Impedance matcher, matching method, radio frequency power supply system and plasma source system

Abstract

The invention discloses an impedance matcher, a matching method, a radio frequency power supply system and a plasma source system. The impedance matcher comprises an impedance matching module, a control module, an adjustable capacitor module and a switch module, the adjustable capacitor module comprises a plurality of adjustable capacitor units which are connected in series; the adjustable capacitor units are connected in parallel with the corresponding switch units; the control module is used for controlling at least one switch unit to be switched off and controlling at least one switch unit to be switched on when the load is in the current impedance, and adjusting the capacitance value of the adjustable capacitor unit corresponding to at least one switched-on switch unit according to the next impedance of the load. Therefore, the total capacitance value formed by the adjustable capacitor unit after the capacitance value is adjusted is matched with the next impedance of the load. According to the invention, impedance matching between the radio frequency power supply module and the load can be realized while the impedance of the load is changed, and impedance matching can be quickly realized.

Description

Technical Field

[0001] The present invention relates to the field of radio frequency technology, and in particular to an impedance matcher and a matching method, a radio frequency power supply system and a plasma source system. Background Art

[0002] At present, with the development of RF power technology, the impedance matching requirements between RF power modules and loads are becoming increasingly higher.

[0003] The impedance matcher is usually installed between the RF power module and the load. Currently, a common method is to perform impedance matching between the RF power module and the load by adjusting the capacitance value of the adjustable capacitor in the impedance matcher.

[0004] However, the current impedance matcher has a problem that the capacitance value is adjusted slowly after the impedance of the load changes, resulting in a long impedance matching time between the RF power module and the load. Summary of the invention

[0005] The present invention provides an impedance matcher and a matching method, a radio frequency power supply system and a plasma source system, which can realize impedance matching between a radio frequency power supply module and a load while the impedance of the load changes, and can quickly realize impedance matching.

[0006] According to one aspect of the present invention, an impedance matcher is provided, the impedance matcher comprising: an impedance matching module, a control module, an adjustable capacitance module and a switch module; The first end of the impedance matching module is electrically connected to the output end of the RF power supply module, and the second end of the impedance matching module is electrically connected to the input end of the load; The first end of the adjustable capacitor module is electrically connected to the first end of the impedance matching module, and the second end of the adjustable capacitor module is grounded; The adjustable capacitor module includes a plurality of adjustable capacitor units connected in series; The switch module includes switch units whose number is equal to that of the adjustable capacitor units; The adjustable capacitor units correspond to the switch units one by one, and the adjustable capacitor units are connected in parallel with the switch units corresponding to them; The control module is used to control at least one of the switch units to be disconnected and at the same time to be turned on when the load is at the current impedance, and to adjust the capacitance value of the adjustable capacitor unit corresponding to at least one of the switched-on switch units according to the next impedance of the load, so that the total capacitance value formed by the adjustable capacitor units after the capacitance value is adjusted matches the next impedance, and is also used to control the switch unit corresponding to the next impedance to be disconnected when the impedance of the load changes from the current impedance to the next impedance, and to control the switch units among all the switch units except the switch unit corresponding to the next impedance to be turned on, wherein the switch unit corresponding to the next impedance is the switch unit corresponding to the adjustable capacitor unit corresponding to the switch unit adjusted to be turned on by the control module when the load is at the current impedance.

[0007] Optionally, the adjustable capacitor module includes two adjustable capacitor units connected in series; The control module is used to control the switch unit corresponding to one of the adjustable capacitor units to be disconnected when the load is at the current impedance, and to control the switch unit corresponding to another adjustable capacitor unit to be turned on, and to adjust the capacitance value of the adjustable capacitor unit corresponding to the turned-on switch unit according to the next impedance of the load so that the capacitance value of the adjusted adjustable capacitor unit matches the next impedance, and is also used to control the currently disconnected switch unit to be turned on and to control the currently turned-on switch unit to be disconnected when the impedance of the load changes from the current impedance to the next impedance.

[0008] Optionally, the plurality of adjustable capacitor units connected in series include adjustable capacitor units whose number is equal to the impedance of the load; Each impedance of the load corresponds to one of the adjustable capacitance units; The control module is used to adjust the capacitance value of the adjustable capacitance unit corresponding to each impedance of the load before each impedance of the load is formed, so that the capacitance value of each adjustable capacitance unit after adjustment matches the impedance of the corresponding load.

[0009] Optionally, the impedance matcher provided in this embodiment further includes a detection module; the detection module includes an amplitude detection unit and a phase detection unit; The amplitude detection unit is used to detect the voltage amplitude and current amplitude output by the RF power module; The phase detection unit is used to detect the voltage phase and current phase output by the RF power module; The control module is used to adjust the output frequency of the radio frequency power module according to the voltage amplitude, the current amplitude, the voltage phase and the current phase.

[0010] Optionally, the impedance matcher provided in this embodiment further includes a directional coupling module; The directional coupling module is used to detect the reverse power between the RF power module and the load; The control module is used to adjust the output frequency of the radio frequency power module according to the reverse power.

[0011] Optionally, the impedance matcher provided in this embodiment further includes an alarm module; The directional coupling module is also used to detect the forward power between the RF power module and the load; The control module is also used to control the alarm module to send out an alarm signal when the forward power is less than the set power.

[0012] Optionally, the impedance matching module includes at least one fixed inductor and at least one fixed capacitor; The fixed inductor and the fixed capacitor are connected in series; The adjustable capacitor unit includes at least one adjustable capacitor.

[0013] According to another aspect of the present invention, an impedance matching method is provided, and the impedance matching method is applied to the impedance matching device provided in any embodiment of the present invention; The impedance matching method comprises: The control module controls at least one of the switch units to be disconnected and at least one of the switch units to be turned on when the load is at the current impedance, and adjusts the capacitance value of the adjustable capacitor unit corresponding to the at least one turned-on switch unit according to the next impedance of the load, so that the total capacitance value formed by the adjustable capacitor unit after the capacitance value is adjusted matches the next impedance; When the impedance of the load changes from the current impedance to the next impedance, the control module controls the switch unit corresponding to the next impedance to be disconnected, and controls all switch units except the switch unit corresponding to the next impedance to be turned on, wherein the switch unit corresponding to the next impedance is the switch unit corresponding to the adjustable capacitor unit corresponding to the switch unit adjusted to be turned on by the control module when the load is at the current impedance.

[0014] According to another aspect of the present invention, a radio frequency power supply system is provided. The radio frequency power supply system includes a radio frequency power supply module and the impedance matcher provided by any embodiment of the present invention.

[0015] According to another aspect of the present invention, a plasma source system is provided. The plasma source system includes a reaction chamber and a radio frequency power supply system provided by any embodiment of the present invention.

[0016] The embodiment of the present invention provides an impedance matcher, which is connected between a radio frequency power supply module and a load. When the load is at the current impedance, the control module in the impedance matcher obtains the total capacitance value according to the capacitance value of the adjustable capacitor unit corresponding to the switch unit that is turned on according to the next impedance adjustment part of the load. And when the impedance of the load changes from the current impedance to the next impedance, the sum of the capacitance values ​​of the adjustable capacitor units working in the impedance matcher is controlled to be the total capacitance value, wherein the total capacitance value matches the next impedance, so that when the impedance of the load changes, the impedance matcher is ensured to match the impedance of the radio frequency power supply module with the impedance of the load. When the load is a reaction chamber, the type of gas in the reaction chamber, the flow rate of the gas, the pressure of the gas, and the power of the pulse output by the radio frequency power supply module will cause the impedance of the load to change. The control module in the embodiment of the present invention can obtain the value of the impedance in the load and the moment of the impedance change in advance. It can be seen that the impedance matcher provided by the embodiment of the present invention can be applied to the radio frequency power supply module that outputs multi-level pulses, and can also ensure that the impedance of the load matches the impedance of the radio frequency power supply module in time when the type of gas, the flow rate of the gas, and the pressure of the gas in the reaction chamber change. The impedance matcher provided in the embodiment of the present invention can adjust the total capacitance value corresponding to the load with impedance change before the impedance of the load changes, so as to achieve matching by controlling the disconnection of the switch unit while the impedance of the load changes, without having to adjust the capacitance value multiple times according to the changed impedance after the impedance of the load changes. It can be seen that the impedance matcher provided in the embodiment of the present invention can basically achieve impedance matching between the RF power supply module and the load while the impedance of the load changes, and can quickly achieve impedance matching.

[0017] It should be understood that the contents described in this section are not intended to identify the key or important features of the embodiments of the present invention, nor are they intended to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0019] Figure 1 It is a structural schematic diagram of an impedance matching device related to the technology of the present invention; Figure 2 This is a schematic structural diagram of an impedance matcher provided by an embodiment of the present invention when it is electrically connected to a radio frequency power supply module and a load; Figure 3is a structural schematic diagram of another impedance matcher provided by an embodiment of the present invention when it is electrically connected to a radio frequency power supply module and a load; Figure 4 is a structural schematic diagram of another impedance matcher provided by an embodiment of the present invention when it is electrically connected to a radio frequency power supply module and a load; Figure 5 is a structural schematic diagram of another impedance matcher provided by an embodiment of the present invention when it is electrically connected to a radio frequency power supply module and a load; Figure 6 is a structural schematic diagram of another impedance matcher provided by an embodiment of the present invention when it is electrically connected to a radio frequency power supply module and a load; Figure 7 It is a flowchart of an impedance matching method provided according to an embodiment of the present invention. DETAILED DESCRIPTION

[0020] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0021] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0022] Figure 1 This is a schematic diagram of the structure of an impedance matcher related to the technology of the present invention, refer to Figure 1The impedance matcher is connected between the RF power module and the load, and includes a control module, a first adjustable capacitor CL1, and a second adjustable capacitor CT1. When the impedance of the load changes, the control module adjusts the capacitance value of the first adjustable capacitor CL1 and the capacitance value of the second adjustable capacitor CT1 according to the changed impedance to ensure the impedance matching between the RF power module and the load. However, the adjustment speed of the capacitance value is too slow, there is a high matching delay, and the impedance matching cannot be achieved quickly.

[0023] In order to solve the above-mentioned problem of impedance matching delay, an embodiment of the present invention provides an impedance matcher, which can achieve impedance matching between a radio frequency power supply module and a load while the impedance of the load changes.

[0024] Figure 2 is a schematic diagram of a structure of an impedance matcher provided by an embodiment of the present invention when it is electrically connected to a radio frequency power supply module and a load, with reference to Figure 2 The impedance matching device 100 provided in this embodiment includes: an impedance matching module 110, a control module 120, an adjustable capacitor module 130 and a switch module 140; the first end of the impedance matching module 110 is electrically connected to the output end of the RF power supply module 200, and the second end of the impedance matching module 110 is electrically connected to the input end of the load 300; the first end of the adjustable capacitor module 130 is electrically connected to the first end of the impedance matching module 110, and the second end of the adjustable capacitor module 130 is grounded; the adjustable capacitor module 130 includes a plurality of adjustable capacitor units 131 connected in series; the switch module 140 includes switch units 141 equal in number to the adjustable capacitor units 131; the adjustable capacitor units 131 correspond to the switch units 141 one by one, and the adjustable capacitor units 131 are connected in parallel with the corresponding switch units 141; the control module 120 is used to connect the load 3 00 is in the current impedance, controls at least one switch unit 141 to be disconnected and at least one switch unit 141 to be turned on, and adjusts the capacitance value of the adjustable capacitor unit 131 corresponding to at least one switched-on switch unit 141 according to the next impedance of the load 300, so that the total capacitance value formed by the adjustable capacitor unit 131 after the capacitance value is adjusted matches the next impedance, and is also used for, when the impedance of the load 300 changes from the current impedance to the next impedance, controlling the switch unit 141 corresponding to the next impedance to be disconnected, and controlling the switch units 141 except the switch unit 141 corresponding to the next impedance in all the switch units 141 to be turned on, wherein the switch unit 141 corresponding to the next impedance is the switch unit 141 corresponding to the adjustable capacitor unit 131 corresponding to the switch unit 141 adjusted to be turned on by the control module 120 when the load 300 is in the current impedance.

[0025] Specifically, the number of the adjustable capacitor units 131 in the impedance matcher 100 provided in this embodiment may be 2, 3, 4, or 5. The number of the switch units 141 is equal to the number of the adjustable capacitor units 131. An adjustable capacitor unit 131 may include one adjustable capacitor, or may include multiple adjustable capacitors connected in series or in parallel.

[0026] The switch unit 141 provided in this embodiment has two working states, one of which is on and the other is off. In the process of the RF power module 200 outputting RF energy to the load 300, since the current flows through the adjustable capacitor unit 131 corresponding to the disconnected switch unit 141, the capacitance value of the adjustable capacitor unit 131 corresponding to the disconnected switch unit 141 will affect the impedance matching between the load 300 and the RF power module 200. Since the current does not flow through the adjustable capacitor unit 131 corresponding to the turned-on switch unit 141, the capacitance value of the adjustable capacitor unit 131 corresponding to the turned-on switch unit 141 does not affect the impedance matching between the load 300 and the RF power module 200. The impedance matching module 110 in this embodiment and the adjustable capacitor unit 131 corresponding to the disconnected switch unit 141 work together to achieve impedance matching between the RF power module 200 and the load 300. The impedance matching module 110 may include a fixed inductor, a fixed inductor and a fixed capacitor connected in series, or a fixed inductor and an adjustable capacitor connected in series.

[0027] The control module 120 is electrically connected to the control end of each adjustable capacitor unit 131, and the control module 120 can adjust the capacitance value of each adjustable capacitor unit 131. The control module 120 is electrically connected to the control end of each switch unit 141, and the control module 120 can control each switch unit 141 to be turned on or off.

[0028] When the load 300 is at the current impedance, the control module 120 can control one switch unit 141 to be disconnected, and control the remaining switch units 141 in the switch module 140 to be turned on, or control two or more switch units 141 to be disconnected, and control the remaining switch units 141 to be turned on except the disconnected switch units 141. The switch unit 141 can be a switch transistor.

[0029] The total capacitance value is the total capacitance value formed after the control module 120 adjusts the capacitance value of the adjustable capacitance unit 131 corresponding to the conductive switch unit 141 when the load 300 is in the current impedance. For example, if the load 300 is in the current impedance, the control module 120 adjusts the capacitance value of the adjustable capacitance unit 131 corresponding to a conductive switch unit 141, and the capacitance value of the adjusted adjustable capacitance unit 131 is the total capacitance value. If the load 300 is in the current impedance, the control module 120 adjusts the capacitance value of the adjustable capacitance unit 131 corresponding to two conductive switch units 141, and the capacitance value of the two adjusted adjustable capacitance units 131 connected in series is the total capacitance value. The total capacitance value matches the next impedance of the load 300, which means that when the impedance of the load 300 is the next impedance, the total capacitance value and the matching value corresponding to the impedance matching module 110 can make the impedance of the RF power supply module 200 match the impedance of the load 300. Different impedances correspond to different total capacitance values. The control module 120 is also used to store total capacitance values ​​corresponding to different impedances. When the next impedance of the load 300 is obtained, the control module 120 is used to determine the total capacitance value corresponding to the next impedance according to the next impedance, and adjust the capacitance value of the adjustable capacitance unit 131 corresponding to the turned-on switch unit 141 to adjust to the total capacitance value.

[0030] The current impedance of the load 300 is the impedance of the load 300 at the current stage, and the next impedance of the load 300 refers to the impedance of the load 300 at the next stage. The current impedance is not equal to the next impedance, and the next impedance of the load 300 is adjacent to the current impedance of the load 300 and is generated after the current impedance. The different powers of the pulses output by the RF power module 200 will result in different impedances of the load 300. When the load 300 is a reaction chamber that can generate plasma, the impedance of the reaction chamber (that is, the impedance of the load 300) is related to the type of gas input into the reaction chamber, the gas pressure (also understood as the pressure of the reaction chamber) and the gas flow rate. When at least one of the type of gas, the gas pressure and the gas flow rate in the reaction chamber changes, the impedance of the reaction chamber will change. The time when the power of the pulse output by the RF power module 200 changes can be set in advance, and the time when the type, pressure and flow of the gas input into the load 300 change can be set in advance. Therefore, the time when the impedance of the load 300 can change and the impedance after the change can be set in advance. The control module 120 can also store the impedance of the load 300 in different time periods.

[0031] The control module 120 can also determine the impedance of the load 300 and the time when the impedance changes by obtaining the power of the pulse output by the RF power module 200 and the time when the pulse power changes, the gas pressure of the gas input into the load 300 and the time when the gas pressure changes, the flow rate of the gas input into the load 300 and the time when the flow rate changes, and the type of gas input into the load 300 and the time when the type changes.

[0032] The power of each pulse, each gas pressure of the gas, each gas flow rate, and the total capacitance value corresponding to each type of gas can be obtained in advance. When the load 300 is at the current impedance, the control module 120 can determine the next impedance of the load 300 and the total capacitance value corresponding to the next impedance by obtaining the power of the pulse output by the RF power module 200 in the next stage, the type, flow rate, and pressure of the gas input into the load 300 in the next stage, and adjust the capacitance value of the adjustable capacitor unit 131 corresponding to at least one conductive switch unit 141 to obtain the total capacitance value corresponding to the next impedance, so that when the impedance of the load 300 changes from the current impedance to the next impedance, the switch unit 141 corresponding to the adjustable capacitor unit 131 whose capacitance value is adjusted can be disconnected, so that the capacitance value corresponding to the working adjustable capacitor unit 131 in the impedance matcher 100 is the total capacitance value. That is, when the impedance of the load 300 changes to the next impedance, the impedance matcher 100 provided in this embodiment can immediately output the total capacitance value and the matching value corresponding to the impedance matching module 110. It only takes the time for the switch unit 141 to be disconnected to achieve impedance matching between the load 300 and the RF power supply module 200 after the impedance of the load 300 changes, and the matching speed can reach the microsecond level.

[0033] The impedance matcher 100 provided in this embodiment can be applied to both the RF power module 200 that outputs a single-stage pulse and the RF power module 200 that outputs a multi-stage pulse. Exemplarily, when the power of the pulse output by the RF power module 200 changes, the impedance of the load 300 will change. The control module 120 in this embodiment can obtain the power of the next pulse output by the RF power module 200 when the RF power module 200 outputs the current pulse, thereby obtaining the next impedance of the load 300, and according to the capacitance value of the adjustable capacitor unit 131 corresponding to the switch unit 141 that is turned on in the next impedance adjustment part, the total capacitance value is obtained, and when the output pulse of the RF power module 200 switches from the current pulse to the next pulse, the switch unit 141 corresponding to the adjustable capacitor unit 131 whose capacitance value is adjusted is disconnected.

[0034] The present embodiment provides an impedance matcher, which is connected between a radio frequency power supply module and a load. When the load is at the current impedance, the control module in the impedance matcher obtains the total capacitance value according to the capacitance value of the adjustable capacitor unit corresponding to the switch unit that is turned on by the next impedance adjustment part of the load. And when the impedance of the load changes from the current impedance to the next impedance, the sum of the capacitance values ​​of the adjustable capacitor units working in the impedance matcher is controlled to be the total capacitance value, wherein the total capacitance value matches the next impedance, so that when the impedance of the load changes, the impedance matcher is ensured to match the impedance of the radio frequency power supply module with the impedance of the load. When the load is a reaction chamber, the type of gas in the reaction chamber, the flow rate of the gas, the pressure of the gas, and the power of the pulse output by the radio frequency power supply module will cause the impedance of the load to change. The control module in the present embodiment can obtain the value of the impedance in the load and the moment of the impedance change in advance. It can be seen that the impedance matcher provided in the present embodiment can be applied to the radio frequency power supply module that outputs multi-level pulses, and can also ensure that the impedance of the load matches the impedance of the radio frequency power supply module in time when the type of gas in the reaction chamber, the flow rate of the gas, and the pressure of the gas change. The impedance matcher provided in this embodiment can adjust the total capacitance value corresponding to the load with impedance change before the impedance of the load changes, so as to achieve matching by controlling the disconnection of the switch unit while the impedance of the load changes, without having to adjust the capacitance value multiple times according to the changed impedance after the impedance of the load changes. It can be seen that the impedance matcher provided in this embodiment can basically achieve impedance matching between the RF power supply module and the load while the impedance of the load changes, and can quickly achieve impedance matching.

[0035] Optional, Figure 3 is a schematic diagram of a structure of another impedance matching device provided by an embodiment of the present invention when it is electrically connected to a radio frequency power supply module and a load, with reference to Figure 3 The adjustable capacitor module 130 includes two adjustable capacitor units 131 connected in series; the control module 120 is used to control the switch unit 141 corresponding to one adjustable capacitor unit 131 to be disconnected when the load 300 is in the current impedance, and control the switch unit 141 corresponding to another adjustable capacitor unit 131 to be turned on, and adjust the capacitance value of the adjustable capacitor unit 131 corresponding to the turned-on switch unit 141 according to the next impedance of the load 300, so that the capacitance value of the adjusted adjustable capacitor unit 131 matches the next impedance of the load 300, and is also used to control the currently disconnected switch unit 141 to be turned on and control the currently turned-on switch unit 141 to be disconnected when the impedance of the load 300 changes from the current impedance to the next impedance.

[0036] Specifically, the capacitance value of the adjusted adjustable capacitor unit 131 matches the next impedance of the load 300, which means that when the impedance of the load 300 is the next impedance, the capacitance value of the adjusted adjustable capacitor unit 131 and the matching value corresponding to the impedance matching module 110 can make the impedance of the RF power module 200 match the impedance of the load 300.

[0037] In this embodiment, the two switch units 141 are not turned on at the same time, nor are they turned off at the same time. The control module 120 is used to control one switch unit 141 to be turned on and the other switch unit 141 to be turned off when the load 300 is in the current impedance, and adjust the capacitance value of the adjustable capacitor unit 131 corresponding to the turned-on switch unit 141 to the capacitance value corresponding to the next impedance of the load 300 according to the next impedance of the load 300, so as to ensure that when the impedance of the load 300 changes from the current impedance to the next impedance, the impedance of the RF power supply module 200 can be immediately matched with the impedance of the load 300. Exemplarily, the two switch units 141 are recorded as the first switch unit and the second switch unit, and the impedance change sequence of the load 300 includes 100Ω, 200Ω, 300Ω, and 400Ω in sequence. When the impedance of the load 300 is 100Ω, the control module 120 controls the first switch unit to be turned off and the second switch unit to be turned on, and adjusts the capacitance value of the adjustable capacitor unit 131 corresponding to the second switch unit according to 200Ω. When the impedance of the load 300 is switched from 100Ω to 200Ω, the control module 120 controls the first switch unit to be turned on and controls the second switch unit to be turned off. When the impedance of the load 300 is 200Ω, the control module 120 adjusts the capacitance value of the adjustable capacitor unit 131 corresponding to the first switch unit according to 300Ω. When the impedance of the load 300 is switched from 200Ω to 300Ω, the control module 120 controls the second switch unit to be turned on and controls the first switch unit to be turned off. When the impedance of the load 300 is 300Ω, the control module 120 adjusts the capacitance value of the adjustable capacitor unit 131 corresponding to the second switch unit according to 400Ω. When the impedance of the load 300 is switched from 300Ω to 400Ω, the control module 120 controls the first switch unit to be turned on and controls the second switch unit to be turned off.

[0038] The impedance matcher 100 provided in this embodiment is provided with two adjustable capacitor units 131 and two switch units 141. By controlling the two switch units 141 to be alternately turned on, the impedance matching between the RF power supply module 200 and the load 300 can be ensured when the impedance of the load 300 changes, and the number of components in the impedance matcher 100 can be reduced, thereby reducing the cost of the impedance matcher 100.

[0039] Optional, continue to refer to Figure 2 or Figure 3, the multiple adjustable capacitor units 131 connected in series include adjustable capacitor units 131 whose number is equal to the impedance of the load 300; each impedance of the load 300 corresponds to an adjustable capacitor unit 131; the control module 120 is used to adjust the capacitance value of the adjustable capacitor unit 131 corresponding to each impedance of the load 300 before the impedance of the load 300 is formed, so that the capacitance value of each adjustable capacitor unit 131 after adjustment matches the impedance of the load 300 corresponding to it.

[0040] Exemplarily, the RF power module 200 can output multiple pulses, and the power of each pulse is different, and the same power is the same pulse. Each pulse output by the RF power module 200 corresponds to an adjustable capacitor unit 131. Before each pulse is output, the control module 120 adjusts the capacitance value of the adjustable capacitor unit 131 corresponding to the pulse, and disconnects the switch unit 141 corresponding to the adjustable capacitor unit 131 corresponding to the pulse after switching, and turns on all switch units 141 that do not correspond to the pulse.

[0041] The number of adjustable capacitor units 131 in the impedance matcher 100 provided in this embodiment is the same as the number of impedances of the load 300. When the impedance of the load 300 changes, the switch unit 141 corresponding to the impedance of the load 300 is directly disconnected. By adjusting the capacitance value of the adjustable capacitor unit 131 corresponding to each impedance according to each impedance of the load 300, the impedance matching between the RF power module 200 and the load 300 can be achieved immediately after the impedance of the load 300 changes.

[0042] Optional, Figure 4 is a schematic diagram of a structure of another impedance matching device provided by an embodiment of the present invention when it is electrically connected to a radio frequency power supply module and a load, with reference to Figure 4 The impedance matcher 100 provided in this embodiment also includes a detection module 150; the detection module 150 includes an amplitude detection unit 151 and a phase detection unit 152; the amplitude detection unit 151 is used to detect the voltage amplitude and current amplitude output by the RF power module 200; the phase detection unit 152 is used to detect the voltage phase and current phase output by the RF power module 200; the control module 120 is used to adjust the output frequency of the RF power module 200 according to the voltage amplitude, current amplitude, voltage phase and current phase.

[0043] Specifically, the amplitude detection unit 151 and the phase detection unit 152 are both electrically connected to the control module 120, the amplitude detection unit 151 is used to send the detected voltage amplitude and current amplitude to the control module 120, and the phase detection unit 152 is used to send the detected voltage phase and current phase to the control module 120. The control module 120 can monitor the current impedance matching between the RF power module 200 and the load 300 according to the voltage amplitude, current amplitude, voltage phase and current phase, and send a first frequency adjustment signal to the RF power module 200 when the impedance matching between the RF power module 200 and the load 300 does not meet the set requirements. After receiving the first frequency adjustment signal, the RF power module 200 adjusts the output frequency of the RF power module 200, so that the adjusted output frequency of the RF power module 200 can ensure the impedance matching between the RF power module 200 and the load 300 under the current conditions, thereby improving the impedance matching accuracy between the RF power module 200 and the load 300.

[0044] Optional, Figure 5 is a schematic diagram of a structure of another impedance matching device provided by an embodiment of the present invention when it is electrically connected to a radio frequency power supply module and a load, with reference to Figure 5 The impedance matcher 100 provided in this embodiment also includes a directional coupling module 160; the directional coupling module 160 is used to detect the reverse power between the RF power module 200 and the load 300; the control module 120 is used to adjust the output frequency of the RF power module 200 according to the reverse power.

[0045] Specifically, the directional coupling module 160 may be a directional coupler, and the directional coupling module 160 is connected between the RF power module 200 and the load 300. The directional coupling module 160 is also electrically connected to the control module 120, and the directional coupling module 160 can send the reverse power to the control module 120. The control module 120 can determine the current impedance matching between the RF power module 200 and the load 300 according to the reverse power, and send a second frequency adjustment signal to the RF power module 200 when the impedance matching between the RF power module 200 and the load 300 does not meet the set requirements. After receiving the second frequency adjustment signal, the RF power module 200 adjusts the output frequency of the RF power module 200, so that the adjusted output frequency of the RF power module 200 can ensure the impedance matching between the RF power module 200 and the load 300, thereby further improving the impedance matching accuracy between the RF power module and the load.

[0046] Optional, continue to refer to Figure 5 The impedance matcher 100 provided in this embodiment also includes an alarm module 170; the directional coupling module 160 is also used to detect the forward power between the RF power module 200 and the load 300; the control module 120 is also used to control the alarm module 170 to send an alarm signal when the forward power is less than the set power.

[0047] Specifically, the forward power can reflect the actual output power of the RF power module 200. When the control module 120 detects that the forward power is less than the set power, it means that the actual power output by the RF power module 200 does not meet the demand of the load 300. At this time, the control module 120 can control the alarm module 170 to send an alarm signal to prompt the staff to check the situation in time.

[0048] Optional, Figure 6 is a schematic diagram of a structure of another impedance matching device provided by an embodiment of the present invention when it is electrically connected to a radio frequency power supply module and a load, with reference to Figure 6 The impedance matching module 110 includes at least one fixed inductor LT and at least one fixed capacitor CT; the fixed inductor LT and the fixed capacitor CT are connected in series; and the adjustable capacitor unit 131 includes at least one adjustable capacitor CL.

[0049] Specifically, the impedance matching module 110 includes a fixed inductor LT and a fixed capacitor CT connected in series. It can be seen that the impedance matching module 110 provided in this embodiment corresponds to a fixed matching value. In order to ensure the impedance matching between the RF power supply module 200 and the load 300, it is only necessary to adjust the capacitance value of the adjustable capacitor CL corresponding to the disconnected switch unit 141, thereby avoiding adjusting multiple adjustable capacitors CL to increase the adjustment complexity.

[0050] Figure 7 It is a flow chart of an impedance matching method provided according to an embodiment of the present invention. The impedance matching method provided in this embodiment is applied to the impedance matching device provided in any embodiment of the present invention.

[0051] refer to Figure 7 The impedance matching method provided in this embodiment includes the following steps: S110, when the load is at the current impedance, the control module controls at least one switch unit to be disconnected and at least one switch unit to be turned on, and adjusts the capacitance value of the adjustable capacitor unit corresponding to at least one turned-on switch unit according to the next impedance of the load, so that the total capacitance value formed by the adjustable capacitor unit after the capacitance value is adjusted matches the next impedance.

[0052] S120. When the impedance of the load changes from the current impedance to the next impedance, the control module controls the switch unit corresponding to the next impedance to be disconnected, and controls all the switch units except the switch unit corresponding to the next impedance to be turned on, wherein the switch unit corresponding to the next impedance is the switch unit corresponding to the adjustable capacitor unit corresponding to the switch unit adjusted to be turned on by the control module when the load is at the current impedance.

[0053] The impedance matching method provided in the embodiment of the present invention has the same technical effect as the impedance matching device provided in any embodiment of the present invention. For matters not described in detail in the impedance matching method provided in the embodiment of the present invention, please refer to the contents of the impedance matching device provided in any embodiment of the present invention.

[0054] The RF power system provided in this embodiment includes a RF power module and an impedance matcher provided in any embodiment of the present invention. Therefore, the beneficial effects of the RF power system including any impedance matcher described in any embodiment of the present invention are not described in detail here.

[0055] This embodiment also provides a plasma source system, which includes a reaction chamber and a radio frequency power supply system provided by any embodiment of the present invention. Therefore, the radio frequency power supply system includes the beneficial effects of any impedance matcher described in any embodiment of the present invention, which will not be repeated here.

[0056] It should be understood that the various forms of processes shown above can be used to reorder, add or delete steps. For example, the steps described in the present invention can be executed in parallel, sequentially or in different orders, as long as the desired results of the technical solution of the present invention can be achieved, and this document does not limit this.

[0057] The above specific implementations do not constitute a limitation on the protection scope of the present invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. An impedance matching device, characterized in that: include: Impedance matching module, control module, adjustable capacitance module and switch module; The first end of the impedance matching module is electrically connected to the output end of the RF power supply module, and the second end of the impedance matching module is electrically connected to the input end of the load; The first end of the adjustable capacitor module is electrically connected to the first end of the impedance matching module, and the second end of the adjustable capacitor module is grounded; The adjustable capacitor module includes a plurality of adjustable capacitor units connected in series; The switch module includes switch units whose number is equal to that of the adjustable capacitor units; The adjustable capacitor units correspond to the switch units one by one, and the adjustable capacitor units are connected in parallel with the switch units corresponding to them; The control module is used to control at least one of the switch units to be disconnected and at the same time to be turned on when the load is at the current impedance, and to adjust the capacitance value of the adjustable capacitor unit corresponding to at least one of the switched-on switch units according to the next impedance of the load, so that the total capacitance value formed by the adjustable capacitor units after the capacitance value is adjusted matches the next impedance, and is also used to control the switch unit corresponding to the next impedance to be disconnected when the impedance of the load changes from the current impedance to the next impedance, and to control the switch units among all the switch units except the switch unit corresponding to the next impedance to be turned on, wherein the switch unit corresponding to the next impedance is the switch unit corresponding to the adjustable capacitor unit corresponding to the switch unit adjusted to be turned on by the control module when the load is at the current impedance.

2. The impedance matching box according to claim 1, characterized in that: The adjustable capacitor module includes two adjustable capacitor units connected in series; The control module is used to control the switch unit corresponding to one of the adjustable capacitor units to be disconnected when the load is at the current impedance, and to control the switch unit corresponding to another adjustable capacitor unit to be turned on, and to adjust the capacitance value of the adjustable capacitor unit corresponding to the turned-on switch unit according to the next impedance of the load so that the capacitance value of the adjusted adjustable capacitor unit matches the next impedance, and is also used to control the currently disconnected switch unit to be turned on and to control the currently turned-on switch unit to be disconnected when the impedance of the load changes from the current impedance to the next impedance.

3. The impedance matching box according to claim 1, characterized in that: The plurality of adjustable capacitance units connected in series include an adjustable capacitance unit whose number is equal to the impedance of the load; Each impedance of the load corresponds to one of the adjustable capacitance units; The control module is used to adjust the capacitance value of the adjustable capacitance unit corresponding to each impedance of the load before each impedance of the load is formed, so that the capacitance value of each adjustable capacitance unit after adjustment matches the impedance of the corresponding load.

4. The impedance matching box according to claim 1, characterized in that: It also includes a detection module; the detection module includes an amplitude detection unit and a phase detection unit; The amplitude detection unit is used to detect the voltage amplitude and current amplitude output by the RF power module; The phase detection unit is used to detect the voltage phase and current phase output by the RF power module; The control module is used to adjust the output frequency of the radio frequency power module according to the voltage amplitude, the current amplitude, the voltage phase and the current phase.

5. The impedance matching box according to claim 1, characterized in that: Also included is a directional coupling module; The directional coupling module is used to detect the reverse power between the RF power module and the load; The control module is used to adjust the output frequency of the radio frequency power module according to the reverse power.

6. The impedance matching box according to claim 5, characterized in that: Also includes an alarm module; The directional coupling module is also used to detect the forward power between the RF power module and the load; The control module is also used to control the alarm module to send out an alarm signal when the forward power is less than the set power.

7. The impedance matcher according to any one of claims 1 to 6, characterized in that: The impedance matching module includes at least one fixed inductor and at least one fixed capacitor; The fixed inductor and the fixed capacitor are connected in series; The adjustable capacitor unit includes at least one adjustable capacitor.

8. An impedance matching method, characterized in that: The impedance matching method is applied to the impedance matching device according to any one of claims 1 to 7; The impedance matching method comprises: The control module controls at least one of the switch units to be disconnected and at least one of the switch units to be turned on when the load is at the current impedance, and adjusts the capacitance value of the adjustable capacitor unit corresponding to the at least one turned-on switch unit according to the next impedance of the load, so that the total capacitance value formed by the adjustable capacitor unit after the capacitance value is adjusted matches the next impedance; When the impedance of the load changes from the current impedance to the next impedance, the control module controls the switch unit corresponding to the next impedance to be disconnected, and controls all switch units except the switch unit corresponding to the next impedance to be turned on, wherein the switch unit corresponding to the next impedance is the switch unit corresponding to the adjustable capacitor unit corresponding to the switch unit adjusted to be turned on by the control module when the load is at the current impedance.

9. A radio frequency power supply system, characterized in that: It comprises a radio frequency power supply module and the impedance matcher according to any one of claims 1 to 7.

10. A plasma source system, characterized in that: It comprises a reaction chamber and the radio frequency power supply system as claimed in claim 9.

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