Gas concentration detection device and detection method

Abstract

The invention discloses a gas concentration detection device and method, and the device comprises a cavity which is used for bearing a wafer, and forming a preset gas concentration required by a semiconductor technology in the cavity; the detection module is connected with the cavity and used for extracting gas from the cavity and detecting the concentration of preset gas, the detection module comprises a gas extracting pump and a vibration sensor, the gas extracting pump is used for extracting gas from the cavity, and the vibration sensor is connected with the gas extracting pump and used for sensing the vibration condition of the gas extracting pump. According to the gas concentration detection device and the detection method, the vibration sensor is arranged on the sucking pump, the vibration condition of the sucking pump is sensed, whether the sucking pump works normally or not is judged, and then whether the detection result, detected by the gas concentration detector, of the concentration of the preset gas in the cavity of the semiconductor equipment is abnormal or not is judged.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor processes, and particularly to a gas concentration detection device and a detection method for semiconductor equipment. Background Art

[0002] With the rapid development of the electronics industry, the control of various gas concentrations in semiconductor processes has become particularly important. In the semiconductor manufacturing process, from chip growth to final device packaging, almost every step and every link requires precise control of the gas environment. For example, in some process steps that require the control of oxygen concentration, the purity of the electronic gas has a great impact on the chip quality, and the control of oxygen concentration is particularly crucial, such as in scenarios like polyimide (PI) baking, laser annealing, and RTP annealing. In these steps, the control of oxygen concentration is one of the important factors to ensure device performance and reliability.

[0003] However, due to reasons such as errors in the sensor unit, the gas concentration may not reach or may exceed the standard value. For example, continuing the process when the oxygen concentration is too low or too high will lead to a decline in the performance of the final finished device. Summary of the Invention

[0004] In view of the above problems, an object of the present invention is to provide a gas concentration detection device and a detection method. By setting a vibration sensor on the air pump, the vibration condition of the air pump is sensed to determine whether the air pump is working properly, and further to determine whether the detection result of the predetermined gas concentration in the cavity of the semiconductor equipment detected by the gas concentration detector is abnormal.

[0005] According to one aspect of the present invention, there is provided a gas concentration detection device for a semiconductor equipment that requires a predetermined gas concentration in the cavity to reach a preset standard during the manufacturing process. The gas concentration detection device includes: a cavity for carrying a wafer and forming the concentration of a predetermined gas required for the semiconductor process in the cavity; a detection module connected to the cavity for extracting gas from the cavity and detecting the concentration of the predetermined gas, wherein the detection module includes an air pump and a vibration sensor, the air pump is used to extract gas from the cavity, and the vibration sensor is connected to the air pump for sensing the vibration condition of the air pump.

[0006] Optionally, the vibration sensor generates an output signal according to the vibration condition of the air pump, and the output signal characterizes the working state of the air pump.

[0007] Optionally, the output signal characterizing the operating state of the air extraction pump includes: if the vibration condition of the air extraction pump is regular vibration, the operating state of the air extraction pump is normal and the output signal is normal; if the vibration condition of the air extraction pump is irregular or has a sharp change, the operating state of the air extraction pump is abnormal and the output signal is abnormal.

[0008] Optionally, the output signal characterizing the operating state of the air extraction pump includes: if the frequency band range of the vibration frequency is within the first frequency band, the operating state of the air extraction pump is normal and the output signal is normal; if the frequency band range of the vibration frequency is within the second frequency band, the operating state of the air extraction pump is not working and the output signal is abnormal; if the frequency band range of the vibration frequency is within the third frequency band, the operating state of the air extraction pump is faulty and the output signal is abnormal.

[0009] Optionally, it further includes: a control module, connected to the cavity and the detection module, and the control module sends an instruction to the detection module to control the air extraction pump to work or stop working.

[0010] Optionally, the control module receives the output signal of the vibration sensor and triggers an alarm when the output signal is abnormal.

[0011] Optionally, the detection module further includes: a gas concentration detector, connected to the air extraction pump, for detecting the concentration of a predetermined gas in the gas extracted by the air extraction pump from the cavity and outputting a detection result, and the control module determines whether the gas concentration in the cavity reaches a preset standard according to the detection result.

[0012] Optionally, the predetermined gas includes oxygen.

[0013] According to another aspect of the present invention, there is provided a gas concentration detection method for a semiconductor device that requires the concentration of a predetermined gas in a cavity to reach a preset standard during a manufacturing process. The detection method includes: turning on the air extraction pump to extract gas from the cavity; obtaining the output signal of the vibration sensor; analyzing the output signal of the vibration sensor, where the output signal characterizes the operating state of the air extraction pump; and triggering an alarm when the output signal of the vibration sensor is abnormal, where the vibration sensor is connected to the air extraction pump and is used to sense the vibration condition of the air extraction pump.

[0014] Optionally, the step of analyzing the output signal of the vibration sensor, where the output signal characterizes the operating state of the air extraction pump, includes: if the vibration condition of the air extraction pump is regular vibration, the operating state of the air extraction pump is normal and the output signal is normal; if the vibration condition of the air extraction pump is irregular or has a sharp change, the operating state of the air extraction pump is abnormal and the output signal is abnormal.

[0015] Optionally, the step of analyzing the output signal of the vibration sensor, where the output signal characterizes the operating state of the air extraction pump, includes: if the frequency band range of the vibration frequency is in the first frequency band, the air extraction pump is operating normally and the output signal is normal; if the frequency band range of the vibration frequency is in the second frequency band, the air extraction pump is in a non-operating state and the output signal is abnormal; if the frequency band range of the vibration frequency is in the third frequency band, the air extraction pump is in a faulty state and the output signal is abnormal.

[0016] Optionally, before the step of turning on the air extraction pump and extracting gas from the cavity, the method further includes: purging the cavity with nitrogen; and transferring the wafer into the cavity.

[0017] Optionally, after the step of analyzing the output signal of the vibration sensor, the method further includes: when the output signal is normal, obtaining the detection result of a gas concentration detector, where the gas concentration detector is connected to the air extraction pump and is used to detect the gas concentration extracted by the air extraction pump from the cavity, and determining whether the gas concentration in the cavity reaches a preset standard based on the output signal of the vibration sensor and the detection result of the gas concentration detector; when the gas concentration in the cavity reaches the preset standard, performing a semiconductor process on the wafer in the cavity; when the gas concentration in the cavity does not reach the preset standard, continuing to purge the cavity with nitrogen.

[0018] Optionally, after the step of performing a semiconductor process on the wafer in the cavity when the gas concentration in the cavity reaches the preset standard, the method further includes: purging the gas concentration detector and the air extraction pump with nitrogen.

[0019] The gas concentration detection device and detection method provided by the present invention sense the vibration condition of the air extraction pump by setting a vibration sensor on the air extraction pump, and determine whether the air extraction pump is operating normally, and further determine whether the result of the gas concentration in the cavity of the semiconductor device detected by the gas concentration detector is abnormal. Generally speaking, when the air extraction pump is operating normally, its vibration condition has a certain vibration pattern or vibration frequency. However, when the air extraction pump fails or does not operate, its vibration pattern or vibration frequency will definitely be different from that during normal operation. Therefore, the output signal of the vibration sensor also changes following the vibration condition of the air extraction pump. Thus, it is possible to help determine whether the air extraction pump is operating normally based on the output signal of the vibration sensor, trigger an alarm to remind the staff when it is determined that the air extraction pump is operating abnormally, and use it as an auxiliary means to determine whether the gas concentration detected by the gas concentration detector is abnormal, thereby improving the accuracy of gas concentration detection and reducing the problem of the decrease in device yield caused by gas concentration faults in the process flow.

[0020] Furthermore, the gas concentration detection device and detection method provided by the present invention sense the working condition of the air extraction pump through the output signal of the vibration sensor, and sense the gas concentration in the cavity of the semiconductor device extracted by the air extraction pump through the gas concentration detector. The two cooperate with each other to jointly detect the gas concentration of the semiconductor device, so as to improve the detection accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Through the following description of the embodiments of the present invention with reference to the drawings, the above and other objects, features and advantages of the present invention will become clearer. In the drawings:

[0022] Figure 1 shows a schematic structural diagram of a semiconductor device according to an embodiment of the present invention;

[0023] Figure 2 shows a schematic structural diagram of a gas concentration detection device for a semiconductor device according to an embodiment of the present invention;

[0024] Figure 3 shows a schematic diagram of gas flow in the device in a gas concentration detection method for a semiconductor device according to an embodiment of the present invention;

[0025] Figure 4 shows a flowchart of a gas concentration detection method for a semiconductor device according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0026] The various embodiments of the present invention will be described in more detail below with reference to the drawings. In each of the drawings, the same elements are denoted by the same or similar reference numerals. For clarity, the various parts in the drawings are not drawn to scale.

[0027] The following combines the drawings and embodiments to further describe in detail the specific embodiments of the present invention.

[0028] Figure 1 shows a schematic structural diagram of a semiconductor device according to an embodiment of the present invention; Figure 2 shows a schematic structural diagram of a gas concentration detection device for a semiconductor device according to an embodiment of the present invention; Figure 3 shows a schematic diagram of gas flow in the device in a gas concentration detection method for a semiconductor device according to an embodiment of the present invention; Figure 4 shows a flowchart of a gas concentration detection method for a semiconductor device according to an embodiment of the present invention.

[0029] The gas concentration detection device 100 is used for semiconductor equipment that needs to control the concentration of a predetermined gas during the manufacturing process. By real-time or periodic monitoring of the gas concentration, it provides data support for the control and optimization of the semiconductor manufacturing process. The operator can adjust parameters such as gas flow rate and pressure according to the detection results to achieve the best process effect, improve production efficiency and product yield. Among them, the types of predetermined gases include various gases such as oxygen, nitrogen, and helium. In the embodiment of the present application, taking the gas concentration detection device 100 needing to detect the oxygen concentration as an example for description, that is, the predetermined gas in this embodiment is oxygen. Specifically, semiconductor equipment that needs to control the concentration of a predetermined gas during the manufacturing process includes polyimide drying equipment, laser annealing equipment, RTP annealing equipment, oxidation equipment, etc.

[0030] Reference Figures 1 to 3 , the gas concentration detection device 100 of the present application includes a cavity 110, a detection module 120, and a control module 130. Among them, the control module 130 is connected to the cavity 110 and the detection module 120, and the detection module 120 is connected to the cavity 110.

[0031] The cavity 110 is the process cavity of the semiconductor equipment, which is the core part of the semiconductor equipment, used to carry the reaction wafers during the semiconductor manufacturing process, and is also the area where the gas concentration detection device 100 is used to detect the concentration of the predetermined gas. According to the different functions of the semiconductor equipment, the structure of the cavity 110 will be different. The cavity 110 at least includes a first gas inlet 111, an exchange port 112, a detection port 113, and a first gas outlet 114. The first gas inlet 111 is used for gas to enter the cavity 110; the exchange port 112 has an isolation valve, and the wafer is put into or taken out of the cavity 110 in the state of opening the isolation valve; the first gas outlet 114 is used for outputting the gas in the cavity 110; the detection port 113 also has an isolation valve, which is used to realize the detection of the gas concentration in the cavity 110.

[0032] The detection module 120 is connected to the cavity 110. Specifically, the detection module 120 includes a second gas inlet 124, a third gas inlet 125, and a second gas outlet 126. The third gas inlet 125 of the detection module 120 is connected to the detection port 113 of the cavity 110, which is used for partially extracting the gas inside the cavity 110 and detecting the concentration of the predetermined gas inside the cavity 110 according to the extracted gas. In the present application, the detection module 120 is used to detect the concentration of oxygen in the cavity 110.

[0033] The detection module 120 at least includes an air extraction pump 121, a gas concentration detector 123, and a vibration sensor 122. The air extraction pump 121 extracts a part of the gas from the cavity 110 through the third air inlet 125; the vibration sensor 122 is arranged on the air extraction pump 121 and is used to detect the vibration condition of the air extraction pump 121 and generate an output signal according to the vibration condition, and this output signal characterizes the working condition of the air extraction pump 121; the gas concentration detector 123 is connected to the air extraction pump 121 and is used to detect the oxygen concentration in the gas extracted by the air extraction pump 121 from the cavity 110.

[0034] During the process of detecting the oxygen concentration, the air extraction pump 121 receives an instruction from the control module 130 and works for a predetermined time, so as to extract a part of the gas from the cavity 110; the gas concentration detector 123 detects the oxygen concentration of the gas extracted by the air extraction pump 121 during its working time; and the vibration sensor 122 detects the vibration condition of the air extraction pump 121 during the working time and generates an output signal.

[0035] The vibration condition of the air extraction pump 121 includes the vibration law and the vibration frequency. Among them, the vibration frequency refers to the number of periodic vibrations completed by an object per unit time, and the unit is usually hertz (Hz); for example, if the vibration frequency of the air extraction pump 121 is 50 Hz, it means that it will complete 50 complete vibration cycles per second. The vibration law describes a wider range and is a comprehensive expression of the entire vibration's change over time, including not only the vibration frequency but also information such as the vibration amplitude, phase, and the dynamic change trend during the vibration process. For example, the vibration law of the air extraction pump 121 may be that the vibration amplitude rapidly climbs from small to large during the startup phase, after reaching the stable operation state, it continuously vibrates at a fixed frequency with a small and constant amplitude, and the vibration amplitude gradually weakens when shutting down.

[0036] The control module 130 is the brain of the gas concentration detection device 100. It is connected to both the cavity 110 and the detection module 120 and is used to send an instruction to the air extraction pump 121 in the detection module 120 to control whether the air extraction pump 121 works, and is also used to receive the detection result of the gas concentration detector 123 and the output signal of the vibration sensor 122 in the detection module 120.

[0037] In this application, the working states of the air extraction pump 121 include working, not working, and malfunction. Different working states cause the vibration sensor 122 to generate different output signals. The control module 130 analyzes the output signal to determine whether the output signal is normal or abnormal, and thus can determine the working state of the air extraction pump 121.

[0038] Among them, when the air extraction pump 121 is in a normal working state, its vibration condition is regular vibration. The output signal generated by the vibration sensor 122 includes this vibration condition, and the output signal is normal. When the air extraction pump 121 has an abnormality or a fault during the working time, its working state is abnormal. The vibration condition of the air extraction pump 121 is irregular or has a sharp change, such as an increase or decrease in vibration. The vibration sensor 122 will reflect these changes in the output signal, and at this time the output signal is abnormal. When the air extraction pump 121 does not work during the working time, its working state is abnormal, the vibration condition stops, the vibration sensor 122 cannot sense the vibration, and its output signal is abnormal. Therefore, the working state of the air extraction pump 121 can be judged by analyzing the output signal of the vibration sensor 122.

[0039] Alternatively, when the frequency band range of the vibration frequency of the air extraction pump 121 is within the first frequency band, the air extraction pump 121 is in a normal working state, and the output signal generated by the vibration sensor 122 is normal; when the frequency band range of the vibration frequency of the air extraction pump 121 is within the second frequency band, the air extraction pump 121 is in a non-working state, and the output signal of the vibration sensor 122 is abnormal; when the frequency band range of the vibration frequency of the air extraction pump 121 is within the third frequency band, the air extraction pump 121 is in a faulty state, and the output signal of the vibration sensor 122 is abnormal.

[0040] When the oxygen concentration in the cavity 110 needs to be reduced below or increased above a preset value, based on the oxygen concentration detection of the gas concentration detector 123 for the gas in the cavity 110 extracted by the air extraction pump 121 and the monitoring of the working condition of the air extraction pump 121 by the vibration sensor 123, a relatively accurate monitoring result can be obtained. At the same time, by analyzing the detection result of the gas concentration detector 123 and the output signal of the vibration sensor 122, it can also be judged whether the detection result of the gas concentration detector 123 is abnormal.

[0041] In one embodiment, when the control module 130 receives the detection result of the gas concentration detector 123, the control module 130 can judge whether the detection result is abnormal according to the vibration condition of the air extraction pump 121 detected by the vibration sensor 122. For example, when the output signal of the vibration sensor 122 is normal, it is considered that the air extraction pump 121 is working normally, and the detection result of the gas concentration detector 123 is normal; when the output signal of the vibration sensor 122 is abnormal, it is considered that the air extraction pump 121 has an abnormal operation or a fault, and at this time the detection result of the gas concentration detector 123 will be abnormal or inaccurate.

[0042] When the output signal of the vibration sensor 122 is abnormal, the control module 130 will trigger an alarm to remind the operator to verify the detection result of the gas concentration detector 123 or re-obtain the oxygen concentration in the cavity 110, so as to avoid the situation where the process flow is not ideal due to the failure of the air extraction pump 121.

[0043] Further, during the process of triggering the alarm, when the output signal of the vibration sensor 122 shows abnormality, the control module 130 will trigger the alarm to timely remind the operator to take corresponding safety measures; and only when the detection result of the gas concentration detector 123 is abnormal, the alarm triggered by the control module 130 will, for example, remind the operator that the gas concentration detector 123 fails or the oxygen concentration in the cavity 110 is abnormal, and remind the staff to check the gas concentration detector 123 to confirm whether it is really the failure of the gas concentration detector 123 that causes the abnormal detection result, so as to reduce the problem of the decrease in the device yield rate caused by the gas concentration failure in the process flow.

[0044] In one embodiment, when it is required that the current oxygen concentration in the cavity 110 meets the requirement of being lower than a preset value, the control module 130 issues an instruction to the detection module 120 to cause the air extraction pump 121 in the detection module 120 to start working, so as to extract a part of the gas from the cavity 110; the vibration sensor 122 located on the air extraction pump 121 starts to work, detects the vibration condition of the air extraction pump 121, and generates an output signal to be provided to the control module 130. At the same time, the gas concentration detector 123 also starts to detect the oxygen concentration of the gas in the cavity 110 extracted by the air extraction pump 121, and sends the detection result to the control module 130. Among them, the gas concentration detector 123 sends the detection result to the control module 130, for example, once every certain time interval, and the vibration sensor 122 provides the output signal to the control module 130 in real time. After the air extraction pump 121 works for a predetermined time, the control module 130 issues an instruction to the detection module 120 to control the air extraction pump 121 to end the work, so as to complete the current detection.

[0045] Figure 4 The flowchart of the gas concentration detection method for semiconductor equipment according to an embodiment of the present invention is shown.

[0046] In this embodiment, taking the example that the cavity 110 needs an oxygen concentration to be reduced to a gas atmosphere lower than the preset value for illustration, as Figure 3 and Figure 4 shown, the gas concentration detection method of the present application includes the following steps:

[0047] Step S201: Perform nitrogen purging into the cavity and transfer the wafer into the cavity.

[0048] In this step, nitrogen is introduced into the cavity 110 through the first air inlet 111 on the cavity 110 to reduce the oxygen concentration in the cavity 110.

[0049] Further, the isolation valve of the exchange port 112 of the cavity 110 is opened, the wafer to be subjected to the semiconductor process is sent into the cavity 110, and then the isolation valve of the exchange port 112 is closed.

[0050] Step S202: Turn on the air pump to extract gas from the cavity.

[0051] In this step, the control module 130 sends an instruction to the detection module 120, the isolation valve between the detection module 120 and the detection port 113 of the cavity 110 is opened, and the air pump 121 starts to work to extract gas from the cavity 110.

[0052] Among them, the air pump 121 automatically stops working after working for a predetermined time, or stops working according to the instruction issued by the control module 130 after working for a predetermined time.

[0053] Step S203: Obtain the output signal of the vibration sensor and the detection result of the gas concentration detector.

[0054] In this step, the vibration sensor 122 senses the vibration condition of the air pump 121 to start generating an output signal and transmit it to the control module 130, and the gas concentration detector 123 also starts to detect the oxygen concentration in the gas extracted by the air pump 121 and send the detection result to the control module 130.

[0055] Among them, the vibration condition of the air pump 121 includes the vibration law and the vibration frequency. Different vibration laws or vibration frequencies indicate that the air pump 121 is in different working states. Therefore, the output signal of the vibration sensor 122 can characterize the working state of the air pump 121.

[0056] Step S204: Analyze whether there is any abnormality in the output signal of the vibration sensor and the detection result of the gas concentration detector, and perform the semiconductor process when the oxygen concentration in the cavity meets the preset standard.

[0057] In this step, the control module 130 analyzes the output signal of the received vibration sensor 122 to judge whether the working state of the air pump 121 is normal, and at the same time judges whether the detection result of the gas concentration detector 123 is accurate according to whether the working state of the air pump 121 is normal.

[0058] Among them, if the vibration condition of the air extraction pump 121 is regular vibration, the working state of the air extraction pump 121 is normal, and the output signal of the vibration sensor 122 is normal; if the vibration condition of the air extraction pump 121 is irregular or has a sharp change, the working state of the air extraction pump 121 is abnormal, and the output signal of the vibration sensor 122 is abnormal. Or, if the frequency band range of the vibration frequency of the air extraction pump 121 is within the first frequency band, the working state of the air extraction pump 121 is normal, and the output signal of the vibration sensor 122 is normal; if the frequency band range of the vibration frequency of the air extraction pump 121 is within the second frequency band, the working state of the air extraction pump 121 is not working, and the output signal of the vibration sensor 122 is abnormal; if the frequency band range of the vibration frequency of the air extraction pump 121 is within the third frequency band, the working state of the air extraction pump 121 is faulty, and the output signal of the vibration sensor 122 is abnormal.

[0059] Further, when the control module 130 analyzes the output signal of the vibration sensor 122 and confirms that the working state of the air extraction pump 121 is normal, the control module 130 analyzes the monitoring result of the gas concentration detector 123 to determine whether the oxygen concentration in the cavity 110 meets the preset standard, that is, whether the oxygen concentration is lower than the preset value. In other embodiments, the oxygen concentration in the cavity 110 meeting the preset standard may also mean that the oxygen concentration is higher than the preset value, and the specific situation can be set according to the gas atmosphere requirements of the semiconductor process.

[0060] Further, after the air extraction pump 121 works for a predetermined time, the control module 130 sends an instruction to turn off the air extraction pump 121, and starts the semiconductor process when the control module 130 determines that the oxygen concentration in the cavity 110 meets the preset standard; if the control module 130 determines that the oxygen concentration in the cavity 110 does not meet the preset standard, continue to purge nitrogen into the cavity 110 through the first air inlet 111 of the cavity 110.

[0061] Step S205: Trigger an alarm when there are abnormalities in the output signal of the vibration sensor and the detection result of the gas concentration detector.

[0062] In this step, when any one of the output signal of the vibration sensor 122 and the detection result of the gas concentration detector 123 is abnormal, the control module 120 triggers an alarm to remind the operator to take corresponding measures, thereby reducing the problem of the decrease in the device yield caused by the gas concentration failure in the process flow.

[0063] During the process of triggering an alarm, when the output signal of the vibration sensor 122 shows an abnormality, the control module 130 will trigger an alarm to promptly remind the operator to take corresponding safety measures; and only when the detection result of the gas concentration detector 123 is abnormal, the alarm triggered by the control module 130 will, for example, remind the operator that the gas concentration detector 123 is faulty or the oxygen concentration in the cavity 110 is abnormal, and remind the staff to check the gas concentration detector 123 to confirm whether it is really the fault of the gas concentration detector 123 that causes the abnormal detection result, thereby reducing the problem of the decrease in the device yield caused by gas concentration faults in the process flow.

[0064] Step S206: Nitrogen purge the gas concentration detector.

[0065] In this step, nitrogen is used to purge the gas concentration detector 123 in the detection module 120 through the second air inlet 124 of the detection module 120, so as to initialize the gas concentration detector 123, thereby improving the accuracy when detecting the oxygen concentration of the gas in the cavity 110 next time.

[0066] The gas concentration detection device and detection method provided by the present invention sense the vibration condition of the air extraction pump by setting a vibration sensor on the air extraction pump, and judge whether the air extraction pump is working normally, and then judge whether the result of the oxygen concentration in the cavity of the semiconductor device detected by the gas concentration detector is abnormal. Generally speaking, when the air extraction pump is working normally, its vibration condition has a certain vibration law or vibration frequency, but when the air extraction pump fails or does not work, its vibration law or vibration frequency will definitely be different from that in the normal working state. Therefore, the output signal of the vibration sensor also changes following the vibration condition of the air extraction pump, so that it is possible to help judge whether the air extraction pump is working normally according to the output signal of the vibration sensor. When it is judged that the air extraction pump is working abnormally, an alarm is triggered to remind the staff, and it is used as an auxiliary means to judge whether the detected oxygen concentration of the gas concentration detector is abnormal, thereby improving the accuracy of gas concentration detection and reducing the problem of the decrease in the device yield caused by gas concentration faults in the process flow.

[0067] Furthermore, the gas concentration detection device and detection method provided by the present invention sense the working condition of the air extraction pump through the output signal of the vibration sensor, and sense the oxygen concentration of the gas in the cavity of the semiconductor device extracted by the air extraction pump through the gas concentration detector. The two cooperate with each other to jointly detect the gas concentration of the semiconductor device to improve the detection accuracy.

[0068] As described above in the embodiments of the present invention, these embodiments do not exhaust all details and do not limit the invention to the specific embodiments described. Obviously, many modifications and variations can be made according to the above description. These embodiments are selected and specifically described in this specification in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can make good use of the present invention and its modifications based on the present invention. The present invention is only limited by the claims and their full scope and equivalents.

Claims

1. A gas concentration detection device, used for semiconductor equipment that requires a predetermined gas concentration in a cavity to reach a preset standard during a manufacturing process, the gas concentration detection device comprising: A chamber, used for carrying the wafer and forming a predetermined gas concentration required for the semiconductor process in the chamber; A detection module is connected to the cavity and is used to extract gas from the cavity and detect the concentration of a predetermined gas. The detection module includes an air pump and a vibration sensor. The air pump is used to extract gas from the cavity. The vibration sensor is connected to the air pump and is used to sense the vibration of the air pump.

2. The gas concentration detection device according to claim 1, wherein: The vibration sensor generates an output signal according to the vibration condition of the air pump, and the output signal represents the working state of the air pump.

3. The gas concentration detection device according to claim 2, wherein: The output signal characterizing the working state of the air pump includes: If the vibration of the air pump is regular vibration, the air pump is in normal working state and the output signal is normal; If the vibration of the air pump is irregular or changes suddenly, the working state of the air pump is abnormal and the output signal is abnormal.

4. The gas concentration detection device according to claim 2, wherein: The output signal characterizing the working state of the air pump includes: If the frequency range of the vibration frequency is within the first frequency range, the vacuum pump is operating normally and the output signal is normal; If the frequency range of the vibration frequency is within the second frequency range, the working state of the air pump is not working, and the output signal is abnormal; If the frequency band range of the vibration frequency is within the third frequency band, the working state of the air pump is faulty and the output signal is abnormal.

5. The gas concentration detection device according to claim 3 or 4, wherein: Also includes: A control module is connected to the cavity and the detection module, and the control module sends instructions to the detection module to control the air pump to work or stop working.

6. The gas concentration detection device according to claim 5, wherein: The control module receives an output signal from the vibration sensor and triggers an alarm when the output signal is abnormal.

7. The gas concentration detection device according to claim 5, wherein: The detection module also includes: A gas concentration detector is connected to the vacuum pump and is used to detect a predetermined gas concentration in the gas extracted from the cavity by the vacuum pump and output a detection result. The control module determines whether the gas concentration in the cavity reaches a preset standard based on the detection result.

8. The gas concentration detection device according to claim 1, wherein: The predetermined gas includes oxygen.

9. A gas concentration detection method for semiconductor equipment that requires a predetermined gas concentration in a cavity to reach a preset standard during a manufacturing process, the detection method comprising: Turn on the vacuum pump to extract gas from the cavity; Obtain the output signal of the vibration sensor; Analyzing an output signal of the vibration sensor, wherein the output signal represents a working state of the air pump; When the output signal of the vibration sensor is abnormal, an alarm is triggered. Wherein, the vibration sensor is connected to the air pump and is used to sense the vibration of the air pump.

10. The gas concentration detection method according to claim 9, wherein: The step of analyzing the output signal of the vibration sensor, wherein the output signal represents the working state of the air pump, comprises: If the vibration of the air pump is regular vibration, the air pump is in normal working state and the output signal is normal; If the vibration of the air pump is irregular or changes suddenly, the working state of the air pump is abnormal and the output signal is abnormal.

11. The gas concentration detection method according to claim 9, wherein: The step of analyzing the output signal of the vibration sensor, wherein the output signal represents the working state of the air pump, comprises: If the frequency range of the vibration frequency is within the first frequency range, the vacuum pump is operating normally and the output signal is normal; If the frequency range of the vibration frequency is within the second frequency range, the working state of the air pump is not working, and the output signal is abnormal; If the frequency band range of the vibration frequency is within the third frequency band, the working state of the air pump is faulty and the output signal is abnormal.

12. The gas concentration detection method according to claim 9, wherein: Before the step of turning on the vacuum pump to extract gas from the cavity, the step further includes: Purging nitrogen into the chamber; The wafer is transferred into the chamber.

13. The gas concentration detection method according to any one of claims 9 to 12, wherein: After the step of analyzing the output signal of the vibration sensor, the method further comprises: When the output signal is normal, a detection result of a gas concentration detector is obtained, wherein the gas concentration detector is connected to the air pump and is used to detect the concentration of the gas extracted from the cavity by the air pump. Determining whether the gas concentration in the cavity reaches a preset standard according to the output signal of the vibration sensor and the detection result of the gas concentration detector; When the gas concentration in the chamber reaches a preset standard, performing a semiconductor process on the wafer in the chamber; When the gas concentration in the cavity does not reach a preset standard, nitrogen continues to be purged into the cavity.

14. The gas concentration detection method according to claim 13, wherein: When the gas concentration in the chamber reaches a preset standard, after the step of performing a semiconductor process on the wafer in the chamber, the method further includes: Nitrogen purge gas concentration detector.

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