Astigmatic light removal type high-precision optical film thickness monitoring device

Abstract

The invention discloses an astigmatism removal type high-precision optical film thickness monitoring device, and relates to the field of optical film thickness measurement, the astigmatism removal type high-precision optical film thickness monitoring device comprises a monitoring device base, a supporting frame and an air blowing device are installed above the monitoring device base, and an air blowing branch pipe is installed on the left side of an air blowing main pipe; a top supporting block is installed above the supporting frame, a built-in groove is formed in the top supporting block, a connecting rope is installed on a transmission shaft, and connecting rods are installed on the left side and the right side of a balancing weight. The astigmatism removal type high-precision optical film thickness monitoring device is provided with an anti-skid wheel, when the position of an optical film needs to be adjusted, a rotating shaft assembly can be manually rotated, the rotating shaft assembly drives the anti-skid wheel to rotate, and the optical film can be driven by friction force between the anti-skid wheel and the optical film to move leftwards or rightwards through a roller; therefore, the position of the optical film can be conveniently adjusted, and the optical film does not need to be manually and repeatedly contacted.

Description

Technical Field

[0001] The present invention relates to the field of technical optical film thickness measurement, and specifically to a high-precision optical film thickness monitoring device for removing astigmatism. Background Art

[0002] The high-precision optical film for removing astigmatism is a thin film with special optical functions, aiming to reduce or eliminate the astigmatism phenomenon in the optical system through advanced optical technologies and material designs, so as to improve the imaging quality and visual effects.

[0003] The optical film thickness monitoring device is a device used to measure the thickness of thin films. Usually, the principle of optical interference is adopted. Based on the interference phenomenon of light waves, when a beam of light irradiates an optical thin film, reflections will occur on the upper and lower surfaces of the film respectively, and these two reflected light beams will produce interference. As the thickness of the thin film changes, the interference fringes will move. By accurately measuring the movement of the interference fringes, such as the number and spacing of the fringes, the thickness change of the thin film can be calculated.

[0004] During the semiconductor chip manufacturing process, the thicknesses of photoresist films, passivation films, metal thin films, etc. are monitored to ensure the performance and reliability of the chips.

[0005] For example, the Chinese utility model patent with the application number 202123211884.X discloses an optical film thickness measurement device that is convenient for material taking. Pull the pull rod upwards to drive the pressing plate to move upwards, then place both sides of the optical film to be measured into the inside of the groove, and then release the pull rod. The spring will push the pressing plate to clamp the optical film to complete positioning. Through the sliding connection between the slider and the chute, the position of the optical film can be quickly adjusted, which is convenient for measuring the thickness of the optical film and also convenient for removing the measured optical film. The feet can provide multiple support points for this film thickness measuring instrument to prevent the film thickness measuring instrument from shaking during measurement, resulting in inaccurate measurement. However, there are still certain defects in its device;

[0006] It can only detect the film thickness at one position. When it is necessary to detect the film thickness at different positions, the position of the film needs to be manually adjusted, which causes the hand to come into contact with the film multiple times, thereby increasing the pollution rate of the film. If the position of the film with the detected thickness is held by hand, it will also affect the detection accuracy.

[0007] Therefore, we propose a high-precision optical film thickness monitoring device for removing astigmatism to solve the problems raised above. Summary of the Invention

[0008] The object of the present invention is to provide an astigmatism-removing high-precision optical film thickness monitoring device to solve the problem proposed in the above background technology that currently in the market, the film thickness can only be detected at one position. When it is necessary to detect the film thickness at different positions, the position of the film needs to be manually adjusted, which causes the hand to come into contact with the film multiple times, thereby increasing the pollution rate of the film. If the position of the film with the detected film thickness is held by hand, it will also affect the detection accuracy.

[0009] To achieve the above object, the present invention provides the following technical solution: An astigmatism-removing high-precision optical film thickness monitoring device, including a monitoring device base. Above the monitoring device base, a support frame and a blowing device are installed. Above the blowing device, a blowing main pipe is installed, and a blowing branch pipe is installed on the left side of the blowing main pipe;

[0010] Above the support frame, a top support block is installed. Above the top support block, a controller is installed. Inside the top support block, an internal slot is opened, and a transmission shaft is arranged inside the internal slot. A connecting rope is installed on the transmission shaft, and a counterweight block is installed at the end of the connecting rope. On both the left and right sides of the counterweight block, connecting rods are installed, and at the reverse ends of the connecting rods, movable strips are installed;

[0011] On the upper surface of the monitoring device base, an upper laser is installed. On the lower surface of the support frame, a lower laser is installed. Above the monitoring device base and below the support frame, rotating plates are installed through damping shaft components, and on the opposite sides of the rotating plates, fan blade components are installed;

[0012] On the left and right sides inside the support frame, placing plates are installed. On the front and rear sides of the placing plates, baffles are installed. On the left placing plate, a fixed shaft is arranged, and a roller is installed on the fixed shaft. On the right placing plate, a rotating shaft component is arranged, and an anti-slip wheel is installed on the rotating shaft component. On the front and rear sides of the upper surface of the monitoring device base, limiting strips are installed, and limiting components are installed on the limiting strips.

[0013] Preferably, the blowing branch pipe is internally connected to the blowing main pipe, and air outlet nozzles are arranged on both the upper and lower sides at the left end of the blowing branch pipe.

[0014] With the above structural design, when the blowing device is started, the blowing device blows air through the blowing main pipe, and the blowing main pipe blows air through the blowing branch pipe.

[0015] Preferably, a servo motor is installed on the left side of the top support block, and the right side of the servo motor is connected to the transmission shaft through an output shaft.

[0016] With the above structural design, when the servo motor is started, the servo motor drives the transmission shaft to rotate through the output shaft, and the transmission shaft can contract and unfold the connecting rope.

[0017] Preferably, the transmission shaft is connected to the inner wall of the built-in groove via a bearing seat, and the connecting rope is fixedly connected to the transmission shaft and the counterweight block.

[0018] By adopting the above-mentioned structural design, when the transmission shaft is unfolded to connect the rope, the counterweight block, connecting rod, movable bar and protective block move downward under the action of gravity, and abut against the astigmatism-removing optical film through the protective block, thereby fixing the astigmatism-removing optical film. At the same time, the astigmatism-removing optical film is fixed by the own gravity of the counterweight block, connecting rod, movable bar and protective block, which reduces the clamping force on the astigmatism-removing optical film when it is fixed, thereby preventing the astigmatism-removing optical film from being damaged.

[0019] Preferably, the movable bar passes through the support frame, the movable bar is slidably connected to the support frame, and a protective block is installed at the lower end of the movable bar.

[0020] With the above structural design, the movable bar can move up and down along the support frame when subjected to force, so that the movable bar is more stable when moving up and down, and the protective block plays a protective role on the surface of the astigmatism removing optical film.

[0021] Preferably, the center line of the upper laser coincides with the center line of the lower laser, the upper laser is located above the optical film, and the lower laser is located below the optical film.

[0022] With the above structural design, when monitoring the thickness of the optical film, the optical film is placed on the placement plates on the left and right sides, so that the detected position of the optical film is in a hollow state. The upper laser irradiates the surface of the optical film and penetrates the inside of the film, and the lower laser is reflected back from the back. After the two light rays are combined, interference fringes are formed in the detection system. The specific thickness of the optical film can be calculated based on the changes in the interference pattern.

[0023] Preferably, the damping shaft assembly drives the rotating plate to rotate, and the fan blade assembly is located on the upper and lower sides of the optical film, and the fan blade assembly corresponds to the blowing end of the blowing branch pipe.

[0024] With the above structural design, after the optical film is placed on the placement plate, the optical film contacts the roller and the anti-skid wheel, and the optical film is limited, the blowing device is started, the blowing device blows air through the blowing main pipe, and the blowing main pipe blows air through the blowing branch pipe, and the blowing branch pipe can blow air to the fan blade assemblies on the upper and lower sides respectively, so that the fan blade assembly rotates to blow air to the optical film, so that under the action of the blowing branch pipe and the fan blade assembly, the optical film is cleaned, the cleaning efficiency of the detected position of the optical film is improved, thereby improving the detection accuracy of the optical film thickness, and when the thickness of the optical film is detected, the damping shaft assembly drives the rotating plate to rotate 90°, and the rotating plate drives the fan blade assembly to rotate 90°, so that the fan blade assembly will not interfere with the measurement of the thickness of the optical film.

[0025] Preferably, the roller is rotatably connected to the fixed shaft, and the fixed shaft is fixed on the baffle.

[0026] With the above structural design, when the optical film is stressed on the roller, it can move along the roller, causing the roller to rotate along the fixed shaft.

[0027] Preferably, the anti-slip wheel is fixedly connected to the rotating shaft assembly, and the rotating shaft assembly is connected to the baffle through a bearing member.

[0028] With the above structural design, when the position of the optical film needs to be adjusted, the rotating shaft assembly can be manually rotated. The rotating shaft assembly drives the anti-slip wheel to rotate, and the friction between the anti-slip wheel and the optical film can drive the optical film to move left or right through the roller, so as to facilitate the adjustment of the position of the optical film without manually contacting the optical film repeatedly.

[0029] Preferably, the limiting assembly includes a threaded rod and a circular limiting plate, and the threaded rod is threadedly connected to the limiting strip.

[0030] With the above structural design, when adjusting the position of the optical film, the threaded rod on the limiting assembly can be rotated. The threaded rod drives the circular limiting plate to move towards the position of the optical film until it contacts the optical film, so as to play a role in limiting and guiding the optical film when it moves left and right.

[0031] Compared with the prior art, the beneficial effects of the present invention are as follows: The astigmatism-removing high-precision optical film thickness monitoring device:

[0032] 1. An anti-slip wheel is provided. When the position of the optical film needs to be adjusted, the rotating shaft assembly can be manually rotated. The rotating shaft assembly drives the anti-slip wheel to rotate, and the friction between the anti-slip wheel and the optical film can drive the optical film to move left or right through the roller, so as to facilitate the adjustment of the position of the optical film without manually contacting the optical film repeatedly;

[0033] 2. A blowing branch pipe and a fan blade assembly are provided. After the optical film is placed on the placement plate, the optical film contacts the roller and the anti-slip wheel and is limited. The blowing device is started. The blowing device blows air through the blowing main pipe. The blowing main pipe blows air through the blowing branch pipe. The blowing branch pipe can blow air to the fan blade assemblies on the upper and lower sides respectively, causing the fan blade assemblies to rotate and blow air on the optical film. Thus, under the action of the blowing branch pipe and the fan blade assembly, the cleaning effect of the optical film is realized, the cleaning efficiency of the detected position of the optical film is improved, and the detection accuracy of the optical film thickness is thus improved;

[0034] 3. A connecting rope and a movable bar are provided. When the transmission shaft unfolds the connecting rope, the counterweight, the connecting rod, the movable bar and the protective block move downward under the action of gravity, and the protective block abuts against the astigmatism-removing optical film, so as to fix the astigmatism-removing optical film. At the same time, the self-gravity of the counterweight, the connecting rod, the movable bar and the protective block is used to fix the astigmatism-removing optical film, reducing the clamping force on the astigmatism-removing optical film during fixation, thereby preventing the astigmatism-removing optical film from being damaged. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 is a schematic diagram of the partial cross-sectional structure of the present invention;

[0036] Figure 2 is a schematic diagram of the front view structure of the present invention;

[0037] Figure 3 is a schematic diagram of the internal structure of the top support block of the present invention.

[0038] Figure 4 is the present invention Figure 3 magnified schematic diagram of part A in;

[0039] Figure 5 is a schematic diagram of the structure above the placement plate of the present invention;

[0040] Figure 6 is a schematic diagram of the position structure of the fan blade assembly during film thickness detection of the present invention;

[0041] Figure 7 is a schematic diagram of the position structure of the damping shaft assembly, the rotating plate and the fan blade assembly of the present invention;

[0042] Figure 8 is a schematic diagram of the connection structure of the movable bar and the protective block of the present invention;

[0043] Figure 9 is a schematic diagram of the connection structure of the fixed shaft and the roller of the present invention;

[0044] Figure 10 is a schematic diagram of the rotating shaft assembly and the anti-slip wheel of the present invention.

[0045] In the figure: 1. Monitoring device base; 2. Support frame; 3. Blowing device; 4. Blowing main pipe; 5. Blowing branch pipe; 6. Top support block; 7. Controller; 8. Built-in groove; 9. Servo motor; 10. Transmission shaft; 11. Connecting rope; 12. Counterweight; 13. Connecting rod; 14. Movable bar; 15. Protective block; 16. Upper laser; 17. Lower laser; 18. Damping shaft assembly; 19. Rotating plate; 20. Fan blade assembly; 21. Placement plate; 22. Baffle; 23. Fixed shaft; 24. Roller; 25. Rotating shaft assembly; 26. Anti-slip wheel; 27. Limiting strip; 28. Limiting assembly. DETAILED DESCRIPTION

[0046] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0047] See also Figures 1 - 10 The present invention provides a technical solution: a high-precision optical film thickness monitoring device with astigmatism removal, comprising a monitoring device base 1, a support frame 2 and a blowing device 3 are installed above the monitoring device base 1, and a blowing main pipe 4 is installed above the blowing device 3, a blowing branch pipe 5 is installed on the left side of the blowing main pipe 4, the blowing branch pipe 5 is connected with the inside of the blowing main pipe 4, and air outlet nozzles are arranged on the upper and lower sides of the left end of the blowing branch pipe 5. When the blowing device 3 is started, the blowing device 3 blows air through the blowing main pipe 4, and the blowing main pipe 4 blows air through the blowing branch pipe 5.

[0048] A top support block 6 is installed above the support frame 2, and a controller 7 is installed above the top support block 6. A built-in groove 8 is provided inside the top support block 6, and a transmission shaft 10 is provided inside the built-in groove 8. The transmission shaft 10 is connected to the inner wall of the built-in groove 8 through a bearing seat. A servo motor 9 is installed on the left side of the top support block 6, and the right side of the servo motor 9 is connected to the transmission shaft 10 through an output shaft. A connecting rope 11 is installed on the transmission shaft 10, and a counterweight block 12 is installed at the end of the connecting rope 11. Connecting rods 13 are installed on both sides of the counterweight block 12, and a movable bar 14 is installed on the reverse end of the connecting rod 13. The movable bar 14 penetrates the support frame 2 for sliding connection, and a protective block 15 is installed at the lower end of the movable bar 14. The movable bar 14 can move up and down along the support frame 2 when subjected to force, so that the movable bar 14 is more stable when moving up and down, and the protective block 15 plays a protective role on the surface of the astigmatism removal type optical film.

[0049] Start the servo motor 9, which drives the transmission shaft 10 to rotate through the output shaft. The transmission shaft 10 can retract and expand the connecting rope 11. The connecting rope 11 is fixedly connected to the transmission shaft 10 and the counterweight 12. When the transmission shaft 10 can expand the connecting rope 11, the counterweight 12, the connecting rod 13, the movable bar 14 and the protective block 15 move downward under the action of gravity, and abut against the astigmatism removing optical film through the protective block 15, thereby fixing the astigmatism removing optical film. The astigmatism removing optical film is fixed by the counterweight's own gravity, which reduces the clamping force on the astigmatism removing optical film when it is fixed, thereby preventing the astigmatism removing optical film from being damaged.

[0050] On both the left and right sides inside the support frame 2, placing plates 21 are installed, and on both the front and rear sides of the placing plates 21, baffles 22 are installed. Between the left baffles 22, a fixed shaft 23 is provided, and a roller 24 is installed on the fixed shaft 23. The roller 24 is rotatably connected to the fixed shaft 23, and the fixed shaft 23 is fixed to the baffle 22. Between the right baffles 22, a rotating shaft assembly 25 is provided, and an anti-slip wheel 26 is installed on the rotating shaft assembly 25. The anti-slip wheel 26 is fixedly connected to the rotating shaft assembly 25, and the rotating shaft assembly 25 is connected to the baffle 22 through a bearing member.

[0051] When the optical film is stressed on the roller 24, it can move along the roller 24, causing the roller 24 to rotate along the fixed shaft 23. When it is necessary to adjust the position of the optical film, the rotating shaft assembly 25 can be manually rotated. The rotating shaft assembly 25 drives the anti-slip wheel 26 to rotate. The frictional force between the anti-slip wheel 26 and the optical film can drive the optical film to move left or right through the roller 24, thus facilitating the adjustment of the position of the optical film without manually repeatedly contacting the optical film.

[0052] On both the front and rear sides of the upper surface of the monitoring device base 1, limit strips 27 are installed, and a limit component 28 is installed on the limit strips 27. The limit component 28 includes a threaded rod and a circular limit plate, and the threaded rod is threadedly connected to the limit strip 27. When adjusting the position of the optical film, the threaded rod on the limit component 28 can be rotated, and the threaded rod drives the circular limit plate to move towards the position of the optical film until it contacts the optical film, thereby playing a role in limiting and guiding the optical film during left and right movement. Here, the optical film is clamped by manual adjustment. During adjustment, the frictional force between the circular limit plate and the optical film makes the optical film not easily shift and does not cause the optical film to deform. At the same time, for manual clamping, the force is easier to control. Compared with the technical method of using a spring to clamp the optical film in the comparative document of this application, it is safer and more reliable.

[0053] On the upper surface of the monitoring device base 1, a lower laser 17 is installed, and on the lower surface of the support frame 2, an upper laser 16 is installed. The center line of the upper laser 16 coincides with the center line of the lower laser 17. The upper laser 16 is located above the optical film, and the lower laser 17 is located below the optical film. When monitoring the thickness of the optical film, the optical film is placed on the placing plates 21 on both sides, making the detected position of the optical film in a hollow state. The upper laser 16 irradiates the surface of the optical film and penetrates into the film interior, while the lower laser 17 is reflected back from the back. After the two kinds of light are combined, interference fringes are formed in the detection system. The specific thickness of the optical film can be calculated according to the change of the interference pattern.

[0054] Above the base 1 of the monitoring device and below the support frame 2, rotating plates 19 are installed through damping shaft assemblies 18, and fan blade assemblies 20 are installed on opposite sides of the rotating plates 19. The damping shaft assemblies 18 drive the rotating plates 19 to rotate. When a rotational force is applied to the rotating plates 19, the rotating plates 19 can rotate along the damping shaft assemblies 18, facilitating the adjustment of the positions of the rotating plates 19 and the fan blade assemblies 20 on the rotating plates 19. The fan blade assemblies 20 are located on the upper and lower sides of the optical film, and the fan blade assemblies 20 correspond to the blowing ends of the blowing branch pipes 5.

[0055] After placing the optical film on the placement plate 21, the optical film contacts the rollers 24 and the anti-slip wheels 26, and the optical film is limited. The blowing device 3 is started. The blowing device 3 blows air through the blowing main pipe 4, and the blowing main pipe 4 blows air through the blowing branch pipes 5. The blowing branch pipes 5 can blow air to the fan blade assemblies 20 on the upper and lower sides respectively, causing the fan blade assemblies 20 to rotate. (Here, the fan blade assemblies 20 are electric fans in the prior art and can rotate automatically. By moving the positions of the fan blade assemblies 20, it is avoided that the fan blade assemblies 20 block the upper laser 16 and the lower laser 17), and air is blown to the optical film. Thus, under the action of the blowing branch pipes 5 and the fan blade assemblies 20, the cleaning effect of the optical film is achieved, improving the cleaning efficiency of the detected position of the optical film, and thus improving the detection accuracy of the optical film thickness. When detecting the thickness of the optical film, the damping shaft assembly 18 drives the rotating plate 19 to rotate 90°, and the rotating plate 19 drives the fan blade assembly 20 to rotate 90°, so that the fan blade assembly 20 does not interfere with the thickness measurement of the optical film.

[0056] Working principle: When using this astigmatism-removing high-precision optical film thickness monitoring device, first, when monitoring the optical film thickness, the optical film is placed on the placement plates 21 on the left and right sides, so that the detected position of the optical film is in a hollow state. The servo motor 9 is started, and the servo motor 9 drives the transmission shaft 10 to rotate through the output shaft. The transmission shaft 10 can unwind the connecting rope 11. The counterweight 12, the connecting rod 13, the movable strip 14, and the protective block 15 move downward under the action of gravity, and the protective block 15 abuts against the astigmatism-removing optical film, thereby realizing the fixation of the astigmatism-removing optical film. At the same time, the self-gravity of the counterweight 12, the connecting rod 13, the movable strip 14, and the protective block 15 is used to complete the fixation of the astigmatism-removing optical film.

[0057] Start the blowing device 3. The blowing device 3 blows air through the main blowing pipe 4. The main blowing pipe 4 blows air through the blowing branch pipes 5. The blowing branch pipes 5 can blow air on the upper and lower fan blade assemblies 20 respectively, causing the fan blade assemblies 20 to rotate and blow air on the optical film. Thus, under the action of the blowing branch pipes 5 and the fan blade assemblies 20, the cleaning effect of the optical film is achieved; after the cleaning is completed, the damping shaft assembly 18 drives the rotating plate 19 to rotate 90°, and the rotating plate 19 drives the fan blade assembly 20 to rotate 90°, so that the fan blade assembly 20 does not interfere with the thickness measurement of the optical film.

[0058] The upper laser 16 irradiates the surface of the optical film and penetrates into the film interior, while the lower laser 17 reflects back from the back. After the two kinds of light are combined, interference fringes are formed in the detection system. The specific thickness of the optical film can be calculated according to the change of the interference pattern; when it is necessary to adjust the position of the optical film, rotate the threaded rod on the limit assembly 28, and the threaded rod drives the circular limit plate to move towards the position of the optical film until it contacts the optical film, so as to play a role in limiting and guiding the optical film during left and right movement; adjust the protective block 15 upward to a position close to the surface of the optical film, and the rotating shaft assembly 25 can be manually rotated. The rotating shaft assembly 25 drives the anti-slip wheel 26 to rotate. The frictional force between the anti-slip wheel 26 and the optical film can drive the optical film to move left or right through the roller 24, so as to facilitate the adjustment of the position of the optical film without manually contacting the optical film repeatedly. Thus, a series of operations are completed.

[0059] It should be noted that the upper laser 16, the lower laser 17, the detection system, etc. appearing in this application are all conventional components in the art. The standard parts used in this application can be purchased from the market. The circuit connection adopts the conventional connection method in the prior art. The content not described in detail in this specification belongs to the prior art well-known to those skilled in the art.

[0060] Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A high-precision optical film thickness monitoring device with astigmatism removal, comprising a monitoring device base (1), characterized in that: A support frame (2) and a blowing device (3) are installed above the monitoring device base (1), and a blowing main pipe (4) is installed above the blowing device (3), and a blowing branch pipe (5) is installed on the left side of the blowing main pipe (4); A top support block (6) is installed above the support frame (2), and a controller (7) is installed above the top support block (6); a built-in groove (8) is provided inside the top support block (6), and a transmission shaft (10) is provided inside the built-in groove (8); a connecting rope (11) is installed on the transmission shaft (10), and a counterweight block (12) is installed at the end of the connecting rope (11); connecting rods (13) are installed on both sides of the left and right sides of the counterweight block (12), and a movable bar (14) is installed on the opposite end of the connecting rod (13); An upper laser (16) is mounted on the upper surface of the monitoring device base (1), a lower laser (17) is mounted on the lower surface of the support frame (2), a rotating plate (19) is mounted above the monitoring device base (1) and below the support frame (2) via a damping shaft assembly (18), and a fan blade assembly (20) is mounted on the opposite side of the rotating plate (19); A placement plate (21) is installed on both the left and right sides of the interior of the support frame (2), and baffles (22) are installed on both the front and rear sides of the placement plate (21); a fixed shaft (23) is provided on the left placement plate (21), and a roller (24) is installed on the fixed shaft (23); a rotating shaft assembly (25) is provided on the right placement plate (21), and an anti-slip wheel (26) is installed on the rotating shaft assembly (25); and a limit strip (27) is installed on both the front and rear sides of the upper surface of the monitoring device base (1), and a limit strip (28) is installed on the limit strip (27).

2. The astigmatism-removing high-precision optical film thickness monitoring device according to claim 1, characterized in that: The blowing branch pipe (5) is connected to the interior of the blowing main pipe (4), and air outlet nozzles are arranged on both upper and lower sides of the left end of the blowing branch pipe (5).

3. The astigmatism-removing high-precision optical film thickness monitoring device according to claim 1, characterized in that: A servo motor (9) is installed on the left side of the top support block (6), and the right side of the servo motor (9) is connected to a transmission shaft (10) via an output shaft.

4. The astigmatism-removing high-precision optical film thickness monitoring device according to claim 3, characterized in that: The transmission shaft (10) is connected to the inner wall of the built-in groove (8) via a bearing seat, and the connecting rope (11) is fixedly connected to the transmission shaft (10) and the counterweight (12).

5. The astigmatism-removing high-precision optical film thickness monitoring device according to claim 1, characterized in that: The movable bar (14) passes through the support frame (2), the movable bar (14) is slidably connected to the support frame (2), and a protective block (15) is installed at the lower end of the movable bar (14).

6. The astigmatism-removing high-precision optical film thickness monitoring device according to claim 1, characterized in that: The center line of the upper laser (16) and the center line of the lower laser (17) coincide with each other; the upper laser (16) is located above the optical film, and the lower laser (17) is located below the optical film.

7. The astigmatism-removing high-precision optical film thickness monitoring device according to claim 1, characterized in that: The damping shaft assembly (18) drives the rotating plate (19) to rotate, and the fan blade assembly (20) is located at the upper and lower sides of the optical film, and the fan blade assembly (20) corresponds to the blowing end of the blowing branch pipe (5).

8. The astigmatism-removing high-precision optical film thickness monitoring device according to claim 1, characterized in that: The roller (24) is rotatably connected to the fixed shaft (23), and the fixed shaft (23) is fixed on the baffle (22).

9. The astigmatism-removing high-precision optical film thickness monitoring device according to claim 1, characterized in that: The anti-slip wheel (26) is fixedly connected to the rotating shaft assembly (25), and the rotating shaft assembly (25) is connected to the baffle (22) via a bearing member.

10. The astigmatism-removing high-precision optical film thickness monitoring device according to claim 1, characterized in that: The limiting assembly (28) comprises a threaded rod and a circular limiting plate, and the threaded rod is threadably connected to the limiting strip (27).

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