Water-cooling screen structure capable of improving crystal pulling rate

Abstract

The application provides a water-cooled screen structure capable of improving the crystal pulling rate, which comprises an inner conical barrel, an outer conical barrel, an upper bottom plate and a lower bottom plate; an annular chamber is formed between the inner conical barrel and the outer conical barrel; the upper bottom plate and the lower bottom plate are annular structures and are fixedly connected to the upper end and the lower end of the inner conical barrel and the outer conical barrel respectively, so that the annular chamber forms a closed cavity; a plurality of arc-shaped grooves and heat absorption plates are uniformly arranged on the surface of the inner conical barrel; a ring-shaped heat dissipation plate is uniformly arranged on the surface of the inner conical barrel on one side of the annular chamber; a water inlet pipe and a water outlet pipe are connected to the upper bottom plate; the water outlet pipe is communicated with the top of the annular chamber; the arc-shaped grooves and the heat absorption plates arranged on the surface of the inner conical barrel increase the heat absorption area of the surface of the inner conical barrel, thereby improving the heat absorption efficiency; meanwhile, the heat dissipation plate arranged in the annular chamber increases the contact area between the heat dissipation surface and the cooling water, thereby improving the heat dissipation efficiency; the heat exchange performance of the water-cooled screen is improved, and the crystal growth rate is improved.

Description

Technical Field

[0001] This invention relates to the field of single crystal production equipment technology, specifically to a water-cooled screen structure that can improve crystal pulling rate. Background Technology

[0002] Water-cooled screens are a common speed-up device in the single-crystal silicon rod manufacturing process in single-crystal furnaces. Conventional water-cooled screens have smooth inner and outer surfaces, which limits their ability to increase the pulling speed of single-crystal silicon rods of different sizes. This is mainly due to the limited surface area of ​​the inner and outer surfaces of the water-cooled screen and the water flow rate. The size of the outer surface area of ​​the water-cooled screen represents its heat absorption capacity, while the inner surface is in contact with the cooling water, and the contact area with the cooling water determines the heat dissipation capacity. Therefore, the heat exchange performance of existing water-cooled screens is limited, making it difficult to improve their heat exchange performance and thus hindering the improvement of crystal pulling efficiency. Summary of the Invention

[0003] In order to overcome the problems existing in the background art, the present invention provides a water-cooled screen structure that can improve the crystal pulling rate, so as to solve the technical problem proposed in the background art that the inner and outer surface areas of the current water-cooled screen are limited, its heat exchange performance is limited, and it is difficult to improve its heat exchange performance, thus making it difficult to improve the crystal pulling efficiency.

[0004] To achieve the above objectives, the invention is implemented through the following technical solution:

[0005] A water-cooled screen structure for improving crystal pulling rate includes an inner conical barrel 1, an outer conical barrel 2, an upper base plate 3, and a lower base plate 4. An annular chamber 5 is formed between the inner conical barrel 1 and the outer conical barrel 2. The upper base plate 3 and the lower base plate 4 are annular structures, respectively fixedly connected to the upper and lower ends of the inner conical barrel 1 and the outer conical barrel 2, so that the annular chamber 5 forms a closed cavity. A plurality of arc-shaped grooves 11 and heat-absorbing plates 12 are uniformly arranged on the surface of the inner conical barrel 1. An annular heat dissipation plate 13 is uniformly arranged on the surface of the inner conical barrel 1 located on one side of the annular chamber 5. A water inlet pipe 6 and a water outlet pipe 7 are connected to the upper base plate 3. The water outlet pipe 7 is connected to the top of the annular chamber 5, and the water inlet pipe 6 is connected to the bottom of the annular chamber 5 through a connecting pipe 61.

[0006] Preferably, the annular chamber 5 is uniformly provided with annular guide plates 51 distributed vertically, and the annular guide plates 51 form multiple independent circulation channels 52; the heat dissipation plate 13 is uniformly distributed in each circulation channel 52; the annular guide plates 51 are provided with through holes 53 that connect two adjacent circulation channels 52; the circulation channels 52 are provided with inclined baffles 54 to facilitate the flow of cooling water in one direction, the inclined baffles 54 are provided between the upper and lower through holes 53, the upper and lower through holes 53 are respectively provided on both sides of the inclined baffles 54, the water inlet pipe 6 is connected to the lowermost circulation channel 52, and the water outlet pipe 7 is connected to the uppermost circulation channel 52.

[0007] Preferably, an arc-shaped elastic metal plate 8 for adjusting the water flow speed is installed in the circulation passage 52. The two ends of the elastic metal plate 8 are fixedly connected to guide shafts 81. The two ends of the guide shafts 81 are respectively slidably engaged in the sliding grooves 82 opened at the top and bottom of the circulation passage 52. The sliding grooves 82 are set along the outer inner wall edge of the circulation passage 52, so that the guide shafts 81 are close to the inner wall of the outer cone barrel 2. Bolts 9 for pushing the elastic metal plate 8 to move are threaded on the wall of the outer cone barrel 2.

[0008] Preferably, two elastic metal sheets 8 are provided in a circulation path 52, and the length of the elastic metal sheet 8 is 135-165 degrees from the center of the circulation path 52.

[0009] Preferably, the end of the bolt 9 is rotatably connected to the elastic metal sheet 8, the bolt 9 passes through the connecting hole provided on the elastic metal sheet 8, and the bolt 9 is provided with two limiting pieces 91 located on both sides of the elastic metal sheet 8 respectively; rotating the bolt 9 causes the limiting pieces 91 on both sides to push or pull the elastic metal sheet 8 to move.

[0010] Preferably, a triangular stop 10 is fixedly connected to the inner wall of the outer cone barrel 2 between the guide shaft 81 at both ends of the elastic metal sheet 8 installed in the circulation passage 52 of the conical part and the inner wall of the outer cone barrel 2. The guide shaft 81 moves along the vertical arc surface of the triangular stop 10, and a relatively closed space is formed between the triangular stop 10, the elastic metal sheet 8, and the inner wall of the outer cone barrel 2.

[0011] A method for adjusting the water flow velocity in the circulation path 52 of the aforementioned water-cooled screen involves rotating the bolt 9 to move the elastic metal sheet 8. The guide shafts 81 at both ends of the elastic metal sheet 8 move along the slide groove 82, keeping the guide shafts 81 close to the inner wall of the outer cone 2. The middle part of the elastic metal sheet 8 is away from the inner wall of the outer cone 2 and close to the inner wall of the inner cone 1, creating a relatively sealed space between the elastic metal sheet 8 and the inner wall of the outer cone 2. During the movement of the elastic metal sheet 8, cooling water flows along the gap between the elastic metal sheet 8 and the annular guide plate 51. Because the elastic metal sheet 8 is close to the inner wall of the inner cone 1, the cross-sectional area of ​​the circulation path 52 is reduced. Based on the pipe diameter velocity formula...

[0012] Q=vA

[0013] Q-Traffic

[0014] v-flow velocity

[0015] A - Cross-sectional area

[0016] It can be seen that, for a given flow rate, the smaller the cross-sectional area, the greater the flow velocity. The movement of the elastic metal sheet 8 reduces the cross-sectional area of ​​the water flow in the circulation channel 52, thereby increasing the flow velocity and improving heat dissipation performance.

[0017] The beneficial effects of this invention are as follows: By using the arc-shaped groove and heat-absorbing plate on the surface of the inner conical barrel, the heat absorption area of ​​the inner conical barrel surface is increased, thereby improving the heat absorption efficiency. At the same time, the heat dissipation plate in the annular chamber increases the contact area between the heat dissipation surface and the cooling water, thereby improving the heat dissipation efficiency. This increases the heat exchange performance of the water-cooled screen, thereby increasing the crystal growth rate. It can significantly increase the yield of crystal rods per unit time and effectively reduce enterprise costs.

[0018] Furthermore, by using elastic metal sheets set in the circulation path to change the size of the cross-sectional area of ​​the water flow in different circulation paths, the water flow velocity in each circulation path can be changed, thereby controlling the heat exchange performance at different positions of the water-cooled screen. The heat exchange performance at different heights of the crystal rod can be adjusted according to the crystal pulling situation, thereby improving the quality of crystal rod pulling. Attached Figure Description

[0019] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0020] Figure 2 This is a cross-sectional structural diagram of the present invention.

[0021] Figure 3 This is a cross-sectional three-dimensional structural diagram of the annular chamber.

[0022] Figure 4 This is a three-dimensional cross-sectional diagram of the interconnected circulation pathways.

[0023] Figure 5 This is a schematic diagram of the installation structure of the elastic metal sheet.

[0024] Figure 6 This is a schematic diagram of the end connection structure of the elastic metal sheet.

[0025] Figure 7 This is a schematic diagram of the connection structure between the bolt and the elastic metal sheet. Detailed Implementation

[0026] To make the objectives, technical solutions, and beneficial effects of the present invention clearer, the preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings, so as to facilitate the understanding of those skilled in the art.

[0027] like Figure 1-7As shown, the present invention provides a water-cooled screen structure that can improve the crystal pulling rate, including an inner conical barrel 1, an outer conical barrel 2, an upper base plate 3, and a lower base plate 4; an annular cavity 5 is formed between the inner conical barrel 1 and the outer conical barrel 2, and the upper base plate 3 and the lower base plate 4 are annular structures, respectively fixedly connected to the upper and lower ends of the inner conical barrel 1 and the outer conical barrel 2, so that the annular cavity 5 forms a closed cavity; a plurality of arc-shaped grooves 11 and heat-absorbing plates 12 are uniformly arranged on the surface of the inner conical barrel 1; an annular heat dissipation plate 13 is uniformly arranged on the surface of the inner conical barrel 1 located on one side of the annular cavity 5; a water inlet pipe 6 and a water outlet pipe 7 are connected to the upper base plate 3, the water outlet pipe 7 is connected to the top of the annular cavity 5, and the water inlet pipe 6 is connected to the bottom of the annular cavity 5 through a connecting pipe 61. When the water-cooled screen structure cools the crystal rod, cooling water enters from the inlet pipe 6, enters the bottom of the annular chamber 5, and then flows upward along the annular chamber 5 and out through the outlet pipe 7. The surface of the inner conical barrel 1 absorbs the heat from the crystal rod. The arc-shaped groove 11 and heat-absorbing plate 12 on the surface of the inner conical barrel 1 increase the heat absorption area of ​​the inner conical barrel 1, thereby improving the heat absorption efficiency. The heat is transferred to the inner wall of the annular chamber 5. The heat dissipation plate 13 in the annular chamber 5 increases the contact area between the heat dissipation surface and the cooling water, thereby improving the heat dissipation efficiency. The heat is carried away with the cooling water, thereby increasing the heat exchange performance of the water-cooled screen, and thus increasing the crystal growth rate. It can significantly increase the yield of crystal rods per unit time and effectively reduce enterprise costs.

[0028] like Figure 1-3 As shown, the annular chamber 5 is uniformly arranged with annular guide plates 51 distributed vertically, forming multiple independent circulation channels 52 between the annular guide plates 51; the heat dissipation plate 13 is uniformly distributed in each circulation channel 52; the annular guide plate 51 is provided with through holes 53 that connect two adjacent circulation channels 52; the circulation channel 52 is provided with inclined baffles 54 to facilitate the flow of cooling water in one direction, the inclined baffles 54 are provided between the upper and lower through holes 53, the upper and lower through holes 53 are respectively provided on both sides of the inclined baffles 54, the water inlet pipe 6 is connected to the lowermost circulation channel 52, and the water outlet pipe 7 is connected to the uppermost circulation channel 52. Cooling water enters the lowest circulation channel 52, flows through the circulation channel 52 once, is blocked by the inclined baffle 54, and flows upward along the inclined baffle 54 through the through hole 53 into the circulation channel 52 of the next layer. After flowing through the circulation channel 52 of this layer once, it also flows upward along the inclined baffle 54 through the through hole 53 into the circulation channel 52 of the next layer. This allows the cooling water to flow upward in sequence, realizing the circulation of cooling water in the annular chamber 5. This allows the cooling water to circulate through every part of the water-cooled screen, making the cooling effect of the water-cooled screen on the crystal rod uniform and balanced, and improving the quality and efficiency of crystal rod stretching.

[0029] like Figure 5-7As shown, an arc-shaped elastic metal plate 8 for adjusting the water flow speed is installed in the circulation passage 52. (Only one elastic metal plate 8 is shown in the figure; the installation of elastic metal plates 8 in other circulation passages 52 is the same.) The two ends of the elastic metal plate 8 are fixedly connected to guide shafts 81. The two ends of the guide shafts 81 are respectively slidably engaged in the sliding grooves 82 opened at the top and bottom of the circulation passage 52. The sliding grooves 82 are set along the outer inner wall edge of the circulation passage 52, so that the guide shafts 81 are close to the inner wall of the outer cone barrel 2. Bolts 9 for pushing the elastic metal plate 8 to move are threaded on the wall of the outer cone barrel 2. When it is necessary to adjust the water flow velocity in different circulation paths 52, the bolts 9 are turned to push the elastic metal plate 8 to move. The guide shafts 81 at both ends move outward in the slide groove 82, keeping the guide shafts 81 close to the inner wall of the outer cone barrel 2. The middle part of the elastic metal plate 8 moves away from the inner wall of the outer cone barrel 2 and close to the inner wall of the inner cone barrel 1, forming a relatively sealed space between the elastic metal plate 8 and the inner wall of the outer cone barrel 2. During the movement of the elastic metal plate 8, the cooling water flows along the gap between the elastic metal plate 8 and the annular guide plate 51. Because the elastic metal plate 8 is close to the inner wall of the inner cone barrel 1, the cross-sectional area of ​​the circulation path 52 is reduced. Multiple bolts 9 can be set to push the elastic metal plate 8 from different positions, thereby reducing the distance between the elastic metal plate 8 and the wall of the inner cone barrel 1. When the cooling water flows in the circulation path 52, because a relatively sealed space is formed between the elastic metal plate 8 and the inner wall of the outer cone barrel 2, the cooling water flows along the passage between the wall of the inner cone barrel 1 and the elastic metal plate 8. According to the pipe diameter flow velocity formula...

[0030] Q=vA

[0031] Q-Traffic

[0032] v-flow velocity

[0033] A - Cross-sectional area

[0034] It is known that for a constant flow rate, a smaller cross-sectional area results in a higher flow velocity. The movement of the elastic metal sheet 8 reduces the cross-sectional area of ​​the water flow in the circulation path 52, thereby increasing the flow velocity. This alters the water flow velocity in each circulation path 52, allowing control of the heat exchange performance at different locations on the water-cooled screen. The heat exchange performance at different heights of the crystal rod can be adjusted according to the crystal pulling process, improving the quality of the crystal rod pulling. When adjusting the water flow velocity in the water-cooled screen, it must be pre-adjusted before installing the water-cooled screen in the single crystal furnace.

[0035] like Figure 5-7 As shown, two elastic metal plates 8 are provided in a circulation path 52. The length of each elastic metal plate 8 is 135-165 degrees from the center of the circulation path 52. The provision of two elastic metal plates 8 facilitates adjustment, and the length of the elastic metal plates 8 allows for a greater variation in the cross-sectional area of ​​the circulation path 52, thereby improving its flow rate regulation effect and enhancing the heat exchange efficiency of the water-cooled screen.

[0036] like Figure 5-7 As shown, the end of the bolt 9 is rotatably connected to the elastic metal sheet 8. The bolt 9 passes through the connecting hole provided on the elastic metal sheet 8. The bolt 9 is provided with two limiting pieces 91 located on both sides of the elastic metal sheet 8. Rotating the bolt 9 causes the limiting pieces 91 on both sides to push or pull the elastic metal sheet 8 to move.

[0037] like Figure 5-7 As shown, a triangular stop 10 is fixedly connected to the inner wall of the outer cone barrel 2 between the guide shaft 81 at both ends of the elastic metal sheet 8 installed in the circulation passage 52 of the conical part and the inner wall of the outer cone barrel 2. The guide shaft 81 moves along the vertical arc surface of the triangular stop 10, and a relatively closed space is formed between the triangular stop 10, the elastic metal sheet 8, and the inner wall of the outer cone barrel 2. This allows the water to flow along the circulation channel between the inner cone barrel 1 wall and the elastic metal sheet 8, thereby keeping the water between the elastic metal sheet 8 and the outer cone barrel 2 wall in a relatively static state.

[0038] A method for adjusting the water flow velocity in the circulation path 52 of the aforementioned water-cooled screen involves rotating the bolt 9 to move the elastic metal sheet 8. The guide shafts 81 at both ends of the elastic metal sheet 8 move along the slide groove 82, keeping the guide shafts 81 close to the inner wall of the outer cone 2. The middle part of the elastic metal sheet 8 is away from the inner wall of the outer cone 2 and close to the inner wall of the inner cone 1, creating a relatively sealed space between the elastic metal sheet 8 and the inner wall of the outer cone 2. During the movement of the elastic metal sheet 8, cooling water flows along the gap between the elastic metal sheet 8 and the annular guide plate 51. Because the elastic metal sheet 8 is close to the inner wall of the inner cone 1, the cross-sectional area of ​​the circulation path 52 is reduced. Based on the pipe diameter velocity formula...

[0039] Q=vA

[0040] Q-Traffic

[0041] v-flow velocity

[0042] A - Cross-sectional area

[0043] It can be seen that, with a constant flow rate, the smaller the cross-sectional area, the greater the flow velocity. The movement of the elastic metal sheet 8 reduces the cross-sectional area of ​​the water flow in the circulation channel, thereby increasing the flow velocity and improving heat dissipation performance.

[0044] Work process:

[0045] When the water-cooled screen structure cools the crystal rod, cooling water enters from the inlet pipe 6 and enters the bottom of the annular chamber 5. The cooling water enters the lowest circulation passage 52, flows through the circulation passage 52 once, is blocked by the inclined baffle 54, and then flows upward along the inclined baffle 54, through the through hole 53, and into the circulation passage 52 of the next layer. After flowing through this circulation passage 52 once, it also flows upward along the inclined baffle 54, through the through hole 53, and into the circulation passage 52 of the next layer. This allows the cooling water to flow upward sequentially, realizing the circulation of cooling water in the annular chamber 5, and enabling the cooling water to circulate. Each part of the water-cooled screen then flows out from the outlet pipe 7. The surface of the inner conical barrel 1 absorbs the heat of the crystal rod. The arc-shaped groove 11 and heat absorption plate 12 set on the surface of the inner conical barrel 1 increase the heat absorption area of ​​the inner conical barrel 1, thereby improving the heat absorption efficiency. The heat is transferred to the inner wall of the annular chamber 5. The heat dissipation plate 13 set in the annular chamber 5 increases the contact area between the heat dissipation surface and the cooling water, thereby improving the heat dissipation efficiency. The heat is carried away with the cooling water, thereby increasing the heat exchange performance of the water-cooled screen, thereby increasing the crystal growth rate. The yield of crystal rods per unit time can be significantly increased, effectively reducing enterprise costs.

[0046] When it is necessary to adjust the water flow rate in different circulation channels 52, the bolt 9 is turned to push the elastic metal sheet 8 to move. The guide shafts 81 at both ends move outward in the slide groove 82, so that the guide shafts 81 are close to the inner wall of the outer cone barrel 2. The middle part of the elastic metal sheet 8 is away from the inner wall of the outer cone barrel 2 and close to the inner wall of the inner cone barrel 1, so that a relatively sealed space is formed between the elastic metal sheet 8 and the inner wall of the outer cone barrel 2. During the movement of the elastic metal sheet 8, the cooling water flows along the gap between the elastic metal sheet 8 and the annular guide plate 51. Since the elastic metal sheet 8 is close to the inner wall of the inner cone barrel 1, the cross-sectional area of ​​the circulation channel 52 is reduced, thereby increasing the flow rate and changing the water flow rate in each circulation channel 52. This allows control of the heat exchange performance at different positions of the water-cooled screen, adjustment of the heat exchange performance at different heights of the crystal rod according to the crystal pulling situation, and improvement of the quality of crystal rod pulling.

[0047] Finally, it should be noted that the above preferred embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail through the above preferred embodiments, those skilled in the art should understand that various changes can be made to it in form and detail without departing from the scope defined by the claims of the present invention.

Claims

1. A water-cooled screen structure that can improve the crystal pulling rate, characterized in that: The device includes an inner conical barrel (1), an outer conical barrel (2), an upper base plate (3), and a lower base plate (4). An annular chamber (5) is formed between the inner conical barrel (1) and the outer conical barrel (2). The upper base plate (3) and the lower base plate (4) are annular structures, respectively fixedly connected to the upper and lower ends of the inner conical barrel (1) and the outer conical barrel (2), so that the annular chamber (5) forms a closed cavity. Several arc-shaped grooves (11) and heat-absorbing plates (12) are evenly arranged on the surface of the inner conical barrel (1). The surface of the inner conical barrel (1) located on one side of the annular chamber (5) is uniformly... A ring-shaped heat dissipation plate (13) is evenly arranged; an inlet pipe (6) and an outlet pipe (7) are connected to the upper bottom plate (3), the outlet pipe (7) is connected to the top of the ring chamber (5), and the inlet pipe (6) is connected to the bottom of the ring chamber (5) through a connecting pipe (61); a ring-shaped guide plate (51) is evenly arranged in the ring chamber (5), and multiple independent circulation paths (52) are formed between the ring-shaped guide plates (51); the heat dissipation plate (13) is evenly distributed in each circulation path (52). The annular guide plate (51) has through holes (53) that connect two adjacent circulation passages (52); the circulation passage (52) is provided with an inclined baffle (54) to facilitate the flow of cooling water in one direction. The inclined baffle (54) is located between the upper and lower through holes (53), and the upper and lower through holes (53) are respectively located on both sides of the inclined baffle (54). The water inlet pipe (6) is connected to the lowest circulation passage (52), and the water outlet pipe (7) is connected to the uppermost circulation passage (52). An arc-shaped elastic metal plate (8) for adjusting the water flow speed is installed in the circulation passage (52). The two ends of the elastic metal plate (8) are fixedly connected to guide shafts (81). The two ends of the guide shafts (81) are respectively slidably locked in the grooves (82) opened at the top and bottom of the circulation passage (52). The grooves (82) are set along the outer inner wall edge of the circulation passage (52) so that the guide shafts (81) are close to the inner wall of the outer cone (2). Bolts (9) for pushing the elastic metal plate (8) to move are threaded on the wall of the outer cone (2).

2. The water-cooled screen structure for improving crystal pulling rate according to claim 1, characterized in that: Two elastic metal sheets (8) are provided in a loop path (52), and the length of the elastic metal sheet (8) is 135-165 degrees from the center angle of the loop path (52).

3. A water-cooled screen structure for improving crystal pulling rate according to claim 1 or 2, characterized in that: The end of the bolt (9) is rotatably connected to the elastic metal sheet (8). The bolt (9) passes through the connection hole provided on the elastic metal sheet (8). The bolt (9) is provided with two limiting pieces (91) located on both sides of the elastic metal sheet (8). Rotating the bolt (9) causes the limiting pieces (91) on both sides to push or pull the elastic metal sheet (8) to move.

4. The water-cooled screen structure for improving crystal pulling rate according to claim 3, characterized in that: A triangular stop (10) is fixedly connected to the inner wall of the outer cone barrel (2) between the guide shaft (81) at both ends of the elastic metal sheet (8) installed in the circulation passage (52) of the conical part and the inner wall of the outer cone barrel (2). The guide shaft (81) moves along the vertical arc surface of the triangular stop (10), and a relatively closed space is formed between the triangular stop (10), the elastic metal sheet (8), and the inner wall of the outer cone barrel (2).

5. A method for regulating the water flow velocity in the circulation path (52) of the water-cooled screen structure according to claim 1, 2 or 4, characterized in that: By rotating the bolt (9), the elastic metal sheet (8) is pushed to move. The guide shafts (81) at both ends of the elastic metal sheet (8) move along the slide groove (82), so that the guide shafts (81) are close to the inner wall of the outer cone (2). The middle part of the elastic metal sheet (8) is away from the inner wall of the outer cone (2) and close to the inner wall of the inner cone (1), so that a relatively closed space is formed between the elastic metal sheet (8) and the inner wall of the outer cone (2). During the movement of the elastic metal sheet (8), the cooling water flows along the gap between the elastic metal sheet (8) and the annular guide plate (51). Since the elastic metal sheet (8) is close to the inner wall of the inner cone (1), the cross-sectional area of ​​the circulation passage (52) is reduced. According to the pipe diameter flow rate formula: Q = vA Where Q is the flow rate, v is the velocity, and A is the cross-sectional area. It can be seen that when the flow rate is constant, the smaller the cross-sectional area, the greater the flow velocity; the movement of the elastic metal sheet (8) reduces the cross-sectional area of ​​the water flow in the circulation path (52), thereby increasing the flow velocity and increasing the heat dissipation performance.

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