Charged particle signal filtering device for scanning electron microscope

Abstract

The invention discloses a charged particle signal filtering device for a scanning electron microscope. The charged particle signal filtering device comprises an energy filtering sample table and a power supply, wherein the energy filtering sample table comprises an insulating bracket, a metal electrode device and a sample placing table; the metal electrode device comprises an annular metal electrode and a metal electrode bar which is connected with the annular metal electrode and is arranged at the central position of the annular metal electrode; the sample placing table is arranged on the metal electrode bar and is used for placing a sample; the positive electrode and the negative electrode of the output end of the power supply are respectively connected with the annular metal electrode and the metal electrode bar to form an upward annular magnetic field from the annular metal electrode to the metal electrode bar; the metal electrode device is arranged on the insulating bracket so as to insulate and isolate the metal electrode device from a sample table of the scanning electron microscope, and the insulating bracket is made of an insulating material and is arranged on the sample table of the scanning electron microscope so as to place the energy filtering sample table into the scanning electron microscope and insulate and isolate the metal electrode device from the sample table of the scanning electron microscope.

Description

Technical Field

[0001] This application relates to the technical field of component analysis, and particularly relates to a charged particle signal filtering device for a scanning electron microscope. Background Art

[0002] In order to analyze the elemental components contained in a sample, currently, an electron beam is mainly emitted from an electron gun in a scanning electron microscope to bombard the sample, causing it to generate various signals. The generated signals specifically include charged particles, such as secondary electrons and backscattered electrons, etc., and neutral particles, such as X-ray photons, etc. Then, by detecting and collecting the X-ray photon signals, the elemental components contained in the sample can be analyzed.

[0003] Since the currently used X-ray signal detector is inevitably bombarded by the generated charged particles, generating electronic noise, which affects the further identification and analysis of the X-ray signals, and thus affects the accuracy of the component analysis results. Therefore, currently, an electron trap is usually equipped at the front end of the X-ray detector, so that the charged signals to enter the detector can generate a path deviation under the action of an electromagnetic field, and thus will not enter the detector to generate electronic noise, avoiding affecting the accuracy of the component analysis results.

[0004] However, installing an electron trap at the front end of the detector inevitably increases the distance between the detector and the sample due to its geometric shape, resulting in waste of some X-ray signals, that is, some X-ray signals cannot be detected, thus affecting the detection efficiency and detection amount of the X-ray signals, and further affecting the efficiency of the component analysis and the accuracy of the component analysis results. Summary of the Invention

[0005] Based on the above deficiencies of the prior art, this application provides a charged particle signal filtering device for a scanning electron microscope to solve the problem that the existing technology cannot ensure the detection efficiency and accuracy of the detector.

[0006] To achieve the above object, this application provides the following technical solutions:

[0007] Another embodiment of this application provides a charged particle signal filtering device for a scanning electron microscope, including:

[0008] An energy filtering sample stage and a power supply; wherein, the energy filtering sample stage includes an insulating bracket, a metal electrode device, and a sample placement stage;

[0009] The metal electrode device includes an annular metal electrode and a metal electrode rod connected to the annular metal electrode and disposed at the central position of the annular metal electrode;

[0010] The sample placement stage is disposed on the metal electrode rod and is used to place the sample that needs to be bombarded by the electron beam;

[0011] The positive and negative electrodes of the output terminal of the power supply are respectively connected to the annular metal electrode and the metal electrode rod, forming an annular magnetic field that is directed from the annular metal electrode towards the metal electrode rod and is upward.

[0012] The metal electrode device is arranged on the insulating bracket to insulate and isolate the metal electrode device from the sample stage of the scanning electron microscope.

[0013] The insulating bracket is made of an insulating material and is arranged on the sample stage of the scanning electron microscope to place the energy-filtering sample stage in the scanning electron microscope and insulate and isolate the metal electrode device from the sample stage of the scanning electron microscope.

[0014] Optionally, in the above scanning electron microscope charged particle signal filtering device, the insulating bracket is a bracket made of alumina ceramic.

[0015] Optionally, in the above scanning electron microscope charged particle signal filtering device, the negative electrode of the power supply is connected to the annular metal electrode, and the positive electrode of the power supply is connected to the metal electrode rod.

[0016] Optionally, in the above scanning electron microscope charged particle signal filtering device, it further includes:

[0017] A transformer;

[0018] The output terminal of the power supply is connected to the transformer, and the positive and negative electrodes of the output terminal of the power supply are respectively connected to the annular metal electrode and the metal electrode rod through the transformer, so as to adjust the magnitude of the bias voltage input to the metal electrode device through the transformer.

[0019] Optionally, in the above scanning electron microscope charged particle signal filtering device, the power supply is a high-voltage DC power supply.

[0020] Optionally, in the above scanning electron microscope charged particle signal filtering device, the metal electrode device is made of polished stainless steel.

[0021] Optionally, in the above scanning electron microscope charged particle signal filtering device, the annular metal electrode is a metal cylinder with one end open, and the metal electrode rod is a metal rod of the same material fixedly connected to the bottom in the middle inside the annular metal electrode.

[0022] Optionally, in the above scanning electron microscope charged particle signal filtering device, the sample placement stage is an aluminum sample placement stage.

[0023] Optionally, in the above scanning electron microscope charged particle signal filtering device, the energy-filtering sample stage is placed inside the scanning electron microscope, and the sample placement stage of the energy-filtering sample stage is aligned with the emission port of the electron gun, so as to bombard the sample on the sample placement stage with the electron beam emitted by the electron gun;

[0024] The power supply is placed outside the scanning electron microscope.

[0025] Optionally, in the above scanning electron microscope charged particle signal filtering device, it further includes:

[0026] A vacuum flange with a high-voltage feedthrough, which is used to seal the opening on the scanning electron microscope where the energy-filtering sample stage is placed inside the scanning electron microscope, and to make the inside of the scanning electron microscope in a vacuum state through the high-voltage feedthrough.

[0027] A scanning electron microscope charged particle signal filtering device provided by the present application includes an energy-filtering sample stage and a power supply. Among them, the energy-filtering sample stage includes an insulating bracket, a metal electrode device, and a sample placement stage. The metal electrode device includes an annular metal electrode and a metal electrode rod connected to the annular metal electrode and arranged at the center position of the annular metal electrode; the sample placement stage is arranged on the metal electrode rod and is used to place the sample to be bombarded by the electron beam. Therefore, a magnetic field is generated, and the device for filtering charged particles is equivalent to a base installed at the bottom of the sample placement stage, rather than installed on the detector, so that the distance between the detector and the sample will not be affected, and further the detection efficiency and detection amount of the detector for X-ray signals will not be affected, avoiding affecting the results of component analysis. Moreover, the positive and negative poles of the output end of the power supply are respectively connected to the annular metal electrode and the metal electrode rod to form an annular magnetic field that faces from the annular metal electrode to the metal electrode rod and upward, which can ensure that charged particles in all directions generated by the sample in the sample placement stage at the center will fall into the formed annular magnetic field, and under the action of the annular magnetic field, move upward to the center position, so that they will not bombard the detector and generate electron noise, thereby affecting the analysis results. Therefore, the accuracy of the analysis results can be effectively guaranteed. In addition, the metal electrode device is arranged on the insulating bracket to insulate and isolate the metal electrode device from the sample stage of the scanning electron microscope. The insulating bracket is made of insulating material and is arranged on the sample stage of the scanning electron microscope to place the energy-filtering sample stage in the scanning electron microscope and insulate and isolate the metal electrode device from the sample stage of the scanning electron microscope. Thus, not only can the device be effectively placed in the scanning electron microscope for detection, but also the metal electrode device is insulated and isolated from the sample stage of the scanning electron microscope, avoiding affecting the operation of the scanning electron microscope and the magnetic field formed by the metal electrode device, so that accurate component analysis can be effectively guaranteed through the scanning electrode. Description of the Drawings

[0028] To more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the accompanying drawings required for the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only the embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other accompanying drawings can also be obtained based on the provided drawings.

[0029] Figure 1 Schematic structural diagram of a charged particle signal filtering device for a scanning electron microscope provided by an embodiment of the present application;

[0030] Figure 2 Schematic structural diagram of a metal electrode device provided by an embodiment of the present application;

[0031] Figure 3 Schematic diagram of an electric field formed by a metal electrode device provided by an embodiment of the present application;

[0032] Figure 4 Schematic structural diagram of another charged particle signal filtering device for a scanning electron microscope provided by an embodiment of the present application;

[0033] Figure 5 Schematic diagram of an energy filtering sample stage placed inside a scanning electron microscope provided by an embodiment of the present application;

[0034] Figure 6 Schematic diagram of a scanning electron microscope enclosed by a vacuum flange with a high - voltage feedthrough provided by an embodiment of the present application;

[0035] Figure 7 Schematic structural diagram of a vacuum flange with a high - voltage feedthrough provided by an embodiment of the present application. Detailed implementation manners

[0036] The following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of them. Based on the embodiments of the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present application.

[0037] In this application, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprising", "including" or any other variant thereof are intended to cover non-exclusive inclusion, such that a process, method, article or device comprising a series of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "comprising an..." does not exclude the presence of additional identical elements in the process, method, article or device comprising the element.

[0038] An embodiment of this application provides a scanning electron microscope charged particle signal filtering device, as Figure 1 shown, comprising:

[0039] An energy filtering sample stage 101 and a power supply 102.

[0040] Among them, the energy filtering sample stage 101 is mainly used to place the sample to be detected, that is, the sample to be bombarded by the electron beam, and filter out the charged particles generated by the sample through the generated magnetic field to avoid the charged ions bombarding the detector.

[0041] The power supply 102 is mainly used to supply power to the energy filtering sample stage 101 so that the energy filtering sample stage 101 generates a magnetic field for filtering charged particles.

[0042] As Figure 1 shown, the energy filtering sample stage 101 specifically includes a metal electrode device 103, an insulating bracket 104, and a sample placement stage 105.

[0043] Among them, the metal electrode device 104 is an electrode made of a metal material, and is used to generate a magnetic field in a specified direction when the power supply 102 is energized, so that under the action of the magnetic field, the charged particles move in the direction of the magnetic field and do not bombard the detector.

[0044] As Figure 1 shown, the metal electrode device 104 includes an annular metal electrode 1031 and a metal electrode rod 1032 connected to the annular metal electrode 1031 and disposed at the central position of the annular metal electrode 1031.

[0045] It should be noted that in order to ensure that all charged particles are affected by the magnetic field and move in a specified direction without bombarding the detector. Therefore, in the embodiment of the present application, a circular metal is used as the electrode to generate a circular magnetic field that surrounds the sample being tested, so that charged particles in all directions generated by bombarding the sample are in the magnetic field generated by the circular metal electrode 1031.

[0046] Optionally, in order to effectively generate the required magnetic field and effectively reduce costs, in the scanning electron microscope charged particle signal filtering device provided in another embodiment of the present application, the metal electrode device 104 is made of polished stainless steel, that is, the circular metal electrode 1031 is a circular stainless steel, and the metal electrode rod 1032 is a stainless steel rod.

[0047] It should be noted that since the detector is usually arranged on the side of the sample stage, a magnetic field from the periphery to the center is generated to attract the charged particles to the center and prevent them from bombarding the detector on the side.

[0048] In order to generate a magnetic field from the periphery to the center and surround the sample, as Figure 1 shown, in the embodiment of the present application, at the center position of the circular metal electrode, that is, at the center of the circle, a metal rod is provided as another electrode. In order to form a closed-loop circuit between the circular metal electrode 1031 and the metal electrode rod 1032 so that a magnetic field is generated between the circular metal electrode 1031 and the metal electrode rod 1032, it is necessary to ensure that the circular metal electrode 1031 and the circular metal electrode 1031 are connected to each other. Of course, the circular metal electrode 1031 and the circular metal electrode 1031 can also be integrated to ensure their connection.

[0049] Optionally, as Figure 2 shown, in the scanning electron microscope charged particle signal filtering device provided in another embodiment of the present application, the circular metal electrode 1031 is a metal cylinder with one end open, and the metal electrode rod 1032 is a metal rod of the same material fixedly connected to the bottom of the middle inside the circular metal electrode 1031. Therefore, the metal electrode rod 1032 is arranged at the bottom of the middle inside the circular metal electrode 1031, which realizes the connection with the circular metal electrode 1031 without affecting the additional connection of the two through a conductor, making the structure simpler and easier to implement without affecting the effect of the formed magnetic field.

[0050] As Figure 1 shown, the sample stage 105 is arranged on the metal electrode rod 1032 and is used to place the sample to be bombarded by the electron beam.

[0051] Therefore, the sample placed on the sample stage 105 is located at the center of the generated magnetic field, so that charged particles in all directions generated by the bombarded sample can be affected by the magnetic field and then move in the direction of the magnetic field. Moreover, it can be seen that in the embodiment of the present application, the device for filtering charged particles is not installed on the detector but on the platform for placing the sample, that is, on the energy-filtering sample stage 101, so it will not affect the distance between the detector and the sample, and thus will not affect the detection of X-ray signals by the detector.

[0052] Optionally, in the scanning electron microscope charged particle signal filtering device provided in another embodiment of the present application, the sample stage 105 can be made of aluminum, that is, the sample stage 105 is an aluminum sample stage 105.

[0053] As Figure 1 shown, the positive and negative electrodes of the output terminal of the power supply 102 are respectively connected to the annular metal electrode 1031 and the metal electrode rod 1032, forming an annular magnetic field directed from the annular metal electrode 1031 towards the metal electrode rod 1032 and upward.

[0054] Optionally, in the scanning electron microscope charged particle signal filtering device provided in another embodiment of the present application, as Figure 3 shown, specifically, the positive electrode of the output terminal of the power supply 102 is connected to the annular metal electrode 1031, and the negative electrode of the output terminal of the power supply 102 is connected to the metal electrode rod 1032, thereby forming an annular negative electric field from the annular metal electrode 1031 to the metal electrode rod 1032, that is, from the annular metal electrode 1031 to its center. The annular negative electric field attracts the charged particle signal towards the center and upward, thus preventing the charged particle signal from entering the X-ray imaging detector.

[0055] Optionally, in order to directly generate a stable magnetic field through the electric energy output by the power supply 102, in the scanning electron microscope charged particle signal filtering device provided in another embodiment of the present application, the power supply 102 can specifically be a high-voltage DC power supply 102, so it is necessary to convert the alternating current into direct current and directly supply power to the metal electrode device 104 through the direct current of the power supply 102 to form a stable magnetic field.

[0056] Optionally, in order to facilitate the user to adjust the corresponding voltage according to the specific requirements of sample detection, so as to adjust the force exerted on the charged particles by the formed magnetic field and enable the charged particles to be effectively processed. Therefore, in the scanning electron microscope charged particle signal filtering device provided in another embodiment of the present application, as Figure 4 shown, the scanning electron microscope charged particle signal filtering device further includes:

[0057] A transformer 107.

[0058] Among them, the output terminal of the power supply 102 is connected to a transformer. Through the transformer, the positive and negative poles of the output terminal of the power supply 102 are respectively connected to the annular metal electrode 1031 and the metal electrode rod 1032. That is, the power supply 102 is connected to the transformer, and then the transformer is connected to the metal electrode device 104, so that the magnitude of the bias voltage input to the metal electrode device 104 can be adjusted through the transformer.

[0059] As Figure 1 shown, the metal electrode device 104 is arranged on the insulating bracket 103 to insulate and isolate the metal electrode device 104 from the sample stage 106 of the scanning electron microscope. The insulating bracket 103 is made of insulating material and is arranged on the sample stage 106 of the scanning electron microscope to place the energy-filtering sample stage 101 in the scanning electron microscope and insulate and isolate the metal electrode device 104 from the sample stage 106 of the scanning electron microscope.

[0060] It should be noted that since the sample needs to be placed on the sample stage 106 of the scanning electron microscope to detect the sample, and in the embodiment of the present application, in order to achieve the filtering of charged particles during the detection process, the entire energy-filtering sample stage 101 needs to be placed on the sample stage 106 of the scanning electron microscope. And the metal electrode device 104 in the energy-filtering sample stage 101 is energized, so in order to prevent the current of the metal electrode device 104 from flowing to the sample stage 106 of the scanning electron microscope, which affects the scanning electron microscope and the magnetic field generated by the metal electrode device 104. Therefore, an insulating bracket needs to be provided below the metal electrode device 104, that is, an insulating bracket 103 is provided as a base. Then, by placing the insulating bracket 103 on the sample stage 106 of the scanning electron microscope, the energy-filtering sample stage 101 and the sample stage 106 of the scanning electron microscope are connected, so that not only can the energy-filtering sample stage 101 be placed in the scanning electron microscope, but also the metal electrode device 104 can be insulated and isolated from the sample stage 106 of the scanning electron microscope.

[0061] It should be noted that there are no restrictions on the shape and structure of the insulating bracket 103. It can be a rectangular block as Figure 1 shown, or a bracket structure or other structures, as long as it can stably support the metal electrode device 104 and ensure the effect of insulating and isolating the metal electrode device 104 from the sample stage 106 of the scanning electron microscope.

[0062] Specifically, as Figure 5 shown, in the scanning electron microscope charged particle signal filtering device provided in another embodiment of the present application, the energy-filtering sample stage 101 is placed inside the scanning electron microscope, and the sample placement stage 105 of the energy-filtering sample stage 101 is aligned with the emission port of the electron gun to bombard the sample on the sample placement stage 105 with the electron beam emitted by the electron gun.

[0063] The power supply 102 is placed outside the scanning electron microscope.

[0064] Optionally, in order to ensure that the inside of the scanning electron microscope is in a vacuum state and avoid bombarding the air, which may affect the results of component analysis. Figure 6 As shown, in the scanning electron microscope charged particle signal filtering device provided in another embodiment of the present application, it further includes:

[0065] A vacuum flange with a high-voltage feedthrough.

[0066] Among them, the vacuum flange with a high-voltage feedthrough is used to seal the opening on the scanning electron microscope where the energy-filtering sample stage 101 is placed inside the scanning electron microscope, and to make the inside of the scanning electron microscope in a vacuum state through the high-voltage feedthrough.

[0067] Optionally, the vacuum flange with a high-voltage feedthrough can be specifically as Figure 7 shown. It is provided with a high-voltage feedthrough at the center position of the flange. The high-voltage feedthrough can be connected to an external high-voltage model, so that the high-voltage module is connected to the inside of the scanning electron microscope through the high-voltage feedthrough to extract the air inside the scanning electron microscope. Therefore, when vacuum pumping is required, the high-voltage model works, and at this time, the high-voltage feedthrough inside the scanning electron microscope is connected to extract the air inside the scanning electron microscope. Moreover, the connection between the high-voltage feedthrough and the external high-voltage model can be detachable, which is convenient for installation and the like.

[0068] Therefore, when using the scanning electron microscope charged particle signal filtering device provided in the embodiment of the present application for sample component analysis, the sample is placed on the sample placement stage 105 in the energy-filtering sample stage 101. Then the energy-filtering sample stage 101 is placed inside the scanning electron microscope, and the sample placement stage 105 of the energy-filtering sample stage 101 is aligned with the emission port of the electron gun. And it is necessary to ensure that the power supply 102 outside the scanning electron microscope is connected to the metal electrode device 104 in the energy-filtering sample stage 101. Then use the vacuum flange with a high-voltage feedthrough to seal the opening on the scanning electron microscope where the energy-filtering sample stage 101 is placed inside the scanning electron microscope. Then turn on the high-voltage feedthrough to extract the air inside the scanning electron microscope through the high-voltage feedthrough, so that the inside of the scanning electron microscope is in a vacuum state. Then energize the metal electrode device 104 through the external power supply 102 to generate a corresponding magnetic field. Finally, the electron gun can be used to emit an electron beam to bombard the sample.

[0069] A charged particle signal filtering device for a scanning electron microscope provided by the present application includes an energy filtering sample stage 101 and a power supply 102. Among them, the energy filtering sample stage 101 includes an insulating bracket 103, a metal electrode device 104, and a sample placement stage 105. The metal electrode device 104 includes an annular metal electrode 1031 and a metal electrode rod 1032 that is connected to the annular metal electrode 1031 and is disposed at the central position of the annular metal electrode 1031; the sample placement stage 105 is disposed on the metal electrode rod 1032 and is used to place a sample that needs to be bombarded by an electron beam. Therefore, a device that generates a magnetic field and functions to filter charged particles is equivalent to a base installed at the bottom of the sample placement stage 105, rather than being installed on the detector, so that the distance between the detector and the sample will not be affected, and further, the detection efficiency and detection amount of the detector for X-ray signals will not be affected, avoiding affecting the results of component analysis. Moreover, the positive and negative poles of the output end of the power supply 102 are respectively connected to the annular metal electrode 1031 and the metal electrode rod 1032, forming an upward annular magnetic field from the annular metal electrode 1031 towards the metal electrode rod 1032, which can ensure that charged particles in all directions generated by the sample in the sample placement stage 105 at the center will fall into the formed annular magnetic field and, under the action of the annular magnetic field, move towards the center position and upward, so as not to bombard the detector and generate electron noise, thereby affecting the analysis results. Therefore, the accuracy of the analysis results can be effectively ensured. In addition, the metal electrode device 104 is disposed on the insulating bracket 103 to insulate and isolate the metal electrode device 104 from the sample stage 106 of the scanning electron microscope. The insulating bracket 103 is made of an insulating material and is disposed on the sample stage 106 of the scanning electron microscope to place the energy filtering sample stage 101 in the scanning electron microscope and insulate and isolate the metal electrode device 104 from the sample stage 106 of the scanning electron microscope. Thus, not only can this device be effectively placed in the scanning electron microscope for detection, but also the metal electrode device 104 is insulated and isolated from the sample stage 106 of the scanning electron microscope, avoiding affecting the operation of the scanning electron microscope and the magnetic field formed by the metal electrode device 104, so that accurate component analysis can be effectively ensured through the scanning electrode.

[0070] Those skilled in the art can further realize that the units and algorithm steps of each example described in combination with the embodiments disclosed herein can be implemented by electronic hardware, computer software, or a combination of the two. To clearly illustrate the interchangeability of hardware and software, the composition and steps of each example have been generally described according to functions in the above description. Whether these functions are executed in a hardware or software manner depends on the specific application and design constraints of the technical solution. Skilled professionals can use different methods to implement the described functions for each specific application, but such implementation should not be considered to exceed the scope of this application.

[0071] The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A scanning electron microscope charged particle signal filtering device, characterized in that: include: An energy filtering sample stage and a power supply; wherein the energy filtering sample stage comprises an insulating bracket, a metal electrode device and a sample placement stage; The metal electrode device comprises an annular metal electrode and a metal electrode rod connected to the annular metal electrode and arranged at the center of the annular metal electrode; The sample placement table is arranged on the metal electrode rod and is used for placing samples that need to be bombarded by electron beams; The positive electrode and the negative electrode of the output end of the power supply are connected to the annular metal electrode and the metal electrode rod respectively, so as to form an annular magnetic field from the annular metal electrode toward the metal electrode rod and upward; The metal electrode device is arranged on the insulating support to insulate and isolate the metal electrode device from the sample stage of the scanning electron microscope; The insulating bracket is made of insulating material and is arranged on the sample stage of the scanning electron microscope to place the energy filtering sample stage in the scanning electron microscope and to insulate and isolate the metal electrode device from the sample stage of the scanning electron microscope.

2. The scanning electron microscope charged particle signal filtering device according to claim 1, characterized in that: The insulating bracket is a bracket made of alumina ceramic material.

3. The scanning electron microscope charged particle signal filtering device according to claim 1, characterized in that: The negative pole of the power source is connected to the annular metal electrode, and the positive pole of the power source is connected to the metal electrode rod.

4. The scanning electron microscope charged particle signal filtering device according to claim 1, characterized in that: Also includes: transformer; The output end of the power supply is connected to the transformer, and the positive and negative electrodes of the output end of the power supply are respectively connected to the annular metal electrode and the metal electrode rod through the transformer, so as to adjust the magnitude of the bias voltage input to the metal electrode device through the transformer.

5. The scanning electron microscope charged particle signal filtering device according to claim 1, characterized in that: The power supply is a high voltage direct current power supply.

6. The scanning electron microscope charged particle signal filtering device according to claim 1, characterized in that: The metal electrode device is made of polished stainless steel.

7. The scanning electron microscope charged particle signal filtering device according to claim 1, characterized in that: The annular metal electrode is a metal cylinder with one end open, and the metal electrode rod is a metal rod made of the same material and fixedly connected to the bottom in the middle of the annular metal electrode.

8. The scanning electron microscope charged particle signal filtering device according to claim 1, characterized in that: The sample placement table is an aluminum sample placement table.

9. The scanning electron microscope charged particle signal filtering device according to claim 1, characterized in that: The energy filtering sample stage is placed inside the scanning electron microscope, and the sample placement platform of the energy filtering sample stage is aligned with the emission port of the electron gun so that the electron beam emitted by the electron gun bombards the sample on the sample placement platform; The power supply is placed outside the scanning electron microscope.

10. The scanning electron microscope charged particle signal filtering device according to claim 9, characterized in that: Also includes: A vacuum flange with a high-voltage feedthrough is used to close the opening on the scanning electron microscope for placing the energy filtering sample stage inside the scanning electron microscope, and to place the interior of the scanning electron microscope in a vacuum state through the high-voltage feedthrough.

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