Reaction furnace with gravity tensioning roller for CVD (Chemical Vapor Deposition) method

Abstract

The invention discloses a reaction furnace with a gravity tensioning roller for a CVD (chemical vapor deposition) method, which is characterized in that the horizontal reaction furnace for continuous production by using the CVD method comprises a belt type conveying device and a furnace body, the belt type conveying device mounted in the reaction furnace comprises a belt and a roller, the belt is a substrate for preparing sediments by using the CVD method, an enveloping roller is arranged outside the belt, and the furnace body is arranged in the furnace body. The rollers comprise a driving roller, a driven roller and a gravity tensioning roller; the furnace body comprises an initial section, a reaction section and a discharging section, and chemical reaction products grow on a belt of the reaction section and are discharged at the discharging section; the driving roller and the driven roller are respectively mounted on the discharging section and the initial section; and the gravity tensioning roller rides on the belt, so that the belt is tensioned. The method has the main advantages that continuous automatic production is realized, the efficiency is high, and the energy consumption is low; and the gravity tensioning roller is simple in structure, good in sealing performance and safe and reliable in operation.

Description

Technical Field

[0001] The present invention relates to the technical field of production equipment for chemical vapor deposition, and particularly to a reaction furnace with a gravity tensioning roller in the CVD method. Background Art

[0002] In the existing chemical vapor deposition method, the substrates for generating deposits in a horizontal reaction furnace are all discontinuous. For example, the carbon nanotubes generated in the horizontal reaction furnace in the CVD method are all deposited in containers made of substrate materials such as quartz boats or stainless steel material boxes. These containers are arranged one by one and are not interconnected in the horizontal furnace, and it is particularly difficult to discharge the carbon nanotubes attached to the inner wall of the container.

[0003] Currently, the addition of the catalyst and the discharge of the carbon nanotubes both need to be cooled to room temperature first and then completed through manual operations. This not only increases a large amount of energy consumption, but also makes it difficult to achieve unmanned automated continuous production under such high-temperature conditions. Therefore, the production capacity is greatly limited.

[0004] As emerging frontier materials, carbon nanotubes and carbon nanotube fibers have received extensive attention and research in the scientific and industrial communities due to their unique physical and chemical properties and broad application potential. Currently, there are three methods for preparing carbon nanotube fibers from carbon nanotubes in countries around the world: wet spinning method, carbon nanotube array spinning method, and floating catalyst spinning method. Among them, the carbon nanotube fibers produced by the carbon nanotube array spinning method have the highest cleanliness, but due to the discontinuous and small area of their substrate containers, they cannot be continuously produced, resulting in low production capacity and extremely high prices; that is, the existing technical bottleneck is that the area of the carbon nanotube growth substrate provided by the traditional structure is limited and the operation is intermittent.

[0005] The traditional tensioning device achieves tensioning by adjusting the shaft in the passive roller. However, the movement of the shaft in the passive roller will bring sealing problems inside and outside the reaction furnace, which are particularly difficult to handle. Moreover, the traditional tensioning device has a complex structure and a very high manufacturing cost.

[0006] In summary, it is urgent to seek a solution that can provide an unrestricted area for the growth substrate of carbon nanotubes and enable continuous production. Summary of the Invention

[0007] Aiming at the problems existing in the prior art, the purpose of the present invention is to provide a reaction furnace with a gravity tensioning roller in the CVD method to solve the problems mentioned in the above background art.

[0008] To achieve the above object, the present invention provides the following technical solutions: The horizontal reaction furnace 1 continuously produced by chemical vapor deposition method includes a belt conveyor 2 and a furnace body 3. The belt conveyor 2 installed in the furnace body 3 includes a belt 2A and rollers 4. The belt 2A is the substrate for preparing the deposit by CVD method. The belt 2A envelopes the rollers 4. The rollers 4 include a driving roller 41, a driven roller 42 and a gravity tensioning roller 43. The furnace body 3 includes an initial section 5, a reaction section 7 and a discharging section 8. The chemical reaction product grows on the belt 2A in the reaction section 7 and is discharged in the discharging section 8. The driving roller 41 and the driven roller 42 are respectively installed in the discharging section 8 and the initial section 5. The gravity tensioning roller 43 rides on the belt 2A to tension the belt 2A.

[0009] As a further aspect of the present invention: The reaction furnace 1 includes a reaction furnace for preparing carbon nanotubes; the belt 2A includes a stainless steel belt and is composed of an upper layer belt 2A1 and a lower layer belt 2A2.

[0010] As a further aspect of the present invention: The driving roller 41 is installed on the discharging section 8 fixed relative to the ground, and the driven roller 42 is installed on the initial section 5 that can slide relative to the ground.

[0011] As a further aspect of the present invention: The gravity tensioning roller 43 rides above the lower layer belt 2A2 in the initial section 5.

[0012] In summary, compared with the prior art, since the present invention adopts a unique structure with a belt as the substrate, a solution for continuous production is provided. The specific advantages are as follows: 1) Since the belt in the conveyor runs continuously, the substrate area in the CVD method is not limited; 2) Because the conveyor belt is flat, the discharging and cleaning of carbon nanotubes are particularly easy; 3) Low energy consumption; 4) The structure of this tensioning device is simple, with good sealing performance and safe and reliable operation. Description of the Drawings

[0013] Figure 1 It is a schematic structural diagram of the belt conveyor 2 and the furnace body 3 that make up the horizontal reaction furnace 1, and also a schematic structural diagram of the belt 2A and the rollers 4 that make up the belt conveyor 2, and also a schematic structural diagram of the driving roller 41, the driven roller 42 and the gravity tensioning roller 43 that make up the roller 4, and also a schematic structural diagram of the initial section 5, the reaction section 7 and the discharging section 8 that make up the furnace body 3, and still a schematic structural diagram of the upper layer belt 2A1 and the lower layer belt 2A2 that make up the belt 2A; Figure 2 It is Figure 1 The A-A cross-sectional view of Figure 3 It is Figure 1 The B-B cross-sectional view of Figure 4It is a schematic structural view in which the driving roller 41 is installed on the discharging section 8 fixed relative to the ground, and the driven roller 42 is installed on the initial section 5 sliding relative to the ground; it is also a schematic structural view in which the gravity tensioning roller 43 rides on the upper side of the lower belt 2A2 in the initial section 5; Figure 5 It is a schematic structural view in which the driving roller 41 is installed on the discharging section 8 sliding relative to the ground, and the driven roller 42 is installed on the initial section 5 fixed relative to the ground; Figure 6 It is a schematic structural view of the integral furnace body 3.

[0014] Reaction furnace 1, belt conveyor 2, belt 2A, upper belt 2A1, lower belt 2A2, furnace body 3, roller 4, driving roller 41, driven roller 42, gravity tensioning roller 43, initial section 5, reaction section 7, discharging section 8. Specific embodiments

[0015] Next, the technical solutions in the embodiments of the present invention will be described with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0016] Please refer to Figures 1 - 6 , in the embodiment of the present invention, the horizontal reaction furnace 1 continuously produced by chemical vapor deposition method includes a belt conveyor 2 and a furnace body 3. The belt conveyor 2 installed in the furnace body 3 includes a belt 2A and rollers 4. The belt 2A is the substrate for preparing deposits by CVD method. The belt 2A envelopes the rollers 4. The rollers 4 include a driving roller 41, a driven roller 42 and a gravity tensioning roller 43; the furnace body 3 includes an initial section 5, a reaction section 7 and a discharging section 8. Chemical reaction products grow on the belt 2A in the reaction section 7 and are discharged at the discharging section 8; the driving roller 41 and the driven roller 42 are respectively installed on the discharging section 8 and the initial section 5; the gravity tensioning roller 43 rides on the belt 2A to tension the belt 2A.

[0017] It should be noted that: the driven roller 42 and the driving roller 41 can also be respectively installed on the discharging section 8 and the initial section 5.

[0018] The reaction furnace 1 described includes a reaction furnace for preparing carbon nanotubes; the belt 2A includes a stainless steel belt and is composed of an upper belt 2A1 and a lower belt 2A2.

[0019] The driving roller 41 is installed on the discharging section 8 fixed relative to the ground, and the driven roller 42 is installed on the initial section 5 that can slide relative to the ground.

[0020] The gravity tensioning roller 43 rides on the upper side of the lower belt 2A2 in the initial section 5.

[0021] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "front", "rear", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present invention. In the present invention, it should also be noted that the terms "installation" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrally formed connection. It can also be a mechanical connection, or an indirect connection through an intermediate medium. The specific meaning of the terms in the present invention can be understood according to specific circumstances.

[0022] In addition, it should be understood that although this specification is described according to embodiments, not every embodiment only contains an independent technical solution. This narrative way of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A reactor with a gravity tension roller for use in a CVD method, characterized in that The horizontal reaction furnace (1) for continuous production using a chemical vapor deposition method comprises a belt conveyor (2) and a furnace body (3). The belt conveyor (2) installed in the furnace body (3) comprises a belt (2A) and a roller (4). The belt (2A) is a substrate for preparing a deposit using a CVD method. The belt (2A) surrounds a roller (4). The roller (4) comprises an active roller (41), a passive roller (42) and a gravity tensioning roller (43). The furnace body (3) comprises an initial section (5), a reaction section (7) and a discharge section (8). Chemical reaction products grow on the belt (2A) in the reaction section (7) and are discharged in the discharge section (8). The active roller (41) and the passive roller (42) are respectively installed in the discharge section (8) and the initial section (5). The gravity tensioning roller (43) rides on the belt (2A) to tension the belt (2A).

2. A reactor with a gravity tension roller for use in a CVD method according to claim 2, characterized in that The reaction furnace (1) comprises a reaction furnace for preparing carbon nanotubes; the belt (2A) comprises a stainless steel belt, which is composed of an upper belt (2A1) and a lower belt (2A2).

3. A reaction furnace with a gravity tension roller for use in a CVD method according to claim 2, characterized in that The active roller (41) is mounted on a discharge section (8) that is fixed relative to the ground, and the passive roller (42) is mounted on an initial section (5) that is slidable relative to the ground.

4. A reaction furnace with a gravity tension roller for use in a CVD method according to claim 3, characterized in that The gravity tensioning roller (43) rides above the lower belt (2A2) in the initial section (5).

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