Optical apparatus and control method thereof

Abstract

The invention provides an optical device and a control method thereof, relates to the technical field of optics, and can solve the problem of low uniformity of a light field due to interference patterns generated by coherent light. The optical device comprises a light source, a scanning mirror array and a first reflecting mirror array. The scanning mirror array is located on a light path between the light source and the first reflector array. The scanning mirror array comprises a plurality of reflecting mirror surfaces and a plurality of drivers; and the plurality of drivers can respectively control the plurality of reflecting mirror surfaces to rotate. A light beam emitted by the light source is divided into a plurality of sub light beams through the rotating reflecting mirror surfaces, the sub light beams are reflected to the first reflecting mirror array, and the first reflecting mirror array is scanned.

Description

Technical Field

[0001] The present application relates to the field of optics, and in particular to an optical device and a control method thereof. Background Art

[0002] Optical systems are playing an increasingly important role in the modern information society. For example, large-scale integrated circuits required for information generation and transmission are generally manufactured and tested using optical systems. Optical systems are generally divided into imaging systems and non-imaging systems. Among them, optical imaging systems can clearly image objects on the required medium, which greatly improves the cognition and productivity of human society, such as microscopes, projectors, and semiconductor equipment.

[0003] With the continuous evolution of optical technology, the optical resolution of optical systems has been continuously improved, and the imaging wavelength has been continuously reduced from the visible light band to the short wavelength band. At present, most of the light sources used in short-wavelength optical imaging systems are coherent light sources, which can easily produce interference fringes or interference speckle phenomena, resulting in a decrease in the uniformity of the illumination field. Therefore, decoherence processing must be performed first to achieve a uniform light effect to ensure the normal operation of the optical system. Summary of the invention

[0004] The present application provides an optical device and a control method thereof, which can solve the problem of low light field uniformity due to interference patterns generated by coherent light.

[0005] The present application provides an optical device, including a light source, a scanning mirror array, and a first reflector array. The scanning mirror array is located on the optical path between the light source and the first reflector array. The scanning mirror array includes: a plurality of reflector surfaces and a plurality of drivers. The plurality of drivers can respectively control the plurality of reflector surfaces to rotate. The light beam emitted by the light source is divided into a plurality of sub-beams by the rotating plurality of reflector surfaces and reflected to the first reflector array, and the first reflector array is scanned.

[0006] The optical device provided by the present application sets a scanning mirror array between the light source and the illumination system. The coherent light beam emitted by the light source is divided into multiple sub-beams by the scanning mirror array and then scanned into the illumination system to form a scanning light field, so that the phase of the output light through the illumination system can continuously change randomly, thereby causing the diffraction pattern (such as stripes, speckles, etc.) on the illumination field of the illumination surface to change randomly, thereby reducing the problems of speckle, stripes, etc. caused by the interference effect of coherent light and improving the uniformity of the illumination field.

[0007] In addition, the configuration based on the scanning mirror array can meet the adaptation of various types of light sources (including coherent light sources and incoherent light sources) and various lighting system architectures, which reduces the requirements on the light source type and the lighting system.

[0008] In some possible implementations, the driver controls the rotation angle of the reflective mirror to be within the range of ±0.1° to ±3°. By controlling the rotation angle θ of the reflective mirror to be greater than 0.1°, the compactness of the lighting system structure can be ensured, and the size of the first reflective mirror array can be ensured to be large enough. By controlling the rotation angle θ of the reflective mirror to be less than 3°, the scanning frequency can be increased, and the driver can be easily manufactured.

[0009] In some possible implementations, the light source is a radiation light source, which has the advantages of extremely high brightness, no pollution, and adjustable wavelength.

[0010] In some possible implementations, the first reflective mirror array is located below the scanning mirror array.

[0011] In some possible implementations, the optical device further includes a condenser; the condenser is located on the optical path between the scanning mirror array and the first reflector array. In this case, the condenser can be used to shape the reflected light beam of the scanning mirror array and form an intermediate focus, which is then projected onto the first reflector array. By adjusting the curvature of the condenser, the divergence angle of the reflected light beam and the distance between the scanning mirror array and the first reflector array can be changed.

[0012] In some possible implementations, there is a first inclination angle between the reflective mirror surface and the reference plane of the scanning mirror array; the first inclination angle is smaller than the rotation angle of the reflective mirror surface. In this case, the technical requirements of the scanning mirror array for the scanning angle and the size of the first reflective mirror array can be reduced, thereby increasing the manufacturability of the system.

[0013] In some possible implementations, the reflection angle of the light beam emitted by the light source passing through the scanning mirror array is in the range of 0 to 20°, that is, the horizontal light beam emitted by the light source is incident on the scanning mirror array.

[0014] In some possible implementations, the reflection angle of the light beam emitted by the light source through the scanning mirror array is in the range of 70° to 90°, that is, the horizontal light beam emitted by the light source is grazingly incident on the scanning mirror array. Compared with normal incidence, by setting the horizontal light beam emitted by the light source to grazingly incident on the scanning mirror array, the heat load of the scanning mirror array can be reduced and the light energy utilization rate of the system can be increased.

[0015] In some possible implementations, the optical device further includes a second reflector array; the number of second unit reflectors in the second reflector array is the same as the number of first unit reflectors in the first reflector array. Since in the present application, the first reflector array and the second reflector array are both fixed structures, there is no need for freely deflectable unit reflectors required in traditional lighting systems. Therefore, the unit reflectors in the first reflector array and the second reflector array can be in a one-to-one relationship, that is, the number of second unit reflectors in the second reflector array can be set to be the same as the number of second unit reflectors in the first reflector array.

[0016] In some possible implementations, the driver is at least one of a piezoelectric driver, a MEMS (micro electromechanical system) driver, and a mechanical driver.

[0017] In some possible implementations, the overall surface of the scanning mirror array is a plane; the reflective mirror surface is a plane, a spherical surface, a toroidal surface, or a free-form surface.

[0018] In some possible implementations, in the scanning mirror array, the duty cycle of the plurality of reflective mirror surfaces is greater than 50% to ensure light utilization.

[0019] The present application also provides a control method for an optical device as provided in any of the above possible implementations, the control method comprising: controlling a light beam emitted by a light source to be incident on a plurality of reflective mirrors in a scanning mirror array, controlling a driver to rotate the reflective mirrors, and projecting a sub-beam reflected by the reflective mirrors onto a reflective surface of a first reflective mirror array for scanning.

[0020] By adopting the above control method, the driver controls the reflection mirror to rotate, so that during the rotation of the reflection mirror, the sub-beams reflected by the reflection mirror form a scanning light field on the first reflection mirror array. In this way, the multiple sub-beams reflected by the scanning mirror array can scan the first reflection mirror array respectively, so that the phase of the reflected light by the first reflection mirror array changes randomly, and then the diffraction pattern (such as stripes, speckles, etc.) formed by the illumination field on the illumination surface changes continuously, thereby improving the uniformity of the illumination field and reducing the problems of speckle, stripes, etc. caused by the interference effect of coherent light.

[0021] The present application also provides an optical device, including a light source, a scanning mirror array, and a second reflector array. The scanning mirror array is located on the optical path between the light source and the second reflector array. The scanning mirror array includes: a plurality of reflector surfaces, a plurality of drivers, and a plurality of baffles. The plurality of drivers can control the plurality of reflector surfaces to rotate respectively. The plurality of baffles can shield the plurality of reflector surfaces respectively during the rotation of the plurality of reflector surfaces. The light beam emitted by the light source is divided into a plurality of sub-beams by the plurality of reflector surfaces and then incident on the second reflector array.

[0022] In the above optical device, a scanning mirror array is used to replace the first reflective mirror array, and a baffle is set to close the reflective mirror during the rotation of the reflective mirror. The reflective mirror is controlled to rotate continuously by a driver, and after the scanning position is changed, the baffle is opened for illumination again. Therefore, the reflective mirror in a scanning mirror array can be quickly switched between the corresponding multiple second unit reflective mirrors without affecting other second unit reflective mirrors. Therefore, the scanning mirror array can act as a high-speed movable first reflective mirror array. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A schematic diagram of the structure of an optical device provided in an embodiment of the present application;

[0024] Figure 2 A schematic diagram of the structure of a driver in an optical device provided in an embodiment of the present application;

[0025] Figure 3 A schematic diagram of a partial structure of an optical device provided in an embodiment of the present application;

[0026] Figure 4 A schematic diagram of a scanning light field on a first reflector array in an optical device provided in an embodiment of the present application;

[0027] Figure 5 A schematic diagram of a scanning mirror array in an optical device provided in an embodiment of the present application;

[0028] Figure 6 A schematic diagram of a scanning mirror array in an optical device provided in an embodiment of the present application;

[0029] Figure 7 A schematic diagram of a local light path of an optical device provided in an embodiment of the present application;

[0030] Figure 8 A schematic diagram of the structure of an optical device provided in an embodiment of the present application;

[0031] Fig. 9 A schematic diagram of the structure of an optical device provided in an embodiment of the present application;

[0032] Fig.10A schematic diagram of a partial structure of an optical device provided in an embodiment of the present application;

[0033] Fig.11 A schematic diagram of a local light path of an optical device provided in an embodiment of the present application;

[0034] Fig.12 A schematic diagram of a partial structure of an optical device provided in an embodiment of the present application;

[0035] Fig.13 A schematic diagram of a local light path of an optical device provided in an embodiment of the present application;

[0036] Fig.14 A flow chart of a control method for an optical device provided in an embodiment of the present application;

[0037] Fig.15 A schematic diagram of the partial structure of an optical device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0038] In order to make the purpose, technical solutions and advantages of this application clearer, the technical solutions in this application will be clearly and completely described below in conjunction with the drawings in this application. Obviously, the described embodiments are part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0039] The terms "first", "second", etc. in the specification embodiments, claims and drawings of the present application are only used for the purpose of distinguishing descriptions, and cannot be understood as indicating or implying relative importance, nor can they be understood as indicating or implying order. "And / or" is used to describe the association relationship of associated objects, indicating that three relationships may exist. For example, "A and / or B" can mean: only A exists, only B exists, and A and B exist at the same time, where A and B can be singular or plural. The character " / " generally indicates that the objects associated before and after are in an "or" relationship. "At least one (item)" means one or more, and "multiple" means two or more. "Installation", "connection", "connected", etc. should be understood in a broad sense, for example, it can be an electrical connection or a mechanical connection; it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or it can be indirect through an intermediate medium, or it can be the internal connection of two elements. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, including a series of steps or units. Methods, systems, products or devices are not necessarily limited to those steps or units explicitly listed, but may include other steps or units that are not explicitly listed or inherent to these processes, methods, products or devices. "Up", "down", "left", "right", etc. are only used relative to the orientation of the components in the drawings. These directional terms are relative concepts. They are used for description and clarification relative to the description, which may change accordingly according to the change of the orientation of the components in the drawings.

[0040] An embodiment of the present application provides an optical device, which arranges a scanning mirror array between a light source and an illumination system. The coherent light beam emitted by the light source is split into multiple sub-beams by the scanning mirror array and then scanned into the illumination system to form a scanning light field, so that the phase of the light emitted by the illumination system can continuously change randomly, thereby causing the diffraction pattern (such as stripes, speckles, etc.) on the illumination surface to change randomly, thereby reducing problems such as speckles and stripes caused by the interference effect of coherent light and improving the uniformity of the illumination field.

[0041] The specific configuration structure of the optical device provided in the embodiment of the present application is described in detail below.

[0042] Illustratively, an embodiment of the present application provides an optical device that can be used in the field of short-wavelength optics, using short-wavelength soft X-rays with a wavelength of 1 nm to 120 nm as an imaging light source, but is not limited thereto.

[0043] In the optical device provided in the embodiment of the present application, the light source can be a short-wavelength light source. The wavelength λ of the light emitted by the light source 1 is shorter than 200nm, for example, it can be in the range of 3nm to 120nm. In the present application, there is no restriction on the setting form of the light source, and the light source can be a plasma laser light source, a synchrotron radiation light source, a free electron laser (FEL) light source, a steady-state micro-beam light source, etc.

[0044] In addition, the light source may be a continuous wave light source or a pulse light source. For example, the pulse width δ of the pulse light source may be in the order of femtoseconds, picoseconds, nanoseconds, microseconds, or milliseconds, and the pulse repetition frequency may be in the order of a few Hz to several hundred GHz.

[0045] The following embodiments of the present application are all illustrated by taking an optical device using a radiation light source as an example.

[0046] It is understandable that the radiation light source is highly coherent and therefore more prone to interference, which reduces the uniformity of the illumination field in the optical system. In addition, the radiation light source usually emits light in a horizontal direction, which places certain requirements on the lighting system architecture.

[0047] The optical device provided in the embodiment of the present application, by setting up a scanning mirror array, can meet the adaptation of various types of light sources (including radiation light sources and other light sources) and various lighting system architectures on the basis of decoherence, thereby reducing the requirements on the light source type and the lighting system.

[0048] The optical device provided by the present application is further described below through specific embodiments.

[0049] Embodiment 1

[0050] Figure 1 This is a schematic diagram of the structure of an optical device provided in the first embodiment. Figure 1 As shown, the optical device includes a radiation light source 1, a scanning mirror array 2, and an illumination system 3 (including 31, 32, 33, etc.).

[0051] Illustratively, in some possible implementations, the divergence angle of the horizontal light emitted by the radiation source 1 may be in the range of 0 to 2°.

[0052] Illustratively, in some possible implementations, the diameter of the horizontal light beam emitted by the radiation source 1 may be in the range of 0.1 mm to 10 mm; for example, typically 0.1 mm, 0.5 mm, 1 mm, 2 mm, 5 mm, etc.

[0053] It should be noted here that for the horizontal light emitted by the radiation source 1, the setting plane (or installation plane) of the optical device is used as a reference. Usually, the optical device is set on a horizontal ground. In this case, the direction parallel to the ground is the horizontal direction.

[0054] As an important component of the optical imaging system, the above-mentioned illumination system 3 is crucial to improving the performance of the entire optical system. Its main functions are to provide uniform illumination for the illumination surface (ie, the object surface), control the imaging dose, and achieve a certain pupil filling.

[0055] Indicative, such as Figure 1 As shown, the lighting system 3 may include a first reflector array 31, a second reflector array 32, and a relay mirror 33. The first reflector array 31 includes a plurality of first unit reflectors, and the second reflector array 32 includes a plurality of second unit reflectors. In practice, one or more relay mirrors 33 may be provided as required, or no relay mirror 33 may be provided, and this application does not limit this.

[0056] Combination Figure 1 and Figure 2 As shown, the scanning mirror array 2 is located on the optical path between the radiation light source 1 and the first reflector array 31. The scanning mirror array 2 includes a plurality of scanning mirrors C, each of which includes a reflective mirror surface 21 and a driver 22, so that the reflective mirror surface 21 is controlled to rotate by the driver 22, thereby adjusting the direction of the reflected light beam passing through the reflective mirror surface 21.

[0057] In this case, refer to Figure 1 As shown, the horizontal light beam 100 emitted by the radiation light source 1 is incident on the multiple reflective mirrors 21 in the scanning mirror array 2. The horizontal light beam 100 is split into multiple sub-beams 200 by the multiple reflective mirrors 21 and reflected to the first reflective mirror array 31. As the driver 22 drives the reflective mirror 21 to rotate, the multiple sub-beams 200 split by the reflective mirror 21 can scan the first reflective mirror array 31. The scanned sub-beams are further split by the first unit reflector in the first reflective mirror array 31, and after the light direction is adjusted by the second unit reflector in the second reflective mirror array 32, they are further adjusted by the relay mirror 33 and projected to the same illumination field in the illumination surface 4. The illumination light in the illumination field is the superposition of all the sub-beams passing through the illumination system 3.

[0058] refer to Figure 3 and Figure 4As shown, the light beam 100 emitted by the radiation light source 1 is reflected by the rotating reflective mirror 21 to form a plurality of sub-beams 200 to scan the first reflective mirror array 31 in the illumination system 3 to form a scanning light field A, so that the phase of the reflected light by the first reflective mirror array 31 can be randomly changed, and then the diffraction pattern (such as stripes, speckles, etc.) formed in the illumination field of the illumination surface 4 is continuously changed, thereby improving the uniformity of the illumination field and reducing the problems of speckle, stripes, etc. caused by the coherent light interference effect.

[0059] It should be noted that, according to actual needs, a scanning mirror array 2 can be set to control the sub-beams reflected by each reflective mirror surface 21 to periodically scan all or part of the first unit reflectors in the first reflector array 31, that is, to scan part or all of the field of view of the first reflector array 31.

[0060] In some existing lighting systems, it is necessary to set the number of first unit reflectors in the first reflector array 31 to be greater than the number of second unit reflectors in the second reflector array 32 to ensure that the reflected light from one first unit reflector can be deflected and adjusted to multiple second unit reflectors.

[0061] In contrast, in the first embodiment, the first unit reflector and the second unit reflector are both fixed structures, and a plurality of first unit reflectors in the first reflector array 31 and a plurality of second unit reflectors in the second reflector array 32 can be set in a one-to-one relationship, that is, the number of second unit reflectors in the second reflector array 32 can be set to be the same as the number of first unit reflectors in the first reflector array 31.

[0062] The present application does not limit the number of first unit reflectors in the first reflector array 31 and the number of second unit reflectors in the second reflector array 32 . For example, the number of first unit reflectors can be more than 36.

[0063] The specific configuration of the scanning mirror array 2 is described below.

[0064] The present application does not impose any limitation on the number of the multiple reflective mirror surfaces 21 in the scanning mirror array 2 .

[0065] For example, in some possible implementations, the number of the plurality of reflective mirror surfaces 21 in the scanning mirror array 2 may be less than or equal to 256.

[0066] The present application does not impose any limitation on the shape, distribution, etc. of the multiple reflective mirror surfaces 21 in the scanning mirror array 2 .

[0067] For example, in some possible implementations, Figure 5 As shown, the multiple reflective mirrors 21 may be in a rectangular structure and arranged in a matrix distribution manner.

[0068] For example, in some possible implementations, Figure 6 As shown, the multiple reflective mirror surfaces 21 may be fan-shaped structures, and the multiple fan-shaped structures are arranged in a concentric circle manner.

[0069] The present application does not limit the overall surface shape of the scanning mirror array 2 and the surface shape of the reflective mirror surface 21. In some possible implementations, the overall surface shape of the scanning mirror array can be a plane, and the reflective mirror surface 21 can be a plane, a spherical surface, a toroidal surface, or a free-form surface.

[0070] The present application does not impose any limitation on the size of the overall mirror surface of the scanning mirror array 2. For example, in some possible implementations, the overall mirror surface size of the scanning mirror array 2 may be set within a range of 1 mm to 50 mm.

[0071] In addition, in order to ensure the utilization rate of light, in some possible implementations, the duty cycle of the multiple reflective mirrors 21 in the scanning mirror array 2 can be set to be greater than 50%.

[0072] For the driver 22 in the scanning mirror array 2, the driver 22 can be arranged on the back of the corresponding reflective mirror 21 to meet the rotation requirement of the reflective mirror 21. Schematically, the arrangement of the driver 22 in the scanning mirror array 2 can tend to be a close-packed arrangement.

[0073] The present application does not limit the specific configuration of the driver 22. For example, the driver 22 may be at least one of a piezoelectric driver, a MEMS (micro electro mechanical system) driver, and a mechanical driver.

[0074] In addition, the driver 22 controls the rotation angle θ and the rotation frequency of the reflective mirror 21 , which are directly related to the uniformity of the illumination field on the illumination surface 4 . In practice, the rotation angle θ and the rotation frequency of the reflective mirror 21 can be set as needed.

[0075] In some possible implementations, the driver 22 may be configured to control the rotation angle θ (also referred to as the scanning angle) of the reflective mirror 21 within a range of ±0.1° to ±3°. Specifically, by controlling the rotation angle θ of the reflective mirror 21 to be greater than 0.1°, the compactness of the structure of the lighting system can be ensured, and the size of the first unit reflector in the first reflective mirror array 31 can be ensured to be large enough. By controlling the rotation angle θ of the reflective mirror 21 to be less than 3°, the scanning frequency can be increased, and the driver can be easily manufactured.

[0076] Illustratively, in some possible implementations, the scanning frequency of the driver 22 may be in the range of 10 kHz to 100 kHz.

[0077] It can be understood that, in this embodiment, by using the scanning mirror array 2 between the radiation light source 1 and the illumination system 3, an off-axis illumination mode of a free pupil can be scanned, and the mode has good pupil symmetry, thereby enhancing the optical resolution.

[0078] Of course, in order to ensure the off-axis illumination mode of the free pupil, the scanning range of the sub-beam reflected by the scanning mirror array 2 should be larger than the size of the first reflector array 31. Figure 7 As shown, it is assumed that the scanning mirror array 2 includes M reflective mirror surfaces 21 in one dimension, and the size of a single reflective mirror surface 21 is D S , the diameter of the first reflector array 31 is D F , the distance between the first reflector array 31 and the scanning mirror array 2 is L, and the scanning angle of the scanning mirror array 2 is θ. Then the above parameters need to satisfy the following relationship:

[0079] In addition, in the first embodiment, a new lighting system architecture may be adopted, such as Figure 1 As shown, in the lighting system architecture, the first reflector array 31 can be arranged below the scanning mirror array 2, that is, the horizontal light beam emitted by the radiation light source 1 is reflected downward after passing through the scanning mirror array 2 and is incident on the scanning mirror array 2 located below.

[0080] It can be understood that “the first reflector array 31 is located below the scanning mirror array 2” means that the first reflector array 31 is located below the plane where the scanning mirror array 2 is located, which does not necessarily mean directly below. In practice, the specific position of the first reflector array 31 below the scanning mirror array 2 can be set according to the incident angle of the radiation light source 1 on the scanning mirror array 2.

[0081] In the first embodiment of the present invention, in the above-mentioned illumination system architecture, the reflection angle of the horizontal light beam emitted by the radiation light source 1 passing through the scanning mirror array 2 is not limited.

[0082] For example, Figure 1 As shown, in some possible implementations, the reflection angle of the horizontal light beam emitted by the radiation source 1 through the scanning mirror array 2 can be in the range of 0 to 20°, that is, the horizontal light beam emitted by the radiation source 1 is incident on the scanning mirror array 2 .

[0083] For example, Figure 8 As shown, in some possible implementations, the reflection angle of the horizontal light beam emitted by the radiation source 1 through the scanning mirror array 2 can be in the range of 70° to 90°, that is, the horizontal light beam emitted by the radiation source 1 is grazingly incident on the scanning mirror array 2.

[0084] It can be understood here that, compared with normal incidence, by setting the horizontal light beam emitted by the radiation light source 1 to be grazingly incident on the scanning mirror array 2, the heat load of the scanning mirror array 2 can be reduced and the light energy utilization rate of the system can be increased.

[0085] In addition, the light reflection angles of the first reflector array 31, the second reflector array 32, and the relay mirror 33, the incident angle of the illumination surface 4, etc. can be adjusted and set according to actual needs, and the present application does not impose any restrictions on this.

[0086] Schematically, in some possible implementations, the light reflection angles of the first reflector array 31 and the second reflector array 3 can both be in the range of 0 to 20°, the light reflection angle of the relay mirror 33 can be in the range of 20° to 45°, and the light incident angle of the illumination surface 4 can be in the range of 3° to 10°.

[0087] Embodiment 2

[0088] Fig. 9 This is a schematic diagram of an optical device provided in the second embodiment.

[0089] Compared with the illumination system architecture adopted in the first embodiment (i.e., the architecture in which the first reflector array 31 is located below the scanning mirror array 2), the optical device provided in the second embodiment may adopt the existing illumination system architecture, such as Fig. 9 As shown, in the lighting system architecture, the first reflector array 31 is located above the scanning mirror array 2 .

[0090] It can be understood here that “the first reflector array 31 is located above the scanning mirror array 2” means that the first reflector array 31 is located above the plane where the scanning mirror array 2 is located, and does not necessarily mean directly above. In practice, the specific position of the first reflector array 31 above the scanning mirror array 2 can be set according to the incident angle of the radiation light source 1 on the scanning mirror array 2.

[0091] Indicative, such as Fig. 9 As shown, by arranging the first reflector array 31 above the scanning mirror array 2, the horizontal light beam emitted by the radiation light source 1 is reflected upward after passing through the scanning mirror array 2, and is incident on the first reflector array 31 located above, and is reflected to the first reflector array 31 by the scanning mirror array 2. The light beam of the first reflector array 31 is split into a plurality of sub-beams, and each sub-beam is focused to the second unit reflector in the second reflector array 32 to adjust the light direction, and then is further adjusted by the relay mirrors (33, 34) and projected to the same illumination field on the illumination surface 4.

[0092] In the second embodiment of the present invention, in the above-mentioned illumination system architecture, the reflection angle of the horizontal light beam emitted by the radiation source 1 passing through the scanning mirror array 2 is not limited.

[0093] Schematically, in some possible implementations, the reflection angle of the horizontal light beam emitted by the radiation source 1 after passing through the scanning mirror array 2 can be in the range of 30° to 60°, that is, the horizontal light beam emitted by the radiation source 1 is obliquely incident on the scanning mirror array 2.

[0094] Of course, in the second embodiment, the horizontal light beam emitted by the radiation light source 1 may also be incident normally or grazingly to the scanning mirror array 2, and the details may refer to the corresponding description in the first embodiment.

[0095] In addition, in the present application, a high reflectivity film layer can be provided on the mirror surface of the reflective mirror surface 21 to improve the utilization rate of light.

[0096] It will be understood by those skilled in the art that Fig. 9 As shown, the existing traditional lighting system requires that the incident angle of the incident light is in the range of 30° to 60°, and the radiation light source with horizontal light output cannot directly meet its lighting needs. In this embodiment, based on the setting of the scanning mirror array 2, the radiation light source can meet the lighting requirements of the traditional lighting system.

[0097] The other descriptions of the optical device provided in the second embodiment are similar to those in the first embodiment. For details, please refer to the corresponding parts in the first embodiment, which will not be repeated here.

[0098] Embodiment 3

[0099] Embodiment 3 of the present application provides an optical device, referring to Fig.10 and Fig.11 As shown in (schematic diagram of the light path between the scanning mirror array 2 and the first reflecting mirror array 31), in this third embodiment, the scanning mirror array 2 can be set so that there is an inclination angle α (also known as the first inclination angle) between the reflecting mirror surface 21 and the reference plane of the scanning mirror array 2, and the inclination angle α is less than or equal to the rotation angle θ (scanning angle) of the reflecting mirror surface 21, that is, α≤θ.

[0100] It can be understood that the above-mentioned “reference surface of the scanning mirror array” refers to the overall reference surface on which all the reflective mirror surfaces 21 in the scanning mirror array are installed.

[0101] In some possible implementations, it is possible to set This allows the illumination system to have a diameter D of the first reflector array 31 F maximum, thereby ensuring that the size of the first reflection unit is large enough to facilitate processing and manufacturing. F Satisfaction relationship: For descriptions of related parameters, please refer to the previous text.

[0102] It is understandable that by adopting the design of the third embodiment of the present application, the scanning angle θ of the scanning mirror array 2 and the size D of the first reflector array 31 can be reduced. F technical requirements, thereby increasing the manufacturability of the system.

[0103] For the lighting system in the optical device, the lighting system in the aforementioned embodiment 1 or the lighting system in embodiment 2 may be used, and this application does not limit this. As for other parts of the optical device, they are similar to the aforementioned embodiments 1 and 2, and specific reference may be made to the corresponding parts in embodiments 1 and 2, which will not be repeated here.

[0104] Embodiment 4

[0105] Embodiment 4 of the present application provides an optical device, such as Fig.12 and Fig.13 As shown, in the optical device, a condenser 201 can be arranged on the optical path between the scanning mirror array 2 and the first reflector array 31. The condenser 201 can be used to shape the reflected light beam of the scanning mirror array 2 and form an intermediate focus 202, which is then projected onto the first reflector array 31.

[0106] It is understandable that the scanning mirror array 2 is optically conjugate with the intermediate focus 202. By adjusting the curvature of the condenser 201, the divergence angle of the reflected light beam and the distance between the scanning mirror array 2 and the first reflector array 31 can be changed.

[0107] For illustration, this embodiment does not limit the specific surface shape of the condenser 201. For example, in some possible implementations, the condenser 201 may be a spherical surface, an aspherical surface, or a free-form surface.

[0108] In addition, it can be understood by those skilled in the art that, in the second embodiment, by providing the condenser 201, the incident light beam incident to the lighting system can be expanded and an intermediate focus can be formed, and the light beam can be shaped, thereby achieving a higher degree of freedom of the light beam and matching a lighting system in a larger range. In the second embodiment, the lighting system in the optical device can adopt the lighting system in the first embodiment or the lighting system in the second embodiment, and the present application does not limit this.

[0109] As for other parts of the optical device, they are similar to those in the aforementioned Embodiment 1, Embodiment 2 and Embodiment 3. For details, please refer to the corresponding parts in Embodiment 1, Embodiment 2 and Embodiment 3, which will not be described again here.

[0110] In addition, the present application also provides an optical device as provided in the above embodiments (including embodiments 1, 2, and 3) (see Figure 1 ) control methods, such as Fig.14As shown, the control method may include:

[0111] Step 01 , controlling the light beam 100 emitted by the radiation light source 1 to be incident on a plurality of reflective mirror surfaces 21 in the scanning mirror array 2 .

[0112] The multiple reflective mirrors 21 in the scanning mirror array 2 can split the light beam 100 emitted by the radiation light source 1 into multiple sub-beams and project them to the first reflective mirror array 31 .

[0113] Step 02, control the driver 22 to rotate the reflective mirror 21, project the sub-beam reflected by the reflective mirror 21 onto the reflective surface of the first reflective mirror array 31 and scan it.

[0114] The driver 22 controls the reflection mirror 21 to rotate, so that during the rotation of the reflection mirror 21, the sub-beams reflected by the reflection mirror 21 form a scanning light field on the first reflection mirror array 31. In this way, the multiple sub-beams reflected by the scanning mirror array 2 can scan the first reflection mirror array 31 respectively, so that the phase of the reflected light by the first reflection mirror array 31 changes randomly, and then the diffraction pattern (such as stripes, speckles, etc.) formed by the illumination field on the illumination surface 4 changes continuously, thereby improving the uniformity of the illumination field and reducing the problems of speckle, stripes, etc. caused by the coherent light interference effect.

[0115] Embodiment 5

[0116] This fifth embodiment provides another optical device, such as Fig.15 As shown, the difference from the aforementioned embodiments (one, two, three, four) is that in this optical device, a scanning mirror array 2 is used to replace the aforementioned first reflector array 31, and the light beam reflected by the scanning mirror array 2 is directly irradiated onto the second reflector array 32.

[0117] In addition, different from the scanning mirror array 2 in the previous embodiment, in the fifth embodiment, Fig.15 As shown, a baffle 23 is provided corresponding to each reflective mirror surface 21 in the scanning mirror array 2 , and the baffle 23 can close (block) the reflective mirror surface 21 when the driver 22 controls the reflective mirror surface 21 to rotate, so as to prevent light from being incident on the reflective mirror surface 21 .

[0118] Since the scanning mirror array 2 in this design replaces the first reflector array 31, and the baffle 23 is set to close the reflector surface 21 during the rotation of the reflector surface 21, the driver 22 controls the reflector surface 21 to rotate continuously, and after changing the scanning position, the baffle 23 is opened for illumination again, so the reflector surface 21 in a scanning mirror array can be quickly switched between the corresponding multiple second unit reflectors without affecting other second unit reflectors. Therefore, the scanning mirror array 2 can act as a high-speed movable first reflector array.

[0119] In the fifth embodiment, there is no limitation on the switching frequency of the baffle 23. For example, in some possible implementations, the switching frequency of the baffle 23 may be set to be greater than or equal to 2 kHz.

[0120] Of course, for the optical device in the fifth embodiment, during use, its control method may include: controlling the light beam 100 emitted by the radiation light source 1 to be incident on the multiple reflective mirrors 21 in the scanning mirror array 2; and controlling the driver 22 to rotate the reflective mirror 21, and controlling the baffle 23 to block the reflective mirror 21 during the rotation of the reflective mirror 21.

[0121] Those skilled in the art can understand that, in the fifth embodiment, the scanning mirror array 2 is used to replace the first reflector array 31, thereby reducing the manufacturing difficulty of the lighting system.

[0122] The other parts of the optical device of the fifth embodiment are similar to those of the first, second, third and fourth embodiments described above. For details, please refer to the corresponding parts of the first, second, third and fourth embodiments, which will not be described again here.

[0123] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. An optical device, It is characterized in that It includes a light source, a scanning mirror array, and a first reflecting mirror array; The scanning mirror array is located on the optical path between the light source and the first reflector array; The scanning mirror array comprises: a plurality of reflective mirrors and a plurality of drivers; the plurality of drivers can respectively control the plurality of reflective mirrors to rotate; The light beam emitted by the light source is divided into a plurality of sub-beams by the rotating plurality of reflective mirrors and then reflected to the first reflective mirror array, and the first reflective mirror array is scanned.

2. The optical device according to claim 1, It is characterized in that The driver controls the rotation angle of the reflective mirror to be within the range of ±0.1° to ±3°.

3. The optical device according to claim 1 or 2, It is characterized in that The light source is a radiation light source.

4. The optical device according to any one of claims 1 to 3, It is characterized in that The first reflective mirror array is located below the scanning mirror array.

5. The optical device according to any one of claims 1 to 4, It is characterized in that The optical device also includes a condenser; The condenser mirror is located on the optical path between the scanning mirror array and the first reflecting mirror array.

6. The optical device according to any one of claims 1 to 5, It is characterized in that There is a first inclination angle between the reflective mirror surface and the reference surface of the scanning mirror array; The first inclination angle is smaller than the rotation angle of the reflective mirror surface.

7. The optical device according to any one of claims 1 to 6, It is characterized in that The reflection angle of the light beam emitted by the light source passing through the scanning mirror array is within the range of 70° to 90°; Alternatively, the reflection angle of the light beam emitted by the light source passing through the scanning mirror array is in the range of 0 to 20°.

8. The optical device according to any one of claims 1 to 7, It is characterized in that The optical device also includes a second reflector array; The number of second unit reflectors in the second reflector array is the same as the number of field of view unit reflectors in the first reflector array.

9. The optical device according to any one of claims 1 to 8, It is characterized in that The driver is at least one of a piezoelectric driver, a MEMS driver, and a mechanical driver.

10. The optical device according to any one of claims 1 to 9, It is characterized in that The overall surface shape of the scanning mirror array is a plane; The reflective mirror surface is a plane, a spherical surface, a toroidal surface or a free-form surface.

11. The optical device according to any one of claims 1 to 10, It is characterized in that In the scanning mirror array, a duty cycle of a plurality of the reflective mirror surfaces is greater than 50%.

12. A method for controlling an optical device according to any one of claims 1 to 11, It is characterized in that Controlling the light beam emitted by the light source to be incident on the plurality of reflective mirror surfaces in the scanning mirror array; The driver is controlled to rotate the reflective mirror surface, and the sub-beam reflected by the reflective mirror surface is projected onto the reflective surface of the first reflective mirror array for scanning.

13. An optical device, It is characterized in that It includes a light source, a scanning mirror array, and a second reflecting mirror array; The scanning mirror array is located on the optical path between the light source and the second reflector array; The scanning mirror array includes: a plurality of reflective mirrors, a plurality of drivers, and a plurality of baffles; The multiple drivers can respectively control the multiple reflective mirrors to rotate; The plurality of baffles can respectively shield the plurality of reflective mirror surfaces during the rotation of the plurality of reflective mirror surfaces; The light beam emitted by the light source is divided into a plurality of sub-beams by the plurality of reflective mirrors and then incident on the second reflective mirror array.

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