A device and method for non-destructive measurement of pressure membrane curvature

Abstract

The present invention discloses a device and method for non-destructively measuring the curvature of a pressure membrane, belonging to the field of curvature measurement technology. The device for non-destructively measuring the curvature of a pressure membrane comprises a frame, a distance sensor, a control component, and a lifting component. The frame is mounted with a distance sensor, the interior of the frame is connected to a control component and a lifting component, the top of the frame is limited by a pressure membrane, and the control component controls the lifting component to lift or lower the pressure membrane. The present invention can effectively identify quality differences of the pressure membrane, thereby significantly reducing the alarm frequency of the machine, improving the yield rate of the wafer, and meeting the needs of high-precision chip processing.

Description

Technical Field

[0001] The present invention relates to the technical field of curvature measurement, and in particular to a device and method for non-destructively measuring the curvature of a pressure membrane. Background Art

[0002] Pressure membranes play a crucial role in chip processing. They evenly distribute mechanical pressure across the chip surface, ensuring the flatness and smoothness of the chip surface meet the highest process requirements during grinding and polishing. They also effectively cushion mechanical shock, reducing surface scratches and defects. The use of pressure membranes plays a key role in improving chip processing accuracy and yield, while also reducing production costs and increasing efficiency.

[0003] Pressure membranes have several notable characteristics: a monolithic structure, a relatively soft texture, a Shore A hardness between 25 and 80 HA, a thin film thickness typically ranging from 0.3 to 1.5 mm, and a large diameter, typically 140 to 800 mm. These characteristics make the product prone to unstable quality and difficult to control during processing and manufacturing, a problem particularly acute for clients with extremely demanding process requirements. For example, hardness may vary from location to location, with an error of approximately 0.01% to 1%; film thickness may vary, with an error of approximately 0.01% to 5%; diameter may vary, with an error of approximately 0.01% to 0.3%; and weight variations for the same product may vary, with an error of approximately 0.005% to 0.01%. These issues can lead to uneven use of the pressure membrane in high-precision process environments and abnormal unevenness on the wafer surface, ultimately causing machine alarms and product defects, failing to meet customer expectations and reducing wafer yield.

[0004] Therefore, those skilled in the art urgently need to provide a device and method for non-destructively measuring the curvature of the pressure membrane. By accurately measuring and screening the pressure membrane, the quality differences of the pressure membrane can be effectively identified, thereby significantly reducing the alarm frequency of the machine, improving the yield rate of the wafer, and meeting the needs of high-precision chip processing. Summary of the Invention

[0005] The purpose of the present invention is to provide a device and method for non-destructively measuring the curvature of a pressure membrane. By accurately measuring and screening the pressure membrane, the quality differences of the pressure membrane can be effectively identified, thereby significantly reducing the alarm frequency of the machine, improving the yield rate of the wafer, and meeting the needs of high-precision chip processing.

[0006] To achieve the above-mentioned objectives, the present invention provides a device for non-destructively measuring the curvature of a pressure membrane, comprising a frame, a distance sensor, a control assembly and a lifting assembly. The frame is equipped with a distance sensor, the interior of the frame is connected with a control assembly and a lifting assembly, the top of the frame is limited by a pressure membrane, and the control assembly controls the lifting assembly to lift the pressure membrane.

[0007] Preferably, the frame includes a test platform, columns, panels, pads and a base plate, the four corners of the bottom of the test platform are connected to four columns, panels are connected between the columns, the bottoms of the columns are connected to pads, and the inner walls of the four columns are connected to the base plate.

[0008] Preferably, the test platform is square, and a plurality of limiting grooves are provided at the center of the test platform. The limiting grooves are annular, and a plurality of limiting grooves of different diameters are concentrically arranged. The pressure membrane is limited in the limiting grooves, and a through hole is opened at the center of the test platform.

[0009] Preferably, a distance sensor is installed on the outer wall of the test platform, and the distance sensor includes a main sensor and a sub-sensor. The main sensor includes main sensor No. 1, main sensor No. 2, main sensor No. 3 and main sensor No. 4. The main sensor No. 1, main sensor No. 2, main sensor No. 3 and main sensor No. 4 are respectively located on the four outer walls of the test platform, and the main sensor No. 1, main sensor No. 2, main sensor No. 3 and main sensor No. 4 are located on two mutually perpendicular center lines of the test platform; a number of sub-sensors are respectively located on both sides of the main sensor.

[0010] Preferably, the control component includes a PLC controller, a driver, a touch screen, a transformer and a power socket. The PLC controller, the driver and the transformer are installed on the base plate. The touch screen is installed on one of the panels, and the power socket is installed on the other panel. The driver, the touch screen, the transformer and the power socket are all electrically connected to the PLC controller.

[0011] Preferably, the bottom plate and the bottom of the test platform are connected with a lifting assembly, and the lifting assembly includes a servo motor, a screw, a movable seat, a slider, a slide rail, a polished rod, a lifting block and a fixed seat, the servo motor is mounted on the bottom plate, the fixed seat is mounted on the bottom of the test platform, the end of the transmission shaft of the servo motor is fixedly connected to one end of the screw, the other end of the screw is rotatably connected to the fixed seat, the movable seat is sleeved on the screw, and the movable seat is threadedly connected to the screw;

[0012] A slider is fixedly connected to one side wall of the movable seat, the slider is slidably connected to the slide rail, the slide rail is vertically mounted on the fixed seat, and the fixed seat is vertically mounted on the bottom of the test platform;

[0013] A connecting block is fixedly connected to the other side of the movable seat, a polished rod is fixedly connected to the top of the connecting block, the polished rod is vertically arranged, a lifting block is fixedly connected to the top of the polished rod, and the lifting block contacts the pressure membrane after passing through the through hole; the servo motor is electrically connected to the PLC controller.

[0014] Preferably, the lifting block is hemispherical.

[0015] A method for testing a device for non-destructively measuring the curvature of a pressure membrane comprises the following steps:

[0016] S1: Plug the external power supply into the power socket to power the device. The display interface of the touch screen will light up to remind you to start working.

[0017] S2: Click the reset button to place the lifting block under the test platform; place the pressure film whose hardness H, weight G and film thickness m have been measured in advance into one of the limit grooves of the test platform, and enter the values of H, G and m on the touch screen;

[0018] S3: Place the pressure membrane on the limit slot of the test platform. The touch screen displays the values of d1, d2, d3, and d4 measured by the No. 1, No. 2, No. 3, and No. 4 main sensors. The auxiliary sensors display different colors according to the measured values. Manually fine-tune the position of the pressure membrane until the colors displayed on the touch screen by the auxiliary sensors are all green, indicating that the pressure membrane has been placed in the center of the test platform.

[0019] S4: The PLC controller directly calculates the value of the diameter D of the pressure membrane and displays it on the touch screen. Then click the lift block up button on the touch screen. The PLC controller controls the servo motor to start working, driving the lift block to rise, thereby slowly lifting the pressure membrane until the pressure membrane is completely separated from the test platform. At this time, the detections of main sensor No. 1, main sensor No. 2, main sensor No. 3 and main sensor No. 4 all exceed the range and start red light alarm, and feedback is sent to the PLC controller at the same time. The PLC controller controls to stop driving the lift block to rise. At this time, the value of the lift height y is displayed on the touch screen, and the PLC controller calculates the curvature W.

[0020] Preferably, the calculation formula of the diameter D of the pressure membrane is:

[0021] ;

[0022] Where, L is the side length of the test platform, , , , They are the values measured from the main sensor to the outer edge of the pressure membrane;

[0023] The calculation formula of the curvature W is:

[0024] ;

[0025] Where D is the diameter of the pressure membrane, y is the lifting height, G is the weight, H is the hardness, and m is the membrane thickness.

[0026] Preferably, the ranges of the first main sensor, the second main sensor, the third main sensor and the fourth main sensor are all .

[0027] The advantages and positive effects of the device for non-destructively measuring the curvature of a pressure membrane according to the present invention are:

[0028] 1. The present invention adopts a method of slowly lifting the pressure membrane with a lifting block. The hemispherical design of the lifting block and the slow lifting process minimize the damage to the pressure membrane and increase the service life of the pressure membrane.

[0029] 2. This invention utilizes advanced distance sensor technology and a precise lift assembly design to accurately measure the curvature of the pressure membrane. Using a PLC controller and a specific calculation formula, the pressure membrane curvature value can be quickly determined. This result is amplified through an algorithmic calculation and reflected in the curvature value. If the calculated curvature value is within the specified range, the pressure membrane meets quality requirements. If the curvature value is outside the specified range, the pressure membrane does not meet quality requirements, effectively identifying differences in pressure membrane quality.

[0030] 3. The present invention features a simple and intuitive operating process. Human-computer interaction via the touch screen facilitates operator input of parameters, start and stop operations, and more. The PLC controller in the control unit automatically controls the movement of the lifting assembly and makes real-time adjustments and precise control based on sensor feedback, automating the entire measurement process. This not only improves measurement efficiency and reduces human error, but also reduces the operator's skill requirements, making the device easier to implement in real-world production environments.

[0031] 4. The test platform of the present invention is provided with limiting grooves of different diameters, which can adapt to pressure membranes of various sizes, such as six inches, eight inches, twelve inches, etc., to meet the requirements of different chip processing technologies for pressure membrane size.

[0032] The technical solution of the present invention is further described in detail below through the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 This is a three-dimensional structural diagram of a device for non-destructively measuring the curvature of a pressure membrane according to the present invention;

[0034] Figure 2 A structural diagram of a device for non-destructively measuring the curvature of a pressure membrane according to the present invention from another perspective;

[0035] Figure 3 A top view of a device for non-destructively measuring the curvature of a pressure membrane according to the present invention;

[0036] Figure 4 This is a schematic diagram of the initial state of the pressure membrane in the device for non-destructively measuring the curvature of the pressure membrane according to the present invention;

[0037] Figure 5 This is a schematic diagram of the use state of the pressure membrane in the device for non-destructively measuring the curvature of the pressure membrane of the present invention;

[0038] Figure 6 This is a schematic diagram of the internal structure of a frame of a device for non-destructively measuring the curvature of a pressure membrane according to the present invention;

[0039] Figure 7 A top view of the internal structure of a frame of a device for non-destructively measuring the curvature of a pressure membrane according to the present invention;

[0040] Figure 8 This is a schematic diagram of the jacking assembly of the present invention;

[0041] Figure 9 A cross-sectional view of an initial state of a pressure membrane in a device for non-destructively measuring the curvature of a pressure membrane according to the present invention;

[0042] Figure 10 A cross-sectional view of a pressure membrane in use in a device for non-destructively measuring the curvature of a pressure membrane according to the present invention;

[0043] Figure 11 This is a flow chart of a method for using a device for non-destructively measuring the curvature of a pressure membrane according to the present invention;

[0044] Figure 12 Schematic diagram of the connection between control components of the present invention.

[0045] Reference numerals

[0046] 1. Frame; 101. Test platform; 102. Column; 103. Panel; 104. Foot; 105. Base plate;

[0047] 2. Distance sensor; 201. Main sensor No. 1; 202. Main sensor No. 2; 203. Main sensor No. 3; 204. Main sensor No. 4; 205. Auxiliary sensor;

[0048] 3. Control components; 301. PLC controller; 302. Driver; 303. Touch screen; 304. Transformer; 305. Power socket;

[0049] 4. Lifting assembly; 401. Servo motor; 402. Screw; 403. Moving seat; 404. Slider; 405. Slide rail; 406. Connecting block; 407. Polished rod; 408. Lifting block; 409. Fixed seat; 5. Pressure membrane. DETAILED DESCRIPTION

[0050] In the description of the present invention, it should be noted that the terms "upper", "lower", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or the orientations or positional relationships in which the inventive product is usually placed when in use. These are only for the convenience of describing the present invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention. In the description of the present invention, it should also be noted that, unless otherwise expressly specified and limited, the terms "setting", "installation" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be a communication between the internal parts of two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0051] In this application, unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this application belongs. In the event of any inconsistency, the meaning described in this specification or the meaning derived from the contents recorded in this specification shall prevail. In addition, the terms used herein are only for the purpose of describing the embodiments of this application and are not intended to limit this application.

[0052] The embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0053] like Figures 1-12 As shown, a device for non-destructively measuring the curvature of a pressure membrane includes a frame 1, a distance sensor 2, a control assembly 3, and a lifting assembly 4. The distance sensor 2 is mounted on the frame 1. The control assembly 3 and the lifting assembly 4 are connected to the interior of the frame 1. A pressure membrane 5 is positioned at the top of the frame 1. The control assembly 3 controls the lifting assembly 4 to lift the pressure membrane 5.

[0054] The frame 1 includes a test platform 101, columns 102, panels 103, feet 104, and a base plate 105. Four columns 102 are connected to the four corners of the bottom of the test platform 101. Panels 103 are connected between the columns 102. Feet 104 are connected to the bottoms of the columns 102. The base plate 105 is connected between the inner walls of the four columns 102.

[0055] Specifically, the test platform 101 is screwed to the top of the column 102. The distance sensor 2 is screwed to the side wall of the test platform 101. The lifting block 408 is screwed to the top of the polished rod 407.

[0056] The power socket 305 is locked on the panel 103 by screws and nuts. The foot 104 is fixed to the bottom of the column 102 by screws.

[0057] The test platform 101 is square. Several retaining grooves are located at the center of the test platform 101. These retaining grooves are annular and concentrically arranged with different diameters. The pressure membrane 5 is retained within the retaining grooves. A through hole is provided at the center of the test platform 101 for the polished rod 407 to pass through.

[0058] Specifically, the test platform is provided with three circles of limiting grooves, which respectively correspond to the placement positions of the existing six-inch pressure membrane 5, eight-inch pressure membrane 5, and twelve-inch pressure membrane 5, so as to facilitate placing the pressure membrane 5 into the corresponding limiting groove when in use.

[0059] A distance sensor 2 is mounted on the outer wall of the test platform 101. Distance sensor 2 includes a main sensor and auxiliary sensors 205. The main sensors include main sensor number 1 201, main sensor number 202, main sensor number 3 203, and main sensor number 4 204. Main sensor number 1 201, main sensor number 202, main sensor number 3 203, and main sensor number 4 204 are located on the four outer walls of the test platform 101, respectively. Main sensor number 1 201, main sensor number 202, main sensor number 3 203, and main sensor number 4 204 are located on two mutually perpendicular center lines of the test platform 101. Several auxiliary sensors 205 are located on either side of the main sensors.

[0060] Specifically, two auxiliary sensors 205 are respectively provided on both sides of the first main sensor 201 , the second main sensor 202 , the third main sensor 203 and the fourth main sensor 204 .

[0061] Control assembly 3 includes a PLC controller 301, a driver 302, a touch screen 303, a transformer 304, and a power socket 305. PLC controller 301, driver 302, and transformer 304 are mounted on base plate 105. Touch screen 303 is mounted on one of panels 103. Power socket 305 is mounted on the other panel 103. Driver 302, touch screen 303, transformer 304, and power socket 305 are all electrically connected to PLC controller 301.

[0062] Specifically, the PLC controller 301 , the servo motor 401 , the driver 302 , and the transformer 304 are all fixed to the base plate 105 by screws.

[0063] Specifically, the external power supply is directly plugged into power socket 305, thereby providing power to the control box. A power cord connects transformer 304 to power socket 305. Power is also supplied by connecting transformer 304 to touch screen 303, PLC controller 301, and driver 302. The servo motor 401 terminals are connected to the driver 302 terminals. The driver 302 is connected to the PLC controller 301 via a communication cable. The touch screen 303 is connected to the PLC controller 301 via a network cable. The distance sensor terminals are connected to the PLC controller terminals.

[0064] The bottom of the base plate 105 and the test platform 101 are connected to a lifting assembly 4. The lifting assembly 4 includes a servo motor 401, a screw 402, a movable seat 403, a slider 404, a slide rail 405, a polished rod 407, a lifting block 408 and a fixed seat 409. The servo motor 401 is mounted on the base plate 105. The fixed seat 409 is mounted on the bottom of the test platform 101. The end of the drive shaft of the servo motor 401 is fixedly connected to one end of the screw 402. The other end of the screw 402 is rotatably connected to the fixed seat 409. The movable seat 403 is sleeved on the screw 402, and the movable seat 403 is threadedly connected to the screw 402.

[0065] A slider 404 is fixedly connected to one side wall of the movable base 403. The slider 404 is slidably connected to a slide rail 405. The slide rail 405 is vertically mounted on a fixed base 409. The fixed base 409 is vertically mounted on the bottom of the test platform 101.

[0066] A connecting block 406 is fixedly connected to the other side of the movable base 403. A polished rod 407 is fixedly connected to the top of the connecting block 406. Polished rod 407 is arranged vertically. A lifting block 408 is fixedly connected to the top of polished rod 407. Lifting block 408 passes through the through hole and contacts the pressure membrane 5. The servo motor 401 is electrically connected to the PLC controller 301.

[0067] Specifically, the drive shaft of servo motor 401 rotates, driving screw 402. This rotation of screw 402 drives slider 404 on movable base 403 to move vertically along slide rail 405, acting as a guide. The rotation of screw 402 drives movable base 403 to move vertically, which in turn drives polished rod 407 to move vertically, allowing lift block 408 at the top of polished rod 407 to lift or lower pressure membrane 5.

[0068] The lifting block 408 is hemispherical. Specifically, the arc surface of the lifting block contacts the bottom of the pressure membrane, which can reduce damage to the pressure membrane.

[0069] The testing method of the present invention comprises the following steps,

[0070] S1: Plug the external power supply into the power socket 305 to power the device, and the display interface of the touch screen 303 is always on to remind you to start working.

[0071] S2: Click the reset button to position the lifting block 408 below the test platform 101. Place the pressure membrane 5, whose hardness H, weight G, and thickness m have been measured in advance, into one of the limit grooves of the test platform 101, and input the values of H, G, and m on the touch screen 303.

[0072] Specifically, the hardness H is measured using a common Shore A hardness tester, the weight G is measured using a common electronic scale, and the film thickness m is measured using a common digital caliper.

[0073] S3: Place the pressure membrane 5 on the limiting slot of the test platform 101. The touch screen 303 displays the values of d1, d2, d3, and d4 measured by primary sensor 1 201, primary sensor 202, primary sensor 3 203, and primary sensor 4 204. The secondary sensor 205 displays different colors depending on the measured value. Manually fine-tune the position of the pressure membrane 5 until all secondary sensors 205 display green on the touch screen 303, indicating that the pressure membrane 5 is positioned exactly in the center of the test platform 101.

[0074] Specifically, only when the differences between the positions measured by the auxiliary sensors 205 are controlled within 0.01 mm, the colors displayed on the touch screen 303 by the auxiliary sensors 205 will all be green.

[0075] S4: The PLC controller 301 directly calculates the diameter D of the pressure membrane 5 using Equation 1 and displays it on the touch screen 303. The lift block 408 up button on the touch screen 303 is then clicked. The PLC controller 301 controls the servo motor 401 to start operating, driving the lift block 408 upward, thereby slowly lifting the pressure membrane 5 until the pressure membrane 5 is completely free of the test platform 101. At this point, the detections of main sensor 1 201 202 203 303 404 all exceed their ranges and initiate red alarms, which are then fed back to the PLC controller 301. The PLC controller 301 stops driving the lift block 408 upward. At this point, the touch screen 303 displays the lift height y. The PLC controller 301 calculates the curvature W using Equation 2.

[0076] The calculation formula of the diameter D of the pressure membrane 5 is:

[0077] ;

[0078] Where, L is the side length of the test platform, 、 、 、 They are the values measured from the main sensor to the outer edge of the pressure membrane.

[0079] The calculation formula of curvature W is:

[0080] ;

[0081] Where D is the diameter of the pressure membrane, y is the lifting height, G is the weight, H is the hardness, and m is the membrane thickness.

[0082] The ranges of the first main sensor 201, the second main sensor 202, the third main sensor 203 and the fourth main sensor 204 are all .

[0083] Example 1

[0084] The diameter D1 of sample 1 is 200 mm, the lifting height y1 is 100 mm, the weight G1 is 100 g, the hardness H1 is 40 HA, the film thickness m1 is 1 mm, and W1=50000.

[0085] Sample 2 has a diameter D2 of 199 mm, a lift height y1 of 105 mm, a weight G1 of 99 g, a hardness H1 of 45 HA, and a membrane thickness m1 of 1.5 mm, resulting in a W2 value of 30646. Based on the sample's curvature value, as long as the pressure membrane sample's curvature value is within the specified range, the produced pressure membrane sample meets the quality standards. Specifically, the specified range means the sample's curvature fluctuates within a range of 100 degrees.

[0086] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit the same. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that they can still modify or replace the technical solutions of the present invention with equivalents, and these modifications or equivalent replacements cannot cause the modified technical solutions to deviate from the spirit and scope of the technical solutions of the present invention.

Claims

1. A method for testing a device for non-destructively measuring the curvature of a pressure membrane, characterized by: A device for non-destructively measuring the curvature of a pressure membrane comprises a frame, a distance sensor, a control assembly, and a lifting assembly. The distance sensor is mounted on the frame, the control assembly and the lifting assembly are connected to the interior of the frame, a pressure membrane is positioned at the top of the frame, and the control assembly controls the lifting assembly to lift the pressure membrane. The frame includes a test platform, and a plurality of limiting grooves are provided at the center of the test platform, and the limiting grooves are annular; A distance sensor is installed on the outer wall of the test platform, and the distance sensor includes a main sensor and a secondary sensor. The main sensor includes a No. 1 main sensor, a No. 2 main sensor, a No. 3 main sensor, and a No. 4 main sensor. The No. 1 main sensor, the No. 2 main sensor, the No. 3 main sensor, and the No. 4 main sensor are respectively located on the four outer walls of the test platform, and the No. 1 main sensor, the No. 2 main sensor, the No. 3 main sensor, and the No. 4 main sensor are located on two mutually perpendicular center lines of the test platform; a plurality of secondary sensors are respectively located on both sides of the main sensor; The control assembly includes a PLC controller, a touch screen and a power socket, and the touch screen and the power socket are electrically connected to the PLC controller; The lifting assembly includes a servo motor and a lifting block, and the servo motor drives the lifting block to rise; A method for testing a device for non-destructively measuring the curvature of a pressure membrane comprises the following steps: S1: Plug the external power supply into the power socket to power the device. The display interface of the touch screen will light up to remind you to start working. S2: Click the reset button to place the lifting block under the test platform; place the pressure film whose hardness H, weight G and film thickness m have been measured in advance into one of the limit grooves of the test platform, and enter the values of H, G and m on the touch screen; S3: Place the pressure membrane on the limit slot of the test platform. The touch screen displays the values of d1, d2, d3, and d4 measured by the No. 1, No. 2, No. 3, and No. 4 main sensors. The auxiliary sensors display different colors according to the measured values. Manually fine-tune the position of the pressure membrane until the colors displayed on the touch screen by the auxiliary sensors are all green, indicating that the pressure membrane is placed in the center of the test platform. S4: The PLC controller directly calculates the value of the diameter D of the pressure membrane and displays it on the touch screen. Then, the lifting block up button on the touch screen is clicked. The PLC controller controls the servo motor to start working, driving the lifting block to rise, thereby slowly lifting the pressure membrane until the pressure membrane is completely separated from the test platform. At this time, the detections of the No. 1 main sensor, the No. 2 main sensor, the No. 3 main sensor, and the No. 4 main sensor are all out of range and start red light alarms. At the same time, the feedback is fed back to the PLC controller, and the PLC controller controls the behavior of stopping the lifting block from rising. At this time, the value of the lifting height y is displayed on the touch screen, and the PLC controller calculates the curvature W; The calculation formula of the diameter D of the pressure membrane is: ； Where, L is the side length of the test platform, , , , They are the values measured from the main sensor to the outer edge of the pressure membrane; The calculation formula of the curvature W is: ； Where D is the diameter of the pressure membrane, y is the lifting height, G is the weight, H is the hardness, and m is the membrane thickness; The curvature values of the pressure membrane samples are within the specified range, indicating that the produced pressure membrane samples meet the quality standards.

2. The method for testing a device for non-destructively measuring the curvature of a pressure membrane according to claim 1, characterized in that: The frame also includes columns, panels, pads and a base plate. The four corners of the bottom of the test platform are connected to four columns, panels are connected between the columns, pads are connected to the bottom of the columns, and the base plate is connected between the inner walls of the four columns.

3. The method for testing a device for non-destructively measuring the curvature of a pressure membrane according to claim 2, characterized in that: The test platform is square, and a plurality of limiting grooves with different diameters are concentrically arranged. The pressure membrane is limited in the limiting grooves, and a through hole is opened at the center of the test platform.

4. The method for testing a device for non-destructively measuring the curvature of a pressure membrane according to claim 3, characterized in that: The control component also includes a driver and a transformer. A PLC controller, driver and transformer are installed on the base plate. The touch screen is installed on one of the panels, and the power socket is installed on the other panel. The driver and transformer are electrically connected to the PLC controller.

5. The method for testing a device for non-destructively measuring the curvature of a pressure membrane according to claim 4, characterized in that: The bottom plate and the bottom of the test platform are connected with a lifting assembly, and the lifting assembly also includes a screw, a movable seat, a slider, a slide rail, a polished rod and a fixed seat. The servo motor is installed on the bottom plate, and the fixed seat is installed at the bottom of the test platform. The end of the transmission shaft of the servo motor is fixedly connected to one end of the screw, and the other end of the screw is rotatably connected to the fixed seat. The movable seat is sleeved on the screw, and the movable seat is threadedly connected to the screw. A slider is fixedly connected to one side wall of the movable seat, the slider is slidably connected to the slide rail, the slide rail is vertically mounted on the fixed seat, and the fixed seat is vertically mounted on the bottom of the test platform; A connecting block is fixedly connected to the other side of the movable seat, a polished rod is fixedly connected to the top of the connecting block, the polished rod is vertically arranged, a lifting block is fixedly connected to the top of the polished rod, and the lifting block contacts the pressure membrane after passing through the through hole; the servo motor is electrically connected to the PLC controller.

6. The method for testing a device for non-destructively measuring the curvature of a pressure membrane according to claim 5, characterized in that: The lifting block is hemispherical.

7. The method for testing a device for non-destructively measuring the curvature of a pressure membrane according to claim 1, characterized in that: The ranges of the No. 1 main sensor, No. 2 main sensor, No. 3 main sensor and No. 4 main sensor are all .

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