingots that do not meet the structural requirements can be screened out in time, which can reduce the processing difficulty of the subsequent cutting and forming processes, and the application effectively improves the stability and production efficiency of the quartz glass product. BRIEF DESCRIPTION OF DRAWINGS

[0040] Figure 1 It is a functional module diagram of the automatic quartz glass production system of the application embodiment;

[0041] Figure 2 It is a logic judgment diagram for marking the raw material to be processed by the application embodiment;

[0042] Figure 3 It is a logic judgment diagram for judging whether the deposition process needs to be corrected by the application embodiment;

[0043] Figure 4The logic determination diagram for determining whether the raw material to be processed is qualified material. DETAILED DESCRIPTION

[0044] In order to make the objects and advantages of the present application clearer, the following further describes the present application with reference to the embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and do not limit the present application.

[0045] The preferred embodiments of the present application are described below with reference to the accompanying drawings. It should be understood by those skilled in the art that the embodiments are only used to explain the technical principles of the present application and are not intended to limit the protection scope of the present application.

[0046] It should be noted that, in the description of the present application, the terms indicating the direction or positional relationship of "upper", "inner", "outer" and the like are based on the direction or positional relationship shown in the drawings, which is only for the convenience of description and does not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present application.

[0047] In addition, it should also be noted that, in the description of the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connection" should be understood broadly, for example, it can be fixed connection, or detachable connection, or integrally connected; it can be mechanical connection, or electrical connection. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0048] Please refer to Figure 1 as shown, Figure 1 The functional module diagram of the automatic quartz glass production system of the embodiment of the present application, the automatic quartz glass production system of the embodiment of the present application comprises:

[0049] The conversion collection module is used to collect the conversion production data of the raw material to be processed, so as to extract the conversion characteristics of the raw material to be processed within a predetermined time, and the conversion characteristics include the flame offset degree of the combustion equipment and the light-dark difference amount of the flame;

[0050] The conversion analysis module is connected with the conversion collection module, and is used to evaluate the conversion quality characterization parameter of the raw material to be processed in combination with the conversion characteristics and the gas discharge flow of the exhaust port, so as to mark the raw material to be processed;

[0051] The reaction evaluation module is connected with the conversion analysis module, and performs evaluation analysis on the raw material to be processed in response to the marking result of the conversion analysis module, including,

[0052] acquiring a flow path of gas in a deposition device, determining a gas flow symmetry offset degree of a deposition area and a temperature difference of the deposition area, judging whether a deposition process of the raw material to be processed enters a deposition instability stage, identifying a bubble feature of a deposition surface in the deposition instability stage, and evaluating a deposition fluctuation characteristic value of the raw material to be processed to determine whether the deposition process needs to be corrected;

[0053] a forming control module connected with the reaction evaluation module, used to call a forming weighing feature of the corrected raw material to be processed to determine whether the raw material to be processed is qualified weighing material;

[0054] The bubble feature includes a bubble generation rate and a bubble density, and the forming weighing feature includes a weighing coverage area ratio and a raw material thickness difference.

[0055] Specifically, the conversion production data includes a conversion feature of the raw material to be processed, a gas discharge flow of a waste gas outlet, a gas flow symmetry offset degree and a corresponding temperature difference of a deposition area, a bubble feature of a deposition surface, and a forming weighing feature of the raw material to be processed.

[0056] Specifically, the collection and acquisition of the conversion feature of the raw material to be processed (a flame offset degree of the combustion device and a light-dark difference amount of the flame) is not limited in particular, and a water-cooled long-wave infrared thermal imager can be installed on the top of the deposition furnace to observe the flame through a high-temperature-resistant window, and the horizontal distance between the real-time flame barycenter and the deviation formed by the vertical axis (the position of the central slit) is taken as the flame offset degree; the maximum brightness difference in the flame image collected by the water-cooled long-wave infrared thermal imager within a predetermined time is taken as the light-dark difference amount.

[0057] The temperature of the deposition area can also be acquired by the water-cooled long-wave infrared thermal imager to determine the temperature difference of the deposition area, which is not described in detail.

[0058] Specifically, the collection and acquisition of the gas discharge flow of the waste gas outlet is not limited in particular, and an outer clamping ultrasonic sensor can be installed on the outer wall of the waste gas outlet pipeline to measure the time difference of ultrasonic wave propagation in the waste gas to calculate the gas flow rate, and then the gas discharge flow is determined in combination with the cross-sectional area of the waste gas outlet pipeline, that is, the gas discharge flow is the product of the gas flow rate and the cross-sectional area of the waste gas outlet pipeline. Of course, other ways can also be used for collection and acquisition, which is not described in detail.

[0059] Specifically, the acquisition method of the deposition area airflow symmetry offset degree is not specifically limited, and the hot flowmeter is arranged in the normal temperature pipeline upstream of the slit to acquire the airflow symmetry offset degree. It can be understood that the arrangement of the hot flowmeter needs to be closely combined with the symmetry structure of the combustion equipment slit (such as the central symmetry oxygen and hydrogen slit), and the airflow symmetry offset degree is determined by comparing the flow rates of the symmetry points. The ratio of the difference value of the flow rates of the symmetry points to the average flow rate of the symmetry points is taken as the airflow symmetry offset degree.

[0060] Specifically, the acquisition method of the deposition surface bubble characteristics (bubble generation rate and bubble density) is not specifically limited, and the high-temperature industrial endoscope can be used to acquire the bubble generation rate and bubble density of the deposition surface in real time.

[0061] Specifically, the acquisition method of the deposition surface bubble characteristics (bubble generation rate and bubble density) is not specifically limited, and the high-temperature industrial endoscope can be used to acquire the bubble generation rate and bubble density of the deposition surface in real time.

[0062] Specifically, the acquisition method of the deposition surface bubble characteristics (bubble generation rate and bubble density) is not specifically limited, and the high-temperature industrial endoscope can be used to acquire the bubble generation rate and bubble density of the deposition surface in real time.

[0063] In the implementation, the combustion equipment selects a burner, which is fixedly and sealingly installed at the top of the deposition furnace. At least two gas inlet ports are arranged at the upper end of the burner to make the outlet gas uniform, and at least two exhaust gas ports are arranged to make the exhaust gas uniform.

[0064] The burner is a multi-slit long strip, the central slit is an oxygen carrying gaseous silicon tetrachloride, the two adjacent sides are oxygen, the outside of the oxygen slit is hydrogen, and the outermost side is an exhaust gas outlet port. A buffer cavity is arranged above each slit to realize uniform gas supply.

[0065] The deposition equipment selects a deposition furnace to provide a reaction space and heat preservation for the deposition. The furnace body has certain heat resistance, heat insulation and heat preservation, and cooperates with the tail gas treatment system to extract the overflow tail gas in the deposition furnace.

[0066] The gaveling device selects a gaveling machine, which bears the obtained quartz glass gaveling material deposited continuously, swings horizontally to make the deposition uniform, and stably decreases to keep the deposition position constant, thereby ensuring the stable quality of the gaveling material. The gaveling machine is composed of a base, a stand, a lifting system, an up-and-down moving platform, a horizontal swinging system, a supporting rod, a clamping sleeve, a gasket, and the like.

[0067] The grinding tool can be a grinding head of the gaveling machine.

[0068] Specifically, the specific structure of the conversion analysis module, the reaction evaluation module, the forming control module, and the correction warning module is not limited, and each unit thereof can be composed of a logic component or a combination of logic components, including a field programmable processor, a computer, or a microprocessor in a computer.

[0069] Specifically, the conversion analysis module is used to evaluate the conversion quality characteristic parameter of the raw material to be processed, including:

[0070] The ratio of the flame offset degree of the combustion device to the flame offset degree threshold value and the ratio of the light-dark difference amount of the flame to the light-dark difference threshold value are summed up as the first conversion quality feature;

[0071] The ratio of the gas discharge flow of the exhaust port to the gas discharge flow threshold value is used as the second conversion quality feature;

[0072] The first conversion quality feature and the second conversion quality feature are weighted and summed to determine the conversion quality characteristic parameter.

[0073] Specifically, the deposition nature of quartz glass is that gaseous raw materials (such as SiCl4) are chemically reacted in a hydrogen-oxygen flame and deposited into solid quartz glass, and the flame state of the combustion device can directly reflect whether the conversion reaction is normal, and the flame deviation will cause the mixing area of the raw materials (SiCl4) and hydrogen and oxygen to deviate from the designed deposition position (such as the center slit area of the combustion device), which may cause local insufficient reaction of raw materials (not deposited) or excessive combustion (generate impurities), directly affecting the purity and uniformity of the deposition layer; the brightness of the flame is directly related to the combustion temperature and the reaction efficiency of the raw materials, for example, the high-temperature flame of fully combusted hydrogen is bright, and the flame may be dark when there is insufficient oxygen locally, and a large difference in brightness will cause uneven temperature distribution in the deposition area, thereby causing differences in local density and purity of the quartz glass mass, for example, the dark area may have unreacted raw materials due to insufficient temperature, and the bright area may have bubbles due to local overheating. The above two characteristic indicators directly correspond to whether the raw material to be processed is fully reacted according to the designed path and whether the deposition is uniform, which are the core factors to determine the basic quality of the mass, and the gas flow of the exhaust port is an auxiliary judgment index, which indirectly affects, which mainly reflects the "efficiency of discharging tail gas after reaction", avoids the accumulation of unreacted raw materials or harmful gas in the furnace (prevents secondary pollution) and maintains the stability of the furnace gas pressure (indirectly ensures the stability of the gas flow path), based on this, in the implementation, the conversion characteristics are given priority, that is, the flame deviation of the combustion device and the brightness difference of the flame, so the first conversion quality state characteristic calculated based on the conversion state characteristics is given a slightly higher weight. Therefore, when performing weighted summation, the weight of the first conversion quality characteristic is set to 0.6, and the weight of the second conversion quality characteristic is set to 0.4;

[0074] In the embodiment, the purpose of setting the flame offset threshold, the light-dark difference threshold and the gas discharge flow threshold is to represent the case that the conversion stability of the raw material to be processed is poor and the quality of the final batch is greatly affected. By obtaining relevant historical data of several times of completing quartz glass deposition, calling the historical data of the flame offset of the combustion equipment, the historical data of the light-dark difference of the flame and the historical data of the gas discharge flow of the exhaust port, the mean value of the flame offset, the mean value of the light-dark difference and the mean value of the gas discharge flow are solved respectively and correspondingly taken as the reference value under normal circumstances. Based on the purpose of setting the above three thresholds, the flame offset threshold is determined as the product of the mean value of the flame offset and the flame offset coefficient, the light-dark difference threshold is determined as the product of the mean value of the light-dark difference and the light-dark deviation coefficient, and the gas discharge flow threshold is determined as the product of the mean value of the gas discharge flow and the flow deviation coefficient. The flame offset coefficient is selected within the interval [1.05, 1.1], and in the implementation, 1.05 is preferred. The light-dark deviation coefficient is selected within the interval [1.1, 1.15], and in the implementation, 1.1 is preferred. The flow deviation coefficient is selected within the interval [1.2, 1.3], and in the implementation, 1.2 is preferred.

[0075] Specifically, the application sets up a reaction analysis module, which closely matches the characteristics of the combustion equipment in the production scene and the core reaction logic of quartz glass vapor deposition. According to the flame state and exhaust port flow rate of the combustion equipment, the conversion effect is reflected from two aspects of "reaction process" and "reaction result". The flame offset degree is directly related to the symmetry of the combustion equipment airflow. If the side hydrogen / oxygen slit gas supply is uneven (such as pressure fluctuation), or the nitrogen gas curtain fails to cause hydrogen overflow, the local reaction area offset will cause uneven conversion of raw materials (excessive reaction on the offset side and insufficient reaction on the other side). The light and dark difference of the flame can reflect the intensity stability of the conversion reaction. The light and dark of the flame are related to the hydrogen combustion efficiency and the decomposition rate of silicon tetrachloride (such as bright flame when hydrogen is sufficient, and excessive silicon tetrachloride supply may cause dark flame). If the light and dark difference is too large, it indicates that the local conversion reaction intensity fluctuates, which is easy to produce deposition thickness difference or unconverted impurities. The exhaust port gas discharge flow rate reflects the overall balance of the conversion reaction. Stable exhaust port flow rate means that the raw material supply (silicon tetrachloride, hydrogen, and oxygen) and reaction rate are matched. If the flow rate suddenly rises or drops, it may be due to the interruption of raw material supply (such as central slit silicon tetrachloride supply interruption) or abnormal reaction (such as direct discharge of unreacted gas). In addition, the conversion analysis module identifies potential abnormalities in the initial processing raw material through the cooperative analysis of "reaction process characteristics (flame) + reaction result indicators (exhaust port flow rate)". Therefore, the application calculates the conversion quality characterization parameter of the raw material to be processed based on the flame injection of the combustion equipment and the gas discharge flow rate of the exhaust port, so as to characterize the conversion stability of the raw material to be processed and provide data support for subsequent marking of the raw material to be processed. The application effectively improves the stability and production efficiency of quartz glass products.

[0076] Specifically, please refer to Figure 2 As shown in the figure, it is the logic judgment diagram for marking the raw material to be processed by the embodiment of the application. The conversion analysis module is used to mark the raw material to be processed, which includes:

[0077] If the conversion quality characterization parameter of the raw material to be processed is greater than or equal to the preset conversion quality characterization parameter threshold, the conversion analysis module marks the raw material to be processed.

[0078] If the conversion quality characterization parameter of the raw material to be processed is less than the preset conversion quality characterization parameter threshold, the conversion analysis module does not need to mark the raw material to be processed.

[0079] The conversion quality characterization parameter threshold is predetermined, and the conversion quality characterization parameter obtained when the flame offset degree of the combustion equipment is equal to the flame offset degree threshold, the light-dark difference amount of the flame is equal to the light-dark difference amount threshold, and the gas discharge flow of the exhaust port is equal to the gas discharge flow threshold is determined as the conversion quality characterization parameter threshold.

[0080] Specifically, the reaction evaluation module evaluates the to-be-processed raw material in response to the marking result of the conversion analysis module, including:

[0081] If any batch of to-be-processed raw material is marked, the to-be-processed raw material is evaluated and analyzed.

[0082] Specifically, the reaction evaluation module is used to determine whether the deposition process of the to-be-processed raw material enters a deposition instability stage, including:

[0083] If the airflow symmetry offset degree of the deposition area is greater than the airflow symmetry offset degree threshold or / and the temperature difference of the deposition area is greater than the temperature difference threshold, it is determined that the deposition process of the to-be-processed raw material enters a deposition instability stage.

[0084] In this embodiment, the purpose of setting the airflow symmetry offset degree threshold and the temperature difference threshold is to represent that the airflow asymmetry degree is more serious and the temperature difference is larger, thereby aggravating the abnormal influence on the deposition effect and more easily causing the deposition thickness to be uneven. By obtaining relevant historical data of several times of completing quartz glass deposition, calling the airflow symmetry offset degree historical data of the deposition area and the temperature difference historical data of the deposition area, solving the airflow symmetry offset degree mean value and the temperature difference mean value respectively, and corresponding as the reference value under normal circumstances, based on the purpose of setting the above two thresholds, the airflow symmetry offset degree threshold is determined as the product of the airflow symmetry offset degree mean value and the symmetry deviation coefficient, and the temperature difference threshold is determined as the product of the temperature difference mean value and the temperature difference offset coefficient, wherein the symmetry deviation coefficient is selected within the interval [1.1, 1.15], and in the implementation, it is preferably 1.1, and the temperature difference offset coefficient is selected within the interval [1.15, 1.2], and in the implementation, it is preferably 1.15.

[0085] Specifically, the reaction evaluation module is used to evaluate the deposition fluctuation characterization value of the to-be-processed raw material, including:

[0086] The ratio of the generation rate of the gas bubble to the generation rate threshold is used as a first deposition fluctuation feature;

[0087] The ratio of the bubble density to the bubble density threshold is used as a second deposition fluctuation feature;

[0088] The sum of the first deposition fluctuation feature and the second deposition fluctuation feature is used as the deposition fluctuation characterization value.

[0089] In the embodiment, the purpose of setting the generation rate threshold and the bubble density threshold is to represent the case that the influence degree of the presence of bubbles on the final batch quality is relatively serious. By obtaining relevant historical data of several times of completing quartz glass deposition, calling the historical data of the generation rate of bubbles and the historical data of the bubble density of the deposition area, solving the average value of the generation rate and the average value of the bubble density respectively, and corresponding as the reference value in the normal case, based on the purpose of setting the two thresholds, the generation rate threshold is determined as the product of the average value of the generation rate and the rate deviation coefficient, and the bubble density threshold is determined as the product of the average value of the bubble density and the density deviation coefficient, wherein the rate deviation coefficient is selected in the interval [1.2, 1.25], and in the implementation, 1.2 is preferred, and the density deviation coefficient is selected in the interval [1.1, 1.15], and in the implementation, 1.1 is preferred.

[0090] Specifically, the present application considers that in the quartz glass deposition process, stable gas supply, uniform deposition and temperature control are relied on the burner, and then high-quality batch is obtained, and the reaction evaluation module is set to capture the "implicit instability signal" through quantitative parameters, wherein the uniformity of slit gas supply of the combustion equipment is quantified by the airflow symmetry offset (such as the flow deviation of central slit SiCl4 and two sides O2 / H2 may cause airflow offset), the uniformity of the mixture of the raw material to be processed and the gas is judged in advance, and local over-thickness / over-thinness of the deposition surface is avoided (such as hydrogen gas bias flow may cause local insufficient combustion, and SiCl4 does not react completely); the temperature difference distribution difference of the deposition area is associated, and if the temperature difference is too large, the deposition rate of quartz glass (SiO2) is uneven, and even local poor crystallization occurs, and then it is determined whether the deposition process enters the deposition instability stage. Due to the fact that the gas is not discharged in time or the local reaction is abnormal, bubbles appear on the deposition surface, and if the bubbles accumulate in the batch, the scrap rate of the finished product will increase in the later period. The interference influence degree of the bubble generation rate and the density on the final batch quality is quantified, therefore, the deposition fluctuation representation value of the raw material to be processed is evaluated by the bubble characteristics of the deposition surface corresponding to the deposition instability stage, and data support is provided for subsequent determination of whether the deposition process needs to be corrected. The present application effectively improves the stability and production efficiency of quartz glass products.

[0091] Specifically, please refer to Figure 3 The reaction evaluation module is used to determine whether the deposition process needs to be corrected, and includes:

[0092] If the deposition fluctuation representation value of the raw material to be processed is greater than or equal to the preset deposition fluctuation representation threshold, it is determined that the deposition process needs to be corrected;

[0093] If the deposition fluctuation representation value of the to-be-processed raw material is less than the preset deposition fluctuation representation threshold value, it is determined that the deposition process does not need to be corrected.

[0094] The deposition fluctuation representation threshold value is determined in advance, and the deposition fluctuation representation value calculated under the condition that the bubble generation rate is equal to the bubble generation rate threshold value and the bubble density is equal to the bubble density threshold value is determined as the deposition fluctuation representation threshold value.

[0095] Specifically, referring to FIG. 1, Figure 4 As shown in FIG. 1, which is a logic determination diagram for determining whether the to-be-processed raw material is qualified material according to an embodiment of the present application, the molding control module is used to determine whether the to-be-processed raw material is qualified material, and includes:

[0096] If the to-be-processed raw material of any batch meets the material molding criterion, it is determined that the to-be-processed raw material is qualified material.

[0097] The material molding criterion includes that the ratio of the material covering area is greater than or equal to the ratio of the material covering area threshold value and the thickness difference of the to-be-processed raw material is less than the thickness difference threshold value of the to-be-processed raw material.

[0098] In this embodiment, the purpose of setting the to-be-processed raw material thickness difference threshold value is to represent a case where the degree of potential quality risk (such as material eccentricity, uneven thickness) of the material is high. By obtaining relevant historical data of several times of quartz glass deposition, calling the historical data of the to-be-processed raw material thickness difference, solving the mean value of the to-be-processed raw material thickness difference, and taking it as the reference value under normal circumstances, based on the purpose of setting the to-be-processed raw material thickness difference threshold value, the to-be-processed raw material thickness difference threshold value is determined as the product of the mean value of the to-be-processed raw material thickness difference and the thickness deviation coefficient, wherein the thickness deviation coefficient is selected within the interval [1.1, 1.2], and in the implementation, it is preferably 1.1.

[0099] Specifically, under normal circumstances, the movement range of the grinding tool of the material making equipment should cover the entire edge region range of the to-be-processed raw material when reciprocating to ensure that the to-be-processed raw material is uniformly and sufficiently ground, avoiding the situation of "missing processing", for example, there is an uncovered area that remains in the original state (protrusion during deposition, burr, rough surface layer), which may even cause the to-be-processed raw material to be scrapped or subsequent processing to fail. However, the reciprocating swing amplitude of the grinding tool should not be too large (far exceeding the size of the to-be-processed raw material), which may easily lead to an increase in the idle stroke of the grinding tool, prolong the processing time, and even cause vibration due to the large inertia of the grinding tool, thereby affecting the edge processing precision. Therefore, in this embodiment, the ratio of the material covering area threshold value is selected within the interval [1, 1.1], and in the implementation, it is preferably 1, which will not be described again.

[0100] Specifically, the reaction evaluation module corrects the immersion process, including: adjusting the supply rate of the raw material to be processed and the gas flow of the combustion equipment.

[0101] decrease the supply rate of the raw material to be processed, the decrease amount of the supply rate being positively correlated with the deposition fluctuation characteristic value;

[0102] In this embodiment, optionally,

[0103] comparing the deposition fluctuation characteristic value with preset first and second deposition fluctuation comparison thresholds,

[0104] when the deposition fluctuation characteristic value is greater than the second deposition fluctuation comparison threshold, determining the decrease amount of the supply rate as a first decrease amount, and setting the first decrease amount as 0.55 times the current supply rate;

[0105] when the deposition fluctuation characteristic value is greater than or equal to the first deposition fluctuation comparison threshold and less than or equal to the second deposition fluctuation comparison threshold, determining the decrease amount of the supply rate as a second decrease amount, and setting the second decrease amount as 0.45 times the current supply rate;

[0106] when the deposition fluctuation characteristic value is less than the first deposition fluctuation comparison threshold, determining the decrease amount of the supply rate as a third decrease amount, and setting the third decrease amount as 0.35 times the current supply rate;

[0107] decrease the gas flow of the combustion equipment, the decrease amount of the gas flow being positively correlated with the deposition fluctuation characteristic value;

[0108] In this embodiment, optionally,

[0109] comparing the deposition fluctuation characteristic value with preset first and second deposition fluctuation comparison thresholds,

[0110] when the deposition fluctuation characteristic value is greater than the second deposition fluctuation comparison threshold, determining the decrease amount of the gas flow as a first decrease amount, and setting the first decrease amount as 0.5 times the current gas flow;

[0111] when the deposition fluctuation characteristic value is greater than or equal to the first deposition fluctuation comparison threshold and less than or equal to the second deposition fluctuation comparison threshold, determining the decrease amount of the gas flow as a second decrease amount, and setting the second decrease amount as 0.35 times the current gas flow;

[0112] when the deposition fluctuation characteristic value is less than the first deposition fluctuation comparison threshold, determining the decrease amount of the gas flow as a third decrease amount, and setting the third decrease amount as 0.2 times the current gas flow;

[0113] The first deposition fluctuation representation is characterized by a contrast threshold of 1.1 times the deposition fluctuation representation value threshold, and the second deposition fluctuation representation is characterized by a contrast threshold of 1.3 times the deposition fluctuation representation value threshold.

[0114] Specifically, the core function of the batching equipment in the quartz glass production process is horizontal swing to ensure uniform and stable deposition, so as to ensure the quality stability of the final batch material. A forming control module is arranged to quantify the batching effect of the mechanical action of the batching equipment on the final batch material quality. The batching coverage area directly reflects the uniformity of the horizontal swing of the batching equipment. If the swing range is insufficient or the local deposition is not covered, it may cause the local thickness of the batch material to be too thin or the density to be uneven. The thickness difference of the raw material to be processed reflects the matching degree of the descending and deposition speed of the batching equipment. If the descending speed of the batching machine and the deposition speed are not matched, that is, the deposition position is not kept constant, it may cause the batch material to have abnormalities such as "eccentricity" and "uneven thickness". Based on this, the application can identify the "local missing deposition" problem in advance by quantifying the above two characteristic parameters, and timely screen out batch materials that do not meet the structural requirements, which can reduce the processing difficulty of subsequent cutting and forming processes. For example, the batch material with uniform thickness is heated more evenly during subsequent melting and forming, and is not easy to deform due to local thickness difference. The batch material with qualified coverage area can improve the utilization rate of raw materials. The application effectively improves the stability and production efficiency of the quartz glass product.

[0115] Specifically, it also includes a correction warning module connected with the reaction evaluation module, which sends a correction warning signal in response to the need to correct the deposition process.

[0116] The technical solutions of the application have been described in combination with the preferred embodiments shown in the drawings, but those skilled in the art can easily understand that the protection scope of the application is obviously not limited to these specific embodiments. Those skilled in the art can make equivalent changes or replacements to the related technical features without departing from the principles of the application, and the technical solutions after the changes or replacements will fall within the protection scope of the application.

Claims

1. An automated quartz glass production system, characterized by, The method comprises the following steps: a conversion collecting module is used to collect conversion production data of raw materials to be processed to extract conversion characteristics of the raw materials to be processed within a predetermined time, the conversion characteristics including flame deviation of a combustion device and light-dark difference amount of a flame; a conversion analysis module connected with the conversion collecting module is used to evaluate conversion quality characterization parameters of the raw materials to be processed in combination with the conversion characteristics and gas discharge flow of a waste gas outlet to mark the raw materials to be processed; a reaction evaluation module connected with the conversion analysis module is used to evaluate and analyze the raw materials to be processed in response to marking results of the conversion analysis module, including, obtaining a flow path of gas in a deposition device, determining gas flow symmetry deviation of a deposition area and temperature difference of the deposition area, judging whether a deposition process of the raw materials to be processed enters a deposition instability stage, identifying bubble characteristics of a deposition surface in the deposition instability stage, evaluating deposition fluctuation characterization values of the raw materials to be processed to determine whether the deposition process needs to be corrected; a forming control module connected with the reaction evaluation module is used to call forming and weighing characteristics of the corrected raw materials to be processed to determine whether the raw materials to be processed are qualified materials; wherein the bubble characteristics include bubble generation rate and bubble density, the forming and weighing characteristics include weighing coverage area ratio and thickness difference of the raw materials to be processed, the weighing coverage area ratio being a ratio of an area of the raw materials to be processed covered by reciprocating swing of a grinding tool to a total area of the raw materials to be processed on a platform of a weighing device, and the thickness difference of the raw materials to be processed being a difference between a thickest point and a thinnest point of the raw materials to be processed in the same plane.

2. The automated quartz glass production system according to claim 1, characterized in that The conversion analysis module is used to evaluate the conversion quality characterization parameters of the raw materials to be processed, including: a first conversion quality characteristic being a sum of a ratio of flame deviation of the combustion device to a flame deviation threshold value and a ratio of the light-dark difference amount of the flame to a light-dark difference threshold value; a second conversion quality characteristic being a ratio of the gas discharge flow of the waste gas outlet to a gas discharge flow threshold value; the conversion quality characterization parameters being determined by weighted summation of the first conversion quality characteristic and the second conversion quality characteristic.

3. The automated quartz glass production system of claim 2, wherein The conversion analysis module is used to mark the raw materials to be processed, including: if the conversion quality characterization parameters of the raw materials to be processed are greater than or equal to a preset conversion quality characterization parameter threshold value, the conversion analysis module marks the raw materials to be processed.

4. The automated quartz glass production system of claim 1, wherein The reaction evaluation module is used to evaluate and analyze the raw materials to be processed in response to marking results of the conversion analysis module, including: if any batch of the raw materials to be processed is marked, the raw materials to be processed are evaluated and analyzed.

5. The automated quartz glass production system of claim 1, wherein The reaction evaluation module is used to judge whether the deposition process of the raw materials to be processed enters the deposition instability stage, including: if the gas flow symmetry deviation of the deposition area is greater than a gas flow symmetry deviation threshold value or / and the temperature difference of the deposition area is greater than a temperature difference threshold value, it is judged that the deposition process of the raw materials to be processed enters the deposition instability stage.

6. The automated quartz glass production system of claim 1, wherein The reaction evaluation module is used to evaluate the deposition fluctuation characterization values of the raw materials to be processed, including: a ratio of a bubble generation rate to a bubble generation rate threshold value as a first deposition fluctuation feature; a ratio of a bubble density to a bubble density threshold value as a second deposition fluctuation feature; a sum of the first deposition fluctuation feature and the second deposition fluctuation feature as the deposition fluctuation representation value.

7. The automated quartz glass production system of claim 6, wherein The reaction evaluation module is configured to determine whether the deposition process needs to be corrected, including: if the deposition fluctuation representation value of the raw material to be processed is greater than or equal to a preset deposition fluctuation representation threshold value, it is determined that the deposition process needs to be corrected.

8. The automated quartz glass production system of claim 1, wherein The molding control module is configured to determine whether the raw material to be processed is qualified briquetting material, including: if the raw material to be processed of any batch meets the briquetting material molding criterion, it is determined that the raw material to be processed is qualified briquetting material; wherein the briquetting material molding criterion includes that a ratio of a briquetting coverage area is greater than or equal to a ratio of a briquetting coverage area threshold value and a thickness difference of the raw material to be processed is less than a thickness difference threshold value of the raw material to be processed.

9. The automated quartz glass production system of claim 1, wherein The reaction evaluation module corrects the deposition process, including: adjusting a supply rate of the raw material to be processed and a gas flow of the combustion equipment.

10. The automated quartz glass production system of claim 1, wherein Further comprising a correction warning module connected with the reaction evaluation module, in response to the deposition process needing to be corrected, a correction warning signal is sent out.

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