Flash evaporation equipment and flash evaporation system
By designing flash evaporation equipment and systems, using the boiling point of organic solvents under vacuum environment, the rapid deposition and grain growth of perovskite films are achieved, which solves the problem of mass production of perovskite batteries in the existing technology, and achieves efficient battery preparation and performance improvement.
Patent Information
- Application Number
- CN202510299986.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-13
- Publication Date
- 2025-06-13
AI Technical Summary
The prior art is difficult to effectively prepare perovskite batteries under mass production conditions, and it is impossible to achieve efficient grain growth and thin film deposition.
A flash evaporation device and system are designed, including a boat loading assembly and a vacuum assembly, which achieves rapid deposition of perovskite films and grain growth through the boiling point of organic solvents under vacuum environment.
The mass coating and mass production of perovskite batteries have been achieved, the performance and stability of the batteries have been improved, and the needs of industrial production have been met.
Smart Images
Figure CN120152586A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the fields of semiconductor and photovoltaic technologies, and particularly to a flash evaporation device and a flash evaporation system. Background Art
[0002] Perovskite solar cells, also known as perovskite solar cells or hybrid perovskite solar cells, are a new type of solar cell technology. Compared with traditional silicon-based solar cells, perovskite solar cells have higher energy conversion efficiency and lower manufacturing costs. Preparing perovskite solar cells through a flash evaporation process can improve the performance and stability of the cells, especially significantly improving the optoelectronic properties of perovskite through flash evaporation treatment technology.
[0003] In related technologies, currently conventional flash evaporation devices mainly adopt the following form. The perovskite material is dissolved in an organic solvent to form a hybrid perovskite solution. After the perovskite solution undergoes processes such as coating, inkjet printing, or spin coating, a single substrate is placed in a reaction container, and the organic solvent is brought to the boiling point by heating, vacuum pumping, or a combination of heating and vacuum pumping to achieve the purpose of grain growth.
[0004] However, the above process scheme can only achieve the laboratory preparation of perovskite solar cells and cannot meet the mass production requirements. Summary of the Invention
[0005] In view of this, embodiments of the present application provide a flash evaporation device and a flash evaporation system to solve the problem that perovskite solar cells in related technologies cannot meet the mass production requirements.
[0006] In a first aspect, an embodiment of the present application provides a flash evaporation device for flash evaporating a sheet material. The sheet material is placed on a carrier boat assembly, and the carrier boat assembly has placement positions for a plurality of sheet materials. The sheet material is placed at the placement position. The flash evaporation device includes: a flash evaporation tank assembly having an accommodation chamber, wherein the carrier boat assembly is removably disposed in the accommodation chamber; a vacuum pumping assembly communicated with the flash evaporation tank assembly and configured to provide a vacuum environment for the flash evaporation tank assembly.
[0007] In combination with the first aspect, the flash evaporation tank assembly includes: a tank body extending in the vertical direction, the accommodation chamber is disposed in the tank body, and a plurality of placement positions are arranged at intervals in the vertical direction.
[0008] In combination with the first aspect, the flash evaporation tank assembly further includes: a plurality of flow equalizing covers disposed in the accommodation chamber, the plurality of flow equalizing covers are nested with each other in sequence from the inside to the outside, the flow equalizing covers extend in the vertical direction, and the flow equalizing covers have a plurality of flow equalizing holes penetrating therethrough, and the flow equalizing holes extend in the horizontal direction.
[0009] In combination with the first aspect, a plurality of flow equalizing holes are arranged in an array on the corresponding flow equalizing cover, and the flow equalizing holes of adjacent two flow equalizing covers are arranged in a staggered manner.
[0010] In combination with the first aspect, the tank body includes: a frame; a receiving cylinder disposed on the frame, the receiving cylinder extending in the vertical direction, the receiving cylinder having a receiving chamber and an upper opening; a cover that can be opened and closed to cover the upper opening; a driving mechanism disposed on the receiving cylinder and connected to the cover to drive the cover to open or close the receiving cylinder.
[0011] In combination with the first aspect, the tank body has a vacuum-breaking hole, and the flash evaporation tank assembly further includes: a vacuum-breaking valve disposed outside the tank body and communicating with the receiving chamber through the vacuum-breaking hole to open or close the vacuum-breaking hole.
[0012] In combination with the first aspect, the vacuum pumping assembly includes: a vacuum pump group communicating with the flash evaporation tank assembly, the vacuum pump group capable of pumping the pressure in the receiving chamber to a first preset negative pressure; a molecular pump communicating with the flash evaporation tank assembly, the molecular pump capable of pumping the pressure in the receiving chamber to a second preset negative pressure, and the absolute value of the first preset negative pressure is less than the absolute value of the second preset negative pressure.
[0013] In combination with the first aspect, the vacuum pumping assembly further includes: a first pipe section, the first end of the first pipe section communicating with the vacuum pump group; a second pipe section, the first end of the second pipe section communicating with the flash evaporation tank assembly; a filtering assembly communicating with the second end of the first pipe section and the second end of the second pipe section respectively.
[0014] In combination with the first aspect, the vacuum pumping assembly further includes: a first valve located below the flash evaporation tank assembly, one end of the first valve communicating with the second pipe section and the other end of the first valve communicating with the flash evaporation tank assembly; and / or, the vacuum pumping assembly further includes: a second valve located above the flash evaporation tank assembly, one end of the second valve communicating with the molecular pump and the other end of the second valve communicating with the flash evaporation tank assembly.
[0015] In the second aspect, another embodiment of the present application provides a flash evaporation system, including: the flash evaporation device provided above for performing flash evaporation on the sheet; a carrier boat assembly removably disposed in the receiving chamber of the flash evaporation device, the carrier boat assembly having a plurality of placement positions for the sheets, and the sheets are placed at the placement positions.
[0016] Place the plurality of sheets coated with the precursor solution at the corresponding plurality of placement positions of the carrier boat assembly, place the carrier boat assembly in the receiving chamber of the flash evaporation tank assembly, and then the flash evaporation process can be performed on the plurality of sheets. Since the vacuum pumping assembly can communicate with the flash evaporation tank assembly, the vacuum pumping assembly is used to evacuate the receiving chamber of the flash evaporation tank assembly to make the vacuum degree in the receiving chamber meet the requirements. Under the action of the negative pressure, the boiling point of the organic solvent can be quickly reached, so that the organic solvent on the sheet can be quickly vaporized, and the perovskite thin film is deposited on the sheet, thereby achieving the purpose of grain growth. The plurality of placement positions of the carrier boat assembly can carry a plurality of sheets, enabling batch coating of the sheets and realizing mass production of perovskite batteries. Description of the Drawings
[0017] The above and other objects, features, and advantages of the present application will become more apparent by describing the embodiments of the present application in more detail with reference to the accompanying drawings. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation to the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.
[0018] Figure 1 The structural schematic diagram of a flash evaporation device provided by an embodiment of the present application is shown.
[0019] Figure 2 The cross-sectional view of a flash evaporation system provided by an embodiment of the present application is shown.
[0020] Figure 3 The front view of a flash evaporation device provided by an embodiment of the present application is shown.
[0021] Figure 4 The cross-sectional view of a flash evaporation tank assembly provided by an embodiment of the present application is shown.
[0022] Figure 5 Shown in an embodiment of the present application Figure 4 The partial enlarged view of the shown flash evaporation tank assembly at A.
[0023] Figure 6 The structural schematic diagram of a boat carrier assembly provided by an embodiment of the present application is shown.
[0024] Figure 7 The front view of a boat carrier assembly provided by an embodiment of the present application is shown.
[0025] Figure 8 Shown in an embodiment of the present application Figure 7 The partial enlarged view of the shown flash evaporation tank assembly at B.
[0026] Reference numerals:
[0027] 1. Flash evaporation device; 10. Flash evaporation tank assembly; 11. Accommodation chamber; 12. Tank body; 121. Frame; 122. Accommodation cylinder; 123. Cover; 124. Driving mechanism; 125. Vacuum breaking hole; 13. Flow equalizing cover; 131. Flow equalizing holes; 1311. First flow through hole; 1312. Second flow through hole; 132. Inner flow equalizing cover; 133. Outer flow equalizing cover; 14. Vacuum breaking valve; 20. Carrier boat assembly; 21. Placement position; 22. Top plate; 23. Bottom plate; 24. Support rod; 25. Bearing part; 30. Vacuum pumping assembly; 31. Vacuum pump group; 32. Molecular pump; 33. First pipe section; 34. Second pipe section; 35. Filter assembly; 36. First valve; 37. Second valve; X. Horizontal direction; Y. Vertical direction; 2. Flash evaporation system. Detailed implementation manners
[0028] Next, the technical solutions in the embodiments of the present application will be clearly and completely described with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.
[0029] Figure 1 The following shows a schematic structural diagram of a flash evaporation device provided by an embodiment of the present application. Figure 3 The following shows a front view of a flash evaporation device provided by an embodiment of the present application. Exemplarily, as Figure 1 and Figure 3 shown, an embodiment of the present application provides a flash evaporation device 1 for flash evaporating a sheet material. The sheet material is placed on the carrier boat assembly 20, and the carrier boat assembly 20 has placement positions 21 for a plurality of sheet materials. The sheet material is placed at the placement position 21. The flash evaporation device 1 includes a flash evaporation tank assembly 10 and a vacuum pumping assembly 30. The flash evaporation tank assembly 10 has an accommodation chamber 11, and the carrier boat assembly 20 is removably arranged in the accommodation chamber 11. The vacuum pumping assembly 30 is communicated with the flash evaporation tank assembly 10 and is configured to provide a vacuum environment for the flash evaporation tank assembly 10.
[0030] Among them, the flash evaporation device 1 includes a flash evaporation tank assembly 10 and a vacuum pumping assembly 30. A plurality of sheets coated with a precursor solution are placed at a plurality of placement positions 21 of the boat assembly 20 one by one, and the boat assembly 20 is placed in the accommodation chamber 11 of the flash evaporation tank assembly 10, and then the flash evaporation process can be carried out on the plurality of sheets. Since the vacuum pumping assembly 30 is communicated with the flash evaporation tank assembly 10, the accommodation chamber 11 of the flash evaporation tank assembly 10 is evacuated by using the vacuum pumping assembly 30 so that the required vacuum degree is reached in the accommodation chamber 11. Under the action of negative pressure, the boiling point of the organic solvent can be quickly reached, so that the organic solvent on the sheet can be quickly vaporized, and the perovskite thin film is deposited on the sheet, thereby achieving the purpose of grain growth. The plurality of placement positions 21 of the boat assembly 20 can carry a plurality of sheets, enabling batch coating of the sheets and realizing mass production of perovskite batteries.
[0031] In some embodiments, first, an organic material and an inorganic material are dissolved in an organic solvent according to a set ratio, and a precursor solution meeting the requirements can be prepared. Then, the prepared precursor solution is coated on the sheet, and the coating method can adopt processes such as coating, inkjet printing, or spin coating, etc., so that a sheet coated with the precursor solution can be obtained.
[0032] In the preparation of perovskite thin films, the vacuum flash evaporation-assisted spraying method can be adopted to overcome the problems of large thickness variation and large roughness of the traditional spraying method, and realize the preparation of high-quality perovskite thin films.
[0033] Among them, flash evaporation technology can also be used for the interface treatment of perovskite batteries. For example, by surface-treating the perovskite thin film through the flash evaporation method, an effective passivation layer can be formed, reducing the interfacial non-radiative recombination loss, thereby improving the photoelectric conversion efficiency of the battery.
[0034] Specifically, the sheet referred to in this application can be a silicon wafer or a glass substrate, etc.
[0035] Figure 4 The figure shows a cross-sectional view of the flash evaporation tank assembly of the flash evaporation device provided by an embodiment of the present application. Figure 5 As shown Figure 4 The partial enlarged view of the position A in Figure 4 As shown, the flash evaporation tank assembly 10 includes a tank body 12, the tank body 12 extends along the vertical direction Y, the accommodation chamber 11 is arranged in the tank body 12, and a plurality of placement positions 21 are arranged at intervals along the vertical direction Y. By adopting the above-mentioned vertical tank body 12, compared with the horizontal tank body 12 structure, the space occupation of the device can be reduced, which is beneficial to the layout of the device and reduces the investment cost.
[0036] Moreover, since the tank body 12 provided in this application is of a vertical structure, in order to be adapted to the vertical structure, the plurality of placement positions 21 of the boat assembly 20 are also arranged along the vertical direction Y.
[0037] Among them, in order to extend the service life of the tank body 12, the inner wall of the tank body 12 should be coated with a corrosion-resistant coating.
[0038] As Figure 4 and Figure 5 As shown, the flash evaporation tank assembly 10 further includes a plurality of flow equalizing covers 13. The flow equalizing covers 13 are arranged in the accommodation chamber 11. The plurality of flow equalizing covers 13 are nested in sequence from the inside to the outside. The flow equalizing covers 13 extend along the vertical direction Y. The flow equalizing covers 13 have a plurality of flow equalizing holes 131 penetrating therethrough. The flow equalizing holes 131 extend along the horizontal direction X. Since the flash evaporation device 1 needs a relatively high vacuum degree in the accommodation chamber 11 when flash evaporating the sheet material, when the vacuum pumping assembly 30 is used to pump the tank body 12 to a vacuum, the gas flow rate is relatively large. Through the arrangement of the flow equalizing covers 13, when the gas flows, the gas will pass through the flow equalizing holes 131 of the flow equalizing covers 13, thereby being able to achieve the effect of flow equalization, avoiding airflow disturbance phenomena such as vortex or backflow, and further avoiding affecting the quality of the perovskite thin film.
[0039] As Figure 4 As shown, a plurality of flow equalizing holes 131 are arranged in an array on the corresponding flow equalizing cover 13, and the flow equalizing holes 131 of two adjacent flow equalizing covers 13 are arranged in a staggered manner.
[0040] Specifically, by arranging the flow equalizing holes 131 of two adjacent flow equalizing covers 13 in a staggered manner, it is possible to make the airflow generate a tortuous flow path when passing through the flow equalizing cover 13, thereby extending the flow path of the airflow and further delaying the possibility of airflow disturbance phenomena such as vortex or backflow during the airflow movement process.
[0041] Exemplarily, the flow equalizing cover 13 is of a cylindrical structure, and a plurality of flow equalizing holes 131 are arranged in an array along the axial direction of the cylindrical structure.
[0042] Among them, the flow equalizing holes 131 of two adjacent flow equalizing covers 13 being arranged in a staggered manner may mean that, in the axial direction of the flow equalizing cover 13 and in the radial direction of the flow equalizing cover 13, the axial positions of the flow equalizing holes 131 of two adjacent flow equalizing covers 13 are staggered and there is no overlap. Or, in the axial direction of the flow equalizing cover 13, the axial positions of the flow equalizing holes 131 of two adjacent flow equalizing covers 13 are staggered and there is no overlap. Or, in the radial direction of the flow equalizing cover 13, the axial positions of the flow equalizing holes 131 of two adjacent flow equalizing covers 13 are staggered and there is no overlap.
[0043] In some embodiments, as Figure 4 and Figure 5As shown, a plurality of flow equalizing covers 13 may include an inner flow equalizing cover 132 and an outer flow equalizing cover 133 which are nested from the inside to the outside. Both the inner flow equalizing cover 132 and the outer flow equalizing cover 133 are cylindrical structures. The plurality of flow equalizing holes 131 include a plurality of first through holes 1311 that penetrate and are arranged in an array on the inner flow equalizing cover 132 and a plurality of second through holes 1312 that penetrate and are arranged in an array on the outer flow equalizing cover 133. Both the first through holes 1311 and the second through holes 1312 extend along the horizontal direction X and are arranged in a staggered manner.
[0044] Specifically, in order to prevent damage to the inner flow equalizing cover 132 and the outer flow equalizing cover 133 after the organic solvent flashes, a corrosion-resistant coating is applied to the outer surfaces of both the inner flow equalizing cover 132 and the outer flow equalizing cover 133. Alternatively, in other embodiments, both the inner flow equalizing cover 132 and the outer flow equalizing cover 133 are made of corrosion-resistant materials.
[0045] In some embodiments, a carrier platform is provided on the innermost flow equalizing cover 13, and the carrier assembly 20 is placed on the carrier platform.
[0046] As Figure 1 and Figure 2 shown, the tank body 12 includes a frame 121, a receiving cylinder 122, a cover 123, and a driving mechanism 124. The receiving cylinder 122 is arranged on the frame 121. The receiving cylinder 122 extends along the vertical direction Y and has a receiving chamber 11 and an upper opening. The cover 123 is detachably covered on the upper opening. The driving mechanism 124 is arranged on the receiving cylinder 122 and is connected to the cover 123 to drive the cover 123 to open or cover the receiving cylinder 122. By using the driving mechanism 124, the cover 123 can be opened from the receiving cylinder 122 to expose the upper opening. The carrier assembly 20 containing the sheet material is placed in the receiving chamber 11 through the upper opening. Then, the driving mechanism 124 is used to cover the cover 123 on the receiving cylinder 122 to perform flash evaporation on the sheet material. After the flash evaporation process is completed, the pressure in the receiving chamber 11 is restored to atmospheric pressure, and then the cover 123 can be opened from the receiving cylinder 122 by using the driving mechanism 124, and the precipitated sheet material and the carrier assembly 20 can be taken out of the receiving chamber 11.
[0047] In some embodiments, the driving mechanism 124 may adopt an electric cylinder, a cylinder, or other linear driving members, and the cover 123 is opened or covered by making the push rod of the linear driving member extend or retract relative to the body.
[0048] As Figure 3As shown, the tank body 12 has a vacuum-breaking hole 125. The flash evaporation tank assembly 10 further includes a vacuum-breaking valve 14. The vacuum-breaking valve 14 is disposed outside the tank body 12 and is communicated with the accommodation chamber 11 through the vacuum-breaking hole 125 to open or close the vacuum-breaking hole 125. After the flash evaporation process is completed, by communicating the vacuum-breaking valve 14 with the accommodation chamber 11, the pressure inside the tank body 12 can be restored to the atmospheric pressure, and then the tank body 12 can be safely opened, preventing the cover 123 from being unable to be safely opened due to excessive negative pressure inside the tank body 12, improving the safety performance of the equipment and extending the service life of the equipment.
[0049] In some embodiments, the vacuum-breaking valve 14 can achieve unmanned operation, can automatically sense and open or close according to the pressure change inside the system, without manual intervention, greatly improving the automation degree and operation efficiency of the system. Moreover, the action of the vacuum-breaking valve 14 is sensitive and can be quickly opened.
[0050] As Figure 1 and Figure 2 As shown, the vacuum pumping assembly 30 includes a vacuum pump group 31 and a molecular pump 32. The vacuum pump group 31 is communicated with the flash evaporation tank assembly 10. The vacuum pump group 31 can pump the pressure inside the accommodation chamber 11 to a first preset negative pressure. The molecular pump 32 is communicated with the flash evaporation tank assembly 10. The molecular pump 32 can pump the pressure inside the accommodation chamber 11 to a second preset negative pressure, and the absolute value of the first preset negative pressure is less than the absolute value of the second preset negative pressure. By using the vacuum pump group 31, the gas inside the accommodation chamber 11 can be quickly pumped, improving the gas pumping speed and quickly establishing a vacuum environment inside the accommodation chamber 11. By using the molecular pump 32, the vacuum degree inside the accommodation chamber 11 can be further improved to reach the second preset negative pressure, meeting the conditions for the flash evaporation of organic solvents and realizing the rapid flash evaporation of organic solvents.
[0051] Among them, the vacuum pump is mainly used for working at a relatively low vacuum degree and is suitable for initially evacuating the accommodation chamber 11. By having a relatively large pumping flow rate, a negative pressure environment can be quickly established inside the tank body 12. The vacuum pump mainly changes the volume of the gas inside the pump through mechanical movement, thereby realizing the inhalation and discharge of the gas. The structure is relatively simple and the maintenance cost is relatively low. A rotary vane vacuum pump, a dry screw vacuum pump or a Roots vacuum pump can be adopted.
[0052] The molecular pump 32 is mainly used for working at a high vacuum degree and is suitable for occasions requiring a high vacuum environment. The molecular pump 32 has a relatively fast pumping speed, but a relatively small pumping flow rate, enabling the inside of the tank body 12 to reach the second preset negative pressure. The structure is complex and the maintenance cost is relatively high, but it can provide a higher vacuum degree and a cleaner vacuum environment. A traction molecular pump 32, a turbo molecular pump 32 or a compound molecular pump 32 can be adopted.
[0053] As Figure 2 and Figure 3As shown, the vacuum pumping assembly 30 further includes a first pipe segment 33, a second pipe segment 34, and a filtering assembly 35. The first end of the first pipe segment 33 communicates with the vacuum pump group 31, the first end of the second pipe segment 34 communicates with the flash evaporation tank assembly 10, and the filtering assembly 35 communicates with the second end of the first pipe segment 33 and the second end of the second pipe segment 34 respectively. Through the arrangement of the filtering assembly 35, it is possible to prevent the organic solvent after flash evaporation from entering the vacuum pump group 31 through the first pipe segment 33 and the second pipe segment 34, thereby protecting the vacuum pump group 31 and preventing the vacuum pump group 31 from being damaged.
[0054] In some embodiments, the filtering assembly 35 includes a filtering housing and a filter medium disposed within the filtering housing, and the filter medium should have a sufficient filtering area. Moreover, the second ends of the first pipe segment 33 and the second pipe segment 34 should have a sufficient distance to enable the organic solvent to have a sufficiently large flow path and fully contact the filter medium.
[0055] As Figure 2 and Figure 3 As shown, the vacuum pumping assembly 30 further includes a first valve 36. The first valve 36 is located below the flash evaporation tank assembly 10. One end of the first valve 36 communicates with the second pipe segment 34, and the other end of the first valve 36 communicates with the flash evaporation tank assembly 10. The first valve 36 can be used to open or close the communication path between the vacuum pump group 31 and the tank body 12. When the vacuum pump group 31 and the tank body 12 are in communication, the gas in the tank body 12 is pumped out by the vacuum pump group 31 to form a vacuum environment in the accommodation chamber 11. When the first preset negative pressure is reached, the communication path between the vacuum pump group 31 and the tank body 12 is closed so that the accommodation chamber 11 can be maintained in the first preset negative pressure state.
[0056] Among them, the first valve 36 can adopt a shut-off valve with a relatively low cost and good sealing performance, and the specific form can be a ball valve, a butterfly valve, a gate valve, etc.
[0057] Among them, the second end of the second pipe segment 34 extends below the tank body 12 and communicates with the lower part of the tank body 12 through the first valve 36. During the process of pumping vacuum by the vacuum pump group 31, the air flow rate is relatively large. Since the second pipe segment 34 communicates with the lower part of the tank body 12, the gas flows from top to bottom, and when the gas flows, it will pass through the flow equalizing holes 131 of the flow equalizing cover 13 to form a flow equalizing effect and avoid disturbance phenomena such as eddy currents generated by the gas with too large a flow rate. After the vacuum pump group 31 finishes working, that is, when the pressure in the accommodation chamber 11 reaches the first preset negative pressure, at this time, the gas in the accommodation chamber 11 is less, and the molecular pump 32 is used to continue pumping vacuum for the accommodation chamber 11. Since the gas is already less, at this time, the gas flow rate is also small, and the flow equalizing effect of the flow equalizing cover 13 is not as significant as that during the operation of the vacuum pump group 31.
[0058] As Figure 2 andFigure 3 As shown, the vacuum pumping assembly 30 further includes a second valve 37. The second valve 37 is located above the flash tank assembly 10. One end of the second valve 37 communicates with the molecular pump 32, and the other end of the second valve 37 communicates with the flash tank assembly 10. The second valve 37 can be used to open or close the communication path between the molecular pump 32 and the tank body 12. When the molecular pump 32 is in communication with the tank body 12, the molecular pump 32 is used to pump out the gas in the tank body 12 so that the second preset negative pressure can be achieved in the accommodation chamber 11. At this time, the communication path between the molecular pump 32 and the tank body 12 is closed, so that the accommodation chamber 11 can be maintained in the second preset negative pressure state, realizing the rapid flash evaporation of the organic solvent.
[0059] Among them, the second valve 37 can adopt a butterfly valve that integrates sealing and pressure control.
[0060] Figure 6 The figure shows a schematic structural view of the boat assembly of the flash evaporation device provided by an embodiment of the present application. Figure 7 The figure shows a front view of the boat assembly of the flash evaporation device provided by an embodiment of the present application. Figure 8 As shown in an embodiment of the present application Figure 7 The partial enlarged view of the flash tank assembly shown at B. As Figures 6 to 8 As shown, the boat assembly 20 includes a top plate 22, a bottom plate 23, and a plurality of support rods 24. The bottom plate 23 is disposed opposite to the top plate 22. The support rods 24 all extend along the vertical direction Y. Two ends of the support rods 24 are respectively connected to the top plate 22 and the bottom plate 23. The plurality of support rods 24 are spaced apart along the circumferential direction of the top plate 22. One side of the support rods 24 opposite to each other has a plurality of bearing portions 25 spaced apart along the vertical direction Y. The plurality of bearing portions 25 located on the same horizontal plane together form a placement position 21. By using the bearing portions 25 on the bearing rods to support the sheet material, the number of the bearing portions 25 can be set according to the shape of the sheet material, so that each force-bearing part of the sheet material can be supported, making the support of the sheet material more stable.
[0061] Exemplarily, the sheet material is a rectangular sheet structure, and the number of the support rods 24 is four. The four support rods 24 are respectively connected to the four corners of the bottom plate 23 and the four corners of the top plate 22. The four corners of the sheet material are supported by the bearing portions 25 of the four support rods 24, making the support effect more stable.
[0062] Among them, the bearing portion 25 can be in the form of a bearing boss or in the form of a bearing groove. In order to make the film deposited on the sheet material have good quality, the bearing portion 25 of the present application is set in the form of a bearing boss.
[0063] The wafer carrier assembly 20 of the sheet is an important tool for carrying and transporting silicon wafers in the semiconductor manufacturing and solar cell production processes. In some embodiments, the carrier is made of high-purity single-crystalline silicon or polycrystalline silicon materials, which have the same physical properties as the wafers and similar coefficients of thermal expansion, avoiding lattice misalignment caused by different coefficients of thermal expansion and thermal conductivity, thereby improving the wafer yield. Moreover, the carrier assembly 20 can remain stable in high-temperature and vacuum environments and is indispensable in both horizontal furnaces and vertical furnaces.
[0064] The following describes the specific usage process of the flash evaporation device 1 provided by the present application: First, place the wafer coated with the precursor solution at the placement position 21 of the carrier assembly 20, and the wafers are sequentially placed on the carrier assembly 20 according to the layout form of the placement position 21. Use the driving mechanism 124 to open the cover 123 of the tank body 12, place the carrier assembly 20 with the wafers in the accommodation chamber 11, and locate it on the carrier platform of the flow equalizing cover 13. Then, cover the cover 123 on the accommodation cylinder 122 through the driving mechanism 124 to form a sealed chamber structure for the accommodation chamber 11. Next, open the first valve 36 to connect the vacuum pump group 31 with the accommodation chamber 11 of the tank body 12, start the vacuum pump group 31, and use the vacuum pump group 31 to suck the gas in the tank body 12 to reach the first preset negative pressure. At this time, close the first valve 36 to cut off the connection state between the vacuum pump group 31 and the tank body 12.
[0065] Among them, when using the vacuum pump group 31 to evacuate, the organic solvent will also evaporate and vaporize and enter the filtration assembly 35 through the second pipe section 34. The filtration assembly 35 is used to remove harmful gases to prevent damage to the vacuum pump group 31.
[0066] Next, open the second valve 37 to connect the molecular pump 32 with the accommodation chamber 11, start the molecular pump 32, and use the molecular pump 32 to continue sucking the gas in the tank body 12 to reach the second preset negative pressure and maintain it for a certain period of time to allow sufficient time for the organic solvent to flash evaporate. After the flash evaporation process is completed, close the second valve 37, open the vacuum break valve 14 to connect the accommodation chamber 11 with the outside and reach atmospheric pressure, and then the cover 123 can be safely opened. At this time, the carrier assembly 20 and the wafer deposited with the thin film can be taken out of the tank body 12 together and proceed to the next process.
[0067] Figure 2 The figure shows a cross-sectional view of a flash evaporation system provided by an embodiment of the present application. As Figure 2 shown, another embodiment of the present application provides a flash evaporation system 2. The flash evaporation system 2 includes the flash evaporation device 1 and the carrier assembly 20 provided above for flash evaporating the wafer. The carrier assembly 20 is removably disposed in the accommodation chamber 11 of the flash evaporation device 1. The carrier assembly 20 has multiple placement positions 21 for wafers, and the wafers are placed at the placement positions 21.
[0068] Since the flash evaporation system 2 includes the flash evaporation device 1, the flash evaporation system 2 has all the technical features and technical effects of the flash evaporation device 1, which will not be elaborated here.
[0069] In the embodiments of the present disclosure, if the form of connection is not clearly defined, the form of connection can be a detachable connection form such as bolt and nut, screw, buckle, magnetic attraction, etc. In some connections, if there is no special requirement for the form of non-detachable fit, non-detachable connection can be carried out by welding, bonding, etc.
[0070] The basic principles of the present application have been described above in conjunction with specific embodiments. However, it should be noted that the advantages, advantages, effects, etc. mentioned in the present application are only examples and not limitations. It cannot be considered that these advantages, advantages, effects, etc. are essential for each embodiment of the present application. In addition, the above disclosed specific details are only for the purpose of illustration and easy understanding, rather than limitations. The above details do not limit the present application to necessarily adopt the above specific details to implement.
[0071] The block diagrams of the devices, apparatuses, equipment, and systems involved in the present application are only illustrative examples and do not intend to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any way. Words such as "including", "comprising", "having", etc. are open-ended words, meaning "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the word "and / or", and can be used interchangeably with it, unless the context clearly indicates otherwise. The word "such as" used here refers to the phrase "such as but not limited to", and can be used interchangeably with it.
[0072] It should also be noted that in the devices, equipment, and methods of the present application, each component or each step can be decomposed and / or recombined. These decompositions and / or recombinations should be regarded as equivalent solutions of the present application.
[0073] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects are very obvious to those skilled in the art, and the general principles defined here can be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown here, but rather to the broadest scope consistent with the principles and novel features disclosed here.
[0074] The foregoing description has been presented for purposes of illustration and description. In addition, this description is not intended to limit embodiments of the present application to the form disclosed herein. Although several example aspects and embodiments have been discussed above, those skilled in the art will recognize some of their variations, modifications, alterations, additions, and sub-combinations.
Claims
1. A flash evaporation device for flash evaporating a sheet material, wherein: The sheet is placed on a boat carrier assembly, and the boat carrier assembly has a plurality of placement positions for the sheet, and the sheet is placed on the placement positions. It is characterized in that the flash evaporation equipment comprises: A flash tank assembly having a receiving chamber, wherein the flash tank assembly is configured to flash the sheet material, wherein the boat assembly is removably disposed in the receiving chamber; The vacuum assembly is communicated with the flash tank assembly and is configured to provide a vacuum environment for the flash tank assembly.
2. The flash evaporation equipment according to claim 1, characterized in that: The flash tank assembly comprises: The tank body extends in a vertical direction, the accommodating chamber is arranged in the tank body, and a plurality of the placement positions are arranged at intervals in the vertical direction.
3. The flash evaporation equipment according to claim 2, characterized in that: The flash tank assembly also includes: A plurality of flow equalizers are arranged in the accommodating chamber, and the plurality of flow equalizers are nested in sequence from the inside to the outside. The flow equalizers extend along the vertical direction, and the flow equalizers have a plurality of flow equalizer holes that are arranged through the flow equalizers, and the flow equalizer holes extend along the horizontal direction.
4. The flash evaporation equipment according to claim 3, characterized in that: A plurality of flow-uniform hole arrays are arranged on the corresponding flow-uniform covers, and the flow-uniform holes of two adjacent flow-uniform covers are arranged in a staggered manner.
5. The flash evaporation equipment according to claim 2, characterized in that: The tank body comprises: frame; An accommodating tube, arranged on the frame, extending in a vertical direction, and having the accommodating chamber and an upper opening; A cover, which can be opened and closed to cover the upper opening; The driving mechanism is arranged on the accommodating cylinder and connected with the sealing cover to drive the sealing cover to open or close the accommodating cylinder.
6. The flash evaporation equipment according to claim 2, characterized in that: The tank body has a vacuum breaking hole, and the flash tank assembly also includes: A vacuum breaking valve is arranged outside the tank body and is connected with the accommodating chamber through the vacuum breaking hole to open or close the vacuum breaking hole.
7. The flash evaporation equipment according to any one of claims 1 to 6, characterized in that: The vacuum assembly comprises: A vacuum pump group, the vacuum pump group is connected to the flash tank assembly, and the vacuum pump group can pump the pressure in the containing chamber to a first preset negative pressure; A molecular pump is connected to the flash tank assembly, and the molecular pump can pump the pressure in the containing chamber to a second preset negative pressure, wherein the absolute value of the first preset negative pressure is less than the absolute value of the second preset negative pressure.
8. The flash evaporation equipment according to claim 7, characterized in that: The vacuum assembly also includes: a first pipe section, wherein a first end of the first pipe section is connected to the vacuum pump assembly; a second pipe segment, wherein a first end of the second pipe segment is in communication with the flash tank assembly; The filter assembly is connected to the second end of the first pipe segment and the second end of the second pipe segment respectively.
9. The flash evaporation equipment according to claim 8, characterized in that The vacuum pumping assembly further includes: a first valve, located below the flash tank assembly, one end of the first valve being in communication with the second pipe section, and the other end of the first valve being in communication with the flash tank assembly; and / or, The vacuum pumping assembly further includes: a second valve located above the flash tank assembly, one end of the second valve being connected to the molecular pump, and the other end of the second valve being connected to the flash tank assembly.
10. A flash evaporation system, characterized in that: include: The flash evaporation device according to any one of claims 1 to 9, used for flash evaporation of a sheet material; The boat carrier assembly is detachably disposed in the containing chamber of the flash evaporation device, and the boat carrier assembly has a plurality of placement positions for the sheets, and the sheets are placed in the placement positions.