Flexible perovskite solar cell manufacturing system

Through the all-wet process and mechanical press-in packaging method, the complexity of the vacuum environment in the preparation of flexible perovskite solar cells is solved, and the effect of simplifying the system structure and reducing costs is achieved, while maintaining battery performance.

CN120112147APending Publication Date: 2025-06-06HUANENG CLEAN ENERGY RES INST +1
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Patent Information

Application Number
CN202311658961.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2023-12-05
Publication Date
2025-06-06

AI Technical Summary

Technical Problem

The prior art requires a vacuum environment when preparing flexible perovskite solar cells, resulting in complex equipment and high cost.

Method used

A full wet process is used to form part of the functional film layer of the flexible perovskite solar cell on the substrate in turn. The cover plate and the metal conductive grid are pressed in the sixth winding chamber, and then mechanically compressed and packaged with the structure with other functional film layers to form a flexible perovskite solar cell.

Benefits of technology

Avoid a vacuum environment, simplify the system structure, reduce production costs, and maintain the performance of flexible perovskite solar cells.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention provides a flexible perovskite solar cell manufacturing system which comprises a first winding chamber, a second winding chamber, a third winding chamber, a fourth winding chamber, a fifth winding chamber, a sixth winding chamber, a winding belt and a plurality of conveying rollers. According to the flexible perovskite solar cell manufacturing system, partial functional film layers, a cover plate and a metal conductive grid of the flexible perovskite solar cell are sequentially formed on a substrate in a plurality of winding chambers by adopting an all-wet process; pressing treatment is firstly performed in a sixth winding chamber; the flexible perovskite solar cell is then mechanically laminated and packaged with a structure with other functional film layers in the fifth winding chamber, and the flexible perovskite solar cell manufacturing system avoids a vacuum environment and is simple in structure.
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Description

Technical Field

[0001] The present invention relates to the technical field of flexible perovskite cells, and more specifically, to a flexible perovskite solar cell manufacturing system. Background Art

[0002] Perovskite is a synthetic material. After being first applied to photovoltaic power generation in 2009, due to its excellent performance, low cost and huge commercial value, the research on metal halide hybrid perovskite solar cells has swept the world in recent years. Perovskite solar cells are solar cells that use perovskite-type organic metal halide semiconductors as light-absorbing materials. They belong to the third generation of solar cells, also known as new concept solar cells. At present, the highest cell efficiency certified by authoritative organizations has exceeded 25%, which exceeds the efficiency of traditional thin-film solar cells and is equivalent to the efficiency of the most commercialized crystalline silicon solar cells.

[0003] At present, most manufacturers use the vacuum winding coating process to prepare flexible perovskite solar cells. However, the vacuum environment is often required to be high during the vacuum coating process. Therefore, how to provide a simple-structured flexible perovskite solar cell manufacturing system is a technical problem that technical personnel in this field urgently need to solve. Summary of the invention

[0004] In view of this, in order to solve the above problems, the present invention provides a flexible perovskite solar cell manufacturing system, and the technical solution is as follows:

[0005] A flexible perovskite solar cell manufacturing system, the flexible perovskite solar cell manufacturing system comprising: first to sixth winding chambers, a winding belt and a plurality of conveying rollers, wherein the winding belt is built on the plurality of conveying rollers to form a transportation path;

[0006] Wherein, the substrate is placed on a winding belt in the first winding chamber, and the first winding chamber is used to pre-treat the substrate;

[0007] The substrate processed in the first winding chamber is transported to the second winding chamber, and the second winding chamber is used to coat a first charge transport layer on one side of the substrate;

[0008] The structure processed by the second winding chamber is transported to the third winding chamber, and the third winding chamber is used to sequentially coat a first passivation layer, a perovskite light absorption layer, and a second passivation layer on a side of the first charge transport layer away from the substrate;

[0009] The structure processed by the third winding chamber is transported to the fourth winding chamber, and the fourth winding chamber is used to coat a second charge transport layer on the side of the second passivation layer away from the substrate to form a first intermediate structure;

[0010] In the sixth winding chamber, the cover plate and the metal conductive grid are pressed together to form a second intermediate structure;

[0011] The first intermediate structure and the second intermediate structure are transported to the fifth winding chamber, and the fifth winding chamber is used to press the first intermediate structure and the second intermediate structure to form a flexible perovskite solar cell, wherein the second charge transfer layer is arranged adjacent to the metal conductive grid.

[0012] Preferably, in the above-mentioned flexible perovskite solar cell manufacturing system, the second winding chamber comprises: a first coating unit and a first annealing unit;

[0013] The first coating unit is used for coating one side of the substrate to form the first charge transport layer;

[0014] The first annealing unit is used to perform annealing treatment on the first charge transport layer.

[0015] Preferably, in the above-mentioned flexible perovskite solar cell manufacturing system, the third winding chamber comprises: a second coating unit, a first drying unit and a second annealing unit;

[0016] The second coating unit is used for coating a first passivation layer on a side of the first charge transport layer away from the substrate;

[0017] The first drying unit is used to dry the first passivation layer;

[0018] The second annealing unit is used to perform annealing on the first passivation layer.

[0019] Preferably, in the above-mentioned flexible perovskite solar cell manufacturing system, the third winding chamber further comprises: a third coating unit, a second drying unit and a third annealing unit;

[0020] The third coating unit is used for coating a perovskite light absorbing layer on a side of the first passivation layer away from the substrate;

[0021] The second drying unit is used to dry the perovskite light absorbing layer;

[0022] The third annealing unit is used to perform annealing treatment on the perovskite light absorbing layer.

[0023] Preferably, in the above-mentioned flexible perovskite solar cell manufacturing system, the third winding chamber further comprises: a fourth coating unit, a third drying unit and a fourth annealing unit;

[0024] The fourth coating unit is used for coating a second passivation layer on a side of the perovskite light absorbing layer away from the substrate;

[0025] The third drying unit is used to dry the second passivation layer;

[0026] The fourth annealing unit is used to perform annealing on the second passivation layer.

[0027] Preferably, in the above-mentioned flexible perovskite solar cell manufacturing system, the fourth winding chamber comprises: a fifth coating unit and a fifth annealing unit;

[0028] The fifth coating unit is used for coating a second charge transport layer on a side of the second passivation layer away from the substrate;

[0029] The fifth annealing unit is used to perform annealing treatment on the second charge transport layer.

[0030] Preferably, in the above-mentioned flexible perovskite solar cell manufacturing system, the coating parameters include at least a coating speed;

[0031] The coating speed ranges from 3 mm / s to 100 mm / s.

[0032] Preferably, in the above-mentioned flexible perovskite solar cell manufacturing system, the annealing process parameters include at least the annealing temperature;

[0033] The annealing temperature ranges from 20°C to 300°C.

[0034] Preferably, in the above-mentioned flexible perovskite solar cell manufacturing system, the drying process parameters include at least drying gas and gas pressure;

[0035] The drying gas is one of nitrogen and argon or a mixture of the two;

[0036] The gas pressure ranges from 0.1 MPa to 3 MPa.

[0037] Preferably, in the above-mentioned flexible perovskite solar cell manufacturing system, the pressing processing parameters for pressing the first intermediate structure and the second intermediate structure include at least pressing pressure and pressing temperature;

[0038] Wherein, the value range of the pressing pressure is 1MPa-3MPa;

[0039] The pressing temperature ranges from 20°C to 300°C.

[0040] Compared with the prior art, the present invention has the following beneficial effects:

[0041] A flexible perovskite solar cell manufacturing system provided by the present invention comprises: first to sixth winding chambers, a winding belt and a plurality of conveying rollers, wherein the winding belt is built on the plurality of conveying rollers to form a transportation path; wherein a substrate is placed on the winding belt in the first winding chamber, and the first winding chamber is used to pre-treat the substrate; the substrate treated in the first winding chamber is transported to the second winding chamber, and the second winding chamber is used to coat a first charge transport layer on one side of the substrate; the structure treated in the second winding chamber is transported to the third winding chamber, and the third winding chamber is used to sequentially coat a first passivation layer on the side of the first charge transport layer away from the substrate. layer, a perovskite light-absorbing layer and a second passivation layer; the structure processed by the third winding chamber is transported to the fourth winding chamber, and the fourth winding chamber is used to apply a second charge transfer layer on the side of the second passivation layer away from the substrate to form a first intermediate structure; in the sixth winding chamber, the cover plate and the metal conductive grid are pressed together to form a second intermediate structure; the first intermediate structure and the second intermediate structure are transported to the fifth winding chamber, and the fifth winding chamber is used to press the first intermediate structure and the second intermediate structure to form a flexible perovskite solar cell, wherein the second charge transfer layer is arranged adjacent to the metal conductive grid. The flexible perovskite solar cell manufacturing system uses a full wet process to sequentially form some functional film layers of the flexible perovskite solar cell on the substrate. The cover plate and the metal conductive grid are first pressed together in the sixth winding chamber, and then mechanically pressed and packaged with the structure having other functional film layers in the fifth winding chamber to form a flexible perovskite solar cell. This flexible perovskite solar cell manufacturing system avoids the vacuum environment and has a simple system structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0043] Figure 1 A schematic diagram of the principle structure of a flexible perovskite solar cell manufacturing system provided in an embodiment of the present invention;

[0044] Figure 2 A schematic structural diagram of a flexible perovskite solar cell provided in an embodiment of the present invention;

[0045] Figure 3 A schematic diagram of the principle structure of a coating unit provided in an embodiment of the present invention;

[0046] Figure 4A schematic diagram of the principle structure of a drying unit provided in an embodiment of the present invention;

[0047] Figure 5 A schematic diagram of the principle structure of an annealing unit provided in an embodiment of the present invention;

[0048] Figure 6 A schematic diagram of the principle structure of a pressing unit provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0049] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0050] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0051] refer to Figure 1 , Figure 1 A schematic diagram of the principle structure of a flexible perovskite solar cell manufacturing system provided in an embodiment of the present invention, referring to Figure 2 , Figure 2 A schematic diagram of the structure of a flexible perovskite solar cell provided in an embodiment of the present invention, a flexible perovskite solar cell manufacturing system provided in an embodiment of the present invention comprises: first to sixth winding chambers (11-16), a winding belt 17 and a plurality of conveying rollers 18, wherein the winding belt 17 is built on the plurality of conveying rollers 18 to form a transport path; Figure 1 The flexible perovskite solar cell manufacturing system shown can also include a first retracting roller 111 located in the first winding chamber 11 and a second retracting roller 151 located in the fifth winding chamber 15. The movement of the winding belt 17 can be achieved by the first retracting roller 111 and the second retracting roller 151, thereby realizing the transportation of the structure on the winding belt 17 between the various winding chambers.

[0052] The substrate 21 is placed on the winding belt 17 in the first winding chamber 11 , and the first winding chamber 11 is used to pre-treat the substrate 21 .

[0053] Optionally, the first winding chamber 11 is mainly used to perform cleaning, drying, plasma treatment and other pretreatments on the substrate 21 before preparing the functional film layer, which is not limited in the embodiment of the present invention. The substrate 21 can be a PET substrate coated with a TCO layer or a PEN substrate coated with a TCO layer, etc.

[0054] refer to Figure 3 , Figure 3 A schematic diagram of the principle structure of a coating unit provided in an embodiment of the present invention, wherein the coating unit comprises a slit coating die head and a gasket; Figure 4 , Figure 4 A schematic diagram of the principle structure of a drying unit provided in an embodiment of the present invention, wherein the drying unit comprises an air knife; Figure 5 , Figure 5 A schematic diagram of the principle structure of an annealing unit provided in an embodiment of the present invention, wherein the annealing unit includes a heating tube; Figure 6 , Figure 6 A schematic diagram of the principle structure of a laminating unit provided in an embodiment of the present invention, wherein the laminating unit comprises two laminating rollers located on both sides of a winding belt.

[0055] Furthermore, the substrate 21 processed by the first winding chamber 11 is transported to the second winding chamber 12 , and the second winding chamber 12 is used to coat a first charge transport layer 22 on one side of the substrate 21 .

[0056] Optional, such as Figure 1 As shown, the second winding chamber 12 includes: a first coating unit 121 and a first annealing unit 122 .

[0057] The first coating unit 121 is used to coat one side of the substrate 21 to form the first charge transport layer 22; wherein the coating parameters at least include a coating speed; and the coating speed has a value range of 3 mm / s-100 mm / s.

[0058] The first annealing unit 122 is used to perform annealing treatment on the first charge transport layer 22; wherein the annealing treatment parameters at least include annealing temperature; and the annealing temperature has a value range of 20° C.-300° C.

[0059] Furthermore, the structure processed by the second winding chamber 12 is transported to the third winding chamber 13, and the third winding chamber 13 is used to sequentially coat the first passivation layer 23, the perovskite light absorption layer 24 and the second passivation layer 25 on the side of the first charge transport layer 22 away from the substrate.

[0060] Optional, such as Figure 1 As shown, the third winding chamber 13 includes: a second coating unit 131 , a first drying unit 132 and a second annealing unit 133 .

[0061] The second coating unit 131 is used to coat the first passivation layer 23 on the side of the first charge transport layer 22 away from the substrate 21; wherein the coating parameters at least include a coating speed; the coating speed has a value range of 3 mm / s-100 mm / s. The first passivation layer 23 is a passivation layer at the interface between the first charge transport layer 22 and the perovskite light absorbing layer 24.

[0062] The first drying unit 132 is used to dry the first passivation layer 23; the drying process is air knife drying, and the drying process parameters include at least drying gas and gas pressure; the drying gas is one of nitrogen and argon or a mixture of the two; the gas pressure ranges from 0.1MPa to 3MPa.

[0063] The second annealing unit 133 is used to perform annealing treatment on the first passivation layer 23 ; wherein the annealing treatment parameters at least include annealing temperature; and the annealing temperature has a value range of 20° C.-300° C.

[0064] Optional, such as Figure 1 As shown, the third winding chamber 13 further includes: a third coating unit 134 , a second drying unit 135 and a third annealing unit 136 .

[0065] The third coating unit 134 is used to coat the side of the first passivation layer 23 away from the substrate 21 to form a perovskite light absorbing layer 24; wherein the coating parameters at least include a coating speed; the coating speed has a value range of 3 mm / s-100 mm / s.

[0066] The second drying unit 135 is used to dry the perovskite light absorbing layer 24; the drying process is air knife drying, and the drying process parameters include at least drying gas and gas pressure; the drying gas is one of nitrogen and argon or a mixture of the two; the gas pressure ranges from 0.1MPa to 3MPa.

[0067] The third annealing unit 136 is used to perform annealing treatment on the perovskite light absorbing layer 24; wherein the annealing treatment parameters at least include the annealing temperature; and the annealing temperature has a value range of 20° C.-300° C.

[0068] Optional, such as Figure 1 As shown, the third winding chamber 13 further includes: a fourth coating unit 137 , a third drying unit 138 and a fourth annealing unit 139 .

[0069] The fourth coating unit 137 is used to form a second passivation layer 25 on the side of the perovskite light absorption layer 24 away from the substrate 21; wherein the coating parameters at least include a coating speed; the coating speed ranges from 3 mm / s to 100 mm / s. The second passivation layer 25 is a passivation layer at the interface between the perovskite light absorption layer 24 and the second charge transport layer 26.

[0070] The third drying unit 138 is used to dry the second passivation layer 25; the drying process is air knife drying, and the drying process parameters include at least drying gas and gas pressure; the drying gas is one of nitrogen and argon or a mixture of the two; the gas pressure ranges from 0.1MPa to 3MPa.

[0071] The fourth annealing unit 139 is used to perform annealing treatment on the second passivation layer 25 ; wherein the annealing treatment parameters at least include annealing temperature; and the annealing temperature has a value range of 20° C.-300° C.

[0072] Furthermore, the structure processed in the third winding chamber 13 is transported to the fourth winding chamber 14, and the fourth winding chamber 14 is used to coat the second charge transport layer 26 on the side of the second passivation layer 25 away from the substrate 21 to form a first intermediate structure.

[0073] Optional, such as Figure 1 As shown, the fourth winding chamber 14 includes: a fifth coating unit 141 and a fifth annealing unit 142 .

[0074] The fifth coating unit 141 is used to form a second charge transport layer 26 by coating on the side of the second passivation layer 25 away from the substrate 21; wherein the coating parameters at least include a coating speed; and the coating speed has a value range of 3 mm / s-100 mm / s.

[0075] The fifth annealing unit 142 is used to perform annealing treatment on the second charge transport layer 26 ; wherein the annealing treatment parameters at least include annealing temperature; and the annealing temperature has a value range of 20° C.-300° C.

[0076] Furthermore, in the sixth winding chamber 16, the cover plate 27 and the metal conductive grid 28 are pressed together to form a second intermediate structure.

[0077] Optional, such as Figure 1 As shown, the sixth winding chamber 16 includes a first pressing unit 161, which is used to press the cover plate 27 and the metal conductive grid 28 to form a transparent top electrode, while ensuring the bendability and light transmittance of the flexible perovskite solar cell, with a visible light transmittance greater than 80%.

[0078] Optional, such as Figure 1 As shown, the sixth winding chamber 16 also includes a third retracting and unreeling roller 162 and a fourth retracting and unreeling roller 163, wherein one of the third retracting and unreeling roller 162 and the fourth retracting and unreeling roller 163 is used to drive the winding belt 17 to transport the cover plate 27, and the other is used to drive the winding belt 17 to transport the metal conductive grid 28 to the first laminating unit 161 for laminating processing.

[0079] Furthermore, the first intermediate structure and the second intermediate structure are transported to the fifth winding chamber 15, and the fifth winding chamber 15 is used to press the first intermediate structure and the second intermediate structure to form a flexible perovskite solar cell, wherein the second charge transfer layer 26 is arranged adjacent to the metal conductive grid 28.

[0080] Optional, such as Figure 1 As shown, the fifth winding chamber 15 includes a second pressing unit 152, which is used to mechanically press and package the transparent top electrode and the substrate having a functional film layer to form a flexible perovskite solar cell, wherein the pressing processing parameters for pressing the first intermediate structure and the second intermediate structure include at least pressing pressure and pressing temperature; wherein the pressing pressure has a value range of 1MPa-3MPa; and the pressing temperature has a value range of 20℃-300℃.

[0081] From the above description, it can be seen that the flexible perovskite solar cell manufacturing system provided in the embodiment of the present invention adopts a full wet process to sequentially form partial functional film layers of the flexible perovskite solar cell on the substrate 21, and the cover plate 27 and the metal conductive grid 28 are first pressed in the sixth winding chamber 16, and then mechanically pressed and packaged with a structure having other functional film layers in the fifth winding chamber 15 to form a flexible perovskite solar cell. This flexible perovskite solar cell manufacturing system avoids the vacuum environment and has a simple system structure.

[0082] The above is a detailed introduction to a flexible perovskite solar cell manufacturing system provided by the present invention. Specific examples are used in this article to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea; at the same time, for those skilled in the art, according to the idea of ​​the present invention, there will be changes in the specific implementation methods and application scopes. In summary, the content of this specification should not be understood as a limitation on the present invention.

[0083] It should be noted that each embodiment in this specification is described in a progressive manner, and each embodiment focuses on the differences from other embodiments, and the same or similar parts between the embodiments can be referred to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant parts can be referred to the method part description.

[0084] It should also be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that the process, method, article or device that includes a series of elements is inherent to the elements, or also includes elements inherent to these processes, methods, articles or devices. In the absence of further restrictions, the elements defined by the sentence "including a..." do not exclude the presence of other identical elements in the process, method, article or device that includes the elements.

[0085] The above description of the disclosed embodiments enables one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A flexible perovskite solar cell manufacturing system, It is characterized in that The flexible perovskite solar cell manufacturing system comprises: first to sixth winding chambers, a winding belt and a plurality of conveying rollers, wherein the winding belt is built on the plurality of conveying rollers to form a transport path; Wherein, the substrate is placed on a winding belt in the first winding chamber, and the first winding chamber is used to pre-treat the substrate; The substrate processed in the first winding chamber is transported to the second winding chamber, and the second winding chamber is used to coat a first charge transport layer on one side of the substrate; The structure processed by the second winding chamber is transported to the third winding chamber, and the third winding chamber is used to sequentially coat a first passivation layer, a perovskite light absorption layer, and a second passivation layer on a side of the first charge transport layer away from the substrate; The structure processed by the third winding chamber is transported to the fourth winding chamber, and the fourth winding chamber is used to coat a second charge transport layer on the side of the second passivation layer away from the substrate to form a first intermediate structure; In the sixth winding chamber, the cover plate and the metal conductive grid are pressed together to form a second intermediate structure; The first intermediate structure and the second intermediate structure are transported to the fifth winding chamber, and the fifth winding chamber is used to press the first intermediate structure and the second intermediate structure to form a flexible perovskite solar cell, wherein the second charge transfer layer is arranged adjacent to the metal conductive grid.

2. The flexible perovskite solar cell manufacturing system according to claim 1, It is characterized in that The second winding chamber includes: a first coating unit and a first annealing unit; The first coating unit is used for coating one side of the substrate to form the first charge transport layer; The first annealing unit is used to perform annealing treatment on the first charge transport layer.

3. The flexible perovskite solar cell manufacturing system according to claim 1, It is characterized in that The third winding chamber comprises: a second coating unit, a first drying unit and a second annealing unit; The second coating unit is used for coating a first passivation layer on a side of the first charge transport layer away from the substrate; The first drying unit is used to dry the first passivation layer; The second annealing unit is used to perform annealing on the first passivation layer.

4. The flexible perovskite solar cell manufacturing system according to claim 3, It is characterized in that The third winding chamber further comprises: a third coating unit, a second drying unit and a third annealing unit; The third coating unit is used for coating a perovskite light absorbing layer on a side of the first passivation layer away from the substrate; The second drying unit is used to dry the perovskite light absorbing layer; The third annealing unit is used to perform annealing treatment on the perovskite light absorbing layer.

5. The flexible perovskite solar cell manufacturing system according to claim 4, It is characterized in that The third winding chamber further comprises: a fourth coating unit, a third drying unit and a fourth annealing unit; The fourth coating unit is used for coating a second passivation layer on a side of the perovskite light absorbing layer away from the substrate; The third drying unit is used to dry the second passivation layer; The fourth annealing unit is used to perform annealing on the second passivation layer.

6. The flexible perovskite solar cell manufacturing system according to claim 1, It is characterized in that The fourth winding chamber includes: a fifth coating unit and a fifth annealing unit; The fifth coating unit is used for coating a second charge transport layer on a side of the second passivation layer away from the substrate; The fifth annealing unit is used to perform annealing treatment on the second charge transport layer.

7. The flexible perovskite solar cell manufacturing system according to any one of claims 2 to 6, It is characterized in that The coating parameters include at least the coating speed; The coating speed ranges from 3 mm / s to 100 mm / s.

8. The flexible perovskite solar cell manufacturing system according to any one of claims 2 to 6, It is characterized in that The annealing treatment parameters include at least the annealing temperature; The annealing temperature ranges from 20°C to 300°C.

9. The flexible perovskite solar cell manufacturing system according to any one of claims 3 to 5, It is characterized in that The drying process parameters include at least drying gas and gas pressure; The drying gas is one of nitrogen and argon or a mixture of the two; The gas pressure has a value range of 0.1 MPa-3 MPa.

10. The flexible perovskite solar cell manufacturing system according to claim 1, It is characterized in that The lamination processing parameters for laminating the first intermediate structure and the second intermediate structure include at least a lamination pressure and a lamination temperature; Wherein, the value range of the pressing pressure is 1MPa-3MPa; The pressing temperature ranges from 20°C to 300°C.

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