Microelectronic magnetic force detection equipment and method thereof

Abstract

The invention discloses microelectronic magnetic force detection equipment and a method thereof, and belongs to the technical field of microelectronic magnetic force. The microelectronic magnetic force detection equipment comprises an equipment main body, a locking mechanism, a clamping mechanism and a detection mechanism; the lower portion of the equipment body is connected with the locking mechanism, the upper portion of the equipment body is connected with the clamping mechanism, and the detection mechanism is arranged on the right side of the equipment body. By means of the mode, the function of continuous feeding and discharging is achieved through the clamping mechanism and the locking mechanism, detection continuity is achieved, automatic operation is achieved in the whole process, and the operation stability is achieved while the working efficiency is improved; the detection capability is further expanded by adopting an array form of the atomic magnetometers, multi-angle synchronous detection can be realized after a plurality of atomic magnetometers are combined into an array, and meanwhile, the surface of the chip is cooled by blowing air through the cooling pipes at different angles, so that non-uniform temperature of the magnetic core in the detection process is prevented, and the detection precision is improved. And the stability of magnetic force detection is improved.

Description

Technical Field

[0001] The present invention relates to the field of microelectronic magnetic force detection technology, and particularly relates to a microelectronic magnetic force detection device and a method thereof. Background Art

[0002] Microelectronic magnetic force detection is mainly based on various physical phenomena, and uses the measurable changes generated when the magnetic field interacts with matter to detect the magnetic properties of microelectronic devices or materials. From a microscopic perspective, when a microelectronic sample is in an external magnetic field environment, the motion states of microscopic particles such as atoms and electrons in the sample will change. For example, for the magnetic force detection of a chip, for a magnetic substance, there are unpaired electrons inside it. These electrons themselves have spin magnetic moments. Under the action of an external magnetic field, they will be subjected to a torque, causing their spin directions to tend to be consistent with the direction of the external magnetic field, and thus leading to macroscopic magnetic changes in the entire sample, such as changes in magnetization intensity.

[0003] For example, Chinese Patent CN117970195B discloses a microelectronic magnetic force detection device, including a cooling rack. Two groups of support frames are symmetrically arranged below the cooling rack. Vent pipes are connected to both ends of the cooling rack. A placement groove for placing a magnetic core is opened on the cooling rack. A fixing rack is fixedly installed on the cooling rack. A lead screw is rotatably installed on the fixing rack. A detection mechanism is arranged on the lead screw. The detection mechanism includes a movable part. The movable part is screwed to the lead screw. A magnetic force display panel fixedly installed on the movable part. A guiding hole opened on the movable part. A movable sleeve movably inserted into the guiding hole. By screwing the screw rod, the distance between the detection probe and the magnetic core can be adjusted, improving the rate of adjusting the distance between the detection probe and the magnetic core. Secondly, by driving the lead screw to rotate, the detection probe can be automatically moved at equal distances.

[0004] However, its technology has the following problems. First, adjusting the distance between the detection probe and the magnetic core by screwing the screw rod. This manual adjustment method depends on the operator's feel and experience, making it difficult to ensure the repeatability and stability of each adjustment, affecting the detection sensitivity, and frequent manual adjustment is likely to cause the screw rod to loosen, further affecting the normal operation of the device.

[0005] Second, adopting the traditional single-point detection method, and the time loss and positioning error brought by multiple samplings and moving the detection probe make the detection efficiency not high.

[0006] Third, there may be problems with the air flow uniformity in the design of the vent pipe: Although the vent pipes are connected to both ends of the cooling rack, relying only on air intake at both ends, it is difficult to ensure uniform air flow distribution inside the cooling rack, especially in the area of the placement groove. This may cause uneven temperature of the magnetic core during the detection process, affecting the stability of its magnetic properties, and further interfering with the accuracy of the magnetic force detection.

[0007] Based on this, the present invention designs a microelectronic magnetic force detection device and method to solve the above problems. Summary of the invention

[0008] In view of the above-mentioned shortcomings of the prior art, the present invention provides a microelectronic magnetic force detection device and method thereof.

[0009] To achieve the above objectives, the present invention is implemented through the following technical solutions:

[0010] A microelectronic magnetic force detection device comprises a device body, a locking mechanism, a clamping mechanism and a detection mechanism;

[0011] The lower part of the device body is connected to the locking mechanism, the upper part of the device body is connected to the clamping mechanism, and the detection mechanism is arranged on the right side of the device body;

[0012] The locking mechanism includes a fixing assembly for adjusting the height and a transmission assembly for locking and unlocking, the upper end of the fixing assembly is connected to the transmission assembly, and the upper end of the transmission assembly is connected to the clamping mechanism;

[0013] The detection mechanism includes a driving component for adjusting the detection distance and a detection component for detecting the magnetic force of the chip. The driving component is connected to the detection component, and both the driving component and the detection component are located on the right side of the device body.

[0014] Furthermore, the equipment body includes an annular conveyor line and a mounting seat, and a plurality of mounting seats are provided at equal intervals and are fixedly mounted on the conveyor belt of the annular conveyor line.

[0015] Furthermore, the fixed assembly includes a support plate, a first cylinder, a sliding rod and a mounting plate. The support plate is fixedly mounted on the lower end of the circular conveyor line, the first cylinder is fixedly mounted on the support plate, two sliding rods are provided and are respectively fixedly mounted on the left and right sides of the support plate, the output end of the first cylinder is fixedly connected to the lower end of the mounting plate, the left and right sides of the mounting plate are respectively slidably connected to the two sliding rods, and the mounting plate is connected to the transmission assembly.

[0016] Furthermore, the transmission assembly includes a motor, a first rotating rod, a pulley assembly, a second rotating rod, a gear set, a first limiting rod and a second limiting rod. The motor is fixedly mounted on the upper end of the mounting plate, and the lower ends of the first rotating rod and the second rotating rod are rotatably connected to the left and right sides of the upper end of the mounting plate respectively. The output end of the motor is transmission-connected to the first rotating rod through the pulley assembly, and the output end of the motor is transmission-connected to the second rotating rod through the gear set. The upper end of the first rotating rod is fixedly connected to the first limiting rod, and the upper end of the second rotating rod is fixedly connected to the second limiting rod, and the first limiting rod and the second limiting rod are both connected to the clamping mechanism.

[0017] Further, the clamping mechanism includes a rotating rod, a collar, a spring, a swivel ring, and clamping blocks. A through groove is formed in the middle of the mounting base. The rotating rod is installed in the through groove and is rotatably connected to the through groove. A limiting groove is formed at the bottom of the rotating rod, and the limiting groove is in limiting sliding connection with both the first limiting rod and the second limiting rod. The collar is fixedly installed at the lower end of the through groove. The upper end of the collar is fixedly connected to one end of the spring, and the other end of the spring is fixedly connected to the lower end of the swivel ring. A ring groove is formed on the outer wall of the swivel ring, and the outer wall of the swivel ring is slidably connected to the inner wall of the upper end of the mounting base in the vertical direction. A threaded groove is formed on the inner side wall of the swivel ring, and the threaded groove is threadedly connected to the upper end of the rotating rod. A plurality of clamping blocks are arranged at equal intervals and are all slidably connected to the ring groove. The lower outer side of the clamping block is hinged to the upper end of the mounting base.

[0018] Further, the driving assembly includes a vertical rod, a fixing plate, a connecting rod, a connecting plate, a second cylinder, a moving plate, an L-shaped plate, a connecting rod, a slider, and a slide rail. The vertical rod is located on the right side of the annular conveyor line. The lower left side of the vertical rod is fixedly connected to the fixing plate. The fixing plate and the connecting plate are fixedly connected by a plurality of connecting rods. The second cylinder is fixedly installed at the lower end of the connecting plate. The output end of the second cylinder is fixedly connected to the moving plate. A plurality of L-shaped plates are provided and are respectively fixedly installed around the moving plate. The upper ends of the plurality of L-shaped plates are respectively hinged to one end of a plurality of connecting rods, and the other ends of the plurality of connecting rods are respectively hinged to the outer ends of a plurality of sliders. A plurality of slide rails are provided and are respectively fixedly installed around the upper end of the connecting plate. The plurality of slide rails are respectively slidably connected to the plurality of sliders.

[0019] Further, the vertical rod, the moving plate, and the slider are all connected to the detection assembly.

[0020] Further, the detection assembly includes a detection plate, an atomic magnetometer, a cooling pipe, a rubber hose, and a blower. The detection plate is fixedly installed on the outer side of the slider. A first notch for fitting and installing the atomic magnetometer is formed at the lower end of the detection plate. A second notch for fitting and installing the atomic magnetometer is formed at the lower middle of the moving plate. The blower is fixedly installed at the upper end of the vertical rod. The blower is communicated with one end of the rubber hose, and the other end of the rubber hose is communicated with the cooling pipe. The cooling pipe is fixedly installed on the outer side of the detection plate.

[0021] Further, a plurality of the detection plates, atomic magnetometers, cooling pipes, and rubber hoses are provided and are respectively located on the outer side of the moving plate.

[0022] To better achieve the object of the present invention, the present invention also provides a microelectronic magnetic detection method, including the following steps:

[0023] Step 1: The feeding mechanism (not shown in the figure) places the chip on the turntable at the loading position. At the same time, it is detected that the completed chip is already at the unloading position. At this time, the first cylinder is started, and the output end of the first cylinder pushes the mounting plate upward. The mounting plate drives the motor, the first rotating rod, the second rotating rod, the first limiting rod, and the second limiting rod to move upward together until the first limiting rod is inserted into the limiting groove at the unloading position, and the second limiting rod is inserted into the limiting groove at the loading position;

[0024] Step 2: The motor is started. The motor drives the first rotating rod to rotate through the pulley assembly. The first rotating rod drives the first limiting rod to rotate. The first limiting rod thus drives the rotating rod at the unloading position to rotate, causing the turntable to move upward, so that multiple clamping blocks move outward, thereby unlocking the clamping of the chip. The unloading mechanism (not shown in the figure) realizes the unloading of the chip;

[0025] Step 3: At the same time, the motor drives the second rotating rod to rotate through the gear set. The second rotating rod drives the second limiting rod to rotate. The second limiting rod thus drives the rotating rod at the loading position to rotate, causing the turntable to move downward, so that multiple clamping blocks move inward, thereby realizing the clamping of the chip;

[0026] Step 4: After the chip is loaded, the annular conveyor line conveys the chip to the detection position. The second cylinder is started, and the second cylinder pushes the moving plate downward. The atomic magnetometer installed below the moving plate detects the magnetism of the chip;

[0027] Step 5: At the same time, the moving plate drives the L-shaped plate to move downward. The L-shaped plate drives the connecting rod to move downward. The connecting rod drives the slider to slide on the slide rail, thereby realizing the adjustment of the positions of several external atomic magnetometers, so as to realize the magnetic detection of the chip from multiple directions;

[0028] Step 6: At the same time, the fan is started. The fan extracts the external air and blows it to the chip through the cooling pipe, so as to cool the chip from multiple angles;

[0029] Step 7: After the chip detection is completed, the second cylinder resets. The annular conveyor line conveys the chip to the unloading position for unloading operation, and returns to Step 1.

[0030] Compared with the prior art, the beneficial effects of the present invention are as follows: The present invention realizes the function of continuous loading and unloading through the adoption of the clamping mechanism and the locking mechanism, realizes the continuity of detection, and is fully automated throughout the process, eliminating manual operation. While improving work efficiency, it also realizes the stability of operation and reduces the occurrence of errors;

[0031] When detecting the chip, the present invention further expands the detection ability by adopting an array form of atomic magnetometers. After multiple atomic magnetometers are combined into an array, synchronous detection over a large area and at multiple angles can be achieved. When detecting a chip sample, a larger detection area can be covered at one time, greatly improving the detection efficiency.

[0032] Meanwhile, when multiple atomic magnetometers are detecting, the blower starts, and blows air to cool the surface of the chip through cooling pipes at different angles, preventing the temperature of the magnetic core from being uneven during the detection process and improving the stability of magnetic force detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0034] Figure 1 Three-dimensional view of a microelectronic magnetic force detection device according to Embodiment 1 of the present invention Figure 1 ;

[0035] Figure 2 Front view of a microelectronic magnetic force detection device according to Embodiment 1 of the present invention;

[0036] Figure 3 Three-dimensional view of a microelectronic magnetic force detection device according to Embodiment 1 of the present invention Figure 2 ;

[0037] Figure 4 Three-dimensional view of the locking mechanism according to Embodiment 1 of the present invention;

[0038] Figure 5 Cross-sectional schematic view of the clamping mechanism according to Embodiment 1 of the present invention;

[0039] Figure 6 Schematic view of the detection mechanism according to Embodiment 1 of the present invention Figure 1 ;

[0040] Figure 7 Schematic view of the detection mechanism according to Embodiment 1 of the present invention Figure 2 ;

[0041] Figure 8 Three-dimensional view of a microelectronic magnetic force detection device according to Embodiment 3 of the present invention.

[0042] The reference numerals in the drawings respectively represent:

[0043] 1. Equipment main body; 11. Ring conveyor line; 12. Mounting seat; 2. Locking mechanism; 21. Fixing component; 211. Support plate; 212. First cylinder; 213. Slide bar; 214. Mounting plate; 22. Transmission component; 221. Motor; 222. First rotating rod; 223. Pulley assembly; 224. Second rotating rod; 225. Gear set; 226. First limiting rod; 227. Second limiting rod; 3. Clamping mechanism; 31. Through groove; 32. Rotating rod; 33. Limiting groove; 34. Ring sleeve; 35. Spring; 36. Rotating ring; 37. Ring groove; 38. Thread groove; 39. Clamping block; 4. Detection mechanism; 41. Driving component; 411. Vertical rod; 412. Fixed plate; 413. Connecting rod; 414. Connecting plate; 415. Second cylinder; 416. Moving plate; 417. L-shaped plate; 418. Link; 419. Slide block; 420. Slide rail; 42. Detection component; 421. Detection plate; 422. Atomic magnetometer; 423. Cooling pipe; 424. Rubber hose; 425. Fan; 5. Horizontal plate; 6. Positioning hole; 7. Positioning rod; 8. Third cylinder; 9. Cylinder support plate. Detailed implementation mode

[0044] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0045] The "left", "right", "front", "rear", "upper" and "lower" mentioned in the following description are oriented in the perspective direction of the front view.

[0046] Embodiment 1: In some embodiments, please refer to the Figures 1 - 7 drawings of the specification, a microelectronic magnetic detection device includes an equipment main body 1, a locking mechanism 2, a clamping mechanism 3 and a detection mechanism 4;

[0047] The lower part of the equipment main body 1 is connected to the locking mechanism 2, the upper part of the equipment main body 1 is connected to the clamping mechanism 3, and the detection mechanism 4 is arranged on the right side of the equipment main body 1;

[0048] The locking mechanism 2 includes a fixing component 21 for adjusting the height and a transmission component 22 for locking and unlocking. The upper end of the fixing component 21 is connected to the transmission component 22, and the upper end of the transmission component 22 is connected to the clamping mechanism 3;

[0049] The detection mechanism 4 includes a driving component 41 for adjusting the detection distance and a detection component 42 for detecting the magnetic force of the chip. The driving component 41 is connected to the detection component 42, and both the driving component 41 and the detection component 42 are located on the right side of the device main body 1.

[0050] In the present invention, the clamping mechanism 3 and the locking mechanism 2 are adopted to realize the function of continuous loading and unloading, achieving the continuity of detection, and the whole process is automated, eliminating manual operation, improving work efficiency while realizing the stability of operation and reducing the occurrence of errors.

[0051] When detecting the chip in the present invention, the array form of the atomic magnetometer 422 is adopted to further expand the detection ability. After multiple atomic magnetometers 422 are combined into an array, synchronous detection over a large area and at multiple angles can be achieved. When detecting a chip sample, a larger detection area can be covered at one time, greatly improving the detection efficiency.

[0052] At the same time, when multiple atomic magnetometers 422 are detecting, the blower 425 is started, and air is blown through the cooling pipes 423 at different angles to cool the surface of the chip, preventing the temperature of the magnetic core from being uneven during the detection process and improving the stability of the magnetic force detection.

[0053] The device main body 1 includes a circular conveyor line 11 and a mounting base 12. A plurality of mounting bases 12 are provided at equal intervals and are all fixedly installed on the conveyor belt of the circular conveyor line 11.

[0054] The circular conveyor line 11 adopts an existing mature structure, and the circular conveyor line 11 can realize the transmission of materials or articles.

[0055] Principle: Usually powered by an electric motor. After the electric motor reduces the speed and increases the torque through a reducer, the power is transmitted to the drive shaft or drive wheel. Common driving methods include chain drive. The driving mechanism drives the mounting base 12 on the circular conveyor belt to move. The circular conveyor belt generally consists of a straight section and a curved section, providing guidance and support for the mounting base 12 to achieve continuous material transportation.

[0056] The fixing component 21 includes a support plate 211, a first cylinder 212, a sliding rod 213, and a mounting plate 214. The support plate 211 is fixedly installed at the lower end of the circular conveyor line 11. The first cylinder 212 is fixedly installed on the support plate 211. Two sliding rods 213 are provided and are respectively fixedly installed on the left and right sides of the support plate 211. The output end of the first cylinder 212 is fixedly connected to the lower end of the mounting plate 214. The left and right sides of the mounting plate 214 are respectively slidably connected to the two sliding rods 213. The mounting plate 214 is connected to the transmission component 22.

[0057] The transmission assembly 22 includes a motor 221, a first rotating rod 222, a pulley assembly 223, a second rotating rod 224, a gear set 225, a first limiting rod 226, and a second limiting rod 227. The motor 221 is fixedly installed at the upper end of the mounting plate 214. The lower ends of the first rotating rod 222 and the second rotating rod 224 are respectively rotatably connected to the left and right sides of the upper end of the mounting plate 214. The output end of the motor 221 is drivingly connected to the first rotating rod 222 through the pulley assembly 223, and the output end of the motor 221 is drivingly connected to the second rotating rod 224 through the gear set 225. The upper end of the first rotating rod 222 is fixedly connected to the first limiting rod 226, and the upper end of the second rotating rod 224 is fixedly connected to the second limiting rod 227. Both the first limiting rod 226 and the second limiting rod 227 are connected to the clamping mechanism 3.

[0058] Preferably, the first limiting rod 226 and the second limiting rod 227 have the same dimensions. At the same time, the linear velocities of the first limiting rod 226 and the second limiting rod 227 are the same, and the angular velocities of the first limiting rod 226 and the second limiting rod 227 are also the same.

[0059] The clamping mechanism 3 includes a rotating rod 32, a collar 34, a spring 35, a rotating ring 36, and clamping blocks 39. A through groove 31 is formed in the middle of the mounting seat 12. The rotating rod 32 is installed in the through groove 31 and is rotatably connected to the through groove 31. A limiting groove 33 is formed at the bottom of the rotating rod 32. The limiting groove 33 is in limiting sliding connection with both the first limiting rod 226 and the second limiting rod 227. The collar 34 is fixedly installed at the lower end of the through groove 31. One end of the spring 35 is fixedly connected to the upper end of the collar 34, and the other end of the spring 35 is fixedly connected to the lower end of the rotating ring 36. A ring groove 37 is formed on the outer wall of the rotating ring 36. The outer wall of the rotating ring 36 is in sliding connection with the inner wall of the upper end of the mounting seat 12 in the vertical direction. A threaded groove 38 is formed on the inner side wall of the rotating ring 36. The threaded groove 38 is threadedly connected to the upper end of the rotating rod 32. A plurality of clamping blocks 39 are arranged at equal intervals and are all in sliding connection with the ring groove 37. The lower outer side of the clamping block 39 is hinged to the upper end of the mounting seat 12.

[0060] The driving component 41 includes a vertical rod 411, a fixing plate 412, a connecting rod 413, a connecting plate 414, a second cylinder 415, a moving plate 416, an L-shaped plate 417, a connecting rod 418, a slider 419 and a slide rail 420. The vertical rod 411 is located on the right side of the annular conveyor line 11. The lower left end of the vertical rod 411 is fixedly connected to the fixing plate 412. A plurality of connecting rods 413 are fixedly connected between the fixing plate 412 and the connecting plate 414. The second cylinder 415 is fixedly installed at the lower end of the connecting plate 414. The output end of the second cylinder 415 is fixedly connected to the moving plate 416. A plurality of L-shaped plates 417 are provided and are respectively fixedly installed around the moving plate 416. The upper ends of the plurality of L-shaped plates 417 are respectively hinged to one ends of the plurality of connecting rods 418. The other ends of the plurality of connecting rods 418 are respectively hinged to the outer ends of the plurality of sliders 419. A plurality of slide rails 420 are provided and are respectively fixedly installed around the upper end of the connecting plate 414. The plurality of slide rails 420 are respectively slidably connected to the plurality of sliders 419.

[0061] The vertical rod 411, the moving plate 416 and the slider 419 are all connected to the detection component 42.

[0062] The detection component 42 includes a detection plate 421, an atomic magnetometer 422, a cooling pipe 423, a rubber hose 424 and a blower 425. The detection plate 421 is fixedly installed on the outer side of the slider 419. A first notch for fitting and installing the atomic magnetometer 422 is opened at the lower end of the detection plate 421. A second notch for fitting and installing the atomic magnetometer 422 is opened at the lower middle part of the moving plate 416. The blower 425 is fixedly installed at the upper end of the vertical rod 411. The blower 425 is communicated with one end of the rubber hose 424. The other end of the rubber hose 424 is communicated with the cooling pipe 423. The cooling pipe 423 is fixedly installed on the outer side of the detection plate 421.

[0063] The detection plate 421, the atomic magnetometer 422, the cooling pipe 423 and the rubber hose 424 are all provided in plurality and are respectively located on the outer side of the moving plate 416.

[0064] Preferably, the first cylinder 212 and the second cylinder 415 both adopt cylinders with adjustable strokes.

[0065] Embodiment 2: In some embodiments, as Figures 1 - 7 shown, as a preferred embodiment of the present invention, a microelectronic magnetic detection method includes the following steps:

[0066] Step 1: The feeding mechanism (not shown in the figure, using the prior art) places the chip on the turntable 36 at the feeding position. At the same time, it is detected that the completed chip is at the discharging position. At this time, the first cylinder 212 is started, and the output end of the first cylinder 212 pushes the mounting plate 214 upward. The mounting plate 214 drives the motor 221, the first rotating rod 222, the second rotating rod 224, the first limiting rod 226, and the second limiting rod 227 to move upward together until the first limiting rod 226 is inserted into the limiting groove 33 at the discharging position, and the second limiting rod 227 is inserted into the limiting groove 33 at the feeding position;

[0067] Step 2: The motor 221 is started. The motor 221 drives the first rotating rod 222 to rotate through the pulley assembly 223. The first rotating rod 222 drives the first limiting rod 226 to rotate. The first limiting rod 226 thus drives the rotating rod 32 at the discharging position to rotate, causing the turntable 36 to move upward, so that the plurality of clamping blocks 39 move outward, thereby unlocking the clamping of the chip. The discharging mechanism (not shown in the figure, using the prior art) realizes the discharging of the chip;

[0068] Step 3: At the same time, the motor 221 drives the second rotating rod 224 to rotate through the gear set 225. The second rotating rod 224 drives the second limiting rod 227 to rotate. The second limiting rod 227 thus drives the rotating rod 32 at the feeding position to rotate, causing the turntable 36 to move downward, so that the plurality of clamping blocks 39 move inward, thereby realizing the clamping of the chip;

[0069] Step 4: After the chip is loaded, the annular conveyor 11 conveys the chip to the detection position. The second cylinder 415 is started, and the second cylinder 415 pushes the moving plate 416 downward. The atomic magnetometer 422 installed below the moving plate 416 detects the magnetism of the chip;

[0070] Step 5: At the same time, the moving plate 416 drives the L-shaped plate 417 downward. The L-shaped plate 417 drives the connecting rod 418 downward. The connecting rod 418 drives the slider 419 to slide on the slide rail 420, thereby realizing the adjustment of the positions of several outer atomic magnetometers 422, so as to realize the magnetic detection of the chip from multiple directions;

[0071] Step 6: At the same time, the blower 425 is started. The blower 425 extracts the external air and blows it to the chip through the cooling pipe 423, thereby cooling the chip from multiple angles;

[0072] Step 7: After the chip detection is completed, the second cylinder 415 resets. The annular conveyor 11 conveys the chip to the discharging position for discharging operation, and returns to Step 1.

[0073] Embodiment 3: As a preferred embodiment of the present invention, as Figure 8As shown in the figure, on the basis of Embodiment 2, the present invention further includes a cross plate 5, positioning holes 6, positioning rods 7, a third cylinder 8, and a cylinder support plate 9. Positioning holes 6 are provided on the inner sides of multiple mounting seats 12. The cylinder support plate 9 is fixedly connected to the rear side of the support plate 211. The rear side of the cylinder support plate 9 is fixedly connected to the third cylinder 8. The output end of the third cylinder 8 is fixedly connected to the rear side of the cross plate 5. The positioning holes 6 are inserted with the positioning rods 7. There are two positioning rods 7, which are respectively fixedly installed on the left and right sides of the front end of the cross plate 5.

[0074] To prevent the chain of the annular conveyor line 11 from becoming longer and affecting the accuracy after long-term use, when the two mounting seats 12 reach the loading position and the unloading position, the third cylinder 8 is activated. The third cylinder 8 pushes the cross plate 5 to move forward. The cross plate 5 pushes the two positioning rods 7 to move forward, so as to insert into the positioning holes 6 on the inner sides of the two mounting seats 12, realizing the positioning of the mounting seats 12, and making the first limiting rod 226 and the second limiting rod 227 just align with the limiting grooves 33 below the two mounting seats 12, realizing the function of precise positioning.

[0075] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements will not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A microelectronic magnetic force detection device, comprising a device body (1), characterized in that: It also includes a locking mechanism (2), a clamping mechanism (3) and a detection mechanism (4); The lower part of the device body (1) is connected to the locking mechanism (2), the upper part of the device body (1) is connected to the clamping mechanism (3), and the detection mechanism (4) is arranged on the right side of the device body (1); The locking mechanism (2) comprises a fixing component (21) for adjusting the height and a transmission component (22) for locking and unlocking, the upper end of the fixing component (21) is connected to the transmission component (22), and the upper end of the transmission component (22) is connected to the clamping mechanism (3); The detection mechanism (4) comprises a driving component (41) for adjusting the detection distance and a detection component (42) for detecting the magnetic force of the chip; the driving component (41) is connected to the detection component (42); the driving component (41) and the detection component (42) are both located on the right side of the device body (1).

2. The microelectronic magnetic force detection device according to claim 1, characterized in that: The equipment body (1) comprises an annular conveyor line (11) and a mounting seat (12); a plurality of mounting seats (12) are provided at equal intervals and are all fixedly mounted on the conveyor belt of the annular conveyor line (11).

3. The microelectronic magnetic force detection device according to claim 2, characterized in that: The fixing assembly (21) comprises a support plate (211), a first cylinder (212), a sliding rod (213) and a mounting plate (214); the support plate (211) is fixedly mounted on the lower end of the ring conveyor line (11); the first cylinder (212) is fixedly mounted on the support plate (211); two sliding rods (213) are provided and are respectively fixedly mounted on the left and right sides of the support plate (211); the output end of the first cylinder (212) is fixedly connected to the lower end of the mounting plate (214); the left and right sides of the mounting plate (214) are respectively slidably connected to the two sliding rods (213); and the mounting plate (214) is connected to the transmission assembly (22).

4. The microelectronic magnetic force detection device according to claim 3, characterized in that: The transmission assembly (22) comprises a motor (221), a first rotating rod (222), a pulley assembly (223), a second rotating rod (224), a gear set (225), a first limiting rod (226) and a second limiting rod (227); the motor (221) is fixedly mounted on the upper end of the mounting plate (214); the lower ends of the first rotating rod (222) and the second rotating rod (224) are rotatably connected to the left and right sides of the upper end of the mounting plate (214); the motor (221) is fixedly mounted on the upper end of the mounting plate (214); the lower ends of the first rotating rod (222) and the second rotating rod (224) are rotatably connected to the left and right sides of the upper end of the mounting plate (214); ) is transmission-connected to the first rotating rod (222) via a pulley assembly (223); the output end of the motor (221) is transmission-connected to the second rotating rod (224) via a gear set (225); the upper end of the first rotating rod (222) is fixedly connected to the first limiting rod (226); the upper end of the second rotating rod (224) is fixedly connected to the second limiting rod (227); and the first limiting rod (226) and the second limiting rod (227) are both connected to the clamping mechanism (3).

5. The microelectronic magnetic force detection device according to claim 4, characterized in that: The clamping mechanism (3) comprises a rotating rod (32), a ring sleeve (34), a spring (35), a rotating ring (36) and a clamping block (39); a through slot (31) is provided in the middle of the mounting seat (12); the rotating rod (32) is mounted in the through slot (31) and is rotatably connected to the through slot (31); a limiting slot (33) is provided at the bottom of the rotating rod (32); the limiting slot (33) is slidably connected to the first limiting rod (226) and the second limiting rod (227); the ring sleeve (34) is fixedly mounted at the lower end of the through slot (31); the upper end of the ring sleeve (34) is connected to the spring One end of the spring (35) is fixedly connected, and the other end of the spring (35) is fixedly connected to the lower end of the rotating ring (36). The outer wall of the rotating ring (36) is provided with an annular groove (37). The outer wall of the rotating ring (36) is slidably connected to the inner wall of the upper end of the mounting seat (12) in the vertical direction. The inner wall of the rotating ring (36) is provided with a threaded groove (38). The threaded groove (38) is threadedly connected to the upper end of the rotating rod (32). A plurality of clamping blocks (39) are provided at equal intervals and are all slidably connected to the annular groove (37). The outer lower end of the clamping block (39) is hinged to the upper end of the mounting seat (12).

6. The microelectronic magnetic force detection device according to claim 5, characterized in that: The driving assembly (41) comprises a vertical rod (411), a fixed plate (412), a connecting rod (413), a connecting plate (414), a second cylinder (415), a movable plate (416), an L-shaped plate (417), a connecting rod (418), a sliding block (419) and a sliding rail (420). The vertical rod (411) is located on the right side of the circular conveyor line (11). The lower left end of the vertical rod (411) is fixedly connected to the fixed plate (412). The fixed plate (412) and the connecting plate (414) are fixedly connected via a plurality of connecting rods (413). The second cylinder (415) is fixedly installed The second cylinder (415) is mounted on the lower end of the connecting plate (414), the output end of the second cylinder (415) is fixedly connected to the movable plate (416), a plurality of L-shaped plates (417) are provided and are respectively fixedly installed around the movable plate (416), the upper ends of the plurality of L-shaped plates (417) are respectively hinged to one end of a plurality of connecting rods (418), the other ends of the plurality of connecting rods (418) are respectively hinged to the outer ends of a plurality of sliding blocks (419), a plurality of sliding rails (420) are provided and are respectively fixedly installed around the upper end of the connecting plate (414), and the plurality of sliding rails (420) are respectively slidably connected to the plurality of sliding blocks (419).

7. The microelectronic magnetic force detection device according to claim 6, characterized in that: The vertical rod (411), the movable plate (416), and the sliding block (419) are all connected to the detection component (42).

8. The microelectronic magnetic force detection device according to claim 7, characterized in that: The detection assembly (42) comprises a detection plate (421), an atomic magnetometer (422), a cooling pipe (423), a hose (424) and a fan (425); the detection plate (421) is fixedly mounted on the outer side of the slider (419); a first notch for mounting the atomic magnetometer (422) is provided at the lower end of the detection plate (421); a second notch for mounting the atomic magnetometer (422) is provided at the middle lower end of the movable plate (416); the fan (425) is fixedly mounted on the upper end of the vertical pole (411); the fan (425) is connected to one end of the hose (424); the other end of the hose (424) is connected to the cooling pipe (423); and the cooling pipe (423) is fixedly mounted on the outer side of the detection plate (421).

9. The microelectronic magnetic force detection device according to claim 8, characterized in that: The detection plate (421), the atomic magnetometer (422), the cooling pipe (423), and the rubber hose (424) are all provided in plurality and are respectively located outside the movable plate (416).

10. A microelectronic magnetic force detection method, used in the microelectronic magnetic force detection device according to claim 9, characterized in that: The following steps are involved: Step 1: The loading mechanism places the chip on the rotating ring (36) at the loading position, and at the same time, the chip that has been detected is at the unloading position. At this time, the first cylinder (212) is started, and the output end of the first cylinder (212) pushes the mounting plate (214) to move upward, and the mounting plate (214) drives the motor (221), the first rotating rod (222), the second rotating rod (224), the first limiting rod (226), and the second limiting rod (227) to move upward together until the first limiting rod (226) is inserted into the limiting groove (33) at the unloading position, and the second limiting rod (227) is inserted into the limiting groove (33) at the loading position; Step 2: The motor (221) is started, and the motor (221) drives the first rotating rod (222) to rotate through the pulley assembly (223), and the first rotating rod (222) drives the first limiting rod (226) to rotate, and the first limiting rod (226) thereby drives the rotating rod (32) of the material discharge position to rotate, so that the rotating ring (36) moves upward, thereby causing the plurality of clamping blocks (39) to move outward, thereby unlocking the clamping of the chip, and the chip is discharged by the discharge mechanism; Step 3: At the same time, the motor (221) drives the second rotating rod (224) to rotate through the gear set (225), and the second rotating rod (224) drives the second limiting rod (227) to rotate, and the second limiting rod (227) thereby drives the rotating rod (32) of the loading position to rotate, so that the rotating ring (36) moves downward, thereby causing the multiple clamping blocks (39) to move inward, thereby clamping the chip; Step 4: After the chip is loaded, the ring conveyor line (11) conveys the chip to the detection position, the second cylinder (415) is started, the second cylinder (415) pushes the moving plate (416) to move downward, and the atomic magnetometer (422) installed below the moving plate (416) detects the magnetism of the chip; Step 5: At the same time, the moving plate (416) drives the L-shaped plate (417) to move downward, the L-shaped plate (417) drives the connecting rod (418) to move downward, and the connecting rod (418) drives the slider (419) to slide on the slide rail (420), thereby adjusting the positions of several outer atomic magnetometers (422), thereby realizing magnetic detection of the chip from multiple directions; Step 6: At the same time, the fan (425) is started, and the fan (425) draws air from the outside and blows it toward the chip through the cooling pipe (423), thereby cooling the chip from multiple angles; Step 7: After the chip detection is completed, the second cylinder (415) is reset, and the circular conveyor line (11) conveys the chip to the unloading position for unloading operation, and returns to step 1.

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