Method and device for testing matching of section morphology and depth of special-shaped air film hole

Abstract

The invention relates to the technical field of laser processing, and provides an inspection method and an inspection device for section morphology and depth matching of a laser-processed special-shaped air film hole, and the inspection method comprises the following steps: processing a trapezoidal prismatic table workpiece by using a laser beam, setting the track of the special-shaped hole as a multi-layer pattern, and controlling the hole pattern and the hole depth through layer-by-layer scanning. The processing depth is set by changing the vertical distance from the center position of the hole inlet to the ridge line of the bottom surface of the prismatic table, and the outlet morphology of a plurality of special-shaped holes with different depths is measured by using an optical microscope, so that the morphology of each layer of the special-shaped air film hole can be rapidly detected. According to the method, the matching relationship between the section morphology and the depth of the laser-processed special-shaped air film hole can be quickly detected, and effective matching between the section morphology and the hole depth of the special-shaped hole is realized through process optimization feedback, so that the beneficial effect of accurate shape-controlled processing of the special-shaped hole is achieved.

Description

Technical Field

[0001] The present disclosure relates to the field of laser processing technology, and in particular to a method and device for inspecting the cross-sectional morphology and depth matching of laser-processed irregular air film holes. Background Art

[0002] Turbine blade film hole processing is a key technology for improving the performance of advanced aircraft engines. The temperature before the turbine largely determines the performance of the engine. Film cooling is an important means to increase the temperature before the turbine. In order to improve the cooling performance degradation caused by the anti-vortex generated by the traditional circular hole, the researchers proposed a special-shaped hole design with an expanded exit end, which later developed into special-shaped holes such as fan-shaped or rectangular holes, and now has developed into complex special-shaped holes such as cat-ear holes. The above-mentioned special-shaped holes can effectively reduce the exit velocity of the cooling jet due to the expansion of the exit, greatly improving the cooling efficiency of the film hole.

[0003] The exit end of the irregular air film hole is a complex three-dimensional structure. The processing of irregular holes is more difficult and more expensive than that of ordinary circular holes. On the one hand, the cross-sectional morphology of the irregular hole changes with the increase of the hole depth. On the other hand, a specific processing trajectory is required to obtain the characteristics of the irregular air film hole. Among them, femtosecond laser processing is a precision processing method with the advantages of small heat-affected zone, high processing accuracy and wide material applicability. It can effectively avoid heat-induced defects such as recast layer and cracks caused by traditional long-pulse laser drilling, significantly improve the processing quality of air film holes, and become an ideal means of processing irregular air film holes.

[0004] However, there are still some problems and limitations in the laser processing technology of special-shaped air film holes. The hole shape accuracy of special-shaped air film holes is closely related to their aerodynamic performance. The traditional process method requires cutting the workpiece, obtaining the cross-sectional profile and then observing it. The preparation process is time-consuming and laborious. How to quickly detect the morphology of special-shaped air film holes and realize the controlled processing of air film holes is particularly critical.

[0005] The existence of the above problems has seriously hindered the application and development of laser processing technology in the field of aeroengine manufacturing. Therefore, exploring a controlled processing technology that can quickly realize special-shaped air film holes has always been valued by researchers and enterprises at home and abroad. Summary of the invention

[0006] The disclosed embodiments provide a method and device for inspecting the cross-sectional morphology and depth matching of irregular air film holes, in order to solve the problem in the prior art that the morphology of irregular air film holes cannot be quickly detected and quickly controlled.

[0007] The inspection method for the cross-sectional morphology and depth matching of the irregular air film hole provided in the embodiment of the present disclosure comprises the following steps:

[0008] S1, selecting the oblique waist surface of the trapezoidal pyramid workpiece as the surface to be processed, and setting the incident angle α of the laser beam on the oblique waist surface of the trapezoidal pyramid to be equal to the bottom angle θ of the trapezoidal pyramid workpiece;

[0009] S2, select the depth H of multiple sections to be measured in the three-dimensional geometric model of the special-shaped hole along the depth direction 1 ~H n ;

[0010] S3, according to the depth H 1 ~H n The prefabricated marking lines t are respectively arranged at the same height corresponding to the inclined waist surface of the prism 1 ~t n , and at each tick mark t 1 ~t n At least one processing position of a special-shaped hole is located;

[0011] S4, adjust and set the processing parameters of the laser beam, and correspond to the marking line t 1 ~t n Each processing position is processed to a depth of H. 1 ~H n Special-shaped air film holes;

[0012] S5, using an optical microscope to detect the outlet morphology of the special-shaped air film holes with different hole depths.

[0013] In one embodiment, the step of adjusting and setting the processing parameters of the laser beam includes:

[0014] S41, along the scale line t 1 The extension directions are respectively on the scale line t 1 In the process, multiple reference positioning holes with the same shape are processed in sequence by laser beams with different process parameters. 1 ~I n ;

[0015] S42, detect each reference positioning hole I 1 ~I n The processing parameters of the laser beam are selected according to the reference positioning hole that best fits the design model. 1 After the process parameters of the special-shaped hole are determined, the subsequent H 2 ~H n Corresponding process parameters.

[0016] In one embodiment, according to the depth H 1 ~H n The prefabricated marking lines t are respectively arranged at the same height corresponding to the inclined waist surface of the prism 1 ~t n The steps include:

[0017] The laser beam is respectively focused on the inclined waist surface of the frustum through a focusing field lens, and the engraved lines t 1 ~t n are respectively prefabricated parallel to the bottom edge line of the inclined waist surface of the frustum.

[0018] In an implementable embodiment, according to the depth H 1 ~H n The steps of respectively prefabricating the engraved lines t 1 ~t n at corresponding equal heights on the inclined waist surface of the frustum further include:

[0019] The distances between the engraved lines t 1 ~t n and the bottom edge line of the inclined waist surface of the frustum are respectively set to be H 1 / sinθ~H n / sinθ.

[0020] In an implementable embodiment, the steps of respectively positioning the machining positions of the special-shaped holes in the engraved lines t 1 ~t n include:

[0021] In each of the engraved lines t 1 ~t n a machining position of a special-shaped hole is respectively positioned, and the machining positions of a plurality of special-shaped holes are equally spaced along the extending direction of the engraved lines t 1 ~t n .

[0022] In an implementable embodiment, the steps of respectively machining through special-shaped air film holes with a depth of H 1 ~t n at their respective machining positions include: 1 ~H n The scanning speed and the number of scans are set through the scanning galvanometer control software, and layer-by-layer scanning is performed to machine the special-shaped air film holes. After the machining of each layer of trajectory is completed, Z-axis feeding is performed, and the focusing plane of the laser beam is updated.

[0023] In addition, the inspection device provided by the embodiments of the present disclosure can execute the above-mentioned inspection method for matching the cross-sectional morphology and depth of the special-shaped air film holes, and includes a five-axis machine tool, a laser source, a scanning galvanometer, and a focusing field lens;

[0024] The five-axis machine tool has a machining table for placing the trapezoidal frustum workpiece and can drive the trapezoidal frustum workpiece to move along the X / Y / Z / A / C axes on the machining table;

[0025]

[0026] ​The laser source can perform beam focusing and etching through the focusing field lens, and the scanning galvanometer can control the trajectory of the laser beam.

[0027] In addition, the inspection device provided by the embodiment of the present disclosure, the five-axis machine tool has a machine tool X-axis guide rail, a Z-axis guide rail and a Z-axis displacement platform;

[0028] The scanning galvanometer and the focusing field lens are respectively arranged on the Z-axis displacement platform, and can move along the X-axis guide rail or the Z-axis guide rail of the machine tool with the Z-axis displacement platform.

[0029] In addition, in the inspection device provided by the embodiment of the present disclosure, the processing table is further provided with a workpiece fixture for fixing the trapezoidal pyramid workpiece;

[0030] The other end of the workpiece fixture is also connected with a machine tool A axis and a machine tool C axis.

[0031] In addition, the inspection device provided by the embodiment of the present disclosure further comprises a machine tool Y-axis displacement platform and a machine tool Y-axis guide rail provided in the processing table;

[0032] The processing table can move along the Y-axis guide rail of the machine tool along with the Y-axis displacement platform of the machine tool.

[0033] Compared with the prior art, the technical solution provided by the embodiments of the present disclosure has the following advantages:

[0034] The embodiment of the present invention provides a method for inspecting the matching of the cross-sectional morphology and depth of a special-shaped air film hole. A trapezoidal prism workpiece is processed by a laser beam. The incident direction of the laser beam is perpendicular to the upper surface of the right-angled trapezoidal prism, and the trajectory of the special-shaped hole is set to a multi-layer pattern. The hole shape and hole depth are controlled by scanning layer by layer. The processing depth is set by changing the vertical distance from the center position of the hole entrance to the edge line of the bottom surface of the prism. An optical microscope is used to measure the exit morphology of the special-shaped hole V, the special-shaped hole IV, the special-shaped hole III, the special-shaped hole II, and the special-shaped hole I, respectively. Rapid detection of the morphology of each layer of the special-shaped air film hole can be achieved, and the matching relationship between the cross-sectional morphology and depth of the laser-processed special-shaped air film hole can be quickly inspected. Through process optimization feedback, effective matching of the cross-sectional morphology and hole depth of the special-shaped hole can be achieved, thereby achieving the beneficial effect of precise control processing of the special-shaped hole.

[0035] The inspection device provided in the embodiment of the present disclosure can execute the above-mentioned inspection method for matching the cross-sectional morphology and depth of the irregular air film hole, and can achieve the same beneficial effects.

[0036] It should be understood that the content described in this section is not intended to identify the key or important features of the embodiments of the present disclosure, nor is it intended to limit the scope of the present disclosure. Other features of the present disclosure will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] By reading the following detailed description with reference to the accompanying drawings, the above and other objects, features, and advantages of the exemplary embodiments of the present disclosure will become readily understood. In the drawings, several embodiments of the present disclosure are shown by way of example and not limitation, wherein:

[0038] In the drawings, the same or corresponding reference numerals denote the same or corresponding parts.

[0039] Figure 1 A flowchart of a method for inspecting the matching of the cross-sectional morphology and depth of a special-shaped air film hole provided by an embodiment of the present disclosure is shown;

[0040] Figure 2 A processing flowchart of the cross-sectional morphology of a special-shaped air film hole provided by an embodiment of the present disclosure is shown;

[0041] Figure 3 Shown is Figure 2 A schematic diagram of the effective matching between the cross-sectional morphology of the special-shaped hole and the hole depth in

[0042] Figure 4 A schematic diagram of an inspection device provided by an embodiment of the present disclosure is shown.

[0043] Description of the reference numerals in the figure: 1, Z-axis guide rail; 2, Z-axis displacement platform; 3, scanning galvanometer; 4, focusing field lens; 5, laser source; 6, workpiece fixture; 7, machine tool A-axis; 8, machine tool C-axis; 9, Y-axis displacement platform; 10, Y-axis guide rail; 11, trapezoidal prism workpiece; 12, machine tool column; 13, X-axis guide rail. Specific Embodiments

[0044] To make the objects, features, and advantages of the present disclosure more obvious and understandable, the technical solutions in the embodiments of the present disclosure will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only a part of the embodiments of the present disclosure, rather than all the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those skilled in the art without creative efforts belong to the scope of protection of the present disclosure.

[0045] The embodiments of the present disclosure will be described in detail below with reference to the accompanying drawings.

[0046] Combined with Figure 1 and Figure 2 shown, an embodiment of the present disclosure provides a method for inspecting the matching of the cross-sectional morphology and depth of a special-shaped air film hole, which includes the following steps:

[0047] S1, select the inclined waist surface of the trapezoidal prism in the trapezoidal prism workpiece as the surface to be processed, and set the incident angle α of the laser beam on the inclined waist surface of the trapezoidal prism to be equal to the base angle θ of the trapezoidal prism workpiece;

[0048] S2, select the depth H of multiple sections to be measured in the three-dimensional geometric model of the special-shaped hole along the depth direction 1 ~H n ;

[0049] S3, according to the depth H 1 ~H n The prefabricated marking lines t are respectively arranged at the same height corresponding to the inclined waist surface of the prism 1 ~t n , and at each tick mark t 1 ~t n At least one processing position of a special-shaped hole is located;

[0050] S4, adjust and set the processing parameters of the laser beam, and correspond to the marking line t 1 ~t n Each processing position is processed to a depth of H. 1 ~H n Special-shaped air film holes;

[0051] S5, using an optical microscope to detect the outlet morphology of the special-shaped air film holes with different hole depths.

[0052] The inspection method for the cross-sectional morphology and depth matching of the special-shaped air film hole can be applied to the controlled processing of the special-shaped air film hole with an inclination angle of β (the angle between the hole axis and the workpiece surface), and a right-angled trapezoidal prism workpiece 11 with a bottom angle of θ=90°-β is used as the processing object, and the material can be stainless steel, high-temperature alloy, etc.; the three-dimensional geometric structure of the special-shaped hole is cut to obtain the multi-layer cross-sectional profile, and combined with Figure 2 Further details, including: Figure 2 14 is a special-shaped hole track, 15 is a special-shaped hole V, 16 is a special-shaped hole IV, 17 is a special-shaped hole III, 18 is a special-shaped hole II, 19 to 23 are special-shaped hole I structures obtained by five different processing parameters, corresponding to special-shaped hole I-5, special-shaped hole I-4, special-shaped hole I-3, special-shaped hole I-2, and special-shaped hole I-1, respectively. The special-shaped hole track 14 discussed in this application is specifically set to six layers, of which the first layer is the entrance, and the remaining five layers are the hole cross-sectional profiles at different depths. 1 ~t 5 The prefabricated markings are obtained by single-line scanning on the oblique waist surface of the right-angled trapezoidal prism workpiece 11 using a focused laser, which is used to locate the processing position of the special-shaped hole. The corresponding actual processing depths are H 1 ~H 5, a trapezoidal frustum workpiece 11 is processed using a laser beam. The incident direction of the laser beam is perpendicular to the upper surface of the right trapezoidal frustum, and the trajectory 14 of the special-shaped hole is set as a multi-layer pattern. The hole shape and depth are controlled by layer-by-layer scanning. The processing depth is set by changing the vertical distance from the center position of the hole entrance to the edge line of the bottom surface of the frustum. By using an optical microscope to measure the exit morphologies of the special-shaped hole V, special-shaped hole IV, special-shaped hole III, special-shaped hole II, and special-shaped hole I respectively, rapid detection of the morphologies of each layer of the special-shaped air film hole can be achieved, thereby realizing an effective match between the cross-sectional morphology and the depth of the special-shaped hole.

[0053] Adopting the inspection method for matching the cross-sectional morphology and depth of the special-shaped air film hole provided by the embodiment of the present disclosure can quickly inspect the matching relationship between the cross-sectional morphology and the depth of the laser-processed special-shaped air film hole, and through process optimization feedback, the purpose of precise shape control processing of the special-shaped hole can be achieved.

[0054] In an implementable manner, the steps of adjusting and setting the processing process parameters of the laser beam include:

[0055] S41, along the extension direction of the scribed line t 1 respectively in the scribed line t 1 a plurality of reference positioning holes I 1 ~I n with the same shape are successively processed by laser beams with different process parameters;

[0056] S42, detect the processing morphologies of each reference positioning hole I 1 ~I n , and select the processing process parameters of the laser beam according to the reference positioning hole that best conforms to the design model.

[0057] Specifically, in combination with Figure 2 and Figure 3 for further detailed description, adjusting and setting the processing process parameters of the laser beam may specifically include, but are not limited to, laser energy, number of scans, scan speed, and Z-axis feed rate, etc. By respectively in the scribed line t 1 along the extension direction of the scribed line t 1 a plurality of reference positioning holes I 1 ~I n with the same shape are successively processed by laser beams with different process parameters, and the processing process parameters of the laser beam are selected according to the reference positioning hole that best conforms to the design model, (where Figure 3The label 24 is the outlet of the special-shaped hole Ⅰ-1, the label 25 is the outlet of the special-shaped hole Ⅱ, the label 26 is the outlet of the special-shaped hole Ⅲ, the label 27 is the outlet of the special-shaped hole Ⅳ, the label 28 is the outlet of the special-shaped hole Ⅴ, the label 29 is the outlet of the special-shaped hole Ⅰ-5, the label 30 is the outlet of the special-shaped hole Ⅰ-4, the label 31 is the outlet of the special-shaped hole Ⅰ-3, and the label 32 is the outlet of the special-shaped hole Ⅰ-2). Finally, determine the processing process parameters of the special-shaped holes Ⅴ, Ⅳ, Ⅲ, and Ⅱ to eliminate the deviation influence caused by the processing process parameters of the morphology of each layer of the special-shaped air film holes to the greatest extent.

[0058] In an implementable manner, according to the depth H 1 ~H n respectively prefabricate the engraved lines t 1 ~t n on the isometric corresponding inclined waist surface of the frustum, and the steps include:

[0059] Respectively focus the laser beam on the inclined waist surface of the frustum through a focusing field lens, and prefabricate the engraved lines t 1 ~t n respectively parallel to the bottom edge line of the inclined waist surface of the frustum.

[0060] Specifically, combined with Figure 2 for further detailed description, according to the depth H 1 ~H 5 corresponding to each layer cross-section of the three-dimensional geometric model of the special-shaped hole, determine the perpendicular distance from the center position of the special-shaped hole to the edge line AB, and use the focused laser to perform single-line scanning on the inclined waist surface ABCD of the right trapezoidal frustum to obtain the prefabricated engraved lines, that is, t 1 ~t 5 , and the corresponding processing depth is H 1 ~H 5 , which is used to position the processing position of the special-shaped hole in the subsequent process.

[0061] In an implementable manner, according to the depth H 1 ~H n respectively prefabricate the engraved lines t 1 ~t n on the isometric corresponding inclined waist surface of the frustum, and the steps further include:

[0062] The distances between the engraved lines t 1 ~t n and the bottom edge line of the inclined waist surface of the frustum are respectively set as H 1 / sinθ~H n / sinθ.

[0063] Specifically, combined with Figure 2 for further detailed description, this step can specifically use the focusing field lens to focus the laser beam on the prefabricated engraved lines t on the inclined waist surface ABCD of the right trapezoidal frustum1 ~t 5 Position, set the scanning speed and the number of scans in the scanning galvanometer control software, perform layer-by-layer scanning and processing. After the processing of each layer of trajectory is completed, the five-axis machine tool performs a Z-axis feed to update the focal plane, and at the same time automatically switches to a new processing trajectory layer, and progresses layer by layer in sequence to complete the scanning and processing of the established trajectory.

[0064] In an implementable manner, for the scribed lines t 1 ~t n The steps of respectively positioning the processing positions of the special-shaped holes include:

[0065] In each scribed line t 1 ~t n respectively position the processing position of a special-shaped hole, and set the processing positions of multiple special-shaped holes at equal intervals along the extending direction of the scribed line t 1 ~t n .

[0066] Specifically, in combination with Figure 2 For further detailed description, in this step, position the processing position of a special-shaped hole in each scribed line, and set the processing positions of multiple special-shaped holes at equal intervals along the extending direction of the scribed line, so as to minimize the mutual interference and influence of the processing positions of the special-shaped holes in each scribed line.

[0067] In an implementable manner, in the respective processing positions of the scribed lines t 1 ~t n respectively drill special-shaped air film holes with a depth of H 1 ~H n , the steps include:

[0068] Set the scanning speed and the number of scans through the scanning galvanometer control software, perform layer-by-layer scanning and processing of the special-shaped air film holes, and after the processing of each layer of trajectory is completed, perform a Z-axis feed and update the focal plane of the laser beam.

[0069] In addition, the inspection device provided by the embodiments of the present disclosure can execute the above-mentioned inspection method for the matching of the cross-sectional morphology and depth of the special-shaped air film holes, and includes a five-axis machine tool, a laser source 5, a scanning galvanometer 3, and a focusing field lens 4; the five-axis machine tool has a processing table for placing the trapezoidal prism workpiece 11, and can drive the trapezoidal prism workpiece 11 to move along the X / Y / Z / A / C axes on the processing table; the laser source 5 can perform beam focusing and etching through the focusing field lens 4, and the scanning galvanometer 3 can control the trajectory of the laser beam.

[0070] Specifically, in combination with Figure 4For further detailed description, the five-axis machine tool in the inspection device can drive the trapezoidal prism workpiece 11 to perform linear feed movement along the X / Y / Z directions on the processing table and rotate around the A / C axes. During specific processing, the scanning galvanometer 3 controls the scanning speed and number of scans for layer-by-layer scanning processing. After the processing of each layer of the trajectory is completed, the five-axis machine tool performs a Z-axis feed, and the focusing lens 4 updates the focusing plane, while automatically switching to a new processing trajectory layer, and progresses layer by layer in sequence to complete the scanning processing of the established trajectory.

[0071] The inspection device can execute the above-mentioned inspection method for the matching of the cross-sectional morphology and depth of the special-shaped air film holes, and has the advantages of high automation degree and high processing efficiency.

[0072] In an implementable embodiment, the five-axis machine tool has an X-axis guide rail 13, a Z-axis guide rail 1, and a Z-axis displacement platform 2; the scanning galvanometer 3 and the focusing lens 4 are respectively arranged on the Z-axis displacement platform 2 and can move along the X-axis guide rail 13 or the Z-axis guide rail 1 with the Z-axis displacement platform 2.

[0073] Specifically, in combination with Figure 4 For further detailed description, the X-axis guide rail 13 can be specifically supported and arranged along the horizontal direction by two columns 12, and the Z-axis guide rail 1 is arranged perpendicular to the X-axis guide rail 13. In this way, the scanning galvanometer 3 and the focusing lens 4 in the Z-axis displacement platform can synchronously move along the X-axis guide rail 13 or the Z-axis guide rail 1 with the Z-axis displacement platform 2.

[0074] In an implementable embodiment, a workpiece fixture 6 for fixing the trapezoidal prism workpiece is further arranged on the processing table; and the other end of the workpiece fixture 6 is also connected with a machine tool A-axis 7 and a machine tool C-axis 8.

[0075] Specifically, in combination with Figure 4 For further detailed description, the other end of the workpiece fixture 6 is also connected with a machine tool A-axis 7 and a machine tool C-axis 8. In this way, the machine tool A-axis 7 and the machine tool C-axis 8 can drive the workpiece fixture 6 to rotate around the A-axis or the C-axis, thereby driving the trapezoidal prism workpiece 11 at the other end of the workpiece fixture 6 to rotate around the A-axis or the C-axis.

[0076] In an implementable embodiment, a Y-axis displacement platform 9 and a Y-axis guide rail 10 are further arranged on the processing table; the processing table can move along the Y-axis guide rail 10 with the Y-axis displacement platform 9.

[0077] Specifically, in combination with Figure 4 For further detailed description, the Y-axis displacement platform 9 and the Y-axis guide rail 10 are arranged on the processing table. In this way, the processing table has the freedom of movement along the Y-axis, and the function of driving the trapezoidal prism workpiece 11 to perform a Y-axis feed movement is realized by the processing table being able to move along the Y-axis guide rail 10 with the Y-axis displacement platform 9.

[0078] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include at least one such feature. In the description of the present disclosure, "a plurality of" means two or more unless otherwise specifically defined.

[0079] As described above, the foregoing are only specific embodiments of the present disclosure, but the protection scope of the present disclosure is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present disclosure can easily conceive of changes or substitutions, which should all be covered within the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure shall be subject to the protection scope of the claims.

Claims

1. A method for inspecting the matching of the cross-sectional morphology and depth of a special-shaped air film hole, characterized in that, it includes the following steps: S1, select the inclined waist surface of the frustum in the trapezoidal frustum workpiece as the surface to be processed, and set the incident angle α of the laser beam on the inclined waist surface of the frustum to be equal to the base angle θ of the trapezoidal frustum workpiece; S2, Select the depths H of multiple cross-sections to be measured in the three-dimensional geometric model of the special-shaped hole along the depth direction 1 ~H n ; S3, according to the depth H 1 ~H n respectively prefabricate corresponding engraved lines t at the same height on the inclined waist surface of the frustum 1 ~t n , and respectively locate the machining positions of at least one special-shaped hole in each engraved line t 1 ~t n ; S4, adjust and set the processing process parameters of the laser beam, and respectively penetrate and process the special-shaped air film holes with a depth of H 1 ~t n at their respective processing positions 1 ~H n ; S5, use an optical microscope to detect the outlet morphology of special-shaped air film holes with different hole depths respectively.

2. The method for inspecting the matching of the cross-sectional morphology and depth of a special-shaped air film hole according to claim 1, characterized in that, the steps of adjusting and setting the processing process parameters of the laser beam include: S41, along the scoring line t 1 in the extending direction of, a plurality of reference positioning holes I 1 with the same shape are successively machined by laser beams with different process parameters in the scoring line t 1 ~I n ; S42, Detect each reference positioning hole I 1 ~I n 's machining morphology, and select the machining process parameters of the laser beam according to the reference positioning hole that best matches the design model.

3. The method for inspecting the matching of the cross-sectional morphology and depth of a special-shaped air film hole according to claim 1, characterized in that, According to the depth H 1 ~H n Precast engraved lines t corresponding to the same height on the inclined waist surface of the frustum respectively 1 ~t n The steps include: The laser beam is respectively focused on the inclined waist surface of the frustum by a focusing field lens, and the engraved lines t 1 ~t n are respectively prefabricated parallel to the bottom edge line of the inclined waist surface of the frustum.

4. The method for inspecting the matching of the cross-sectional morphology and depth of a special-shaped air film hole according to claim 3, characterized in that, According to the depth H 1 ~H n Precast engraved lines t corresponding to the same height on the inclined waist surface of the frustum respectively 1 ~t n The steps also include: Scoring line t 1 ~t n The distances from the bottom edge lines of the inclined waist surfaces of the frustum are respectively set as H 1 / sinθ~H n / sinθ.

5. The method for inspecting the matching of the cross-sectional morphology and depth of a special-shaped air film hole according to claim 3, characterized in that, Scoring line t 1 ~t n The steps of respectively positioning the machining positions of the special-shaped holes in ~ include: Locate the machining position of a special-shaped hole respectively in each engraved line t 1 ~t n and set the machining positions of multiple special-shaped holes at equal intervals along the extension direction of the engraved line t 1 ~t n .

6. The method for inspecting the matching of the cross-sectional morphology and depth of a special-shaped air film hole according to claim 1, characterized in that, At the engraved lines t 1 ~t n In the respective machining positions, the steps of through-machining the special-shaped air film holes with a depth of H 1 ~H n include: Set the scanning speed and scanning times through the scanning galvanometer control software, perform layer-by-layer scanning to process the special-shaped air film hole. After the processing of each layer of trajectory is completed, perform Z-axis feeding and update the focal plane of the laser beam.

7. An inspection device capable of executing the method for inspecting the matching of the cross-sectional morphology and depth of a special-shaped air film hole according to any one of claims 1 to 6, characterized in that, it includes a five-axis machine tool, a laser source (5), a scanning galvanometer (3) and a focusing field lens (4); The five-axis machine tool has a processing table for placing the trapezoidal frustum workpiece (11), and can drive the trapezoidal frustum workpiece (11) to move along the X / Y / Z / A / C axes on the processing table; The laser source (5) can focus and etch the light beam through the focusing field lens (4), and the scanning galvanometer (3) can control the trajectory of the laser beam.

8. The inspection device according to claim 7, characterized in that, The five-axis machine tool has an X-axis guide rail (13), a Z-axis guide rail (1) and a Z-axis displacement platform (2); The scanning galvanometer (3) and the focusing field lens (4) are respectively arranged on the Z-axis displacement platform (2), and can move along the X-axis guide rail (13) or the Z-axis guide rail (1) with the Z-axis displacement platform (2).

9. The inspection device according to claim 7, characterized in that, A workpiece fixture (6) for fixing the trapezoidal frustum workpiece is also arranged in the processing table; And the other end of the workpiece fixture (6) is also connected with a machine tool A-axis (7) and a machine tool C-axis (8).

10. The inspection device according to claim 9, characterized in that, A Y-axis displacement platform (9) and a Y-axis guide rail (10) are also arranged in the processing table; The processing table can move along the Y-axis guide rail (10) with the Y-axis displacement platform (9).

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