Rotation moving type swing arm contour detection device and detection method

Abstract

The invention relates to an autorotation movable swing arm contour detection device and detection method, and relates to the technical field of advanced optical manufacturing. The autorotation movable swing arm contour detection device comprises a machine tool, a swing arm contour detection device, a workpiece placing platform and a workpiece to be detected. By constructing the swing arm type contour detection device, the core joint of the swing arm type contour detection device acts on an arm model, theoretical detection pose calculation of ultra-large-diameter complex curved surface optical elements with different boundary dimensions can be achieved, and the swing arm type contour detection device is guided to carry out pose adjustment detection. According to the autorotation movable type swing arm contour detection device and the detection method, the application scene of the swing arm type contour detection device is expanded, and the problem of in-situ and in-situ high-precision contour detection of an ultra-large-aperture optical element without rotational freedom is solved; and universal, rapid, efficient and high-precision surface contour detection of ultra-large aperture optical elements with different appearances is realized.

Description

Technical Field

[0001] The invention relates to the field of advanced optical manufacturing technology, and in particular to a self-rotating movable swing arm contour detection device and a detection method. Background Art

[0002] Large-aperture complex curved optical components are key components of high-end optical systems in the fields of space optics, astronomical optics, and national defense optics. The component aperture requirements are getting larger and larger, the surface accuracy is getting higher and higher, and the application needs are becoming more and more extensive.

[0003] The swing-arm contour detection device is used in the grinding and rough polishing stages of optical components due to its non-contact, in-place detection, large dynamic range, and high detection accuracy. Its detection accuracy is well connected with the interference detection range, and it plays an important role in the manufacturing process of large-diameter optical components.

[0004] like Fig.10 As shown in the figure, the traditional swing-arm profile detection device consists of a tilted high-precision air-floating turntable, a rigid measuring arm, and a high-precision non-contact displacement sensor probe (probe in the figure) at the end of the measuring arm; by constructing the closest spherical sampling trajectory for complex curved surfaces, high-precision surface profile measurement is achieved. When the air-floating turntable is tilted and the rotating axis passes through the reflector closest to the center of the sphere, the inclination angle satisfy:

[0005] ;

[0006] in, : The distance from the center point of the mirror to the rotation axis of the air-floating turntable; : The radius of the mirror closest to the sphere.

[0007] During the test, the measuring arm is fixed to the air-floating turntable, and the displacement sensor probe rotates around the rotation axis of the air-floating turntable. The displacement sensor probe sweeps an arc on the mirror surface and measures the deviation between the aspheric surface and its closest spherical surface at the track position. After the detector measures an arc, the reflector rotates around the mirror turntable at a certain angle α, and the detector continues to measure the next arc. After the reflector rotates one circle, the following is obtained Fig.11 The distribution diagram of the measurement points of the displacement sensor on the mirror surface is shown.

[0008] As space-to-earth remote sensing develops towards new imaging systems with large fields of view, the dimensions of large-aperture complex curved optical elements have evolved from the original circular or near-circular aperture to a large aspect ratio. The original workpiece turntable rotary type of processing machine tools faces huge space waste. In response to the manufacturing needs of large aspect ratio and ultra-large aperture optical elements, the workpiece turntable was abandoned and the processing machine tools were designed as grating straight-travel type. Machine tools without workpiece turntables bring great difficulties and challenges to the detection of swing arm contours. Summary of the invention

[0009] The present invention aims to solve the technical problem in the prior art of realizing swing arm type contour detection when a workpiece is stationary and not rotating, and provides a self-rotating movable swing arm contour detection device and detection method.

[0010] In order to solve the above technical problems, the technical solutions of the present invention are as follows:

[0011] A self-rotating movable swing arm contour detection device, comprising: a machine tool, a swing arm contour detection device, a workpiece placement platform and a workpiece to be detected;

[0012] in:

[0013] The machine tool includes: a Y-axis beam, a liftable Z-axis, a Z-axis support, a movable X-axis, a movable Y-axis, and an X-axis guide rail; a workpiece placement platform is arranged below the Y-axis beam; and a workpiece to be measured is placed on the workpiece placement platform;

[0014] The swing arm contour detection device is arranged on the Z axis and can move along the Y axis and the X axis; the swing arm contour detection device comprises, from top to bottom, a B turntable, an A turntable, an air-floating turntable, an arm and a displacement sensor probe; the displacement sensor probe is connected to the arm; the arm is connected to the air-floating turntable; the air-floating turntable is fixed on the A turntable; the A turntable is connected to the lower end of the B turntable and rotates with the B turntable; the upper end of the B turntable is connected to the Z axis;

[0015] The B turntable rotation axis of the B turntable is along the vertical direction; the A turntable swing axis of the A turntable is parallel to the X-axis movement direction of the machine tool when the B turntable angle is zero degrees; the displacement sensor probe is used to rotate around the air-floating turntable with the arm, sweep a sampling trajectory above the workpiece to be measured, and measure a contour line data; the swing arm contour detection device rotates around the B turntable rotation axis and moves along the X-axis, Y-axis, and Z-axis, so that the contour line detection zero position is always aligned with the center of the workpiece to be measured, and the sampling contour line data at other positions in the entire area of ​​the workpiece to be measured are measured.

[0016] In the above technical scheme, the machine tool can provide three-dimensional movement freedom in XYZ space; the swing arm contour detection device realizes translational movement in XYZ direction on the machine tool, and has rotational movement freedom around turntable B and turntable A; in the zero position, the displacement sensor probe is used to rotate with the arm around the air-floating turntable, sweeping a sampling trajectory above the workpiece to be measured, and measuring a contour line data; the swing arm contour detection device realizes sampling contour line coverage of the full contour area of ​​the workpiece to be measured through the rotation of turntable B and the movement of the X-axis, Y-axis and Z-axis of the machine tool.

[0017] In the above technical solution, the shape of the workpiece to be measured is circular, strip-shaped or sector-shaped.

[0018] In the above technical solution, the surface of the workpiece to be measured is a concave surface, a convex surface or a flat surface.

[0019] A detection method applicable to the above-mentioned self-rotating movable swing arm contour detection device comprises the following steps:

[0020] Step 1: According to the surface parameters of the workpiece to be measured, the theoretical inclination angle θ and the theoretical arm length L of the air bearing turntable are calculated;

[0021] Step 2: Move turntable A to the theoretical tilt angle θ, extend the arm to the theoretical arm length L, and place turntable B at the zero-degree position;

[0022] Step 3: Measure the position coordinates of the displacement sensor probe relative to the center of the rotation axis of the B turntable ( , );

[0023] Step 4: Calculate the position coordinate change (dx, dy) of the center of the displacement sensor probe after relative rotation at a certain angle;

[0024] Step 5: Face contour detection;

[0025] During the detection process, the swing axis angle of turntable A is fixed. Starting from the detection zero position, after measuring the first contour line, turntable B rotates a certain angle, and the machine tool moves to make the zero point of the single contour arc return to the coordinate zero point, and then starts sampling the second contour line; this movement method is followed until turntable B completes a 360° rotation, achieving full-face contour coverage measurement of the workpiece to be tested.

[0026] In the above technical solution, the specific steps of step 4 are:

[0027] B Turntable relative rotation back, is the number of rotation angles, The value range is , then the zero point O rotates to O i At point , the position coordinates in the B turntable coordinate system are:

[0028] ;

[0029] When i=1, ;

[0030] N is the number of sampling contours;

[0031] The sampling zero point of the first sampling trajectory rotates around the rotation axis of the B turntable The angle is O 1 Point, the center point C of the first sampling trajectory 0 Point rotates around the B turntable rotation axis The angle is C 1-0 point;

[0032] [x 1 ,y 1 ] is O 1 The coordinate value of point in the B turntable coordinate system, O 1 The coordinate difference between the position of the point and the zero point O is:

[0033]

[0034] ;

[0035] The above (dx 1 ,dy 1 ) is the sampling zero point of the first sampling trajectory rotating around the rotation axis of the B turntable The relative coordinate transformation value between the angle and the zero point O;

[0036] Correspondingly, the sampling zero point of the first sampling trajectory rotates around the rotation axis of the B turntable After that, the position coordinates of the zero point O relative to the origin of the coordinate system change to:

[0037]

[0038] .

[0039] In the above technical solution, the specific steps of step 5 are:

[0040] The swing arm contour detection device is in the initial zero position state, scanning the first sampling track;

[0041] Then the B turntable rotates relative to the zero position Angle, relative movement of the X-axis and Y-axis of the machine tool (-dx 1 , -dy 1 ), the contour sampling zero point returns to the zero point O at the center of the workpiece to be measured, and the center of the rotation axis of the B turntable is B 0 Move point to B 1 At point C, the center point of the sampling contour line is 1-0 Move point to C 1 At this point, the arm contour detection device scans the second sampling track again; then the B turntable rotates relative to the zero position. , the X-axis and Y-axis of the machine tool move relative to each other (-dx 2 , -dy 2 ), the swing arm profile detection device scans the third sampling track;

[0042] And so on, until the B turntable rotates relative to the zero position , the swing arm contour detection device completes the measurement of the Nth sampling trajectory and completes the full contour measurement of the workpiece to be measured.

[0043] The present invention has the following beneficial effects:

[0044] The self-rotating movable swing arm contour detection device of the present invention realizes the extended application of the swing arm detection device to the high-precision contour measurement of the surface shape of large-caliber complex curved surface optical elements when the large workpiece cannot rotate. The present invention can be applied to the detection of workpieces with irregular shapes such as circular, rounded rectangular, and fan-shaped; the applicable workpiece surface shape is concave, flat, convex and other complex curved surfaces.

[0045] The present invention constructs a swing-arm contour detection device, whose core joint action arm model can realize the theoretical detection posture calculation of ultra-large aperture complex curved surface optical elements with different external dimensions, and guide them to perform posture adjustment detection.

[0046] The self-rotating movable swing arm contour detection device and detection method of the present invention expand the application scenarios of the swing arm contour detection device, solve the difficult problem of in-situ high-precision contour detection of ultra-large aperture complex curved surface optical elements with no rotational freedom, and can realize universal fast, efficient and high-precision surface contour detection of ultra-large aperture complex curved surface optical elements with different shapes such as round, long strip, and fan-shaped. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] The present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0048] Figure 1 It is a schematic diagram of the machine tool structure of the self-rotating movable swing arm contour detection device of the present invention.

[0049] Figure 2 It is a schematic diagram of the structure of the detection zero position state of the self-rotating movable swing arm contour detection device of the present invention, and the surface of the workpiece to be measured is a concave surface.

[0050] Figure 3 It is a top view schematic diagram of the detection zero position state trajectory relationship of the self-rotating movable swing arm contour detection device of the present invention.

[0051] Figure 4 It is a top view schematic diagram of the relationship between the swing arm contour detection trajectory after the B turntable of the self-rotating movable swing arm contour detection device of the present invention rotates by an angle.

[0052] Figure 5 It is a top view schematic diagram of the relationship between the swing arm contour detection trajectories after calibration of the self-rotating movable swing arm contour detection device of the present invention.

[0053] Figure 6 It is a structural schematic diagram of the B turntable rotating axis of the self-rotating movable swing arm contour detection device of the present invention when it rotates to a 180° position.

[0054] Figure 7It is a schematic flow chart of the self-rotating movable swing arm contour detection method of the present invention.

[0055] Figure 8 It is a schematic diagram of the zero position of the measuring plane of the self-rotating movable swing arm contour detection device of the present invention.

[0056] Fig. 9 It is a schematic diagram of the zero position of the self-rotating movable swing arm contour detection device of the present invention when measuring a convex surface.

[0057] Fig.10 It is a schematic diagram of the structure of a traditional swing-arm contour detection device.

[0058] Fig.11 The distribution diagram of the measurement points of the displacement sensor on the mirror surface obtained using a traditional swing-arm profile detection device.

[0059] The reference numerals in the figures indicate:

[0060] 1-machine tool; 2-X axis; 3-Y axis; 4-Z axis; 5-B turntable; 6-A turntable; 7-workpiece placement platform; 8-workpiece to be measured; 9-swing arm contour detection device; 10-air floating turntable; 11-arm; 12-displacement sensor probe;

[0061] 101-Y axis cross beam; 102-Z axis support; 103-X axis guide rail;

[0062] 5-1 is the rotation axis of turntable B; 5-2 is the projection of turntable B on the XY plane; 6-1 is the swing axis of turntable A; 6-2 is the projection of the rotation axis of turntable A on the XY plane; 8-1 is the center axis of the workpiece to be measured;

[0063] 13-1 is the first sampling trajectory; 13-2-0 is the second sampling trajectory; 13-2 is the second sampling trajectory; 13-3 is the third sampling trajectory; 13-N / 2+1 is the N / 2+1th sampling trajectory; 13-N is the Nth sampling trajectory;

[0064] 14-1 Angle; 15-1 is the detection coordinate system XOY lower point O 1 15-2 is the X-axis position coordinate of the detection coordinate system XOY lower point O 1 The Y-axis position coordinate of . DETAILED DESCRIPTION

[0065] The inventive concept of the present invention is:

[0066] In the self-rotating movable swing arm contour detection device of the present invention, the processing machine tool provides the tilting degree of freedom of the swing axis of the A turntable and the rotational degree of freedom of the rotation axis of the B turntable. By constructing a relative position relationship model of the probe end relative to the swing axis of the A turntable and the rotation axis of the B turntable in the swing arm contour detection device, combined with the theoretical surface shape vector height distribution of the complex curved surface optical element to be measured, the X, Y, Z, A, and B axis motion position parameters of the machine tool are theoretically calculated, thereby realizing the measurement of the equivalent traditional workpiece turntable rotary sampling trajectory. The main structures of the self-rotating movable swing arm contour detection device of the present invention are a swing arm air-floating turntable, a swing arm swing rod, a non-contact displacement probe, and a processing machine tool with the degrees of freedom of the X, Y, Z, A, and B axes.

[0067] The present invention is described in detail below with reference to the accompanying drawings.

[0068] like Figure 1 and 2 As shown, the self-rotating movable swing arm contour detection device of the present invention comprises: a machine tool 1, a swing arm contour detection device 9, a workpiece placement platform 7 and a workpiece to be measured 8.

[0069] in:

[0070] The machine tool 1 includes: Z-axis supports 102 respectively arranged at positions below both ends of a Y-axis beam 101, and X-axis guide rails 103 respectively arranged at the lower ends of the two Z-axis supports 102. The swing arm contour detection device 9 is arranged on the Z-axis 4; the workpiece placement platform 7 is arranged at a position between the two X-axis guide rails 103 below the Y-axis beam 101; and the workpiece 8 to be measured is placed on the workpiece placement platform 7. The workpiece placement platform 7 does not perform rotational motion during the contour measurement process.

[0071] The swing arm contour detection device 9 includes, from top to bottom, a B turntable 5, an A turntable 6, an air-floating turntable 10, an arm 11 and a displacement sensor probe 12. The displacement sensor probe 12 is connected to the arm 11 through a probe connection tool; the arm 11 is connected to the air-floating turntable 10 through an arm fixing tool; the air-floating turntable 10 is fixed on the A turntable 6 through a turntable tool; the A turntable 6 is connected to the lower end of the B turntable 5 and rotates with the B turntable 5. The upper end of the B turntable 5 is connected to the Z axis 4. When the angle of rotation of the A turntable 6 around the A turntable swing axis 6-1 is 0 degrees, the rotation axis of the air-floating turntable 10 is parallel to the Z axis 4 and the B turntable rotation axis 5-1. In the actual installation process, the rotation axis of the air-floating turntable 10 does not overlap with the B turntable rotation axis 5-1, and has a relative position offset. The detection coordinate system XOY takes the geometric center of the workpiece 8 to be detected as the origin, and the X-axis 2 and Y-axis 3 of the machine tool 1 are X and Y directions respectively.

[0072] The self-rotating movable swing arm contour detection device of the present invention has three linear axis motion degrees of freedom that are perpendicular to each other: X-axis 2, Y-axis 3, and Z-axis 4, and two degrees of freedom of rotation around the axis: B turntable rotation axis 5-1 and A turntable swing axis 6-1. Among them, X-axis 2 is a horizontal direction perpendicular to the length direction of the Y-axis beam 101 of the machine tool 1, Y-axis 3 is parallel to the length direction of the Y-axis beam 101 of the machine tool 1, and Z-axis 4 is a vertical direction perpendicular to the length direction of the Y-axis beam 101 of the machine tool 1; B turntable rotation axis 5-1 is parallel to the Z-axis 4 direction; A turntable 6 rotates with the rotation of B turntable 5. When B turntable 5 is in the zero position, as shown in FIG. Figure 2 As shown in , the A turntable swing axis 6-1 is parallel to the X-axis 2.

[0073] The workpiece 8 to be measured is a reflector to be measured, which is placed on the workpiece placement platform 7. Figure 1 As shown, the top view of the workpiece 8 is circular. It should be noted that the shape of the reflector to be measured applicable to the self-rotating movable swing arm profile detection device of the present invention is not limited to circular, and other shapes such as strips and sectors are also applicable. The workpiece 8 to be measured remains stationary during the surface profile measurement process.

[0074] like Figure 2 As shown, at this time, the center point of the detection coordinate XYZ of the self-rotating movable swing arm contour detection device of the present invention is located at the center zero point O of the workpiece 8 to be detected, the XY direction of the coordinate system is consistent with the XY direction of the machine tool 1, and the direction of the center axis 8-1 of the workpiece to be detected is consistent with the direction of the Z axis 4; in the actual installation process, there is a position offset between the air-floating turntable 10 of the swing arm contour detection device 9 and the center of the B turntable rotation axis 5-1. At the detection zero position, the projection point of the B turntable rotation axis 5-1 on the detection coordinate XY plane is B 0 point.

[0075] In such Figure 2 In the detection zero position shown, the rotation angle of the B turntable 5 is 0 degrees, and the B turntable 5 is fixedly connected to the A turntable 6. The air-floating turntable 10 is tilted at a certain angle, and the displacement sensor probe 12 is located at the center of the workpiece 8 to be measured. When the displacement sensor probe 12 rotates around the air-floating turntable 10 with the arm 11, a first sampling track 13-1 is swept over the workpiece 8 to be measured, and a contour line data can be measured.

[0076] like Figure 3 As shown, we can see the projection 5-2 of the B turntable on the XY plane and the projection 6-2 of the rotation axis of the A turntable on the XY plane; 0 Point B is the projection point of the rotation axis 5-1 of the turntable on the detection coordinate XY plane. 0 The point coordinates are (-H B , L B ); C 0Point is the projection point of the center of the first sampling trajectory 13 - 1 on the detection coordinate XY plane.

[0077] like Figure 4 As shown, the B turntable 5 is at the starting zero position, and the displacement sensor probe 12 of the swing arm contour detection device 9 rotates around the air-floating turntable 10 on the mirror surface to scan the first sampling track 13-1, and then the B turntable 5 rotates around the B turntable rotation axis 5-1 After the angle 14-1, the position of the first sampling track 13-1 changes to the second sampling track 13-2-0, and the center point of the contour arc changes from C 0 Go to point C 1-0 The arc sampling scan zero point rotates from the zero point O to O 1 At point O, we can get 1 The position change of the point relative to the zero point O: Detect the coordinate system XOY under O 1 The X-axis position coordinate of the point 15-1, i.e., dx, and the detection coordinate system XOY are O 1 The Y-axis position coordinate of the point 15-2 is dy. The scanning start point of the second sampling trajectory 13-2-0 is 1 The point is translated (-dx, -dy) back to the zero point O, and the scan contour line obtained is the second sampling trajectory 13-2. The corresponding center point of the second contour arc is C 1-0 Move point to C 1 Point.

[0078] like Figure 5 As shown, B 0 , B 1 , B 2 , B N / 2 and B N-1 The points are the top projection positions of the center of the B turntable rotation axis 5-1 corresponding to the first sampling trajectory 13-1, the second sampling trajectory 13-2, the third sampling trajectory 13-3, the N / 2+1th sampling trajectory 13-N / 2+1 and the Nth sampling trajectory 13-N in the XY plane; C 0 , C 1 , C 2 , C N / 2 , C N-1 The points are respectively the top-view projection points of the centers of the first sampling trajectory 13 - 1 , the second sampling trajectory 13 - 2 , the third sampling trajectory 13 - 3 , the N / 2+1 th sampling trajectory 13 -N / 2+1 , and the N th sampling trajectory 13 -N on the XY plane.

[0079] The detection method applicable to the above-mentioned self-rotating movable swing arm contour detection device of the present invention has the following process: Figure 7 shown. Figure 7Only the outline of the steps is shown in the figure. For the convenience of representation, the displacement sensor probe is only represented as the probe, the A turntable swing axis 6-1 is represented as the A axis, and the B turntable rotation axis 5-1 is represented as the B axis. The detection method includes the following steps:

[0080] Step 1: According to the aspherical surface parameters of the workpiece 8 to be measured, the theoretical tilt angle θ and the theoretical arm length L of the air-bearing turntable 10 corresponding to the closest spherical surface are calculated;

[0081] Step 2: Rotate the A turntable 6 around the A turntable swing axis 6-1 to the theoretical tilt angle θ, extend the arm 11 to the theoretical arm length L, rotate the B turntable 5 around the B turntable rotation axis 5-1 to the zero degree position, and align the displacement sensor probe 12 with the center of the workpiece placement platform 7, as shown in FIG. Figure 2 shown.

[0082] Step 3: Measure the projection B of the displacement sensor probe 12 relative to the rotation axis 5-1 of the B turntable. 0 The position coordinates of the point (H B , -L B );

[0083] The laser tracker is used to measure the relative position coordinates of the displacement sensor probe 12 relative to the B turntable 5 when the swing arm profile detection device 9 is in the state of the theoretical tilt angle θ and the theoretical arm length L, as shown in FIG. Figure 3 The specific operation is as follows: take the rotation axis 5-1 of the B turntable as the center, the X axis 2 as the X direction, and measure and construct the B axis coordinate system X B B 0 Y B The laser tracker measures the coordinates of the zero point O of the displacement sensor probe 12, which is the position coordinates of the center of the displacement sensor probe 12 relative to the rotation axis 5-1 of the B turntable (H B , -L B ).

[0084] Step 4, calculating the position coordinate change (dx, dy) of the center of the displacement sensor probe 12 after relative rotation at a certain angle;

[0085] The position coordinates (H) of the displacement sensor probe 12 relative to the center of the rotation axis 5-1 of the B turntable B , -L B ) as a reference, calculate the position coordinates of the swing arm contour detection device 9 at other sampling positions. The specific operation is: Figure 5 As shown, the equivalent global sampling trajectory is realized by the relative rotation of the B turntable 5 and the relative movement in the X-axis 2, Y-axis 3, and Z-axis 4 directions. back, is the number of rotation angles, is a positive integer, and its value range is , then the original contour sampling zero point O is rotated to O i Point ( Figure 4 Not shown in i , only the O when i=1 is shown 1 ),like Figure 4 As shown, in the B turntable 5 coordinate system X B B 0 Y B The position coordinates are:

[0086] ;

[0087] When i=1,

[0088] ;

[0089] N is the number of sampling contour lines, generally N=72; it can also be 36, 144 or other even values.

[0090] The sampling zero point of the first sampling track 13-1 rotates around the rotation axis 5-1 of the B turntable Angle 14-1 is O 1 Point. The center point C of the first sampling trajectory 13-1 0 Point rotates around the B turntable rotation axis 5-1 Angle 14-1 is C 1-0 point;

[0091] [x 1 ,y 1 ]for Figure 4 O 1 The coordinate value of the point in the B turntable 5 coordinate system, O 1 The coordinate difference between the position of the point and the zero point O is:

[0092]

[0093] .

[0094] The above (dx 1 ,dy 1 ) is the first sampling track 13-1 sampling zero point rotates around the B turntable rotation axis 5-1 The relative coordinate transformation value of the angle 14-1 and the zero point O of the coordinate origin.

[0095] Correspondingly, the sampling zero point of the first sampling trajectory 13-1 rotates around the rotation axis 5-1 of the B turntable After that, the position coordinates of the zero point O relative to the origin of the coordinate system change to:

[0096]

[0097] .

[0098] Step 5: Face contour detection.

[0099] During the detection process, the angle of the A turntable swing axis 6-1 of the A turntable 6 is fixed. Starting from the detection zero position, after measuring the first contour line, as shown in the first sampling trajectory 13-1, the B turntable 5 rotates a certain angle, and the X-axis 2 and Y-axis 3 of the machine tool 1 move so that the zero point of the single contour arc returns to the coordinate zero point, and then the second contour line sampling is started. This movement mode is followed until the B turntable 5 completes a 360° rotation, thereby achieving full-face contour coverage measurement of the workpiece 8 to be measured.

[0100] Specifically, Figure 2 , 5 , 6, 8 and 9, the swing arm contour detection device 9 is located at Figure 2 The starting zero position state shown in FIG. 1 scans the first contour line, i.e., the first sampling track 13-1; then the B turntable 5 rotates relative to the zero position. Angle 14-1, X-axis 2 and Y-axis 3 of machine tool 1 move relative to each other (-dx 1 , -dy 1 ), the contour sampling zero point returns to the zero point O at the center of the workpiece 8 to be measured, and the center of the rotating axis 5-1 of the B turntable is 0 Move point to B 1 At point C, the center point of the sampling contour line is 1-0 Move point to C 1 At point 1, the arm profile detection device 9 scans the second sampling track 13-2; then the B turntable 5 rotates relative to the zero position. , the X-axis 2 and Y-axis 3 of machine tool 1 move relative to each other (-dx 2 , -dy 2 ), the arm profile detection device 9 scans the third sampling track 13-3. And so on, until the B turntable 5 rotates relative to the zero position , the swing arm contour detection device 9 completes the measurement of the Nth sampling track 13-N, and completes the full contour measurement of the workpiece 8 to be measured, such as Figure 5 For ease of understanding, Figure 6 A schematic diagram of the position of the swing arm contour detection device 9 when the B turntable 5 rotates 180° relatively is given.

[0101] The self-rotating movable swing arm contour detection device of the present invention has been used in actual experiments and the detection accuracy is comparable to that of the traditional workpiece rotary swing arm detection, which verifies the feasibility and effectiveness of the present invention.

[0102] The simulation shows that the self-rotating movable swing arm contour detection method of the present invention is practical and effective.

[0103] The self-rotating movable swing arm contour detection device of the present invention realizes the extended application of the swing arm detection device to the high-precision contour measurement of the surface shape of large-diameter complex curved surface optical components when the large workpiece cannot rotate. The implementation case of the present invention takes a complex curved surface optical component with a circular shape and a concave surface as an example. It is also applicable to flat and convex surfaces. It only needs to adjust the tilt angle of the A turntable 6 accordingly, such as Figure 8 and 9 As shown; the solution of the present invention is also applicable to workpieces with non-circular shapes such as rectangles and sectors, and can be implemented by taking the maximum circumscribed envelope circle of the workpiece shape as a virtual circular detection range.

[0104] The present invention constructs a core joint action arm model of a swing-arm contour detection device, thereby realizing theoretical detection posture calculation of ultra-large aperture complex curved surface optical elements with different external dimensions, and guiding them to perform posture adjustment detection.

[0105] The self-rotating movable swing arm contour detection device of the present invention expands the application scenarios of the swing arm contour detection device, solves the difficult problem of in-situ high-precision contour detection of ultra-large aperture complex curved surface optical elements with no rotational freedom, and realizes universal fast, efficient and high-precision surface contour detection of ultra-large aperture complex curved surface optical elements with different shapes.

[0106] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention.

Claims

1. A self-rotating movable swing arm contour detection device, characterized in that: include: A machine tool (1), a swing arm contour detection device (9), a workpiece placement platform (7) and a workpiece to be measured (8); in: The machine tool (1) comprises: a Y-axis beam (101), a liftable Z-axis (4), a Z-axis support (102), a movable X-axis (2), a movable Y-axis (3), and an X-axis guide rail (103); a workpiece placement platform (7) is arranged below the Y-axis beam (101); and a workpiece to be measured (8) is placed on the workpiece placement platform (7); The swing arm contour detection device (9) is arranged on the Z axis (4) and can move along the Y axis (3) and the X axis (2); the swing arm contour detection device (9) comprises, from top to bottom, a B turntable (5), an A turntable (6), an air-floating turntable (10), an arm (11) and a displacement sensor probe (12); the displacement sensor probe (12) is connected to the arm (11); the arm (11) is connected to the air-floating turntable (10); the air-floating turntable (10) is fixed on the A turntable (6); the A turntable (6) is connected to the lower end of the B turntable (5) and rotates with the B turntable (5); the upper end of the B turntable (5) is connected to the Z axis (4); The B turntable rotation axis (5-1) of the B turntable (5) is along the vertical direction; the A turntable swing axis (6-1) of the A turntable (6) is parallel to the movement direction of the X axis (2) of the machine tool (1) when the angle of the B turntable (5) is zero degrees; the displacement sensor probe (12) is used to rotate around the air-floating turntable (10) with the arm (11) to sweep a sampling trajectory above the workpiece (8) to measure a contour line data; the swing arm contour detection device (9) rotates around the B turntable rotation axis (5-1) and moves along the X axis (2), Y axis (3), and Z axis (4) so ​​that the contour line detection zero position is always aligned with the center of the workpiece (8) to measure the sampling contour line data at other positions in the entire area of ​​the workpiece (8) to measure.

2. The self-rotating movable swing arm contour detection device according to claim 1, characterized in that: The machine tool (1) can provide three-dimensional movement freedom in XYZ space; the swing arm contour detection device (9) realizes translational movement in XYZ directions on the machine tool (1) and has rotational movement freedom around a B turntable (5) and around an A turntable (6); at the zero position, a displacement sensor probe (12) is used to rotate with an arm (11) around an air-floating turntable (10), sweeping a sampling trajectory above a workpiece to be measured (8), and measuring a contour line data; the swing arm contour detection device (9) realizes sampling contour line coverage of the full contour area of ​​the workpiece to be measured (8) through the rotation of the B turntable (5) and the movement of the X-axis (2), Y-axis (3), and Z-axis (4) of the machine tool (1).

3. The self-rotating movable swing arm contour detection device according to claim 1, characterized in that: The shape of the workpiece (8) to be measured is circular, strip-shaped or fan-shaped.

4. The self-rotating movable swing arm contour detection device according to claim 1, characterized in that: The surface of the workpiece (8) to be measured is a concave surface, a convex surface or a flat surface.

5. A detection method applicable to the self-rotating movable swing arm contour detection device according to claim 1, characterized in that: The following steps are involved: Step 1: According to the surface parameters of the workpiece (8) to be measured, the theoretical tilt angle θ and the theoretical arm length L of the air bearing turntable (10) are calculated; Step 2: Move the A turntable (6) to a theoretical tilt angle θ, extend the arm (11) to a theoretical arm length L, and place the B turntable (5) at an angle of zero; Step 3: Measure and obtain the position coordinates of the displacement sensor probe (12) relative to the center of the rotation axis (5-1) of the B turntable ( , ); Step 4, calculating the position coordinate change (dx, dy) of the center of the displacement sensor probe (12) after relative rotation by a certain angle; Step 5: Face contour detection; During the detection process, the angle of the swing axis (6-1) of the A turntable is fixed, and after measuring the first contour line from the detection zero position, the B turntable (5) rotates a certain angle, and the machine tool (1) moves so that the zero point of the single contour arc returns to the coordinate zero point, and then starts sampling the second contour line; this movement mode is followed until the B turntable (5) completes a 360° rotation, thereby achieving full-face contour coverage measurement of the workpiece (8) to be measured.

6. The detection method according to claim 5, characterized in that: The specific steps of step 4 are: B turntable (5) relative rotation back, is the number of rotation angles, The value range is , then the zero point O rotates to O i At point , the position coordinates in the B turntable (5) coordinate system are: ； When i=1, ； N is the number of sampling contours; The sampling zero point of the first sampling trajectory (13-1) rotates around the rotation axis (5-1) of the B turntable After the angle (14-1), it is point O1. The center point C0 of the first sampling trajectory (13-1) rotates around the rotation axis (5-1) of the B turntable. The angle (14-1) is C 1-0 point; [x1, y1] is the coordinate value of point O1 in the coordinate system of turntable B (5). The coordinate difference between the position of point O1 and the zero point O is: ； The above (dx1, dy1) is the sampling zero point of the first sampling trajectory (13-1) rotating around the rotation axis (5-1) of the B turntable. The relative coordinate transformation value with respect to the zero point O after the angle (14-1); Correspondingly, the sampling zero point of the first sampling trajectory (13-1) rotates around the rotation axis (5-1) of the B turntable After that, the position coordinates of the zero point O relative to the origin of the coordinate system change to: 。 7. The detection method according to claim 6, characterized in that: The specific steps of step 5 are: The swing arm contour detection device (9) is in a starting zero position state and scans the first sampling track (13-1); Then the B turntable (5) rotates relative to the zero position Angle (14-1), the X axis (2) and Y axis (3) of the machine tool (1) move relative to each other (-dx1, -dy1), the contour sampling zero point returns to the center zero point O of the workpiece (8) to be measured, the center of the B turntable rotation axis (5-1) moves from point B0 to point B1, and the center point of the sampling contour line moves from point C 1-0 The point moves to point C1, and the swing arm contour detection device (9) scans the second sampling track (13-2); then the B turntable (5) rotates relative to the zero position , the X-axis (2) and the Y-axis (3) of the machine tool (1) move relative to each other (-dx2, -dy2), and the swing arm profile detection device (9) scans the third sampling trajectory (13-3); This process continues until the B turntable (5) rotates relative to the zero position. The swing arm contour detection device (9) completes the measurement of the Nth sampling trajectory (13-N), and completes the full contour measurement of the workpiece (8) to be measured.

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