Uncovering mechanism for process chamber and semiconductor process equipment

Abstract

The invention belongs to the technical field of semiconductor process equipment, and particularly relates to an uncovering mechanism for a process chamber and semiconductor process equipment. The uncovering mechanism comprises a supporting seat, a rotating shaft and a positioning piece, the positioning piece can move relative to the rotating shaft, the rotating shaft is used for being connected with an upper cover of the process chamber, the supporting seat is used for being connected with a chamber body of the process chamber, the rotating shaft is rotatably connected with the supporting seat, and the rotating shaft is used for rotating between a first rotating position and a second rotating position. When the rotating shaft is located at the first rotating position or the second rotating position, the positioning piece can move relative to the rotating shaft so as to be in positioning fit with the rotating shaft or release positioning fit from the rotating shaft. According to the invention, the problems of high maintenance difficulty and long maintenance time of the existing semiconductor process equipment can be solved.

Description

Technical Field

[0001] The present application belongs to the technical field of semiconductor process equipment, and specifically relates to a cover opening mechanism for a process chamber and semiconductor process equipment. Background Art

[0002] The capacitively coupled plasma etcher can ionize the process gas through the upper and lower electrodes to generate plasma to bombard the wafer surface and complete the etching. The upper electrode of the capacitively coupled plasma etcher and the parts in the process chamber need to be opened for maintenance after the process has been carried out for a period of time.

[0003] In the related technology, when the chamber is opened for maintenance, the upper electrode lifting device is used to lift the upper cover so that the upper cover is located above the chamber body, so that the maintenance personnel can stand on the maintenance side to maintain the parts on the upper cover. Generally speaking, the diameter of the upper cover is greater than the arm length of the maintenance personnel, so it is difficult for the maintenance personnel standing on the maintenance side to maintain the parts on the upper cover that are far away from the maintenance side, and this requires the maintenance personnel to move to the side opposite to the maintenance side to maintain the upper cover, which will increase the maintenance difficulty and maintenance time of semiconductor process equipment. Summary of the invention

[0004] The purpose of the embodiments of the present application is to provide a cover opening mechanism for a process chamber and a semiconductor process equipment, which can solve the problems of difficult maintenance and long maintenance time of current semiconductor process equipment.

[0005] In order to solve the above technical problems, this application is implemented as follows:

[0006] In a first aspect, an embodiment of the present application provides a cover opening mechanism for a process chamber, comprising a support seat, a rotating shaft and a positioning member, wherein the positioning member can move relative to the rotating shaft.

[0007] The rotating shaft is used to be connected to the upper cover of the process chamber, the support seat is used to be connected to the chamber body of the process chamber, the rotating shaft is rotatably connected to the support seat, and the rotating shaft is used to rotate between a first rotating position and a second rotating position.

[0008] When the rotating shaft is in the first rotating position or the second rotating position, the positioning member can move relative to the rotating shaft to achieve positioning cooperation with the rotating shaft or release the positioning cooperation with the rotating shaft.

[0009] In the second aspect, an embodiment of the present application provides a semiconductor process equipment, including a process chamber and the above-mentioned opening mechanism, the process chamber includes a chamber body and an upper cover, the rotating shaft is connected to the upper cover, and the support seat is connected to the chamber body.

[0010] In the embodiment of the present application, the rotating shaft is rotatably connected to the support seat and can be rotated from a first rotation position to a second rotation position. When the cover opening mechanism of the embodiment of the present application is applied to the process chamber, the second rotation position can be configured as follows: when the rotating shaft is in the second rotation position, the upper cover is misaligned with the top opening of the chamber body. At this time, the upper cover is located on the maintenance side of the chamber body of the process chamber. In this way, the maintenance personnel no longer need to move to the side opposite to the maintenance side to maintain the upper cover, thereby reducing the maintenance difficulty and maintenance time of the semiconductor process equipment.

[0011] In addition, the cover opening mechanism also includes a positioning member that can move relative to the rotating shaft. When the rotating shaft is located at the first rotation position, the positioning member can move relative to the rotating shaft to be positioned and matched with the rotating shaft. This not only ensures that the rotating shaft is located at the preset first rotation position, but also prevents the upper cover connected to the rotating shaft from rotating during the process and interfering with the progress of the process; when the upper cover needs to be maintained, the positioning member can move relative to the rotating shaft to release the positioning cooperation with the rotating shaft, so that the rotating shaft rotates to the second rotation position; when the rotating shaft is located at the second rotation position, the positioning member can move relative to the rotating shaft to be positioned and matched with the rotating shaft. This not only ensures that the rotating shaft is located at the preset second rotation position, but also prevents the upper cover connected to the rotating shaft from rotating during maintenance, so as to prevent safety accidents and increase the difficulty of maintenance; after the maintenance is completed, the positioning member can move relative to the rotating shaft to release the positioning cooperation with the rotating shaft, so that the rotating shaft rotates to the first rotation position. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 A schematic diagram of the structure of a semiconductor process equipment disclosed in an embodiment of the present application;

[0013] Figure 2 A cross-sectional view of a portion of the structure of a semiconductor process equipment disclosed in an embodiment of the present application;

[0014] Figure 3 A bottom view of a partial structure of a semiconductor process equipment disclosed in an embodiment of the present application;

[0015] Figure 4 A front view of a partial structure of a semiconductor process equipment disclosed in an embodiment of the present application;

[0016] Figure 5 A schematic diagram of a fluid pipeline of a semiconductor process equipment disclosed in an embodiment of the present application;

[0017] Figure 6 A schematic diagram of the fluid flow direction of the semiconductor process equipment disclosed in the embodiment of the present application when the reversing part is pressed;

[0018] Figure 7A schematic diagram of the fluid flow direction of the semiconductor process equipment disclosed in the embodiment of the present application when the reversing part is released;

[0019] Figure 8 A schematic diagram of a portion of fluid pipelines of a semiconductor process equipment disclosed in an embodiment of the present application;

[0020] Fig. 9 A schematic diagram of a fluid pipeline of a lifting pipeline system disclosed in an embodiment of the present application;

[0021] Fig.10 A schematic diagram of the fluid flow direction of the lifting pipeline system disclosed in an embodiment of the present application when the first manual switching valve is located at the fifth valve position;

[0022] Fig.11 This is a schematic diagram of the fluid flow direction of the lifting pipeline system disclosed in an embodiment of the present application when the first manual switching valve is in the sixth valve position.

[0023] Description of reference numerals:

[0024] 100-first manual switching valve, 110-first manual valve, 111-first medium port, 112-second medium port, 113-third medium port, 120-second manual valve, 121-fourth medium port, 122-fifth medium port, 200-first fluid pipeline, 210-first control valve, 211-first pilot port, 212-first communication port, 213-second communication port, 300-second fluid pipeline, 400-first Driving device, 410-first flow port, 420-second flow port, 500-second manual switching valve, 600-guide, 700-flange, 810-chamber body, 811-first limit convex portion, 812-second limit convex portion, 813-support seat, 814-rotation hole, 815-first hole section, 816-second hole section, 821-upper cover, 822-rotation shaft, 823-cantilever beam, 824-lifting pipeline system , 825-first medium inlet, 826-stopper, 827-fixing block, 828-first buffer block, 829-second buffer block, 830-positioning member, 840-positioning matching member, 841-first matching portion, 842-second matching portion, 842a-first sub-matching portion, 842b-second sub-matching portion, 850-interlocking device, 851-first fluid port, 852-second fluid port, 853-reversing portion, 854 -Third fluid port, 860-third control valve, 861-second pilot port, 862-fifth connecting port, 863-sixth connecting port, 870-second drive device, 871-third flow port, 872-fourth flow port, 880-locking reversing valve, 881-fourth fluid port, 882-fifth fluid port, 883-sixth fluid port, 890-one-way throttle valve, 910-radial rolling bearing, 920-axial rolling bearing. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0026] The terms "first", "second", etc. in the specification and claims of the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described here, and the objects distinguished by "first", "second", etc. are generally of one type, and the number of objects is not limited. For example, the first object can be one or more. In addition, "and / or" in the specification and claims represents at least one of the connected objects, and the character " / " generally indicates that the objects associated with each other are in an "or" relationship.

[0027] The following is a detailed description of the cover opening mechanism for the process chamber and the semiconductor process equipment provided in the embodiments of the present application through specific embodiments and their application scenarios in conjunction with the accompanying drawings.

[0028] like Figures 1 to 11 As shown, the embodiment of the present application discloses a cover opening mechanism for a process chamber, including a support seat 813, a rotating shaft 822 and a positioning member 830, and the positioning member 830 can move relative to the rotating shaft 822. Optionally, the positioning member 830 can move relative to the rotating shaft 822 in a variety of ways, for example, the positioning member 830 can move or rotate relative to the chamber body 810.

[0029] The rotating shaft 822 is used to connect with the upper cover 821 of the process chamber, and the support seat 813 is used to connect with the chamber body 810 of the process chamber. The rotating shaft 822 is rotatably connected to the support seat 813. The rotating shaft 822 is used to rotate between a first rotation position and a second rotation position. When the rotating shaft 822 is in the first rotation position or the second rotation position, the positioning member 830 can move relative to the rotating shaft 822 to position or release the positioning with the rotating shaft 822. Specifically, the positioning member 830 can position or release the positioning with the rotating shaft 822 only when the rotating shaft 822 is in the first rotation position, and can also position or release the positioning with the rotating shaft 822 only when the rotating shaft 822 is in the second rotation position. Alternatively, when the rotating shaft 822 is in both the first rotation position and the second rotation position, the positioning member 830 can position or release the positioning with the rotating shaft 822. It should be noted that, when the positioning member 830 is in a positioning fit with the rotating shaft 822, the rotating shaft 822 cannot rotate relative to the support seat 813; when the positioning member 830 is released from the rotating shaft 822, the rotating shaft 822 can rotate relative to the support seat 813. In other words, the positioning fit and release of positioning fit described in this embodiment refer to: achieving positioning and release of positioning in the rotation direction of the rotating shaft 822.

[0030] In the embodiment of the present application, the rotating shaft 822 is rotatably connected to the support seat 813 and can be rotated from a first rotation position to a second rotation position. When the opening cover mechanism of the embodiment of the present application is applied to the process chamber, the second rotation position can be configured as follows: when the rotating shaft 822 is located at the second rotation position, the upper cover 821 is misaligned with the top opening. At this time, the upper cover 821 is located on the maintenance side of the chamber body 810 of the process chamber. In this way, the maintenance personnel no longer need to move to the side opposite to the maintenance side to maintain the upper cover 821, thereby reducing the maintenance difficulty and maintenance time of the semiconductor process equipment.

[0031] In addition, the cover opening mechanism further includes a positioning member 830 that can move relative to the rotating shaft 822. When the rotating shaft 822 is located at the first rotating position, the positioning member 830 can move relative to the rotating shaft 822 to be positioned and matched with the rotating shaft 822. This can not only ensure that the rotating shaft 822 is located at the preset first rotating position, but also prevent the upper cover 821 connected to the rotating shaft 822 from rotating during the process to interfere with the process. When the upper cover 821 needs to be maintained, the positioning member 830 can move relative to the rotating shaft 822 to release the positioning and matching with the rotating shaft 822, so that the rotating shaft 822 can be rotated. The shaft 822 rotates to the second rotation position; when the rotating shaft 822 is in the second rotation position, the positioning member 830 can move relative to the rotating shaft 822 to be positioned and matched with the rotating shaft 822, which not only ensures that the rotating shaft 822 is in the preset second rotation position, but also prevents the upper cover connected to the rotating shaft 822 from rotating during maintenance, so as to prevent safety accidents and increase the difficulty of maintenance; after the maintenance is completed, the positioning member 830 can move relative to the rotating shaft 822 to release the positioning cooperation with the rotating shaft 822, so that the rotating shaft 822 rotates to the first rotation position.

[0032] In an optional embodiment, a rotation hole 814 is provided in the support seat 813, and the rotation shaft 822 is rotatably provided in the rotation hole 814. When the rotation shaft 822 is in the first rotation position, the upper cover 821 is directly opposite to the top opening of the chamber body 810; when the rotation shaft 822 is in the second rotation position, the upper cover 821 is misaligned with the top opening. In this embodiment, the upper cover 821 can be directly opposite to the top opening of the chamber body 810, that is, in the axial direction of the top opening, the orthographic projection of the upper cover 821 covers the orthographic projection of the top opening, and at this time, the orthographic projection of the top opening is completely located within the orthographic projection of the upper cover 821. At this time, the upper cover 821 can cover the chamber body 810 to cover the top opening; or, the upper cover 821 is located directly above the top opening, and there is a gap between the two, that is, the upper cover 821 does not cover the top opening. Optionally, the rotation axis of the rotation shaft 822 may be located on one side of the chamber body 810, and in this case, the rotation axis may not intersect with the chamber body 810; of course, the rotation axis may also intersect with the chamber body 810. The upper cover 821 may be misaligned with the top opening, that is, in the axial direction of the top opening, the orthographic projection of the top opening is located outside the orthographic projection of the upper cover 821, and in this case, the upper cover 821 may be located on the maintenance side of the chamber body 810.

[0033] In some embodiments, the outer circumference of the rotating shaft 822 is provided with a first matching portion 841 and / or a second matching portion 842. When the rotating shaft 822 is in the first rotation position, the positioning member 830 can move relative to the rotating shaft 822 to position and cooperate with the first matching portion 841 or release the positioning cooperation; when the rotating shaft 822 is in the second rotation position, the positioning member 830 can move relative to the rotating shaft 822 to position and cooperate with the second matching portion 842 or release the positioning cooperation, but the first matching portion 841 and / or the second matching portion 842 are provided on the outer circumference of the rotating shaft 822 so that the first matching portion 841 and / or the second matching portion 842 are not in the first rotation position. 42 is closer to the axis of the rotating shaft 822, so that when the rotating shaft 822 rotates at the same angle, the displacement of the first matching portion 841 and / or the second matching portion 842 is smaller. In other words, this requires that the first matching portion 841 and the second matching portion 842 are closer together, which may cause confusion in the matching between the positioning member 830 and the first matching portion 841 and the second matching portion 842; for example, when the positioning member 830 is required to be positioned and matched with the first matching portion 841, it is positioned and matched with the second matching portion 842; or, when the positioning member 830 is required to be positioned and matched with the second matching portion 842, it is positioned and matched with the first matching portion 841.

[0034] In an optional embodiment, the cover opening mechanism also includes a positioning fitting member 840, which is arranged on the outside of the rotating shaft 822; a first fitting portion 841 is provided on the positioning fitting member 840, and when the rotating shaft 822 is in the first rotation position, the positioning member 830 can move relative to the rotating shaft 822 to position or release the positioning fitting with the first fitting portion 841; and / or, a second fitting portion 842 is provided on the positioning fitting member 840, and when the rotating shaft 822 is in the second rotation position, the positioning member 830 can move relative to the rotating shaft 822 to position or release the positioning fitting with the second fitting portion 842. In this embodiment, the first matching portion 841 and / or the second matching portion 842 are arranged on the positioning matching member 840, and the positioning matching member 840 is arranged outside the rotating shaft 822, so that the distance between the first matching portion 841 and / or the second matching portion 842 and the axis of the rotating shaft 822 can be more appropriate, so that when the rotating shaft 822 rotates at the same angle, the displacement of the first matching portion 841 and / or the second matching portion 842 is more appropriate, so as to improve the matching accuracy between the positioning member 830 and the first matching portion 841 and / or the second matching portion 842. In addition, by arranging the first matching portion 841 and the second matching portion 842 on the positioning matching member 840, the setting distance between the first matching portion 841 and the second matching portion 842 can be more appropriate, thereby solving the problem of confusion in matching between the positioning member 830 and the first matching portion 841 and the second matching portion 842.

[0035] Optionally, the positioning member 830 may have a positioning protrusion (or a positioning recess), and the first matching portion 841 and the second matching portion 842 may both be positioning recesses (or positioning protrusions). When the positioning member 830 can rotate relative to the rotating shaft 822, the positioning recess has a channel for the positioning protrusion to enter, so that the positioning protrusion enters or exits the positioning recess. The positioning matching member 840 may be an annular component, which may be sleeved on the outside of the rotating shaft 822, or may be integrally formed with the rotating shaft 822; of course, the positioning matching member 840 may also be a fan-shaped component, and the present application does not limit the shape of the positioning matching member 840. The positioning matching member 840 and the rotating shaft 822 may be split components, or the positioning matching member 840 may also be integrally formed with the rotating shaft 822.

[0036] In an optional embodiment, the second rotation position includes a first sub-position and a second sub-position, the second matching portion 842 includes a first sub-matching portion 842a corresponding to the first sub-position and a second sub-matching portion 842b corresponding to the second sub-position, the rotation shaft 822 can rotate from the first rotation position to the first sub-position along the first rotation direction, and the rotation shaft 822 can also rotate from the first rotation position to the second sub-position along the second rotation direction, and the first rotation direction is opposite to the second rotation direction. Here, the first sub-matching portion 842a and the second sub-matching portion 842b can be arranged at intervals along the circumference of the positioning matching piece 840.

[0037] When the rotating shaft 822 is in the first sub-position, the positioning member 830 can move relative to the rotating shaft 822 to position and cooperate with the first sub-matching portion 842a or release the positioning cooperation; when the rotating shaft 822 is in the second sub-position, the positioning member 830 can move relative to the rotating shaft 822 to position and cooperate with the second sub-matching portion 842b or release the positioning cooperation. In this embodiment, the second matching portion 842 includes a first sub-matching portion 842a and a second sub-matching portion 842b. When the rotating shaft 822 is in the first sub-position and the second sub-position, the positioning member 830 is respectively positioned and cooperated with the first sub-matching portion 842a and the second sub-matching portion 842b or releases the positioning cooperation. That is to say, the positioning cooperation member 840 of this embodiment cooperates with the positioning member 830 to be compatible with two rotation angles, and the above two rotation angles can correspond to the two maintenance positions of the upper cover. In this way, according to different maintenance requirements, the rotating shaft 822 can be rotated to different maintenance positions and then positioned, so that the semiconductor process equipment can adapt to a variety of maintenance requirements.

[0038] In an optional embodiment, the cover opening mechanism further includes a lifting device and a cantilever beam 823, the first end of the lifting device is connected to the upper cover 821, the second end of the lifting device is connected to the first end of the cantilever beam 823, the second end of the cantilever beam 823 is fixedly connected to the rotating shaft 822, and the lifting device can drive the upper cover 821 to rise and fall, so that the upper cover 821 is close to or away from the top opening of the chamber body 810. Optionally, there is an angle between the axis of the rotating shaft 822 and the axis of the cantilever beam 823, and the angle can be an acute angle, a right angle or an obtuse angle. In this embodiment, the cover opening mechanism includes a lifting device, which can drive the upper cover 821 to rise or fall, so that the upper cover 821 moves in a direction away from or close to the top opening; and the lifting device is connected to the rotating shaft 822 through the cantilever beam 823, so that the rotating shaft 822 can be set away from the center of the upper cover 821, so as to increase the area of ​​the upper cover 821 itself located on the maintenance side when it is located in the second rotation position, thereby making more components on the upper cover 821 located on the maintenance side.

[0039] The specific operation process is as follows: when the upper cover 821 needs to be maintained, the lifting device is controlled to lift the upper cover 821. During this process, the upper cover 821 can open the top opening, and then the positioning member 830 and the positioning matching member 840 are released from the positioning matching, and the upper cover 821 can be pushed to rotate from the first rotation position to the second rotation position.

[0040] In an optional embodiment, the lifting device includes a first driving device 400 and an interlocking device 850, and the interlocking device 850 is provided with a reversing portion 853 for switching the interlocking device 850 between a first state and a second state; when the rotating shaft 822 is located at the first rotating position, the cantilever beam 823 presses the reversing portion 853, and the interlocking device 850 is in the first state, so that the first driving device 400 drives the upper cover 821 to be lifted and lowered; when the rotating shaft 822 is located at the second rotating position, the cantilever beam 823 releases the reversing portion 853, and the interlocking device 850 is in the second state, so as to limit the first driving device 400 from driving the upper cover 821 to be lifted and lowered.

[0041] When the rotating shaft 822 of this embodiment is located at the first rotating position, that is, the upper cover 821 is directly opposite to the top opening of the chamber body 810 and is not on the maintenance side, the cantilever beam 823 presses the reversing portion 853 to put the interlocking device 850 in the first state, thereby enabling the first driving device 400 to drive the upper cover 821 to rise and fall; and when the rotating shaft 822 is located at the second rotating position, that is, the upper cover 821 is staggered from the top opening and is on the maintenance side, the cantilever beam 823 releases the reversing portion 853 to put the interlocking device 850 in the second state, thereby limiting the first driving device 400 from driving the upper cover 821 to rise and fall. It can be seen that the first driving device 400 of this embodiment can only drive the upper cover 821 to rise and fall when it is not on the maintenance side, which can avoid safety accidents caused by maintenance personnel when maintaining the upper cover 821 due to misoperation of lifting the upper cover 821. Of course, the lifting device can also only include the first driving device 400 without the interlocking device 850.

[0042] In an optional embodiment, the first drive device 400 is a telescopic cylinder, the interlocking device 850 is an interlocking reversing valve, and the lifting device further includes a lifting pipeline system 824. Optionally, in other embodiments, the first drive device 400 may be a driving source such as an electric motor or a hydraulic motor, and a lifting mechanism connected to the driving source, in which case the interlocking device 850 is a steering switching component of the electric motor or the hydraulic motor, and the lifting mechanism may be a screw nut mechanism, a connecting rod mechanism, etc.

[0043] The lifting pipeline system 824 is connected to the first drive device 400, and has a first medium inlet 825, which is used to introduce fluid medium to drive the first drive device 400 to extend and retract. Specifically, after the fluid medium is introduced into the first medium inlet 825, the lifting pipeline system 824 can switch the internal pipeline to allow the fluid medium to enter the rod cavity or the rodless cavity of the first drive device 400, so that the first drive device 400 can be extended and retracted, thereby driving the upper cover 821 to move closer to or away from the top opening. The fluid medium here can be compressed air or hydraulic oil, and the first drive device 400 can be a hydraulic cylinder or a gas cylinder.

[0044] The interlocking device 850 has a first fluid port 851 and a second fluid port 852. The first fluid port 851 can be connected to the fluid source, and the second fluid port 852 is connected to the first medium inlet 825. Optionally, the interlocking device 850 can be a manual reversing valve, an electromagnetic reversing valve, a machine-controlled reversing valve, etc. For example, the interlocking device 850 can be a roller plunger type machine-controlled valve, in which case the reversing portion 853 is a roller plunger; of course, in addition to the roller plunger, the reversing portion 853 can also be a button, etc.

[0045] When the interlocking device 850 is in the first state, the interlocking device 850 is located in the first valve position so that the first fluid port 851 is connected to the second fluid port 852; when the interlocking device 850 is in the second state, the interlocking device 850 is located in the second valve position so that the first fluid port 851 is disconnected from the second fluid port 852. In this embodiment, when the interlocking device 850 is in the first state, the interlocking device 850 is located in the first valve position, and the first fluid port 851, the second fluid port 852 and the first medium inlet 825 are connected in sequence. At this time, the external fluid source can pass the fluid medium into the first medium inlet 825 through the first fluid port 851 to drive the first drive device 400 to retract and extend, and then drive the upper cover to rise and fall; and when the interlocking device 850 is in the second state, the interlocking device 850 is located in the second valve position, and the first fluid port 851 is disconnected from the second fluid port 852, that is, the fluid source cannot pass the fluid medium into the first medium inlet 825 through the first fluid port 851, thereby failing to drive the first drive device 400 to retract and extend, and failing to drive the upper cover 821 to rise and fall.

[0046] In an optional embodiment, the first drive device 400 has a first flow port 410 and a second flow port 420; the first flow port 410 is connected to the first control valve 210, and the first control valve 210 has a first pilot port 211, and a first connecting port 212 and a second connecting port 213 that are connected and disconnectable. When the first pilot fluid of a first preset pressure is introduced into the first pilot port 211, the first connecting port 212 is connected to the second connecting port 213.

[0047] The first connecting port 212 and the second circulation port 420 can be connected and disconnected with the first medium inlet 825 respectively, and the first circulation port 410 is connected with the second connecting port 213; when the first medium inlet 825 is connected with the first circulation port 410 and disconnected from the second circulation port 420, the first driving device 400 can drive the upper cover 821 to descend; when the first medium inlet 825 is connected with the second circulation port 420 and disconnected from the first circulation port 410, the first driving device 400 can drive the upper cover 821 to rise.

[0048] Specifically, the first control valve 210 is a pilot valve. Only when the first pilot fluid of the first preset pressure is introduced into the first pilot port 211, the first communication port 212 is connected with the second communication port 213. At this time, the medium in the first medium inlet 825 can enter the first drive device 400 through the first control valve 210, or the medium in the first drive device 400 can flow out through the first control valve 210. Therefore, when it is not necessary to drive the upper cover 821 to descend, the first pilot fluid may not be introduced into the first control valve 210. In this way, even if the fluid medium is introduced into the first medium inlet 825, the fluid medium cannot enter the first drive device 400 through the first control valve 210, thereby ensuring that the upper cover 821 cannot descend, thereby preventing safety accidents.

[0049] The interlocking device 850 also has a third fluid port 854, which is connected to the second flow port 420; when the interlocking device 850 is in the first valve position, the first fluid port 851 is disconnected from the third fluid port 854; when the interlocking device 850 is in the second valve position, the first fluid port 851 is connected to the third fluid port 854, and the first connecting port 212 is disconnected from the second connecting port 213.

[0050] In this embodiment, when the rotating shaft 822 is in the second rotating position, that is, the cantilever beam 823 releases the reversing portion 853, and the upper cover 821 is at the maintenance side, the first fluid port 851 is connected to the third fluid port 854, and the third fluid port 854 is connected to the second flow port 420 of the first drive device 400. That is to say, the external fluid source can enter the second flow port 420 through the first fluid port 851 and the third fluid port 854 in sequence. At this time, the first pilot fluid does not need to be introduced into the first control valve 210, so the fluid in the first drive device 400 is not connected to the second flow port 420. The medium cannot be discharged through the first flow port 410, so that the piston rod of the first drive device 400 cannot move upward and remains stationary; at the same time, because the external fluid source continues to deliver the fluid medium to the second flow port 420 of the first drive device 400, this can balance the pulling force applied by the upper cover 821 to the piston rod of the first drive device 400, so that the first drive device 400 remains in the lifting position unchanged, and the piston rod of the first drive device 400 is prevented from falling due to the gravity of the upper cover 821, thereby reducing the risk of safety accidents. Of course, the interlocking device 850 can also have other fluid ports to allow the fluid medium flowing out of the lifting pipeline system 824 to be discharged through the interlocking device 850.

[0051] In an optional embodiment, the second fluid port 852 is connected to a third control valve 860, and the third control valve 860 has a second pilot port 861, and a fifth connecting port 862 and a sixth connecting port 863 that can be connected and disconnected, the fifth connecting port 862 is connected to the second fluid port 852, and the sixth connecting port 863 is connected to the first medium inlet 825; when the second pilot fluid of the second preset pressure is introduced into the second pilot port 861, the fifth connecting port 862 is connected to the sixth connecting port 863. In this embodiment, the third control valve 860 is a pilot valve, and only when the second pilot fluid of the second preset pressure is introduced into the second pilot port 861, the fifth connecting port 862 is connected to the sixth connecting port 863, and at this time, the fluid medium of the external fluid source can enter the first medium inlet 825 through the third control valve 860 to realize the lifting and lowering of the first drive device 400. It can be seen that the third control valve 860 is provided in this embodiment to further ensure that the first drive device 400 can be extended and retracted only when it is required.

[0052] In an optional embodiment, the cover opening mechanism further includes a second drive device 870, the second drive device 870 is a telescopic cylinder, one end of the second drive device 870 is used to connect with the chamber body 810, the other end of the second drive device 870 is connected with the positioning member 830, the second drive device 870 can drive the positioning member 830 to move, and the second drive device 870 has a third flow port 871 and a fourth flow port 872. Optionally, the second drive device 870 can be a hydraulic cylinder or a cylinder. Of course, the second drive device 870 of this embodiment can also be omitted, and the positioning member 830 can be driven to move manually or electrically. Further, a guide member 600 is provided on the chamber body 810, and a guide hole is provided on the guide member 600. At least part of the piston rod of the second drive device 870 cooperates with the guide hole to guide and cooperate to improve the stability of the telescopic movement of the second drive device 870.

[0053] The opening mechanism also includes a locking reversing valve 880, which has a fourth fluid port 881, a fifth fluid port 882 and a sixth fluid port 883. The fifth fluid port 882 and the sixth fluid port 883 are respectively connected to the fourth fluid port 881 in a switchable manner, the fifth fluid port 882 is connected to the third flow port 871, and the sixth fluid port 883 is connected to the fourth flow port 872.

[0054] The locking reversing valve 880 has a third valve position and a fourth valve position. When the locking reversing valve 880 is in the third valve position, the fourth fluid port 881 is connected to the fifth fluid port 882 and is disconnected from the sixth fluid port 883, and the second drive device 870 drives the positioning member 830 to move to cooperate with the rotating shaft 822; when the locking reversing valve 880 is in the fourth valve position, the fourth fluid port 881 is connected to the sixth fluid port 883 and is disconnected from the fifth fluid port 882, and the second drive device 870 drives the positioning member 830 to move to release the positioning cooperation with the rotating shaft 822; the second pilot port 861 is connected to the connecting pipe between the fifth fluid port 882 and the third flow port 871.

[0055] In this embodiment, when the fourth fluid port 881 is connected to one of the fifth fluid port 882 and the sixth fluid port 883, the fourth fluid port 881 is disconnected from the other of the fifth fluid port 882 and the sixth fluid port 883; and, when the fourth fluid port 881 is connected to the fifth fluid port 882, the second driving device 870 can drive the positioning member 830 to move relative to the rotating shaft 822 to position and cooperate with the rotating shaft 822; when the fourth fluid port 881 is connected to the sixth fluid port 883, the second driving device 870 can drive the positioning member 830 to move relative to the rotating shaft 822 to release the positioning cooperation with the rotating shaft 822. The fluid pressure in the connecting pipe of the present embodiment can be configured as follows: when the fourth fluid port 881 is connected to the fifth fluid port 882, the fluid pressure in the connecting pipe is the second preset pressure, and when the fourth fluid port 881 is connected to the fifth fluid port 882, the fluid pressure in the connecting pipe is less than the second preset pressure; that is, only when the second driving device 870 drives the positioning member 830 to cooperate with the rotating shaft 822 in a positioning manner can the third control valve 860 be opened, and the fluid medium of the fluid source can enter the first medium inlet 825 of the lifting pipeline system 824 to lift the upper cover 821, and when the second driving device 870 drives the positioning member 830 to release the positioning cooperation with the rotating shaft 822, the third control valve 860 cannot be opened, so the fluid medium of the fluid source cannot enter the first medium inlet 825 of the lifting pipeline system 824, and thus cannot drive the upper cover 821 to rise and fall. Therefore, when the rotating shaft 822 just starts to rotate, even if the cantilever beam 823 is still pressing the reversing portion 853 of the interlocking device 850, the second driving device 870 drives the positioning member 830 to release the positioning match with the rotating shaft 822, so the third control valve 860 cannot be opened, and the fluid medium of the fluid source cannot enter the first medium inlet 825 of the lifting pipeline system 824, thereby avoiding safety accidents caused by misoperation of the lifting cover 821 when the rotating shaft 822 just starts to rotate. Of course, the locking reversing valve 880 can also have other fluid ports so that the fluid medium flowing out of the second driving device 870 can be discharged through the locking reversing valve 880.

[0056] In an optional embodiment, the fourth flow port 872 is connected to a one-way throttle valve 890, and the one-way throttle valve 890 throttles in the direction in which the fourth flow port 872 extends toward the sixth fluid port 883. In this embodiment, the one-way throttle valve 890 throttles in the direction in which the fourth flow port 872 extends toward the sixth fluid port 883, that is, when the second drive device 870 drives the positioning member 830 to be positioned and matched with the rotating shaft 822, the one-way throttle valve 890 is turned on and throttles, so that the speed of the matching between the positioning member 830 and the rotating shaft 822 can be adjusted.

[0057] like Figures 9 to 11 In an optional embodiment, the lifting pipeline system 824 includes a first manual switching valve 100, a first fluid pipeline 200, a second fluid pipeline 300 and a first driving device 400. The first driving device 400 is used to connect the upper cover 821; the first driving device 400 has a first flow port 410 and a second flow port 420. The two ends of the first fluid pipeline 200 are respectively connected to the first manual switching valve 100 and the first flow port 410. The two ends of the second fluid pipeline 300 are respectively connected to the first manual switching valve 100. The first manual switching valve 100 has a fifth valve position and a sixth valve position. When the first manual switching valve 100 is in the fifth valve position, the first flow port 410 is a fluid inlet, the second flow port 420 is a fluid outlet, and the first drive device 400 can drive the upper cover 821 to descend. When the first manual switching valve 100 is in the sixth valve position, the first flow port 410 is a fluid outlet, the second flow port 420 is a fluid inlet, and the first drive device 400 can drive the upper cover 821 to ascend. The cover opening mechanism of the embodiment of the present application uses the first manual switching valve 100 to switch the working state of the telescopic cylinder. In this way, during the assembly of the machine, even if the machine is not powered, the cover opening mechanism can be used to lift or lower the upper cover 821.

[0058] Furthermore, the cover opening mechanism also includes a second manual switching valve 500, which is located upstream of the first manual switching valve 100, and the first manual switching valve 100 and the second manual switching valve 500 can be connected to each other in an on-off manner. In this embodiment, both hands are required to operate the first manual switching valve 100 and the second manual switching valve 500 respectively to drive the upper cover 821 to rise or fall, which can reduce the safety risks caused by the operator's accidental touch. In addition, when the operator operates the first manual switching valve 100 and the second manual switching valve 500 with both hands, the operator's attention can be improved, and the hand can be prevented from being pinched during the lifting and lowering of the upper cover 821, thereby ensuring the safety of the operation.

[0059] Further, the first manual switching valve 100 includes a first manual valve 110 and a second manual valve 120, the first manual valve 110 has a first medium port 111, a second medium port 112 and a third medium port 113, the second manual valve 120 has a fourth medium port 121 and a fifth medium port 122 which can be connected and disconnected, the third medium port 113 is connected to the fourth medium port 121, the first end of the first fluid pipeline 200 can be connected to the fifth medium port 122, and the first end of the second fluid pipeline 300 can be connected to the second medium port 112; the first medium port 111 and the second manual switching valve 500 can be connected and disconnected. The first medium port 111 can be connected to the second medium port 112 and the third medium port 113 respectively, and when the first medium port 111 is connected to one of the second medium port 112 and the third medium port 113, the first medium port 111 is disconnected from the other; when the first manual switching valve 100 is in the fifth valve position, the first medium port 111 is connected to the third medium port 113, and the fourth medium port 121 is connected to the fifth medium port 122; when the first manual switching valve 100 is in the sixth valve position, the first medium port 111 is connected to the second medium port 112. In the embodiment of the present application, the first manual switching valve 100, the first manual valve 110 and the second manual valve 120 each have only one operating part, so that the operating directions of the operating parts of the first manual switching valve 100, the first manual valve 110 and the second manual valve 120 can be unified, so that the operating directions of the first manual switching valve 100, the first manual valve 110 and the second manual valve 120 are consistent, which is convenient for operators to operate.

[0060] In an optional embodiment, a stopper 826 is provided on the rotating shaft 822, and a first limiting protrusion 811 is provided on the supporting seat 813. When the rotating shaft 822 is located at the first rotating position, the stopper 826 and the first limiting protrusion 811 are limited in the direction of rotation from the second rotating position to the first rotating position. If the stopper 826 is not provided, the rotating shaft 822 can be stopped by manpower, but the force applied by the maintenance personnel is different each time, so the position where the rotating shaft 822 stops each time is also different, which may cause the positioning member 830 to be unable to be positioned and matched with the rotating shaft 822, and may also cause the upper cover 821 to collide with other machines, thereby causing damage to parts. The present embodiment is provided with a stopper 826 and a first limiting protrusion 811. When the rotating shaft 822 rotates from the second rotating position to the first rotating position, the first limiting protrusion 811 can limit the stopper 826 so that the rotating shaft 822 can accurately stop at the first rotating position, thereby solving the problem that the positioning member 830 cannot be positioned and matched with the rotating shaft 822, and the upper cover 821 collides with other machines.

[0061] And / or, in an optional embodiment, a second limiting protrusion 812 is provided on the support seat 813, and when the rotating shaft 822 is located at the second rotating position, the stopper 826 and the second limiting protrusion 812 are limited in the direction of rotation from the first rotating position to the second rotating position. This embodiment is provided with a stopper 826 and a second limiting protrusion 812, and when the rotating shaft 822 rotates from the first rotating position to the second rotating position, the second limiting protrusion 812 can limit the stopper 826 so that the rotating shaft 822 stops accurately at the second rotating position, thereby solving the problem that the positioning member 830 cannot be positioned and matched with the rotating shaft 822, and the upper cover 821 collides with other machines.

[0062] Optionally, the stopper 826 may be made of a rigid material, so that when the stopper 826 contacts and limits the first and second limiting protrusions 811 and 812, the stopper 826 and the first and second limiting protrusions 811 and 812 are in rigid contact, which will generate a large vibration and may cause damage to the stopper 826, the first and second limiting protrusions 811 and 812. In an optional embodiment, the stopper 826 includes a fixed block 827, which is connected to the rotating shaft 822, and the stopper 826 also includes a first buffer block 828 disposed on the fixed block 827. When the rotating shaft 822 is located at the first rotation position, the first buffer block 828 is limitedly matched with the first limiting protrusion 811. In this embodiment, the fixed block 827 is provided with a first buffer block 828, and the first buffer block 828 can be in contact with the first limiting protrusion 811, and the first buffer block 828 has the function of buffering and shock absorption, so when the first buffer block 828 contacts the first limiting protrusion 811, no large vibration will be generated between the two, and the risk of damage to the stopper 826 and the first limiting protrusion 811 can be reduced. Optionally, the first buffer block 828 can be made of elastic materials such as rubber. Furthermore, the first buffer block 828 is detachably connected to the fixed block 827 by means of clamping, threaded connection, etc., so that it is easy to replace the first buffer block 828.

[0063] And / or, in an optional embodiment, the stopper 826 also includes a second buffer block 829 disposed on the fixed block 827, and when the rotating shaft 822 is located at the second rotating position, the second buffer block 829 is limitedly matched with the second limiting protrusion 812. In this embodiment, the fixed block 827 is provided with a second buffer block 829, and the second buffer block 829 can be in limited contact with the second limiting protrusion 812, and the second buffer block 829 has the functions of buffering and shock absorption, so when the second buffer block 829 contacts the second limiting protrusion 812, no large vibration will be generated between the two, and the risk of damage to the stopper 826 and the second limiting protrusion 812 can be reduced. Optionally, the second buffer block 829 can be made of elastic materials such as rubber. Further, the second buffer block 829 is detachably connected to the fixed block 827 by means of clamping, threaded connection, etc., so that it is convenient to replace the second buffer block 829.

[0064] In an optional embodiment, a rotation hole 814 is provided in the support seat 813, at least a portion of the rotation shaft 822 is rotationally matched with the rotation hole 814, and at least two radial rolling bearings 910 are sleeved on the outside of the rotation shaft 822, and the outer rings of the at least two radial rolling bearings 910 are matched with the inner circumference of the rotation hole 814. Optionally, the radial rolling bearing 910 is a rolling bearing that can withstand radial force, which can be a pure radial rolling bearing that can only withstand radial force, such as a needle bearing, etc.; or a rolling bearing that can withstand both radial force and axial force, such as a deep groove ball bearing, etc.

[0065] In this embodiment, the outer ring of the radial rolling bearing 910 can be interference fit with the inner circumference of the rotating hole 814, and the inner ring of the radial rolling bearing 910 can rotate with the rotating shaft 822. When the upper cover 821 is located on the maintenance side, or when the upper cover 821 is located directly above the top opening, the upper cover 821 is suspended at one end of the rotating shaft 822 and will apply radial force to the rotating shaft 822, and the radial rolling bearing 910 can withstand the above radial force to prevent the upper cover 821 from falling. In addition, the radial rolling bearing 910 of this embodiment is a rolling bearing. Compared with a sliding bearing, the rolling bearing has a smaller tolerance fit, a smaller deformation after being subjected to force, and a smaller friction force generated during the rotation process. Therefore, the use of the radial rolling bearing 910 of this embodiment can also improve the stability of the rotating shaft 822 during the rotation process.

[0066] In an optional embodiment, the cover opening mechanism also includes a cantilever beam 823, a first end of the cantilever beam 823 is used to connect with the upper cover 821, and a second end of the cantilever beam 823 is fixedly connected to the rotating shaft 822. A flange 700 extends from one end of the cantilever beam 823 toward the rotating shaft 822, and a portion of the rotating shaft 822 is located in the flange 700. An axial rolling bearing 920 is provided on the outer sleeve of the flange 700, and the axial rolling bearing 920 is arranged on the support seat 813. The two ends of the axial bearing 920 along its own axis are respectively in contact with the support seat 813 and the cantilever beam 823. In this embodiment, the axial rolling bearing 920 is sleeved on the outside of the flange 700 of the cantilever beam 823. Since the cantilever beam 823 is connected to the rotating shaft 822, the axial force applied by the upper cover 821 to the axial rolling bearing 920 can be borne jointly by the rotating shaft 822 and the cantilever beam 823, thereby reducing the force borne by the rotating shaft 822 and preventing the rotating shaft 822 from being damaged.

[0067] In an optional embodiment, the rotating hole 814 is a stepped hole, which includes a first hole section 815 and a second hole section 816. The diameter of the first hole section 815 is larger than the diameter of the second hole section 816, and the first hole section 815 is closer to the cantilever beam 823 than the second hole section 816. Optionally, the axis of the first hole section 815 is colinear with the axis of the second hole section 816; the cantilever beam 823 and the rotating shaft 822 can be connected by welding or by a threaded connector.

[0068] The axial rolling bearing 920 is arranged on the step surface connecting the first hole section 815 and the second hole section 816, and the outer ring of the axial rolling bearing 920 matches the inner circumference of the first hole section 815. Optionally, the axial rolling bearing 920 is a rolling bearing that can withstand axial force, which can be a pure axial rolling bearing that can only withstand axial force, such as a thrust ball bearing, etc.; it can also be a rolling bearing that can withstand both radial force and axial force, such as a deep groove ball bearing, etc.

[0069] In this embodiment, the axial rolling bearing 920 is arranged on the step surface, that is, the axial rolling bearing 920 is matched with the step surface in the upper limit position in the vertical downward direction, and the step surface is located within the rotating hole 814. Therefore, at least part of the axial rolling bearing 920 is located within the rotating hole 814, which can reduce the space outside the rotating hole 814 occupied by the axial rolling bearing 920.

[0070] The embodiment of the present application further discloses a semiconductor process equipment, including a process chamber and the cover opening mechanism described in any of the above embodiments, wherein the process chamber includes a chamber body 810 and an upper cover 821, a rotating shaft 822 is connected to the upper cover 821, and a support seat 813 is connected to the chamber body 810. Optionally, the upper cover 821 includes an upper electrode assembly.

[0071] The above embodiments of the present application focus on the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. Considering the simplicity of the text, they will not be repeated here. The embodiments of the present application are described above in conjunction with the accompanying drawings, but the present application is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the enlightenment of the present application, ordinary technicians in this field can also make many forms without departing from the scope of protection of the purpose of the present application and the claims, all of which are within the protection of the present application.

Claims

1. A cover opening mechanism for a process chamber, It is characterized in that The invention comprises a support seat (813), a rotating shaft (822) and a positioning member (830), wherein the positioning member (830) is movable relative to the rotating shaft (822). The rotating shaft (822) is used to be connected to the upper cover (821) of the process chamber, the supporting seat (813) is used to be connected to the chamber body (810) of the process chamber, the rotating shaft (822) is rotatably connected to the supporting seat (813), and the rotating shaft (822) is used to rotate between a first rotating position and a second rotating position. When the rotating shaft (822) is in the first rotating position or the second rotating position, the positioning member (830) can move relative to the rotating shaft (822) to achieve positioning cooperation with the rotating shaft (822) or to release positioning cooperation with the rotating shaft (822).

2. The cover opening mechanism according to claim 1, It is characterized in that The support seat (813) is provided with a rotation hole (814), and the rotation shaft (822) is rotatably disposed in the rotation hole (814). When the rotating shaft (822) is in the first rotating position, the upper cover (821) is directly opposite to the top opening of the chamber body (810); when the rotating shaft (822) is in the second rotating position, the upper cover (821) is misaligned with the top opening.

3. The cover opening mechanism according to claim 1, It is characterized in that The cover opening mechanism further comprises a positioning fitting (840), wherein the positioning fitting (840) is arranged outside the rotating shaft (822); The positioning fitting member (840) is provided with a first fitting portion (841), and when the rotating shaft (822) is in the first rotating position, the positioning member (830) can move relative to the rotating shaft (822) to position or release the positioning fitting with the first fitting portion (841); and / or, The positioning fitting member (840) is provided with a second fitting portion (842). When the rotating shaft (822) is in the second rotating position, the positioning member (830) can move relative to the rotating shaft (822) to position or release the positioning fitting with the second fitting portion (842).

4. The cover opening mechanism according to claim 3, It is characterized in that The second rotation position includes a first sub-position and a second sub-position, the second matching portion (842) includes a first sub-matching portion (842a) corresponding to the first sub-position and a second sub-matching portion (842b) corresponding to the second sub-position, the rotation shaft (822) can rotate from the first rotation position to the first sub-position along a first rotation direction, and the rotation shaft (822) can also rotate from the first rotation position to the second sub-position along a second rotation direction, and the first rotation direction is opposite to the second rotation direction; When the rotating shaft (822) is in the first sub-position, the positioning member (830) can move relative to the rotating shaft (822) to position or release the positioning fit with the first sub-fitting portion (842a); when the rotating shaft (822) is in the second sub-position, the positioning member (830) can move relative to the rotating shaft (822) to position or release the positioning fit with the second sub-fitting portion (842b).

5. The cover opening mechanism according to claim 1, It is characterized in that The cover opening mechanism further comprises a lifting device and a cantilever beam (823); the first end of the lifting device is connected to the upper cover (821); the second end of the lifting device is connected to the first end of the cantilever beam (823); the second end of the cantilever beam (823) is fixedly connected to the rotating shaft (822); and the lifting device can drive the upper cover (821) to rise and fall.

6. The cover opening mechanism according to claim 5, It is characterized in that The lifting device comprises a first driving device (400) and an interlocking device (850); The interlocking device (850) is provided with a switching portion (853) for switching the interlocking device (850) between a first state and a second state; When the rotating shaft (822) is located at the first rotating position, the cantilever beam (823) presses the reversing portion (853), and the interlocking device (850) is in the first state, so that the first driving device (400) drives the upper cover (821) to rise and fall; When the rotating shaft (822) is located at the second rotating position, the cantilever beam (823) releases the reversing portion (853), and the interlocking device (850) is in the second state to restrict the first driving device (400) from driving the upper cover (821) to rise and fall.

7. The cover opening mechanism according to claim 6, It is characterized in that The first driving device (400) is a telescopic cylinder, and the interlocking device (850) is an interlocking reversing valve. The lifting device further comprises a lifting pipeline system (824), wherein the lifting pipeline system (824) is connected to the first driving device (400), and the lifting pipeline system (824) has a first medium inlet (825), wherein the first medium inlet (825) is used to introduce a fluid medium to drive the first driving device (400) to extend and retract; the interlocking device (850) has a first fluid port (851) and a second fluid port (852), wherein the first fluid port (851) can be connected to a fluid source, and the second fluid port (852) is connected to the first medium inlet (825). When the interlocking device (850) is in the first state, the interlocking device (850) is located in a first valve position so that the first fluid port (851) is connected to the second fluid port (852); When the interlock device (850) is in the second state, the interlock device (850) is located in the second valve position so that the first fluid port (851) is disconnected from the second fluid port (852).

8. The cover opening mechanism according to claim 7, It is characterized in that The first driving device (400) has a first flow opening (410) and a second flow opening (420); The first flow port (410) is connected to a first control valve (210), the first control valve (210) having a first pilot port (211), and a first communication port (212) and a second communication port (213) that are connected and disconnectable, and when a first pilot fluid of a first preset pressure is introduced into the first pilot port (211), the first communication port (212) is connected to the second communication port (213); The first communication port (212) and the second circulation port (420) are respectively connected to the first medium inlet (825) in an on-off manner, and the first circulation port (410) is connected to the second communication port (213); when the first medium inlet (825) is connected to the first circulation port (410) and disconnected from the second circulation port (420), the first driving device (400) can drive the upper cover (821) to descend; when the first medium inlet (825) is connected to the second circulation port (420) and disconnected from the first circulation port (410), the first driving device (400) can drive the upper cover (821) to ascend; The interlocking device (850) also has a third fluid port (854), and the third fluid port (854) is connected to the second flow port (420); when the interlocking device (850) is located in the first valve position, the first fluid port (851) is disconnected from the third fluid port (854); when the interlocking device (850) is located in the second valve position, the first fluid port (851) is connected to the third fluid port (854), and the first communication port (212) is disconnected from the second communication port (213).

9. The cover opening mechanism according to claim 7, It is characterized in that The second fluid port (852) is connected to a third control valve (860), the third control valve (860) having a second pilot port (861), and a fifth communication port (862) and a sixth communication port (863) that are connected and disconnectable, the fifth communication port (862) being connected to the second fluid port (852), and the sixth communication port (863) being connected to the first medium inlet (825); When the second pilot fluid at a second preset pressure is introduced into the second pilot port (861), the fifth communication port (862) is communicated with the sixth communication port (863).

10. The cover opening mechanism according to claim 9, It is characterized in that The cover opening mechanism further comprises a second driving device (870), the second driving device (870) being a telescopic cylinder, one end of the second driving device (870) being used to be connected to the chamber body (810), the other end of the second driving device (870) being connected to the positioning member (830), the second driving device (870) being capable of driving the positioning member (830) to move, and the second driving device (870) having a third flow port (871) and a fourth flow port (872); The cover opening mechanism further comprises a locking reversing valve (880), wherein the locking reversing valve (880) has a fourth fluid port (881), a fifth fluid port (882) and a sixth fluid port (883), wherein the fifth fluid port (882) and the sixth fluid port (883) are respectively connected to the fourth fluid port (881) in an on-off manner, the fifth fluid port (882) is connected to the third flow port (871), and the sixth fluid port (883) is connected to the fourth flow port (872); The locking reversing valve (880) has a third valve position and a fourth valve position. When the locking reversing valve (880) is located at the third valve position, the fourth fluid port (881) is connected to the fifth fluid port (882) and is disconnected from the sixth fluid port (883). The second driving device (870) drives the positioning member (830) to move so as to be positioned and matched with the rotating shaft (822). When the locking reversing valve (880) is located at the fourth valve position, the fourth fluid port (881) is connected to the sixth fluid port (883) and is disconnected from the fifth fluid port (882). The second driving device (870) drives the positioning member (830) to move so as to release the positioning and matching with the rotating shaft (822). The second pilot port (861) is in communication with a communication pipe located between the fifth fluid port (882) and the third flow port (871).

11. The cover opening mechanism according to claim 10, It is characterized in that The fourth flow port (872) is connected to a one-way throttle valve (890), and the one-way throttle valve (890) throttles in the direction in which the fourth flow port (872) extends toward the sixth fluid port (883).

12. The cover opening mechanism according to claim 1, It is characterized in that A rotating hole (814) is provided in the support seat (813), and at least two radial rolling bearings (910) are sleeved on the outside of the rotating shaft (822), and the outer rings of at least two radial rolling bearings (910) match the inner circumference of the rotating hole (814).

13. The cover opening mechanism according to claim 12, It is characterized in that The cover opening mechanism further comprises a cantilever beam (823), a first end of the cantilever beam (823) being used to connect with the upper cover (821), and a second end of the cantilever beam (823) being fixedly connected with the rotating shaft (822). A flange (700) extends from one end of the cantilever beam (823) toward the rotating shaft (822), a portion of the rotating shaft (822) is located inside the flange (700), an axial rolling bearing (920) is sleeved on the outside of the flange (700), the axial rolling bearing (920) is arranged on the support seat (813), and the two ends of the axial direction of the axial rolling bearing (920) are in contact with the support seat (813) and the cantilever beam (823) respectively.

14. The cover opening mechanism according to claim 13, It is characterized in that The rotating hole (814) is a stepped hole, and the stepped hole includes a first hole section (815) and a second hole section (816); the diameter of the first hole section (815) is larger than the diameter of the second hole section (816), and the first hole section (815) is closer to the cantilever beam (823) than the second hole section (816); The axial rolling bearing (920) is arranged on the step surface connecting the first hole section (815) and the second hole section (816), and the outer ring of the axial rolling bearing (920) is matched with the inner circumferential surface of the first hole section (815).

15. The cover opening mechanism according to claim 1, It is characterized in that The rotating shaft (822) is provided with a stopper (826). The support seat (813) is provided with a first limiting protrusion (811), and when the rotating shaft (822) is located at the first rotating position, the stopper (826) cooperates with the first limiting protrusion (811) in the direction of rotation from the second rotating position to the first rotating position to limit the rotation; and / or, The support seat (813) is provided with a second limiting protrusion (812), and when the rotating shaft (822) is located at the second rotating position, the stopper (826) cooperates with the second limiting protrusion (812) to limit the rotation in the direction from the first rotating position to the second rotating position.

16. The cover opening mechanism according to claim 15, It is characterized in that The stopper (826) includes a fixing block (827), and the fixing block (827) is connected to the rotating shaft (822). The stopper (826) further comprises a first buffer block (828) arranged on the fixing block (827), and when the rotating shaft (822) is located at the first rotating position, the first buffer block (828) and the first limiting protrusion (811) are limitedly matched; and / or, The stopper (826) further comprises a second buffer block (829) arranged on the fixing block (827), and when the rotating shaft (822) is located at the second rotating position, the second buffer block (829) is in limiting cooperation with the second limiting protrusion (812).

17. A semiconductor process equipment, comprising a process chamber and an opening mechanism as described in any one of claims 1 to 16, wherein the process chamber comprises a chamber body (810) and an upper cover (821), the rotating shaft (822) is connected to the upper cover (821), and the support seat (813) is connected to the chamber body (810).

Images