Reaction furnace with deviation rectifying and conveying device used in CVD (Chemical Vapor Deposition) method

Abstract

The invention discloses a reaction furnace with a deviation rectifying and conveying device for a CVD (Chemical Vapor Deposition) method, which is characterized in that the reaction furnace comprises a belt type conveying device and a furnace body, and the belt type conveying device comprises a belt, rollers and rigid strips; the belt is a substrate for preparing sediments by a CVD (chemical vapor deposition) method, and the belt outer enveloping roller penetrating through the furnace body, the rigid strip and the back surface of the belt are connected into a whole; the roller comprises a cylinder and a check ring, the cylinder comprises strip-shaped grooves which are uniformly distributed along the circumference, and the circumference length of every two adjacent strip-shaped grooves is equal to the center distance between every two adjacent rigid strips on the belt; the check rings are located at the two ends of the cylinder and comprise the left check ring and the right check ring, and the left check ring and the right check ring block the left end and the right end of the rigid strip respectively so as to achieve deviation correction of the belt. The furnace body comprises an initial section, a reaction section and a discharging section, chemical reaction products grow on a belt of the reaction section, and discharging is completed at the discharging section. The device has the main advantages that continuous automatic production is achieved, efficiency is high, energy consumption is low, and the offset of the thin steel strip can be controlled within a set range in the high-temperature environment.

Description

Technical Field

[0001] The present invention relates to the technical field of production equipment for chemical vapor deposition, and particularly to a reaction furnace with a deviation correction conveying device in the CVD method. Background Art

[0002] In the existing chemical vapor deposition method, the substrates used to generate deposits are discontinuous in a horizontal reaction furnace. For example, the carbon nanotubes generated in the horizontal reaction furnace in the CVD method are all deposited in containers made of substrate materials such as quartz boats or stainless steel material boxes. These containers are arranged one by one and are not interconnected in the horizontal furnace, and it is particularly difficult to discharge the carbon nanotubes attached to the inner wall of the container.

[0003] Currently, the addition of the catalyst and the discharge of carbon nanotubes both require cooling to room temperature first and then manual operation to complete. This not only increases a large amount of energy consumption, but also makes it difficult to achieve unmanned automated continuous production under such high-temperature conditions. Therefore, the production capacity is greatly limited. Moreover, in the existing belt conveying device under high-temperature conditions, it is difficult to control the offset of the thin steel belt within the set range.

[0004] As emerging frontier materials, carbon nanotubes and carbon nanotube fibers have received extensive attention and research in the scientific and industrial communities due to their unique physical and chemical properties and broad application potential. Currently, there are three methods for preparing carbon nanotube fibers from carbon nanotubes in countries around the world: wet spinning method, carbon nanotube array spinning method, and floating catalyst spinning method. Among them, the carbon nanotube fibers produced by the carbon nanotube array spinning method have the highest cleanliness. However, due to the discontinuous and small area of their substrate containers, continuous production cannot be achieved, the production capacity is low, and the price is extremely expensive. That is, the existing technical bottleneck is that the area of the carbon nanotube growth substrate provided by the traditional structure is limited and the operation is intermittent.

[0005] In summary, it is urgent to seek a solution that can provide an unrestricted area for the growth substrate of carbon nanotubes and enable continuous production. Summary of the Invention

[0006] Aiming at the problems existing in the prior art, the purpose of the present invention is to provide a reaction furnace with a deviation correction conveying device in the CVD method to solve the problems mentioned in the above background art.

[0007] To achieve the above object, the present invention provides the following technical solutions: The horizontal reaction furnace 1 continuously produced by chemical vapor deposition method includes a belt conveyor device 2 and a furnace body 3. The belt conveyor device 2 includes a belt 2A, rollers 4 and rigid bars 6. The belt 2A is the substrate for preparing the deposit by CVD method. The belt 2A passing through the furnace body 3 envelopes the rollers 4. The rigid bars 6 are integrally connected to the reverse side of the belt 2A. The roller 4 includes a cylinder 4A and retaining rings 4B. The cylinder 4A includes strip-shaped grooves 4A1 evenly distributed along the circumference. The circumferential length between two adjacent strip-shaped grooves 4A1 is equal to the center distance between two adjacent rigid bars 6 on the belt 2A. The retaining rings 4B are located at both ends of the cylinder 4A and include a left retaining ring 4B1 and a right retaining ring 4B2. The left retaining ring 4B1 and the right retaining ring 4B2 respectively block the left end and the right end of the rigid bar 6 to achieve the deviation correction of the belt 2A. The furnace body 3 includes an initial section 5, a reaction section 7 and a discharging section 8. The chemical reaction product grows on the belt 2A in the reaction section 7 and is discharged in the discharging section 8.

[0008] As a further aspect of the present invention: The reaction furnace 1 includes a reaction furnace for preparing carbon nanotubes, and the belt 2A includes a stainless steel belt.

[0009] As a further aspect of the present invention: The rigid bar 6 includes a steel bar, and the steel bar includes a round steel 6A.

[0010] As a further aspect of the present invention: The connection between the rigid bar 6 and the belt 2A includes a way of being welded into one body.

[0011] As a further aspect of the present invention: The width of the strip-shaped groove 4A1 is greater than the width of the rigid bar 6, and the length of the rigid bar 6 is greater than the width of the belt 2A.

[0012] In summary, compared with the prior art, due to the adoption of a unique structure with a belt as the substrate, the present invention provides a solution for continuous production. The specific advantages are as follows: 1) Since the belt in the conveyor runs continuously, the substrate area in the CVD method is not limited; 2) Because the conveyor belt is flat, the discharging and cleaning of carbon nanotubes are particularly easy; 3) Low energy consumption; 4) Under high temperature conditions, the offset of the thin steel belt can be controlled within the set range. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic structural diagram of the belt conveyor device 2 and the furnace body 3 that make up the horizontal reaction furnace 1, and also a schematic structural diagram of the belt 2A, the rollers 4 and the rigid bars 6 that make up the belt conveyor device 2, and also a schematic structural diagram of the cylinder 4A and the retaining rings 4B that make up the roller 4, and also a schematic structural diagram of the left retaining ring 4B1 and the right retaining ring 4B2 that make up the retaining ring 4B, and also a schematic structural diagram of the initial section 5, the reaction section 7 and the discharging section 8 that make up the furnace body 3; Figure 2 is Figure 1A-A sectional view; Figure 3 is Figure 1 partial enlarged view I; Figure 4 is Figure 1 view from direction B; Figure 5 is Figure 4 partial enlarged view at position II in; Figure 6 is Figure 4 C-C view; Figure 7 is a schematic structural diagram of the integral furnace body 3.

[0014] Reactor 1, belt conveyor 2, belt 2A, furnace body 3, roller 4, cylinder 4A, strip groove 4A1, retaining ring 4B, left retaining ring 4B1, right retaining ring 4B2, initial section 5, rigid strip 6, round steel 6A, reaction section 7, discharge section 8. Specific embodiments

[0015] Next, the technical solutions in the embodiments of the present invention will be described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0016] Please refer to Figures 1-7 , in the embodiment of the present invention, the horizontal reactor 1 continuously produced by chemical vapor deposition method includes a belt conveyor 2 and a furnace body 3. The belt conveyor 2 includes a belt 2A, rollers 4 and rigid strips 6; the belt 2A is the substrate for preparing the deposit by CVD method, and the belt 2A passing through the furnace body 3 envelopes the rollers 4, and the rigid strips 6 are integrally connected to the reverse side of the belt 2A; the roller 4 includes a cylinder 4A and a retaining ring 4B. The cylinder 4A includes strip grooves 4A1 evenly distributed along the circumference, and the circumferential length between two adjacent strip grooves 4A1 is equal to the center distance between two adjacent rigid strips 6 on the belt 2A; the retaining ring 4B is located at both ends of the cylinder 4A and includes a left retaining ring 4B1 and a right retaining ring 4B2. The left retaining ring 4B1 and the right retaining ring 4B2 respectively block the left end and the right end of the rigid strip 6 to realize the deviation correction of the belt 2A; the furnace body 3 includes an initial section 5, a reaction section 7 and a discharge section 8. The chemical reaction product grows on the belt 2A in the reaction section 7 and is discharged at the discharge section 8.

[0017] It should be noted that: the roller 4 includes a driving roller and a driven roller.

[0018] The reactor 1 includes a reactor for preparing carbon nanotubes, and the belt 2A includes a stainless steel belt.

[0019] The described rigid strip 6 includes a steel strip, and the steel strip includes a round steel 6A.

[0020] The connection between the described rigid strip 6 and the belt 2A includes a way of being welded into one body.

[0021] The width of the strip-shaped groove 4A1 is greater than the width of the rigid strip 6, and the length of the rigid strip 6 is greater than the width of the belt 2A.

[0022] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "front", "rear", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation to the present invention. In the present invention, it should also be noted that the terms "installation" and "connection" should be understood in a broad sense. For example, it can be fixedly connected, or it can be a detachable connection, or an integrally formed connection. It can also be a mechanical connection, or an indirect connection through an intermediate medium. The specific meaning of the terms in the present invention can be understood according to specific situations.

[0023] In addition, it should be understood that although this specification is described according to embodiments, not every embodiment only contains an independent technical solution. This narrative way of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A reactor with a belt deviation correction conveying device used in a CVD method, characterized in that The horizontal reaction furnace (1) for continuous production using chemical vapor deposition comprises a belt conveyor (2) and a furnace body (3), wherein the belt conveyor (2) comprises a belt (2A), a roller (4) and a rigid strip (6); the belt (2A) is a substrate for preparing a deposit using the CVD method, the belt (2A) passing through the furnace body (3) is wrapped around the roller (4), and the rigid strip (6) is connected to the reverse side of the belt (2A) as a whole; the roller (4) comprises a cylinder (4A) and a retaining ring (4B), the cylinder (4A) comprises strip grooves (4A1) uniformly distributed along the circumference, and two adjacent strip grooves are arranged on the cylinder (4A1). The circumference of the belt (4A1) is equal to the center distance between two adjacent rigid strips (6) on the belt (2A); the retaining ring (4B) is located at both ends of the cylinder (4A), including a left retaining ring (4B1) and a right retaining ring (4B2), the left retaining ring (4B1) and the right retaining ring (4B2) respectively retain the left end and the right end of the rigid strip (6) to achieve the deviation correction of the belt (2A); the furnace body (3) includes an initial section (5), a reaction section (7) and a discharge section (8), the chemical reaction product grows on the belt (2A) in the reaction section (7), and the discharge is completed in the discharge section (8).

2. A reaction furnace with a belt deviation correction conveying device for use in a CVD method according to claim 1, characterized in that The reaction furnace (1) comprises a reaction furnace for preparing carbon nanotubes, and the belt (2A) comprises a stainless steel belt.

3. A reaction furnace with a belt deviation correction conveying device for use in a CVD method according to claim 2, characterized in that The rigid bar (6) comprises a steel bar, and the steel bar comprises a round steel (6A).

4. A reaction furnace with a belt deviation correction conveying device for use in a CVD method according to claim 3, characterized in that The connection between the rigid strip (6) and the belt (2A) includes welding them into one piece.

5. The reaction furnace with a belt deviation correction conveying device used in a CVD method according to claim 1, characterized in that The width of the strip-shaped groove (4A1) is greater than the width of the rigid strip (6), and the length of the rigid strip (6) is greater than the width of the belt (2A).

Images