Calibration method of synchrotron radiation micro-focusing experimental device

Abstract

The invention relates to a method for calibrating a synchrotron radiation micro-focusing experimental device, which comprises the following steps of: removing a light filtering device, placing a fluorescent sheet at the downstream of a reflecting device, and turning on an X-ray light source, so that X-rays are irradiated on the fluorescent sheet after sequentially passing through a focusing device and the reflecting device; determining the magnification center of the microscope; adjusting the position of the microscope to enable the X-ray position to coincide with the magnification center of the microscope; turning off the X-ray light source, installing the light filtering device on the reflection device, and turning on the visible light source; adjusting the X-direction position and the Y-direction position of the light filtering hole so as to enable the visible light on the fluorescent sheet to move to the amplification center of the microscope; the visible light source is turned off, the X-ray light source is turned on, and the X-ray shape on the fluorescent sheet is not shielded by finely adjusting the position of the light filtering hole. According to the calibration method of the synchrotron radiation micro-focusing experiment device, the light filtering hole can coincide with the magnification center of the microscope, and the definition and the magnification effect of the image are ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of synchrotron radiation microfocusing experiments, and more specifically to a calibration method for a synchrotron radiation microfocusing experiment device. Background Art

[0002] like Figure 1 As shown, the existing synchrotron radiation microfocusing experimental device includes a focusing device 10, a filter device 20, a reflection device 30 and a microscope 40. The focusing device 10, the filter device 20 and the reflection device 30 are sequentially arranged along a first axis L1 parallel to the Z direction. The microscope 40 deviates from the first axis L1 along the Y direction, and the optical axis L2 of the microscope 40 is parallel to the Y direction and perpendicular to the first axis L1. The reflection device 30 includes a shell 31 and a reflection mirror 32. The reflection mirror 32 is fixed in the shell 31, and the shell 31 is fixed at the lens of the microscope 40. The filter device 20 is provided with a filter hole 21, and the shell 31 is provided with a first light hole 31 a and a second light hole 31b, a third light hole 32a is provided on the reflector 32, the filter hole 21, the first light hole 31a, the third light hole 32a and the second light hole 31b are arranged in sequence along the first axis L1, the synchrotron radiation X-rays are transmitted along the first axis L1, and sequentially pass through the focusing device 10, the filter hole 21, the first light hole 31a, the third light hole 32a and the second light hole 31b before being irradiated on the sample 50, the sample 50 is located on the first axis L1, the X-rays reflected by the sample 50 are reflected by the reflector 32 again, and enter the microscope 40, so that the front of the sample 50 can be observed through the microscope 40. The filter device 20 is used to block stray light in the environment and correct the shape of the incident light to achieve the effect of optimizing the experimental results.

[0003] When calibrating the existing synchrotron radiation microfocusing experimental device, a displacement drive mechanism is required to drive the filter device 20 to perform three-dimensional movement in the X, Y and Z directions, and another displacement drive mechanism is required to drive the microscope 40 to perform three-dimensional movement in the X, Y and Z directions, so that the filter hole 21 of the filter device 20 coincides with the magnification center of the microscope 40, so as to ensure that the light passing through the filter hole 21 can be accurately focused on the magnification center of the microscope 40, thereby ensuring the clarity and magnification effect of the image.

[0004] However, due to the limited space between the focusing device 10 and the sample 50, the assembly accuracy of the filter device 20, the microscope 40 and their respective displacement drive mechanisms cannot be met at the same time, making it impossible to ensure that the filter hole 21 coincides with the magnification center of the microscope 40. Summary of the invention

[0005] The purpose of the present invention is to provide a calibration method for a synchrotron radiation microfocusing experimental device so as to make the filter hole coincide with the magnification center of a microscope and ensure the clarity and magnification effect of the image.

[0006] Based on the above purpose, the present invention provides a calibration method for a synchrotron radiation microfocusing experimental device, the synchrotron radiation microfocusing experimental device comprising a focusing device, a filtering device, a reflecting device and a microscope, the focusing device, the filtering device and the reflecting device are arranged in sequence along a first axis parallel to the Z direction, the microscope deviates from the first axis along the Y direction, and the optical axis of the microscope is parallel to the Y direction, the reflecting device is fixed to the lens of the microscope, the filtering device is detachably fixed to the reflecting device, the filtering device has a filtering hole, and the position of the filtering hole relative to the microscope is adjustable; the calibration method comprises the following steps:

[0007] S1000: removing the filter device from the reflector device, placing a fluorescent sheet downstream of the reflector device, and turning on the X-ray light source, so that the X-rays emitted by the X-ray light source pass through the focusing device and the reflector device in sequence and then irradiate the fluorescent sheet;

[0008] S2000: determining the magnification center of the microscope by adjusting the X-direction position and the Y-direction position of the microscope and changing the magnification of the microscope;

[0009] S3000: adjusting the position of the microscope so that the X-ray position coincides with the magnification center of the microscope;

[0010] S4000: turning off the X-ray light source, installing the filter device on the reflective device, and then turning on the visible light source to make the visible light source emit visible light;

[0011] S5000: adjusting the X-direction position and the Y-direction position of the filter hole of the filter device, so that the visible light can pass through the filter hole and the reflective device and illuminate the fluorescent sheet, and the visible light on the fluorescent sheet moves to the magnification center of the microscope;

[0012] S6000: Turn off the visible light source and turn on the X-ray light source to determine whether the X-ray shape on the fluorescent film observed by the microscope is blocked. If so, fine-tune the position of the filter hole so that the X-ray shape on the fluorescent film is not blocked.

[0013] Furthermore, step S2000 specifically includes the following steps:

[0014] S2100: moving the microscope multiple times along the X direction and the Y direction, so that the microscope is located at multiple different positions;

[0015] S2200: When the microscope is at each position, acquiring images of the microscope at different magnifications and pixel coordinates of X-ray positions;

[0016] S2300: fitting the pixel coordinates of the X-ray position at different magnifications of the microscope at each position in the same rectangular coordinate system to obtain a fitting straight line at the position;

[0017] S2400: Determine the magnification center of the microscope according to each fitting straight line.

[0018] Furthermore, step S2200 specifically includes the following steps:

[0019] S2210: When the microscope is in each position, changing the magnification of the microscope so that the microscope has different magnifications;

[0020] S2220: At each magnification of the microscope, move the microscope along the Z direction so that the fluorescent film falls on the focal plane of the microscope, then take an image of the microscope at this magnification, and obtain the pixel coordinates of the X-ray position of the microscope at this magnification.

[0021] Further, the filtering device includes a base layer, a Y-direction adjustment layer and an X-direction adjustment layer, the Y-direction adjustment layer is fixed on the base layer, the X-direction adjustment layer is fixed on the Y-direction adjustment layer, the filter hole is arranged on the X-direction adjustment layer, the base layer is fixed on the reflecting device, the Y-direction adjustment layer is used to adjust the Y-direction position of the X-direction adjustment layer, and the X-direction adjustment layer is used to adjust the X-direction position of the filter hole.

[0022] Furthermore, the Y-direction adjustment layer includes a raising plate and an adjustment plate, the raising plate is fixed on the base layer, the adjustment plate includes two first fixed parts and a Y-direction moving part, the two first fixed parts are arranged opposite to each other in the X-direction and fixed on the raising plate, the two ends of the Y-direction moving part in the X-direction are respectively connected to the two first fixed parts through their own first flexible components, so that the Y-direction moving part can move in the Y-direction relative to the two first fixed parts, and the X-direction adjustment layer is fixed on the Y-direction moving part.

[0023] Furthermore, each of the first flexible components includes a plurality of first weakening structures arranged in sequence along the Y direction, and the first weakening structures are configured to deform when subjected to an external force so that the Y-direction moving portion moves along the Y direction relative to the first fixed portion.

[0024] Furthermore, two first brackets opposite to each other along the Y direction are provided on the raising plate, and a first top screw is installed on each of the first brackets. The first top screw is threadedly connected to the first bracket and is detachably connected to the Y-direction moving part. The first top screw is configured to contact the Y-direction moving part by twisting and push the Y-direction moving part to move along the Y direction.

[0025] Further, the X-direction adjustment layer includes a second fixed part and an X-direction moving part, the second fixed part defines a mounting groove, the X-direction moving part is located in the mounting groove, and the two ends of the X-direction moving part in the Y direction are respectively connected to the two ends of the second fixed part in the Y direction through respective second flexible components, so that the X-direction moving part can move along the X-direction relative to the second fixed part; the filter hole is arranged on the X-direction moving part.

[0026] Furthermore, each of the second flexible components includes a plurality of second weakened structures sequentially arranged along the X direction, and the second weakened structures are configured to deform under the action of an external force so that the X-direction moving portion moves along the X direction relative to the second fixed portion.

[0027] Furthermore, a second top screw is respectively provided on both ends of the second fixed part in the X direction, the second top screw is threadedly connected to the second fixed part and is detachably connected to the X-direction moving part, and the second top screw is configured to contact the X-direction moving part by twisting and push the X-direction moving part to move along the X direction.

[0028] In the calibration method of the synchrotron radiation microfocusing device of the present invention, the filter device is fixed on the reflecting device, and the position of the filter hole of the filter device relative to the reflecting device and the microscope is adjustable. There is no need to additionally set up a displacement driving mechanism of the filter device. The displacement driving mechanism of the microscope can be accurately assembled in the limited space between the focusing device and the sample, so that the position of the microscope and the position of the filter hole can be accurately adjusted, so that the filter hole can coincide with the magnification center of the microscope. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a top view schematic diagram of the existing synchrotron radiation microfocusing experimental device;

[0030] Figure 2 is a schematic top view of a synchrotron radiation microfocusing experimental device according to an embodiment of the present invention;

[0031] Figure 3 It is a schematic structural diagram of a synchrotron radiation microfocusing experimental device according to an embodiment of the present invention when a reflection device and a microscope are fixed together;

[0032] Figure 4 It is a structural schematic diagram of a synchrotron radiation microfocusing experimental device according to an embodiment of the present invention when a filter device, a reflection device and a microscope are fixed together;

[0033] Figure 5 Schematic diagram of the structure of a filter device of a synchrotron radiation microfocusing experimental device according to an embodiment of the present invention;

[0034] Figure 6Schematic diagram of the structure of the base layer of the filter device of the synchrotron radiation microfocusing experimental device according to an embodiment of the present invention;

[0035] Figure 7 Schematic diagram of the structure of the Y-direction adjustment layer of the filter device of the synchrotron radiation microfocusing experimental device according to an embodiment of the present invention;

[0036] Figure 8 Schematic diagram of the structure of the X-direction adjustment layer of the filter device of the synchrotron radiation microfocusing experimental device according to an embodiment of the present invention;

[0037] Fig. 9 The figure is a flow chart of a calibration method of a synchrotron radiation microfocusing experimental device according to an embodiment of the present invention. DETAILED DESCRIPTION

[0038] The preferred embodiments of the present invention are given below in conjunction with the accompanying drawings and described in detail.

[0039] like Figure 2As shown, an embodiment of the present invention provides a synchrotron radiation microfocusing experimental device, comprising a focusing device 100, a filtering device 200, a reflecting device 300 and a microscope 400, wherein the focusing device 100, the filtering device 200 and the reflecting device 300 are sequentially arranged along a first axis L1 parallel to the Z direction, the microscope 400 deviates from the first axis L1 along the Y direction, and the optical axis L2 of the microscope 400 is parallel to the Y direction and perpendicular to the first axis L1, the reflecting device 300 is fixed to the lens of the microscope 400, the filtering device 200 is fixed on the reflecting device 300, the filtering device 200 has a filtering hole 210, and the position of the filtering hole 210 relative to the reflecting device 300 and the microscope 400 is adjustable, and the sample 500 can be arranged on the first axis L1 and is located downstream of the reflecting device 300; the focusing device 100 is used for synchrotron radiation transmitted to the focusing device 100 along the first axis L1 The radiated X-rays are focused to form a smaller and more precise light spot. The focused X-rays pass through the filter device 200 through the filter hole 210. The filter device 200 is used to block stray light in the environment and correct the shape of the X-rays. The X-rays after passing through the filter device 200 then pass through the reflection device 300 and irradiate the sample 500, and then are reflected by the sample. The X-rays reflected by the sample 500 are transmitted to the reflection device 300 and reflected by it into the microscope 400, so that the front side (i.e., the side facing the reflection device 300) structure of the sample 500 can be observed through the microscope 400. That is to say, the reflection device 300 can be used to allow the incident X-rays to pass through on the one hand, and on the other hand, it can be used to reflect the X-rays reflected by the sample 500 into the microscope 400, so that the microscope 400 located on the side can also observe the front side structure of the sample 500, thereby saving space. The microscope 400 can be placed on a displacement drive mechanism (not shown in the figure), and the displacement drive mechanism can enable the microscope 400 to perform three-dimensional movement, that is, move along the X, Y and Z directions. When performing a synchrotron radiation microfocusing experiment, the X, Y and Z directions of the microscope 400 and the reflection device 300 can be adjusted by the displacement drive mechanism, so as to position the sample 500 so that the sample 500 is located at the imaging center of the microscope 400. At the same time, by adjusting the position of the filter hole 210 relative to the reflection device 300 and the microscope 400, it can be adapted to the X-ray focusing beam, thereby ensuring the straightness of the microscope zoom center and the filter hole 210, thereby improving the experimental effect.

[0040] In some embodiments, the reflection device 300 may include a shell 310 and a reflector 320, the reflector 320 is fixed in the shell 310, the shell 310 is fixed at the lens of the microscope 400, and the filter device 200 is fixed on the shell 310; a first light hole 311 and a second light hole 312 are provided on the shell 310, and a third light hole 321 is provided on the reflector 320, and the filter hole 210, the first light hole 311, the third light hole 321 and the second light hole 312 are aligned in sequence along the first axis L1, so that the focused X-rays can pass through the filter hole 210, the first light hole 311, the third light hole 321 and the second light hole 312 in sequence and irradiate the sample 500; the X-rays reflected by the sample 500 can enter the shell 310 from the second light hole 312, and be reflected by the reflector 320 to the microscope 400, so that the microscope 400 can observe the front structure of the sample 500. The reflector 320 is tilted in the housing 310, that is, it forms a certain angle, for example, 45 degrees, with the first axis L1 and the optical axis L2 of the microscope 400. The third light hole 321 of the reflector 320 is not on the focal plane of the microscope 400, so that the reflected light of the sample 500 can be smoothly imaged on the microscope 400 without being affected.

[0041] like Figure 3 As shown, the housing 310 may include a first portion 313 and a second portion 314, the first portion 313 and the second portion 314 are detachably connected, the reflector 320 is sandwiched between the first portion 313 and the second portion 314, the first light through hole 311 is provided on the first portion 313, and the second light through hole 312 is provided on the second portion 314. The first portion 313 may be provided with a plurality of (e.g., four) first mounting holes 315 for mounting the filter device 200 thereon. The structure after the filter device 200 is fixed on the first portion 313 is as shown in FIG. Figure 4 shown.

[0042] like Figure 5 As shown, the filter device 200 includes a base layer 220, a Y-direction adjustment layer 230 and an X-direction adjustment layer 240. The Y-direction adjustment layer 230 is fixed on the base layer 220, and the X-direction adjustment layer 240 is fixed on the Y-direction adjustment layer 230. The filter hole 210 is arranged on the X-direction adjustment layer 240. The base layer 220 is fixed on the housing 310 of the reflection device 300, and plays the role of a mounting base and a stable structure. The Y-direction adjustment layer 230 is used to adjust the Y-direction position of the X-direction adjustment layer 240, thereby adjusting the Y-direction position of the filter hole 210. The X-direction adjustment layer 240 is used to adjust the X-direction position of the filter hole 210. Therefore, the Y-direction position and the X-direction position of the filter hole 210 can be adjusted by the Y-direction adjustment layer 230 and the X-direction adjustment layer 240. In this way, there is no need to additionally set up a displacement driving mechanism of the filter device 200, thereby saving space.

[0043] like Figure 6 As shown, a fourth light-through hole 221 and a plurality of second mounting holes 222 are provided on the base layer 220, and each second mounting hole 222 corresponds to each first mounting hole 315 one by one. During installation, the second mounting holes 222 are aligned with the corresponding first mounting holes 315, and bolts can pass through the second mounting holes 222 and the corresponding first mounting holes 315 in sequence to fix the base layer 220 to the first part 314 of the shell 310.

[0044] like Figure 7 As shown, the Y-axis adjustment layer 230 includes a raising plate 231 and an adjustment plate 232. The raising plate 231 is fixed on the base layer 220. The adjustment plate 232 includes two first fixed parts 2321 and a Y-axis moving part 2322. The two first fixed parts 2321 are arranged opposite to each other in the X-direction and fixed on the raising plate 231. The two ends of the Y-direction moving part 2322 in the X-direction are respectively connected to the two first fixed parts 2321 through their own first flexible components, so that the Y-direction moving part 2322 can move in the Y-direction relative to the two first fixed parts 2321. The X-direction adjustment layer 240 is fixed on the Y-direction moving part 2322. In this way, the Y-direction position of the X-direction adjustment layer 240 can be adjusted by the movement of the Y-direction moving part 2322 in the Y-direction.

[0045] In some embodiments, each first flexible component includes a plurality of first weakened structures 2323 sequentially arranged along the Y direction, and the strength of the first weakened structure 2323 is weaker than that of the first fixed portion 2321 and the Y-direction moving portion 2322, so that when a Y-direction force is applied to the Y-direction moving portion 2322, the first weakened structure 2323 will be deformed, so that the Y-direction moving portion 2322 can move along the Y direction relative to the first fixed portion 2321. The first weakened structure 2323 can be formed by opening a first weakened hole on the adjustment plate 232, for example, the adjustment plate 232 can be a whole plate, in which case the first fixed portion 2321 and the Y-direction moving portion 2322 have the same strength and are a whole, and then a plurality of first weakened holes 2324 sequentially arranged along the Y direction can be opened between the two, so that the first fixed portion 2321 and the Y-direction moving portion 2322 are connected only by the thinner first weakened structure 2323, so that the Y-direction moving portion 2322 can move along the Y direction under the action of an external force. Exemplarily, each first flexible component includes four first weakened structures 2323, which are formed by multiple first weakened holes 2324, the radius of the first weakened hole 2324 is 1.25 mm, the distance between the centers of any two adjacent first weakened holes 2324 is 2.7 mm, the X-axis length of the Y-axis moving part 2322 is 11.4 mm, the Y-axis length of the adjustment plate 232 is 20.4 mm, and the Y-axis movement range of the Y-axis moving part 2322 is ±100 microns.

[0046] In some embodiments, the pad plate 231 may be provided with two first brackets 234 opposite to each other in the Y direction, each first bracket 234 is installed with a first top screw 233, the first top screw 233 is threadedly connected to the first bracket 234, and is detachably connected to the Y-direction moving part 2322. By twisting the first top screw 233, the first top screw 233 can be made to approach and abut against the Y-direction moving part 2322, thereby pushing the Y-direction moving part 2322 to move in the Y direction. The two first top screws 233 are respectively matched with the two ends of the Y-direction moving part 2322 in the Y direction, and can make the Y-direction moving part 2322 move in opposite directions, so that the Y-direction moving part 2322 can move back and forth in the Y direction.

[0047] A fifth light hole 2311 is provided on the raised plate 231, a sixth light hole 2325 is provided on the Y-direction moving portion 2322, and the fourth light hole 221, the fifth light hole 2311, the sixth light hole 2325 and the filter hole 210 are sequentially arranged along the first axis L1 to allow X-rays to pass through.

[0048] like Figure 8 As shown, in some embodiments, the X-direction adjustment layer 240 includes a second fixed portion 241 and an X-direction moving portion 242, the second fixed portion 241 defines a mounting groove 2411, the X-direction moving portion 242 is located in the mounting groove 2411, and the two ends of the X-direction moving portion 242 in the Y direction are respectively connected to the two ends of the second fixed portion 241 in the Y direction through their own second flexible components, so that the X-direction moving portion 242 can move along the X-direction relative to the second fixed portion 241, and the filter hole 210 is provided on the X-direction moving portion 242, and the X-direction moving portion 242 covers the sixth light-transmitting hole 2325, so that light can only pass through the filter hole 210 to achieve a filtering effect.

[0049] In some embodiments, each second flexible component includes a plurality of second weakened structures 243 sequentially arranged along the X direction, and the strength of the second weakened structure 243 is weaker than that of the second fixed portion 241 and the X-direction moving portion 242, so that when an X-direction force is applied to the X-direction moving portion 242, the second weakened structure 243 will be deformed, so that the X-direction moving portion 242 can move along the X direction relative to the second fixed portion 241. The second weakened structure 243 can be formed by opening a second weakened hole on the X-direction adjustment layer 240, for example, the second fixed portion 241 and the X-direction moving portion 242 can be a continuous whole, and then a plurality of second weakened holes 244 are opened at the connection between the second fixed portion 241 and the X-direction moving portion 242, so that the second fixed portion 241 and the X-direction moving portion 242 are connected only by the thinner second weakened structure 243, so that the X-direction moving portion 242 can move along the X direction under the action of an external force. Exemplarily, each second flexible component includes two second weakening structures 243, which are formed by three second weakening holes, wherein the middle second weakening hole 244 is circular, and the other two second weakening holes 244 are semicircular, the radius of the second weakening hole 244 is 1.25 mm, the spacing between any two adjacent second weakening holes 244 is 2.7 mm, the X-axis movement range of the X-axis moving part 242 is ±100 microns, and the diameter of the filter hole 210 is 20-100 microns.

[0050] In some embodiments, a second top screw 245 is respectively provided at both ends of the second fixed portion 241 in the X direction, and the second top screw 245 is threadedly connected to the second fixed portion 241 and is detachably connected to the X-direction moving portion 242. By twisting the second top screw 245, the second top screw 245 can be made to approach and abut against the X-direction moving portion 242, thereby pushing the X-direction moving portion 242 to move in the X direction. The two second top screws 245 are respectively matched with the two ends of the X-direction moving portion 242 in the X direction, and can make the X-direction moving portion 242 move in opposite directions, so that the X-direction moving portion 242 can move back and forth in the X direction.

[0051] In some embodiments, the filter device 200 may be made of elastic metal material, such as 316L stainless steel. The filter device 200 may be formed by an integrated molding process, that is, the base layer 220, the Y-direction adjustment layer 230 and the X-direction adjustment layer 240 are formed as one body.

[0052] In an exemplary embodiment, the thickness of the base layer 220 is 1 mm, the thickness of the raising plate 231 is 0.5 mm, the thickness of the adjustment plate 232 is 1 mm, and the thickness of the X-direction adjustment layer 240 is 1 mm.

[0053] In some embodiments, the synchrotron radiation microfocusing experimental apparatus may further include a sample stage (not shown in the figure), and the sample 500 is placed on the sample stage to support the sample.

[0054] like Fig. 9 As shown, the embodiment of the present invention further provides a calibration method of the synchrotron radiation microfocusing experimental device as described in the above embodiment, which comprises the following steps S1000-S6000:

[0055] S1000: Remove the filter device 200 from the reflection device 300, place a fluorescent sheet downstream of the reflection device 300, and turn on the X-ray light source so that the X-rays emitted by the X-ray light source pass through the focusing device 100 and the reflection device 300 in sequence and then irradiate the fluorescent sheet. The X-rays irradiating the fluorescent sheet will produce bright light, which can be observed by the microscope 400.

[0056] During calibration, it is necessary to first find the magnification center of the microscope 400 and make the X-ray coincide with the magnification center of the microscope 400. During this process, the filter device 200 is not needed, so the filter device 200 needs to be removed first; since X-rays are invisible light, they need to be irradiated on a fluorescent film to make them visible.

[0057] S2000 : determining the magnification center of the microscope 400 by adjusting the X-direction position and the Y-direction position of the microscope 400 and changing the magnification of the microscope 400 .

[0058] In some embodiments, step S2000 specifically includes steps S2100-S2400:

[0059] S2100: Move the microscope 400 multiple times along the X direction and the Y direction, so that the microscope 400 is located at multiple different positions.

[0060] The microscope 400 can be moved in the X and Y directions by means of the displacement adjustment mechanism. Before using the displacement adjustment mechanism, it needs to be calibrated so that one of the adjustment dimensions of the displacement adjustment mechanism is strictly parallel to the Z direction. After the calibration is completed, the microscope 400 can be moved in three dimensions in the X, Y and Z directions by means of the displacement adjustment mechanism. Each time the microscope 400 is moved in the X and Y directions, the X and Y positions of the microscope 400 will change, so the microscope 400 will be located at multiple different positions.

[0061] S2200: When the microscope 400 is at each position, obtain the images of the microscope 400 at different magnifications and the pixel coordinates of the X-ray position.

[0062] In some embodiments, step S2200 specifically includes the following steps S2210-S2220:

[0063] S2210: When the microscope 400 is at each position, changing the magnification of the microscope 400 so that the microscope 400 has different magnifications;

[0064] S2220: At each magnification of the microscope 400, move the microscope 400 along the Z direction so that the fluorescent film falls on the focal plane of the microscope 400, then take an image of the microscope 400 at this magnification, and obtain the pixel coordinates of the X-ray position of the microscope 400 at this magnification.

[0065] The image of microscope 400 is an image of the front side of the fluorescent film, on which there is a light spot formed by X-ray irradiation on the fluorescent film. The pixel coordinates of the light spot on the image are the pixel coordinates of the X-ray position. By taking images of microscope 400 at different magnifications, the pixel coordinates of the X-ray position of microscope 400 at different magnifications can be obtained.

[0066] Through steps S2100 and S2200, the pixel coordinates of the X-ray position at different magnifications when the microscope 400 is in different positions can be obtained. For example, assuming that the microscope 400 has four different positions, respectively denoted as A, B, C and D, and each position has n different magnifications, then at position A, the magnification of the microscope 400 can be adjusted according to a preset rule. For example, the microscope 400 can be first placed at a first magnification, and then the Z-direction position of the microscope 400 is adjusted so that the fluorescent sheet is located on the focal plane of the microscope 400 and the pixel coordinates of the X-ray position at the first magnification are obtained, which are denoted as (XA1, YA1); then the microscope 400 is placed at a second magnification, and the Z-direction position of the microscope 400 is adjusted so that the fluorescent sheet is located on the focal plane of the microscope 400 And obtain the pixel coordinates of the X-ray position under the first magnification, recorded as (XA2, YA2); by analogy, the pixel coordinates of the X-ray position under the nth magnification can be obtained, recorded as (XAn, YAn), that is, at position A, a set of pixel coordinates (XA1, YA1), (XA2, YA2)...(XAn, YAn) can be obtained; similarly, at position B, a set of pixel coordinates (XB1, YB1), (XB2, YB2)...(XBn, YBn) can be obtained; at position C, a set of pixel coordinates (XC1, YC1), (XC2, YC2)...(XCn, YCn) can be obtained; at position D, a set of pixel coordinates (XD1, YD1), (XD2, YD2)...(XDn, YDn) can be obtained.

[0067] S2300: In the same rectangular coordinate system, the pixel coordinates of the X-ray position at different magnifications of the microscope 400 at each position are fitted to obtain a fitting straight line at the position.

[0068] For example, a straight line LA can be fitted through (XA1, YA1), (XA2, YA2)...(XAn, YAn), a straight line LB can be fitted through (XB1, YB1), (XB2, YB2)...(XBn, YBn), a straight line LC can be fitted through (XC1, YC1), (XC2, YC2)...(XCn, YCn), and a straight line LD can be fitted through (XD1, YD1), (XD2, YD2)...(XDn, YDn).

[0069] S2400: Determine the magnification center of the microscope 400 according to each fitting straight line.

[0070] When the fitted straight lines are drawn in the same rectangular coordinate system, the fitted straight lines will intersect and their intersection points will circle a small area. The center of this small area is the magnification center of the microscope 400, which is recorded as point O. The pixel coordinates of point O can be obtained in the rectangular coordinate system, thereby determining the position of the magnification center of the microscope 400.

[0071] S3000: Adjust the position of the microscope 400 so that the X-ray position coincides with the magnification center of the microscope 400.

[0072] After step S2000, the X-ray position may not be at the magnification center of the microscope 400, so it is necessary to adjust the position of the microscope 400 through a displacement adjustment mechanism so that the pixel coordinates of the X-ray position on the image of the microscope 400 are the pixel coordinates of point O, so that the X-ray position coincides with the magnification center of the microscope 400.

[0073] S4000: Turn off the X-ray light source, install the filter device 200 on the reflection device 300, and then turn on the visible light source to make the visible light source emit visible light.

[0074] Since the size of the filter hole 210 is very small (20-100 microns), it can only be adjusted to the optical path by a visible light assisted calibration method. The visible light source can be a laser light source.

[0075] S5000 : adjusting the X-direction position and the Y-direction position of the filter hole 210 of the filter device 200 so that the visible light can pass through the filter hole 210 of the filter device 200 and the reflective device 300 and illuminate the fluorescent sheet, and the visible light on the fluorescent sheet moves to the magnification center of the microscope 400 .

[0076] By adjusting the X-direction position and the Y-direction position of the filter hole 210, the filter hole 210 can be adjusted to the optical path, so that the visible light can pass through the focusing device 100, the filter hole 210 and the reflecting device 300 in sequence and illuminate the fluorescent sheet, and the image of the microscope 400 can show the position of the visible light, and then continue to adjust the X-direction position and the Y-direction position of the filter hole 210 to move the visible light to the magnification center of the microscope 400. The method for adjusting the X-direction position and the Y-direction position of the filter hole 210 can refer to the description in the device embodiment, and will not be repeated here.

[0077] S6000: Turn off the visible light source and turn on the X-ray light source to determine whether the X-ray shape on the fluorescent film observed by the microscope 400 is blocked. If so, fine-tune the position of the filter hole 210 so that the X-ray shape on the fluorescent film is not blocked.

[0078] Since the spot size of visible light (usually 2-3 mm) is much larger than the spot size of X-ray (usually 2-3 μm), although the filter hole 210 is adjusted to the optical path by visible light, the filter hole 210 may also block the X-ray. If the X-ray shape is blocked, the X-ray will be incomplete and part of it will be missing on the image of the microscope 400. At this time, the X-direction and / or Y-direction position of the filter hole 210 can be fine-tuned to make the X-ray shape complete and not blocked, so that the filter hole 210 coincides with the magnification center of the microscope 400, and the calibration of the synchrotron radiation microfocusing experimental device is completed. The calibrated synchrotron radiation microfocusing experimental device can be used to perform synchrotron radiation microfocusing experiments and obtain accurate experimental results.

[0079] In the calibration method of the synchrotron radiation microfocusing device of the embodiment of the present invention, the filter device 200 is fixed on the reflection device 300, and the position of the filter hole 210 of the filter device 200 relative to the reflection device 300 and the microscope 400 is adjustable. There is no need to additionally set up a displacement driving mechanism of the filter device 200. The displacement driving mechanism of the microscope 400 can be accurately assembled in the limited space between the focusing device 100 and the sample 500, so that the position of the microscope 400 and the position of the filter hole 210 can be accurately adjusted, so that the filter hole 210 can coincide with the magnification center of the microscope 400.

[0080] The above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. The above embodiment of the present invention can also be modified in various ways. That is, all simple, equivalent changes and modifications made according to the claims and the description of the present invention fall within the scope of protection of the claims of the present invention. The contents not described in detail in the present invention are all conventional technical contents.

Claims

1. A calibration method for a synchrotron radiation microfocusing experimental device, characterized in that: The synchrotron radiation microfocusing experimental device comprises a focusing device, a filtering device, a reflecting device and a microscope, wherein the focusing device, the filtering device and the reflecting device are sequentially arranged along a first axis parallel to the Z direction, the microscope deviates from the first axis along the Y direction, and the optical axis of the microscope is parallel to the Y direction, the reflecting device is fixed to the lens of the microscope, the filtering device is detachably fixed to the reflecting device, the filtering device has a filtering hole, and the position of the filtering hole relative to the microscope is adjustable; The calibration method comprises the following steps: S1000: removing the filter device from the reflector device, placing a fluorescent sheet downstream of the reflector device, and turning on the X-ray light source, so that the X-rays emitted by the X-ray light source pass through the focusing device and the reflector device in sequence and then irradiate the fluorescent sheet; S2000: determining the magnification center of the microscope by adjusting the X-direction position and the Y-direction position of the microscope and changing the magnification of the microscope; S3000: adjusting the position of the microscope so that the X-ray position coincides with the magnification center of the microscope; S4000: turning off the X-ray light source, installing the filter device on the reflective device, and then turning on the visible light source to make the visible light source emit visible light; S5000: adjusting the X-direction position and the Y-direction position of the filter hole of the filter device, so that the visible light can pass through the filter hole and the reflective device and illuminate the fluorescent sheet, and the visible light on the fluorescent sheet moves to the magnification center of the microscope; S6000: Turn off the visible light source and turn on the X-ray light source to determine whether the X-ray shape on the fluorescent film observed by the microscope is blocked. If so, fine-tune the position of the filter hole so that the X-ray shape on the fluorescent film is not blocked.

2. The calibration method of the synchrotron radiation microfocusing experimental device according to claim 1, characterized in that: Step S2000 specifically includes the following steps: S2100: moving the microscope multiple times along the X direction and the Y direction, so that the microscope is located at multiple different positions; S2200: When the microscope is at each position, acquiring images of the microscope at different magnifications and pixel coordinates of X-ray positions; S2300: fitting the pixel coordinates of the X-ray position at different magnifications of the microscope at each position in the same rectangular coordinate system to obtain a fitting straight line at the position; S2400: Determine the magnification center of the microscope according to each fitting straight line.

3. The calibration method of the synchrotron radiation microfocusing experimental device according to claim 1, characterized in that: Step S2200 specifically includes the following steps: S2210: When the microscope is in each position, changing the magnification of the microscope so that the microscope has different magnifications; S2220: At each magnification of the microscope, move the microscope along the Z direction so that the fluorescent film falls on the focal plane of the microscope, then take an image of the microscope at this magnification, and obtain the pixel coordinates of the X-ray position of the microscope at this magnification.

4. The calibration method of the synchrotron radiation microfocusing experimental device according to claim 1, characterized in that: The filter device comprises a base layer, a Y-direction adjustment layer and an X-direction adjustment layer, wherein the Y-direction adjustment layer is fixed on the base layer, the X-direction adjustment layer is fixed on the Y-direction adjustment layer, the filter hole is arranged on the X-direction adjustment layer, the base layer is fixed on the reflection device, the Y-direction adjustment layer is used to adjust the Y-direction position of the X-direction adjustment layer, and the X-direction adjustment layer is used to adjust the X-direction position of the filter hole.

5. The calibration method of the synchrotron radiation microfocusing experimental device according to claim 4, characterized in that: The Y-direction adjustment layer includes a padding plate and an adjustment plate, the padding plate is fixed on the base layer, the adjustment plate includes two first fixed parts and a Y-direction moving part, the two first fixed parts are arranged opposite to each other along the X-direction and fixed on the padding plate, the two ends of the Y-direction moving part in the X-direction are respectively connected to the two first fixed parts through their own first flexible components, so that the Y-direction moving part can move along the Y-direction relative to the two first fixed parts, and the X-direction adjustment layer is fixed on the Y-direction moving part.

6. The calibration method of the synchrotron radiation microfocusing experimental device according to claim 5, characterized in that: Each of the first flexible components includes a plurality of first weakened structures sequentially arranged along the Y direction, and the first weakened structures are configured to deform when subjected to an external force so that the Y-direction moving portion moves along the Y direction relative to the first fixed portion.

7. The calibration method of the synchrotron radiation microfocusing experimental device according to claim 5, characterized in that: The raising plate is provided with two first brackets opposite to each other in the Y direction, each of which is equipped with a first top screw, which is threadedly connected to the first bracket and detachably connected to the Y-direction moving part, and the first top screw is configured to contact the Y-direction moving part by twisting and push the Y-direction moving part to move in the Y direction.

8. The calibration method of the synchrotron radiation microfocusing experimental device according to claim 5, characterized in that: The X-direction adjustment layer includes a second fixed portion and an X-direction moving portion, the second fixed portion defines a mounting groove, the X-direction moving portion is located in the mounting groove, and the two ends of the X-direction moving portion in the Y direction are respectively connected to the two ends of the second fixed portion in the Y direction through respective second flexible components, so that the X-direction moving portion can move along the X direction relative to the second fixed portion; the filter hole is arranged on the X-direction moving portion.

9. The calibration method of the synchrotron radiation microfocusing experimental device according to claim 8, characterized in that: Each of the second flexible components includes a plurality of second weakened structures sequentially arranged along the X direction, and the second weakened structures are arranged to deform under the action of an external force so that the X-direction moving portion moves along the X direction relative to the second fixed portion.

10. The calibration method of the synchrotron radiation microfocusing experimental device according to claim 8, characterized in that: A second top screw is respectively provided on both ends of the second fixed part in the X direction, the second top screw is threadedly connected to the second fixed part and is detachably connected to the X-direction moving part, and the second top screw is configured to contact the X-direction moving part by twisting and push the X-direction moving part to move along the X direction.

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