Compact type coiled material plasma coating equipment

Abstract

The invention relates to compact coiled material plasma coating equipment which comprises a bottom frame, a vacuum box, a vacuum generating mechanism, a winding and unwinding mechanism, an electrode mechanism and a plurality of chemical monomer vaporization units, an air exhaust assembly in the vacuum generating mechanism is arranged at the upper end of the interior of the vacuum box, and a plurality of first through holes are formed in the bottom of the vacuum box; each first through hole is connected with a chemical monomer vaporization unit, the electrode mechanism comprises an electrode plate and a power source, the electrode plate is arranged in the vacuum box and located above the first through holes, the coiled material is located between the electrode plate and the air exhaust assembly, and a plurality of second through holes are formed in the electrode plate; the projection of each first through hole on the electrode plate in the vertical direction does not coincide with or intersect with any second through hole. The first through hole for introducing the chemical monomer steam, the electrode plate, the coiled material and the air exhaust assembly are sequentially arranged from bottom to top, and the relative positions of the first through hole and the second through hole are arranged, so that the distribution uniformity of plasmas is improved, and the coating uniformity is improved.

Description

Technical Field

[0001] The present invention relates to the field of plasma coating equipment, and particularly to a compact roll-type plasma coating equipment. Background Art

[0002] The plasma coating method ionizes a gas containing atoms of the film components by means of microwaves or radio frequencies, etc., to form a plasma locally. Since the plasma has strong chemical activity and is prone to reaction, a desired film can be deposited on a substrate; the plasma coating method has the advantages of low reaction temperature, fast deposition rate, good film-forming quality, fewer pinholes, and not being prone to cracking, etc., and is widely used in industries such as automobiles, electronics, and new energy.

[0003] Most traditional plasma coating equipment is suitable for coating sheet-shaped substrates. In order to facilitate coating of rolled flexible materials, roll-type plasma coating equipment has emerged on the market in recent years. For example, Chinese Utility Model Patent CN217628609U discloses an enhanced graphene film coating equipment based on PECVD, which includes a coating upper frame box. A sealing embedded plate is installed below the coating upper frame box, and an installation mechanism is installed below the sealing embedded plate. A control button is installed on one side of the coating upper frame box, and a winding box is installed on the outer wall of the coating upper frame box and adjacent to the control button, so that starting the control button can control the operation of the equipment. At the same time, the winding box can wind the film that has completed coating. Two limiting plates are arranged inside the coating upper frame box, and a discharge plate is installed between the two limiting plates. An air delivery pipe is arranged below the discharge plate, so that reaction gas can be injected below the discharge plate by using the air delivery pipe, and plasma chemical vapor deposition can be realized by discharging the discharge plate.

[0004] However, in the above coating equipment, the air delivery pipe is located below the discharge plate, and the film is located below the air delivery pipe. The reaction gas output from the air delivery pipe needs to first rise to the discharge plate for ionization and then fall to the film for reaction deposition. With such a setting, it is difficult to ensure the upward and then downward movement direction of the reaction gas, so that the reaction gas cannot be fully ionized and cannot fully react to deposit a film on the film, and it is impossible to ensure uniform distribution of the plasma when the film is subjected to plasma treatment, resulting in poor coating uniformity.

[0005] Furthermore, the existing roll-type plasma coating equipment generally has a large volume, resulting in a long time required for the vacuum pumping process, low working efficiency, and high overall cost.

[0006] Therefore, it is necessary to provide a technical solution to solve the above problems. Summary of the Invention

[0007] The object of the present invention is to provide a compact coil plasma coating equipment, which can solve the technical problems in the existing coil plasma coating equipment, such as the large volume and poor plasma distribution uniformity, resulting in poor coating uniformity.

[0008] To solve the above technical problems, the present invention adopts the following technical solutions:

[0009] A compact coil plasma coating equipment, comprising a chassis, a vacuum chamber, a vacuum generating mechanism, a winding and unwinding mechanism, an electrode mechanism and a plurality of chemical monomer vaporization units. The vacuum chamber is arranged on the chassis; the vacuum generating mechanism includes an air extraction component, and the air extraction component is arranged at the upper end inside the vacuum chamber; the winding and unwinding mechanism includes a feeding reel and a winding reel, the feeding reel and the winding reel are respectively rotatably arranged at both ends inside the vacuum chamber, and both ends of the coil are respectively wound on the feeding reel and the winding reel; a plurality of first through holes are opened at the bottom of the vacuum chamber, and each first through hole is connected to a chemical monomer vaporization unit. The electrode mechanism includes an electrode plate and a power supply electrically connected to the electrode plate. The electrode plate is arranged inside the vacuum chamber and above the plurality of first through holes. The coil is located between the electrode plate and the air extraction component. A plurality of second through holes are opened on the electrode plate, and the projection of each first through hole on the electrode plate in the vertical direction does not coincide or intersect with any of the second through holes.

[0010] Further, a plurality of second through holes are arranged around the outer peripheral side of the projection of each first through hole on the electrode plate in the vertical direction.

[0011] Further, two partition plate assemblies are arranged inside the vacuum chamber. The two partition plate assemblies divide the interior of the vacuum chamber into a feeding chamber, a coating chamber and a winding chamber. The feeding chamber and the winding chamber are respectively located on both sides of the coating chamber.

[0012] Further, the partition plate assembly includes a partition plate fixedly arranged with the vacuum chamber. A hollow position for the coil to pass through is arranged in the middle of the partition plate. An upper baffle and a lower baffle are arranged opposite to each other up and down on one side of the partition plate. A gap for the coil to pass through is arranged between the upper baffle and the lower baffle.

[0013] Further, the feeding reel is rotatably arranged in the feeding chamber, the winding reel is rotatably arranged in the winding chamber, and one end of the winding reel extends to the outside of the vacuum chamber and is drivingly connected to a first driving motor.

[0014] Further, the rewinding and unwinding mechanism further includes a clamping and conveying mechanism and a tensioning mechanism disposed between the unwinding reel and the winding reel. The clamping and conveying mechanism is disposed in the unwinding chamber, and the tensioning mechanism is disposed in the winding chamber. Both the clamping and conveying mechanism and the tensioning mechanism include an upper roller and a lower roller. One end of the upper roller is provided with an upper gear, and one end of the lower roller is provided with a lower gear. The upper gear and the lower gear mesh with each other. One end of the upper roller or the lower roller extends to the outside of the vacuum chamber and is drivingly connected to a second driving motor.

[0015] Further, the rewinding and unwinding mechanism further includes a plurality of reversing rollers rotatably disposed in the coating chamber, and the heights of adjacent reversing rollers overlap at least partially in the vertical direction.

[0016] Further, each chemical monomer vaporization unit includes a control valve and an evaporator. The inlet of the control valve is connected to an external chemical monomer supply mechanism, the outlet of the control valve is connected to the inlet of the evaporator, and the outlet of the evaporator is connected to the first through hole.

[0017] Further, the vacuum generating mechanism further includes a vacuum pump group. The air extraction assembly includes a plurality of air extraction pipes disposed at the upper end inside the coating chamber. A plurality of air extraction holes are formed in each air extraction pipe. One end of each of the plurality of air extraction pipes is connected to the vacuum pump group through a connecting pipe, and a chemical monomer precipitation mechanism is also communicated between the connecting pipe and the vacuum pump group.

[0018] Further, an exhaust mechanism is further included. The exhaust mechanism includes an exhaust gas processor and a blower. The inlet end of the exhaust gas processor is connected to the outlet end of the vacuum pump group, and the outlet end of the exhaust gas processor is connected to the inlet end of the blower.

[0019] The beneficial effects of the present invention are as follows:

[0020] (1) By sequentially arranging the first through hole for introducing chemical monomer gas, the electrode plate, the coil material, and the air extraction assembly in the vacuum generating mechanism from bottom to top, after the chemical monomer gas enters the vacuum chamber from the first through hole at the bottom of the vacuum chamber, under the action of the air extraction assembly of the vacuum generating mechanism, it moves upward. During the upward movement of the chemical monomer gas, it first passes through the electrode plate to be ionized to form plasma, and then continues to move upward to the coil material for reaction deposition to form a film, so as to ensure that the ionization process and the deposition film-forming process are sequentially arranged in the movement path of the chemical monomer gas, thereby ensuring that the chemical monomer gas can be fully ionized and can fully undergo reaction deposition to form a film;

[0021] (2) By setting the projection of each of the first through-holes on the electrode plate in the vertical direction so that it does not coincide with or intersect any of the second through-holes, when the chemical monomer gas enters the interior of the vacuum chamber through the first through-holes, the chemical monomer gas moves upward to contact the position on the electrode plate where no second through-hole is provided, that is, the solid position on the electrode plate, thereby ensuring that the chemical monomer gas is fully ionized at the solid position on the electrode plate to facilitate the formation of plasma. The formed plasma then moves to the position of the coil through the second through-holes. Since a plurality of second through-holes are provided in the electrode plate, the plasma can move to different positions of the coil along different second through-holes, that is, the plasma can be evenly distributed, thereby ensuring the uniformity of the coating;

[0022] (3) By providing reversing rollers and at least partially overlapping the heights of adjacent reversing rollers in the vertical direction, the volume of the vacuum chamber can be effectively reduced, thereby saving the time for pumping vacuum, improving production efficiency, and saving production costs. Description of the Drawings

[0023] Figure 1 is a schematic diagram of the overall structure of the compact coil plasma coating equipment of the present invention.

[0024] Figure 2 is a schematic diagram of the overall structure of the compact coil plasma coating equipment of the present invention (after removing the cover).

[0025] Figure 3 is a schematic cross-sectional structure diagram of the compact coil plasma coating equipment of the present invention.

[0026] Figure 4 For the present invention Figure 3 is an enlarged schematic diagram of the structure at A in the present invention.

[0027] Figure 5 is a schematic cross-sectional structure diagram of the compact coil plasma coating equipment of the present invention from another angle.

[0028] Figure 6 is a schematic cross-sectional structure diagram of the compact coil plasma coating equipment of the present invention from yet another angle.

[0029] Figure 7 is a schematic diagram of the electrode plate of the present invention and the projection of the first through-hole on the electrode plate in the vertical direction.

[0030] Description of the Reference Numerals:

[0031] 10 - Coil; 1 - Chassis; 2 - Vacuum chamber; 21 - First through - hole; 22 - Partition assembly; 221 - Partition; 222 - Hollow position; 223 - Upper baffle; 224 - Lower baffle; 23 - Unwinding chamber; 24 - Coating chamber; 25 - Rewinding chamber; 26 - Main body; 27 - Chamber cover; 28 - Hinge; 29 - Snap; 31 - Vacuum pump group; 32 - Exhaust pipe; 321 - Exhaust hole; 33 - Connecting pipe; 34 - Chemical monomer precipitation mechanism; 41 - Unwinding reel; 42 - Rewinding reel; 43 - Clamping and conveying mechanism; 431 - Upper roller; 432 - Lower roller; 433 - Upper gear; 434 - Lower gear; 44 - Tensioning mechanism; 45 - First driving motor; 46 - Second driving motor; 47 - Deflection roller; 48 - Support frame; 51 - Electrode plate; 511 - Second through - hole; 52 - Power supply; 6 - Chemical monomer vaporization unit; 61 - Control valve; 62 - Evaporator; 7 - Exhaust mechanism; 71 - Exhaust gas processor; 72 - Fan. Detailed implementation mode

[0032] For the convenience of understanding by those skilled in the art, the present invention will be further described below in conjunction with embodiments and the accompanying drawings. The content mentioned in the implementation mode does not limit the present invention.

[0033] As Figures 1 to 7 shown, a compact coil plasma coating device provided by the present invention includes a chassis 1, a vacuum chamber 2, a vacuum generating mechanism, a winding and unwinding mechanism, an electrode mechanism, and a plurality of chemical monomer vaporization units 6. The vacuum chamber 2 is arranged on the chassis 1; the vacuum generating mechanism includes an air extraction assembly, and the air extraction assembly is arranged at the upper end inside the vacuum chamber 2; the winding and unwinding mechanism includes an unwinding reel 41 and a rewinding reel 42, the unwinding reel 41 and the rewinding reel 42 are respectively rotatably arranged at both ends inside the vacuum chamber 2, and both ends of the coil 10 are respectively wound around the unwinding reel 41 and the rewinding reel 42; a plurality of first through - holes 21 are opened at the bottom of the vacuum chamber 2, and each first through - hole 21 is connected to one chemical monomer vaporization unit 6. The electrode mechanism includes an electrode plate 51 and a power supply 52 electrically connected to the electrode plate 51. The electrode plate 51 is arranged inside the vacuum chamber 2 and above the plurality of first through - holes 21. The coil is located between the electrode plate 51 and the air extraction assembly. A plurality of second through - holes 511 are opened on the electrode plate 51, and the projection 21′ of each first through - hole 21 in the vertical direction on the electrode plate 51 does not coincide or intersect with any of the second through - holes 511. Specifically, the power supply 52 is a radio - frequency power supply.

[0034] In this embodiment, the first through hole 21 for introducing chemical monomer gas, the electrode plate 51, the coil 10, and the vacuum generating mechanism are sequentially arranged from bottom to top. After the chemical monomer gas enters the vacuum chamber 2 from the first through hole 21 at the bottom of the vacuum chamber 2, it moves upward under the action of the air extraction component of the vacuum generating mechanism. During the upward movement, the chemical monomer gas first passes through the electrode plate 51 for ionization to form plasma, and then continues to move upward to the coil 10 for reaction deposition to form a film. This ensures that the ionization process and the deposition film-forming process are sequentially arranged in the movement path of the chemical monomer gas, thus ensuring that the chemical monomer gas can be fully ionized and can fully undergo reaction deposition to form a film. Further, by setting the projection 21' of each of the first through holes 21 in the vertical direction on the electrode plate 51 not to coincide or intersect with any of the second through holes 511, when the chemical monomer gas enters the interior of the vacuum chamber 2 from the first through hole 21, the chemical monomer gas moves upward to the position on the electrode plate 51 where no second through hole 511 is provided, that is, to the solid position of the electrode plate 51, so as to ensure that the solid position of the electrode plate 51 fully ionizes the chemical monomer gas to facilitate the formation of plasma, and the formed plasma then moves to the position of the coil 10 through the second through hole 511. Since a plurality of second through holes 511 are provided in the electrode plate 51, the plasma can move to different positions of the coil 10 along different second through holes 511, that is, the plasma can be evenly distributed, thus ensuring the uniformity of the coating. Therefore, the electrode plate 51 in this embodiment not only functions as an ionization electrode but also as an air distribution plate, serving multiple purposes with one object, which not only simplifies the overall structure but also saves costs.

[0035] More specifically, as Figure 7As shown, several second through-holes 511 are disposed around the outer peripheral side of the projection 21' of each of the first through-holes 21 on the electrode plate 51 in the vertical direction. Specifically, several of the second through-holes 511 are evenly disposed around the outer peripheral side of the projection 21'. In this embodiment, by disposing several second through-holes 511 around the outer peripheral side of the projection 21' of each first through-hole 21 on the electrode plate 51 in the vertical direction, for example, 8 second through-holes 511 are provided. When the chemical monomer gas enters the interior of the vacuum chamber 2 from the first through-hole 21, the chemical monomer gas moves upward and contacts the position of the projection 21' of the first through-hole 21 on the electrode plate 51, that is, the physical position of the electrode plate 51, so as to be ionized to generate plasma. The generated plasma then continues to move upward through several second through-holes 511 on the outer peripheral side of this physical position. With such a setting, the chemical monomer gas flowing in from each first through-hole 21 can flow out through several second through-holes 511 on the outer peripheral side of the corresponding first through-hole 21 and continue to move upward. That is, several second through-holes 511 on the outer peripheral side play a role of evenly dispersing the chemical monomer gas flowing in from the corresponding first through-hole 21, so that the plasma can be more evenly distributed on the surface of the coil to be coated, thereby further improving the uniformity of the coating.

[0036] More specifically, as Figures 3 - 4 shown, two partition plate assemblies 22 are disposed inside the vacuum chamber 2. The two partition plate assemblies 22 divide the interior of the vacuum chamber 2 into a feeding chamber 23, a coating chamber 24, and a winding chamber 25. The feeding chamber 23 and the winding chamber 25 are respectively located on both sides of the coating chamber 24. Further, the partition plate assembly 22 includes a partition plate 221 fixedly disposed with the vacuum chamber 2. A hollow position 222 for the coil 10 to pass through is provided in the middle of the partition plate 221. An upper baffle 223 and a lower baffle 224 are disposed opposite to each other up and down on one side of the partition plate 221. A gap for the coil 10 to pass through is provided between the upper baffle 223 and the lower baffle 224. Specifically, the partition plate 221 and the vacuum chamber 2 are integrally provided. A groove is formed in the middle of the upper end of the partition plate 221 to form the hollow position 222.

[0037] In this embodiment, the interior of the vacuum chamber 2 is divided into a feeding chamber 23, a coating chamber 24, and a winding chamber 25 by the partition plate assembly 22, so that the coil coating process is separated from the unwinding process and the winding process, preventing the coil from being coated in the wound state, and further ensuring the uniformity of the coating.

[0038] More specifically, as Figures 2 - 3As shown, the feeding reel 41 is rotatably arranged in the feeding cavity 23, the winding reel 42 is rotatably arranged in the winding cavity 25, and one end of the winding reel 42 extends to the outside of the vacuum chamber 2 and is drivingly connected to the first driving motor 45. In this embodiment, the first driving motor 45 drives the winding reel 42 to rotate, so as to realize the winding of the coil material and at the same time drive the coil material to unwind.

[0039] More specifically, as Figure 3 and 5 shown, the winding and unwinding mechanism further includes a clamping and conveying mechanism 43 and a tensioning mechanism 44 arranged between the feeding reel 41 and the winding reel 42. The clamping and conveying mechanism 43 is arranged in the feeding cavity 23, the tensioning mechanism 44 is arranged in the winding cavity 25. Both the clamping and conveying mechanism 43 and the tensioning mechanism 44 include an upper roller 431 and a lower roller 432. One end of the upper roller 431 is provided with an upper gear 433, and one end of the lower roller 432 is provided with a lower gear 434. The upper gear 433 and the lower gear 434 are meshed with each other. One end of the upper roller 431 or the lower roller 432 extends to the outside of the vacuum chamber 2 and is drivingly connected to the second driving motor 46. In this embodiment, by further arranging the clamping and conveying mechanism 43 and the tensioning mechanism 44 between the feeding reel 41 and the winding reel 42, the stable conveying of the coil material is ensured and the coil material located in the coating cavity 24 is kept in a tensioned state, preventing the coil material in the coating cavity 24 from affecting the coating uniformity due to unstable conveying and / or the generation of wrinkles.

[0040] More specifically, the winding and unwinding mechanism further includes a plurality of reversing rollers 47 rotatably arranged in the coating cavity 24, and the heights of adjacent reversing rollers 47 overlap at least partially in the vertical direction. Specifically, as Figure 6 shown, there are 4 reversing rollers 47. In this embodiment, by arranging the reversing rollers, the running time of the coil material in the coating cavity 24 can be extended without increasing the length of the vacuum chamber 2, so as to extend the time for depositing the coating on the surface of the coil material. This not only effectively reduces the length of the vacuum chamber 2, but also further ensures the coating uniformity; and the heights of adjacent reversing rollers 47 overlap at least partially in the vertical direction, effectively reducing the height of the vacuum chamber 2; therefore, by arranging the reversing rollers 47, the overall volume of the vacuum chamber can be effectively reduced, thus saving the time for pumping vacuum, improving the production efficiency and saving the production cost.

[0041] More specifically, each of the chemical monomer vaporization units 6 includes a control valve 61 and an evaporator 62. The inlet of the control valve 61 is connected to an external chemical monomer supply mechanism, the outlet of the control valve 61 is connected to the inlet of the evaporator 62, and the outlet of the evaporator 62 is connected to the first through hole 21. In this embodiment, the amount of chemical monomer entering the evaporator is controlled by the control valve 61, and the chemical monomer evaporates in the evaporator 62 to form a chemical monomer gas, so as to facilitate entering the interior of the vacuum chamber 2.

[0042] More specifically, the vacuum generating mechanism further includes a vacuum pump group 31. The air extraction assembly includes a plurality of air extraction pipes 32 provided at the upper end inside the coating chamber 24. A plurality of air extraction holes 321 are formed in each of the air extraction pipes 32. One ends of the plurality of air extraction pipes 32 are all connected to the vacuum pump group 31 through a connecting pipe 33, and a chemical monomer precipitation mechanism 34 is also communicated between the connecting pipe 33 and the vacuum pump group 31. Specifically, the air extraction holes 321 are formed on the side of the air extraction pipe 32 facing the coil. In this embodiment, by communicating and arranging the chemical monomer precipitation mechanism 34 between the connecting pipe 33 and the vacuum pump group 31, the chemical monomer gas drawn away by the air extraction pipe can be precipitated and recovered in the chemical monomer precipitation mechanism 34.

[0043] More specifically, an exhaust mechanism 7 is further included. The exhaust mechanism 7 includes an exhaust gas processor 71 and a fan 72. The inlet end of the exhaust gas processor 71 is connected to the outlet end of the vacuum pump group 31, and the outlet end of the exhaust gas processor 71 is connected to the inlet end of the fan 72. Specifically, the fan 72 is a flow fan. In this embodiment, by providing the exhaust gas processor 71, the gas extracted from the vacuum chamber 2 can be discharged into the atmosphere after being processed.

[0044] The above embodiments only represent several implementation manners of the present invention. The description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the patent of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can still be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention should be subject to the appended claims.

Claims

1. A compact coil plasma coating device, comprising a base frame (1), a vacuum box (2), a vacuum generating mechanism, a winding and unwinding mechanism, an electrode mechanism and a plurality of chemical monomer vaporizing units (6), wherein the vacuum box (2) is arranged on the base frame (1); characterized in that: The vacuum generating mechanism comprises an exhaust assembly, and the exhaust assembly is arranged at the upper end of the vacuum box (2); the reeling and unwinding mechanism comprises a material unwinding reel (41) and a material rewinding reel (42), and the material unwinding reel (41) and the material rewinding reel (42) are respectively rotatably arranged at the two ends of the vacuum box (2), and the two ends of the coiled material (10) are respectively wound on the material unwinding reel (41) and the material rewinding reel (42); a plurality of first through holes (21) are opened at the bottom of the vacuum box (2), and each of the first through holes (21) is connected to a chemical monomer vaporization unit (6), the electrode mechanism comprises an electrode plate (51) and a power source (52) electrically connected to the electrode plate (51), the electrode plate (51) is arranged inside the vacuum box (2) and located above the plurality of first through holes (21), the coil (10) is located between the electrode plate (51) and the vacuum assembly, and the electrode plate (51) is provided with a plurality of second through holes (511), and a projection (21′) of each of the first through holes (21) on the electrode plate (51) along the vertical direction does not overlap or intersect with any of the second through holes (511).

2. The compact coil plasma coating equipment according to claim 1, characterized in that: A plurality of second through holes (511) are arranged around the outer peripheral side of the projection (21') of each first through hole (21) on the electrode plate (51) in the vertical direction.

3. The compact coil plasma coating equipment according to claim 1, characterized in that: Two partition plate assemblies (22) are arranged inside the vacuum box (2), and the two partition plate assemblies (22) divide the interior of the vacuum box (2) into a discharge chamber (23), a coating chamber (24) and a receiving chamber (25), and the discharge chamber (23) and the receiving chamber (25) are respectively located on both sides of the coating chamber (24).

4. The compact coil plasma coating equipment according to claim 3, characterized in that: The partition plate assembly (22) comprises a partition plate (221) fixedly mounted on the vacuum box (2); a hollow position (222) for the coil (10) to pass through is arranged in the middle of the partition plate (221); an upper baffle plate (223) and a lower baffle plate (224) are arranged on one side of the partition plate (221) in a manner opposite to each other; a gap for the coil (10) to pass through is arranged between the upper baffle plate (223) and the lower baffle plate (224).

5. The compact coil plasma coating equipment according to claim 3, characterized in that: The unwinding reel (41) is rotatably disposed in the unwinding cavity (23), and the receiving reel (42) is rotatably disposed in the receiving cavity (25), and one end of the receiving reel (42) extends to the outside of the vacuum box (2) and is drivingly connected to the first driving motor (45).

6. The compact coil plasma coating equipment according to claim 5, characterized in that: The unwinding and rewinding mechanism also includes a clamping and conveying mechanism (43) and a tensioning mechanism (44) arranged between the unwinding reel (41) and the receiving reel (42); the clamping and conveying mechanism (43) is arranged in the unwinding cavity (23); the tensioning mechanism (44) is arranged in the receiving cavity (25); the clamping and conveying mechanism (43) and the tensioning mechanism (44) both include an upper roller (431) and a lower roller (432); an upper gear (433) is arranged at one end of the upper roller (431); and a lower gear (434) is arranged at one end of the lower roller (432); the upper gear (433) and the lower gear (434) are meshed with each other; one end of the upper roller (431) or the lower roller (432) extends to the outside of the vacuum box (2) and is drivingly connected to a second driving motor (46).

7. The compact coil plasma coating equipment according to claim 5, characterized in that: The rewinding and unwinding mechanism further comprises a plurality of reversing rollers (47) rotatably arranged in the coating chamber (24), and the heights of adjacent reversing rollers (47) in the vertical direction at least partially overlap.

8. The compact coil plasma coating equipment according to claim 1, characterized in that: Each of the chemical monomer vaporization units (6) comprises a control valve (61) and an evaporator (62), wherein the inlet of the control valve (61) is connected to an external chemical monomer supply mechanism, the outlet of the control valve (61) is connected to the inlet of the evaporator (62), and the outlet of the evaporator (62) is connected to the first through hole (21).

9. The compact coil plasma coating equipment according to claim 3, characterized in that: The vacuum generating mechanism also includes a vacuum pump group (31), and the exhaust assembly includes a plurality of exhaust pipes (32) arranged at the upper end of the coating chamber (24), each of the exhaust pipes (32) is provided with a plurality of exhaust holes (321), one end of the plurality of exhaust pipes (32) is connected to the vacuum pump group (31) through a connecting pipe (33), and a chemical monomer precipitation mechanism (34) is also provided between the connecting pipe (33) and the vacuum pump group (31).

10. The compact coil plasma coating equipment according to claim 9, characterized in that: It also includes an exhaust mechanism (7), which includes an exhaust gas processor (71) and a fan (72), the inlet end of the exhaust gas processor (71) is connected to the outlet end of the vacuum pump group (31), and the outlet end of the exhaust gas processor (71) is connected to the inlet end of the fan (72).

Images