Ultrasonic vibration assisted laser and electrolytic synchronous compound machining device and method

Abstract

An ultrasonic vibration assisted laser and electrolysis synchronous composite machining device and method. The device comprises a laser irradiation system, an electrolytic machining system, an ultrasonic vibration system, a three-axis feeding mechanism, a base and a column; wherein the laser irradiation system comprises a laser, a light barrier, a reflecting mirror and a focusing lens; the electrolytic machining system comprises an electrolytic power supply, conductive glass, an electricity leading piece, a workpiece, an electrolytic cell and a ring clamp; the ultrasonic vibration system comprises an ultrasonic transducer and an ultrasonic power supply; the effect of the application is that the ring clamp realizes the vibration of the conductive glass in a small range through the ultrasonic vibration generated by the ultrasonic vibration system, thereby solving the problem of poor electrolyte flow in the laser and electrolysis synchronous composite machining. The low-power high-frequency laser has small spot size, small single pulse laser energy, small generated bubbles, short high-frequency pulse period, and the bubbles cannot increase in time, which is helpful to improve the precision of the laser and electrolysis synchronous composite machining.

Description

Technical Field

[0001] This invention belongs to the field of micro-electrolytic machining technology in special manufacturing technology, and specifically relates to an ultrasonic vibration-assisted laser and electrolytic synchronous composite machining device and method. Background Technology

[0002] With the rapid advancement of technology, the miniaturization trend of industrial products is becoming increasingly significant, especially in fields such as aerospace and precision machinery. The fabrication of microstructures such as micro-holes, narrow slots, and fine slits has become a highly dynamic and important research area. Taking turbine blades of aero-engines as an example, machining numerous micro-holes on these components not only ensures good mechanical properties but also effectively solves the engine's heat dissipation problem.

[0003] Currently, the processing of microstructures such as micro-holes, narrow grooves, and slits mainly falls into two categories: machining and special processing. Machining primarily encompasses processes such as drilling and punching; special processing is typically represented by electrolytic machining, and also includes laser-electrolytic composite machining, electrical discharge machining, and electron beam machining.

[0004] Electrolytic machining is based on the principle of anodic dissolution of metal in an electrolyte to form parts. During the process, the cathode and anode are separated and do not directly contact each other; the processed product is discharged through the electrolyte. This method is not limited by the strength, hardness, and toughness of the material and can achieve good surface quality. However, it is also constrained by stray corrosion, poor localization, and the difficulty in manufacturing the cathode. Laser machining removes material by heating the workpiece to a vaporized state. While this method has high processing efficiency, it inevitably suffers from problems such as recast layers and microcracks. Laser-electrolytic hybrid machining, through the spatiotemporal synergistic coupling control of laser and electrochemical energy fields, fully leverages the advantages of both methods. However, this method currently faces challenges such as poor product discharge and impurities generated in the processing gap affecting light transmission and conductivity; therefore, there is still significant room for improvement in processing efficiency. Summary of the Invention

[0005] To address the aforementioned problems, the present invention aims to provide an ultrasonic vibration-assisted laser and electrolysis synchronous composite processing device and method.

[0006] To achieve the above objectives, the ultrasonic vibration-assisted laser and electrolysis synchronous composite processing device provided by the present invention includes a laser irradiation system, an electrolysis processing system, an ultrasonic vibration system, a three-axis feed mechanism, a base, and a column; wherein the laser irradiation system includes a laser, a light-blocking mirror, a reflector, and a focusing lens; the electrolysis processing system includes an electrolysis power supply, conductive glass, a current-conducting sheet, a workpiece, an electrolysis cell, and an annular fixture; and the ultrasonic vibration system includes an ultrasonic transducer and an ultrasonic power supply.

[0007] The three-axis feed mechanism is mounted in the middle of the base in a three-dimensional moving manner; the lower end of the column is fixed to the edge of the base, and the upper end is connected to the lower end of the ultrasonic transducer; the electrolytic cell is fixed on the three-axis feed mechanism and is used to hold the electrolyte and place the workpiece; the ultrasonic transducer is equipped with an aviation plug, which is connected to the ultrasonic power supply via a wire; the annular clamp includes a horizontal support rod, an upper ring, a lower ring, and a vertical connecting rod; the upper and lower rings are connected as one unit by multiple vertical connecting rods; one end of the horizontal support rod is connected to the side of the upper ring, and the other end is bolted to the upper end of the ultrasonic transducer; the conductive glass is mounted on the lower part. The ring has a central hole and a conductive coating on its bottom surface. A current-conducting plate is bolted to one side of the bottom surface of the lower ring and contacts the conductive coating on the bottom surface of the conductive glass. The workpiece and the current-conducting plate are connected to the positive and negative terminals of the electrolytic power supply, with the workpiece acting as the anode and the conductive glass as the cathode. A focusing lens is horizontally positioned above the upper ring. A reflecting mirror is tilted directly above the focusing lens. The laser is positioned to one side of the reflecting mirror, with the laser emission port facing the reflecting mirror. A light-blocking mirror is installed in the optical path between the laser and the reflecting mirror, allowing or blocking the optical path. Its regular opening and closing can be achieved by setting the switching time of the light-blocking mirror.

[0008] The laser is a femtosecond pulsed laser, emitting a pulsed laser beam with a wavelength of 1030 nm, a pulse width of 300 fs, and an energy flux density of 0-20 kJ / m. 2 The frequency ranges from 0.025MHz to 5MHz, and the power ranges from 0 to 50W.

[0009] The conductive glass is made of ITO conductive glass, with a laser transmittance greater than 80% and a resistivity of 5×10⁻⁶. -4 Ω·cm

[0010] The electrolyte is a NaNO3 solution with a mass concentration of 12.5%.

[0011] The electrolysis power supply is a pulse power supply with a voltage of 11-17V, a frequency of 1kHz-1MHz, and a duty cycle of 45%-60%.

[0012] The processing method using the ultrasonic vibration-assisted laser and electrolysis synchronous composite processing device described above includes the following steps performed in sequence:

[0013] S1. Place the workpiece connected to the positive electrode of the electrolytic power supply into the electrolytic cell; turn on the three-axis feed mechanism to drive the electrolytic cell to achieve three-dimensional movement and position the workpiece in the electrolytic cell 2-3mm directly below the conductive glass.

[0014] S2. A 12.5% ​​NaNO3 solution is injected into the electrolytic cell as the electrolyte, and the workpiece is immersed in the electrolyte. Then the electrolytic power supply is turned on, with the workpiece as the anode and the conductive glass as the cathode. An electrochemical circuit is formed between the conductive glass and the workpiece, thereby generating a passivation layer on the surface of the workpiece for electrolytic processing.

[0015] S3. Turn on the ultrasonic power supply. The ultrasonic transducer transmits the ultrasonic vibration to the conductive glass through the ring clamp, which promotes the flow of electrolyte and discharges the electrolytic products in the electrolysis gap.

[0016] S4. Turn on the laser and the beam shield, so that the pulsed laser beam emitted by the laser is reflected by the mirror and focused by the focusing lens and then irradiates the surface of the workpiece. At the same time, the three-axis feed mechanism moves in the horizontal plane. Thus, during the continuous laser pulse, the passivation layer on the surface of the workpiece is removed, exposing the new workpiece substrate material. During the laser pulse interval, the exposed surface of the workpiece regenerates the passivation layer under the electrochemical reaction. Through the repeated action of the pulsed laser beam and the electrochemical reaction, the surface material of the workpiece in the laser irradiation area is gradually removed.

[0017] The ultrasonic vibration-assisted laser and electrolysis synchronous composite processing device and method provided by the present invention have the following beneficial effects:

[0018] 1. The ring-shaped fixture uses ultrasonic vibration generated by an ultrasonic vibration system to achieve vibration of the electro-glass within a small range, thereby solving the problem of poor electrolyte flow in the synchronous composite processing of laser and electrolysis.

[0019] 2. Using a low-power, high-frequency laser results in a small spot size, low energy per pulse, and small generated bubbles. The short period of the high-frequency pulse prevents the bubbles from growing larger, which helps improve the precision of simultaneous laser and electrolytic composite processing. Attached Figure Description

[0020] Fig. 1 This is a schematic diagram of the ultrasonic vibration-assisted laser and electrolysis synchronous composite processing device provided by the present invention.

[0021] Fig. 2 This is an exploded view of the electrolytic processing device in the ultrasonic vibration-assisted laser and electrolytic synchronous composite processing device provided by the present invention. Detailed Implementation

[0022] The present invention will now be described in detail with reference to the accompanying drawings and specific embodiments.

[0023] like Figs. 1-2 As shown, the ultrasonic vibration-assisted laser and electrolysis synchronous composite processing device provided by the present invention includes a laser irradiation system, an electrolysis processing system, an ultrasonic vibration system, a three-axis feed mechanism 10, a base 11, and a column 12; wherein the laser irradiation system includes a laser 3, a light-blocking mirror 2, a reflector 1, and a focusing lens 4; the electrolysis processing system includes an electrolysis power supply 7, conductive glass 5, a current-conducting sheet 6, a workpiece 8, an electrolysis cell 9, and an annular clamp 15; the ultrasonic vibration system includes an ultrasonic transducer 14 and an ultrasonic power supply 13;

[0024] The triaxial feed mechanism 10 is mounted in the middle of the base 11 in a three-dimensional moving manner; the lower end of the column 12 is fixed to the edge of the base 11, and the upper end is connected to the lower end of the ultrasonic transducer 14; the electrolytic cell 9 is fixed on the triaxial feed mechanism 10, and is used to hold the electrolyte and place the workpiece 8; the ultrasonic transducer 14 is equipped with an aviation plug, which is connected to the ultrasonic power supply 13 through a wire; the annular clamp 15 includes a horizontal support rod 15-1, an upper ring 15-2, a lower ring 15-3, and a vertical connecting rod 15-4; the upper ring 15-2 and the lower ring 15-3 are connected as one unit by multiple vertical connecting rods 15-4; one end of the horizontal support rod 15-1 is connected to the side of the upper ring 15-2, and the other end is connected to the ultrasonic transducer 14 by bolts. The upper end of 4; conductive glass 5 is installed at the center hole of the lower ring 15-3, and has a conductive coating on its bottom surface; the lead-in sheet 6 is fixed to one side of the bottom surface of the lower ring 15-3 by bolts, and is in contact with the conductive coating on the bottom surface of the conductive glass 5; the workpiece 8 and the lead-in sheet 6 are respectively connected to the positive and negative terminals of the electrolytic power supply 7, wherein the workpiece 8 is the anode and the conductive glass 5 is the cathode; the focusing lens 4 is horizontally set above the upper ring 15-2; the reflector 1 is tilted and set directly above the focusing lens 4; the laser 3 is set on one side of the reflector 1, and the laser emission port faces the reflector 1; the light-blocking mirror 2 is installed in the optical path between the laser 3 and the reflector 1, and can pass through or block the optical path, and its regular opening and closing can be achieved by setting the switching time of the light-blocking mirror 2;

[0025] The laser 3 is a femtosecond pulsed laser, emitting a pulsed laser beam with a wavelength of 1030 nm, a pulse width of 300 fs, and an energy flux density of 0-20 kJ / m. 2 The frequency ranges from 0.025MHz to 5MHz, and the power ranges from 0 to 50W.

[0026] The conductive glass 5 is made of ITO conductive glass, with a laser transmittance greater than 80% and a resistivity of 5×10⁻⁶. -4 Ω·cm

[0027] The electrolyte is a NaNO3 solution with a mass concentration of 12.5%.

[0028] The electrolytic power supply 7 is a pulse power supply with a voltage of 11-17V, a frequency of 1kHz-1MHz, and a duty cycle of 45%-60%.

[0029] The processing method using the aforementioned ultrasonic vibration-assisted laser and electrolysis synchronous composite processing device is described below:

[0030] First, the worker places the workpiece 8, connected to the positive electrode of the electrolytic power supply 7, into the electrolytic cell 9. Then, the triaxial feed mechanism 10 is activated, causing the electrolytic cell 9 to move in three dimensions, positioning the workpiece 8 2-3 mm directly below the conductive glass 5. Next, a 12.5% ​​NaNO3 solution is injected into the electrolytic cell 9 as the electrolyte, immersing the workpiece 8 in it. Then, the electrolytic power supply 7 is turned on, with the workpiece 8 as the anode and the conductive glass 5 as the cathode, forming an electrochemical circuit between the conductive glass 5 and the workpiece 8. This generates a passivation layer on the surface of the workpiece 8, enabling electrolytic processing. The input current can be adjusted by regulating the electrolytic power supply 7. Input voltage; turn on ultrasonic power supply 13, and transmit ultrasonic vibration to conductive glass 5 through ultrasonic transducer 14 via annular clamp 15, promoting electrolyte flow and expelling electrolytic products from the electrolytic gap to improve processing quality; turn on laser 3 and light-blocking mirror 2, so that the pulsed laser beam emitted by laser 3 is reflected by mirror 1 and focused by focusing lens 4 and then irradiates the surface of workpiece 8. At the same time, the triaxial feed mechanism 10 moves in the horizontal plane, thereby removing the passivation layer on the surface of workpiece 8 during the laser pulse, exposing new workpiece substrate material. During the laser pulse interval, the exposed surface of workpiece 8 regenerates the passivation layer under electrochemical reaction. Through the repeated action of pulsed laser beam and electrochemical reaction, the surface material of workpiece 8 in the laser-irradiated area is gradually removed. Due to the protective effect of the surface passivation layer, the material of workpiece 8 in the unirradiated area is not removed, thus realizing ultrasonic vibration-assisted laser and electrolysis synchronous composite processing.

Claims

1. An ultrasonic vibration-assisted laser and electrolysis synchronous composite processing device, characterized in that: The ultrasonic vibration-assisted laser and electrolysis synchronous composite processing device includes a laser irradiation system, an electrolysis processing system, an ultrasonic vibration system, a three-axis feed mechanism (10), a base (11), and a column (12); wherein the laser irradiation system includes a laser (3), a light-blocking mirror (2), a reflector (1), and a focusing lens (4); the electrolysis processing system includes an electrolysis power supply (7), conductive glass (5), a current-conducting sheet (6), a workpiece (8), an electrolysis cell (9), and an annular fixture (15); the ultrasonic vibration system includes an ultrasonic transducer (14) and an ultrasonic power supply (13); The three-axis feed mechanism (10) is installed in the middle of the base (11) in a three-dimensional moving manner; the lower end of the column (12) is fixed to the edge of the base (11), and the upper end is connected to the lower end of the ultrasonic transducer (14); the electrolytic cell (9) is fixed on the three-axis feed mechanism (10), and is used to hold the electrolyte and place the workpiece (8); the ultrasonic transducer (14) is equipped with an aviation plug, which is connected to the ultrasonic power supply (13) through a wire; the ring clamp (15) includes a horizontal support rod (15-1), an upper ring (15-2), a lower ring (15-3) and a vertical connecting rod (15-4); the upper ring (15-2) and the lower ring (15-3) is connected as one unit by multiple vertical connecting rods (15-4); one end of the horizontal support rod (15-1) is connected to the side of the upper ring (15-2), and the other end is connected to the upper end of the ultrasonic transducer (14) by bolts; the conductive glass (5) is installed at the center hole of the lower ring (15-3) and has a conductive coating on its bottom surface; the lead plate (6) is fixed to one side of the bottom surface of the lower ring (15-3) by bolts and is in contact with the conductive coating on the bottom surface of the conductive glass (5); the workpiece (8) and the lead plate (6) are respectively connected to the positive and negative poles of the electrolytic power supply (7), wherein the workpiece (8) is the anode and the conductive glass (5) is the cathode; The focusing lens (4) is horizontally positioned above the upper ring (15-2); the reflecting mirror (1) is tilted and positioned directly above the focusing lens (4); the laser (3) is positioned on one side of the reflecting mirror (1), with the laser emission port facing the reflecting mirror (1); and the light-blocking mirror (2) is installed in the optical path between the laser (3) and the reflecting mirror (1).

2. The ultrasonic vibration-assisted laser and electrolysis synchronous composite processing device according to claim 1, characterized in that: The laser (3) is a femtosecond pulsed laser, emitting a pulsed laser beam with a wavelength of 1030 nm, a pulse width of 300 fs, and an energy flux density of 0-20 kJ / m. 2 The frequency ranges from 0.025MHz to 5MHz, and the power ranges from 0 to 50W.

3. The ultrasonic vibration-assisted laser and electrolysis synchronous composite processing device according to claim 1, characterized in that: The conductive glass (5) is made of ITO conductive glass, with a laser transmittance greater than 80% and a resistivity of 5×10⁻⁶. -4 Ω·cm.

4. The ultrasonic vibration-assisted laser and electrolysis synchronous composite processing device according to claim 1, characterized in that: The electrolyte is a NaNO3 solution with a mass concentration of 12.5%.

5. The ultrasonic vibration-assisted laser and electrolysis synchronous composite processing device according to claim 1, characterized in that: The electrolysis power supply (7) adopts a pulse power supply with a voltage of 11-17V, a frequency of 1kHz-1MHz, and a duty cycle of 45%-60%.

6. A processing method using the ultrasonic vibration-assisted laser and electrolysis synchronous composite processing device according to any one of claims 1 to 5, characterized in that: The processing method includes the following steps performed in sequence: S1. Place the workpiece (8) connected to the positive electrode of the electrolytic power supply (7) into the electrolytic cell (9); turn on the three-axis feed mechanism (10) so that it drives the electrolytic cell (9) to achieve three-dimensional movement and place the workpiece (8) in the electrolytic cell (9) at a distance of 2-3 mm directly below the conductive glass (5); S2. A 12.5% ​​NaNO3 solution is injected into the electrolytic cell (9) as the electrolyte, and the workpiece (8) is immersed in the electrolyte. Then the electrolytic power supply (7) is turned on, with the workpiece (8) as the anode and the conductive glass (5) as the cathode. An electrochemical circuit is formed between the conductive glass (5) and the workpiece (8), thereby generating a passivation layer on the surface of the workpiece (8) for electrolytic processing. S3. Turn on the ultrasonic power supply (13), and transmit the ultrasonic vibration through the ultrasonic transducer (14) to the conductive glass (5) through the ring clamp (15), so as to promote the flow of electrolyte and discharge the electrolytic products in the electrolysis gap. S4. Turn on the laser (3) and the light-blocking mirror (2) so that the pulsed laser beam emitted by the laser (3) is reflected by the mirror (1) and focused by the focusing lens (4) and then irradiates the surface of the workpiece (8). At the same time, the three-axis feed mechanism (10) moves in the horizontal plane, thereby removing the passivation layer on the surface of the workpiece (8) during the continuous laser pulse and exposing the new workpiece substrate material. During the laser pulse interval, the exposed surface of the workpiece (8) regenerates the passivation layer under the electrochemical reaction. Through the repeated action of the pulsed laser beam and the electrochemical reaction, the surface material of the workpiece (8) in the laser irradiation area is gradually removed.

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