Multifunctional coating mechanism

Abstract

The invention belongs to the field of vacuum coating, and particularly relates to a multifunctional coating mechanism which comprises a fixing body, a coating target frame, a coating target assembly, a displacement driving assembly used for driving the coating target frame to move, a rotation driving assembly used for driving coating targets to rotate and a cooling assembly used for inputting and outputting cooling liquid. In the application, the coating target is driven to rotate in real time while the coating target is driven to move, so that the coating uniformity, efficiency, quality and process flexibility can be effectively improved; and the stability of coating process parameters can be kept while the coating duration of the coating mechanism is prolonged.

Description

Technical Field

[0001] This application belongs to the field of vacuum coating, and particularly relates to a multifunctional coating mechanism. Background Art

[0002] Vacuum coating technology, as an important surface treatment process, is widely used in many fields such as electronics, optics, decoration, machinery, etc. During the vacuum coating process, the coating target, as a key component, has a crucial impact on the quality and efficiency of the coating; the traditional coating target structure is relatively simple and has a single function. With the continuous development of technology and the increasing requirements for the surface quality of products in various industries, the existing coating target structure has been difficult to meet the market's demand for high-quality and high-efficiency coating processes. Summary of the Invention

[0003] To solve the above problems, the purpose of the present invention is to provide a multifunctional coating mechanism that can effectively improve the coating uniformity, efficiency, quality, and process flexibility while driving the movement of the coating target and rotating it in real time.

[0004] Another purpose of the present invention is to provide a multifunctional coating mechanism that can maintain the stability of the coating process parameters while increasing the coating duration of the coating mechanism.

[0005] To achieve the above purpose, the technical solution of this application is as follows.

[0006] A multifunctional coating mechanism, which includes:

[0007] A fixed main body;

[0008] A coating target holder, which is movably arranged on one side of the fixed main body. First disassembly and assembly parts and second disassembly and assembly parts are respectively vertically arranged at both ends of the coating target holder, and a disassembly and assembly position is formed between the first disassembly and assembly parts and the second disassembly and assembly parts;

[0009] A coating target assembly, which includes a coating target, a first target head, and a second target head. Both ends of the coating target are rotatably connected to the first target head and the second target head respectively, and the first target head and the second target head are respectively detachably arranged on the first disassembly and assembly part and the second disassembly and assembly part, so that the coating target is detachably installed in the disassembly and assembly position;

[0010] A displacement driving component for driving the movement of the coating target holder, which is fixedly arranged on the other side of the fixed main body, and the displacement driving component passes through the fixed main body to be drivingly connected to the coating target holder;

[0011] A rotation drive assembly for driving the rotation of a coating target. The rotation drive assembly is movably disposed on the other side of the fixed main body. The rotation drive assembly movably passes through the fixed main body to be connected to the coating target rack and is drivingly connected to the coating target at the disassembly and assembly position.

[0012] A cooling assembly for inputting and outputting coolant. The cooling assembly is provided with a liquid inlet channel and a liquid outlet channel. The cooling assembly is movably disposed on the other side of the fixed main body. The cooling assembly passes through the fixed main body to be connected to the coating target rack, and the liquid outlet channel and the liquid inlet channel are connected to the coating target at the disassembly and assembly position.

[0013] In the present application, based on the setting of the displacement drive assembly, the coating target rack can be controlled to drive the coating target to move. While in this movement, the rotation drive assembly can continuously drive the coating target to rotate. This structural design has the following advantages:

[0014] 1. In terms of coating uniformity: It expands the coating range, enables the coating material to cover a larger area, avoids local uncoated or overly thin coating, and improves the overall uniformity; for complex workpieces, it can ensure that coating materials are deposited on all parts including protrusions and depressions, guaranteeing the integrity and uniformity of the overall coating of complex workpieces; the movement can also break the simple radial distribution pattern of the coating material, avoid atomic agglomeration, and enhance the uniformity of the micro-structure.

[0015] 2. In terms of coating efficiency: More coating tasks can be completed per unit time, greatly improving production efficiency; it can quickly move the coating target to the key coating area, ensuring the coating quality of the key parts while reducing unnecessary long-time coating operations, and improving the coating pertinence and efficiency.

[0016] 3. In terms of coating quality: It can compensate for the problem of uneven coating thickness caused by differences in linear velocity, make each area in a suitable position, and form a more uniform coating layer; avoid local over-deposition, reduce the probability of defect formation, and improve the overall quality of the coating layer.

[0017] And based on the integration of the cooling assembly, the effect of this coating mechanism is further improved on the above basis:

[0018] 1. In terms of temperature control: It can more precisely control the temperature of the coating target; during the coating process, the coating target may have a decrease in coating quality due to uneven heating; the cooling assembly can perform targeted cooling according to the temperature changes at different positions of the coating target; for example, when the temperature at the edge of the coating target rises relatively fast, increase the cooling intensity at this part to keep the temperature of the entire coating target uniform, reduce problems such as uneven coating thickness and uneven stress caused by temperature differences, and ensure the stability of the coating quality.

[0019] 2. In terms of improving coating efficiency: It helps to shorten the coating cycle; when the cooling component works effectively, the coating target can reach the appropriate temperature for coating more quickly and remain stable; for example, in magnetron sputtering coating, rapid heat dissipation allows the coating target to continue working at a higher power, reducing the situation of power reduction or coating suspension due to overheating, thereby increasing the coating amount per unit time and improving the overall coating efficiency;

[0020] 3. In terms of optimizing the performance of coating materials: It improves the microstructure of coating materials; appropriate temperature conditions have an important impact on the microstructure such as crystallization and orientation of coating materials; by precisely controlling the temperature through the cooling component, a more ideal microstructure can be formed for the coating materials; for example, after high-temperature coating, by controlling the cooling rate through the cooling component, a dense and uniform crystal structure can be formed for the coating materials, improving the hardness, wear resistance and other properties of the coating layer;

[0021] 4. In terms of enhancing the stability of the mechanism: It avoids damage to the mechanism due to overheating; some key components in the coating mechanism, such as power supplies and control systems, may malfunction in a high-temperature environment; the cooling component effectively dissipates heat from the coating target and the surrounding environment, which can reduce the overall temperature of the mechanism, reduce the risk of mechanism damage caused by overheating, extend the service life of the mechanism, reduce the maintenance cost and downtime of the mechanism, and improve the stability and reliability of the mechanism. Description of the Drawings

[0022] Figure 1 is a schematic structural diagram of an embodiment of the present application.

[0023] Figure 2 is a cross-sectional view of an embodiment of the present application.

[0024] Figure 3 is a cross-sectional view of the cooling component, coating target holder and coating target assembly.

[0025] Figure 4 is a cross-sectional view of the displacement driving component.

[0026] Figure 5 is a cross-sectional view of the rotation driving component.

[0027] Reference Numerals in the Drawings:

[0028] 1. Fixed main body;

[0029] 2. Coating target holder; 21. First disassembly and assembly part; 211. Insertion hole; 212. Insertion port; 22. Second disassembly and assembly part; 221. First connection channel; 222. Second connection channel; 223. Positioning groove; 224. Disassembly and assembly part; 225. Limiting plate; 226. Limiting groove; 23. Disassembly and assembly position; 24. Limiting part;

[0030] 3. Coating target assembly; 31. Coating target; 311. Upper end cap; 312. Lower end cap; 313. Water guide rod; 314. Yoke iron; 315. Target body; 316. Magnet; 317. Inner water channel; 318. Outer water channel; 319. Second gear; 32. First target head; 321. Insertion part; 322. Fixing part; 33. Second target head; 331. Inlet; 332. Outlet; 333. Positioning convex ring;

[0031] 4. Displacement drive assembly; 41. Displacement drive member; 42. Displacement mounting seat; 43. Push-pull rod; 44. First insulating sleeve; 45. First guide sleeve; 46. First oil seal;

[0032] 5. Rotation drive assembly; 51. Rotation drive member; 511. Motor; 512. Fourth gear; 52. Rotation mounting seat; 53. First gear; 54. Rotation telescopic rod group; 541. Rotation rod; 542. Telescopic rod; 543. Telescopic cavity; 544. Third gear; 55. Second insulating sleeve; 56. Second guide sleeve; 57. Second oil seal; 58. Guide post; 581. Bearing; 582. Third oil seal;

[0033] 6. Cooling assembly; 61. Liquid inlet channel; 62. Liquid outlet channel;

[0034] 7. Baffle assembly; 71. Movable baffle; 72. Rotating retaining ring; 73. Limit block; 74. Fixed baffle;

[0035] 8. Vacuum chamber. Detailed implementation manners

[0036] In order to make the objectives, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0037] See Figures 1-5 , in this embodiment, a multifunctional coating mechanism is provided, and the coating mechanism includes:

[0038] Fixed main body 1, which is specifically a part of the coating equipment housing;

[0039] Coating target holder 2, the coating target holder 2 is movably arranged on one side of the fixed main body 1, that is, on the side of the fixed main body 1 corresponding to the vacuum chamber 8 for coating. Relatively, the other side is the side facing the outside; first disassembly and assembly parts 21 and second disassembly and assembly parts 22 are respectively vertically arranged at both ends of the coating target holder 2, and a disassembly and assembly position 23 is formed between the first disassembly and assembly part 21 and the second disassembly and assembly part 22;

[0040] Coating target assembly 3, the coating target assembly 3 includes a coating target 31, a first target head 32, and a second target head 33. Both ends of the coating target 31 are rotatably connected to the first target head 32 and the second target head 33 respectively. The first target head 32 and the second target head 33 are detachably arranged on the first disassembly and assembly part 21 and the second disassembly and assembly part 22 respectively, so that the coating target 31 can be detachably installed in the disassembly and assembly position 23;

[0041] A displacement driving assembly 4 for driving the coating target rack 2 to move closer to or away from the fixed main body 1. The displacement driving assembly 4 is fixedly arranged on the other side of the fixed main body 1, and the displacement driving assembly 4 movably passes through the fixed main body 1 to be drivingly connected to the coating target rack 2. By driving the coating target rack 2 closer to or away from the fixed main body 1, the position of the coating target assembly 3 can be controlled;

[0042] A rotation driving assembly 5 for driving the coating target 31 to rotate. The rotation driving assembly 5 is arranged on the other side of the fixed main body 1. The rotation driving assembly 5 movably passes through the fixed main body 1 to be connected to the coating target rack 2 and is drivingly connected to the coating target 31 on the disassembly and assembly position 23. The rotation driving assembly 5 can drive the coating target 31 to rotate in real time. When the displacement driving assembly 4 drives the coating target rack 2 to move, the rotation driving assembly 5 can still continuously drive the coating target 31 to rotate while moving synchronously;

[0043] A cooling assembly 6 for inputting and outputting coolant. The cooling assembly 6 is provided with a liquid inlet channel 61 and a liquid outlet channel 62. The cooling assembly 6 is arranged on the other side of the fixed main body 1 and movably passes through the fixed main body 1 to be connected to the coating target rack 2. The liquid outlet channel 62 and the liquid inlet channel 61 are connected to the coating target 31 on the disassembly and assembly position 23, so as to discharge the coolant into the coating target 31 through the liquid inlet channel 61 and discharge the coolant in the coating target 31 through the liquid outlet channel 62 to adjust the temperature of the coating target 31 in real time;

[0044] A baffle assembly 7 that automatically opens when the coating target is being coated. Both ends of the baffle assembly 7 are movably arranged on the first target head 32 and the second target head 33 respectively.

[0045] It should be noted that when the displacement driving assembly 4 drives the coating target rack 2 to move closer to or away from the fixed main body 1, the rotation driving assembly 5 and the cooling assembly 6 move correspondingly at the fixed main body 1 following the coating target rack 2, so as to ensure that the cooling function, rotation function, and displacement function of the coating target 31 can be realized simultaneously.

[0046] In this embodiment, a circulating cooling channel is arranged in the coating target 31, and a liquid inlet 331 and a liquid outlet 332 that are connected to the circulating cooling channel are also arranged on the second target head 33. The liquid inlet channel 61 and the liquid outlet channel 62 are respectively connected to the liquid inlet 331 and the liquid outlet 332.

[0047] In this embodiment, a first connection channel 221 and a second connection channel 222 are provided inside the second disassembly and assembly part 22. The liquid inlet channel 61 is connected to the discharge inlet 331 through the first connection channel 221, and the liquid outlet channel 62 is connected to the discharge outlet 332 through the second connection channel 222. That is to say, the liquid inlet channel 61 and the liquid outlet channel 62 are indirectly connected to the circulating cooling channel through the first connection channel 221 and the second connection channel 222 of the second disassembly and assembly part 22. When the coating target assembly 3 is installed, it only needs to be installed on the coating target rack 2 to connect the liquid inlet channel 61 and the liquid outlet channel 62 to the circulating cooling channel.

[0048] In this embodiment, a plurality of positioning grooves 223 are further provided on the second disassembly and assembly part 22 to be respectively connected to the first connection channel 221 and the second connection channel 222. A plurality of positioning convex rings 333 are also fixed on the second target head 33 to be respectively arranged around the outside of the discharge outlet 332 and the outside of the discharge inlet 331. When the coating target assembly 3 is installed on the coating target rack 2, the plurality of positioning convex rings 333 are respectively inserted into the plurality of positioning grooves 223 so that the first connection channel 221 and the second connection channel 222 are respectively connected to the liquid inlet channel 61 and the liquid outlet channel 62. It can be known that when the coating target assembly 3 is installed, by aligning the plurality of positioning convex rings 333 with the positioning grooves 223 and inserting them, the alignment installation between the first connection channel 221, the second connection channel 222 and the liquid inlet channel 61, the liquid outlet channel 62 is completed, and the installation position of the coating target assembly 3 is ensured to be accurate and stable.

[0049] In this embodiment, the coating target 31 includes an upper end cover 311, a lower end cover 312, a water guide rod 313, a yoke 314, a target body 315, and a magnet 316. The upper end cover 311 is rotatably arranged on the second target head 33, the lower end cover 312 is rotatably arranged on the first target head 32, the target body 315 is sleeved outside the yoke 314, and both ends of the target body 315 are respectively fixed to the upper end cover 311 and the lower end cover 312. The magnet 316 is fixedly arranged on the yoke 314. One end of the water guide rod 313 passes through the upper end cover 311 and is connected to the yoke 314, and the other end of the water guide rod 313 extends to the second target head 33.

[0050] The circulating cooling channels include an inner water channel 317 and an outer water channel 318. The drainage inlet 331 is connected to one end of the inner water channel 317. The other end of the inner water channel 317 sequentially passes through the water guide rod 313 and the yoke 314. One end of the outer water channel 318 is connected to the drainage outlet 332. The other end of the outer water channel 318 sequentially passes through the space between the upper end cover 311 and the water guide rod 313, and the space between the yoke 314 and the target body 315. The other end of the outer water channel 318 and the other end of the inner water channel 317 are connected at or near the lower end cover 312. After the external coolant enters from the liquid inlet channel 61, it passes through the first connection channel 221 to the drainage inlet 331 to enter the inner water channel 317 of the water guide rod 313, enters the inner water channel 317 at the yoke 314 from the inner water channel 317 at the water guide rod 313, then enters the outer water channel 318 between the yoke 314 and the target body 315, and finally enters the outer water channel 318 between the yoke 314 and the target body 315, and is discharged from the liquid outlet channel 62 after sequentially passing through the drainage outlet 332 and the second connection channel 222.

[0051] In this embodiment, the first disassembly and assembly part 21 is located below the second disassembly and assembly part 22. An insertion hole 211 is provided on the first disassembly and assembly part 21. The first target head 32 includes an insertion part 321 and a fixing part 322. The insertion part 321 is fixedly arranged on the lower side of the fixing part 322. The insertion part 321 extends into the insertion hole 211, and the fixing part 322 abuts against the first disassembly and assembly part 21, so that the first disassembly and assembly part 21 first bears the weight of the coating target 31, and a first locking part for locking the two is arranged between the fixing part 322 and the first disassembly and assembly part 21. The first locking part can preferably be a screw.

[0052] In this embodiment, the side of the insertion hole 211 penetrates through one end of the first disassembly and assembly part 21 away from the coating target rack 2 to form an insertion opening 212. The insertion opening 212 is adapted to the insertion part 321. When the first target head 32 is installed on the first disassembly and assembly part 21, its insertion part 321 is pushed into the insertion hole 211 through the insertion opening 212 to reduce the installation difficulty of the coating target 31.

[0053] In this embodiment, the insertion hole 211, the insertion part 321, and the fixing part 322 are all circularly designed, and the diameter of the insertion part 321 is smaller than the diameter of the fixing part 322.

[0054] In this embodiment, the second disassembly and assembly part 22 includes a disassembly and assembly part 224 and two limiting plates 225. The two limiting plates 225 are respectively fixedly arranged on the left and right sides of the disassembly and assembly part 224. A limiting groove 226 is formed between the second disassembly and assembly part 22 and the two limiting plates 225. The second target head 33 is arranged in the limiting groove 226. The left and right sides of the second target head 33 are respectively attached to the two limiting plates 225, and the second target head 33 is detachably connected to the disassembly and assembly part 224. The detachable connection can specifically be realized by screws.

[0055] Specifically, the positioning groove 223 is provided on one side of the disassembly and assembly part 224 located within the limit groove 226.

[0056] In this embodiment, the displacement driving assembly 4 includes a displacement driving member 41, a displacement mounting seat 42, and a push-pull rod 43. The displacement driving member 41 is fixedly arranged on the displacement mounting seat 42. One end of the push-pull rod 43 movably passes through the displacement mounting seat 42 and the fixed main body 1 to be fixed to the coating target holder 2, and the other end of the push-pull rod 43 is drivingly connected to the displacement driving member 41. The displacement driving member 41 pushes and pulls the push-pull rod 43 to push and pull the coating target holder 2 through the push-pull rod 43, so that it moves away from the fixed main body 1 to approach the workpiece to be coated in the vacuum chamber 8, or moves close to the fixed main body 2 to move away from the workpiece to be coated near the vacuum chamber 8.

[0057] In this embodiment, the displacement driving member 41 includes an adjustable stroke cylinder, and its stroke can be adjusted as needed; it should be noted that the displacement driving member 41 can also be replaced with other driving structures that can drive the push-pull rod 43.

[0058] In this embodiment, one side of the displacement mounting seat 42 is embedded in the fixed main body 1, and a first insulating sleeve 44 is arranged between the displacement mounting seat 42 and the fixed main body 1.

[0059] In this embodiment, a first guide sleeve 45 is arranged between the push-pull rod 43 and the displacement mounting seat 42.

[0060] In this embodiment, a first oil seal 46 is arranged between the push-pull rod 43 and the displacement mounting seat 42.

[0061] In this embodiment, the rotation driving assembly 5 includes a rotation driving member 51, a rotation mounting seat 52, a first gear 53, and a rotation telescopic rod group 54 that can expand and contract while being driven to rotate by the rotation driving member 51. A second gear 319 is arranged on the coating target 31; the rotation mounting seat 52 is fixedly arranged on the fixed main body 1, the rotation driving member 51 is fixedly arranged on the rotation mounting seat 52, one end of the rotation telescopic rod group 54 is drivingly connected to the rotation driving member 51 to drive the telescopic rod group to rotate through the rotation driving member 51; the other end of the rotation telescopic rod group 54 passes through the rotation mounting seat 52 and the fixed main body 1 to extend into the disassembly and assembly position 23 of the coating target holder 2. The first gear 53 is sleeved on the other end of the rotation telescopic rod group 54, and the first gear 53 meshes with the second gear 319; when the coating target holder 2 moves, the rotation telescopic rod group 54 will move synchronously with it. At this time, the relative position of the first gear 53 at the disassembly and assembly position 23 remains unchanged all the time, and it can work continuously.

[0062] In this embodiment, both the first gear 53 and the second gear 319 are bevel gears.

[0063] It should be noted that when the coating target 31 is installed, the first target head 32 at its lower end is placed and installed on the first disassembly and assembly part 21, and the first disassembly and assembly part 21 bears it. At this time, the second gear 319 on the coating target 31 can be engaged with the first gear 53; while the second target head 33 at its upper end is placed in the limit groove 226 of the second disassembly and assembly part 22, and finally the first target head 32 and the second target head 33 are respectively locked to the first disassembly and assembly part 21 and the second disassembly and assembly part 22 by screws to complete the installation process.

[0064] In this embodiment, the rotating telescopic rod group 54 includes a rotating rod 541 and a telescopic rod 542. The rotation driving part 51 is drivingly connected to the rotating rod 541 to drive its rotation. A telescopic cavity 543 is provided in the rotating rod 541 to restrict the telescopic rod 542 from rotating relative to it. One end of the telescopic rod 542 is telescopically arranged in the telescopic cavity 543, and the other end of the telescopic rod 542 passes through the rotating mounting seat 52 and the fixed main body 1 to extend into the disassembly and assembly position 23 of the coating target rack 2. The first gear 53 is sleeved on the other end of the telescopic rod 542. It can be known that when the rotation driving part 51 drives the rotating rod 541 to rotate, the rotating rod 541 will synchronously drive the telescopic rod 542 to rotate, so as to drive the first gear 53 to rotate through the telescopic rod 542; at the same time, the telescopic rod 542 can also move under the drive of the coating target rack 2 to telescopically relative to the rotating rod 541. Specifically, the telescopic cavity 543 and the telescopic rod 542 can be designed with flattened positions, or be non-cylindrical columnar structures, so as to realize the function that the telescopic rod 542 can telescopically but not rotate in the telescopic cavity 543.

[0065] In this embodiment, the rotation driving part 51 includes a motor 511. The motor 511 is fixedly arranged on the rotating mounting seat 52. A third gear 544 is fixed on the outer side of the rotating rod 541, and a fourth gear 512 is fixed on the output shaft of the motor 511. The fourth gear 512 is engaged with the third gear 544.

[0066] In this embodiment, one side of the rotating mounting seat 52 is embedded in the fixed main body 1, and a second insulating sleeve 55 is arranged between the rotating mounting seat 52 and the fixed main body 1.

[0067] In this embodiment, a second guide sleeve 56 is arranged between the telescopic rod 542 and the rotating mounting seat 52.

[0068] In this embodiment, a second oil seal 57 is arranged between the telescopic rod 542 and the rotating mounting seat 52.

[0069] In this embodiment, the rotating telescopic rod group 54 further includes a guide post 58. The guide post 58 telescopically and movably passes through the rotating mounting seat 52 and the fixed main body 1, and the guide post 58 is rotatably movably sleeved on the outer side of the telescopic rod 542. Specifically, the second guide sleeve 56 and the second oil seal 57 are located between the guide post 58 and the rotating mounting seat 52.

[0070] In this embodiment, a bearing 581 is provided between the telescopic rod 542 and the guide post 58.

[0071] In this embodiment, a third oil seal 582 is provided between the telescopic rod 542 and the guide post 58.

[0072] In this embodiment, the baffle assembly 7 includes a movable baffle 71 and two rotating retaining rings 72. The two ends of the movable baffle 71 are respectively fixed to the two rotating retaining rings 72, and the rotating retaining rings 72 are respectively connected to the coating target 31 in a damped rotation manner;

[0073] The rotation process of the rotating retaining ring 72 includes a first position for shielding the coating target 31 and a second position for exposing the coating target 31; when the rotating retaining ring 72 rotates to the first position, it will synchronously drive the movable baffle 71 to rotate to shield the coating target 31; when the rotating retaining ring 72 rotates to the second position, it will synchronously drive the movable baffle 71 to rotate to expose the coating target 31;

[0074] A limiting member 24 for restricting the rotation is provided on the first disassembly and assembly member 21 or / and the second disassembly and assembly member 22 when the movable baffle 71 rotates to the first position in the first direction and to the second position in the second direction. When the coating target 31 rotates, due to a certain damping between the coating target 31 and the rotating retaining ring 72, the rotating retaining ring 72 and the movable baffle 71 are synchronously driven to rotate. When it rotates to the first position in the first direction and to the second position in the second direction, the limiting member 24 limits the baffle assembly 7 to stop its rotation; specifically, " / " means "or", and the first direction and the second direction are opposite directions.

[0075] In this embodiment, a limiting block 73 is provided on the rotating retaining ring 72, and the limiting member 24 corresponds to the limiting block 73.

[0076] In this embodiment, the number of the limiting blocks 73 is two, and the two limiting blocks 73 are respectively fixed on the two limiting plates 225 to respectively correspond to the two limiting blocks 73.

[0077] In this embodiment, a fixed baffle 74 is detachably provided on at least one side of the limiting plate 225 away from the limiting groove 226.

[0078] In this embodiment, fixed baffles 74 are detachably provided on the sides of the two limiting plates 225 away from the limiting grooves 226, and the coating target 31 is located between the two fixed baffles 74.

[0079] It should be emphasized that in this application, the displacement driving assembly 4, the rotation driving assembly 5, and the baffle assembly 7 can also cooperate with each other:

[0080] Before working, the coating target holder 2 approaches the fixed main body 1 to be away from the workpiece to be coated in the vacuum chamber 8;

[0081] During working, the displacement driving assembly 4 drives the coating target holder 2 to drive the coating target assembly 3 to approach the workpiece to be coated in the vacuum chamber 8 through the coating target holder 2; meanwhile, the rotation driving assembly 5 works to drive the coating target 31 to rotate. When the coating target 31 rotates, the rotating retaining ring 72 will be synchronously driven to rotate under the action of damping, so as to drive the movable baffle 71 to rotate towards the first direction to the first position through the rotating retaining ring 72, so that the coating target 31 is exposed. At this time, the coating target 31 can be coated; it should be noted that when the coating target 31 rotates for coating, the displacement driving assembly 4 can stop to keep a fixed position, or continue to work to make its position change in real time;

[0082] After working, the displacement driving assembly 4 drives the coating target holder 2 to drive the coating target assembly 3 to be away from the workpiece to be coated in the vacuum chamber 8 through the coating target holder 2; meanwhile, the rotation driving assembly 5 drives the coating target 31 to rotate in the reverse direction. When the coating target 31 rotates in the reverse direction, the rotating retaining ring 72 will be synchronously driven to rotate under the action of damping, so as to drive the movable baffle 71 to rotate towards the second direction to the second position to block the coating target. At this time, the coating target 31 can avoid being contaminated.

[0083] The above are only the preferred embodiments of the present application and are not intended to limit the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A multifunctional coating mechanism, comprising: Fix the subject; A coating target frame, wherein the coating target frame is movably arranged on one side of the fixed body, and a first disassembly component and a second disassembly component are respectively arranged at two ends of the coating target frame, and a disassembly position is formed between the first disassembly component and the second disassembly component; A coating target assembly, the coating target assembly comprising a coating target, a first target head, and a second target head, wherein two ends of the coating target are rotatably connected to the first target head and the second target head, respectively, and the first target head and the second target head are detachably arranged on a first disassembly member and a second disassembly member, respectively, so that the coating target can be detachably installed in the disassembly position; A displacement driving component for driving the coating target frame to move, wherein the displacement driving component is arranged on the other side of the fixed body, and the displacement driving component moves through the fixed body to be drivingly connected with the coating target frame; A rotation drive assembly for driving the coating target to rotate, the rotation drive assembly being disposed on the other side of the fixed body, the rotation drive assembly moving through the fixed body to be connected to the coating target holder, and being drivingly connected to the coating target on the disassembly position; A cooling component for inputting and outputting coolant, the cooling component is provided with a liquid inlet channel and a liquid outlet channel, the cooling component is arranged on the other side of the fixed body, the cooling component moves through the fixed body to be connected with the coating target holder, and the liquid outlet channel and the liquid inlet channel are connected with the coating target on the disassembly and assembly position.

2. A multifunctional coating mechanism according to claim 1, characterized in that: A circulating cooling channel is arranged in the coating target, and an inlet and an outlet connected to the circulating cooling channel are also arranged on the second target head, and the liquid inlet channel and the liquid outlet channel are connected to the inlet and the outlet respectively.

3. A multifunctional coating mechanism according to claim 2, characterized in that: The second disassembly member is provided with a first connection channel and a second connection channel, the liquid inlet channel is connected to the discharge port through the first connection channel, and the liquid outlet channel is connected to the discharge port through the second connection channel; The second disassembly and assembly part is also provided with a plurality of positioning grooves to be connected with the first connecting channel and the second connecting channel respectively. The second target head is also fixed with a plurality of positioning convex rings to be respectively arranged around the outside of the discharge port and the outside of the discharge port; the plurality of positioning convex rings are respectively inserted into the plurality of positioning grooves to make the first connecting channel and the second connecting channel connected with the liquid inlet channel and the liquid outlet channel respectively.

4. A multifunctional coating mechanism according to claim 3, characterized in that: The coating target comprises an upper end cover, a lower end cover, a water guide rod, a yoke, a target body, and a magnet. The upper end cover is rotatably arranged on the second target head, and the lower end cover is rotatably arranged on the first target head. The target body is sleeved outside the yoke, and the two ends of the target body are respectively fixed to the upper end cover and the lower end cover; the magnet is fixedly arranged on the yoke; one end of the water guide rod passes through the upper end cover and is connected to the yoke, and the other end of the water guide rod extends into the second target head; The circulating cooling channel includes an inner water channel and an outer water channel. The discharge inlet is connected to one end of the inner water channel, and the other end of the inner water channel passes through the water guide rod and the yoke in sequence; one end of the outer water channel is connected to the discharge outlet, and the other end of the outer water channel passes through between the upper end cover and the water guide rod, and between the yoke and the target body in sequence, and the other end of the outer water channel is connected to the other end of the inner water channel.

5. A multifunctional coating mechanism according to claim 1, characterized in that: The first disassembly component is located below the second disassembly component; an insertion hole is provided on the first disassembly component, the first target head includes an insertion portion and a fixing portion, the insertion portion is fixedly provided on the lower side of the fixing portion, the insertion portion extends into the insertion hole, and the fixing portion abuts against the first disassembly component, and a first locking component for locking the fixing portion and the first disassembly component is provided between the fixing portion and the first disassembly component; The side edge of the insertion hole penetrates through one end of the first disassembly component away from the coating target frame to form an insertion opening, and the insertion opening is adapted to the insertion portion; The second disassembly component includes a disassembly part and two limit plates, the two limit plates are respectively fixedly arranged on the left and right sides of the disassembly part, a limit groove is formed between the second disassembly component and the two limit plates, the second target head is arranged in the limit groove, the left and right sides of the second target head are respectively fitted with the two limit plates, and the second target head is detachably connected to the disassembly part.

6. A multifunctional coating mechanism according to claim 1, characterized in that: The displacement driving assembly comprises a displacement driving member, a displacement mounting seat and a push-pull rod, wherein the displacement driving member is fixedly arranged on the displacement mounting seat, one end of the push-pull rod movably passes through the displacement mounting seat and the fixed body to be fixed to the coating target frame, and the other end of the push-pull rod is drivingly connected to the displacement driving member; One side of the displacement mounting seat is embedded in the fixed body, and a first insulating sleeve is provided between the displacement mounting seat and the fixed body; A first guide sleeve is provided between the push-pull rod and the displacement mounting seat; A first oil seal is arranged between the push-pull rod and the displacement mounting seat.

7. A multifunctional coating mechanism according to claim 1, characterized in that: The rotary drive assembly includes a rotary drive member, a rotary mounting seat, a first gear, and a rotary telescopic rod group that can be extended and retracted while being driven to rotate by the rotary drive member, and a second gear is arranged on the coating target; the rotary mounting seat is fixedly arranged on the fixed body, and the rotary drive member is fixedly arranged on the rotary mounting seat, one end of the rotary telescopic rod group is drivingly connected to the rotary drive member, and the other end of the rotary telescopic rod group passes through the rotary mounting seat and the fixed body to extend into the disassembly and assembly position of the coating target frame, and the first gear is sleeved on the other end of the rotary telescopic rod group, and the first gear is meshed with the second gear.

8. A multifunctional coating mechanism according to claim 7, characterized in that: The rotating telescopic rod group includes a rotating rod and a telescopic rod. The rotating driving member is drivingly connected to the rotating rod. A telescopic cavity is arranged in the rotating rod to limit the telescopic rod from rotating relative to the rotating rod. One end of the telescopic rod is telescopically arranged in the telescopic cavity. The other end of the telescopic rod passes through the rotating mounting seat and the fixed body to extend into the disassembly and assembly position of the coating target frame. The first gear is sleeved on the other end of the telescopic rod.

9. A multifunctional coating mechanism according to claim 8, characterized in that: The rotary drive member comprises a motor, the motor is fixedly arranged on a rotary mounting seat, a third gear is fixedly arranged on the outer side of the rotary rod, a fourth gear is fixedly arranged on the output shaft of the motor, and the fourth gear is meshed with the third gear; One side of the rotating mounting seat is embedded in the fixed body, and a second insulating sleeve is provided between the rotating mounting seat and the fixed body; A second guide sleeve is provided between the telescopic rod and the rotating mounting seat; A second oil seal is provided between the telescopic rod and the rotating mounting seat; The rotating telescopic rod assembly further includes a guide column, which is telescopically movable and passes through the rotating mounting seat and the fixed body, and the guide column is rotatably and movably sleeved on the outside of the telescopic rod; A bearing is provided between the telescopic rod and the guide column; A third oil seal is arranged between the telescopic rod and the guide column.

10. The multifunctional coating mechanism according to claim 1, characterized in that: The coating mechanism also includes a baffle assembly that automatically opens when the coating target is coated, and two ends of the baffle assembly are movably arranged on the first target head and the second target head respectively; The baffle assembly includes a movable baffle and two rotating baffles, the two ends of the movable baffle are respectively fixed to the two rotating baffles, and the rotating baffles are respectively connected to the coating target for damping rotation; The rotation process of the rotating retaining ring includes a first position for shielding the coating target and a second position for revealing the coating target; The first disassembly component and / or the second disassembly component are provided with a limiter for limiting the rotation of the movable baffle when the movable baffle rotates to the first position in the first direction and rotates to the second position in the second direction; A limit block is arranged on the rotating retaining ring, and the limit member corresponds to the limit block; A fixed baffle is detachably provided on one side of the two limiting plates away from the limiting groove, and the coating target is located between the two fixed baffles.

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