A photocatalytic-assisted spray polishing head
By using a photocatalytically assisted spray polishing head, which utilizes ultraviolet light to irradiate titanium dioxide photocatalyst and spray polishing slurry, the problem of efficient polishing of reaction-sintered silicon carbide optical components has been solved, achieving uniform material removal and efficient polishing.
Patent Information
- Application Number
- CN202510260135.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-06
- Publication Date
- 2025-11-18
- Estimated Expiration
- 2045-03-06
AI Technical Summary
Existing technologies struggle to efficiently polish reactive sintered silicon carbide optical components, especially due to their high hardness and strong chemical stability, which leads to low polishing efficiency and high difficulty. Furthermore, uneven material removal during polishing with small grinding heads increases the difficulty of computer control.
The photocatalytically assisted spray polishing head integrates a central shaft, a gas-liquid coaxial transport component, an electric slip ring, and a polishing disc component. It utilizes ultraviolet light to irradiate titanium dioxide photocatalyst to create a highly efficient oxidation environment, and achieves uniform material removal through polishing liquid spraying.
It improves polishing efficiency and quality, achieves uniform material removal from the polishing head, reduces the difficulty of computer control, and enhances polishing efficiency and quality.
Smart Images

Figure CN120095673B_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of ultra-precision polishing technology and relates to a photocatalytically assisted spray polishing head. Background Technology
[0002] For large-size optical components, such as space telescopes, reactive sintered silicon carbide is a high-quality material that meets their performance requirements. However, due to its high hardness, strong chemical stability, and two-phase material characteristics, it has low polishing efficiency and is difficult to polish. Therefore, achieving high-quality and efficient processing to obtain an optical surface that meets its optical performance requirements is crucial for expanding the application of reactive sintered silicon carbide in optical components. Traditional chemical mechanical polishing using nanoparticles made of materials such as cerium dioxide and silicon dioxide has weak chemical effects and low polishing efficiency. Photocatalysis can create a highly efficient oxidation environment by irradiating titanium dioxide photocatalysts with ultraviolet light, but how to integrate it with a polishing head to achieve a high-efficiency polishing effect is a challenge.
[0003] Small-head polishing is a widely used method in computer-controlled optical surface shaping, which completes surface polishing by controlling the motion parameters of the polishing head. Due to the difference in speed at various points on the polishing disk during the operation of the small polishing head, the material removal distribution is often uneven, which increases the difficulty of computer control. In order to reduce the difficulty of computer control and improve polishing efficiency, it is necessary to enable the polishing head to achieve uniform material removal. Summary of the Invention
[0004] In order to solve the problems existing in the prior art, the purpose of this invention is to provide a photocatalytically assisted spray polishing head that achieves efficient polishing and uniform material removal by bottom spraying through photocatalysis.
[0005] The technical means employed in this invention are as follows:
[0006] A photocatalytically assisted spray polishing head includes a central shaft, a gas-liquid coaxial transport assembly, an electric slip ring, and a polishing disc assembly.
[0007] The central shaft is a rotary stepped shaft structure with two stepped positioning surfaces in the middle. A radial through hole is opened in the middle of the stepped positioning surface, and an inner flow channel is left along the axial direction below the through hole. The stepped positioning surface is used to position and install the gas-liquid coaxial transport component, and the position of the through hole is aligned with the axial direction of the spray interface. A retaining spring groove is opened in the middle section of the central shaft, and a retaining spring is installed in the retaining spring, which plays a limiting role for the gas-liquid coaxial transport component. A hose mounting groove is provided at the bottom of the central shaft, and a hose is installed in the hose mounting groove. The groove depth is the same as the hose wall thickness, and the hose can achieve a sealing effect on the flow channel in the groove.
[0008] The gas-liquid coaxial transport assembly is used to achieve coaxial transport of polishing spray during the rotation of the polishing head. It includes a main body shell, an upper bearing, a lower bearing, a rotary seal, a spray inlet, a limiting screw, and an electric slip ring limiting component. The main body shell is cylindrical in shape, with a through hole along its center that fits with the central shaft. A threaded mounting hole connected to the through hole is located at the center of its side. Limiting threaded mounting blind holes are provided on both sides of the outer shell at a 90° angle to the threaded mounting hole. The threaded mounting hole is used to install the spray inlet, allowing the polishing spray to be transported from the outside to the inside of the gas-liquid coaxial transport assembly. The threaded mounting blind holes are used to install the limiting screw, preventing the main body shell from rotating during the polishing head's rotation. An electric slip ring limiting component is fitted onto the limiting screw, ensuring that the electric slip ring remains relatively stationary with respect to the main body shell during the polishing head's rotation. The main body shell has bearing mounting positions and annular mounting grooves symmetrically positioned inside. The bearing mounting positions are used to install the upper and lower bearings, and the annular mounting grooves are used to install rotary seals to ensure the stable operation of the gas-liquid coaxial transport assembly and the sealing of the flow channel when the polishing head rotates.
[0009] The polishing disc assembly includes a polishing disc body, a coupling, ultraviolet (UV) lamps, and a bonded abrasive polishing pad. The polishing disc body contains four L-shaped flow channels arranged symmetrically on a central axis. Each flow channel has three downward-facing pressure outlets, positioned at the gaps between the grinding units of the bonded abrasive polishing pad attached to the bottom of the polishing disc. These pressure outlets allow the polishing liquid to be evenly sprayed onto the workpiece surface. The polishing disc body has four symmetrically arranged mounting slots at the intervals between the L-shaped flow channels. Each mounting slot contains at least one UV lamp, and the positive and negative wires of the UV lamps are connected to an external power source via slip rings. The upper end of the polishing disc body is a hollow cylindrical section, on which a coupling is installed, connecting it to the end section of the central shaft and its internal flow channels.
[0010] Preferably, the central shaft is made of stainless steel; the top of the central shaft is provided with a connecting section for docking with the machine tool; the central shaft has two or three through holes at the spray interface position corresponding to the gas-liquid coaxial transport component, and the through holes are evenly distributed along the circumference of the central shaft.
[0011] Preferably, the housing of the gas-liquid coaxial transport assembly is made of stainless steel; the spray interface is installed in the middle of the housing via a threaded connection; the limiting screws are symmetrically installed in the threaded holes on the housing at a 90° angle to the spray interface along the circumference; bearings and rotary seals are symmetrically installed inside the housing of the gas-liquid coaxial transport assembly; the upper and lower bearings are ceramic bearings; the rotary seal is a rotary combination sealing ring or a pressure-resistant skeleton oil seal.
[0012] Preferably, the slip ring is a 6-channel 2A slip ring.
[0013] Preferably, the coupling is a diaphragm coupling.
[0014] Preferably, the polishing disc body is 3D printed or cast in one piece; the bottom of the polishing disc body has spray outlets evenly distributed in a cross shape; the ultraviolet lamp beads are 3 or 4 evenly embedded inside the polishing disc body; after the ultraviolet lamp beads are installed, they are potted with insulating and thermally conductive adhesive; the polishing pad is a bonded abrasive polishing pad; the abrasive material of the bonded abrasive polishing pad is diamond.
[0015] Preferably, the polishing liquid is a nano-titanium dioxide dispersion with a concentration range of 0.5% to 2%; the polishing liquid spray is obtained by atomizing the polishing liquid with compressed air or oxygen; the high-pressure polishing liquid spray pressure is between 0.1 MPa and 1 MPa.
[0016] The beneficial effects of this invention are as follows:
[0017] 1. This invention can create a localized, highly efficient oxidation environment on the workpiece surface through photocatalysis, thereby improving the polishing efficiency and quality of the polishing head.
[0018] 2. The high-pressure polishing fluid spray at the bottom of the polishing head can adjust the pressure distribution at the bottom of the polishing disc, thereby enabling the polishing head to achieve uniform material removal. Attached Figure Description
[0019] Figure 1 This is a schematic diagram of the three-dimensional structure of a photocatalytically assisted spray polishing head according to the present invention.
[0020] Figure 2 This is a schematic diagram of the central shaft assembly of the present invention.
[0021] Figure 3(a) is a schematic diagram of the central axis of the present invention.
[0022] Figure 3(b) is a schematic cross-sectional view of the central axis of the present invention.
[0023] Figure 4(a) is a schematic diagram of the gas-liquid coaxial transport assembly of the present invention.
[0024] Figure 4(b) is a cross-sectional schematic diagram of the gas-liquid coaxial transport component of the present invention.
[0025] Figure 5(a) is a top view of the main body shell of the present invention.
[0026] Figure 5(b) is a cross-sectional view of the main body shell of the present invention.
[0027] Figure 5(c) is a perspective view of the main body shell of the present invention.
[0028] Figure 6(a) is a schematic diagram of the polishing disc assembly of the present invention.
[0029] Figure 6(b) is a cross-sectional view of the polishing disc assembly of the present invention.
[0030] Figure 7(a) is a schematic diagram of the main body of the polishing disc of the present invention.
[0031] Figure 7(b) is a cross-sectional view of the polishing disc body AA of the present invention.
[0032] Figure 7(c) is a cross-sectional view of the polishing disc body BB of the present invention.
[0033] In the diagram: 1. Central shaft; 2. Gas-liquid coaxial transport assembly; 21. Limiting screw; 22. Limiting component; 23. Housing; 24. Upper bearing; 25. Rotary seal; 26. Spray interface; 27. Lower bearing; 3. Electric slip ring; 4. Coupling; 5. Polishing disc assembly; 51. Polishing disc body; 52. UV lamp bead; 53. Polishing pad; 6. Snap ring; 7. Hose. Detailed Implementation
[0034] It should be noted that, unless otherwise specified, the embodiments and features described in the present invention can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.
[0035] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the present invention or its application or use. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0036] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of exemplary embodiments according to the invention. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.
[0037] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values of the components and steps described in these embodiments do not limit the scope of the invention. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following figures denote similar items; therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.
[0038] In the description of this invention, it should be understood that the orientation or positional relationship indicated by directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" is generally based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this invention and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this invention. The directional terms "inner" and "outer" refer to the inner and outer contours relative to the outline of each component itself.
[0039] For ease of description, spatial relative terms such as "above," "over," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation besides the orientation of the device as described in the figures. For example, if the device in the figures is inverted, a device described as "above" or "above" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.
[0040] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore should not be construed as limiting the scope of protection of this invention.
[0041] Example 1:
[0042] like Figure 1 As shown, the present invention discloses a photocatalytically assisted spray polishing head, including a central shaft 1, on which a gas-liquid coaxial transport assembly 2, an electric slide 3, and a polishing disc assembly 5 are mounted from top to bottom.
[0043] like Figure 2 As shown, the central shaft 1 is provided with a shoulder to determine the installation position of the gas-liquid coaxial transport assembly 2, and the liquid coaxial transport assembly 2 is fixed by a retaining ring 7; the central shaft 1 has a through hole, which corresponds to the position of the gas mist interface of the gas-liquid coaxial transport assembly 2, so as to realize the coaxial delivery of high-pressure polishing liquid spray; a flexible hose 7 is installed at the end of the central shaft 1, which forms a closed flow channel after docking with the polishing disc assembly 5 for delivering high-pressure polishing liquid spray.
[0044] Specifically, the central shaft 1 is made of stainless steel, which not only provides high mechanical strength, but also prevents rust in the polishing liquid environment, ensuring the stability of the component.
[0045] As shown in Figures 3 and 4, the gas-liquid coaxial transport assembly 2 includes an outer component and an inner component, with the outer shell 23 as the dividing line. In the outer component, the limiting screw 21 is fastened through the threads on both sides of the outer shell 23. The upper part of the limiting member 22 has a threaded hole and is installed on the limiting screw 21. Its lower part is inserted into the reserved position of the electric slip ring 3, so that the electric slip ring and the outer shell 23 remain stationary when the central shaft 1 rotates. In the inner component, the spray interface 26 is installed through the threaded hole on the outer shell 23 and is used to receive the high-pressure polishing liquid spray. The rotary seal 25 can ensure the sealing between the flow channel and the outside world during the rotation of the central shaft 1. The upper bearing 24 and the lower bearing 27 are installed on the two sections of the outer shell 23, and their inner holes cooperate with the central shaft 1 to realize the positioning and installation of the gas-liquid coaxial transport assembly 2.
[0046] Specifically, the outer shell 23, the limiting screw 21, and the limiting component 22 are made of stainless steel, ensuring mechanical strength while providing rust prevention; the upper bearing 24 and the lower bearing 27 are deep groove ball bearings made of ceramic material, which can withstand a certain axial load and have rust prevention capabilities; the rotary seal 25 can be a rotary seal ring or oil seal with pressure resistance, which can achieve low-friction rotary sealing under the condition of withstanding the spray pressure of polishing liquid.
[0047] As shown in Figure 5, the polishing disc body 51 has an internal flow channel and a cross-shaped distribution of high-pressure polishing liquid spray outlets at the bottom, which spray the liquid onto the workpiece surface to form a pressure gas film, thereby improving the material removal characteristics during the polishing process; the ultraviolet lamp bead 52 is embedded in the mounting groove of the polishing disc body 51; the bonded abrasive polishing pad 53 is pasted on the bottom surface of the polishing disc body 51 and has a hole at the high-pressure polishing liquid spray outlet.
[0048] The coupling 4 used for mounting the polishing disc assembly 5 is a diaphragm coupling, which compensates for errors during installation and deformation caused by load. The polishing disc body 51 is made of aluminum alloy and is manufactured by 3D printing or integral casting to ensure its structural strength while also providing corrosion resistance and high thermal conductivity, thereby improving the stability of the polishing process.
[0049] Example 2:
[0050] A photocatalytically assisted spray polishing head includes a central shaft 1, a gas-liquid coaxial transport assembly 2, an electric slip ring 3, and a polishing disc assembly 5.
[0051] The central shaft 1 is a rotating stepped shaft structure with two stepped positioning surfaces in the middle. A radial through hole is opened in the middle of the stepped positioning surface, and an inner flow channel is left along the axial direction below the through hole. The stepped positioning surface is used to position and install the gas-liquid coaxial transport component. The position of the through hole is aligned with the axial direction of the spray interface 26. A retaining spring groove is opened in the middle section of the central shaft 1. A retaining spring 6 is installed in the retaining spring groove. The retaining spring 6 plays a limiting role for the gas-liquid coaxial transport component 2. A hose mounting groove is provided at the bottom of the central shaft 1. A hose 7 is installed in the hose mounting groove. The groove depth is the same as the wall thickness of the hose 7. The hose 7 can achieve a sealing effect on the flow channel in the groove.
[0052] The gas-liquid coaxial transport assembly 2 is used to achieve coaxial transport of polishing spray during the rotation of the polishing head. It includes a main body shell 23, an upper bearing 24, a lower bearing 27, a rotary seal 25, a spray inlet 26, a limiting screw 21, and an electric slip ring limiting component 22. The main body shell 23 is cylindrical in shape, with a through hole along its center that fits with the central shaft 1. A threaded mounting hole connected to the through hole is located at the center of its side. Limiting threaded mounting blind holes are provided on both sides of the outer shell at a 90° angle to the threaded mounting hole. The threaded mounting hole is used to install the spray inlet 26, allowing the polishing spray to be transported from the outside to the inside of the gas-liquid coaxial transport assembly. The threaded mounting blind holes are used to install the limiting screw 21, preventing the main body shell 23 from rotating during the rotation of the polishing head. The electric slip ring limiting component 22 is fitted onto the limiting screw 21, ensuring that the electric slip ring remains relatively stationary with the main body shell 23 during the rotation of the polishing head. The main body shell 23 has bearing mounting positions and annular mounting grooves at symmetrical positions on the upper and lower sides. The bearing mounting positions are used to install the upper bearing 24 and the lower bearing 27. The annular mounting groove is used to install the rotary seal 25 to ensure the stable operation of the gas-liquid coaxial transport assembly and the sealing of the flow channel when the polishing head rotates.
[0053] The polishing disc assembly 5 includes a polishing disc body 51, a coupling 4, ultraviolet lamp beads 52, and a bonded abrasive polishing pad 53. The polishing disc body 51 contains four L-shaped flow channels arranged symmetrically at the center. Each flow channel has three downward-facing pressure outlets, located at the gaps between the grinding units of the bonded abrasive polishing pad 53 attached to the bottom of the polishing disc. These pressure outlets allow the polishing liquid to be sprayed evenly onto the workpiece surface. The polishing disc body 51 has four symmetrically arranged mounting slots at the intervals between the L-shaped flow channels. Each mounting slot contains at least one ultraviolet lamp bead 52, and the positive and negative wires of the ultraviolet lamp beads 52 are connected to an external power source via an electric slip ring 3. The upper end of the polishing disc body 51 is a hollow cylindrical section, on which the coupling 4 is installed, connecting it to the end section of the central shaft 1 and its internal flow channels.
[0054] The central shaft 1 is made of stainless steel; the top of the central shaft 1 is provided with a connecting section for docking with the machine tool; the central shaft 1 has two or three through holes at the spray interface position corresponding to the gas-liquid coaxial transport component 2, and the through holes are evenly distributed along the circumference of the central shaft.
[0055] The outer shell of the gas-liquid coaxial transport assembly 2 is made of stainless steel; the spray interface 26 is installed in the middle position of the outer shell via a threaded connection; the limiting screw 21 is symmetrically installed in the threaded hole on the outer shell at a 90° angle to the spray interface 26 along the circumference; bearings and rotary seals 25 are symmetrically installed inside the outer shell of the gas-liquid coaxial transport assembly 2; the upper bearing 24 and the lower bearing 27 are ceramic bearings; the rotary seal 25 is a rotary combination sealing ring or a pressure-resistant skeleton oil seal.
[0056] The electric slip ring 3 is a 6-channel 2A slip ring.
[0057] The coupling 4 is a diaphragm coupling.
[0058] The polishing disc body 51 is 3D printed or cast in one piece; the bottom of the polishing disc body has spray outlets evenly distributed in a cross shape; the ultraviolet lamp beads 52 are 3 or 4 evenly embedded inside the polishing disc body 51; after the ultraviolet lamp beads 52 are installed, they are potted with insulating and thermally conductive adhesive; the polishing pad 53 is a bonded abrasive polishing pad; the abrasive material of the bonded abrasive polishing pad is diamond.
[0059] The polishing slurry is a nano-titanium dioxide dispersion with a concentration range of 0.5% to 2%; the polishing slurry spray is obtained by atomizing the polishing slurry with compressed air or oxygen; the high-pressure polishing slurry spray pressure is between 0.1 MPa and 1 MPa.
[0060] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.
Claims
1. A photocatalytically assisted spray polishing head, characterized in that, It includes a central shaft (1), a gas-liquid coaxial transport assembly (2), an electric slip ring (3), and a polishing disc assembly (5); The central shaft (1) is a rotating stepped shaft structure with two stepped positioning surfaces in the middle. A radial through hole is opened in the middle of the stepped positioning surface, and an inner flow channel is left along the axial direction below the through hole. The stepped positioning surface is used to position and install the gas-liquid coaxial transport component. The position of the through hole is aligned with the axial direction of the spray interface (26). A retaining ring groove is opened in the middle section of the central shaft (1), and a retaining ring (6) is installed in the retaining ring groove. A hose mounting groove is provided at the bottom of the central shaft (1), and a hose (7) is installed in the hose mounting groove. The groove depth is the same as the wall thickness of the hose (7). The gas-liquid coaxial transport assembly (2) is used to realize the coaxial transport of polishing spray during the rotation of the polishing head. It includes a main body shell (23), an upper bearing (24), a lower bearing (27), a rotary seal (25), a spray interface (26), a limiting screw (21), and an electric slip ring limiting component (22). The main body shell (23) is cylindrical in shape. A through hole with clearance fit with the central shaft (1) is opened in the center along the axial direction. A threaded mounting hole connected to the through hole is opened in the center position of the side. Limiting threaded mounting blind holes are provided on both sides of the outer shell at a 90° angle to the threaded mounting hole. The threaded mounting hole is used to install the spray interface (26), and the threaded mounting blind hole is used to install the limiting screw (21). The polishing disc assembly (5) includes a polishing disc body (51), a coupling (4), ultraviolet lamp beads (52), and a bonded abrasive polishing pad (53). The polishing disc body (51) contains four L-shaped flow channels that are centrally symmetrically distributed. Each flow channel has three pressure outlets that are opened downwards. The distribution position of the pressure outlets corresponds to the grinding unit gap of the bonded abrasive polishing pad (53) attached to the bottom of the polishing disc. The polishing liquid can be sprayed evenly onto the surface of the workpiece through the pressure outlets. The polishing disc body (51) has four centrally symmetrical mounting slots in the L-shaped flow channel intervals. Each mounting slot has at least one ultraviolet lamp bead (52) installed in it. The positive and negative wires of the ultraviolet lamp bead (52) are connected to an external power source through an electric slip ring (3). The upper end of the polishing disc body (51) is a hollow cylindrical section with a coupling (4) installed. The coupling (4) is connected to the end section of the central shaft (1) and its internal flow channels.
2. The photocatalytically assisted spray polishing head according to claim 1, characterized in that, The main body shell (23) is provided with bearing mounting positions and annular mounting grooves at symmetrical positions on the upper and lower sides. The bearing mounting positions are used to install the upper bearing (24) and the lower bearing (27). The annular mounting groove is used to install a rotary seal (25) to ensure the stable operation of the gas-liquid coaxial transport component and the sealing of the flow channel when the polishing head rotates. The limiting screw (21) is fitted with an electric slip ring limiting component (22) so that the electric slip ring remains relatively stationary with the main body shell (23) during the rotation of the polishing head.
3. The photocatalytically assisted spray polishing head according to claim 1, characterized in that, The top end of the central shaft (1) is provided with a connecting section for docking with the machine tool; the central shaft (1) has two or three through holes at the spray interface position corresponding to the gas-liquid coaxial transport component (2), and the through holes are evenly distributed along the circumference of the central shaft (1).
4. The photocatalytically assisted spray polishing head according to claim 1, characterized in that, The spray interface (26) is installed in the middle of the housing via a threaded connection; the limiting screw (21) is symmetrically installed in the threaded hole on the housing at a 90° angle to the spray interface (26) along the circumference; the gas-liquid coaxial transport assembly (2) has bearings and rotary seals (25) symmetrically installed inside the housing; the upper bearing (24) and the lower bearing (27) are ceramic bearings; the rotary seal (25) is a rotary combination seal ring or a pressure-resistant skeleton oil seal.
5. The photocatalytically assisted spray polishing head according to claim 1, characterized in that, The coupling (4) is a diaphragm coupling.
6. The photocatalytically assisted spray polishing head according to claim 1, characterized in that, The polishing disc body (51) is 3D printed or cast in one piece; the bottom of the polishing disc body (51) has spray outlets evenly distributed in a cross shape.
7. The photocatalytically assisted spray polishing head according to claim 1, characterized in that, The ultraviolet lamp beads (52) are 3 or 4 evenly embedded inside the polishing disc body (51); after the ultraviolet lamp beads (52) are installed, they are potted with insulating thermally conductive adhesive.
8. The photocatalytically assisted spray polishing head according to claim 1, characterized in that, The abrasive material of the bonded abrasive polishing pad (53) is diamond.
9. A photocatalytically assisted spray polishing head according to claim 1, characterized in that, The polishing slurry is a nano-titanium dioxide dispersion with a concentration range of 0.5% to 2%; the polishing slurry spray is obtained by atomizing the polishing slurry with compressed air or oxygen; the polishing slurry spray pressure is between 0.1 MPa and 1 MPa.
Citation Information
Patent Citations
Photoelectrochemical mechanical polishing processing method of semiconductor wafer
CN109648463A
Polishing disc for electrically assisted photocatalytic polishing of large-size diamond
CN118700017A