A detection device for a leveler of a semiconductor polishing unit

Abstract

This invention provides a testing device for a flattener in a semiconductor polishing unit, belonging to the technical field of flattener testing in semiconductor polishing units. It includes a hollow base with two mounting frames on its upper surface. Each mounting frame has a laser interferometer mounted on its inner top. The hollow base contains a conveying mechanism with several sets of clamping and fixing mechanisms, each including a square mounting block. These clamping and fixing mechanisms stably hold and fix the flattener, allowing it to be smoothly transferred to the laser interferometer for testing. Before transferring it to the second laser interferometer, a flipping mechanism rotates the flattener 180 degrees, enabling the second laser interferometer to test the other side of the flattener. The operation is simple, fast, and efficient.

Description

Technical Field

[0001] This invention belongs to the field of flattener testing technology for semiconductor polishing units, specifically a testing device for flatteners in semiconductor polishing units. Background Technology

[0002] The inspection equipment for the flattener in the semiconductor polishing unit is mainly based on high-precision optical inspection technology. It analyzes the flatness of the wafer surface by emitting light and receiving reflected light. When light shines on the wafer surface, if there are uneven surfaces, the light will scatter or reflect at different angles. After capturing these changes, the equipment uses advanced optical technology and image processing algorithms to accurately calculate the flatness data of the wafer surface, achieving nanometer-level inspection.

[0003] However, when testing wafers with existing testing equipment, manual loading and unloading of wafers is still required for testing. Although some wafers are loaded mechanically, the wafers cannot be flipped during the testing process, which means that the wafers need to be loaded and unloaded twice to test the flatness of the top and bottom surfaces. This process is cumbersome and inefficient.

[0004] Therefore, we propose a testing device for the flattener of a semiconductor grinding unit to solve the problems mentioned above. Summary of the Invention

[0005] The purpose of this invention is to solve the problem that existing testing equipment still requires manual loading and unloading of wafers for testing. Although some mechanical loading is used, it cannot flip the wafer during the testing process, resulting in the wafer needing to undergo two loading and unloading tests to check the flatness of its top and bottom surfaces. This is cumbersome and inefficient. Therefore, this invention proposes a testing device for flatteners in semiconductor grinding units.

[0006] The objective of this invention can be achieved through the following technical solution: A hollow base is included, with two mounting frames on its upper surface. A laser interferometer is mounted on the inner top of each of the two mounting frames. A conveying mechanism is located inside the hollow base, and a clamping and fixing mechanism is mounted on the conveying mechanism. Several sets of clamping and fixing mechanisms are provided. Each clamping and fixing mechanism includes two square mounting blocks, symmetrically arranged front and rear. A cylindrical rotating block is rotatably mounted inside each of the two square mounting blocks. A screw is rotatably mounted inside each of the two cylindrical rotating blocks. The circumferential surface of each screw is threaded with a movable block. A connecting rod is provided on the side of each of the two movable blocks that are close to each other. The other ends of the two sets of connecting rods pass through the two cylindrical rotating blocks and are fixedly connected to an arc-shaped clamping plate. The leveler body is clamped and fixed between the two arc-shaped clamping plates. An annular connecting block is provided on the side of each of the two cylindrical rotating blocks that is away from the leveler body. A second rotating gear is provided on the outer circumferential surface of each of the two annular connecting blocks. A first rotating gear is provided on the outer side of each of the two second rotating gears. The first rotating gears are respectively provided on the circumferential surface of the two screws.

[0007] In a preferred embodiment of the present invention, the cylindrical rotating block has a moving groove inside, and the moving block is disposed inside the moving groove.

[0008] In a preferred embodiment of the present invention, the hollow base is provided with a flipping mechanism, which includes a mounting plate. Two mounting plates are symmetrically arranged front and back and are respectively arranged on the inner walls of the front and back sides of the hollow base. Both mounting plates are arranged in the middle of the two mounting frames. The upper surface of the two mounting plates is provided with a toothed plate and a fixing protrusion. The fixing protrusion is closer to the leveler body than the toothed plate.

[0009] In a preferred embodiment of the present invention, each of the square mounting blocks is connected to a lifting plate by a reset spring, and the lifting plate and the fixed protrusion are on the same horizontal plane. The lower end of the lifting plate is lower than the height of the fixed protrusion and does not contact the upper surface of the mounting plate. The rotating gear two and the toothed plate one are on the same horizontal plane, and the teeth of the rotating gear two match the teeth of the toothed plate one.

[0010] In a preferred embodiment of the present invention, a plug-in block is provided on the lower surface of the upper end of the lifting plate, and slots are provided at both the upper and lower ends of the cylindrical rotating block. The lower end of the plug-in block passes through the upper end of the square mounting block and is inserted into the slot at the upper end.

[0011] In a preferred embodiment of the present invention, movable slots are provided on both the front and rear sides of the hollow base. A lifting cylinder is provided inside the left side of each of the two movable slots. A toothed plate is provided at the upper end of the lifting cylinder, and the teeth of the toothed plate match the teeth of the rotating gear.

[0012] In a preferred embodiment of the present invention, a discharge mechanism is provided inside the right side of the hollow base. The discharge mechanism includes a second servo motor, which is located at the rear right end of the hollow base. The power output end of the second servo motor is connected to a second rotating shaft. The circumferential surface of the second rotating shaft is connected to a conveyor belt via a transmission roller. Both the transmission roller and the conveyor belt are provided in two sets. The middle of both sets of conveyor belts is hollow. A placement plate is provided in the middle of the front end of each set of conveyor belts. The two sides of the placement plate do not contact the conveyor belt. An electric lifting rod is provided at the lower end of each of the two placement plates. The electric lifting rod is installed inside the hollow base via a fixing plate.

[0013] In a preferred embodiment of the present invention, a second lifting cylinder is provided on the right side of the upper surface of the hollow base, and four second lifting cylinders are provided. The two second lifting cylinders on the left are located above the left conveyor belt, and the two second lifting cylinders on the right are located above the right conveyor belt. The lower end of each of the four second lifting cylinders is provided with a toothed plate, and the teeth of the toothed plate match the teeth of the rotating gear.

[0014] In a preferred embodiment of the present invention, a through groove is provided at the right rear end of the hollow base, and two through grooves are provided, with the rear ends of the two sets of conveyor belts respectively disposed inside the two through grooves.

[0015] In a preferred embodiment of the present invention, the conveying mechanism includes a servo motor, which is located on the left rear side of the hollow base. The power output end of the servo motor is connected to a rotating shaft. The circumferential surface of the rotating shaft is connected to a chain conveyor belt via a sprocket. The chain conveyor belt is hollow in the middle. Several sets of clamping and fixing mechanisms are all located on the surface of the chain conveyor belt.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0017] (1) The clamping and fixing mechanism can stably clamp and fix the flattener, and then smoothly transfer the flattener to the laser interferometer for testing. Then, before transferring it to the second laser interferometer, the flipping mechanism can flip the flattener 180 degrees, so that the second laser interferometer can test the other side of the flattener. The operation is simple and quick, and the testing efficiency is high.

[0018] (2) Through the set discharge mechanism, lifting cylinder two and toothed plate three, the leveler after inspection can be removed stably, and then the leveler can be smoothly conveyed backward without affecting the overall inspection work, so that the inspection tooling can be carried out continuously and stably. Attached Figure Description

[0019] To facilitate understanding by those skilled in the art, the present invention will be further described below with reference to the accompanying drawings.

[0020] Figure 1 This is a schematic diagram of the first three-dimensional structure of the present invention;

[0021] Figure 2 This is a schematic diagram of the second three-dimensional structure of the present invention;

[0022] Figure 3 This is a perspective view of the present invention.

[0023] Figure 4 This is a right sectional perspective view of the present invention;

[0024] Figure 5 This is a three-dimensional structural diagram of the clamping and fixing mechanism of the present invention;

[0025] Figure 6 This is a partial left sectional perspective view of the flipping mechanism of the present invention;

[0026] Figure 7 This is a three-dimensional structural diagram of the material discharge mechanism of the present invention.

[0027] In the diagram: 1. Hollow base; 2. Conveying mechanism; 201. Servo motor one; 202. Rotating shaft one; 203. Sprocket; 204. Chain conveyor belt; 3. Clamping and fixing mechanism; 301. Square mounting block; 302. Cylindrical rotating block; 303. Screw; 304. Moving block; 305. Connecting rod; 306. Arc-shaped clamping plate; 307. Rotating gear one; 308. Annular connecting block; 309. Rotating gear two; 4. Leveler body; 5. Tilting mechanism; 501. Mounting plate; 50 2. Lifting plate; 503. Toothed plate one; 504. Fixed convex plate; 505. Return spring; 506. Insertion block; 6. Discharge mechanism; 601. Servo motor two; 602. Rotating shaft two; 603. Transmission roller; 604. Conveyor belt; 605. Placement plate; 606. Electric lifting rod; 7. Mounting frame; 8. Laser interferometer; 9. Movable slot; 10. Lifting cylinder one; 11. Toothed plate two; 12. Slot; 13. Moving slot; 14. Through slot; 15. Lifting cylinder two; 16. Toothed plate three. Detailed Implementation

[0028] The technical solution of the present invention will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0029] Example 1:

[0030] Please see Figure 1 - Figure 7 As shown, a testing device for a flattener in a semiconductor grinding unit includes a hollow base 1. A mounting bracket 7 is provided on the upper surface of the hollow base 1, and two mounting brackets 7 are provided. A laser interferometer 8 is provided on the inner top of each of the two mounting brackets 7. The laser interferometer 8 is prior art and will not be described in detail. A conveying mechanism 2 is provided inside the hollow base 1, and a clamping and fixing mechanism 3 is provided on the conveying mechanism 2. Several sets of clamping and fixing mechanisms 3 are provided. The conveying mechanism 2 includes a servo motor 201, and the servo motor 201 is connected to a motor... The seat is located on the left rear side of the hollow base 1. The power output end of the servo motor 201 is connected to the rotating shaft 202 through a coupling. The circumferential surface of the rotating shaft 202 is connected to the chain conveyor belt 204 through the sprocket 203. The chain conveyor belt 204 is hollow in the middle. The hollow design of the chain conveyor belt 204 provides a turning space when the object to be detected needs to be turned over, so that both the upper and lower surfaces of the object to be detected can be detected. Several sets of clamping and fixing mechanisms 3 are set on the surface of the chain conveyor belt 204.

[0031] The clamping and fixing mechanism 3 includes two square mounting blocks 301 arranged symmetrically front and rear. A cylindrical rotating block 302 is rotatably mounted inside each of the two square mounting blocks 301. A screw 303 is rotatably mounted inside each of the two cylindrical rotating blocks 302. A movable block 304 is threaded onto the circumferential surface of each screw 303. A movable groove 13 is formed inside each cylindrical rotating block 302, and the movable block 304 is disposed inside the movable groove 13. The movable groove 13 provides space for the movable block 304 to move back and forth, allowing the movable blocks 304 on the front and rear sides to move closer or further apart. Each movable block 304 has a connecting rod 305 on one side that is close to each other. The other ends of the two sets of connecting rods 305 pass through the two cylindrical rotating blocks 302 and are fixedly connected to the arc-shaped clamping plate 306. The leveler body 4 is clamped and fixed between the two arc-shaped clamping plates 306. Each cylindrical rotating block 302 has an annular connecting block 308 on the side away from the leveler body 4. The outer circumference of the two annular connecting blocks 308 is provided with a rotating gear 2 309. The outer side of the two rotating gear 2 309 is provided with a rotating gear 1 307. The two rotating gear 1 307 are respectively provided on the circumference of the two screws 303.

[0032] It should be noted that the two square mounting blocks 301 in each set of clamping and fixing mechanisms 3 are respectively set on the front and rear sides of the surface of the chain conveyor belt 204, so that the two square mounting blocks 301 can clamp and fix the leveler body 4 in the middle, so that the leveler body 4 is located above the hollow part of the chain conveyor belt 204, which facilitates the subsequent flipping operation of the leveler body 4.

[0033] The hollow base 1 is internally equipped with a flipping mechanism 5, which includes mounting plates 501. Two mounting plates 501 are symmetrically arranged front and back and are respectively located on the inner walls of the front and back sides of the hollow base 1. Both mounting plates 501 are located in the middle of two mounting brackets 7. The upper surface of each mounting plate 501 is provided with a toothed plate 503 and a fixing protrusion 504. The fixing protrusion 504 is closer to the leveler body 4 than the toothed plate 503. Each square mounting block 301 is connected to a lifting plate 502 above it by a return spring 505. The lower surface of the upper end of the lifting plate 502 is provided with a cylindrical insertion block 506. The rotating block 302 has slots 12 at both its upper and lower ends. The lower end of the insertion block 506 passes through the upper end of the square mounting block 301 and is inserted into the upper slot 12. The return spring 505 can apply a downward pulling force to the lifting plate 502, so that the lifting plate 502 can drive the insertion block 506 to move downward and insert into the slot 12, limiting and fixing the cylindrical rotating block 302. The lifting plate 502 and the fixed protrusion 504 are on the same horizontal plane, so that when the upper clamping and fixing mechanism 3 moves horizontally to the right, the lower end of the lifting plate 502 will contact the upper end of the fixed protrusion 504, thereby lifting the plate 502 to the right. 502 is smoothly pushed upwards. The fixed convex plate 504 has ramps on both sides, allowing the lifting plate 502 to slowly move upwards from left to right. Then, the bottom of the lifting plate 502 contacts the highest point of the fixed convex plate 504 for a short period before resetting downwards via the right ramp. This results in the insertion block 506 temporarily losing its limiting and fixing effect on the cylindrical rotating block 302. The lower end of the lifting plate 502 is lower than the height of the fixed convex plate 504 and does not contact the upper surface of the mounting plate 501. The rotating gear 2 309 and the gear plate 1 503 are on the same horizontal plane. The teeth of the rotating gear 309 match the teeth of the toothed plate 503. The entire length of the toothed plate 503 can only drive the rotating gear 309 to rotate 180 degrees, so that the flattener body 4 can rotate 180 degrees, and then perform flatness detection on its upper and lower surfaces. The entire length of the toothed plate 503 is located in the middle of the fixed convex plate 504, and its left and right ends are at some distance from the slope of the fixed convex plate 504. This ensures that the rotating gear 309 meshes with the toothed plate 503 only after the lifting plate 502 has stably moved the plug block 506 out of the slot 12, thus avoiding jamming.

[0034] It should be noted that when the clamping and fixing mechanism 3 clamps the flattener body 4 and is located below the laser interferometer 8 on the lower left, it can perform flatness testing on the upper surface of the flattener body 4. After the test is completed, when the clamping and fixing mechanism 3 moves the flattener body 4 to the right and below the laser interferometer 8 on the lower right, the clamping and fixing mechanism 3 will pass through the mounting plate 501, causing the lifting plate 502 to contact the fixing protrusion 504, pushing the lifting plate 502 upward, causing the insertion block 506 to move out of the slot 12. At this time, the cylindrical rotating block 302 loses its fixing effect and can rotate inside the square mounting block 301. Then, when it continues to move to the right, the rotating gear 2 309 meshes with the toothed plate 1 503 and rotates, causing the rotating gear 2 309 to pass through The annular connecting block 308 drives the cylindrical rotating block 302 to rotate, which in turn drives the arc-shaped clamping plate 306 and the leveler body 4 to rotate. When the rotating gear 2 309 disengages from the toothed plate 1 503, the rotating gear 2 309 drives the cylindrical rotating block 302 to rotate 180 degrees, causing the leveler body 4 to rotate 180 degrees. Then, after the lifting plate 502 disengages from the fixed protrusion 504, it returns to its original position under the action of the return spring 505, thereby inserting the plug block 506 back into the slot 12 and fixing the cylindrical rotating block 302 inside the square mounting block 301, preventing the rotation of the cylindrical rotating block 302 from affecting its use. At this time, the laser interferometer 8 on the right side can perform flatness detection on the original lower surface of the leveler body 4.

[0035] The hollow base 1 has movable slots 9 on both the front and rear sides inside. A lifting cylinder 10 is installed inside the left side of each movable slot 9. A gear plate 11 is installed at the upper end of the lifting cylinder 10. The teeth of the gear plate 11 match the teeth of the rotating gear 307. The movable slots 9 provide installation space for the lifting cylinder 10 and the gear plate 11, and also provide rotation space for the rotating gear 307, rotating gear 309, and lifting plate 502 protruding from the outer end of the square mounting block 301, thus avoiding… Rotating gear 1 307, rotating gear 2 309, and lifting plate 502 collide and are damaged by the inner wall of the hollow base 1 under the drive of the chain conveyor belt 204. The bottom of lifting cylinder 10 is located above the square mounting block 301 below, so that the square mounting block 301 will not collide with lifting cylinder 10 when it rotates. The upper end of toothed plate 2 11 is initially located below rotating gear 1 307, so that rotating gear 1 307 will not collide with rotating gear 1 307 when it moves.

[0036] Example 2:

[0037] Please refer to Figure 3 - Figure 4As shown, a discharge mechanism 6 is provided inside the right side of the hollow base 1. The discharge mechanism 6 includes a servo motor 601, which is mounted on the rear right side of the hollow base 1 via a motor mount. The power output end of the servo motor 601 is connected to a rotating shaft 602 via a coupling. The circumferential surface of the rotating shaft 602 is connected to a conveyor belt 604 via a transmission roller 603. Both the transmission roller 603 and the conveyor belt 604 are provided in two sets. The middle of both sets of conveyor belts 604 is hollow. A placement plate 605 is provided in the middle of the front end of each set of conveyor belts 604. The sides of the placement plate 605 do not contact the conveyor belt 604, allowing the placement plate 605 to move vertically. The two placement plates 605 are each equipped with an electric lifting rod 606 at their lower ends. The electric lifting rod 606 is installed inside the hollow base 1 through a fixing plate. A through slot 14 is provided at the rear right side of the hollow base 1. There are two through slots 14. The rear ends of the two sets of conveyor belts 604 are respectively set inside the two through slots 14. The through slots 14 provide installation space for the rear ends of the conveyor belts 604, so that the rear ends of the conveyor belts 604 can extend to the rear side of the hollow base 1, which is convenient for conveying the inspected flat body 4 to the rear.

[0038] It should be noted that rubber pads are provided on the upper surface of the placement plate 605 and the clamping surface of the arc-shaped clamping plate 306, so that when the placement plate 605 or the arc-shaped clamping plate 306 comes into contact with the leveler body 4, the contact surfaces of the two will not be scratched, which improves the safety of the leveler body 4 during clamping, fixing or transportation, avoids scratches and reduces the defect rate. The left conveyor belt 604 is for conveying good levelers, and the right conveyor belt 604 is for conveying defective levelers.

[0039] Four lifting cylinders 15 are provided on the right side of the upper surface of the hollow base 1. Two lifting cylinders 15 on the left are located above the left conveyor belt 604, and two lifting cylinders 15 on the right are located above the right conveyor belt 604. The lower end of each of the four lifting cylinders 15 is provided with a toothed plate 16, and the teeth of the toothed plate 16 match the teeth of the rotating gear 307. The arrangement of the lifting cylinders 15 and the toothed plate 16 here allows the toothed plate 16 to rotate in the opposite direction after the lifting cylinders 15 drive the toothed plate 16 to move downward. This causes the arc-shaped clamping plate 306 to lose its clamping and fixing effect on the leveler body 4, thereby allowing the leveler body 4 to fall stably on the placement plate 605 and complete the unloading work.

[0040] In use, the present invention first places the leveler to be tested between two arc-shaped clamping plates 306 on the upper left side using a feeding device such as a mechanical gripper. Then, two lifting cylinders 10 are activated, which drive the toothed plate 11 to move upward, causing the toothed plate 11 to drive the rotating gear 307 to rotate. The rotating gear 307 drives the screw 303 to rotate, causing the moving block 304, connecting rod 305, and arc-shaped clamping plates 306 to move towards the leveler. Subsequently, the two arc-shaped clamping plates 306 can clamp and fix the leveler body 4. Then, the servo motor 201 is activated. This causes the servo motor 201 to drive the chain conveyor belt 204 to rotate via the shaft 202 and sprocket 203. This causes the chain conveyor belt 204 to drive the upper arc-shaped clamping plate 306 and the flattener body 4 to move horizontally to the right. When the rotating gear 307 moves horizontally to the right and disengages from the toothed plate 11, the lifting cylinder 10 is activated again to drive the toothed plate 11 to return to its original position. This prevents the toothed plate 11 from moving downwards before disengaging from the rotating gear 307, which would cause the rotating gear 307 to rotate in the opposite direction and cause the arc-shaped clamping plates 306 to move away from each other and lose their clamping and fixing effect on the flattener body 4.

[0041] The chain conveyor belt 204 moves the leveler body 4 to the right, below the laser interferometer 8 on the left, and after passing the laser interferometer 8, the laser interferometer 8 on the left will detect the flatness of the upper surface of the leveler body 4. As it continues to move to the right, the lifting plate 502 and the rotating gear 2 309 on the square mounting block 301 pass through the mounting plate 501. When the lifting plate 502 contacts the fixed protrusion 504, it pushes the lifting plate 502 upward, causing the insertion block 506 to move out of the slot 12. At this time, the cylindrical rotating block 302 loses its fixing effect and can rotate inside the square mounting block 301. As it continues to move to the right, the rotating gear 2 309 meshes with the toothed plate 1 503 and rotates, causing the rotating gear 2 309 to drive the cylindrical rotating block 302 to rotate through the annular connecting block 308. The cylindrical rotating block 302 can drive the arc-shaped clamping plate 306 and the flattener body 4 to rotate. When the rotating gear 2 309 disengages from the toothed plate 1 503, the rotating gear 2 309 can drive the cylindrical rotating block 302 to rotate 180 degrees, so that the flattener body 4 rotates 180 degrees. Then, after the lifting plate 502 disengages from the fixed protrusion plate 504, it resets downward under the action of the reset spring 505, so that the plug block 506 is inserted into the slot 12 again, and the cylindrical rotating block 302 is fixed inside the square mounting block 301 to prevent the rotation of the cylindrical rotating block 302 from affecting the use. Then, the chain conveyor belt 204 continues to carry the flipped flattener body 4 to the right to the right laser interferometer 8. After passing the right laser interferometer 8, the flatness of the original lower surface of the flattener body 4 can be detected.

[0042] Based on the results detected by the two laser interferometers 8, the subsequent reaction is as follows: When the leveler body 4 is of good quality, after the chain conveyor belt 204 moves the leveler body 4 to the right and above the left conveyor belt 604, it pauses for a period of time. At this time, the electric lifting rod 606 is activated, which moves the placement plate 605 upward until it contacts the lower surface of the leveler body 4 and then stops. Then, the second lifting cylinder 15 is activated, which moves the toothed plate 16 downward, causing the toothed plate 16 to drive the rotating gear 307 to rotate, which in turn causes the moving block 304 to drive the passage. The connecting rod 305 drives the arc-shaped clamping plates 306 to move away from each other, losing their clamping and fixing effect on the leveler body 4. Then, the electric lifting rod 606 drives the placement plate 605 and the leveler body 4 to move downward to the initial position, so that the leveler body 4 falls on the conveyor belt 604. The servo motor 601 is started, so that the conveyor belt 604 moves the leveler body 4 backward. Similarly, when the leveler body 4 is a defective product, it is necessary to move the leveler body 4 to the right and above the right conveyor belt 604 after the chain conveyor belt 204 drives it, pause, and then carry out the above-mentioned unloading and conveying work.

[0043] After the material is unloaded, the square mounting block 301 needs to be moved to the right by the chain conveyor belt 204 so that the rotating gear 307 loses engagement with the toothed plate 16. Then, the lifting cylinder 15 drives the toothed plate 16 to reset upwards. This is to prevent the toothed plate 16 from engaging with the rotating gear 307 when it moves upwards, which would reduce the space between the two arc-shaped clamping plates 306 and affect the subsequent clamping and loading work.

[0044] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the invention to any specific implementation. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. A testing device for a flattener in a semiconductor grinding unit, comprising a hollow base (1), wherein a mounting bracket (7) is provided on the upper surface of the hollow base (1), and two mounting brackets (7) are provided, wherein a laser interferometer (8) is provided on the inner top of each of the two mounting brackets (7), characterized in that, The hollow base (1) is provided with a conveying mechanism (2), and the conveying mechanism (2) is provided with a clamping and fixing mechanism (3). The clamping and fixing mechanism (3) is provided in several groups. The clamping and fixing mechanism (3) includes a square mounting block (301), and two square mounting blocks (301) are symmetrically arranged front and back. A cylindrical rotating block (302) is rotatably installed inside each of the two square mounting blocks (301). A screw (303) is rotatably installed inside each of the two cylindrical rotating blocks (302). A moving block (304) is threadedly connected to the circumferential surface of each of the two screws (303). A connecting rod is provided on the side of each moving block (304) that is close to each other. 305), the other ends of the two sets of connecting rods (305) pass through the two cylindrical rotating blocks (302) respectively and are fixedly connected to the arc-shaped clamping plate (306). The leveler body (4) is clamped and fixed between the two arc-shaped clamping plates (306). An annular connecting block (308) is provided on the side of the two cylindrical rotating blocks (302) away from the leveler body (4). A rotating gear two (309) is provided on the outer circumference of the two annular connecting blocks (308). A rotating gear one (307) is provided on the outer side of the two rotating gear two (309). The two rotating gear one (307) are respectively provided on the circumference surface of the two screws (303). The hollow base (1) is provided with a flipping mechanism (5). The flipping mechanism (5) includes a mounting plate (501). Two mounting plates (501) are symmetrically arranged in front and back and are respectively arranged on the inner walls of the front and back sides of the hollow base (1). Both mounting plates (501) are arranged in the middle of the two mounting frames (7). The upper surface of the two mounting plates (501) is provided with a toothed plate (503) and a fixing protrusion (504). The fixing protrusion (504) is closer to the flattener body (4) than the toothed plate (503). Each of the square mounting blocks (301) is connected to a lifting plate (502) above it by a return spring (505), and the lifting plate (502) and the fixed protrusion plate (504) are on the same horizontal plane. The lower end of the lifting plate (502) is lower than the height of the fixed protrusion plate (504) and does not contact the upper surface of the mounting plate (501). The rotating gear two (309) and the tooth plate one (503) are on the same horizontal plane, and the teeth of the rotating gear two (309) match the teeth of the tooth plate one (503). The lower surface of the upper end of the lifting plate (502) is provided with a plug-in block (506), and slots (12) are provided at both the upper and lower ends of the cylindrical rotating block (302). The lower end of the plug-in block (506) passes through the upper end of the square mounting block (301) and is inserted into the upper slot (12). The hollow base (1) has movable slots (9) on both the front and rear sides. The two movable slots (9) are equipped with lifting cylinders (10) on the left side. The upper end of the lifting cylinders (10) is equipped with toothed plates (11). The teeth of the toothed plates (11) match the teeth of the rotating gears (307).

2. The testing device for a flattener in a semiconductor grinding unit according to claim 1, characterized in that, The cylindrical rotating block (302) has a moving groove (13) inside, and the moving block (304) is disposed inside the moving groove (13).

3. The testing device for a flattener in a semiconductor grinding unit according to claim 1, characterized in that, The hollow base (1) is provided with a discharge mechanism (6) inside the right side. The discharge mechanism (6) includes a servo motor (601). The servo motor (601) is located on the rear right side of the hollow base (1). The power output end of the servo motor (601) is connected to a rotating shaft (602). The circumferential surface of the rotating shaft (602) is connected to a conveyor belt (604) via a transmission roller (603). Both the transmission roller (603) and the conveyor belt (604) are provided with two sets. The middle of both sets of the conveyor belts (604) is hollow. The middle of the front end of both sets of the conveyor belts (604) is provided with a placement plate (605). The two sides of the placement plate (605) do not contact the conveyor belt (604). The lower end of both placement plates (605) is provided with an electric lifting rod (606). The electric lifting rod (606) is installed inside the hollow base (1) via a fixing plate.

4. The testing device for a flattener in a semiconductor grinding unit according to claim 3, characterized in that, The hollow base (1) has a lifting cylinder two (15) on the right side of its upper surface, and there are four lifting cylinder two (15). The two lifting cylinder two (15) on the left side are located above the left conveyor belt (604), and the two lifting cylinder two (15) on the right side are located above the right conveyor belt (604). The lower end of each of the four lifting cylinder two (15) is provided with a toothed plate three (16), and the teeth of the toothed plate three (16) match the teeth of the rotating gear one (307).

5. The testing device for a flattener in a semiconductor grinding unit according to claim 3, characterized in that, The hollow base (1) has a through groove (14) at its right rear end, and there are two through grooves (14). The rear ends of the two sets of conveyor belts (604) are respectively located inside the two through grooves (14).

6. The testing device for a flattener in a semiconductor grinding unit according to claim 1, characterized in that, The conveying mechanism (2) includes a servo motor (201), and the servo motor (201) is located on the left rear side of the hollow base (1). The power output end of the servo motor (201) is connected to a rotating shaft (202). The circumferential surface of the rotating shaft (202) is connected to a chain conveyor belt (204) via a sprocket (203). The chain conveyor belt (204) is hollow in the middle. Several sets of clamping and fixing mechanisms (3) are all located on the surface of the chain conveyor belt (204).

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