Method and device for adjusting dispatching priority

Abstract

The invention provides a dispatching priority adjusting method and device. The dispatching priority adjusting method comprises the steps that at least two weight factors influencing dispatching priorities are acquired; according to the at least two weight factors, at least one weight group influencing the dispatching priority is determined, and each weight group comprises at least one weight factor; determining a target weight group corresponding to the target machine, wherein the target weight group is any weight group in the at least one weight group; and adjusting the dispatching priority of the to-be-dispatched LOT in the target machine according to the target weight group. The method and the device for adjusting the dispatching priority provided by the invention have the effects that the dispatching priority adjustment takes effect immediately, the development period of the dispatching priority adjustment is shortened, the production efficiency of a machine can be improved by dispatching according to the adjusted dispatching priority, the waiting time of a to-be-dispatched LOT is shortened, the possibility of LOT Over Qtime is reduced, and the working efficiency of the machine is improved. Therefore, the semiconductor manufacturing automation efficiency is improved, and the product yield can be improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and particularly to a method and device for adjusting dispatching priorities. Background Art

[0002] During the semiconductor processing, according to the Real Time Dispatch (RTD) application, the dispatching order of LOTs on the production line is adjusted. The RTD application can first screen the LOTs eligible for dispatching through a YES-NO module based on specific conditions, and then determine the dispatching order of the LOTs eligible for dispatching according to the sorting influencing factors in the sorting module. Among them, the sorting influencing factors can be LOT product attributes, such as LOT waiting time, LOT priority, and the interval time Q-TIME of different process steps used for processing wafers. Each LOT includes at least one wafer.

[0003] Suppose the LOT Status is the specific condition of the YES-NO module. If the LOT Status is an Active LOTStatus, the screening result of the YES-NO module is YES. If it is a Hold LOTStatus, the screening result of the YES-NO module is NO. The LOTs to be processed in the machine can be identified by an encoding (ID), such as Figure 1 shown in (a) of [reference], record the LOTID of the LOTs to be processed, and record the LOT status of each LOTID. Among the LOTs to be processed, the first group of LOTs eligible for dispatching is obtained through the screening of the YES-NO module. The LOTIDs of the first group of LOTs include KA0001, KA0002, KA0003, KA0005, and KA0007.

[0004] As Figure 1 shown in (b) of [reference], among the first group of LOTs, the second group of LOTs with the highest LOT priority is screened out through the sorting module. The LOTIDs of the second group of LOTs include KA0001 and KA0007. Since the LOT priorities corresponding to KA0001 and KA0007 are the same and the dispatching order cannot be determined, as Figure 1 shown in (c) of [reference], among the second group of LOTs, the sorting result of the LOT waiting time from large to small is obtained through the sorting module again. Thus, the dispatching order in the second group of LOTs is successively: KA0007 and KA0001.

[0005] In the related art, if the dispatching priority in the RTD application is adjusted, corresponding program codes need to be redeveloped, such as Figure 2As shown in the figure, the development process includes the user submitting a dispatching requirement, developing new program code according to the dispatching requirement, conducting user-acceptable UAT testing on the new program code, and installing and running the new program code.

[0006] Since the sorting module includes many sorting influencing factors, even if the sorting rules are fine-tuned, the above development process still needs to be repeated, resulting in a long development cycle and low development efficiency. In the above development process, if there are deviations in the test results of UAT testing, the RTD application program needs to be carried out again according to the above development process, resulting in an extended development cycle. However, in the semiconductor processing process, the production situation is changeable. If the development cycle is long, it may lead to problems such as LOT exceeding Over Q-TIME, loss of machine tool production capacity, and slow product turnover rate, which in turn leads to a reduction in the factory transfer efficiency or the product quality yield rate. Summary of the Invention

[0007] The present application provides a method and device for adjusting dispatching priorities, which can solve the problem in the prior art that due to the long development cycle, it is unable to adapt to the changeable production scenarios in the factory, thus resulting in a reduction in the factory operation efficiency or the product quality yield rate.

[0008] In a first aspect, a method for adjusting dispatching priorities is provided, including: obtaining at least two weight factors that affect dispatching priorities; determining at least one weight group that affects dispatching priorities according to the at least two weight factors, each weight group including at least one weight factor; determining a target weight group corresponding to a target machine tool, the target weight group being any one of the at least one weight group; and adjusting the dispatching priority of the LOT to be dispatched in the target machine tool according to the target weight group.

[0009] In some embodiments of the present application, the weight factor is any one of the following: LOT type, LOT priority, process recipe, moving target, monitoring time limit, LOT waiting time, and the interval time Q-TIME of different process steps used for processing wafers; wherein, the LOT to be dispatched includes a preset number of wafers.

[0010] In some embodiments of the present application, the obtaining at least two weight factors that affect dispatching priorities includes: in response to a first addition operation by the user on a first configuration page, obtaining at least two weight factors that affect dispatching priorities; and displaying the at least two weight factors on the first configuration page.

[0011] In some embodiments of the present application, after displaying the at least two weight factors on the first configuration page, the method further includes: on the first configuration page, in response to a second addition operation of the user for the at least weight factors, obtaining the factor parameter meanings corresponding to the at least weight factors; and displaying the factor parameter meanings corresponding to the at least two weight factors on the first configuration page.

[0012] In some embodiments of the present application, the determining at least one weight group that affects the dispatching priority according to the at least two weight factors includes: in response to a third addition operation of the user for the second configuration page, establishing at least one weight group that affects the dispatching priority; on the second configuration page, in response to a fourth addition operation of the user for any one of the at least one weight groups, obtaining the group name of the any one weight group, the weight factors included in the any one weight group, the weight value determination rule, and the weight value obtained when the weight value determination rule is satisfied; and displaying the group name of the at least one weight group, and the weight factors included in any one weight group, the weight value determination rule, and the weight value obtained when the weight value determination rule is satisfied on the second configuration page.

[0013] In some embodiments of the present application, after obtaining the weight factors included in the any one weight group, the weight value determination rule, and the weight value obtained when the weight value determination rule is satisfied in response to a fourth addition operation of the user for any one of the at least one weight groups on the second configuration page, the method further includes: on the second configuration page, in response to a fifth addition operation of the user for the weight value determination rule, obtaining the weight rule meaning of the weight value determination rule; and displaying the weight rule meaning of the weight value determination rule on the second configuration page.

[0014] In some embodiments of the present application, after obtaining the weight factors included in the any one weight group, the weight value determination rule, and the weight value obtained when the weight value determination rule is satisfied in response to a fourth addition operation of the user for any one of the at least one weight groups on the second configuration page, the method further includes: on the second configuration page, in response to a seventh addition operation of the user for the weight factors included in the any one weight group, configuring the parameter enabling status for the weight factors included in the any one weight group, where the parameter enabling status corresponding to the weight factors included in the any one weight group is yes.

[0015] In some embodiments of the present application, adjusting the dispatching priority of the LOTs to be dispatched in the target machine tool according to the target weight combination includes: for the LOTs to be dispatched in the target machine tool, obtaining the factor parameters corresponding to the weight factors included in the target weight combination; according to the weight value determination rule corresponding to the weight factors included in the target weight combination and the factor parameters corresponding to the weight factors included in the target weight combination, obtaining the factor weight values of the weight factors included in the target weight combination; according to the factor weight values of the weight factors included in the target weight combination, obtaining the group weight value of the LOTs to be dispatched; and determining the dispatching priority of the LOTs to be dispatched in the target machine tool according to the numerical size order of the group weight values.

[0016] In some embodiments of the present application, determining the target weight combination corresponding to the target machine tool includes: in response to a sixth addition operation by the user on the third configuration page, configuring corresponding weight combinations for at least one machine tool on the production line; on the third configuration page, generating and displaying a machine tool weight matching table for storing the corresponding relationships between the at least one machine tool and the at least one weight combination; and determining the target weight combination corresponding to the target machine tool according to the machine tool weight matching table, where the target machine tool is the machine tool whose dispatching priority is to be adjusted among the at least one machine tool.

[0017] In a second aspect, a device for adjusting the dispatching priority is provided, including: an obtaining module, a first determining module, a second determining module, and an adjusting module, where the first obtaining module is used to obtain at least two weight factors affecting the dispatching priority; the first determining module is used to determine at least one weight combination affecting the dispatching priority according to the at least two weight factors, and each weight combination includes at least one weight factor; the second determining module is used to determine the target weight combination corresponding to the target machine tool, and the target weight combination is any one of the at least one weight combination; and the adjusting module is used to adjust the dispatching priority of the LOTs to be dispatched in the target machine tool according to the target weight combination.

[0018] In a third aspect, an electronic device is provided, including: a processor and a memory, where the memory is used to store a computer program, and the processor is used to call and run the computer program stored in the memory to execute the method as described in the first aspect or its various implementation manners.

[0019] In a fourth aspect, a computer-readable storage medium is provided for storing a computer program, and the computer program causes a computer to execute the method as described in the first aspect or its various implementation manners.

[0020] In a fifth aspect, a computer program product is provided, including computer program instructions, and the computer program instructions cause a computer to execute the method as described in the first aspect or its various implementation manners.

[0021] In a sixth aspect, a computer program is provided that causes a computer to execute the method in the first aspect or its various implementations.

[0022] The beneficial effects that the embodiments of the present application may bring include, but are not limited to: In order to adjust the dispatching priority from a code development method to a code-free method, by adjusting the weight factor, the weight value, and the weight factors included in the weight group, the adjustment of the dispatching priority can be achieved immediately without the need for developers to access, and it can directly act on the production line, avoiding the use of traditional software development processes. The development cycle for adjusting the dispatching priority is reduced. Dispatching according to the adjusted dispatching priority can improve the production efficiency of the machine tools, reduce the waiting time of the lots to be dispatched, reduce the possibility of LOT Over Qtime, thereby improving the automation efficiency of semiconductor manufacturing, and can also improve the product yield rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0024] Figure 1 is a flowchart for determining the dispatching order in the prior art shown in some embodiments of the present application;

[0025] Figure 2 is a flowchart for adjusting the dispatching priority in the prior art shown in some embodiments of the present application;

[0026] Figure 3 is a flowchart for the method of adjusting the dispatching priority shown in some embodiments of the present application;

[0027] Figure 4 is a schematic diagram of the first configuration page shown in some embodiments of the present application;

[0028] Figure 5 is a schematic diagram of the second configuration page shown in some embodiments of the present application;

[0029] Figure 6 is a schematic diagram of the architecture of the method for adjusting the dispatching priority shown in some embodiments of the present application;

[0030] Figure 7 is a block diagram of the structure of the device for adjusting the dispatching priority shown in some embodiments of the present application;

[0031] Figure 8Schematic block diagram of an electronic device according to some embodiments of the present application. Detailed implementation

[0032] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the protection scope of the present application.

[0033] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and do not necessarily need to be used to describe a specific order or sequence. It should be understood that such data can be interchanged under appropriate circumstances so that the embodiments of the present application described here can be implemented in an order different from those illustrated or described here.

[0034] In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or server that includes a series of steps or units does not necessarily have to be limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products, or devices.

[0035] As described above, in the related art, if the dispatching priority in the RTD application is adjusted, it is necessary to re-develop the corresponding program code, which may lead to a long development cycle and low development efficiency. With the continuous development of semiconductor processing technology, the Q-TIME is getting shorter and shorter, and the demand for rapid response to adjust the dispatching priority is also getting higher and higher.

[0036] However, in the semiconductor processing process, the production situation is changeable. If the development cycle is long and the demand for rapid response cannot be met, it may lead to Q-TIME timeout, which in turn leads to a decrease in the product yield rate. Moreover, since only professionals can re-develop the corresponding program code, front-line employees cannot adjust the dispatching priority immediately, increasing the labor cost of adjusting the dispatching priority, and thus resulting in a high development cost for adjusting the dispatching priority in the RTD application.

[0037] To solve the above technical problems, the inventive concept of this application is as follows: convert the influencing factors in the semiconductor processing process into weight factors, form a weight group according to the weight factors, obtain the weight value of the target weight group corresponding to the LOT to be dispatched, and use the sorting module in the RTD application program to sort the weight values of the target weight group, so as to adjust the dispatching priority of the LOT to be dispatched. In this way, in order to convert the method of adjusting the dispatching priority from the code development method to the code-free method, by adjusting the weight factors and the weight group, the dispatching priority of the LOT to be dispatched can be adjusted immediately, reducing the development cycle of adjusting the dispatching priority. Dispatching according to the adjusted dispatching priority can reduce the possibility of Q-TIME timeout of the LOT to be dispatched, thereby improving the automation efficiency of semiconductor manufacturing and the product yield rate.

[0038] The following will take the execution entity as the device for adjusting the dispatching priority as an example, and make an exemplary description of the method for adjusting the dispatching priority provided in the embodiments of this application. As Figure 3 shown, the method for adjusting the dispatching priority provided in the embodiments of this application may include steps S301 to S304.

[0039] Step S301: Obtain at least two weight factors that affect the dispatching priority.

[0040] Generally, the number of LOTs to be dispatched processed by a machine tool at the same time is limited, and the number processed at the same time may be 1, 2, or 3. If the number of LOTs to be dispatched assigned to a machine tool is greater than the number processed at the same time, then it is necessary to determine the dispatching priority of multiple LOTs to be dispatched in order to determine the dispatching order of multiple LOTs to be dispatched.

[0041] In the embodiments of this application, the weight factors that affect the dispatching priority are any one of the following: LOT type, LOT priority, process recipe, movement target, monitoring time limit, LOT waiting time, and the interval time Q-TIME of different process steps used for processing wafers; wherein, the LOT to be dispatched includes a preset number of wafers. That is, a batch composed of a preset number of wafers is called a LOT. For example, 1 wafer forms a LOT, 8 wafers form a LOT, 12 wafers form a LOT, and 25 wafers form a LOT.

[0042] In the embodiments of this application, the weight factors that affect the dispatching priority may also be site production capacity balance, shipping urgency, or the distribution of multiple machine tools on the production line, etc.

[0043] In the embodiments of the present application, the weight factor can be global and applied to all production lines, such as Q-TIME, in order to avoid reducing the yield rate and product quality. The weight factor can also be local and applied to some production lines. For example, when shipments are tight, the LOTs to be dispatched that are close to the key points of the shipping station need to be processed first. When shipments are not tight, the processing is carried out with the aim of the fastest processing speed of the LOTs to be dispatched.

[0044] In the embodiments of the present application, the implementation method of obtaining at least two weight factors that affect the dispatching priority can be: input through a configuration page, input through an external device, or transmitted by wire or wirelessly. In the embodiments of the present application, the obtaining method of the weight factor is not limited.

[0045] In some implementable ways, the above step S301 may include: in response to a first addition operation of the user on the first configuration page, obtaining at least two weight factors that affect the dispatching priority; and displaying at least two weight factors on the first configuration page.

[0046] In some implementable ways, after displaying at least two weight factors on the first configuration page, the following is further included: on the first configuration page, in response to a second addition operation of the user on at least the weight factors, obtaining the factor parameter meanings corresponding to at least the weight factors; and displaying the factor parameter meanings corresponding to at least two weight factors on the first configuration page. Among them, the factor parameter meanings can explain the weight factors in Chinese, English, characters or other ways. By displaying the factor parameter meanings, the actual meanings of the weight factors are intuitively shown, which can avoid the subsequent determined weight groups not meeting the actual requirements, thereby reducing the development cycle of adjusting the dispatching priority and improving the automation efficiency of semiconductor manufacturing and the product yield rate.

[0047] In the embodiments of the present application, before obtaining at least two weight factors that affect the dispatching priority through the first configuration page, the following is further included: developing the first configuration page. As Figure 4 shown, the first configuration page may include a weight factor name input box and a factor parameter meaning input box; the first configuration page may also include function buttons such as addition, update, serial number, and query; the first configuration page may also include a weight factor display area, and the weight factor display area is used to display the serial numbers, names, and factor parameter meanings of all weight factors.

[0048] It can be understood that the first configuration page may also include a page title, page settings, user permissions, etc., in order to improve the efficiency and convenience of user input.

[0049] In the embodiments of the present application, the first addition operation can be a selective operation or an input operation. The first addition operation can include at least one identical sub-operation and can also include at least one non-identical sub-operation. In the embodiments of the present application, the number of sub-operations corresponding to the first addition operation is not limited.

[0050] In one example, first, in the first configuration page, in response to an input click operation on the add function button, a preset factor set is displayed. Then, in response to a click operation on the weight factor in the preset factor set, at least two weight factors affecting the dispatch priority are obtained. Each time a click operation on the weight factor in the preset factor set is responded to, one weight factor is added, and the click operation is repeated until at least two weight factors affecting the dispatch priority are obtained. Alternatively, displaying the preset factor set means displaying the weight factors in the preset factor set, the check box corresponding to each weight factor, and the check end function button. Each time a click operation on the weight factor in the preset factor set is responded to, one weight factor is selected, and after the check is completed, in response to the check end function button, at least two weight factors affecting the dispatch priority are obtained.

[0051] In another example, first, in the first configuration page, in response to an input click operation on the add function button, a factor input interface is displayed. Then, in response to a factor addition operation on the factor input interface, at least two weight factors affecting the dispatch priority are obtained. The factor addition operation is used to receive the name of the weight factor input by the user.

[0052] In one implementation, according to the actual acquisition process of at least two weight factors, the weight factors are instantaneously updated and displayed on the first configuration page. In this way, the user can be prompted with the weight factors that have been obtained currently, so as to avoid the user repeating the first addition operation and improve the efficiency of obtaining at least two weight factors.

[0053] In this way, front-line production personnel can obtain at least two weight factors affecting the dispatch priority through the first configuration page, which can reduce the professional requirements for operators adjusting the dispatch priority and can also improve the convenience and adjustment speed of adjusting the dispatch priority.

[0054] Step S302: Determine at least one weight factor group affecting the dispatch priority according to at least two weight factors.

[0055] In the embodiments of the present application, each weight factor group includes at least one weight factor. Since the influence degrees of different weight factors on different machines are different, it is possible that several weight factors can be used on the same machine or of different types. Reconstructing and combining at least two weight factors to determine at least one weight factor group is convenient for improving the speed of configuring weight factors for the machine.

[0056] It should be noted that the weight factors included in the weight group are not repeated. Different weight groups can have the same weight factors.

[0057] In the embodiments of the present application, the implementation manner of determining at least one weight group that affects the dispatching priority can be: input through a configuration page, input through an external device, or transmitted via wire or wireless. In the embodiments of the present application, the determination manner of the weight group is not limited.

[0058] In some implementable manners, the above step S302 may include: in response to a user's third addition operation on the second configuration page, establishing at least one weight group that affects the dispatching priority; on the second configuration page, in response to a user's fourth addition operation on any one of the at least one weight groups, obtaining the group name of any one weight group, the weight factors included in any one weight group, the weight value determination rule, and the weight value obtained when the weight value determination rule is satisfied; and displaying on the second configuration page the group names of the at least one weight group, and the weight factors included in any one weight group, the weight value determination rule, and the weight value obtained when the weight value determination rule is satisfied.

[0059] In some implementable manners, after the above-mentioned operation of obtaining, on the second configuration page, in response to a user's fourth addition operation on any one of the at least one weight groups, the weight factors included in any one weight group, the weight value determination rule, and the weight value obtained when the weight value determination rule is satisfied, it further includes: on the second configuration page, in response to a user's fifth addition operation on the weight value determination rule, obtaining the weight rule meaning of the weight value determination rule; and displaying on the second configuration page the weight rule meaning of the weight value determination rule. Among them, the weight rule meaning can explain the weight value in Chinese, English, characters, etc.

[0060] It can be understood that for a weight value determination rule that cannot be intuitively understood, the weight rule meaning can be obtained, and for a weight value determination rule that can be intuitively understood, the weight rule meaning may not be obtained. In the embodiments of the present application, whether to obtain the weight rule meaning is not limited.

[0061] In some implementable manners, after the above-mentioned operation of obtaining, on the second configuration page, in response to a user's fourth addition operation on any one of the at least one weight groups, the weight factors included in any one weight group, the weight value determination rule, and the weight value obtained when the weight value determination rule is satisfied, it further includes: on the second configuration page, in response to a user's seventh addition operation on the weight factors included in any one weight group, configuring the parameter enabling state for the weight factors included in any one weight group. Wherein, the parameter enabling state corresponding to the weight factors included in any one weight group is yes.

[0062] It can be understood that the weight group can be fine-tuned through the parameter enabling state to facilitate the temporary adjustment of the weight group. In different weight groups, the same weight factor can correspond to different weight value determination rules. For example, Figure 4 as shown, the weight factor can default the configuration parameter enabling state to be "yes". The configuration parameter enabling state can convert the parameter enabling state "yes" to "no", and can also convert the parameter enabling state "no" to "yes".

[0063] In the embodiment of the present application, as shown in Table 1, it includes two weight groups EqpGrp_Factor1 and EqpGrp_Factor2. The weight factors of EqpGrp_Factor1 include Factor1, Factor2, Factor3, Factor4, and Factor5, and the weight factors of EqpGrp_Factor2 include Factor1, Factor2, Factor3, Factor4, and Factor5. The parameter enabling state of each weight factor in the two weight groups is "yes". Table 1 also includes the weight values, weight value determination rules, and weight rule meanings of each weight factor in the two weight groups.

[0064] Table 1 Example Table of Weight Groups

[0065]

[0066] In the embodiment of the present application, before the above step S302 determines at least one weight group that affects the dispatching priority, it further includes: developing a second configuration page. For example, Figure 5 as shown, the second configuration page includes a weight group drop-down selection box (for selecting an existing weight group or adding a weight group), a weight value determination rule (factor condition) input box, a weight value (factor value) input box obtained when the weight value determination rule is satisfied, a weight rule meaning input box, and a weight factor drop-down selection box.

[0067] It can be understood that the first configuration page and the second configuration page can be independent window pages and are triggered to be displayed through different triggering methods. On the first configuration page, the second configuration page can be displayed in response to a page switching operation. Similarly, on the second configuration page, the first configuration page can be displayed in response to a page switching operation.

[0068] In the embodiment of the present application, the third addition operation and the fourth addition operation can be selective operations or input operations. The third addition operation and the fourth addition operation can include at least one same sub-operation and can also include at least one not completely same sub-operation. In the embodiment of the present application, the number of sub-operations corresponding to the third addition operation and the fourth addition operation is not limited.

[0069] In an embodiment of the present application, in combination with the page content of the second configuration page, at least one weight group is established, and the group name of any one of the at least one weight groups, the weight factors included, the weight value determination rule, and the weight value obtained when the weight value determination rule is satisfied are determined.

[0070] In an embodiment of the present application, the group name is used to distinguish different weight groups and can be composed of one or more of English, Chinese, or symbols. The weight value determination rule is used to determine the weight values of the respective weight factors in the weight group according to the factor parameters of the LOT to be dispatched. The weight values obtained when the factor parameters of the LOT to be dispatched satisfy the weight value determination rule (such as -50, -200, 100, 200, 400, 500, etc.), and the weight values obtained when the factor parameters of the LOT to be dispatched do not satisfy the weight value determination rule (0).

[0071] In this way, the front-line production personnel can determine at least one weight group affecting the dispatching priority through the second configuration page, which can reduce the professional requirements for the operators adjusting the dispatching priority and can also improve the convenience and adjustment speed of adjusting the dispatching priority.

[0072] Step S303, determine the target weight group corresponding to the target machine tool.

[0073] In an embodiment of the present application, the target weight group is any one of the at least one weight groups. Each machine tool corresponds to a target weight group at the same moment.

[0074] In an embodiment of the present application, the above step S303 may include, in response to a sixth addition operation by the user on the third configuration page, configuring the corresponding weight group for at least one machine tool on the production line; generating and displaying a machine tool weight matching table on the third configuration page; and determining the target weight group corresponding to the target machine tool according to the machine tool weight matching table. Among them, the target machine tool is the machine tool whose dispatching priority is to be adjusted among the at least one machine tools. The machine tool weight matching table is used to store the corresponding relationship between at least one machine tool and at least one weight group. Each machine tool corresponds to a weight group.

[0075] Exemplarily, as shown in Table 2, the machine tool weight matching table includes the machine tool number and the group name of the weight group.

[0076] Table 2 Machine Tool Weight Matching Table

[0077] Machine Station Number Group Name of Weight Group EQP1 EqpGrp_Factor1 EQP2 EqpGrp_Factor1 EQP3 EqpGrp_Factor1 EQP4 EqpGrp_Factor1 EQP5 EqpGrp_Factor2 EQP6 EqpGrp_Factor3 EQP7 EqpGrp_Factor4

[0078] In an embodiment of the present application, the implementation manner of determining the target weight group corresponding to the target machine tool may be: input through the configuration page, input through an external device, or transmitted by wire or wirelessly. In an embodiment of the present application, the determination method of the target weight group corresponding to the target machine tool is not limited.

[0079] In the embodiment of the present application, before determining the target weight group corresponding to the target machine tool, the following steps are further included: developing a third configuration page. In the embodiment of the present application, the sixth addition operation can be a selective operation or an input operation. The sixth addition operation can include at least one identical sub-operation and can also include at least one non-identical sub-operation. In the embodiment of the present application, the number of sub-operations corresponding to the sixth addition operation is not limited.

[0080] In this way, by configuring corresponding weight groups for at least one machine tool on the production line, generating and displaying a machine tool weight matching table, the speed of determining the target weight group corresponding to the target machine tool is improved, and further the adjustment speed of the dispatching priority is improved.

[0081] Step S304, according to the target weight group, adjust the dispatching priority of the LOTs to be dispatched in the target machine tool.

[0082] In the embodiment of the present application, the above step S304 may include: for the LOTs to be dispatched in the target machine tool, obtain the factor parameters corresponding to the weight factors included in the target weight group; according to the weight value determination rule corresponding to the weight factors included in the target weight group and the factor parameters corresponding to the weight factors included in the target weight group, obtain the factor weight values of the weight factors included in the target weight group; according to the factor weight values of the weight factors included in the target weight group, obtain the group weight value of the LOTs to be dispatched; according to the numerical size order of the group weight values, determine the dispatching priority of the LOTs to be dispatched in the target machine tool.

[0083] In the embodiment of the present application, according to the numerical size order of the group weight values, determining the dispatching priority of the LOTs to be dispatched in the target machine tool can be implemented by using the sorting module in the RTD application program.

[0084] Exemplarily, as shown in Table 3, the group name of the target weight group is EqpGrp_Factor1, the weight factors include Factor1, Factor2, Factor3, Factor4, and Factor5, and the LOTs to be dispatched in the target machine tool include 3 batches, and the LOT IDs are LOT1, LOT2, and LOT3 respectively. When the factor parameters conform to the weight value determination rule, the weight value corresponding to Factor1 is 100, the weight value corresponding to Factor2 is 200, the weight value corresponding to Factor3 is 300, the weight value corresponding to Factor4 is 100, and the weight value corresponding to Factor5 is 100.

[0085] Specifically, the factor weight values of the weight factors corresponding to LOT1 are 100, 200, 0, 100, and 0 in sequence. The factor weight values of the weight factors corresponding to LOT2 are 0, 200, 300, 0, and 0 in sequence. The factor weight values of the weight factors corresponding to LOT3 are 100, 0, 0, 100, and 100 in sequence. By calculation, the group weight value of LOT1 can be obtained as 400, the group weight value of LOT2 is 500, and the group weight value of LOT3 is 300. After sorting the three group weight values, the dispatching priority of the LOT to be dispatched in the target machine tool can be adjusted to LOT2, LOT1, and LOT3.

[0086] Table 3 Weight Value Table of the Target Weight Group

[0087] Group Name Weighting Factor Weight Value Weight Value (LOT1) Weight Value (LOT2) Weight Value (LOT3) EqpGrp_Factor1 Factor1 100 100 0 100 EqpGrp_Factor1 Factor2 200 200 200 0 EqpGrp_Factor1 Factor3 300 0 300 0 EqpGrp_Factor1 Factor4 100 100 0 100 EqpGrp_Factor1 Factor5 100 0 0 100

[0088] In some implementation manners, after adjusting the dispatching priority of the LOT to be dispatched in the target machine tool, the adjusted dispatching priority of the LOT to be dispatched in the target machine tool can also be displayed. As shown in Table 4, the dispatching order table of the LOT to be dispatched includes the serial number of the RTD application program, LODID, and the group weight value, and determines the dispatching priority in the order from largest to smallest of the group weight value, constituting the dispatching order table of the LOT to be dispatched.

[0089] Table 4 Dispatching Order Table of the LOT to be Dispatched

[0090] Serial Number LODID Group Weight Value 1 A001 5098.6 2 A002 4369.1 3 A003 4325.8 4 A004 4297.5 5 A005 4288.4 6 A006 4285.7 7 A007 4284.4

[0091] In the embodiment of the present application, as Figure 6 shown, the natural attributes of the LOT and the macro attributes on various production lines are input into the user configuration interface (including the first configuration page, the second configuration page, and the third configuration page). For the three machine tools, the machine tool IDs are EQPID1, EQPID2, and EQPID3 respectively. The weight groups corresponding to EQPID1 include weight group A, weight group B, and weight group C. Among them, the group enabling status of weight group A is "enabled", and the parameter enabling status of weight group B and weight group C is "not enabled". EQPID2 has the same corresponding weight groups as EQPID1, and the group enabling status is also the same. The weight group corresponding to EQPID3 includes weight group D, and the group enabling status of weight group D is yes. After determining the weight groups in the "enabled" group enabling status corresponding to the machine tool ID, determine the group weight value of the LOT to be dispatched, and determine the dispatching order of the LOT to be dispatched according to the group weight value.

[0092] Specifically, weight group A at least includes weight factor 1 (weight value: 500), weight factor 2 (weight value: 200), weight factor 3 (weight value: 100), and weight factor 4 (weight value: 300). Weight group B at least includes weight factor 1 (weight value: 50), weight factor 2 (weight value: 80), weight factor 3 (weight value: 600), and weight factor 4 (weight value: 70). Weight group C at least includes weight factor 1 (weight value: 100), weight factor 2 (weight value: 80), weight factor 3 (weight value: 300), and weight factor 4 (weight value: 700).

[0093] It can be understood that one weight group applies to one production scenario. Configuring multiple weight groups for each machine is equivalent to configuring multiple backup plans for the machine. When the production scenario changes, different weight groups can be called for the machine to quickly switch the dispatching rules. For example, weight group A can maximize output, and weight group B can achieve the shortest production cycle. If a certain machine has a high load on a certain production line segment, then weight group A that maximizes output can be called; if a certain production line segment has a low load, then weight group B with the shortest production cycle can be called. That is to say, at the same moment, machine A can use the plan that maximizes output, and machine B can use the plan with the shortest production cycle.

[0094] It should be noted that if the parameter enable status of the weight factor in the weight group, it can be set to yes or no. In the case that a certain weight factor in the weight group is not enabled, then at the same moment, it takes effect for all machines using this weight group.

[0095] It can be understood that by adjusting the dispatching priority of the LOTs to be dispatched in the target machine, the dispatching priorities of all LOTs to be dispatched in the target machine can be determined, and the dispatching priorities of some LOTs to be dispatched in the target machine can also be determined. Every time a new batch of LOTs to be dispatched is sent into the target machine, the dispatching priorities of some LOTs to be dispatched in the target machine are re - determined, where the batch numbers of some LOTs to be dispatched can be values such as 1, 2, and 3.

[0096] In the embodiments of the present application, the dispatching priority of the LOTs to be dispatched in the target machine adjusted according to the target weight group can directly act on the production line. If the current target weight group corresponding to the target machine no longer meets the user's requirements, the user can independently debug the weight group corresponding to the target machine and re - determine the target weight group.

[0097] The beneficial effects that may be brought by the embodiments of the present application include, but are not limited to: In order to adjust the dispatching priority from the code development method to the code-free method, by adjusting the weight factors, weight values, and the weight factors included in the weight group, the dispatching priority can be adjusted without the access of developers, and it can directly act on the production line, avoiding the adoption of traditional software development processes. The development cycle of adjusting the dispatching priority is reduced. Dispatching according to the adjusted dispatching priority can improve the production efficiency of the machine tool, reduce the waiting time of the LOT to be dispatched, reduce the possibility of LOT Over Qtime, thereby improving the automation efficiency of semiconductor manufacturing, and can also improve the product yield rate.

[0098] The above mainly introduces the solution of the embodiments of the present application from the perspective of the method. It can be understood that, combined with the various examples described in the embodiments of the present application, those skilled in the art should easily realize that the present application can be implemented in the form of hardware, computer software, or a combination of software and hardware (hardware and computer software). In order to achieve the above functions, the dispatching priority adjustment device includes at least one of the corresponding hardware structures and software modules for executing each function. Whether a certain function is executed in the way of hardware or computer software driving hardware depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementation should not be considered to exceed the scope of the present application.

[0099] The embodiments of the present application can divide the function units of the dispatching priority adjustment device according to the above method examples. For example, each function unit can be divided corresponding to each function, or two or more functions can be integrated into one processing unit. The above integrated unit can be implemented in the form of hardware or in the form of a software function unit. It should be noted that the division of units in the embodiments of the present application is illustrative, only a logical function division, and there may be other division methods in actual implementation.

[0100] As Figure 7 shown, the embodiments of the present application also provide a dispatching priority adjustment device, which may include an acquisition module 71, a first determination module 72, a second determination module 73, and an adjustment module 74.

[0101] The acquisition module 71 is used to acquire at least two weight factors that affect the dispatching priority; for example, as Figure 3 shown, the first acquisition module 71 can be used to execute step S301.

[0102] The first determination module 72 is used to determine at least one weight group that affects the dispatching priority according to at least two weight factors, and each weight group includes at least one weight factor; for example, as Figure 3As shown, the first determination module 72 can be used to execute step S302.

[0103] The second determination module 73 is used to determine a target weight group corresponding to a target machine tool, and the target weight group is any one of at least one weight group; for example, as Figure 3 shown, the second determination module 73 can be used to execute step S303.

[0104] The adjustment module 74 is used to adjust the dispatching priority of the LOT to be dispatched in the target machine tool according to the target weight group. For example, as Figure 3 shown, the adjustment module 74 can be used to execute step S304.

[0105] In some embodiments, the weight factor is any one of the following: LOT type, LOT priority, process recipe, moving target, monitoring time limit, batch waiting time, and the interval time Q-TIME of different process steps used for processing wafers.

[0106] In some embodiments, the acquisition module 71 is used to respond to a first addition operation of the user for the first configuration page, acquire at least two weight factors affecting the dispatching priority; and display the at least two weight factors on the first configuration page.

[0107] In some embodiments, the above device further includes a processing module 75 and a display module 76,

[0108] The processing module 75 is used to, after displaying the at least two weight factors on the first configuration page, respond to a second addition operation of the user for the at least weight factors on the first configuration page, and acquire the meaning of the factor parameters corresponding to the at least weight factors;

[0109] The display module 76 is used to display the meaning of the factor parameters corresponding to the at least two weight factors on the first configuration page.

[0110] In some embodiments, the first determination module 72 is used to respond to a third addition operation of the user for the second configuration page, establish at least one weight group affecting the dispatching priority; on the second configuration page, respond to a fourth addition operation of the user for any one of the at least one weight group, and acquire the group name of the any one weight group, the weight factors included in the any one weight group, the weight value determination rule, and the weight value obtained when the weight value determination rule is satisfied; and display the group name of the at least one weight group, and the weight factors, the weight value determination rule, and the weight value obtained when the weight value determination rule is satisfied included in any one weight group on the second configuration page.

[0111] In some embodiments, the processing module 75 is further configured to, on the second configuration page, in response to a fourth addition operation by the user on any one of the at least one weight group, obtain the weight factors, weight value determination rules, and the weight values obtained when the weight value determination rules are satisfied included in the any one weight group. After that, on the second configuration page, in response to a fifth addition operation by the user on the weight value determination rules, obtain the weight rule meaning of the weight value determination rules; the display module 76 is further configured to display the weight rule meaning of the weight value determination rules on the second configuration page.

[0112] In some embodiments, the processing module 75 is further configured to, on the second configuration page, in response to a fourth addition operation by the user on any one of the at least one weight group, obtain the weight factors, weight value determination rules, and the weight values obtained when the weight value determination rules are satisfied included in the any one weight group. After that, on the second configuration page, in response to a seventh addition operation by the user on the weight factors included in the any one weight group, configure the parameter enabling status for the weight factors included in the any one weight group, where the parameter enabling status corresponding to the weight factors included in the any one weight group is yes.

[0113] In some embodiments, the adjustment module 74 is configured to, for the LOT to be assigned work in the target machine tool, obtain the factor parameters corresponding to the weight factors included in the target weight group; according to the weight value determination rules corresponding to the weight factors included in the target weight group and the factor parameters corresponding to the weight factors included in the target weight group, obtain the factor weight values of the weight factors included in the target weight group; according to the factor weight values of the weight factors included in the target weight group, obtain the group weight value of the LOT to be assigned work; and determine the work assignment priority of the LOT to be assigned work in the target machine tool according to the numerical size order of the group weight values.

[0114] In some embodiments, the second determination module 73 is configured to, in response to a sixth addition operation by the user on the third configuration page, configure corresponding weight groups for at least one machine tool on the production line; on the third configuration page, generate and display a machine tool weight matching table, where the machine tool weight matching table is used to store the correspondence between the at least one machine tool and the at least one weight group; and determine the target weight group corresponding to the target machine tool according to the machine tool weight matching table, where the target machine tool is the machine tool whose work assignment priority is to be adjusted among the at least one machine tool.

[0115] Regarding the device in the above embodiments, the specific manners in which each module performs operations have been described in detail in the embodiments related to the method, and will not be elaborated here.

[0116] Figure 8This is a schematic structural diagram of an electronic device provided by this application. As Figure 8 shown, the electronic device may include a processor 81 and a memory 82 for storing executable instructions of the processor 81; wherein, the processor 81 is configured to execute the above instructions to implement the method for adjusting the priority of task allocation in the above embodiments.

[0117] In addition, the electronic device may further include a communication bus 83 and at least one communication interface 84.

[0118] The processor 81 may be a central processing unit (CPU), a microprocessing unit, an application specific integrated circuit (ASIC), or one or more integrated circuits for controlling the execution of the program of this application solution.

[0119] The communication bus 83 is a signal path for transmitting information between the above components.

[0120] The communication interface 84 uses any device such as a transceiver for communicating with other devices or communication networks, such as Ethernet, radio access network (RAN), wireless local area networks (WLAN), etc.

[0121] The memory 82 may be a read-only memory (ROM) or other type of static storage device that can store static information and instructions, a random access memory (RAM) or other type of dynamic storage device that can store information and instructions, or may also be an electrically erasable programmable read-only memory (EEPROM), a compact disc read-only memory (CD-ROM) or other optical disc storage, optical disc storage (including compact discs, laser discs, optical discs, digital versatile discs, Blu-ray discs, etc.), magnetic disk storage media or other magnetic storage devices, or any other medium that can be used to carry or store the desired program code in the form of instructions or data structures and can be accessed by a computer, but is not limited thereto. The memory 82 may exist independently and be connected to the processor 81 through the communication bus 83. The memory 82 may also be integrated with the processor 81.

[0122] Among them, the memory 82 is used to store instructions for executing the solution of this application and is controlled by the processor 81 for execution. The processor 81 is used to execute the programs or instructions stored in the memory 82, thereby implementing the functions in the method of this application.

[0123] As an example, in combination with Figure 7 , the functions implemented by the acquisition module 71, the first determination module 72, the second determination module 73, and the adjustment module 74 in the dispatching priority adjustment device are the same as those of Figure 8 the processor 81.

[0124] In a specific implementation, as an embodiment, the electronic device may further include an output device 85 and an input device 86. The output device 85 communicates with the processor 81 and can display information in various ways. For example, the output device 85 may be a liquid crystal display (LCD), a light emitting diode (LED) display device, a cathode ray tube (CRT) display device, or a projector, etc. The input device 86 communicates with the processor 81 and can accept user input in various ways. For example, the input device 86 may be a mouse, a keyboard, a touch screen device, or a sensing device, etc.

[0125] Those skilled in the art can understand that Figure 8 the structure shown in Figure 8 does not constitute a limitation on the electronic device, and it may include more or fewer components than shown in the figure, or combine certain components, or adopt different component arrangements.

[0126] The electronic device in

[0127] may be a server, or a client or other devices.

[0128] Other embodiments of the present application will be readily apparent to those skilled in the art upon consideration of the specification and practice of the invention disclosed herein. The present application is intended to cover any variations, uses, or adaptations of the present application, which follow the general principles of the present application and include known common general knowledge or conventional technical means in the technical field not disclosed in the present application. The specification and examples are only to be considered as exemplary, and the true scope and spirit of the present application are pointed out by the claims.

[0129] It should be understood that the present application is not limited to the exact structures described above and shown in the drawings, and various modifications and changes can be made without departing from its scope. The scope of the present application is only limited by the appended claims.

Claims

1. A method for adjusting the dispatching priority, characterized in that, it includes: obtaining at least two weight factors that affect the dispatching priority; determining at least one weight group that affects the dispatching priority according to the at least two weight factors, and each weight group includes at least one weight factor; determining a target weight group corresponding to the target machine, and the target weight group is any one of the at least one weight group; adjusting the dispatching priority of the LOT to be dispatched in the target machine according to the target weight group.

2. The method for adjusting the dispatching priority according to claim 1, characterized in that, the weight factor is any one of the following: LOT type, LOT priority, process recipe, moving target, monitoring time limit, LOT waiting time, and the interval time Q-TIME of different process steps used for processing wafers; wherein, the LOT to be dispatched includes a preset number of wafers.

3. The method for adjusting the dispatching priority according to claim 1, characterized in that, the obtaining at least two weight factors that affect the dispatching priority includes: responding to the user's first addition operation on the first configuration page, and obtaining at least two weight factors that affect the dispatching priority; displaying the at least two weight factors on the first configuration page.

4. The method for adjusting the dispatching priority according to claim 3, characterized in that, after displaying the at least two weight factors on the first configuration page, the method further includes: on the first configuration page, responding to the user's second addition operation on the at least weight factors, and obtaining the meaning of the factor parameters corresponding to the at least weight factors; displaying the meaning of the factor parameters corresponding to the at least two weight factors on the first configuration page.

5. The method for adjusting the dispatching priority according to claim 1, characterized in that, the determining at least one weight group that affects the dispatching priority according to the at least two weight factors includes: responding to the user's third addition operation on the second configuration page, and establishing at least one weight group that affects the dispatching priority; on the second configuration page, responding to the user's fourth addition operation on any one of the at least one weight group, and obtaining the group name of the any one weight group, the weight factors included in the any one weight group, the weight value determination rule, and the weight value obtained under the condition of satisfying the weight value determination rule; displaying the group name of the at least one weight group, and the weight factors, weight value determination rule, and the weight value obtained under the condition of satisfying the weight value determination rule included in any one weight group on the second configuration page.

6. The method for adjusting the dispatching priority according to claim 5, characterized in that, after obtaining the weight factors, weight value determination rule, and the weight value obtained under the condition of satisfying the weight value determination rule included in any one of the at least one weight group on the second configuration page in response to the user's fourth addition operation on any one of the at least one weight group, the method further includes: On the second configuration page, in response to a fifth addition operation by the user for the weight value determination rule, obtain the weight rule meaning of the weight value determination rule; Display the weight rule meaning of the weight value determination rule on the second configuration page.

7. The method for adjusting the dispatching priority according to claim 5, wherein, on the second configuration page, in response to a fourth addition operation by the user for any one of the at least one weight group, after obtaining the weight factors, weight value determination rule, and weight value obtained under the condition of satisfying the weight value determination rule included in the any one weight group, the method further includes: On the second configuration page, in response to a seventh addition operation by the user for the weight factor included in the any one weight group, configure the parameter enabling status for the weight factor included in the any one weight group, where the parameter enabling status corresponding to the weight factor included in the any one weight group is yes.

8. The method for adjusting the dispatching priority according to any one of claims 5-7, wherein, the adjusting the dispatching priority of the LOT to be dispatched in the target machine according to the target weight group includes: For the LOT to be dispatched in the target machine, obtain the factor parameters corresponding to the weight factors included in the target weight group; According to the weight value determination rule corresponding to the weight factor included in the target weight group and the factor parameters corresponding to the weight factor included in the target weight group, obtain the factor weight value of the weight factor included in the target weight group; According to the factor weight value of the weight factor included in the target weight group, obtain the group weight value of the LOT to be dispatched; Determine the dispatching priority of the LOT to be dispatched in the target machine according to the numerical size order of the group weight values.

9. The method for adjusting the dispatching priority according to claim 1, wherein, the determining the target weight group corresponding to the target machine includes: In response to a sixth addition operation by the user for the third configuration page, configure the corresponding weight groups for at least one machine on the production line; On the third configuration page, generate and display a machine weight matching table for storing the corresponding relationship between the at least one machine and the at least one weight group; According to the machine weight matching table, determine the target weight group corresponding to the target machine, where the target machine is the machine to be adjusted for dispatching priority among the at least one machine.

10. An apparatus for adjusting the dispatching priority, wherein, comprises: an acquisition module, a first determination module, a second determination module, and an adjustment module, wherein, the first acquisition module is used to acquire at least two weight factors affecting the dispatching priority; the first determination module is used to determine at least one weight group affecting the dispatching priority according to the at least two weight factors, and each weight group includes at least one weight factor; the second determination module is used to determine the target weight group corresponding to the target machine, and the target weight group is any one of the at least one weight group; the adjustment module is used to adjust the dispatching priority of the LOT to be dispatched in the target machine according to the target weight group.

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