Graphite boat transfer equipment and method thereof

Abstract

The invention discloses graphite boat circulation equipment and a graphite boat circulation method, and belongs to the technical field of graphite boat conveying. Graphite boats which are well processed are stacked up and down and placed in the same empty tray and conveyed to a boat logistics cooling unit through a main machine outlet channel, and the graphite boats on the upper layer and the lower layer are distributed to different cooling stations through graphite boat lifting tools; meanwhile, manual observation treatment is carried out after cooling, the silicon wafers are conveyed to a double-channel wafer inserting position of the boat wafer loading and unloading unit for loading and unloading the silicon wafers after manual observation treatment, the silicon wafers which are not subjected to the coating process are inserted into a graphite boat and then conveyed to an observation station through a lifting appliance for manual observation treatment, and then the silicon wafers are conveyed to a main machine through a main machine outlet channel for the coating process. According to the graphite boat transfer equipment and the graphite boat transfer method, the occupied area of the equipment can be reduced, the transmission and cooling process of battery pieces can be optimized, the shutdown time of the equipment can be shortened, and the overall production efficiency and the coating quality can be improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of graphite boat transportation, and particularly relates to a graphite boat turnover device and method. Background Art

[0002] In the field of solar cell production, automated equipment is increasingly widely used, especially in the coating process of solar cells. Currently, the mainstream coating equipment on the market is 6-tube coating equipment, and the mainstream loading capacity of each furnace tube is 768 Pcs. These devices automatically load solar cells onto a graphite boat carrier and then transfer them to high-temperature coating process equipment. After the process is completed, the automated equipment removes the processed solar cells and loads them into a flower basket, and at the same time loads unprocessed silicon wafers into the graphite boat to continue the coating process.

[0003] Although automated equipment has improved production efficiency, there are some limitations in the prior art. Currently, the automation of stacked boat coating usually requires two-stage turnover for transmission, cooling, and manual handling. First, the double-layer boat coming out of the processing machine passes through the first stage, and the gripper sequentially grabs the graphite boat to the cooling position. After cooling is completed, it is then transported to the second-stage conveying position and allocated to different wafer insertion positions for loading and unloading. This results in a longer floor space occupied by the equipment, and the time overlap of entering and exiting the main machine easily causes the equipment to stop operating. Summary of the Invention

[0004] In order to solve the above problems in the prior art, the present invention provides a graphite boat turnover device and method, which can reduce the floor space of the equipment, optimize the transmission and cooling processes of solar cells, reduce the equipment downtime, and improve the overall production efficiency and coating quality.

[0005] The technical solutions are as follows:

[0006] On the one hand, a graphite boat turnover device is provided, including a boat logistics cooling unit and a boat wafer loading and unloading unit.

[0007] The boat wafer loading and unloading unit includes a six-axis robot for wafer loading and unloading, a B wafer insertion channel, an A wafer insertion channel, and an observation channel (2-2).

[0008] The boat logistics cooling unit includes an inlet mainframe channel located on the lower layer, an outlet mainframe channel located on the lower layer, a circulation channel located on the lower layer, a cooling station located on the upper layer, a first observation station located on the upper layer, a second observation station located on the upper layer, a circulation channel located on the lower layer, and a graphite boat sling. The boat logistics cooling unit interacts with the mainframe through the inlet mainframe channel or the outlet mainframe channel. Boat supports are provided on the inlet mainframe channel, the circulation channel, and the outlet mainframe channel. Two layers of graphite boats stacked vertically can be loaded on the boat supports. The upper-layer graphite boat and the lower-layer graphite boat are transported to the cooling station, the first observation station, and the second observation station by the graphite boat sling. The outlet mainframe channel is used to receive the graphite boat loaded with processed silicon wafers flowing out from the mainframe. The inlet mainframe channel is used to transfer the graphite boat with unprocessed silicon wafers to the mainframe. The graphite boats on the circulation channel flow on the circulation channel, the A-insertion channel, and the observation channel respectively. After the silicon wafers are loaded and unloaded on the graphite boat on the A-insertion channel, they flow to the observation channel through the circulation channel for manual inspection of abnormalities. After no abnormalities are observed, they return to the circulation channel. The boat logistics cooling unit is docked with the boat wafer loading and unloading unit through the circulation channel, the inlet mainframe channel, and the outlet mainframe channel.

[0009] On the other hand, a graphite boat transfer method is provided, including the following steps:

[0010] S1: Transport a group of graphite boats with good coating process to the boat logistics cooling unit through the outlet mainframe channel. There are two layers of graphite boats stacked vertically on a group of graphite boats;

[0011] S2: Distribute the upper and lower layers of graphite boats to different cooling stations. After simultaneous cooling, the upper and lower layer graphite boats go to the corresponding observation stations for manual observation respectively;

[0012] S3: After manual observation and processing, it is transported to the double-insertion channel of the boat wafer loading and unloading unit for wafer loading and unloading. After inserting the uncoated silicon wafers into the graphite boat, it is transported to the mainframe through the inlet mainframe channel for coating process;

[0013] S4: Repeat steps S1 to S3 cyclically.

[0014] The technical solution at least includes the following technical effects:

[0015] The stacked boat group stacked vertically and transported out from the mainframe is transferred to different cooling stations of the boat logistics cooling unit for cooling. After the upper and lower layer graphite boats are cooled simultaneously, observation and processing are carried out. After manual processing, it is transported to the double-insertion position of the boat wafer loading and unloading unit for wafer loading and unloading. The operation is convenient and the floor area is smaller. The transfer and cooling processes of the battery wafers are optimized, the equipment downtime is reduced, and the overall production efficiency and coating quality are improved.

[0016] It should be understood that the above general description and the following detailed description are only exemplary and do not limit the present invention. Description of the Drawings

[0017] The accompanying drawings here are incorporated into the specification and form a part of this specification, showing embodiments in accordance with the present invention, and are used together with the specification to explain the principles of the present invention.

[0018] Figure 1 Schematic structural diagram of a boat coating device according to an exemplary embodiment of the present invention;

[0019] Figure 2 Schematic structural diagram of a boat coating device from another angle according to an exemplary embodiment of the present invention;

[0020] Figure 3 Timing diagram of a boat coating device according to an exemplary embodiment of the present invention;

[0021] Figure 4 Workflow diagram of a boat coating device according to an exemplary embodiment of the present invention;

[0022] Figure 5 Structural diagram of a boat coating device when exiting the main machine channel according to an exemplary embodiment of the present invention, with some components hidden;

[0023] Figure 6 Structural diagram of a boat coating device when exiting the main machine channel, being transported to the cooling station and then to the manual observation station according to an exemplary embodiment of the present invention, with some components hidden;

[0024] Figure 7 Structural diagram of a boat coating device when entering the main machine channel, being transported to the circulation channel and then to the A insertion channel according to an exemplary embodiment of the present invention, with some components hidden;

[0025] Figure 8 Structural diagram of a boat coating device when entering the main machine channel and being transported to the B insertion channel according to an exemplary embodiment of the present invention, with some components hidden;

[0026] Figure 9 Structural diagram of a boat coating device when being transported from the circulation channel to the observation channel according to an exemplary embodiment of the present invention, with some components hidden;

[0027] Explanation of reference numerals:

[0028] 1. Boat Logistics Cooling Unit; 1-1. Fan; 1-2. Graphite Boat Hoist; 1-3. First Cooling Station; 1-4. Second Cooling Station; 1-5. Third Cooling Station; 1-6. Fourth Cooling Station; 1-7. Buffer Station; 1-8. First Observation Station; 1-9. Second Observation Station; 1-10. Inlet to Main Machine Channel; 1-11. Outlet from Main Machine Channel; 1-12. Circulation Channel; 2. Boat Loading and Unloading Chip Unit; 2-1. Six-axis Robot; 2-2. Observation Channel; 2-3. B Chip Insertion Channel; 2-4. A Chip Insertion Channel; 3. Graphite Boat; 4. Boat Support. Detailed Implementation Manner

[0029] Here, the exemplary embodiments will be described in detail, and the examples are shown in the drawings. When the following description refers to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The implementation manners described in the following exemplary embodiments do not represent all implementation manners consistent with the present invention. On the contrary, they are merely examples of devices and methods consistent with some aspects of the present invention as detailed in the appended claims.

[0030] Embodiment 1:

[0031] As shown in the attached Figure 1 and Figure 2 figures, an embodiment of the present invention provides a graphite boat transfer device, including a boat logistics cooling unit 1 and a boat loading and unloading chip unit 2. The boat logistics cooling unit 1 is docked with the boat loading and unloading chip unit 2 through a circulation channel 1-12, an inlet to the main machine channel 1-11, and an outlet from the main machine channel 1-10.

[0032] The boat loading and unloading chip unit 2 includes a six-axis robot 2-1 for loading and unloading chips, a B chip insertion channel 2-3, an A chip insertion channel 2-4, and an observation channel 2-2;

[0033] The boat logistics cooling unit 1 includes an inlet mainframe channel 1-11 located on the lower layer, an outlet mainframe channel 1-10 located on the lower layer, a circulation channel 1-12 located on the lower layer, a cooling station located on the upper layer, a first observation station 1-8 located on the upper layer, a second observation station 1-9 located on the upper layer, a circulation channel 1-12 located on the lower layer, and a graphite boat sling 1-2. The boat logistics cooling unit 1 interacts with the mainframe through the inlet mainframe channel 1-11 or the outlet mainframe channel 1-10. Boat supports 4 are provided on the inlet mainframe channel 1-11, the circulation channel 1-12, and the outlet mainframe channel 1-10. Two layers of graphite boats stacked vertically can be loaded on the boat support 4. The upper graphite boat and the lower graphite boat are transported to the cooling station, the first observation station 1-8, and the second observation station 1-9 by the graphite boat sling 1-2. The outlet mainframe channel 1-10 is used to receive the graphite boat loaded with processed silicon wafers flowing out from the mainframe, and the inlet mainframe channel 1-11 is used to transfer the unprocessed graphite boat to the mainframe. The graphite boats on the circulation channel 1-12 flow on the circulation channel 1-12, the A-insertion channel 2-4, and the observation channel 2-2 respectively. After the silicon wafers are loaded and unloaded on the graphite boat on the A-insertion channel 2-4, it flows to the observation channel 2-2 through the circulation channel 1-12 for manual observation of abnormalities. After no abnormalities are observed, it returns to the circulation channel 1-12 again.

[0034] The boat support 3 is made of metal material. Preferably, the boat support 3 is made of a material composed of stainless steel and aluminum.

[0035] This equipment overlaps the manual observation positions when entering and leaving the mainframe, overlapping at different time periods; at most four groups of graphite boats can be cached inside the mainframe, and two layers of graphite boats stacked vertically can be loaded on each group of graphite boats, with a maximum of eight graphite boats cached, which can leave a certain caching time for automation, eliminating the production capacity loss caused by the interaction time between the mainframe and automation. The equipment is easy to operate and occupies less floor space. Silicon wafers 5 are loaded on the graphite boat 3. A belt is provided on the runway, and the boat support is driven to move on the runway through the belt. The graphite boat sling 1-2 is provided with claws to carry the graphite boat.

[0036] The cooling station includes a first cooling station 1-3 located on the upper layer, a second cooling station 1-4 located on the upper layer, a third cooling station 1-5 located in the middle layer, and a fourth cooling station 1-6 located in the middle layer. Fans 1-1 are provided at the cooling station. The fans 1-1 are connected to the power output end of the motor, and the fans 1-1 are driven by the motor to move on the runway. The fans 1-1 at the cooling positions can move; actually, there are 3 caching positions, two cooling positions and a separate caching position.

[0037] The first observation station 1-8 on the upper layer and the second observation station 1-9 on the upper layer are horizontally moved on the runway by motor drive. The first observation station 1-8 can move along the direction of the boat loading and unloading unit. The cooled graphite boat is manually observed and processed for abnormalities at the first observation station 1-8 on the upper layer and the second observation station 1-9 on the upper layer. The unprocessed graphite boat about to enter the main machine is manually observed and processed for abnormalities on the observation channel 2-2 on the lower layer and the main machine inlet channel 1-11. The upper layer graphite boat and the boat support 4 on the observation channel 2-2 on the lower layer are transferred to the circulation channel 1-12. The upper layer graphite boat in the circulation channel 1-12 is transported and stacked on the lower layer graphite boat on the main machine inlet channel 1-11 by the graphite boat lifting tool 1-2, and then enters the main machine through the main machine inlet channel 1-11 for circulation.

[0038] Embodiment 2:

[0039] As Figure 3 and Figure 4 shown, the embodiment of the present invention provides a graphite boat circulation method, and the specific process is as follows:

[0040] S1: The first group of graphite boats is transported from the main machine to the boat logistics cooling unit 1 through the main machine outlet channel 1-10;

[0041] A group of graphite boats with good coating process is transported to the boat logistics cooling unit 1 through the main machine outlet channel 1-10. There are two layers of graphite boats stacked on top of each other on the tray. The main machine outlet channel 1-10 is translated from the rightmost side to the middle position.

[0042] S2: The upper and lower graphite boats are distributed to different cooling stations. After simultaneous cooling, the upper and lower graphite boats go to the corresponding observation stations respectively for manual observation and processing;

[0043] The two graphite boats are transported separately. The upper graphite boat (attached Figure 3 with a1 in Figure 3 ) is first moved to the cooling station by the graphite boat lifting tool and placed in any one of the four cooling stations for cooling (attached Figure 3 with cooling A1 in Figure 3 ). After the gripper returns to the lower graphite boat, the lower graphite boat (attached Figure 3 with b1 in Figure 3 ) is transported to any one of the remaining three cooling stations for cooling (attached Figure 3 with cooling B1 inFigure 3 Observation 1) in it, observe for 2 minutes. The graphite boat in the lower layer (attached Figure 3 b1) in it is transported back to the main machine exit channels 1 - 10. Before that, on the runway where the boat carrier of the first group moves the boat logistics cooling platform to dock with the boat loading and unloading platform, the boat carrier of the second group of graphite boats enters the main machine exit channels 1 - 10. Place the graphite boat that has been observed manually on this boat carrier. The observed graphite boat is transferred from the main machine exit channels 1 - 10 to the boat loading and unloading wafer platform;

[0044] S3: After manual observation and processing, it is transferred to the double - channel wafer insertion position of the boat loading and unloading wafer unit 2 for wafer loading and unloading. Insert the wafers without coating process into the graphite boat and then transfer them to the main machine through the main machine entrance channel 1 - 11 for coating process;

[0045] First, insert wafers into the lower - layer graphite boat. Insert an unprocessed wafer for each processed wafer for loading and unloading. At this time, the upper - layer graphite boat is at the buffer station 1 - 7. The upper - layer graphite boat is transported to the circulation channel 1 - 12 by the graphite boat hoist 1 - 2, and then transferred to the A wafer insertion channel 2 - 4 through the belt in the circulation channel 1 - 12. After the lower - layer graphite boat is inserted, it is transferred to the main machine entrance channel 1 - 11. After the upper - layer graphite boat is inserted with wafers, it returns to the circulation channel 1 - 12. The circulation channel 1 - 12 then goes to the observation channel 2 - 2 for manual observation of the upper - layer and lower - layer graphite boats. The upper - layer graphite boat returns to the circulation channel 1 - 12, and the upper - layer and lower - layer graphite boats are combined and transferred to the main machine entrance channel 1 - 11, and then transferred to the main machine through the main machine entrance channel 1 - 11 for coating process.

[0046] The upper - layer graphite boat and the boat carrier 4 on the observation channel 2 - 2 in the lower layer are transferred to the circulation channel 1 - 12. The upper - layer graphite boat in the circulation channel 1 - 12 is transported by the graphite boat hoist 1 - 2 and stacked on the lower - layer graphite boat on the main machine entrance channel 1 - 11, and then enters the main machine through the main machine entrance channel 1 - 11.

[0047] S4: Repeat steps S1 to S3 in a loop.

[0048] The entire cycle time is less than 35 minutes. The entire cycle of the first group of graphite boats ends, and then the second group of graphite boats repeats the actions of the first group of graphite boats. At this time, the third group comes in, and then the same loop steps S1 to S3 are repeated.

[0049] As Figures 5 - 9As shown, the graphite boats loaded with processed silicon wafers on the host channels 1-10 are transferred out of the host, and the graphite boats with unprocessed silicon wafers are transferred to the host on the incoming host channel 1-11. The graphite boats on the circulation channel 1-12 are circulated on the circulation channel 1-12, the A-insertion channel 2-4, and the observation channel 2-2 respectively. After the silicon wafers are loaded and unloaded on the graphite boats on the A-insertion channel 2-4, they are transferred to the observation channel 2-2 through the circulation channel 1-12 for manual observation of abnormalities. After no abnormalities are observed, they return to the circulation channel 1-12 again.

[0050] The automated equipment of the embodiment of the present application is equipped with a host for the double-sided silicon nitride passivation coating process of battery wafers. The stacking boat coating process host equipment can place two graphite boats in a single furnace tube, and there are a total of four furnace tubes. The silicon wafers are inserted into the graphite boat slots, and the total wafer loading capacity is 1224 Pcs. The stacked boat groups conveyed from the host are stacked up and down, cooled by a single-stage boat circulation device, and then distributed to different insertion channels for wafer loading and unloading. At the same time, the double-sided robot for wafer loading and unloading has two working positions, one in use and one in reserve, so there will be no situation of downtime waiting for materials.

[0051] In the boat logistics cooling unit, the graphite boats are distributed to different cooling platforms through graphite boat lifting tools, and after cooling, manual observation and processing are carried out. After the manual observation and processing are completed, they are transferred to the double-channel insertion position for wafer loading and unloading. After completion, they are transferred and conveyed by the lifting tool to the observation position for manual observation and processing again. After completion, they are transferred to the host for the coating process.

[0052] It should be noted that the terms "first, second, third, and fourth" involved in the embodiments of the present application are only used to distinguish similar objects and do not represent a specific order for the objects. It can be understood that "first, second, third, and fourth" can be interchanged with a specific order or sequence under allowable circumstances. It should be understood that the objects distinguished by "first, second, third, and fourth" can be interchanged under appropriate circumstances so that the embodiments of the present application described here can be implemented in an order other than those illustrated or described here.

[0053] Those skilled in the art will readily think of other embodiments of the present invention after considering the specification and practicing the invention here. The present invention is intended to cover any variations, uses, or adaptations of the present invention, which follow the general principles of the present invention and include the common general knowledge or conventional technical means in the technical field of the present invention that the present invention has not invented. The specification and embodiments are only regarded as exemplary, and the true scope and spirit of the present invention are pointed out by the appended claims.

[0054] It should be understood that the present invention is not limited to the exact structure described above and shown in the drawings, and various modifications and changes can be made without departing from its scope. The scope of the present invention is only limited by the appended claims.

Claims

1. A graphite boat circulation device, characterized in that: It comprises a boat logistics cooling unit (1) and a boat loading and unloading unit (2), The boat loading and unloading unit (2) comprises a six-axis robot (2-1) for loading and unloading films, a B film insertion channel (2-3), an A film insertion channel (2-4) and an observation channel (2-2); The boat logistics cooling unit (1) comprises a main engine inlet channel (1-11) located at the lower layer, a main engine outlet channel (1-10) located at the lower layer, a circulation channel (1-12) located at the lower layer, two cooling stations located at the upper layer, two cooling stations located at the middle layer, a first observation station (1-8) located at the upper layer, a second observation station (1-9) located at the upper layer, a circulation channel (1-12) located at the lower layer, and a graphite boat hanger (1-2). The boat logistics cooling unit (1) interacts with the main engine through the main engine inlet channel (1-11) or the main engine outlet channel (1-10). The main engine inlet channel (1-11), the circulation channel (1-12), and the main engine outlet channel (1-10) are provided with a boat support (4). The boat support (4) can be loaded with two layers of graphite boats stacked up and down. The upper graphite boat and the lower graphite boat are connected by the graphite boat hanger (1-2 ) are transported to the cooling station, the first observation station (1-8), and the second observation station (1-9); the main engine exit channel (1-10) is used to receive the processed graphite boats transferred from the main engine; the main engine entry channel (1-11) is used to transfer the unprocessed graphite boats to the main engine; the graphite boats on the circulation channel (1-12) are respectively transferred on the circulation channel (1-12), the A insert channel (2-4), and the observation channel (2-2); after the loading and unloading of silicon wafers on the A insert channel (2-4) is completed, the graphite boat is transferred to the observation channel (2-2) through the circulation channel (1-12) for manual observation of abnormalities; after observation of no abnormalities, it returns to the circulation channel (1-12); the boat logistics cooling unit (1) is connected to the boat loading and unloading unit (2) through the circulation channel (1-12), the main engine entry channel (1-11), and the main engine exit channel (1-10).

2. The graphite boat circulation equipment according to claim 1, characterized in that: The host can cache up to 4 groups of graphite boats, each group of graphite boats can be loaded with two layers of graphite boats stacked up and down, and can cache up to 8 graphite boats (3).

3. The graphite boat circulation equipment according to claim 1, characterized in that: A belt is provided on the runway, and the boat support (4) is driven by the belt to move on the runway.

4. The graphite boat circulation equipment according to claim 1, characterized in that: The boat support (4) is made of stainless steel and aluminum.

5. The graphite boat circulation equipment according to claim 1, characterized in that: The graphite boat sling (1-2) is provided with a gripping claw.

6. The graphite boat circulation equipment according to claim 1, characterized in that: The cooling station is provided with a fan (1-1), which is connected to the power output end of the motor and is driven by the motor to move on the runway.

7. The graphite boat circulation equipment according to claim 1, characterized in that: The first observation station (1-8) and the second observation station (1-9) are driven by a motor to move horizontally on the runway, and the first observation station (1-8) can move along the direction of the boat loading and unloading unit.

8. A graphite boat circulation method, applied to the graphite boat circulation device according to claim 1, characterized in that: include, S1: transporting a group of graphite boats that have been coated to a boat flow cooling unit (1) through a main engine outlet channel (1-10), wherein the group of graphite boats is provided with two layers of graphite boats stacked up and down; S2: The upper and lower graphite boats are assigned to different cooling stations. After cooling, the upper and lower graphite boats are respectively sent to corresponding observation stations for manual observation; S3: After manual observation and processing, the wafers are transferred to the double insertion channel of the boat loading and unloading unit (2) for loading and unloading of silicon wafers. The silicon wafers that have not been coated are inserted into the graphite boat and then transferred to the main machine through the main machine inlet channel (1-11) for coating process; S4: Execute steps S1 to S3 in a loop.

9. The graphite boat circulation method according to claim 8, characterized in that: Step S3 also includes: inserting silicon wafers into the lower graphite boat first, and placing the upper graphite boat on the buffer station; transporting the upper graphite boat to the circulation channel (1-12) through a graphite boat sling (1-2); manually observing and processing abnormalities of the cooled graphite boat at the first observation station (1-8) and the second observation station (1-9) located on the upper layer; and manually observing and processing abnormalities of the unprocessed graphite boat entering the main machine at the observation channel (2-2) and the main machine entry channel (1-11) located on the lower layer; the upper graphite boat and the boat support (4) on the observation channel (2-2) located on the lower layer are transferred to the circulation channel (1-12); the upper graphite boat on the circulation channel (1-12) is transported and stacked on the lower graphite boat on the main machine entry channel (1-11) by the graphite boat sling (1-2); and then transferred to the main machine through the main machine entry channel (1-11).

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