Double-sided plate electrode machining method, tool and system and plate electrode gyroscope

Abstract

According to the double-sided plate electrode machining method, tool and system and the plate electrode gyroscope, a workpiece to be coated is fixed through the double-sided plate electrode scribing machining tool, in the coating process of the workpiece to be coated, a front film layer and a communicating film layer are formed, and the workpiece to be scribed is obtained; the side edge of the communicated film layer is used as a characteristic line; after the workpiece to be scribed is transferred to the laser scribing machine, the characteristic line is identified through the CCD camera system, and the coordinate system is established based on the characteristic line, so that the laser scribing machine can perform scribing on the workpiece to be scribed based on the coordinate system, and the double-sided plate electrode is obtained. The technical problems that in the prior art, a photoetching machine is generally adopted for etching the double-sided plate electrode, when an electrode scribed line pattern needs to be replaced, a corresponding photoetching machine photomask needs to be replaced or manufactured again, and inconvenience is brought to production of the double-sided plate electrode are solved.

Description

Technical Field

[0001] The invention belongs to the technical field of electrode scribing of flat electrode gyroscopes, and particularly relates to a method, a tooling, a system for processing double-sided flat electrodes and a flat electrode gyroscope. Background Art

[0002] Flat electrode gyroscopes, especially flat electrode hemispherical resonant gyroscopes, mainly consist of a hemispherical resonator and flat electrodes. The hemispherical resonator, as the core component, realizes the function of the gyroscope through the interaction of flat electrodes; due to its advantages of high precision, long life and high reliability, flat electrode gyroscopes are widely used in multiple fields. In the application of flat electrode gyroscopes, double-sided flat electrodes are widely welcomed due to their characteristics of uniform electric field distribution, high efficiency, strong adaptability and easy integration. In the production and manufacturing of double-sided flat electrodes, generally, film coating is required on the front and back sides and the side surfaces of the double-sided flat electrodes to form a film layer, and then etching operations are performed on the film layer to form multiple independent sub-electrodes.

[0003] In the prior art, during the production and manufacturing process of double-sided flat electrodes, generally, a lithography machine is used to etch the film layer of the double-sided flat electrodes to form sub-electrodes. During the use of the lithography machine, a specific lithography mask needs to be carried, so that the etching light passes through the preset pattern on the lithography mask, and then film layer etching operations are performed on the double-sided flat electrodes to be processed to form the required sub-electrodes.

[0004] However, in the actual large-scale production process, when using a lithography machine to process double-sided flat electrodes, multiple rounds of cyclic processes such as cleaning, double-sided glue coating, double-sided exposure, development, etching, and glue removal are required for the double-sided flat electrodes to be processed. Especially when etching the side and back surfaces, each step needs to be precisely controlled, otherwise it is very easy to generate defects and make the product a defective product. In production, when the graphic design of the sub-electrodes needs to be adjusted or replaced, the corresponding lithography mask needs to be replaced in the lithography machine. Especially when custom-made or newly designed-shaped sub-electrodes need to be produced, the corresponding lithography mask needs to be remade, which brings great inconvenience and high production costs to the production of double-sided flat electrodes, and thus brings resistance to the production and popularization of double-sided flat electrodes and flat electrode gyroscopes. Summary of the Invention

[0005] In order to solve the technical problems in the background art that when using a lithography machine to process double-sided flat electrodes, the process is cumbersome and defective products are easily generated, especially when the scribing pattern of the sub-electrodes needs to be replaced, the corresponding lithography mask needs to be replaced or even remade, which brings inconvenience to the production of double-sided flat electrodes, the invention provides a method, a tooling, a system for processing double-sided flat electrodes and a flat electrode gyroscope.

[0006] To achieve the above object, the present invention adopts the following technical solutions: In a first aspect, the present invention provides a method for processing a double-sided flat electrode, comprising the steps of: S1: Fix the workpiece to be coated by means of a double-sided flat electrode scribing processing tooling. S2: Coat the workpiece to be coated to form a front film layer on the front surface of the workpiece to be coated, and form a plurality of connected film layers with characteristic lines on the side surface of the workpiece to be coated, obtaining a workpiece to be scribed; wherein, the top end of each connected film layer extends to the front surface of the workpiece to be scribed and is connected to the front film layer, and the bottom end of each connected film layer extends to the back surface of the workpiece to be scribed; the characteristic line is the side edge of the connected film layer, and this side edge communicates from the front surface of the workpiece to be scribed to the back surface. S3: Transfer the workpiece to be scribed to a laser scribing machine. S4: Identify the characteristic line; establish a coordinate system based on the characteristic line, and perform scribing on the front film layer and the connected film layers through the laser scribing machine to form a double-sided flat electrode.

[0007] Optionally, the step S1 includes: S1.1: Place the workpiece to be coated in the installation position on the base of the double-sided flat electrode scribing tooling. S1.2: Cover the workpiece to be coated with the tooling mask of the double-sided flat electrode scribing tooling. S1.3: Fix the tooling mask to the base of the double-sided flat electrode scribing tooling to fix the workpiece to be coated in the installation position.

[0008] Optionally, the step S4 includes: S4.1: Identify the center of the front surface of the workpiece to be scribed on the front surface of the workpiece to be scribed, and at the same time identify the characteristic line, and establish a coordinate system based on the center of the front surface and the characteristic line. S4.2: Through the laser scribing machine, based on the coordinate system, perform laser scribing on the front film layer and the connected film layers respectively to form the double-sided flat electrode.

[0009] Optionally, the step S4.1 includes: S4.1.1: Identify the center of the front surface of the workpiece to be scribed, and use the center of the front surface as the origin. S4.1.2: Identify a part of any one of the characteristic lines on the front surface of the workpiece to be scribed as the first characteristic line, and take a straight line passing through the origin and parallel to the first characteristic line as the X-axis. Identify the part of any of the feature lines on the side of the workpiece to be scribed as the second feature line, and take a straight line passing through the origin and parallel to the second feature line as the Y-axis; S4.1.3: Take a straight line passing through the origin and perpendicular to the X-axis and the Y-axis as the Z-axis to obtain the coordinate system.

[0010] Optionally, the step S4.2 includes: S4.2.1: Through the laser scribing machine, based on the coordinate system, perform laser scribing on the front film layer and the connected film layer on the front of the workpiece to be scribed; S4.2.2: Adjust the posture of the workpiece to be scribed; S4.2.3: Perform laser scribing on the connected film layer on the side of the workpiece to be scribed; S4.2.4: Adjust the posture of the workpiece to be scribed; S4.2.5: Perform laser scribing on the connected film layer on the back of the workpiece to be scribed to form the double-sided flat electrode.

[0011] Optionally, in the step S4.2.2 and the step S4.2.4, adjusting the posture of the workpiece to be scribed includes: making the workpiece to be scribed perform any one or more operations of flipping, translating or rotating based on the coordinate system.

[0012] In a second aspect, the present invention also provides a processing tooling for double-sided flat electrodes, which is applied to the double-sided flat electrode processing method described in any one of the above, and includes: a base and a tooling mask; An installation position is provided on the base; The tooling mask is detachably connected to the base, and an accommodation space is formed between the tooling mask and the installation position for accommodating the workpiece to be coated; The base is detachably installed on the coating equipment and is used to drive the workpiece to be coated to rotate during the coating process for coating the workpiece to be coated; The tooling mask is used to fix the workpiece to be coated in the installation position and form a front film layer and a plurality of connected film layers on the workpiece to be coated during the coating process.

[0013] Optionally, a first coating groove and a plurality of second coating grooves are provided on the tooling mask; The first coating groove is arranged at the center position of the tooling mask and communicates with the accommodation space, and is used to form the front film layer on the front of the workpiece to be coated during the coating process; A plurality of the second coating tanks are sequentially arranged around the first coating tank. A communication port is provided on the second coating tank, and the communication port communicates the accommodation space with the second coating tank. The communication port is used to form the communication film layer on the workpiece to be coated during the coating process.

[0014] In a third aspect, the present invention further provides a double-sided flat electrode processing system, which includes a coating device, a CCD camera system, a laser scribing machine, and the double-sided flat electrode processing tooling according to any one of the above; Among them, the double-sided flat electrode processing tooling is installed on the coating device, and is used to fix the workpiece to be coated, and form a front film layer and a communication film layer during the coating process of the workpiece to be coated; The coating device is used to drive the double-sided flat electrode processing tooling to rotate and coat the workpiece to be coated to obtain a workpiece to be scribed; The CCD camera system is electrically connected to the laser scribing machine and is used to identify the feature line and the front center of the workpiece to be scribed; The laser scribing machine is used to establish a coordinate system based on the feature line and the front center, and based on the coordinate system, perform laser scribing on the workpiece to be scribed to obtain a double-sided flat electrode.

[0015] In a fourth aspect, the present invention further provides a flat electrode gyroscope, which includes a double-sided flat electrode and a gyroscope body. The double-sided flat electrode is obtained by processing according to any one of the above double-sided flat electrode processing methods; the double-sided flat electrode is arranged in the gyroscope body.

[0016] The beneficial effects of the present invention are: (1) The present invention coats the workpiece to be coated through the double-sided flat electrode processing tooling, thereby forming a front film layer and a communication film layer with a feature line on the workpiece to be coated, and establishing a coordinate system based on the feature line. The laser scribing machine performs scribing processing on the front film layer and the communication film layer based on the coordinate system to form sub-electrodes, thereby obtaining a double-sided flat electrode. The operation is simple and the accuracy is reliable; during use, when it is necessary to modify, adjust or replace the pattern of the electrode scribing, only the scribing graphic parameters of the laser scribing machine need to be operated and modified, without replacing or remaking the photomask of the lithography machine, which greatly improves the work efficiency and applicability, and has a positive significance for the application and popularization of double-sided flat electrodes and flat electrode gyroscopes.

[0017] (2) In the prior art, a double-sided flat electrode is generally obtained by etching a film layer using a lithography machine. However, the lithography machine has the problems of high cost and large maintenance cost, thus having an extremely high threshold, which brings great resistance to the large-scale production and use of the double-sided flat electrode. The double-sided flat electrode processing method and system provided by the present invention identify the characteristic lines on the workpiece to be scribed through a CCD camera system and establish a coordinate system, and use a laser scribing machine to perform scribing of the electrode, thereby eliminating the need to use a lithography machine and greatly reducing the production cost and threshold of the double-sided flat electrode.

[0018] (3) In the present invention, under the same coordinate system, the laser scribing machine performs linked laser scribing processing on the side and front of the workpiece to be scribed, ensuring the scribing accuracy of the overall double-sided flat electrode formed. Description of the Drawings

[0019] Figure 1 is a schematic flow chart of the double-sided flat electrode processing method in the present invention; Figure 2 is a schematic diagram of the first characteristic line in the present invention; Figure 3 is a schematic diagram of the second characteristic line in the present invention; Figure 4 is a cross-sectional view of the double-sided flat electrode processing tooling in the present invention; Figure 5 is a schematic diagram of the double-sided flat electrode processing tooling in the present invention.

[0020] Wherein: 1. Base; 2. Tooling mask; 21. First coating tank; 22. Second coating tank; 23. Communication port; 3. Workpiece to be coated. Detailed Embodiments

[0021] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. The description of at least one exemplary embodiment below is actually only illustrative and in no way limits the present invention and its application or use. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present invention.

[0022] It should be noted that the terms used herein are for the purpose of describing specific embodiments only and are not intended to limit the exemplary embodiments of the present invention. As used herein, unless the context clearly indicates otherwise, the singular forms are also intended to include the plural forms. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they specify the presence of the features, steps, operations, devices, components, and / or combinations thereof.

[0023] Unless otherwise specifically stated, the relative arrangements of the components and steps, numerical expressions, and numerical values set forth in these embodiments do not limit the scope of the present invention. At the same time, it should be clear that, for the sake of convenience of description, the dimensions of the various parts shown in the drawings are not drawn in actual proportional relationships. Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the said technologies, methods, and devices should be regarded as part of the specification. In all the examples shown and discussed herein, any specific values should be construed as merely exemplary and not as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that like reference numerals and letters denote like items in the following drawings, and thus, once an item is defined in one drawing, it does not require further discussion in subsequent drawings.

[0024] In the description of the present invention, it should be understood that the orientation or positional relationships indicated by the orientation words such as "front, rear, upper, lower, left, right", "lateral, vertical, perpendicular, horizontal", and "top, bottom", etc. are usually based on the orientation or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description. Without contrary description, these orientation words do not indicate and imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and thus should not be construed as limiting the protection scope of the present invention: the orientation words "inside, outside" refer to the inside and outside relative to the contour of each component itself.

[0025] For ease of description, spatial relative terms, such as "above", "over", "on the upper surface", "upper", etc., may be used herein to describe the spatial positional relationship of one device or feature to other devices or features as shown in the figures. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figure is inverted, the device described as "above" or "over" other devices or structures will then be positioned "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both the orientation of "above" and "below". The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the corresponding interpretations of the spatial relative descriptions used herein will be made accordingly.

[0026] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of differentiating the corresponding components. Without further statement, the above terms have no special meaning, and thus should not be construed as limiting the protection scope of the present invention.

[0027] It should be noted that, without conflict, the embodiments and features in the embodiments of the present invention may be combined with each other. The present invention will be described in detail below with reference to the drawings and in conjunction with the embodiments.

[0028] Due to the characteristics of uniform electric field distribution, high efficiency, strong adaptability and easy integration, double-sided flat electrodes have been widely used in flat electrode gyroscopes, especially in the field of flat electrode hemispherical resonant gyroscopes. In the prior art, in the production process of double-sided flat electrodes, generally, a mask aligner is used to etch the film layer of the double-sided flat electrodes to form sub-electrodes.

[0029] However, since the etching operation of the mask aligner requires a precise and specific mask aligner reticle, and the double-sided flat electrodes are etched with patterns on the front, side and even back of the electrodes, during the process of processing the double-sided flat electrodes using the mask aligner, multiple rounds of cyclic processes such as cleaning, double-sided coating, double-sided exposure, development, etching, and stripping are required for the double-sided flat electrodes to be processed. Especially when etching the side and back of the double-sided flat electrodes, each step requires precise control. Otherwise, it is very easy to generate defects and make the product a defective product. Whenever it is necessary to change the design pattern of the double-sided flat electrodes, it is necessary to re-fabricate or replace the corresponding mask aligner reticle, which brings great inconvenience to the production of double-sided flat electrodes. At the same time, due to the characteristics of high technical complexity and specific application fields of the mask aligner, the equipment price is generally in the range of several hundred thousand yuan to hundreds of millions of yuan, and the maintenance cost is high, which brings extremely high thresholds and resistance to the production of double-sided flat electrodes and flat electrode gyroscopes.

[0030] Example 1 In the first aspect, referring to Figure 1 , a schematic general process diagram of a method for processing a double-sided flat electrode provided in the present invention is shown. The processing method basically includes the steps: S1: Fix the workpiece 3 to be coated. S2: Coat the workpiece 3 to be coated to form a front film layer and a connected film layer with characteristic lines, and obtain a workpiece to be scribed. S3: Transfer the workpiece to be scribed to a laser scribing machine. S4: Identify the characteristic lines, establish a coordinate system based on the characteristic lines, and scribe on the front film layer and the connected film layer to form a double-sided flat electrode.

[0031] Specifically, the specific steps included in the processing method provided by the present invention are: S1: Fix the workpiece 3 to be coated through a double-sided flat electrode scribing processing tooling. S2: Coat the workpiece 3 to be coated to form a front film layer on the front surface of the workpiece 3 to be coated, and form a plurality of connected film layers with characteristic lines on the side surface of the workpiece 3 to be coated, to obtain a workpiece to be scribed; wherein, the top end of each connected film layer extends to the front surface of the workpiece to be scribed and is connected to the front film layer, and the bottom end of each connected film layer extends to the back surface of the workpiece to be scribed; the characteristic line is the side edge of the connected film layer, and this side edge communicates from the front surface of the workpiece to be scribed to the back surface. S3: Transfer the workpiece to be scribed to a laser scribing machine. S4: Identify the characteristic lines; establish a coordinate system based on the characteristic lines, and scribe on the front film layer and the connected film layer through the laser scribing machine to form a double-sided flat electrode.

[0032] In this embodiment, for the provided method for processing a double-sided flat electrode, the workpiece 3 to be coated is fixed through a double-sided flat electrode scribing processing tooling, and during the process of coating the workpiece 3 to be coated, a front film layer and a connected film layer are formed to obtain a workpiece to be scribed, and the side edge of the connected film layer is used as the characteristic line; the workpiece to be scribed is transferred to a laser scribing machine, the characteristic lines are identified through a CCD camera system, and a coordinate system is established based on the characteristic lines, so that the laser scribing machine scribes the workpiece to be scribed based on the coordinate system, thereby obtaining a double-sided flat electrode.

[0033] The double-sided flat electrode processing method provided by the present invention does not require a lithography machine to etch the film layer of the double-sided flat electrode. When the design pattern of the sub-electrode needs to be changed during use, only the scribing pattern parameters of the laser scribing machine need to be operated and modified, without replacing or remaking the photomask of the lithography machine, which greatly improves the work efficiency. At the same time, the present invention uses a relatively low-cost laser scribing machine to scribe the workpiece to be scribed, thereby obtaining a double-sided flat electrode, which greatly reduces the production cost and threshold of the double-sided flat electrode and the flat electrode gyroscope.

[0034] Optionally, step S1 described in the present invention includes: S1.1: Place the workpiece to be coated 3 in the installation position on the base 1 of the double-sided flat electrode scribing tooling. S1.2: Cover the tooling mask 2 of the double-sided flat electrode scribing tooling on the workpiece to be coated 3. S1.3: Fix and install the tooling mask 2 on the base 1 of the double-sided flat electrode scribing tooling to fix the workpiece to be coated 3 in the installation position.

[0035] Optionally, step S4 described in the present invention includes: S4.1: Identify the center of the front surface of the workpiece to be scribed, and at the same time identify the characteristic line. Based on the center of the front surface and the characteristic line, establish a coordinate system. S4.2: Through the laser scribing machine, based on the coordinate system, respectively scribe the front film layer and the connected film layer with laser to form the double-sided flat electrode.

[0036] Further, step S4.1 may include: S4.1.1: Identify the center of the front surface of the workpiece to be scribed and use the center of the front surface as the origin. S4.1.2: Identify a part of any characteristic line on the front surface of the workpiece to be scribed as the first characteristic line. Refer to Figure 2 , take a straight line passing through the origin and parallel to the first characteristic line as the X-axis. Identify a part of any characteristic line on the side surface of the workpiece to be scribed as the second characteristic line. Refer to Figure 3 , take a straight line passing through the origin and parallel to the second characteristic line as the Y-axis. S4.1.3: Take a straight line passing through the origin and perpendicular to the X-axis and Y-axis as the Z-axis to obtain a coordinate system.

[0037] In this embodiment, the center of the front surface of the workpiece to be scribed can be captured by a CCD camera system, and the center of the front surface is used as the origin; and the characteristic lines of the connected film layer are captured and identified, and the first characteristic line and the second characteristic line are respectively set. A straight line passing through the origin and parallel to the first characteristic line is taken as the X-axis, and a straight line passing through the origin and parallel to the second characteristic line is taken as the Y-axis; then, based on the X-axis, Y-axis and origin, the Z-axis is obtained, so as to establish a coordinate system formed based on the workpiece to be scribed in the laser scribing machine; in subsequent processes, the laser scribing machine can perform laser scribing operations on the workpiece to be scribed based on this coordinate system, so as to form a double-sided flat electrode.

[0038] Further, step S4.2 includes: S4.2.1: Using the laser scribing machine, based on the coordinate system, perform laser scribing on the front film layer and the connected film layer on the front surface of the workpiece to be scribed; S4.2.2: Adjust the posture of the workpiece to be scribed; S4.2.3: Perform laser scribing on the connected film layer on the side surface of the workpiece to be scribed; S4.2.4: Adjust the posture of the workpiece to be scribed; S4.2.5: Perform laser scribing on the connected film layer on the back surface of the workpiece to be scribed to form the double-sided flat electrode.

[0039] In this embodiment, based on the coordinate system, first use the laser scribing machine to perform laser scribing on the front film layer and the connected film layer on the front surface of the workpiece to be scribed; then, based on the same coordinate system, after adjusting the posture of the workpiece to be scribed, perform laser scribing on the connected film layers on the side and back surfaces in sequence, so as to form a double-sided flat electrode. Under the same coordinate system, performing laser scribing operations on the front, side and back surfaces of the workpiece to be scribed in sequence realizes the linkage processing of the scribing operations on the front, side and back surfaces of the workpiece to be scribed, and ensures the overall scribing accuracy of the formed double-sided flat electrode.

[0040] Specifically, after performing laser scribing on the front film layer of the workpiece to be scribed, the workpiece to be scribed can be rotated 90° around the X-axis, and then the laser scribing machine is used to perform scribing operations on the side and back surfaces of the workpiece to be scribed, so as to obtain a double-sided flat electrode.

[0041] Further, in some specific process procedures, it is not necessary to perform scribing on the connected film layer on the back surface of the workpiece to be scribed, and those skilled in the art can choose whether to execute step S4.2.4 and step S4.2.5 according to actual design requirements.

[0042] Optionally, in steps S4.2.2 and S4.2.4 of the present invention, the attitude adjustment of the workpiece to be scribed includes: making the workpiece to be scribed perform any one or more of flipping, translation, or rotation based on the coordinate system.

[0043] In this embodiment, the attitude adjustment of the workpiece to be scribed includes: making the workpiece to be scribed perform any one or more of flipping, translation, or rotation based on the coordinate system, so that the front, side, and back of the workpiece to be scribed by the laser scribing machine can be scribed in a linked manner, ensuring the scribing accuracy of the overall double-sided flat electrode formed.

[0044] Furthermore, the double-sided flat electrode formed in the present invention includes a plurality of independent sub-electrodes formed by laser scribing the front film layer and the connecting film layer.

[0045] Embodiment 2 In a second aspect, referring to Figure 4 and Figure 5 , the present invention also provides a processing tooling for double-sided flat electrodes, which is applied to any one of the double-sided flat electrode processing methods in Embodiment 1, and includes: a base 1 and a tooling mask 2; an installation position is provided on the base 1; the tooling mask 2 is detachably connected to the base 1, and a receiving space is formed between the tooling mask 2 and the installation position for receiving the workpiece to be coated 3; the base 1 is detachably installed on the coating equipment and is used to drive the workpiece to be coated 3 to rotate during the coating process for coating the workpiece to be coated 3; the tooling mask 2 is detachably installed on the base 1 and is used to fix the workpiece to be coated 3 in the installation position and form a front film layer and a plurality of connecting film layers on the workpiece to be coated 3 during the coating process.

[0046] In this embodiment, a processing tooling for double-sided flat electrodes is provided. When applied to any one of the double-sided flat electrode processing methods described in Embodiment 1, first place the workpiece to be coated 3 on the installation position, and then connect the tooling mask 2 to the base 1 to fix the workpiece to be coated 3; during the coating process, a front film layer and a connecting film layer are formed on the workpiece to be coated 3 through the tooling mask 2 to obtain the workpiece to be scribed.

[0047] Furthermore, the tooling mask 2 can be connected to the base 1 by screws, buckles, or other detachable methods known to those skilled in the art, and no specific limitation is made in this embodiment.

[0048] Optionally, referring to Figure 4 and Figure 5, in the tooling mask 2 of the present invention, a first coating tank 21 and a plurality of second coating tanks 22 are provided; the first coating tank 21 is arranged at the central position of the tooling mask 2 and communicates with the accommodation space, and is used for forming a front film layer on the front surface of the workpiece 3 to be coated during the coating process; the plurality of second coating tanks 22 are sequentially arranged around the first coating tank 21, and a communication port 23 is provided on the second coating tank 22, and the communication port 23 communicates the accommodation space with the second coating tank 22, and the communication port 23 is used for forming a communication film layer on the side surface of the workpiece 3 to be coated during the coating process.

[0049] In this embodiment, a first coating tank 21 is provided on the tooling mask 2, which is arranged at the central position of the tooling mask 2 and communicates with the accommodation space; and a plurality of second coating tanks 22 are sequentially arranged around the first coating tank 21, and a communication port 23 is provided on the second coating tank 22, and the communication port 23 communicates the accommodation space with the second coating tank 22. Specifically, the coating equipment first coats the front surface of the workpiece 3 to be coated through the first coating tank 21 to form a front film layer; and then coats through the second coating tank 22 and the communication port 23 in sequence to form a communication film layer on the side surface of the workpiece 3 to be coated.

[0050] Furthermore, the tooling mask 2 in the present invention is made of polytetrafluoroethylene.

[0051] In this embodiment, the tooling mask 2 can be made of polytetrafluoroethylene to reduce the risk of the film layer formed by coating and the surface of the workpiece being scratched.

[0052] Embodiment 3 In a third aspect, the present invention further provides a double-sided flat electrode processing system for implementing any one of the double-sided flat electrode processing methods in Embodiment 1. The double-sided flat electrode processing system includes a coating equipment, a CCD camera system, a laser scribing machine, and any one of the double-sided flat electrode processing toolings provided in Embodiment 2 above; Among them, the double-sided flat electrode processing tooling is installed on the coating equipment, and is used for fixing the workpiece 3 to be coated and forming a front film layer and a communication film layer during the coating process of the workpiece 3 to be coated; The coating equipment is used to drive the double-sided flat electrode processing tooling to rotate and coat the workpiece 3 to be coated to obtain a workpiece to be scribed; The CCD camera system is electrically connected to the laser scribing machine and is used for identifying the feature line and the front center of the workpiece to be scribed; The laser scribing machine is used to establish a coordinate system based on the feature line and the front center, and based on the coordinate system, perform laser scribing on the workpiece to be scribed to obtain a double-sided flat electrode.

[0053] In this embodiment, a double-sided flat electrode processing system is provided, which is used for any of the double-sided flat electrode processing methods in Embodiment 1. It should be noted that the double-sided flat electrode processing system provided in this embodiment corresponds exactly to the double-sided flat electrode processing method in Embodiment 1, and their beneficial effects are also similar, so they will not be elaborated here.

[0054] Furthermore, in this embodiment, the laser scribing machine should include a laser module, a mechanical motion module, a control module, and an auxiliary module to establish a coordinate system and perform precise scribing.

[0055] Embodiment 4 The present invention also provides a flat electrode gyroscope, which includes a double-sided flat electrode and a gyroscope body. The double-sided flat electrode is obtained by processing based on the double-sided flat electrode processing method in Embodiment 1, and the double-sided flat electrode is arranged in the gyroscope body.

[0056] In this embodiment, a flat electrode gyroscope is provided. It should be noted that the double-sided flat electrode processing method provided in this embodiment corresponds exactly to the double-sided flat electrode processing method in Embodiment 1, and their beneficial effects are also similar, so they will not be elaborated here.

Claims

1. A method for processing a double-sided flat electrode, characterized in that: Includes steps: S1: Fixing the workpiece to be coated (3) by means of a double-sided flat electrode engraving processing tool; S2: coating the workpiece (3) to be coated to form a front film layer on the front side of the workpiece (3) to be coated, and forming a plurality of connected film layers with characteristic lines on the side of the workpiece (3) to be coated, to obtain a workpiece to be scribed; wherein the top of each connected film layer extends to the front side of the workpiece to be scribed and is connected to the front film layer, and the bottom of each connected film layer extends to the back side of the workpiece to be scribed; the characteristic line is the side edge of the connected film layer, which is connected from the front side to the back side of the workpiece to be scribed; S3: transferring the workpiece to be scribed to a laser scribing machine; S4: Identify the characteristic line; establish a coordinate system based on the characteristic line, and use the laser marking machine to mark the front film layer and the connecting film layer to form a double-sided flat electrode.

2. The double-sided flat electrode processing method according to claim 1, characterized in that: The step S1 comprises: S1.1: placing the workpiece to be coated (3) in the mounting position on the base (1) of the double-sided flat electrode scoring tool; S1.2: Covering the tooling mask (2) of the double-sided flat electrode scoring tooling on the workpiece to be coated (3); S1.3: The tooling mask (2) is fixedly mounted on the base (1) of the double-sided flat electrode marking tooling to fix the workpiece (3) to be coated in the mounting position.

3. The double-sided flat electrode processing method according to claim 1, characterized in that: The step S4 comprises: S4.1: Identifying the center of the front side of the workpiece to be engraved on the front side of the workpiece to be engraved, and identifying the characteristic line at the same time, and establishing a coordinate system based on the center of the front side and the characteristic line; S4.2: Using the laser scribing machine, based on the coordinate system, laser scribing is performed on the front film layer and the connecting film layer respectively to form the double-sided flat electrode.

4. The double-sided flat electrode processing method according to claim 3, characterized in that: The step S4.1 comprises: S4.1.1: Identify the center of the front side of the workpiece to be engraved, and take the center of the front side as the origin; S4.1.2: Identify a portion of any of the characteristic lines on the front side of the workpiece to be scribed as a first characteristic line, and take a straight line passing through the origin and parallel to the first characteristic line as the X-axis; Identify a portion of any of the characteristic lines on the side of the workpiece to be engraved as a second characteristic line, and take a straight line passing through the origin and parallel to the second characteristic line as the Y axis; S4.1.3: Take a straight line passing through the origin and perpendicular to the X-axis and the Y-axis as the Z-axis to obtain the coordinate system.

5. The double-sided flat electrode processing method according to claim 4, characterized in that: The step S4.2 comprises: S4.2.1: Using the laser marking machine, based on the coordinate system, laser marking the front film layer and the connecting film layer on the front side of the workpiece to be marked; S4.2.2: Adjusting the posture of the workpiece to be engraved; S4.2.3: Laser scribing the connecting film layer on the side of the workpiece to be scribed; S4.2.4: Adjusting the posture of the workpiece to be engraved; S4.2.5: Laser scribe the connecting film layer on the back side of the workpiece to be scribed to form the double-sided flat electrode.

6. The method for processing a double-sided flat electrode according to claim 5, characterized in that: In the step S4.2.2 and the step S4.2.4, the posture adjustment of the workpiece to be engraved includes: performing any one or more operations of flipping, translating or rotating the workpiece to be engraved based on the coordinate system.

7. A double-sided flat electrode processing tool, applied to the double-sided flat electrode processing method according to any one of claims 2 to 6, characterized in that: The double-sided flat electrode processing tool comprises: a base (1) and a tool mask (2); The base (1) is provided with a mounting position; The tooling mask (2) is detachably connected to the base (1), and a receiving space is formed between the tooling mask (2) and the mounting position, wherein the receiving space is used to receive a workpiece (3) to be coated; The base (1) is detachably mounted on the coating device, and is used to drive the workpiece (3) to be coated to rotate during the coating process, so as to coat the workpiece (3) to be coated; The tooling mask (2) is used to fix the workpiece (3) to be coated in the mounting position, and to form a front film layer and a plurality of interconnected film layers on the workpiece (3) to be coated during the coating process.

8. The double-sided flat electrode processing tool according to claim 7, characterized in that: The tooling mask (2) is provided with a first coating tank (21) and a plurality of second coating tanks (22); The first coating tank (21) is arranged at the center of the tooling mask (2) and is connected to the accommodating space, and is used to form the front film layer on the front side of the workpiece (3) to be coated during the coating process; A plurality of second coating grooves (22) are sequentially arranged around the first coating groove (21), and a connecting port (23) is provided on the second coating groove (22). The connecting port (23) connects the accommodating space with the second coating groove (22), and the connecting port (23) is used to form the connecting film layer on the workpiece to be coated (3) during the coating process.

9. A double-sided flat electrode processing system, characterized in that: The double-sided flat electrode processing system comprises a coating device, a CCD camera system, a laser marking machine, and a double-sided flat electrode processing tooling as described in any one of claims 7 to 8; The double-sided flat electrode processing tooling is installed on the coating device, and is used to fix the workpiece (3) to be coated, and to form a front film layer and a connecting film layer during the coating process of the workpiece (3) to be coated; The coating equipment is used to drive the double-sided flat electrode processing tooling to rotate, and to coat the workpiece (3) to be coated, thereby obtaining a workpiece to be engraved; The CCD camera system is electrically connected to the laser scribing machine and is used to identify the characteristic line and the front center of the workpiece to be scribed; The laser marking machine is used to establish a coordinate system based on the characteristic line and the center of the front circle, and to laser mark the workpiece to be marked based on the coordinate system to obtain a double-sided flat electrode.

10. A flat electrode gyroscope, characterized in that: The flat electrode gyroscope comprises a double-sided flat electrode and a gyroscope body, wherein the double-sided flat electrode is obtained by processing based on the double-sided flat electrode processing method according to any one of claims 1 to 6; and the double-sided flat electrode is arranged in the gyroscope body.

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