Multi-channel test system for gas sensor

Abstract

The invention discloses a multi-channel testing system for a gas sensor, and relates to the field of gas sensor testing. The multi-channel test system for the gas sensor comprises a dynamic gas adjusting assembly, a gas distribution chamber, a plurality of test chambers and a control box, the dynamic gas adjusting assembly is arranged to realize accurate adjustment of the ratio of each gas to be tested in different mixed gases and accurate adjustment of gas pressure in the gas distribution chamber and the test chamber, a first fan is arranged in the gas distribution chamber, and a second fan is arranged in the test chamber, so that uniform treatment of the mixed gases is realized, and the test efficiency is improved. According to the multichannel test system for the gas sensor, the gas concentration control precision is improved, a plurality of test chambers are arranged to realize multichannel test, and the multichannel test system for the gas sensor provided by the invention can meet a large number of test requirements of the high-sensitivity gas sensor.

Description

Technical Field

[0001] This application relates to the field of gas sensor testing, and particularly to a multi-channel testing system for gas sensors. Background Art

[0002] Gas sensor testing systems are core technical tools for studying the performance of gas sensors, developing new sensor materials, and optimizing device designs, and have wide applications in fields such as environmental monitoring, industrial safety, health monitoring, and smart homes. For example, the system can be used to detect volatile organic compounds (VOCs, such as toluene and formaldehyde) and small molecule toxic gases (such as CO, H 2 )), so as to realize the monitoring of air quality, industrial hazardous gas leakage, and human respiratory health status. By simulating different gas concentrations and environmental conditions, the testing system can deeply evaluate the sensitivity, selectivity, response time, and long-term stability of the sensor, providing key data support for practical applications. These systems are not only the basis for the research and development of gas sensors, but also play an important role in promoting the progress of environmental protection and public safety technologies. First, gas concentration configuration is one of its key functions. Most systems use mass flow controllers (MFCs) to adjust the ratio of target gas and carrier gas to generate test gases in the ppm level. Secondly, the environmental control function is also very perfect, including the precise adjustment of temperature, humidity, and air pressure. The system integrates heating / cooling modules and humidity generators, and can achieve temperature control in the range of room temperature to 300 °C (error ±0.1 °C) and humidity adjustment in the range of 10%-90% RH. Some advanced systems also support air pressure adjustment in the range from atmospheric pressure to low pressure (even vacuum), although the air pressure control accuracy is relatively low (error about ±10 Pa). These functions ensure that the testing process can simulate diverse environmental conditions, thus comprehensively evaluating the sensor performance. The current testing systems focus on the efficient contact between the gas and the sensor and the accuracy of signal acquisition. The gas distribution chamber is usually designed as a closed or semi-open structure, and is equipped with diffusion orifice plates or flow guiding vanes to optimize gas distribution, avoid local concentration fluctuations, and ensure the consistency of the sensor working environment. The signal acquisition part uses high-precision equipment, such as source measurement units (SMUs) or data acquisition cards, which can measure multi-channel resistance, current, and voltage signals, meeting the testing requirements of various types of sensors (such as electrochemical, semiconductor, and optical sensors).

[0003] However, there are also some technical bottlenecks and application limitations in existing gas sensor test systems. First, there may be uneven gas distribution during the test. When preparing the gas mixture, the gas is restricted by the gas diffusion rate. If the gas chamber air flow design is not perfect, the gas concentration at the first gas inlet is much higher than that at other positions. Especially when multiple sensors are tested simultaneously, different sensors may be exposed to gas environments with different concentrations, reducing the credibility of the test data. Second, the accuracy of existing gas sensor test systems is still insufficient, so they mainly focus on the detection of flammable gases. For example, the lowest explosion concentration of hydrogen is 4.0% (40,000 ppm), and that of methane is 5.0% (50,000 ppm). However, for the detection of toxic gases, lower detection limits are often required. For example, the lowest poisoning concentration of carbon monoxide is 400 ppm, and that of hydrogen sulfide is 100 ppm. Further, for the detection of breath gases (such as ammonia or ethanol), trace-level detection is usually required, and the detection limit needs to reach the ppb level to meet the needs of precise analysis and health monitoring. The dilution method may be difficult to achieve sufficient stability and accuracy, resulting in an increase in concentration configuration errors. Third, the number of channels in existing gas sensor test systems is limited, unable to meet the need for simultaneously testing a large number of gas sensors, increasing the complexity and management difficulty of the system.

[0004] It can be seen that existing gas sensor test systems have problems such as low gas concentration control accuracy, small number of test channels, and poor adaptability, and cannot meet the large number of test requirements of high-sensitivity gas sensors, especially restricting the reliability of experimental results when developing new sensors. Summary of the Invention

[0005] The purpose of this application is to provide a multi-channel test system for gas sensors, which improves the gas concentration control accuracy and the number of test channels to meet the large number of test requirements of high-sensitivity gas sensors.

[0006] To achieve the above purpose, the following solutions are provided in this application.

[0007] In a first aspect, this application provides a multi-channel test system for gas sensors, which includes: a dynamic gas regulation component, a gas distribution chamber, multiple test chambers, and a control box;

[0008] The dynamic gas regulation component is connected to the gas distribution chamber and the test chambers, and is used to input mixed gases with different ratios into the gas distribution chamber and regulate the pressure of the gases in the gas distribution chamber and the test chambers;

[0009] A plurality of first fans are arranged in the gas distribution chamber, and the first fans are used to evenly process the mixed gases in the gas distribution chamber;

[0010] A plurality of test chambers are all connected to the air distribution chamber. The test chambers are used for testing gas sensors to be measured. A second fan is arranged in each test chamber, and the second fan is used for uniformly processing the mixed gas in the test chamber.

[0011] The control box is respectively connected to the control end of the dynamic gas regulation component. The control box is used for controlling the dynamic gas regulation component. The control box is also connected to the gas sensor to be measured, and is used for acquiring the sensing signal output by the gas sensor to be measured and analyzing the sensing signal to determine the performance of the gas sensor to be measured.

[0012] According to the specific embodiments provided by the present application, the present application has the following technical effects.

[0013] The present application provides a multi-channel test system for gas sensors. The multi-channel test system for gas sensors includes: a dynamic gas regulation component, an air distribution chamber, a plurality of test chambers, and a control box. The present application sets a dynamic gas regulation component to achieve precise adjustment of the ratio of each gas to be measured in different mixed gases, and to achieve precise adjustment of the gas pressure in the air distribution chamber and the test chambers. The present application also sets a first fan in the air distribution chamber and a second fan in the test chambers to achieve uniform processing of the mixed gas, improving the gas concentration control accuracy. The present application sets a plurality of test chambers to achieve multi-channel testing. The multi-channel test system for gas sensors provided by the present application can meet the large-scale test requirements of high-sensitivity gas sensors. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0015] Figure 1 FIG. 1 is a schematic structural diagram of a multi-channel test system for gas sensors provided by an embodiment of the present application.

[0016] Figure 2 FIG. 2 is a schematic structural diagram of the air distribution chamber and the test chambers provided by an embodiment of the present application.

[0017] Figure 3 FIG. 3 is a schematic front structural diagram of a sample stage provided by an embodiment of the present application.

[0018] Figure 4 FIG. 4 is a schematic side structural diagram of a sample stage provided by an embodiment of the present application.

[0019] Figure 5Schematic diagram of the back structure of the sample stage provided by an embodiment of the present application.

[0020] Explanation of reference numerals:

[0021] Gas cylinders 1, 2, 3, 4 to be measured; vacuum pump 5; pressure reducing valves 6, 7, 8, 9; filters 11, 12, 13, 14; first two-position two-way solenoid valves 15, 16, 17, 18; second two-position two-way solenoid valves 55, 56, 57, 58; third two-position two-way solenoid valves 28, 30, 32, 34; fourth two-position two-way solenoid valves 47, 48, 49, 50; fifth two-position two-way solenoid valves 63, 64, 66, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 91, 92, 93, 94; sixth two-position two-way solenoid valve 35, seventh two-position two-way solenoid valve 45; eighth two-position two-way solenoid valves 59, 60; first three-way interfaces 19, 20, 21, 22; second three-way interfaces 36, 37, 38, 39; third three-way interfaces 51, 52, 53, 54; fourth three-way interfaces 41, 42, 43, 44, 46, 62, 65, 67, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 95, 96; four-way interface 40, 90; mass flow controllers 27, 29, 31, 33; control box 97; computer 98; gas distribution chamber 61;

[0022] The first air inlets 190, 191, 192, 193, 194, 195, 196, 197, 198, 199, 200, 201, 202, 203, 204, 205, 206, 207, 208, 209, 210; the second air inlets 10, 23, 24, 25, 26, 211; the first fans 99, 100, 101; the second fans 114, 121, 127, 134, 141, 148, 166, 162, 163, 170; the first temperature sensors 109, 116, 123-1, 129, 136, 143, 150, 157, 164, 171; the second temperature sensor 102; the first humidity sensors 110, 117, 123-1, 130, 137, 144, 151, 158, 165, 173; the second humidity sensor 103; the first pressure sensors 111, 118, 125, 132, 139, 146, 153, 160, 167, 174; the second pressure sensor 104; the butterfly valves 108, 115, 122, 128, 135, 142, 149, 156, 169, 176; the first aviation plugs 111, 118, 124, 131, 138, 145, 152, 159, 165, 172; the second aviation plug 105; the sample tables 113, 120, 126, 133, 140, 147, 154, 161, 168, 175; the heating tables 106; the injection ports 210; the tracheal plug caps 107;

[0023] The gold finger slots 177; the sensor test seats 178, 179, 180, 181, 182, 183, 184, 185, 186, 187; the gold finger plates 189;

[0024] The vibration and temperature regulation platform 188. Detailed implementation manners

[0025] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0026] To make the above objects, features, and advantages of the present application more obvious and understandable, the present application will be further described in detail below in conjunction with the accompanying drawings and specific implementation manners.

[0027] In an exemplary embodiment, a multi-channel test system for gas sensors is provided, including: a dynamic gas regulation component, a gas distribution chamber, a plurality of test chambers, and a control box; the dynamic gas regulation component is connected to the gas distribution chamber and the test chambers, and is configured to input mixed gases with different ratios into the gas distribution chamber and regulate the pressure of the gases in the gas distribution chamber and the test chambers; a plurality of first fans are arranged in the gas distribution chamber, and the first fans are configured to evenly process the mixed gases in the gas distribution chamber; the plurality of test chambers are all connected to the gas distribution chamber, and the test chambers are configured to test the gas sensors to be measured. A second fan is arranged in the test chamber, and the second fan is configured to evenly process the mixed gases in the test chamber; the control box is respectively connected to the control end of the dynamic gas regulation component, and the control box is configured to control the dynamic gas regulation component. The control box is further connected to the gas sensor to be measured, and is configured to obtain the sensing signal output by the gas sensor to be measured and analyze the sensing signal to determine the performance of the gas sensor to be measured.

[0028] In another exemplary embodiment, the above-mentioned dynamic gas regulation component includes a plurality of gas cylinders to be measured and a vacuum pump; the gas cylinders to be measured are connected to the gas distribution chamber through a pipeline for inputting the gas to be measured; the vacuum pump is connected to the gas distribution chamber and the test chambers through a vacuum pipeline; the control end of the vacuum pump is connected to the control box, and the vacuum pump is configured to regulate the pressure of the mixed gases in the gas distribution chamber and the test chambers by means of pumping air, and the vacuum pump is further configured to perform a vacuum treatment on the gas distribution chamber and the test chambers; at least a first two-way two-position solenoid valve and a mass flow controller are arranged on the pipeline for inputting the gas to be measured; the control ends of the first two-way two-position solenoid valve and the mass flow controller are both connected to the control box; the first two-way two-position solenoid valve is configured to control the conduction state of the pipeline for inputting the gas to be measured, and the mass flow controller is configured to control the flow rate of the gas to be measured input into the gas distribution chamber.

[0029] In another exemplary embodiment, the above-mentioned vacuum pump is further connected to the pipeline for inputting the gas to be measured through a vacuum pipeline; the vacuum pump is further configured to perform a vacuum treatment on the pipeline for inputting the gas to be measured.

[0030] In another exemplary embodiment, a pressure reducing valve, a filter, a first three-way interface, a second three-way interface, a third three-way interface, and a second two-way two-position solenoid valve are further provided on the pipeline for inputting the gas to be measured; the pressure reducing valve, the filter, the first two-way two-position solenoid valve, the first three-way interface, the mass flow controller, the second three-way interface, the third three-way interface, and the second two-way two-position solenoid valve are arranged in sequence along the direction of the gas to be measured input in the pipeline for inputting the gas to be measured; a third two-way two-position solenoid valve is further connected between the first three-way interface and the second three-way interface; the third three-way interface is connected to the vacuum pumping pipeline through a fourth two-way two-position solenoid valve; the control ends of the second two-way two-position solenoid valve, the third two-way two-position solenoid valve, and the fourth two-way two-position solenoid valve are all connected to the control box.

[0031] In another exemplary embodiment, a sample stage is further provided in the test chamber. A butterfly valve is provided between the sample stage and the second fan. A first air port is provided on the chamber wall of the test chamber; the first air port is connected to the vacuum pumping pipeline through a fifth two-way two-position solenoid valve; the sample stage is used for placing the gas sensor to be measured; the control end of the butterfly valve is connected to the control box. The sample stage includes: a first aviation plug, a gold finger slot, a gold finger plug board, a first temperature sensor, a first humidity sensor, and a first pressure sensor; the first temperature sensor, the first humidity sensor, the first pressure sensor, and the gold finger slot are all connected to the first aviation plug, the gold finger plug board is detachably connected to the gold finger slot, and a plurality of sensor test seats are arranged on one side of the gold finger plug board. During testing, the gas sensor to be measured is installed on the sensor test seats; the first aviation plug is connected to the control box. The sample stage further includes a vibration and temperature regulation platform, and the vibration and temperature regulation platform is arranged on the other side of the gold finger plug board, and the control end of the vibration and temperature regulation platform is connected to the first aviation plug.

[0032] In another exemplary embodiment, as Figure 1 shown, the multi-channel test system for gas sensors further includes a computer 98; the computer 98 is connected to the control box 97.

[0033] In another exemplary embodiment, Figure 1 The structural schematic diagram of the dynamic gas regulation component is given when the number of gas cylinders to be measured is 4 and the number of test chambers is 10. The 4 gas cylinders to be measured are respectively Figure 1 1, 2, 3, 4 in Figure 1 and the corresponding four pressure reducing valves are respectively Figure 1 6, 7, 8, 9 inFigure 1 Among 15, 16, 17, 18, the four second two-position two-way solenoid valves are Figure 1 Among 55, 56, 57, 58, the four third two-position two-way solenoid valves are Figure 1 Among 28, 30, 32, 34, the four fourth two-position two-way solenoid valves are Figure 1 Among 47, 48, 49, 50, the four first three-way interfaces are Figure 1 Among 19, 20, 21, 22, the four second three-way interfaces are Figure 1 Among 36, 37, 38, 39, the four third three-way interfaces are Figure 1 Among 51, 52, 53, 54.

[0034] In Figure 1 In the gas sensor multi-channel test system shown, the vacuum pump 5 is respectively connected to four gas pipelines to be measured, the gas distribution chamber 61 and 8 test chambers through the vacuum pipeline; on the vacuum pipeline, there are a seventh two-position two-way solenoid valve 45, multiple fourth three-way interfaces 41, 42, 43, 44, 46, 62, 65, 67, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 95, 96, and two four-way interfaces 40, 90. Among them, the four-way interface 40 is connected to the outside through the sixth two-position two-way solenoid valve 35, the fourth three-way interface 46 is connected to the gas distribution chamber 61 through the eighth two-position two-way solenoid valve 60, and the fourth three-way interface 44 is connected to the gas distribution chamber 61 through the eighth two-position two-way solenoid valve 59.

[0035] Figure 2 Shows the structure of the gas distribution chamber 61 and the test chambers when the number of test chambers is 10 and the number of first fans is 3. Multiple fifth two-position two-way solenoid valves 63, 64, 66, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 91, 92, 93, 94 are used to connect the vacuum pipeline with the first air ports 190, 191, 192, 193, 194, 195, 196, 197, 198, 199, 200, 201, 202, 203, 204, 205, 206, 207, 208, 209, 210 of each test chamber.

[0036] As Figure 2 Shown, the three first fans are respectively Figure 2 Among 99, 100 and 101 in Figure 2 Among 114, 121, 127, 134, 141, 148, 166, 162, 163, 170 in Figure 2109, 116, 123-1, 129, 136, 143, 150, 157, 164, 171 in [reference], the 10 first humidity sensors are respectively Figure 2 110, 117, 123-2, 130, 137, 144, 151, 158, 165, 173 in [reference], the 10 first air pressure sensors are respectively Figure 2 111, 118, 125, 132, 139, 146, 153, 160, 167, 174 in [reference], the 10 first aviation plugs are respectively Figure 2 111, 118, 124, 131, 138, 145, 152, 159, 165, 172 in [reference], the 10 sample stages are respectively Figure 2 113, 120, 126, 133, 140, 147, 154, 161, 168, 175 in [reference].

[0037] As Figure 2 shown, six second air ports 10, 23, 24, 25, 26, 211 are provided on the chamber wall of the air distribution chamber 61, four of which are used to connect the pipeline for the gas to be measured, and two of which are used to connect the vacuum pipeline.

[0038] In another exemplary embodiment, as Figure 2 shown, a second temperature sensor 102, a second humidity sensor 103 and a second pressure sensor 104 are provided inside the air distribution chamber. The second temperature sensor 102, the second humidity sensor 103 and the second pressure sensor 104 are all connected to a second aviation plug 105, and the second aviation plug 105 is connected to the control box 97.

[0039] In another exemplary embodiment, as Figure 2 shown, an injection port 210 is provided on the chamber wall of the air distribution chamber 61. A heating stage 106 is provided inside the air distribution chamber 61 opposite to the injection port 210. An injection pipeline is provided outside the air distribution chamber 61. One end of the injection pipeline is connected to the injection port 210, and a trachea plug cap 107 is provided at the other end of the injection pipeline.

[0040] As Figures 3 - 5 shows the structure of the sample stage when there are 10 sensor test seats. The 10 sensor test seats are respectively Figure 3 178, 179, 180, 181, 182, 183, 184, 185, 186, 187 in [reference]; Exemplarily, the first aviation plug 111 is connected to the gold finger plug board 189 through the gold finger slot 177. The 10 sensor test seats are arranged on the top surface of the gold finger plug board 189, and a vibration and temperature regulation platform 188 is provided on the bottom surface of the gold finger plug board 189.

[0041] In another exemplary embodiment, the working principle of the above-mentioned multi-channel gas sensor test system is provided.

[0042] Gas preparation: The preparation of the target gas and the background gas is the starting point of the entire multi-channel gas sensor test system. Its process mainly includes gas pressure regulation and purification treatment. In the system, the target gas and the background gas are respectively stored in the test gas cylinders 1, 2, 3, and 4. A corresponding pressure reducing valve 6, 7, 8, 9 is installed at the outlet of each test gas cylinder to adjust the high-pressure gas to a safe and suitable pressure range for the experiment. The test gases in the test gas cylinders 1, 2, 3, and 4 respectively enter the filters 11, 12, 13, 14 after passing through the pressure reducing valves 6, 7, 8, 9. The main function of the filter is to remove the possible tiny impurity particles in the test gas to ensure the purity of the gas in the subsequent experiment, thereby avoiding the interference of impurities on the test results. The regulated and purified gas then enters the mass flow controllers 27, 29, 31, 33. The mass flow controller is a key component with high precision in this system. It can adjust the gas flow according to preset parameters to achieve precise mixing of multiple gases. By adjusting the flow ratio of each mass flow controller, a mixed gas meeting the experimental requirements is generated and the gas is output to the gas distribution chamber 61. The mass flow controller can not only adjust the flow in real time but also achieve remote control through the computer 98, providing high flexibility for the complex gas mixing process. In the gas distribution chamber, the gas is fully mixed to provide a stable and uniform gas source for subsequent gas transmission and testing.

[0043] Dynamic gas regulation: The multi-channel gas sensor test system realizes the dynamic regulation of gas concentration and air pressure through the connection of a vacuum pump 5 to the gas distribution chamber and the test chamber 61, in combination with two-position two-way solenoid valves and three-way connectors. The role of the vacuum pump is to quickly extract the mixed gas in the gas distribution chamber 61 and the test chamber, thereby achieving gas dilution or ambient pressure regulation. For example, when it is necessary to reduce the gas concentration, part of the gas can be discharged by turning on the vacuum pump 5 and controlling the relevant two-position two-way solenoid valves, while replenishing the target gas or background gas from the gas cylinder to be tested. By precisely controlling the working duration of the vacuum pump and the switching states of the two-position two-way solenoid valves, the mixing ratio and total pressure of the gas in the test chamber can be dynamically adjusted. In addition, when it is necessary to simulate the influence of air pressure changes on the sensor to be tested, a low-pressure environment can be created using the vacuum pump, or the air pressure can be restored to the normal level by replenishing gas. All dynamic regulation processes are coordinated and completed by the control box 97 and the computer 98. The experimenter only needs to input relevant parameters on the computer, and the system can automatically complete the operations of dilution, air extraction, or gas replenishment. This flexible dynamic regulation mechanism provides more possibilities for experimental design and can more realistically simulate the actual performance of the sensor in a changing environment. In addition, the system is designed with tracheal plugs 107 and butterfly valves to isolate unused gas paths and prevent gas leakage or cross-contamination. All dynamic regulation functions can be controlled by the computer 98, and no manual intervention is required during the test process, greatly improving the convenience and safety of operation.

[0044] Environmental regulation and uniform gas distribution: In terms of environmental regulation, a first temperature sensor is set in the test chamber to monitor the temperature of the test chamber in real time, a second temperature sensor is set in the gas distribution chamber to monitor the temperature of the gas distribution chamber, a heating table 106 is set in the gas distribution chamber 61 to provide a controllable heat source, and a second fan (small fan) in the test chamber is used to ensure the uniform distribution of the temperature in the test chamber, avoiding test deviation caused by local temperature difference. In addition, a first humidity sensor is set in the test chamber, a second humidity sensor is set in the gas distribution chamber, and they cooperate with the tracheal plug 107, the injection port 210, and the heating table 106. That is, a small amount of pure water is injected from the injection port 210 and then falls onto the heating table 106 to accelerate volatilization, which can regulate the humidity of the cavity, provide reliable support for the humidity sensitivity test, and at the same time add test conditions of volatile liquid for the test sensor. A first air pressure sensor is set in the test chamber, and precise air pressure regulation is achieved by controlling the first air port and the butterfly valve to meet the requirements of sensor performance evaluation under different air pressure conditions. The vibration and temperature regulation platform 188 further expands the test scenario, and provides the possibility for the adaptability of the test sensor in a complex environment by simulating various working conditions. In terms of gas distribution, the device is designed with multiple independent second air ports, and the first fan (high-power fan) is used to mix the gas to ensure the uniform distribution and stability of the mixed gas in the gas distribution chamber and the test chamber. The multi-channel test system for gas sensors of the present application supports multi-channel parallel testing. Multiple sensor test seats are distributed inside the test seat, enabling simultaneous testing of multiple sensors, and effectively isolating the air flow of each channel through the butterfly valve to avoid cross-interference, thereby improving the accuracy of the test. At the same time, a small fan is installed inside the test chamber to optimize the gas flow in the cavity, so that the gas evenly covers the surface of the sample, eliminating test errors that may be caused by uneven static gas distribution. By controlling the small fan, the response characteristics of the sample under low-speed diffusion conditions or high-speed impact conditions can also be simulated, further improving the evaluation of the dynamic performance of the sensor.

[0045] Gas Transmission and Switching: The main method for gas to be transmitted from the gas distribution chamber 61 to the test chamber through pipelines is through the precise control of butterfly valves. Each butterfly valve is operated in linkage by a control box 97 and a computer 98, and its opening and closing states are adjusted in real time according to experimental requirements. When the corresponding butterfly valve is opened, the gas smoothly enters the test chamber and is accelerated for diffusion in the test chamber by the action of the second fan. This design ensures the uniform distribution of gas in the test chamber, avoids the problem of uneven local concentration, and at the same time maintains a stable gas environment, providing reliable conditions for the testing of samples. On this basis, the system can also use two-way two-position solenoid valves, three-way interfaces, and four-way interfaces as auxiliary gas transmission means. The combination of these two-way two-position solenoid valves, three-way interfaces, and four-way interfaces greatly enhances the flexibility of the gas flow path design. By controlling the on-off state of the two-way two-position solenoid valves, dynamic switching of various gas flow directions can be achieved. For example, the gas can change its transmission path through shunting and confluence, or switch between different test chambers to support multiple groups of experiments to be carried out simultaneously. In addition, the use of multi-way interfaces also allows for cross-transport of gas, providing a convenient solution for more complex experimental requirements. The operation of the entire system is precisely managed by the control box and the computer, and the gas switching and transmission operations are automatically completed through preset programs or real-time instructions. This dual-layer transmission design not only ensures the efficient and stable transmission of gas from the gas distribution chamber to the test chamber, but also provides higher flexibility, can quickly respond to changes in different experimental conditions, meet diverse testing needs, and at the same time improves the overall automation level and reliability of the system.

[0046] Diversified Design of the Test Chamber: The sample stage in the test chamber is designed with high flexibility, and its size and structure can be adjusted according to different experimental requirements to adapt to test samples of various shapes and sizes. Whether it is a small sensor array or a larger single sensor module, accurate performance evaluation can be carried out in the test chamber. In addition, the material of the sample stage is selected as a high thermal conductivity material to ensure uniform temperature distribution of the test samples and further improve the reliability of the test. In order to achieve a stable test environment, the test chamber is equipped with a high-precision temperature and humidity adjustment device, which can control the temperature and humidity range of the test environment in real time to meet the requirements under different experimental conditions. The environmental monitoring system in the test chamber is designed comprehensively and independently. Each test chamber is equipped with a complete set of sensor groups, including temperature sensors, humidity sensors, and air pressure sensors, etc. These sensors are connected to the external data acquisition system through aviation plugs to ensure the efficient transmission and real-time acquisition of test data. The environmental data can be directly fed back to the control system for real-time adjustment of test conditions to ensure the accuracy and stability of the experiment. In addition, in order to improve experimental efficiency, the system is designed with a multi-test chamber parallel operation function. Multiple test chambers can run different experiments simultaneously, and through independent environmental control and data acquisition, the flexibility of "one machine with multiple uses" is achieved. This design significantly improves experimental efficiency and is especially suitable for the performance screening and rapid verification of a large number of sensor samples.

[0047] Data acquisition and control: The core control of the system is completed by the control box 97. Inside the control box, there are integrated voltage stabilization circuits, voltage division circuits, matching resistance circuits, as well as key functional modules such as resistance, voltage or current acquisition modules, temperature acquisition and control modules, humidity acquisition and control modules, vacuum degree acquisition modules, mass flow acquisition and control modules, solenoid valve on / off and vacuum pump start / stop logic control units, vibration control modules, etc. Through these modules, the control box can achieve unified management of all components in the system, including the on / off control of solenoid valves, the start / stop of vacuum pumps, the adjustment of mass flow controllers, etc. During the test, sensors are installed in the test chamber to collect data on the impact of gas concentration changes on sensor performance in real time. The output signals of the sensors (such as resistance, voltage or current, etc.) are transmitted to the data acquisition module through the signal interface, and this module is connected to the computer 98. The data acquisition module can convert the analog signals of the sensors into digital signals and record the test data with high precision and high frequency. In addition, the computer uses software (labview) to display, store and analyze the data in real time, and users can clearly observe the response curves and performance indicators of the sensors. The computer collaborates with the control box to comprehensively manage the experimental process through the software platform. Experimental personnel can preset various parameters by writing control programs to make the system automatically complete complex experimental processes, thereby greatly improving the experimental efficiency. This highly integrated design not only simplifies the experimental operation process but also can provide high-quality experimental data, providing a reliable basis for sensor performance evaluation and improvement.

[0048] In view of the many deficiencies of the prior art in gas sensor testing, through innovative designs in multiple aspects, the performance and applicability of the testing system have been comprehensively improved. First, this application solves the key problem of insufficient gas concentration control accuracy in the existing system. By introducing a high-precision flow controller, a vacuum pump, a first fan, and a second fan, it can not only achieve precise proportioning of low-concentration gases (such as ppb levels), but also significantly improve the long-term stability of gas concentration, ensuring the testing accuracy of high-sensitivity gas sensors. This improvement lays a solid foundation for the research and development and verification of high-performance sensors. Second, this application significantly enhances the simulation ability of the testing system for complex environments. By integrating temperature and humidity control devices and a vibration table with adjustable frequency, the present invention can reproduce the variable temperature, humidity, and dynamic vibration conditions in real usage scenarios. This function breaks through the limitation that traditional testing systems cannot comprehensively evaluate sensor performance, and fully verifies the adaptability and stability of sensors under complex working conditions. Third, this application solves the problems of few channels and poor adaptability in traditional testing systems through modular design and multi-channel functions. The system supports multi-channel synchronous testing and is compatible with various sensor packaging forms, achieving fast disassembly and assembly and high-efficiency batch testing capabilities. This design not only reduces the experimental preparation time and cost, but also provides important support for the efficient screening and rapid verification of sensors. In addition, the present invention greatly improves the data acquisition and analysis accuracy of the testing system. Through optimized circuit designs such as using high-performance data acquisition cards, voltage stabilizing circuits, and matching resistors, the present invention effectively reduces signal distortion and errors, and significantly improves the resolution and reliability of data. This provides high-confidence data support for the accurate evaluation of sensor performance and helps to accelerate the research and development process of new sensors. Finally, the present invention integrates multiple advanced functions to construct a set of efficient, precise, and flexible gas sensor testing systems. This system not only achieves high-precision control of gas concentration and comprehensive simulation of complex environments, but also greatly improves the testing efficiency through modular design and multi-channel operation, while providing high-precision data acquisition capabilities. Its comprehensive performance significantly exceeds the prior art and can be widely applied to the research and development, performance evaluation, and quality control fields of modern sensors. In short, the present invention is a technological breakthrough for the research and development needs of modern gas sensors. Through all-round innovative designs, it significantly improves the accuracy, efficiency, and adaptability of testing, providing important support for promoting the development of gas sensor technology.

[0049] The specific technical solutions have the following advantages:

[0050] High-precision gas concentration control. By equipping with a high-precision flow controller, a mechanical pump, and an air flow turbulence device, this application can achieve precise proportioning of low-concentration (such as ppb level) gases and has excellent long-term stability, meeting the testing requirements of high-sensitivity gas sensors.

[0051] Capability of simulating complex environmental parameters. By introducing temperature and humidity control equipment and a vibration table, this application supports multi-frequency adjustment and simulation of complex environmental parameters, enabling comprehensive testing of the stability and reliability of sensors under actual working conditions.

[0052] Multi-channel modular testing. This application supports multi-channel design and modular structure. The sensor testing device is compatible with various packaging forms and enables rapid disassembly and assembly, significantly improving testing efficiency and adaptability, and reducing the time and cost of experiment preparation.

[0053] High-precision data acquisition and analysis. By adopting a high-performance data acquisition card, a voltage stabilization circuit, and a matching resistor to optimize the circuit design, this application effectively reduces signal distortion, improves the resolution and accuracy of data acquisition and analysis, and provides reliable data support for the accurate evaluation of sensor performance.

[0054] Efficient and reliable comprehensive performance. By integrating functions such as high-precision gas control, complex environment simulation, multi-sensor modular testing, and high-precision data acquisition, this application constructs a set of efficient and reliable gas sensor testing systems, comprehensively meeting the needs of modern sensor research and development and performance evaluation, and having wide applicability and high efficiency.

[0055] The technical features of the above embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope described in this specification.

[0056] Specific examples are used in this article to elaborate on the principles and implementation methods of this application. The description of the above embodiments is only used to help understand the method and its core idea of this application; at the same time, for those of ordinary skill in the art, there will be changes in the specific implementation methods and application scopes according to the idea of this application. In summary, the content of this specification should not be construed as a limitation to this application.

Claims

1. A gas sensor multi-channel testing system, characterized in that: The gas sensor multi-channel test system comprises: a dynamic gas adjustment component, a gas distribution chamber, a plurality of test chambers and a control box; The dynamic gas regulating component is connected to the gas distribution chamber and the test chamber, and the dynamic gas regulating component is used to input mixed gases of different proportions into the gas distribution chamber and adjust the pressure of the gases in the gas distribution chamber and the test chamber; A plurality of first fans are arranged in the gas distribution chamber, and the first fans are used to uniformly process the mixed gas in the gas distribution chamber; A plurality of test chambers are connected to the gas distribution chamber, the test chambers are used to test the gas sensor to be tested, a second fan is provided in the test chamber, and the second fan is used to uniformly process the mixed gas in the test chamber; The control box is respectively connected to the control end of the dynamic gas regulating component, and the control box is used to control the dynamic gas regulating component. The control box is also connected to the gas sensor to be tested, and is used to obtain the sensor signal output by the gas sensor to be tested, and analyze the sensor signal to determine the performance of the gas sensor to be tested.

2. The gas sensor multi-channel testing system according to claim 1, characterized in that: The dynamic gas regulating assembly includes a plurality of gas cylinders to be tested and a vacuum pump; The gas cylinder to be tested is connected to the gas distribution chamber via a gas input pipeline to be tested; the vacuum pump is connected to the gas distribution chamber and the test chamber via a vacuum pumping pipeline; The control end of the vacuum pump is connected to the control box, and the vacuum pump is used to adjust the pressure of the mixed gas in the gas distribution chamber and the test chamber by exhausting air. The vacuum pump is also used to perform vacuum treatment on the gas distribution chamber and the test chamber; The gas input pipeline to be tested is provided with at least a first two-position two-way solenoid valve and a mass flow controller; The control end of the first two-position two-way solenoid valve and the control end of the mass flow controller are both connected to the control box; the first two-position two-way solenoid valve is used to control the conduction state of the input pipeline of the gas to be tested, and the mass flow controller is used to control the flow of the gas to be tested input into the gas distribution chamber.

3. The gas sensor multi-channel testing system according to claim 2, characterized in that: The vacuum pump is also connected to the gas input pipeline to be tested via a vacuum pumping pipeline; the vacuum pump is also used to vacuum the gas input pipeline to be tested.

4. The gas sensor multi-channel testing system according to claim 3, characterized in that: The gas input pipeline to be tested is also provided with a pressure reducing valve, a filter, a first three-way interface, a second three-way interface, a third three-way interface and a second two-position two-way solenoid valve; The pressure reducing valve, the filter, the first two-position two-way solenoid valve, the first three-way interface, the mass flow controller, the second three-way interface, the third three-way interface and the second two-position two-way solenoid valve are arranged in sequence along the direction of the gas input to be measured in the gas input pipeline to be measured; A third two-position two-way solenoid valve is also connected between the first three-way interface and the second three-way interface; The third three-way interface is connected to the vacuum pipeline via a fourth two-position two-way solenoid valve; The control end of the second two-position two-way solenoid valve, the control end of the third two-position two-way solenoid valve and the control end of the fourth two-position two-way solenoid valve are all connected to the control box.

5. The gas sensor multi-channel testing system according to claim 1, characterized in that: The test chamber is also provided with a sample stage, a butterfly valve is provided between the sample stage and the second fan, and a first air port is provided on the wall of the test chamber; the first air port is connected to the vacuum pipe through a fifth two-position two-way solenoid valve; The sample stage is used to place the gas sensor to be tested; The control end of the butterfly valve is connected to the control box.

6. The gas sensor multi-channel testing system according to claim 5, characterized in that: The sample platform comprises: a first aviation plug, a gold finger slot, a gold finger plug board, a first temperature sensor, a first humidity sensor and a first pressure sensor; The first temperature sensor, the first humidity sensor, the first pressure sensor and the gold finger slot are all connected to the first aviation plug, the gold finger plug board is detachably connected to the gold finger slot, and one side of the gold finger plug board is provided with a plurality of sensor test sockets. During testing, the gas sensor to be tested is installed on the sensor test socket; The first aviation plug is connected to the control box.

7. The gas sensor multi-channel testing system according to claim 6, characterized in that: The sample stage also includes a vibration and temperature control platform, which is arranged on the other side of the gold finger plug board, and the control end of the vibration and temperature control platform is connected to the first aviation plug.

8. The gas sensor multi-channel testing system according to claim 1, characterized in that: A second temperature sensor, a second humidity sensor and a second pressure sensor are arranged in the air distribution chamber, the second temperature sensor, the second humidity sensor and the second pressure sensor are all connected to a second aviation plug, and the second aviation plug is connected to the control box.

9. The gas sensor multi-channel testing system according to claim 1, characterized in that: An injection port is arranged on the wall of the air distribution chamber, a heating platform is arranged inside the air distribution chamber opposite to the injection port, an injection pipe is arranged outside the air distribution chamber, one end of the injection pipe is connected to the injection port, and an air pipe plugging cap is arranged at the other end of the injection pipe.

10. The gas sensor multi-channel testing system according to claim 1, characterized in that: The gas sensor multi-channel testing system also includes a computer; The computer is connected to the control box.

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