Spraying tool

Abstract

The invention provides a spraying tool, and relates to the field of semiconductor manufacturing. The spraying tool comprises a first tool assembly and a second tool assembly, wherein the first tool assembly is arranged on the top of the cavity part in the vertical direction; the first tool comprises an annular body, and the second surface of the annular body abuts against the upper surface of the cavity part. The annular body is provided with a first center hole. The hole wall of the first central hole is configured to be coplanar with the hole wall of the central hole of the chamber piece, so that the annular body shields the shielding area of the chamber piece. The spraying tool provided by the invention can be directly arranged on the cavity piece to shield the shielding area of the cavity piece, adhesive tape pasting is not needed, the replicability is high, the consistency of spraying areas on multiple batches of products can be improved, and automatic production lines are facilitated.

Description

Technical Field

[0001] Exemplary embodiments of the present disclosure relate generally to the field of semiconductor manufacturing, and more particularly to spray coating tools. Background Art

[0002] The top seat and the base of the semiconductor heat treatment equipment have a central hole for accommodating a heating device, and the hole wall of the central hole often needs to be sprayed with a heat-absorbing coating. In the related art, tape is pasted on the area that does not need spraying, and the tape is removed after spraying. However, the method of pasting tape will result in residual tape on the top seat and the base after removing the tape. In addition, the method of pasting tape has low precision, and it is difficult to ensure the consistency of the spraying area on multiple batches of products. Summary of the invention

[0003] The disclosed embodiment provides a spraying tool, comprising: a first tool assembly, arranged vertically at the top of a chamber part in a semiconductor process equipment; the vertical direction is the axial direction of the chamber part; the first tool assembly comprises: an annular body, having a first surface and a second surface arranged opposite to each other in the vertical direction, the first surface being located above the second surface, and the second surface being used to abut against the upper surface of the chamber part. The annular body also has a first central hole; in the vertical direction, the hole wall of the first central hole is configured to be coplanar with the hole wall of the central hole of the chamber part, so that the annular body shields the shielding area of ​​the chamber part; wherein the chamber part includes a shielding area and a spraying area; the shielding area at least includes the upper surface of the chamber part.

[0004] The disclosed embodiment configures an annular body to be connected to the upper surface of the chamber part, which can, on the one hand, shield the upper surface of the chamber part to prevent the upper surface of the chamber part from being sprayed; on the other hand, the hole wall of the first center hole can block the heat-absorbing material splashed during spraying, and prevent the heat-absorbing material from being discharged from above the first center hole and splashing onto other shielded areas of the chamber part; on the other hand, by directly configuring the first tooling component on the chamber part without the need for tape, it has strong reproducibility, can improve the consistency of the spraying area on multiple batches of products, and is conducive to automated production lines.

[0005] In some embodiments, the first tooling assembly further includes a fixing member and a mounting member; the fixing member is connected to the outer side wall of the annular body; the first end of the mounting member is used to connect to the chamber member, and the second end of the mounting member is connected to the fixing member, so as to provide a first pre-tightening force through the mounting member to make the annular body and the chamber member fit together.

[0006] In some embodiments, at least two fixing members are provided, and the at least two fixing members are evenly distributed around the periphery of the annular body; at least two mounting members are provided, and the two mounting members correspond one-to-one to the two fixing members respectively.

[0007] In some embodiments, the fixing member is plate-shaped; the mounting member includes at least a pressing portion and a driving portion; the bottom of the driving portion is used to connect with the chamber member, and the output end of the driving portion is connected to the pressing portion; the driving portion is used to drive the pressing portion to move downward so that the pressing portion presses the fixing member and the chamber member.

[0008] In some embodiments, the first tooling assembly also includes an enclosure member, which has a first end and a second end arranged vertically at intervals, the first end is located below the second end, and the first end of the enclosure member is connected to the first surface of the annular body; the enclosure member has a second center hole connected to the first center hole, and the hole wall of the second center hole is used to shield the shielding area together with the hole wall of the first center hole.

[0009] In some embodiments, a connecting portion is disposed on the first surface of the annular body; and a docking portion adapted to the connecting portion is at least disposed on the first end of the enclosure, and the docking portion is detachably connected to the connecting portion.

[0010] In some embodiments, the connecting portion at least includes a groove arranged along the circumference of the annular body; the docking portion at least includes a protrusion that cooperates with the groove; or, the connecting portion at least includes a groove arranged along the circumference of the annular body; the end of the first end of the enclosure forms the docking portion, and the end of the first end of the enclosure is inserted into the groove.

[0011] In some embodiments, the first tooling assembly further includes a plurality of limit members, which are evenly arranged on the outer wall of the annular body along the circumference of the annular body, and a limit portion is arranged on the limit member; in the vertical direction, the limit portion is configured to be coaxial with the positioning portion on the chamber member.

[0012] In some embodiments, the limiting portion includes a first opening disposed on the limiting member, and a positioning pin detachably connected to the first opening; the positioning portion includes a second opening; and along the vertical direction, the positioning pin passes through the first opening and is inserted into the second opening.

[0013] In some embodiments, the spraying tool further includes: a second tool assembly, which is vertically arranged at the bottom of the chamber of the semiconductor process equipment; the second tool assembly includes:

[0014] Two baffle members are arranged opposite to each other along a first direction, and two connecting members are arranged opposite to each other along a second direction; both ends of each baffle member are respectively connected to the two connecting members to form a third center hole between the two baffle members and the two connecting members, and the third center hole is connected to the first center hole; wherein the first direction is perpendicular to the second direction; and the vertical direction is perpendicular to the plane formed by the first direction and the second direction.

[0015] Among them, the baffle member is used to abut against the hole wall of a part of the central hole of the chamber member, so that the hole wall of the central hole of the chamber member located between the baffle member and the annular body forms a first sub-spraying area; the connecting member is used to abut against the lower surface of the chamber member, so that the hole wall of the central hole of the chamber member located between the connecting member and the annular body forms a second sub-spraying area; the spraying area includes at least the first sub-spraying area and the second sub-spraying area.

[0016] In some embodiments, a mounting portion is disposed on the baffle member, and the mounting portion is used to provide a second pre-tightening force to make the baffle member abut against the hole wall of the central hole of the chamber member.

[0017] In some embodiments, the mounting portion includes a nut disposed on the baffle member, and a screw cooperating with the nut, wherein the head of the screw abuts against a side of the chamber member facing away from the baffle member; the screw rod of the screw passes through the chamber member and is connected to the nut.

[0018] In some embodiments, the second tooling assembly includes at least three positioning members, wherein the three positioning members are respectively arranged near the three vertices of a preset triangle; the positioning members are connected to the baffle member and / or the connecting member; and the positioning members are used to be inserted into the slot at the bottom of the chamber member.

[0019] In some embodiments, the positioning member is columnar, and the positioning member includes multiple sheet metal plates, which are connected in sequence along the circumference of the slot hole so that the multiple sheet metal plates surround a filling space; the second tooling assembly also includes a filling member, which is arranged in the filling space to provide a third pre-tightening force to make the sheet metal plate adhere to the hole wall of the slot hole.

[0020] In some embodiments, the filling member includes at least one of a wedge and an air bag.

[0021] In some embodiments, the second tooling assembly also includes a reinforcement piece, which is disposed between two baffle pieces or between two connecting pieces; the reinforcement piece is provided with an axial hole, which is coaxial with the chamber piece, and the axial hole is used to connect with a rotating shaft in the semiconductor spraying process, so as to drive the spraying tooling and the chamber piece to rotate synchronously with the rotating shaft as the center axis through the rotating shaft.

[0022] It should be understood that the contents described in the summary of the invention are not intended to limit the key or important features of the embodiments of the present disclosure, nor are they intended to limit the scope of the present disclosure. Other features of the present disclosure will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The above and other features, advantages and aspects of the embodiments of the present disclosure will become more apparent with reference to the following detailed description in conjunction with the accompanying drawings. In the accompanying drawings, the same or similar reference numerals represent the same or similar elements, wherein:

[0024] Figure 1is a structural schematic diagram of an upper tooling assembly according to an embodiment of the present disclosure;

[0025] Figure 2 is a schematic structural diagram of a lower tooling assembly according to an embodiment of the present disclosure;

[0026] Figure 3 is a schematic structural diagram of a spraying tool according to an embodiment of the present disclosure;

[0027] Figure 4 Yes, schematic diagram of the structure of the chamber parts;

[0028] Figure 5 It is a structural schematic diagram of the coordination between the spraying tooling and the chamber parts from the first perspective;

[0029] Figure 6 It is a structural schematic diagram of the coordination between the spraying tooling and the chamber parts from a second perspective.

[0030] Description of reference numerals:

[0031] 1000: spraying tooling;

[0032] 1100: first tooling assembly;

[0033] 1110: annular body;

[0034] 1111: first center hole;

[0035] 1120: fixings;

[0036] 1121: Mounting parts;

[0037] 1130: enclosure;

[0038] 1131: second center hole;

[0039] 1140: limiter;

[0040] 1141: limit part;

[0041] 1200: second tooling assembly;

[0042] 1211: baffle member;

[0043] 1212: Connector;

[0044] 1213: Installation department;

[0045] 1214: third center hole;

[0046] 1220: positioning piece;

[0047] 1230: reinforcement;

[0048] 1231: shaft hole;

[0049] 2000: Chamber parts;

[0050] 2100: spraying area;

[0051] 2200: positioning unit;

[0052] 2300: Shielded area. DETAILED DESCRIPTION

[0053] The following is a description of exemplary embodiments of the present disclosure in conjunction with the accompanying drawings, including various details of the embodiments of the present disclosure to facilitate understanding, which should be considered as merely exemplary. Therefore, it should be recognized by those of ordinary skill in the art that various changes and modifications may be made to the embodiments described herein without departing from the scope and spirit of the present disclosure. Similarly, for the sake of clarity and conciseness, descriptions of well-known functions and structures are omitted in the following description.

[0054] like Figures 1 to 3 , Figure 5 , Figure 6 As shown, the present disclosure provides a spraying tool 1000, including: a first tool component 1100, which is vertically arranged on the top of a chamber part 2000 in a semiconductor process treatment equipment; the vertical direction is the axial direction of the chamber part 2000; the first tool includes: an annular body 1110, which has a first surface and a second surface that are relatively arranged in the vertical direction, the first surface is located above the second surface, and the second surface is used to abut against the upper surface of the chamber part 2000.

[0055] The annular body 1110 also has a first center hole 1111; in the vertical direction, the hole wall of the first center hole 1111 is configured to be coplanar with the hole wall of the center hole of the chamber part 2000, so that the annular body 1110 shields the shielding area 2300 of the chamber part 2000; wherein the chamber part 2000 includes the shielding area 2300 and the spraying area 2100; the shielding area 2300 includes at least the upper surface of the chamber part 2000.

[0056] The semiconductor process equipment is a device for processing semiconductor parts (such as wafers) during the semiconductor manufacturing process. For example, the semiconductor process equipment can be a rapid thermal processing equipment for performing rapid thermal processing of semiconductor parts. The chamber part 2000 in the semiconductor process equipment can be a top seat or a base of the rapid thermal processing equipment; taking the top seat as an example, Figure 4 As shown, the top seat can be roughly a plate-like structure, and the top seat is usually provided with a center hole for accommodating a light box; when implementing rapid heat treatment of semiconductor components, the light box rapidly heats the semiconductor components; after the rapid heat treatment, in order to allow the semiconductor components to cool rapidly, the heat absorbing coating on the top seat needs to absorb the heat in the rapid heat treatment equipment and the heat of the light box to achieve the purpose of rapid cooling.

[0057] The heat absorbing coating can be formed by spraying the heat absorbing material on the chamber part 2000. The heat absorbing material can be sprayed on different areas of the chamber part 2000. Generally speaking, a part of the chamber part 2000 needs to be sprayed with the heat absorbing material, and another part does not need to be sprayed with the heat absorbing material. Figure 4 As shown, the chamber part 2000 may include a spraying area 2100 where a heat-absorbing coating needs to be formed (i.e., a heat-absorbing material needs to be sprayed), and a shielding area 2300 where a heat-absorbing coating does not need to be formed (i.e., no heat-absorbing material needs to be sprayed); the spraying area 2100 may include a portion of the hole wall of the center hole of the chamber part 2000; the shielding area 2300 may include another portion of the hole wall of the center hole of the chamber part 2000, the upper surface of the chamber part 2000, the lower surface of the chamber part 2000, and other areas on the chamber part 2000 for connecting with processing equipment.

[0058] The spraying tool 1000 is a component used to shield the shielding area 2300. When the chamber part 2000 is sprayed with heat absorbing material, the heat absorbing coating can be prevented from being sprayed on the shielding area 2300. For the sake of convenience in description, this embodiment takes the axial direction of the chamber part 2000 as the vertical direction (i.e., the up and down direction) of the spraying tool 1000, the gravity direction as the bottom (or bottom), and the direction opposite to the gravity direction as the top (or top). Figure 3 The first direction can be Figure 2 The direction indicated by the arrow x, the second direction is Figure 2 The direction indicated by the arrow y.

[0059] The first tooling assembly 1100 is a structure disposed on the top of the chamber member 2000, and is used to shield the shielding area 2300 on the top of the chamber member 2000. For example, it is used to shield the upper surface of the chamber member 2000, or to shield the upper surface of the chamber member 2000 and other areas on the top of the chamber member 2000 for connecting with processing equipment.

[0060] The ring body 1110 may be in the shape of a circular ring or a rectangular ring. Figure 1 As described above, the annular body 1110 is a rounded rectangular ring, and its specific shape can also be configured according to the shape of the upper surface of the chamber part 2000. The annular body 1110 has a first surface located at the top and a second surface located at the bottom in the vertical direction; the second surface of the annular body 1110 is fitted and connected with the upper surface of the chamber part 2000, so as to cover the upper surface of the chamber part 2000 and prevent the upper surface of the chamber part 2000 from being sprayed with heat-absorbing materials. The area of ​​the second surface can be adjusted according to the area of ​​the upper surface of the chamber part 2000. In one example, the area of ​​the second surface is consistent with the area of ​​the upper surface of the chamber part 2000. When the annular body 1110 is connected with the chamber part 2000, the annular body 1110 can completely cover the upper surface of the chamber part 2000.

[0061] The annular body 1110 has a first central hole 1111, and the shape of the first central hole 1111 can be circular, rectangular, or other shapes consistent with the central hole of the chamber member 2000. The first central hole 1111 is located above the central hole of the chamber member 2000 and is connected to the central hole of the chamber member 2000. When spraying the heat absorbing material, the spraying equipment can extend into the central hole of the chamber member 2000 through the first central hole 1111 to perform spraying.

[0062] The size of the first center hole 1111 is the same as that of the center hole of the chamber part 2000. When the annular body 1110 is connected to the chamber part 2000, the hole wall of the first center hole 1111 is coplanar with the hole wall of the center hole of the chamber part 2000. It can be understood that when the annular body 1110 is arranged in the chamber part 2000, the hole wall of the first center hole 1111 is seamlessly fitted with the hole wall of the center hole of the chamber part 2000, so that the second surface of the annular body 1110 is fitted and connected with the upper surface of the chamber part 2000, so as to prevent the upper surface of the chamber part 2000 from being sprayed with heat absorbing material.

[0063] The vertical dimension of the hole wall of the first central hole 1111, that is, the vertical distance from the first surface to the second surface of the annular body 1110, can be set according to the process.

[0064] The embodiment of the present disclosure configures an annular body 1110 to be connected to the upper surface of the chamber part 2000. On the one hand, it can shield the upper surface of the chamber part 2000 to prevent the upper surface of the chamber part 2000 from being sprayed; on the other hand, the hole wall of the first center hole 1111 can block the heat-absorbing material splashed during spraying, and prevent the heat-absorbing material from being discharged from above the first center hole 1111 and splashing onto other shielding areas 2300 of the chamber part 2000; on the other hand, by directly configuring the first tooling assembly 1100 on the chamber part 2000 without the need for tape, it has strong reproducibility, can improve the consistency of the spraying area 2100 on multiple batches of products, and is conducive to automated production lines.

[0065] In some embodiments, Figure 1 , Figure 5 , Figure 6 As shown, the first tooling assembly 1100 also includes a fixing member 1120 and a mounting member 1121; the fixing member 1120 is connected to the outer wall of the annular body 1110; the first end of the mounting member 1121 is used to connect to the chamber member 2000, and the second end of the mounting member 1121 is connected to the fixing member 1120, so as to provide a first pre-tightening force through the mounting member 1121 to make the annular body 1110 and the chamber member 2000 fit together.

[0066] It can be understood that the fixing member 1120 is relatively located at the top of the chamber member 2000. The fixing member 1120 can be in a plate shape, a block shape, or other shapes. The position of the fixing member 1120 on the outer side wall of the annular body 1110 can be set according to the number of the fixing members 1120. In some examples, there can be multiple fixing members 1120, and the multiple fixing members 1120 can be evenly arranged or symmetrically arranged along the circumference of the annular body 1110. In another example, the fixing member 1120 can be an annular body, and the inner wall of the annular fixing member 1120 is connected to the outer side wall of the annular body 1110.

[0067] The fixing member 1120 and the annular body 1110 may be an integral piece; or, the fixing member 1120 and the annular body 1110 may be two independent pieces connected to each other, and the connection method between the fixing member 1120 and the outer side wall of the annular body 1110 is no longer limited.

[0068] The mounting member 1121 can be understood as a structure for connecting the annular body 1110 to the chamber member 2000. The mounting member 1121 is disposed between the fixing member 1120 and the chamber member 2000, and the annular body 1110 can be closely connected to the chamber member 2000 by adjusting the mounting member 1121. The mounting member 1121 can be an electric adjustment mechanism, a pneumatic adjustment mechanism, or a manual adjustment mechanism, without limitation.

[0069] The cooperation between the mounting member 1121 and the fixing member 1120 may adopt the cooperation between a screw and a nut or a threaded hole. For example, in one example, the fixing member 1120 may be provided with a threaded hole, and the mounting member 1121 may be a screw, the head of the screw abuts against the bottom of the chamber member 2000, and the screw shaft of the screw is provided with a threaded section adapted to the threaded hole, and the threaded section of the screw passes through the chamber member 2000 and is connected to the threaded hole of the fixing member 1120. By rotating the screw, a first pre-tightening force is formed between the screw head and the threaded hole. In another example, the chamber member 2000 may be provided with a threaded hole, and the mounting member 1121 may be a screw, the head of the screw abuts against the upper surface of the fixing member 1120, and the screw shaft of the screw passes through the fixing member 1120 and cooperates with the threaded hole of the chamber member 2000. By rotating the screw, a first pre-tightening force is formed between the screw head and the nut.

[0070] There can be various connection positions of the mounting member 1121 relative to the fixing member 1120 . For example, the mounting member 1121 can be connected to a position relative to the middle area of ​​the fixing member 1120 , or a plurality of mounting members 1121 can be evenly connected to the fixing member 1120 .

[0071] The corresponding relationship between the number of mounting members 1121 and the fixing members 1120 can be set according to the process requirements. For example, in some embodiments, at least two fixing members 1120 are provided, and at least two fixing members 1120 are evenly distributed around the periphery of the annular body 1110; at least two mounting members 1121 are provided, and the two mounting members 1121 correspond to the two fixing members 1120 one by one, so as to improve the uniformity of the force on the annular body 1110 and avoid the formation of a gap between the annular body 1110 and the chamber part 2000 due to uneven force. In another example, Figure 5 As shown, the first tooling assembly 1100 includes 4 fixing members 1120 and 6 mounting members 1121; the 4 fixing members 1120 are respectively arranged on the 4 outer walls of the rounded rectangular annular body 1110, wherein each of the 2 relatively arranged fixing members 1120 is connected to the chamber member 2000 through the 2 mounting members 1121; and each of the other 2 relatively arranged fixing members 1120 is connected to the chamber member 2000 through the 1 mounting member 1121.

[0072] The first pre-tightening force is a force that makes the second surface of the annular body 1110 fit against the upper surface of the chamber part 2000, so as to avoid the formation of a gap between the second surface of the annular body 1110 and the upper surface of the chamber part 2000 as much as possible.

[0073] The embodiment of the present disclosure provides a fixing member 1120 and a mounting member 1121 for cooperative connection, so as to apply a force to make the annular body 1110 and the chamber member 2000 fit together and connect, thereby avoiding the formation of a gap therebetween to affect the spraying effect of the heat-absorbing material.

[0074] In one example, a gap of 0.05-0.2 mm may be formed between the second surface of the annular body 1110 and the upper surface of the chamber member 2000 .

[0075] In some embodiments, the fixing member 1120 is plate-shaped; the mounting member 1121 includes at least a clamping portion and a driving portion; the bottom of the driving portion is used to connect with the chamber member 2000, and the output end of the driving portion is connected to the clamping portion; the driving portion is used to drive the clamping portion to move downward so that the clamping portion clamps the fixing member 1120 and the chamber member 2000.

[0076] In the vertical direction, the plate-shaped fixing member 1120 can be located in various positions relative to the outer side wall of the annular body 1110, for example, the plate-shaped fixing member 1120 is located in a partial area close to the second surface, or in a partial area close to the first surface, or in a partial area relatively in the middle. In one example, the vertical size of the plate-shaped fixing member 1120 is consistent with the size of the annular body 1110.

[0077] The driving part is a structure for providing the first preload force, and the driving part may be an electric driving part, a pneumatic driving part, or a manual driving part. The pressing part may be in the shape of a plate, a block, or a rod, etc., so as to maximize the contact area between the pressing part and the fixing member 1120.

[0078] It can be understood that the vertical position of the clamping part will be changed by the movement of the output end of the driving part. When the output end of the driving part moves downward, the clamping part moves synchronously, thereby pressing the annular body 1110 against the chamber part 2000.

[0079] By configuring the plate-shaped fixing member 1120, the force can be better dispersed to the annular body 1110 after being subjected to force, thereby preventing the connection between the fixing member 1120 and the annular body 1110 from being broken. By configuring the independent mounting member 1121 relative to the fixing member 1120, a certain number of mounting members 1121 can be increased or decreased according to different process requirements; and the mounting member 1121 independently arranged relative to the fixing member 1120 is easy for daily maintenance.

[0080] In one example, if Figure 5 , Figure 6 As shown, the mounting member 1121 can adopt a rotary clamping mechanism, the support seat of the rotary clamping structure is connected to the chamber member 2000, and the clamping component of the rotary clamping mechanism is against the upper surface of the fixing member 1120. By rotating the rotary handle of the rotary clamping mechanism, the transmission component in the rotary clamping mechanism converts the rotary motion of the rotary handle into a vertical linear motion of the clamping component, so as to realize the clamping of the fixing member 1120 and the chamber member 2000.

[0081] In some embodiments, Figure 1 , Figure 5 As shown, the first tooling assembly 1100 also includes an enclosure 1130, which has a first end and a second end arranged in a vertical direction, the first end is located below the second end, and the first end of the enclosure 1130 is connected to the first surface of the annular body 1110; the enclosure 1130 has a second center hole 1131 connected to the first center hole 1111, and the hole wall of the second center hole 1131 is used to jointly shield the shielding area 2300 with the hole wall of the first center hole 1111.

[0082] The enclosure 1130 can be understood as a structure disposed above the annular body 1110. Figure 1 As shown, an annular enclosure 1130 is provided. The enclosure 1130 can adopt a shape that matches the annular body 1110 to facilitate connection with the annular body 1110. The shape of the second center hole 1131 of the enclosure 1130 can be matched with the first center hole 1111, so that when spraying the heat absorbing material, the spraying equipment extends into the center hole of the chamber 2000 through the second center hole 1131 and the first center hole 1111 to implement spraying.

[0083] The size of the second center hole 1131 can be slightly larger than the size of the hole wall of the first center hole 1111; or the size of the second center hole 1131 can be the same as the size of the first center hole 1111, that is, the hole wall of the second center hole 1131 is coplanar with the hole wall of the first center hole 1111 to avoid the heat-absorbing material being sprayed on the connection between the enclosure 1130 and the annular body 1110.

[0084] The vertical dimension of the hole wall of the second center hole 1131 can be set according to process requirements.

[0085] By configuring the enclosure 1130 above the annular body 1110 , part of the splashing heat absorbing material can be further shielded to prevent the splashing heat absorbing material from being discharged from above the first center hole 1111 and splashing onto other shielding areas 2300 of the chamber 2000 .

[0086] In some embodiments, a connecting portion is disposed on the first surface of the annular body 1110 ; and a docking portion adapted to the connecting portion is at least disposed on the first end of the enclosure 1130 , and the docking portion is detachably connected to the connecting portion.

[0087] There are many ways to connect the connection part and the docking part. For example, the connection part at least includes a groove arranged along the circumference of the annular body 1110; the docking part at least includes a protrusion that cooperates with the groove to achieve a detachable connection between the annular body 1110 and the enclosure 1130. Alternatively, the connection part at least includes a groove arranged along the circumference of the annular body 1110; the end of the first end of the enclosure 1130 forms the docking part, and the end of the first end of the enclosure 1130 is inserted into the groove to achieve a detachable connection between the annular body 1110 and the enclosure 1130. Furthermore, the connection part at least includes a protrusion arranged along the circumference of the annular body 1110; the docking part at least includes a groove that cooperates with the groove to achieve a detachable connection between the annular body 1110 and the enclosure 1130.

[0088] By configuring the enclosure 1130 and the annular body 1110 to be detachably connected, the enclosure 1130 of different specifications can be replaced according to process requirements, so that the first tooling assembly 1100 can have different sizes in the vertical direction to meet more process requirements.

[0089] In some embodiments, Figure 1 , Figure 5 As shown, the first tooling assembly 1100 also includes a plurality of limit members 1140, which are evenly arranged on the outer wall of the annular body 1110 along the circumference of the annular body 1110, and a limiting portion 1141 is arranged on the limit member 1140; in the vertical direction, the limiting portion 1141 is configured to be coaxial with the positioning portion 2200 on the chamber part 2000.

[0090] The limiting member 1140 may be understood as a structure for preventing the first tooling assembly 1100 from being misaligned with the chamber member 2000 when the first tooling assembly 1100 is connected to the chamber member 2000 .

[0091] The stoppers 1140 may be located at two symmetrical points of the annular body 1110, or may be evenly arranged on the annular body 1110. Figure 1 As shown, the two limiting members 1140 can also be respectively connected to the two oppositely arranged fixing members 1120 , and the two limiting members 1140 are roughly located at the two diagonal areas of the annular body 1110 .

[0092] The limiting member 1140 and the annular body 1110 may be an integral member, or two independent members connected to each other, without limitation.

[0093] The limiting member 1140 may be provided with a limiting portion 1141 , and the limiting portion 1141 may be a hole-shaped structure or other similar structures. In one example, the limiting member 1140 may also be a part of the fixing member 1120 .

[0094] The position of the limiting portion 1141 relative to the limiting member 1140 can be set as needed and is not limited. In one example, the position of the positioning portion 2200 in the chamber member 2000 can be set according to the position of the limiting portion 1141 .

[0095] Whether the limiting portion 1141 on the limiting member 1140 and the positioning portion 2200 on the chamber member 2000 are coaxial can be used as a reference for the precise connection between the annular body 1110 and the chamber member 2000. For example, when the first tooling assembly 1100 and the chamber member 2000 are connected in cooperation, the annular body 1110 is arranged on the upper surface of the chamber member 2000, and the connection state of the annular body 1110 and the chamber member 2000 can be determined by checking whether the limiting portion 1141 and the positioning portion 2200 are coaxial; if the limiting portion 1141 and the positioning portion 2200 are in a non-coaxial state, the annular body 1110 and the chamber member 2000 are misaligned, and the position of the annular body 1110 relative to the chamber member 2000 can be further adjusted to make the limiting portion 1141 and the positioning portion 2200 coaxial as much as possible.

[0096] By arranging the limiting portion 1141 to be coaxial with the positioning portion 2200 , the connection accuracy between the annular body 1110 and the chamber member 2000 can be improved.

[0097] In some embodiments, the limiting portion 1141 includes a first opening disposed on the limiting member 1140 and a positioning pin detachably connected to the first opening; the positioning portion 2200 includes a second opening; along the vertical direction, the positioning pin passes through the first opening and is inserted into the second opening.

[0098] The shape and size of the first opening can be set according to the process requirements. The positioning pin is a structure inserted in the first opening, and the positioning pin can be set according to the shape of the first opening; for example, the positioning pin can be a column or a cone.

[0099] The shape and size of the second opening can be configured according to process requirements so that the positioning pin can be partially inserted therein.

[0100] According to the embodiments of the present disclosure, it is convenient for operators to position the connection between the annular body 1110 and the chamber member 2000, and the operation is simple and the maintenance cost is low.

[0101] In some embodiments, Figure 2 , Figure 3 , Figure 5 , Figure 6 As shown, the spray tooling 1000 also includes: a second tooling component 1200, which is vertically arranged at the bottom of the chamber component 2000 of the semiconductor process processing equipment; the second tooling component 1200 includes: two baffle components 1211 arranged opposite to each other along the first direction, and two connecting components 1212 arranged opposite to each other along the second direction; both ends of each baffle component 1211 are respectively connected to the two connecting components 1212 to form a third center hole 1214 between the two baffle components 1211 and the two connecting components 1212, and the third center hole 1214 is connected to the first center hole 1111; wherein the first direction is perpendicular to the second direction; and the vertical direction is perpendicular to the plane formed by the first direction and the second direction.

[0102] Among them, the baffle member 1211 is used to abut against part of the wall of the center hole of the chamber member 2000, so that the part of the wall of the center hole of the chamber member 2000 located between the baffle member 1211 and the annular body 1110 forms a first sub-spraying area; the connecting member 1212 is used to abut against the lower surface of the chamber member 2000, so that the part of the wall of the center hole of the chamber member 2000 located between the connecting member 1212 and the annular body 1110 forms a second sub-spraying area; the spraying area 2100 includes at least the first sub-spraying area and the second sub-spraying area.

[0103] The second tooling assembly 1200 is a structure disposed at the bottom of the chamber member 2000 ; the second tooling assembly 1200 is used to shield a portion of the lower surface of the chamber member 2000 and a portion of the wall of the center hole of the chamber member 2000 .

[0104] The baffle member 1211 is used to shield part of the hole wall of the center hole of the chamber member 2000. The baffle member 1211 can be in the shape of a plate, strip, or rod, etc., and can be set according to the process requirements. The position of the baffle member 1211 relative to the center hole of the chamber member 2000 can be various; for example, part of the baffle member 1211 can be set to be located in the center hole of the chamber member 2000; or the baffle member 1211 can be set to be located entirely in the center hole of the chamber member 2000. In the first direction, the distance between the two baffle members 1211 can be slightly smaller than the distance between the shielding areas on the two hole walls in the center hole of the chamber member 2000; or the distance between the two baffle members 1211 can be set to be equal to the distance between the shielding areas on the two hole walls in the center hole of the chamber member 2000, so as to make the two baffle members 1211 fit the hole wall of the center hole of the chamber member 2000 as much as possible.

[0105] The connecting member 1212 is disposed between the two baffle members 1211; the two baffle members 1211 and the two connecting members 1212 can roughly form a frame-like structure to improve the stability of the second tooling assembly 1200 and prevent the second tooling assembly 1200 from being deformed. On the other hand, when the second tooling assembly 1200 formed by the two baffle members 1211 and the two connecting members 1212 is connected with the chamber member 2000; the connecting member 1212 can be connected to a part of the lower surface of the chamber member 2000 to prevent the heat absorbing material from being sprayed on a part of the lower surface of the chamber member 2000.

[0106] The connecting piece 1212 may be a roughly rectangular strip structure, which can improve the stability of the second tooling assembly 1200 on the one hand, and facilitate the fitting connection between the second tooling assembly 1200 and the lower surface of the chamber member 2000 on the other hand.

[0107] In some examples, such as Figure 2 As shown, the baffle member 1211 and the connecting member 1212 are both rectangular plates. The height of the baffle member 1211 along the vertical direction is greater than the height of the connecting member 1212. The dimension of the baffle member 1211 along the x direction is smaller than the dimension of the connecting member 1212 along the y direction. The dimension of the baffle member 1211 along the y direction and the dimension of the connecting member 1212 along the x direction can be set according to actual needs. Through the above settings, the shielding effect of the second tooling assembly 1200 on the shielding area of ​​the chamber member 2000 can be ensured, and the structural reliability and lightweight of the second tooling assembly 1200 can be taken into account.

[0108] The shape of the third center hole 1214 can be circular, rectangular, or other shapes consistent with the center hole of the chamber piece 2000 .

[0109] according to Figure 4 , Figure 5 , Figure 6As shown, it can be understood that the central hole of the chamber member 2000 includes at least two first hole walls spaced apart along the first direction and two second hole walls spaced apart along the second direction; the first hole wall includes a first sub-spraying area located above and a shielding area 2300 located below in the vertical direction (i.e. Figure 4 , Figure 6 The second hole wall is entirely the second sub-spraying area; when the second tooling assembly 1200 is connected with the chamber component 2000, the baffle component 1211 is attached to the shielding area 2300 below the first hole wall.

[0110] By configuring the baffle member 1211, it is possible to prevent the heat-absorbing material from being sprayed on the shielded area 2300 below the first hole wall; by configuring the connecting member 1212 to abut against the lower surface of the chamber member 2000, on the one hand, it is possible to prevent the heat-absorbing material from being sprayed on the lower surface of the chamber member 2000, and on the other hand, it is possible to prevent the heat-absorbing material from splashing from below the center hole of the chamber member 2000 to other shielded areas 2300 below the chamber member 2000.

[0111] In one example, in order to further prevent the heat-absorbing material from splashing from the bottom of the center hole of the chamber part 2000 to other shielding areas 2300 under the chamber part 2000, the upper part of the baffle part 1211 can be arranged to be closely connected with the shielding area 2300 under the first hole wall; and the lower part of the baffle part 1211 can be arranged to extend to the outside of the bottom of the center hole of the chamber part 2000.

[0112] In one example, a gap of 0.05-0.2 mm may be formed between the connection member 1212 and the lower surface of the chamber member 2000 .

[0113] In some embodiments, Figure 2 , Figure 3 As shown, a mounting portion 1213 is provided on the baffle member 1211 , and the mounting portion 1213 is used to provide a second pre-tightening force to make the baffle member 1211 abut against the hole wall of the central hole of the chamber member 2000 .

[0114] The mounting portion 1213 can be understood as a structure for connecting the baffle member 1211 to the shielding area 2300 below the first hole wall in the center hole of the chamber member 2000. The mounting portion 1213 can be an electric adjustment mechanism, a pneumatic adjustment mechanism, or a manual adjustment mechanism, without limitation.

[0115] The mounting portion 1213 can be arranged on the inner side of the baffle member 1211 (i.e., on the hole wall of the third center hole 1214); the mounting portion 1213 can also be arranged on the outer side of the baffle member 1211 (i.e., on the side of the same baffle member 1211 opposite to the hole wall forming the third center hole 1214).

[0116] There can be multiple mounting parts 1213, and multiple mounting parts 1213 can be evenly arranged on the baffle member 1211. The specific structure of the mounting part 1213 can be set as needed. For example, the mounting part 1213 is roughly a hook-shaped body; one end of the hook-shaped mounting part 1213 is connected to the baffle member 1211, and the other end of the hook-shaped mounting part 1213 is hooked on the chamber member 2000; so that the second preload force is provided through the hook-shaped body. Alternatively, the mounting part 1213 includes a spring, and the two ends of the spring are respectively connected to the baffle member 1211 and the chamber member 2000, so that the second preload force is provided through the elastic force of the spring itself.

[0117] The second pre-tightening force is the force that makes the baffle member 1211 fit on the shielding area 2300 below the first hole wall in the central hole of the chamber member 2000, so as to avoid the formation of a gap between the baffle member 1211 and the shielding area 2300 below the first hole wall as much as possible.

[0118] By setting the mounting portion 1213, the embodiment of the present disclosure can apply a force to make the baffle member 1211 fit and connect with the shielding area 2300 below the first hole wall in the center hole of the chamber member 2000, thereby avoiding the formation of a gap between the baffle member 1211 and the shielding area 2300 below the first hole wall, which would affect the accuracy of the heat-absorbing material spraying.

[0119] In some embodiments, the mounting portion 1213 includes a nut disposed on the baffle member 1211 and a screw cooperating with the nut, the head of the screw abuts against the side of the chamber member 2000 away from the baffle member 1211; the screw rod of the screw passes through the chamber member 2000 and is connected to the nut.

[0120] The nut can be arranged on the outside of the baffle 1211 (i.e., the side of the baffle 1211 opposite to the hole wall forming the third central hole 1214); when the baffle 1211 is connected to the shielding area 2300 below the first hole wall, the nut is inserted into the shielding area 2300 below the first hole wall. Figure 6 As shown, the nut is inserted between two adjacent teeth of a rack-like structure in a shielded area 2300 below the first hole wall; the head of the screw (not shown in the figure) can be against the outer wall of the chamber member 2000 (such as the side of the rack-like structure away from the baffle member 1211); the screw rod (not shown in the figure) passes through between the two teeth and is connected to the nut; by rotating the screw, a second pre-tightening force is formed between the screw head and the nut, so that the nut drives the baffle member 1211 to move toward the shielded area 2300 below the first hole wall until the two are fit and connected.

[0121] The combination of the nut and screw disclosed in the present invention has low cost, convenient operation and is beneficial for later maintenance.

[0122] In some embodiments, the second tooling assembly 1200 includes at least three positioning members 1220, wherein the three positioning members 1220 are respectively arranged near the three vertices of a preset triangle; the positioning member 1220 is connected to the baffle member 1211, and / or to the connecting member 1212; the positioning member 1220 is used to be inserted into the slot at the bottom of the chamber member 2000.

[0123] The shape of the positioning member 1220 can be set according to the shape of the slot. The positioning member 1220 can be configured to be fully inserted into the slot; or the positioning member 1220 can also be configured to be partially inserted into the slot. The number of positioning members 1220 can be less than or equal to the number of slots.

[0124] The three positioning members 1220 are arranged in a preset triangle; the preset triangle may be an acute triangle, a right triangle, or an obtuse triangle.

[0125] The multiple positioning members 1220 can be configured to be all connected to the baffle member 1211; or, the multiple positioning members 1220 can also be configured to be all connected to the connecting member 1212; further, a part of the multiple positioning members 1220 can be configured to be connected to the baffle member 1211, and another part of the multiple positioning members 1220 can be configured to be connected to the connecting member 1212.

[0126] In one example, if Figure 2 As shown, the four positioning members 1220 are respectively located at the four connection points where the baffle member 1211 and the connecting member 1212 are connected.

[0127] When the second tooling assembly 1200 is connected to the chamber part 2000, the connection status of the second tooling assembly 1200 and the chamber part 2000 can be judged according to whether the positioning piece 1220 is inserted in the slot; if the positioning piece 1220 is not inserted in the slot, the second tooling assembly 1200 and the chamber part 2000 are misaligned, and the position of the second tooling assembly 1200 can be adjusted so that the positioning piece 1220 is inserted in the slot.

[0128] By arranging the positioning member 1220 to be inserted into the slot at the bottom of the chamber member 2000 , the connection accuracy between the second tooling assembly 1200 and the chamber member 2000 can be improved.

[0129] In some embodiments, the positioning member 1220 is columnar, and the positioning member 1220 includes multiple sheet metal plates, which are connected in sequence along the circumference of the slot hole so that the multiple sheet metal plates form a filling space; the second tooling assembly 1200 also includes a filling member, which is arranged in the filling space to provide a third pre-tightening force to make the sheet metal plate adhere to the hole wall of the slot hole.

[0130] The sheet metal plate can be understood as a metal thin plate; the specific thickness of the sheet metal plate can be adjusted according to the process requirements; for example, the sheet metal plate can generally be a 3-6mm metal thin plate. The number of sheet metal plates can be set according to the shape of the slot, for example, if the slot is rectangular, 4 sheet metal plates can be used. In other examples, the cross-section of the slot can be pentagonal, and accordingly, the sheet metal plates can include 5, and the 5 sheet metal plates are connected to form a pentagonal prism-shaped structure that matches the slot; or, the cross-section of the slot can be triangular, and accordingly, the sheet metal plates can include 3, and the 3 sheet metal plates are connected to form a triangular prism-shaped structure that matches the slot.

[0131] The filling piece is used to be inserted into the filling space of the columnar positioning piece 1220. As the filling piece is inserted, the filling piece will gradually fill the filling space and apply a force to the sheet metal plate to make the sheet metal plate abut against the slot hole, so that the sheet metal plate is fit and connected with the slot hole.

[0132] The filling piece may be a structure with a deformation function, such as an air bag or a rubber column, or the filling piece may be a structure such as a wedge block.

[0133] The third pre-tightening force is a force acting on the sheet metal plate to fit the slot hole, so as to avoid the formation of a gap between the sheet metal plate and the slot hole as much as possible.

[0134] The embodiment of the present disclosure arranges a filling piece; on the one hand, the sheet metal plate can be made to fit on the hole wall of the slot hole to prevent the heat-absorbing material from being sprayed on the hole wall of the slot hole; on the other hand, the filling piece can fill the filling space to prevent the heat-absorbing material from being sprayed on the bottom wall of the slot hole.

[0135] In some embodiments, Figure 2 , Figure 3 , Figure 5 , Figure 6 As shown, the second tooling assembly 1200 also includes a reinforcement 1230, which is arranged between the two baffle members 1211 or between the two connecting members 1212; the reinforcement 1230 is provided with an axial hole 1231, and the axial hole 1231 is coaxial with the chamber member 2000. The axial hole 1231 is used to connect with the rotating shaft in the semiconductor spraying process, so as to drive the spraying tooling 1000 and the chamber member 2000 to rotate synchronously with the rotating shaft as the center axis through the rotating shaft.

[0136] The reinforcing member 1230 is a structure for reinforcing the connection between the baffle member 1211 and the connecting member 1212. The reinforcing member 1230 may be a columnar body, a strip body, a rod body, etc. The number of the reinforcing members 1230 may be set according to the process requirements.

[0137] The shaft hole 1231 may be a semicircular hole or a spline hole, etc., which may be arranged according to the shape of the output end of the shaft to prevent the shaft from rotating in the shaft hole 1231, and ensure that the shaft can rotate synchronously with the second tooling assembly 1200. The shaft hole 1231 is coaxial with the chamber member 2000 to ensure that the spraying tooling 1000 will not be skewed or fall off from the shaft hole 1231 when the shaft drives the spraying tooling 1000 to rotate.

[0138] Through the embodiment of the present disclosure, the spraying tool 1000 and the chamber part 2000 can be driven to rotate synchronously by the rotating shaft, so as to facilitate the spraying equipment to spray the spraying area 2100 of the center hole of the chamber part 2000.

[0139] In the description of this specification, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present disclosure.

[0140] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present disclosure, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0141] In the present disclosure, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or a communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present disclosure can be understood according to specific circumstances.

[0142] In the present disclosure, unless otherwise expressly specified and limited, a first feature being “above” or “below” a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being “above”, “above”, and “above” a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0143] The disclosure above provides many different embodiments or examples to realize different structures of the present disclosure. In order to simplify the disclosure of the present disclosure, the components and settings of specific examples are described above. Of course, they are only examples, and the purpose is not to limit the present disclosure. In addition, the present disclosure can repeat reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, and does not itself indicate the relationship between the various embodiments and / or settings discussed.

[0144] The above specific implementations do not constitute a limitation on the protection scope of the present disclosure. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present disclosure shall be included in the protection scope of the present disclosure.

Claims

1. A spraying tool, comprising: A first tooling assembly is vertically disposed on the top of a chamber component in a semiconductor process equipment; The vertical direction is the axial direction of the chamber member; The first tooling comprises: an annular body, having a first surface and a second surface arranged opposite to each other along the vertical direction, wherein the first surface is located above the second surface, and the second surface is used to abut against the upper surface of the chamber member; The annular body also has a first center hole; along the vertical direction, the hole wall of the first center hole is configured to be coplanar with the hole wall of the center hole of the chamber part, so that the annular body shields the shielding area of ​​the chamber part; wherein the chamber part includes the shielding area and the spraying area; the shielding area includes at least the upper surface of the chamber part.

2. The spraying tool according to claim 1, wherein: The first tooling assembly also includes a fixing part and a mounting part; the fixing part is connected to the outer side wall of the annular body; the first end of the mounting part is used to connect to the chamber part, and the second end of the mounting part is connected to the fixing part, so as to provide a first pre-tightening force through the mounting part to make the annular body and the chamber part fit together.

3. The spraying tool according to claim 2, wherein: There are at least two fixing members, and at least two fixing members are evenly distributed around the periphery of the annular body; At least two mounting members are provided, and the two mounting members correspond to the two fixing members one by one.

4. The spraying tool according to claim 2, wherein: The fixing member is in the shape of a plate; The mounting member at least includes a clamping portion and a driving portion; the bottom of the driving portion is used to connect with the chamber member, and the output end of the driving portion is connected to the clamping portion; the driving portion is used to drive the clamping portion to move downward so that the clamping portion clamps the fixing member and the chamber member.

5. The spraying tool according to claim 1, wherein: The first tooling assembly further includes a blocking member, the blocking member having a first end and a second end disposed along the vertical interval, the first end being located below the second end, and the first end of the blocking member being connected to the first surface of the annular body; The enclosure has a second central hole connected to the first central hole, and the hole wall of the second central hole is used to shield the shielding area together with the hole wall of the first central hole.

6. The spraying tool according to claim 5, wherein: The first surface of the annular body is provided with a connecting portion; The first end of the enclosure is at least provided with a docking portion adapted to the connecting portion, and the docking portion is detachably connected to the connecting portion.

7. The spraying tool according to claim 6, wherein: The connecting portion at least includes a groove arranged along the circumference of the annular body; the docking portion at least includes a protrusion that cooperates with the groove; or, The connecting portion at least includes a groove arranged along the circumference of the annular body; the end of the first end of the enclosure forms the docking portion, and the end of the first end of the enclosure is inserted into the groove.

8. The spraying tool according to claim 1, wherein: The first tooling assembly further comprises a plurality of limiters, the plurality of limiters are evenly arranged on the outer side wall of the annular body along the circumference of the annular body, and a limit portion is arranged on the limiter; Along the vertical direction, the limiting portion is configured to be coaxial with the positioning portion on the chamber member.

9. The spraying tool according to claim 8, wherein: The limiting portion includes a first opening provided on the limiting member, and a positioning pin detachably connected to the first opening; The positioning portion includes a second opening; Along the vertical direction, the positioning pin passes through the first opening and is inserted into the second opening.

10. The spraying tool according to any one of claims 1 to 9, wherein: The spraying tool also includes: A second tooling assembly is disposed at the bottom of a chamber of a semiconductor processing device along the vertical direction; the second tooling assembly includes: Two baffle members are arranged opposite to each other along a first direction, and two connecting members are arranged opposite to each other along a second direction; both ends of each baffle member are respectively connected to the two connecting members to form a third center hole between the two baffle members and the two connecting members, and the third center hole is connected to the first center hole; wherein the first direction is perpendicular to the second direction; and the vertical direction is perpendicular to the plane formed by the first direction and the second direction; The baffle member is used to abut against a portion of the hole wall of the central hole of the chamber member, so that the portion of the hole wall of the central hole of the chamber member located between the baffle member and the annular body forms a first sub-spraying area; The connecting member is used to abut against the lower surface of the chamber member so that the portion of the hole wall of the central hole of the chamber member located between the connecting member and the annular body forms a second sub-spraying area; the spraying area at least includes the first sub-spraying area and the second sub-spraying area.

11. The spraying tool according to claim 10, wherein: The baffle member is provided with a mounting portion, and the mounting portion is used to provide a second pre-tightening force to make the baffle member abut against the hole wall of the central hole of the chamber member.

12. The spraying tool according to claim 11, wherein: The mounting portion includes a nut arranged on the baffle member, and a screw matched with the nut, wherein the head of the screw abuts against a side of the chamber member away from the baffle member; the screw rod of the screw passes through the chamber member and is connected to the nut.

13. The spraying tool according to claim 10, wherein: The second tooling assembly includes at least three positioning members, wherein the three positioning members are respectively arranged near the three vertices of a preset triangle; the positioning members are connected to the baffle member and / or the connecting member; the positioning members are used to be inserted into the slot at the bottom of the chamber member.

14. The spraying tool according to claim 13, wherein: The positioning member is columnar, and includes a plurality of sheet metal plates, and the plurality of sheet metal plates are sequentially connected along the circumference of the slot, so that the plurality of sheet metal plates surround a filling space; The second tooling assembly further includes a filling piece, which is disposed in the filling space to provide a third pre-tightening force for the sheet metal plate to be attached to the hole wall of the slot hole.

15. The spraying tool according to claim 14, wherein: The filling piece includes at least one of a wedge and an air bag.

16. The spraying tool according to claim 10, wherein: The second tooling assembly also includes a reinforcement piece, which is arranged between the two baffle pieces or between the two connecting pieces; the reinforcement piece is provided with an axial hole, which is coaxial with the chamber piece, and the axial hole is used to connect with a rotating shaft in the semiconductor spraying process, so as to drive the spraying tooling and the chamber piece to rotate synchronously with the rotating shaft as the center axis through the rotating shaft.

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