Energy dispersive X-ray fluorescence spectrometer high-efficiency double light path method and detection method

Abstract

The application discloses a high-efficiency double-light-path method of an energy dispersion X fluorescence spectrometer, which is characterized by the following steps: arranging multiple light path modules, one of which is in a fixed mode, and the others of which can adjust the displacement amount by moving the module, and optimizing the configuration of integrated light gates, collimation, filter switching components and light path accessories; and according to different specifications and sizes of samples, the test unit adjusts the displacement amount of the movable light path according to an algorithm to realize high efficiency and high performance, thereby meeting the test requirements of different products and simultaneously meeting the accuracy and efficiency requirements of the test process.

Description

Technical Field

[0001] This invention belongs to the field of energy dispersive X-ray fluorescence spectroscopy detection and relates to a dual-optical-path system for a spectrometer. Background Technology

[0002] In modern market applications, as customer demands increase, traditional optical path systems are finding it increasingly difficult to meet the market's requirements for high efficiency and high performance due to limitations in receiving angle and energy in certain situations. Furthermore, with the increasing demands for efficiency, especially for high-efficiency and high-precision detection of array samples, there is still no suitable equipment available. Therefore, it is necessary to find new high-efficiency and high-performance application solutions. Summary of the Invention

[0003] In view of this, to overcome at least one of the aforementioned defects in the prior art, the present invention provides an efficient dual-path method for energy-dispersive X-ray fluorescence spectrometry, which can effectively solve the related problems. The process includes: The sample array is positioned on the underside of the optical path base plate. A first optical path module is fixedly mounted on the optical path base plate. Second, third, and up to nth optical path modules are mounted on sliding components and matched with the first optical path module. An integrated optical shutter collimating filter switching module is mounted under the first, second, third, and up to nth optical path modules. A movement adjustment module is used to adjust the second, third, and up to nth optical path modules and the first optical path module. The first optical path module and multiple second optical path modules are pre-designed or adjusted and fixed according to the sample array. The spacing between the blocks forms the spacing S2 between the first optical path module and the second optical path module, the spacing S3 between the second optical path module and the third optical path module, and so on, up to the spacing Sn between the (n-1)th optical path module and the nth optical path module. The first optical path module corresponds to the starting sample in the sample array, the second optical path module corresponds to the mth sample determined according to the spacing S2, and so on, up to the nth optical path module corresponding to the (n-1)*(m-1) sample pairs determined according to the spacing Sn. The samples are then detected by arranging and combining them, and then the optical path base plate is driven by the driving unit to perform array synchronous scanning detection.

[0004] The method involves an apparatus comprising an optical path base plate, a first optical path module fixedly mounted on the optical path base plate, a second optical path module, a third optical path module, and up to an nth optical path module mounted on a sliding component on the optical path base plate and matched with the fixed optical path module, an integrated optical shutter collimating filter switching module mounted under the first optical path module and the second, third, and up to the nth optical path modules, and a movement adjustment module for adjusting the second, third, and up to the nth optical path modules and the first optical path module; The first optical path module includes a single-channel X-ray source assembly for providing an X-ray source to excite a sample, a dual-channel detector assembly for receiving feedback signals, and an optical path cavity for positioning and mounting the X-ray source assembly and the multiple detector assemblies. The optical path cavity has a vertical interface for mounting the X-ray source assembly and an inclined interface surrounding the vertical interface for mounting the multiple detector assemblies. The vertical interface and the inclined interface are connected to the internal optical path chamber of the optical path cavity. The sample is mounted below the vertical interface, and the inclined interface is axially pointed towards the sample. The second, third, and up to the nth optical path modules include a single-path X-ray source assembly for providing an X-ray source to excite a sample, a dual-path detector assembly for receiving feedback signals, and an optical path cavity for positioning and mounting the X-ray source assembly and multiple detector assemblies. The optical path cavity has a vertical interface for mounting the X-ray source assembly and an inclined interface surrounding the vertical interface for mounting multiple detector assemblies. The vertical interface and the inclined interface are connected to the internal optical path chamber of the optical path cavity. The sample is mounted below the vertical interface, and the inclined interface is axially pointed towards the sample. The movable adjustment module corresponds one-to-one with the second optical path module, the third optical path module, and so on up to the nth optical path module. The movable adjustment module is connected to the second optical path module, the third optical path module, and so on up to the nth optical path module through a connecting component, and drives the second optical path module, the third optical path module, and so on up to the nth optical path module to move back and forth to adjust the distance between the first optical path module or the second optical path module, the third optical path module, and so on up to the nth optical path module.

[0005] As described in the background section of this invention, the traditional optical path system receiving mode of existing products suffers from insufficient receiving angle and energy in certain situations, making it increasingly difficult to meet the market's demand for high-efficiency and high-performance applications. Furthermore, with the increasing demands for efficiency, especially under the premise of meeting efficiency requirements, there is a lack of corresponding equipment and methods for high-efficiency and high-precision detection of array samples. The energy dispersive X-ray fluorescence spectrometer high-efficiency dual-optical-path method disclosed in this invention optimizes the product's optical path system based on practical applications. It deploys multiple optical path modules, one of which is fixed, while the displacement of other paths can be adjusted via movable modules. It also optimizes the configuration of integrated optical path accessories such as shutters, collimators, and filter switching components. The testing unit effectively adjusts the displacement of the movable optical path according to different sample sizes based on algorithms, achieving a high-efficiency and high-performance optical path system. This meets the testing needs of different products, simultaneously satisfying the accuracy and efficiency requirements of the testing process. It is applied in industries related to RoHS directives, the electronics industry, integrated circuits, and other industries with higher requirements for efficiency and accuracy.

[0006] In addition, the high-efficiency dual-optical-path method for energy-dispersive X-ray fluorescence spectrometry disclosed in this invention also has the following additional technical features: Furthermore, the detector assembly and the tilting interface are symmetrically distributed around the single-channel X-ray source assembly and the vertical interface, and the uniform distribution design enables the overall detection effect to be more accurate and achieve higher efficiency.

[0007] Furthermore, the angle of the tilting interface is 20-70 degrees. The angle design not only facilitates installation and maintenance, but also improves the collection of excitation light.

[0008] Furthermore, the angle of the tilting interface is 30, 45, 50, 60, or 70 degrees.

[0009] Furthermore, the detector assembly is mounted on the inclined interface via a detector insulating block, and the X-ray source assembly is mounted on the vertical interface via a light tube fixing ring.

[0010] Furthermore, a collimator for providing collimation is provided between the sample and the X-ray source assembly. The collimator is a circular channel used to shield X-rays from unnecessary / off-center areas.

[0011] Furthermore, the first optical path module, the second optical path module, and up to the nth optical path module also include an optical shutter assembly. The optical shutter assembly includes an optical shutter plate, and the optical shutter plate is equipped with an optical shutter baffle that shields X-ray leakage when the X-ray source is working normally and is located at the X-ray exit, and a filter that provides filtering of stray light.

[0012] Furthermore, the shutter assembly also includes a motor, which drives the shutter plate via a crank plate with an elongated slot. A rotating component is mounted on the shutter plate and inserted into the elongated slot of the crank plate. A slide rail assembly for driving the shutter plate is provided below the shutter plate.

[0013] Furthermore, the light shutter baffle adopts a labyrinth structure, and the light shutter has multiple annular vertical groove structures.

[0014] Furthermore, the dual-optical-path system also includes a high-voltage unit for improving the high excitation efficiency of the X-ray source, and the high-voltage unit is connected to the first optical path module, the second optical path module, the third optical path module, and up to the nth optical path module.

[0015] Furthermore, the method can determine the number of moving optical path modules to use based on the width of the sample array. When the sample array width is small, only two sets of optical path modules can be used, such as a first optical path module and a second optical path module. To improve efficiency, the distance between the first optical path module and the second optical path module can be adjusted to half the width of the sample array (i*j). At the start of detection, the detection point of the first optical path module is at the first starting point (1,1) of the sample array, and the detection starting point of the second optical path module is at (i / 2,j) of the sample. If i is an odd number, the detection starting point of the second optical path module is at ((i+1) / 2,j). This can double the efficiency.

[0016] When the sample array width is large, n>2 moving optical path modules can be used, as in the method when n=2, and the efficiency can be improved by n times. If the sample array is even larger, the optical path modules on the optical path base plate can be made into an array optical path, which can improve the efficiency even more. At the same time, due to the use of dual-path detection components, the detection accuracy can be greatly improved.

[0017] In the detection method, the sample can be fixed and the optical path can move along the XY axis, or even the Z axis. Alternatively, the optical path can only be responsible for the Z-axis movement, while the sample moves along the XY axis, thereby forming a three-dimensional motion between the optical path and the sample, which further improves the overall efficiency.

[0018] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0019] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the following description of the embodiments taken in conjunction with the accompanying drawings, wherein: Figure 1This is a top view of the overall system of the present invention (containing only two optical path modules, but there may be multiple parallel or parallel optical path modules). Figure 2 This is a side view of the overall system of the present invention; Figure 3 This is a three-dimensional schematic diagram of the overall system of the present invention; Figure 4 This is a schematic diagram of the sample array of the present invention (the markings in the sample circle indicate that parallel detection is performed using two optical path modules); Figure 5 This is a three-dimensional schematic diagram of the optical path module of the present invention; Figure 6 This is a front view schematic diagram of the optical path module of the present invention; Figure 7 This is a side view schematic diagram of the optical path module of the present invention; Figure 8 This is a top view of the optical shutter assembly in this invention; Figure 9 This is a schematic diagram of the optical shutter assembly in this invention; Figure 10 This is a schematic diagram of the optical shutter labyrinth structure in this invention; The components include: 1. Optical path cavity, 2. Detector insulating block, 3. One set of detector assemblies, 4. X-ray source assembly, 5. Binding post, 6. Two sets of detector assemblies, 7. Optical tube fixing ring, 8. Collimator, 9. Optical shutter baffle, 10. Filter, 11. Optical shutter plate, A. Optical shutter assembly, A4. Optical shutter fixing plate, A5. Motor, A6. Slide rail, A7. Bearing, A8. Crank plate, A9. Optical shutter trigger plate, A10. Photoelectric switch, B. Optical path base plate, C. First optical path module, D. High voltage unit, E. Adjustment module, F. Connecting plate, and G. Second optical path module. Detailed Implementation

[0020] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0021] In the description of this invention, it should be understood that the terms "upper", "lower", "bottom", "top", "front", "back", "inner", "outer", "horizontal", "vertical", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0022] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "connection," "connection," "linking," "fitting," and "cooperation" should be interpreted broadly. For example, they can refer to a fixed connection, an integral connection, or a detachable connection; they can refer to the internal connection of two components; they can refer to a direct connection or an indirect connection through an intermediate medium; "fitting" can refer to the fit between surfaces, the fit between a point and a surface or a line and a surface, and also includes the fit between a hole and a shaft. For those skilled in the art, the specific meaning of the above terms in this invention can be understood according to the specific circumstances.

[0023] The efficient dual-path method for energy-dispersive X-ray fluorescence spectrometry of the present invention will now be described with reference to the accompanying drawings. Figure 1-4 These are schematic diagrams of the overall system of the present invention. Figure 5-7 This is a schematic diagram of the optical path module of the present invention; Figure 8-9 This is a schematic diagram of the optical shutter assembly in this invention.

[0024] According to embodiments of the present invention, such as Figure 1-7 The method includes: a sample array disposed on the underside of an optical path base plate; a first optical path module fixedly mounted on the optical path base plate; a second optical path module, a third optical path module, up to an nth optical path module mounted on a sliding component and matched with the first optical path module; an integrated optical shutter collimating filter switching module mounted under the first optical path module and the second, third, up to nth optical path modules; and a movement adjustment module for adjusting the second, third, up to nth optical path modules and the first optical path module; and pre-designing or adjusting and fixing the first optical path module and the plurality of the first, third, up to nth optical path modules according to the sample array. The spacing between the two optical path modules forms the spacing S2 between the first optical path module and the second optical path module, the spacing S3 between the second optical path module and the third optical path module, and so on, up to the spacing Sn between the (n-1)th optical path module and the nth optical path module. The first optical path module corresponds to the starting sample in the sample array, the second optical path module corresponds to the mth sample determined according to the spacing S2, and so on, up to the nth optical path module corresponding to the (n-1)*(m-1) sample pairs determined according to the spacing Sn. The samples are then detected by arranging and combining them, and then the optical path base plate is driven by the driving unit to perform array synchronous scanning detection.

[0025] The device involved in the method includes an optical path base plate, a first optical path module fixedly mounted on the optical path base plate, a second optical path module, a third optical path module, and up to an nth optical path module mounted on a sliding component on the optical path base plate and matched with the fixed optical path module, an integrated optical shutter collimating filter switching module mounted under the first optical path module and the second, third, and up to the nth optical path modules, and a movement adjustment module for adjusting the second, third, and up to the nth optical path modules and the first optical path module; The first optical path module includes a single-channel X-ray source assembly for providing an X-ray source to excite a sample, a dual-channel detector assembly for receiving feedback signals, and an optical path cavity for positioning and mounting the X-ray source assembly and the multiple detector assemblies. The optical path cavity has a vertical interface for mounting the X-ray source assembly and an inclined interface surrounding the vertical interface for mounting the multiple detector assemblies. The vertical interface and the inclined interface are connected to the internal optical path chamber of the optical path cavity. The sample is mounted below the vertical interface, and the inclined interface is axially pointed towards the sample. The second, third, and up to the nth optical path modules include a single-path X-ray source assembly for providing an X-ray source to excite a sample, a dual-path detector assembly for receiving feedback signals, and an optical path cavity for positioning and mounting the X-ray source assembly and multiple detector assemblies. The optical path cavity has a vertical interface for mounting the X-ray source assembly and an inclined interface surrounding the vertical interface for mounting multiple detector assemblies. The vertical interface and the inclined interface are connected to the internal optical path chamber of the optical path cavity. The sample is mounted below the vertical interface, and the inclined interface is axially pointed towards the sample. The movable adjustment module corresponds one-to-one with the second optical path module, the third optical path module, and so on up to the nth optical path module. The movable adjustment module is connected to the second optical path module, the third optical path module, and so on up to the nth optical path module through a connecting component, and drives the second optical path module, the third optical path module, and so on up to the nth optical path module to move back and forth to adjust the distance between the first optical path module or the second optical path module, the third optical path module, and so on up to the nth optical path module.

[0026] According to some embodiments of the present invention, the angle of the tilting interface is 20-70 degrees. The angle design not only facilitates installation and maintenance, but also improves the collection of excitation light.

[0027] According to some embodiments of the present invention, the angle of the tilting interface is 30, 45, 50, 60, or 70 degrees.

[0028] According to some embodiments of the present invention, the detector assembly is mounted on the inclined interface via a detector insulating block, and the X-ray source assembly is mounted on the vertical interface via a light tube fixing ring.

[0029] According to some embodiments of the present invention, a collimator for providing collimation is further provided between the sample and the X-ray source assembly. The collimator is a circular channel with a certain thickness for shielding X-rays from unnecessary / off-center areas.

[0030] According to some embodiments of the present invention, the first optical path module, the second optical path module, and up to the nth optical path module further include an optical shutter assembly. The optical shutter assembly includes an optical shutter plate, on which an optical shutter baffle is mounted to shield against X-ray leakage when the X-ray source is operating normally and located at the X-ray exit, and a filter to filter stray light. Figure 8 , 9 .

[0031] According to some embodiments of the present invention, the shutter assembly further includes a motor, which drives the shutter plate via a crank plate with an elongated slot. A rotating component is mounted on the shutter plate and inserted into the elongated slot of the crank plate. A slide rail assembly for driving the shutter plate is provided below the shutter plate. Figure 8 , 9 .

[0032] According to one embodiment of the present invention, the shutter baffle adopts a labyrinth structure, and the shutter plate has multiple annular vertical groove structures, such as... Figure 10 It is used to prevent X-ray leakage.

[0033] According to an embodiment of the present invention, the dual-optical-path system further includes a high-voltage unit for improving the high excitation efficiency of the X-ray source, the high-voltage unit being connected to the first optical path module, the second optical path module, the third optical path module, and up to the nth optical path module.

[0034] According to embodiments of the present invention, the number of moving optical path modules to be used can be determined based on the width of the sample array. When the sample array width is small, only two sets of optical path modules can be used, such as a first optical path module and a second optical path module. To improve efficiency, the distance between the first optical path module and the second optical path module can be adjusted to half the width of the sample array (i*j). At the start of detection, the detection point of the first optical path module is at the first starting point (1,1) of the sample array, and the detection starting point of the second optical path module is at (i / 2,j) of the sample. If i is an odd number, the detection starting point of the second optical path module is at ((i+1) / 2,j). This can double the efficiency. Figure 4 As shown, Figure 4The detection is performed using two optical path modules.

[0035] According to an embodiment of the present invention, when the sample array width is large, n>2 moving optical path modules can be used, such as the method when n=2, and the efficiency can be improved by n times. If the sample array is even larger, the optical path modules on the optical path base plate can be made into an array-type optical path, which can improve the efficiency even more. At the same time, due to the use of dual-path detection components, the detection accuracy can be greatly improved.

[0036] In the detection method, the sample can be fixed and the optical path can move along the XY axis, or even the Z axis. Alternatively, the optical path can only be responsible for the Z-axis movement, while the sample moves along the XY axis, thereby forming a three-dimensional motion between the optical path and the sample, which further improves the overall efficiency.

[0037] Any reference to "an embodiment," "embodiment," "illustrative embodiment," etc., means that the specific component, structure, or feature described in connection with that embodiment is included in at least one embodiment of the present invention. Such illustrative expressions throughout this specification do not necessarily refer to the same embodiment. Furthermore, when a specific component, structure, or feature is described in connection with any embodiment, it is claimed that implementing such a component, structure, or feature in connection with other embodiments falls within the scope of those skilled in the art.

[0038] Although specific embodiments of the invention have been described in detail with reference to several illustrative examples, it should be understood that those skilled in the art can devise various other modifications and embodiments that fall within the spirit and scope of the invention. Specifically, reasonable variations and modifications can be made to the arrangement of components and / or dependent combinations within the scope of the foregoing disclosure, drawings, and claims without departing from the spirit of the invention. The scope of these variations and modifications, apart from those concerning components and / or layout, is defined by the appended claims and their equivalents.

Claims

1. A highly efficient dual-optical-path method for energy-dispersive X-ray fluorescence spectrometry, characterized in that... ,include: The sample array is disposed on the lower side of the optical path base plate. A first optical path module is fixedly mounted on the optical path base plate, along with second, third, and up to nth optical path modules that are mounted on the optical path base plate via sliding components and matched with the first optical path module. An integrated optical shutter collimating filter switching module is installed under the first and second, third, and up to nth optical path modules, and a movement adjustment module is used to adjust the second, third, and up to nth optical path modules and the first optical path module. The first optical path module and the up to nth optical path modules are pre-designed or adjusted and fixed according to the sample array. The spacing between the second optical path module and the nth optical path module forms the spacing S2 between the first optical path module and the second optical path module, the spacing S3 between the second optical path module and the third optical path module, and so on, up to the spacing Sn between the (n-1)th optical path module and the nth optical path module. The first optical path module corresponds to the starting sample in the sample array, the second optical path module corresponds to the mth sample determined according to the spacing S2, and so on, up to the nth optical path module. The samples are detected by arranging and combining the (n-1)*(m-1)th sample pairs, and then the driving unit drives the optical path base plate to perform array synchronous scanning detection. The first, second, third, and up to the nth optical path module include a single-path X-ray source assembly for providing X-ray source excitation to the sample, a dual-path detector assembly for receiving feedback signals, and an optical path cavity for positioning and mounting the X-ray source assembly and the dual-path detector assembly. The optical path cavity has a vertical interface for mounting the X-ray source assembly and an inclined interface surrounding the vertical interface for mounting the dual-path detector assembly. The vertical interface and the inclined interface connect to the internal optical path chamber of the optical path cavity. The sample is mounted below the vertical interface, and the inclined interface is axially pointed towards the sample. The movable adjustment module corresponds one-to-one with the second optical path module, the third optical path module, and so on up to the nth optical path module. The movable adjustment module is connected to the second optical path module, the third optical path module, and so on up to the nth optical path module through a connecting component, and drives the second optical path module, the third optical path module, and so on up to the nth optical path module to move back and forth to adjust the distance between the first optical path module or the second optical path module, the third optical path module, and so on up to the nth optical path module. The first optical path module, the second optical path module, and up to the nth optical path module also include an optical shutter assembly. The optical shutter assembly includes an optical shutter plate, and the optical shutter plate is equipped with an optical shutter baffle that shields X-ray leakage when the X-ray source is working normally and is located at the X-ray exit, and a filter that provides filtering of stray light.

2. The efficient dual-path method for energy-dispersive X-ray fluorescence spectrometry according to claim 1, characterized in that, The angle of the tilting interface is 20-70 degrees.

3. The high-efficiency dual-optical-path method for energy-dispersive X-ray fluorescence spectrometry according to claim 2, characterized in that, The angle of the tilting interface is 30, 45, 50, 60, or 70 degrees.

4. The efficient dual-path method for energy-dispersive X-ray fluorescence spectrometry according to claim 1, characterized in that, The detector assembly is mounted on the inclined interface via a detector insulating block, and the X-ray source assembly is mounted on the vertical interface via a light tube fixing ring.

5. The efficient dual-optical-path method for energy-dispersive X-ray fluorescence spectrometer according to claim 1, characterized in that, A collimator for providing collimation is also provided between the sample and the X-ray source assembly.

6. The efficient dual-path method for energy-dispersive X-ray fluorescence spectrometry according to claim 1, characterized in that, The shutter assembly also includes a motor, which drives the shutter plate via a crank plate with an elongated slot. A rotating component is mounted on the shutter plate and inserted into the elongated slot of the crank plate. A slide rail assembly for driving the shutter plate is provided below the shutter plate.

7. The efficient dual-path method for energy-dispersive X-ray fluorescence spectrometry according to claim 1, characterized in that, The dual-optical-path method further includes a high-voltage unit for improving the high excitation efficiency of the X-ray source. The high-voltage unit is connected to the first optical path module, the second optical path module, the third optical path module, and up to the nth optical path module.

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