Network structure forming device and method for manufacturing glass provided with

Abstract

A mesh structure layer forming apparatus (1) includes: a pressure vessel (10) accommodating a treatment solution (21) and a glass substrate (22) immersed in the treatment solution (21) at a predetermined pressure; a pressurizing device that pressurizes the pressure vessel (10); and a stirring device (21) for stirring the treatment solution, and the network structure layer forming device (1) forms a network structure layer on the surface of the glass substrate (22) in the treatment solution in an alkaline environment.

Description

Technical Field

[0001] The present invention relates to a device for forming a network structure layer on the surface of a glass substrate and a method for manufacturing glass having a network structure layer. Background Art

[0002] Glass substrates are used in display screens such as windows, exterior walls, doors, mirrors, display cabinets, electronic device displays, camera lenses, or smartphones for automobiles, airplanes, ships, railways, and building materials. Depending on the intended use and requirements of the product, the surface of the glass substrate needs to have anti-fouling, water-repellent, hydrophilic, anti-reflection, and other functions (hereinafter referred to as "anti-fouling functions, etc."). For example, in order to impart an anti-reflection function to a glass substrate, a commonly known method is to stack multiple dielectric films. However, the method of stacking films on a glass substrate has limitations in terms of heat resistance, chemical resistance, and abrasion resistance. On the other hand, as an excellent structure for imparting multiple functions to a glass substrate, as shown in Patent Document 1, there is a structure having a network structure layer on the surface of the glass substrate.

[0003] In order to form a network structure layer on the surface of a glass substrate, Patent Document 2 proposes a method in which the glass substrate is immersed in an aqueous potassium hydrogen carbonate solution and the solution temperature is heated to 30°C to 90°C, preferably 50°C to 80°C, to form a network structure layer.

[0004] Prior Art Documents

[0005] Patent Documents

[0006] Patent Document 1: Japanese Patent No. 6211247

[0007] Patent Document 2: International Publication No. 2016 / 021558 Summary of the Invention

[0008] Problems to be Solved by the Invention

[0009] However, with the formation method disclosed in Patent Document 2, it takes nearly 24 hours of long-term immersion to form a network structure layer with a sufficient thickness. In addition, by simply heating the solution, it is impossible to form a network structure layer with an optimal depth that has ideal effects such as anti-fouling functions on the surface of the glass substrate, and unevenness appears on the surface, making it difficult to perform uniform processing.

[0010] In view of the above circumstances, the present invention aims to provide a device for forming a network structure layer that can form a network structure layer with a sufficient depth on the surface of a glass substrate and can perform uniform surface treatment in a short time, and a method for manufacturing glass having a network structure layer.

[0011] Technical Means for Solving the Problems

[0012] According to a first aspect of the present invention, a reticulated structure layer forming apparatus is an apparatus for forming a reticulated structure layer on the surface of a glass substrate, comprising:

[0013] A pressure vessel that houses a treatment solution and a glass substrate immersed in the treatment solution under a predetermined pressure;

[0014] A pressurizing device that pressurizes the pressure vessel;

[0015] A stirring device that stirs the treatment solution; and

[0016] The reticulated structure layer forming apparatus forms a reticulated structure layer on the surface of the glass substrate in a treatment solution under an alkaline environment.

[0017] It may further include a heating device for heating the interior of the pressure vessel.

[0018] The stirring device may be a substrate rotating device that stirs the treatment solution by rotating the glass substrate.

[0019] The stirring device may be a solution stirring device that directly stirs the treatment solution by a stirring member.

[0020] It may further include a control gas supply device that supplies a control gas to the treatment solution to control the treatment speed.

[0021] The treatment solution may be a solution containing bicarbonate, and the control gas supply device supplies the same control gas as the gas generated by reacting with the treatment solution.

[0022] It may further include a substrate holding member that holds the glass substrate in the treatment solution, wherein the substrate rotating device rotates the substrate holding member.

[0023] The glass substrate may be treated in a treatment solution at 100 °C or higher by the heating device.

[0024] The substrate rotating device may non - contactlessly rotate the substrate holding member through a first magnetic body mounted on the substrate holding member and a second magnetic body disposed outside the container that houses the treatment solution.

[0025] It may further include a solution container disposed inside the pressure vessel, wherein the treatment solution and the glass substrate are housed in the solution container.

[0026] The pressure vessel or the solution container may be made of an alkali - resistant material.

[0027] According to a second aspect of the present invention, a method for manufacturing glass with a reticulated structure layer is a method for manufacturing glass with a reticulated structure layer by treating glass with a treatment solution in a pressure vessel, comprising:

[0028] Steps for pressurizing the interior of a pressure vessel;

[0029] Steps for stirring the treatment solution within the pressure vessel; and

[0030] Steps for forming a network structure layer on the surface of a glass substrate through the treatment solution in an alkaline environment.

[0031] Advantages of the Invention

[0032] According to the present invention, it is possible to provide a network structure layer forming apparatus and a manufacturing method of glass having a network structure layer that can form a sufficiently deep network structure layer on the surface of a glass substrate and can perform uniform surface treatment in a short time. Description of the Drawings

[0033] Figure 1 is a conceptual diagram of a network structure layer forming apparatus according to an embodiment of the present invention.

[0034] Figure 2 is a longitudinal sectional view showing the network structure layer forming apparatus of the present embodiment.

[0035] Figure 3 is an exploded perspective view showing the main part of the network structure layer forming apparatus.

[0036] Figure 4A is a driving principle diagram of a non-contact driving part, showing the relationship between a first driving magnet and a first driven magnet.

[0037] Figure 4B is a driving principle diagram of a non-contact driving part, showing the relationship between a second driving magnet and a second driven magnet.

[0038] Figure 5 is a conceptual diagram of Modification 1.

[0039] Figure 6A is a graph comparing the relationship between the film thickness change of the network structure layer and the treatment time with and without the supply of carbon dioxide.

[0040] Figure 6B is a scanning electron microscope (hereinafter referred to as "SEM") image of the cross-section of a glass substrate when the carbon dioxide concentration changes.

[0041] Figure 7 is a conceptual diagram of Modification 2.

[0042] Figure 8 is a conceptual diagram of Modification 3.

[0043] Figure 9 is a conceptual diagram of Modification 4.

[0044] Figure 10 Conceptual diagram of Modification 5.

[0045] Figure 11A It is an SEM image of the glass substrate after surface treatment, showing the SEM image of the glass substrate surface.

[0046] Figure 11B It is an SEM image of the glass substrate after surface treatment, showing the SEM image of the cross-section of the glass substrate. Detailed implementation manners

[0047] Hereinafter, the implementation manners of the mesh structure layer forming apparatus according to the present invention will be described with reference to the drawings. The implementation manners described below are for illustration only and do not limit the scope of the present invention. Therefore, those skilled in the art can adopt implementation manners in which these elements or all elements are replaced with equivalent elements, and these implementation manners are also included in the scope of the present invention.

[0048] (Implementation manner)

[0049] One implementation manner of the present invention relates to the structure of a film forming apparatus, which will be described with reference to Figure 1 -4. This implementation manner is a mesh structure layer forming apparatus for immersing a substrate in a treatment solution to form a fine mesh structure layer on the surface of the substrate. The glass whose surface is treated by the mesh structure layer forming apparatus of this implementation manner is defined as hierarchical nano porous layer (HNL) glass.

[0050] Figure 11A It is a scanning electron microscope (SEM) image of the HNL surface using SEM, Figure 11B It is an SEM image of the cross-section of the sample. As shown in the image, the HNL has meshes in the three-dimensional mesh structure layer, and the meshes gradually become smaller in the direction from the surface to the inside. The HNL glass exhibits excellent hydrophilicity and has functions such as a self-cleaning effect of floating and easily removing stains and an antifouling function.

[0051] The mesh size on the surface of the mesh structure layer is generally preferably set to 1 μmm or less, which is smaller than the size of normal dust, and the thickness of the mesh structure layer is preferably appropriately selected according to the target function.

[0052] (Overall composition of the mesh structure layer forming apparatus)

[0053] Figure 1To show the overall structural concept of the mesh structure layer forming apparatus 1 according to the present embodiment. The mesh structure layer forming apparatus 1 includes a pressure vessel 10, a solution container 20 disposed inside the pressure vessel 10, a stirring device 30 for stirring the processing solution 21 placed in the solution container 20, and a pressurizing device 40 for pressurizing the inside of the pressure vessel 10. The mesh structure layer forming apparatus 1 is a device for surface-treating the glass substrate 22 by placing the glass substrate 22 in the processing solution 21 of the solution container 20 and stirring the processing solution 21 using the stirring device 30.

[0054] As Figure 2 shown, the pressure vessel 10 is a sealed container designed to withstand internal and external pressures. In the present embodiment, a pressure vessel capable of maintaining the internal pressure in a state higher than the atmospheric pressure is used. Further, the pressure vessel 10 is made of a stainless steel material having high pressure resistance, and as long as a metal having pressure resistance and alkali resistance is used, it may also be partially composed of alumina (Al 2 O 3 ), etc.

[0055] The pressure vessel 10 includes a cylindrical main body portion 11, a hemispherical upper end plate 12 closing the upper end of the main body portion 11, a hemispherical lower end plate 13 closing the lower end of the main body portion 11, and feet (i.e., legs) 14 for setting the pressure vessel 10 on the ground.

[0056] The pressure vessel 10 further includes a support member for mounting the stirring device 30. Specifically, as Figure 2 , 3 shown, it includes a first support portion 11a mounted on the bottom of the pressure vessel 10 and a second support portion 11b mounted on the upper portion. The first support portion 11a includes: a circular support portion main body 11aa along the inner circumference of the main body portion 11, plate-like members cross-arranged inside the support portion main body 11aa, and a gear support portion 11ab having a flat gear, which will be described later, for mounting as an element of the stirring device 30. The second support portion 11b includes: a circular support portion main body 11ba along the inner circumference of the main body portion 11; plate-like members mounted on the support portion main body 11ba by cutting across the support portion main body 11ba in the diameter direction, and a gear support portion 11bb for mounting a bevel gear, which will be described later, as an element of the stirring device 30.

[0057] The solution container 20 is a cylindrical container for placing the processing solution 21 and the glass substrate 22, and is disposed inside the pressure vessel 10. The inside of the solution container 20 is for placing the processing solution 21, and its material is compatible with the processing solution 21 and the corrosive substance. Specifically, it is a corrosion-resistant material, for example, made of a metal such as alumina, resin, stainless steel with a Teflon (registered trademark) coating, etc. Further, as Figure 2As shown, a substrate holding member 22a for placing and holding the glass substrate 22 is provided inside the solution container 20. In addition, the pressure vessel 10 is preferably made of a corrosion-resistant material.

[0058] The treatment solution 21 uses a weakly alkaline salt solution. In this embodiment, a sodium bicarbonate (NaHCO 3 ) solution is used. However, the present invention is not limited to sodium bicarbonate, and an aqueous solution of potassium bicarbonate (KHCO 3 ) or other alkaline aqueous solutions can also be used.

[0059] The glass substrate 22 can be made of soda-lime glass, borosilicate glass, etc. Glass can also be formed on the surface of a resin or sapphire and used as the glass substrate 22. The glass substrate 22 is not limited to a substrate composed of a glass material, but also includes a substrate formed by bonding a non-glass material and a glass material, and a substrate formed by depositing a glass material film on the surface of a non-glass material by means such as sputtering, evaporation, or coating. The glass substrate 22 is placed horizontally on the bottom of the solution container 20 and fixed by the substrate holding member 22a. Then, through the stirring device 30, the glass substrate 22 rotates in a horizontally placed state of the plate surface.

[0060] The stirring device 30 is a device for stirring the treatment solution 21, and is mainly divided into two methods: one is to stir by rotating the glass substrate 22 immersed in the treatment solution 21 (hereinafter referred to as "substrate rotation method"), and the other is to directly stir the treatment solution 21 by a stirring member (hereinafter referred to as "solution stirring method"). In this embodiment, a method combining the substrate rotation method and the solution stirring method is adopted. This embodiment will be described by taking a typical combination of two stirring methods as an example, and other stirring methods will be described in the deformation examples described later.

[0061] As Figure 2 , 3 shown, the stirring device 30 includes a first non-contact drive unit 31, a first contact drive unit 32, a second non-contact drive unit 33, and a second contact drive unit 34. The non-contact drive units 31 and 33 are drive units that use a drive member as the first magnetic body and a driven member as the second magnetic body to transmit power without contact between the first magnetic body and the second magnetic body. The contact drive units 32 and 34 are drive units that transmit power while bringing the drive member into contact with the driven member through gears.

[0062] As Figure 2 shown by the diagonal line, the first non-contact drive unit 31 includes a first drive rotating body 31a and a first driven rotating body 31b. The first drive rotating body 31a is a cylindrical rotating body located outside the pressure vessel 10, rotates along the side surface of the main body portion 11 perpendicular to the rotation axis X1, and is driven by a drive member such as a motor (not shown). As Figure 4AAs shown, S poles and N poles are alternately magnetized around the rotating body. The first driven rotating body 31b is a cylindrical rotating body that rotates around the rotation axis X2 parallel to the first driving rotating body 31a. Similarly to the first driving rotating body 31a, S poles and N poles are alternately magnetized on the outer periphery of the rotating body. The first driven rotating body 31b is located inside the pressure vessel 10 and rotates in a non-contact manner by driving the first driving rotating body 31a located outside the pressure vessel 10 to rotate. Since non-contact rotation is adopted, there is no need to introduce a driving port, and the alkali-resistant sealing structure can be omitted, which not only avoids the complication of the device structure, but also makes the device more compact, and at the same time has the effect of suppressing the pollution inside the pressure vessel 10.

[0063] As Figure 2 , 3 shown, the first contact driving part 32 is composed of four spur gears, namely the first spur gear 32a, the second spur gear 32b, the third spur gear 32c and the fourth spur gear 32d. The first spur gear 32a is coaxially connected to the lower part of the first driven rotating body 31b and rotates with the rotation of the first driven rotating body 31b. The four spur gears are arranged in sequence as the first spur gear 32a, the second spur gear 32b, the third spur gear 32c, and the fourth spur gear 32d on the gear support part 11ab at the bottom of the pressure vessel 10, and the rotation axis of the fourth spur gear 32d is located at the center of the solution container 20. By adjusting the diameters of the four gears, an appropriate reduction ratio can be achieved.

[0064] As Figure 2 shown by the diagonal line in the figure, the second non-contact driving part 33 includes a second driving rotating body 33a and a second driven rotating body 33b. The second driving rotating body 33a is a disk-shaped rotating body installed on the upper surface of the fourth spur gear 32d. The second driving rotating body 33a is arranged on the same rotation axis Y as the rotation axis of the fourth spur gear 32d and rotates with the rotation of the fourth spur gear 32d. As Figure 4B shown, S poles and N poles are alternately magnetized on the plate surface of the second driving rotating body 33a on the disk. The second driven rotating body 33b is a disk-shaped rotating body fixed to the bottom of the solution container 20, and the second driven rotating body 33b rotates around the same rotation axis as the rotation axis Y of the second driving rotating body 33a. Similarly to the second driving rotating body 33a, S poles and N poles are alternately magnetized on the disk. The second driven rotating body 33b rotates with the rotation of the second driving rotating body 33a and drives the substrate holding part 22a to rotate. Through the first non-contact driving part 31, the first contact driving part 32 and the second non-contact driving part 33, a stirring device 30 with a substrate rotation mode is formed.

[0065] As Figure 2 , 3As shown, the second contact driving part 34 is composed of four bevel gears, namely a first bevel gear 34a, a second bevel gear 34b, a third bevel gear 34c and a fourth bevel gear 34d. The first bevel gear 34a is installed at the upper end of a first driving shaft 34e coaxial with the rotation shaft of the first driven rotating body 31b. The first bevel gear 34a meshes with the second bevel gear 34b installed at one end of a second driving shaft 34f arranged orthogonally to the first driving shaft 34e. The meshing of the first bevel gear 34a and the second bevel gear 34b changes the direction of the rotational force by 90 degrees, thereby driving the second driving shaft 34f to rotate. A third bevel gear 34c is installed at the other end of the second driving shaft 34f, and the third bevel gear 34c meshes with the fourth bevel gear 34d installed at one end of a third driving shaft 34g arranged orthogonally to the second driving shaft 34f. The rotation of the third bevel gear 34c changes the direction of the rotational force by 90 degrees through the fourth bevel gear 34d, thereby causing the third driving shaft 34g to rotate. A stirring blade 35 is installed at the other end of the third driving shaft 34g, and the stirring blade 35 rotates to stir the processing solution 21 in the solution container 20 by the rotation of the third driving shaft 34g. Through the first non-contact driving part 31 and the second contact driving part 34, a stirring device 30 for the solution stirring method is provided. In addition, the second bevel gear 34b, the second driving shaft 34f, the third bevel gear 34c, the fourth bevel gear 34d, the third driving shaft 34g and the stirring blade 35 are supported by a gear support part 11bb.

[0066] The stirring blade 35 is located at the center of the solution container 20 and can be in the shape of a propeller blade, a paddle blade, an anchor blade, etc. that can stir the processing solution 21, or any shape of stirring blade can be used.

[0067] The pressurizing device 40 is a device for applying a pressure higher than the atmospheric pressure inside the pressure vessel 10. In the present embodiment, a certain amount of water is added into the pressure vessel 10 and heated by a heating device (such as a heater 41) to generate water vapor 42, thereby pressurizing the inside of the pressure vessel 10. The temperature inside the pressure vessel 10 is usually 100°C - 150°C, and the pressure is set to, for example, 1 kgf / cm - 5 kgf / cm (the atmospheric pressure is 1 kgf / cm). Through the pressurizing device 40, the temperature of the processing solution 21 can be maintained above 100°C. The upper limit of the temperature of the processing solution 21 does not exceed the supercritical temperature, preferably above 100°C and below 374°C, more preferably above 105°C and below 140°C.

[0068] As Figure 2As shown, the heater 41 is located at the bottom of the pressure vessel 10 and is a sealed heater that uses a metal tube to cover the nickel-chromium wire serving as the heating element. In the present embodiment, the sealed heater 41 is arranged in a serpentine manner at the bottom of the pressure vessel 10 to heat the entire bottom. Other heat sources such as a carbon heater or a cartridge heater may also be used, or the heater may be provided outside the pressure vessel. The heater 41 is not only used to generate the water vapor 42 but also to control the temperature inside the pressure vessel 10, thereby controlling the surface treatment rate of the glass substrate 22.

[0069] (Method for manufacturing glass having a reticulated structure layer)

[0070] A method for manufacturing glass having a reticulated structure layer (including forming a glass substrate on the surface of a non-glass material) using the above-described reticulated structure layer forming apparatus 1 is as follows, and each step can be performed simultaneously in parallel processing. First, an alkaline aqueous solution is placed as the treatment solution 21 in the solution container 20, and the glass substrate 22 is immersed in the treatment solution 21. A certain amount of water is added to the pressure vessel 10, and the heater 41 is turned on to evaporate the water inside the pressure vessel 10 to generate water vapor 42 and pressurize the inside of the pressure vessel 10 (pressurization step).

[0071] When the inside of the pressure vessel 10 reaches a predetermined pressure, the stirring device 30 is started (stirring step). That is, the first non-contact drive unit 31 is driven by an electric motor, and the power is sequentially transmitted to the first contact drive unit 32 and the second non-contact drive unit 33. The power of the second non-contact drive unit 33 causes the substrate holding member 22a to rotate about the rotation axis Y, and the glass substrate 22 immersed in the solution container 20 also rotates accordingly. The rotation of the glass substrate 22 stirs the treatment solution 21. The treatment solution 21 uses a weakly alkaline aqueous solution, but an acidic or neutral aqueous solution may also be used. In the case of an acidic or neutral aqueous solution, it will turn into an alkaline aqueous solution over time. The glass substrate 22 forms a reticulated structure layer on its surface in an alkaline environment. In addition, since the treatment is performed under pressure, a reticulated structure layer having a sufficient thickness such as an antifouling function is formed on the surface of the glass substrate 22 (reticulated structure layer forming step).

[0072] The glass substrate 22 is placed in the solution container 20 with its plate surface horizontal, and the stirred treatment solution 21 can uniformly contact the plate surface of the glass substrate 22. Therefore, compared with placing the glass substrate 22 vertically, the surface treatment is more uniform.

[0073] In addition, the stirring blade 35 is rotated by the first non-contact drive unit 31 and the second contact drive unit 34, and the stirring blade 35 can directly stir the treatment solution 21. By using together the action of rotating the substrate holding member 22a and the glass substrate 22 to stir the treatment solution 21, the synergistic effect of stirring is exerted.

[0074] Through the stirring device 30, the temperature non-uniformity and solution concentration non-uniformity inside the treatment solution 21 are reduced, and the surface of the glass substrate 22 is uniformly treated, thereby forming a uniform network structure layer on the surface of the glass substrate 22.

[0075] After a network structure layer with a desired thickness is formed on the surface of the glass substrate 22, the operation is stopped, and the treated glass substrate 22 is taken out from the treatment solution 21. Whether a network structure layer with a desired thickness is formed can be determined by measuring the film thickness with a spectroscopic optical monitor or the like. When the desired film thickness is reached, the treatment solution 21 can be drained from the solution container 20 and water can be introduced into the solution container 20 to end the treatment. The network structure layer formed in this way has an anchoring effect, and by coating or filling various functional materials, surface properties with desired functions can be imparted to it.

[0076] As described above, by using the network structure layer forming device of the present embodiment to treat the glass substrate, a laminated nano-porous layer glass with a network structure layer can be manufactured.

[0077] This embodiment illustrates an example of the network structure layer forming device 1, but the present invention is not limited to the above embodiment. In particular, the method of stirring the solution and the pressurizing means can take various forms. The following will be described by way of modified examples.

[0078] (Modified Example 1)

[0079] Refer to Figure 5 To describe Modified Example 1. The basic configuration of the network structure layer forming device 1 is the same as that of the foregoing embodiment. Inside the pressure vessel 10, a solution container 20 is arranged, the treatment solution 21 is placed in the solution container 20, and the glass substrate 22 is immersed in the treatment solution 21. In addition, water vapor 42 is generated inside the pressure vessel 10 by a heater 41 for pressurization. In order to treat multiple substrates simultaneously, a plurality of glass substrates 22 are fixed by a substrate holding member 22a (such as a bracket).

[0080] The stirring device 30 only adopts a solution stirring method, and includes a plurality of stirring blades 301 and a motor 302 that drives the stirring blades 301 to rotate. Four stirring blades 301 are used in this modified example, two of which are located at the bottom of the solution container 20 and the other two are located on the side of the solution container 20. The number of stirring blades 301 is not limited to four and can be less than or more than four.

[0081] By driving the stirring blades 301 at the bottom and side of the solution container 20 to rotate by the motor 302, the treatment solution 21 in the solution container 20 can be sufficiently and uniformly stirred. Stirring the treatment solution 21 can reduce the non-uniformity of the surface treatment of the glass substrate 22.

[0082] In this modification example, the mesh structure layer forming apparatus 1 is further provided with a circulation device 303 for circulating the treatment solution 21. The circulation device 303 includes a pump 303a, a pipe 303b connecting the pump 303a and the solution container 20, and a filter 303c provided on the pipe 303b. By starting the pump 303a, the treatment solution 21 is drawn out from the bottom of the solution container 20, passes through the filter 303c, and the material substance dissolved from the glass substrate 22 is recovered by the filter 303c. The treatment solution 21 that has passed through the filter 303c returns to the solution container 20. By circulating the treatment solution 21, the treatment solution 21 in the solution container 20 is sufficiently stirred, and combined with the stirring of the stirring blade 301, a synergistic effect is exerted, so that the surface of the glass substrate 22 is uniformly treated.

[0083] In addition, the mesh structure layer forming apparatus 1 is further provided with a control gas supply device 50 for supplying a control gas (hereinafter referred to as "control gas") to the treatment solution 21 to control the treatment rate. In the present embodiment, the control gas is carbon dioxide (CO 2 2), and the control gas supply device 50 directly supplies carbon dioxide to the solution container 20. Sodium bicarbonate is easily decomposed to generate carbon dioxide, and by supplying carbon dioxide, decomposition can be prevented and a decrease in the treatment rate can be suppressed. Therefore, injecting carbon dioxide into the treatment solution 21 containing bicarbonate can suppress a decrease in the treatment rate. Figure 6A A graph showing the relationship between the film thickness of the laminated nanoporous layer formed on the surface of the glass substrate 22 immersed in the treatment solution 21 and the treatment time is shown. It can be seen from the figure that supplying carbon dioxide can complete the treatment in a short time. In addition, the addition of carbon dioxide makes the treatment rate more stable, and the correlation between the treatment time and the treatment amount is higher, so that the treatment amount of the glass substrate 22 can be controlled more precisely. In addition, as Figure 6B shown, as the carbon dioxide concentration increases, the thickness of the mesh structure layer increases. Moreover, depending on the concentration of the added carbon dioxide, the size of the mesh of the mesh structure layer is different. When the carbon dioxide concentration is 60% and 100%, the thickness of the mesh structure layer is almost the same, but when the carbon dioxide concentration is 100%, the mesh is larger and the antireflection function is stronger. By increasing the carbon dioxide concentration, the antireflection function can be achieved in a shorter time.

[0084] In this modified example, the control gas is carbon dioxide. However, the gas generated during the decomposition of the treatment solution 21 can also be used as the control gas and supplied to the treatment solution 21 to promote the treatment. The control gas can be water-soluble, and can be directly supplied into the treatment solution 21, or supplied into the space of the network structure layer forming device 1. In addition, an acidic gas (such as hydrochloric acid gas or hydrogen sulfide gas) can be introduced as the control gas to inhibit the treatment speed. The control gas can be appropriately selected according to the treatment solution and the treatment purpose. At the same time, while measuring the film thickness of the network structure layer, an appropriate control gas can be selected to control the reaction rate of the treatment solution.

[0085] In this modified example, the glass substrate 22 can be placed horizontally or vertically in the solution container 20. As the stirring method, instead of the substrate rotation method, only the solution stirring method is adopted, so that the placement direction of the glass substrate 22 has a greater degree of freedom. Therefore, according to the installation location, the glass substrate 22 can be horizontally arranged or vertically placed.

[0086] In this modified example, through the stirring of the stirring blade 301 and the circulation of the circulation device 303, the treatment solution 21 is fully stirred, and by directly adding carbon dioxide to the treatment solution 21, the decline of the treatment function of the treatment solution 21 is prevented.

[0087] (Modified Example 2)

[0088] Refer to Figure 7 to describe Modified Example 2. The basic configuration of the network structure layer forming device 1 is the same as that of the foregoing embodiment. Inside the pressure vessel 10, a solution container 20 is arranged, the treatment solution 21 is placed in the solution container 20, and the glass substrate 22 is immersed in the treatment solution 21. Inside the pressure vessel 10, water vapor 42 is generated by the heater 41 for pressurization. A plurality of glass substrates 22 are fixed by the substrate holding member 22a and placed horizontally on the bracket.

[0089] The stirring device 30 adopts the substrate rotation method. The stirring device 30 includes a rotating shaft 311 and a motor 312 for driving the rotating shaft 311. The rotating shaft 311 is driven to rotate by the motor 312, so that the substrate holding member 22a rotates. By the rotation of the substrate holding member 22a and the plurality of glass substrates 22, the treatment solution 21 in the solution container 20 is stirred. The rotation direction of the substrate holding member 22a can be a single direction or an alternating reverse rotation. By alternating reverse rotation, a greater flow and shear force can be generated.

[0090] According to this modification example, the substrate holding member 22a containing a plurality of glass substrates 22 is rotated by a rotating shaft 311 installed above the substrate holding member 22a to stir the processing solution 21. Since the substrate rotation method is adopted, the stirring force is stronger than that of the solution stirring method, and the processing solution 21 can be sufficiently stirred. In addition, due to the structure of installing the rotating shaft 311 above the substrate holding member 22a, it is easy for the substrate holding member 22a to be immersed in and taken out from the processing solution 21.

[0091] (Modification Example 3)

[0092] Refer to Figure 8 Modify Example 3. The basic configuration of the network structure layer forming apparatus 1 is the same as that of the foregoing embodiment. A solution container 20 is disposed inside the pressure vessel 10, and a processing solution 21 is placed in the solution container 20, and the glass substrate 22 is immersed in the processing solution 21. The inside of the pressure vessel 10 is pressurized by generating water vapor 42 through a heater 41. A plurality of glass substrates 22 are fixed by a substrate holding member 22a and placed horizontally.

[0093] The stirring device 30 adopts a non-contact driving part of the substrate rotation method, that is, the stirring device 30 includes a driving rotating body 321 and a driven rotating body 322. The driving rotating body 321 is a disk-shaped rotating body located outside the bottom of the solution container 20 and is driven by a motor (not shown). The driving rotating body 321 and the driven rotating body 322 stir the processing solution 21 in the same manner as Figure 4B the same way.

[0094] This modification example also configures a circulation device 303 that circulates the processing solution 21 in the same manner as in Modification Example 1. The circulation device 303 includes a pump 303a and a pipe 303b connecting the solution container 20 and the pump 303a. By starting the pump 303a, the processing solution 21 is drawn out from the bottom of the solution container 20 and then returned to the solution container 20. In this way, by circulating the processing solution 21, the processing solution 21 in the solution container 20 is sufficiently stirred, and combined with the stirring of the stirring device 30, a synergistic effect is exerted.

[0095] This modification example can also be provided with a control gas supply device 50 for adding carbon dioxide to the processing solution 21 in the same manner as in Modification Example 1. In this modification example, as the stirring device 30, a stirring method of the substrate rotation method is used, and a circulation device 303 is also provided, so that the processing solution 21 can be sufficiently stirred. In addition, the substrate holding member 22a and the glass substrate 22 are rotated in a non-contact manner, preventing contamination inside the pressure vessel 10. In addition, by directly adding carbon dioxide to the processing solution 21 in the solution container 20, a decrease in the processing function of the processing solution 21 is prevented.

[0096] (Modification Example 4)

[0097] Refer toFigure 9 Describe Modification Example 4. The basic configuration of the network structure layer forming apparatus 1 is the same as that of the foregoing embodiment. Inside the pressure vessel 10, a solution container 20 is disposed, and a treatment solution 21 is placed in the solution container 20. The glass substrates 22 are immersed in the treatment solution 21. A plurality of glass substrates 22 are fixed by a substrate holding member 22a and placed horizontally. The pressurizing device uses a compressor 60 instead of a heater 41 and steam 42, which is different from other modification examples.

[0098] The stirring device 30 adopts a combination of a solution stirring method and a substrate rotation method. The stirring device 30 of the solution stirring method includes a stirring blade 331 and a driving unit 332 that drives the stirring blade 331. In this modification example, the stirring blade 331 is one.

[0099] The stirring device 30 of the substrate rotation method uses a non-contact driving unit, which includes a driving rotating body 333 and a driven rotating body 334. The shapes and functions of the driving rotating body 333 and the driven rotating body 334 are the same as those in Modification Example 3, and the description thereof is omitted here. The rotation of the driving rotating body 333 drives the driven rotating body 334 to rotate in a non-contact manner. The substrate holding member 22a is placed on the upper surface of the driven rotating body 334. When the driven rotating body 334 rotates, the substrate holding member 22a rotates, and thus the glass substrate 22 also rotates. The treatment solution 21 is stirred by the rotation of the glass substrate 22. In this modification example, the pressurizing device uses a compressor 60. Pressurization is performed by injecting compressed air into the pressure vessel 100. Since there is no need to use a heater 41 to heat water, the size of the pressure vessel 10 can be made more compact. In addition, instead of air, a control gas can also be compressed by the compressor 60 and introduced into the pressure vessel 10.

[0100] In this modification example, a combination of a solution stirring method and a substrate rotation method is used as the stirring device 30. Therefore, the treatment solution 21 is sufficiently stirred, making the in-plane distribution of the treatment layer more uniform. In addition, since only one stirring blade 331 is used, the structure of the pressure vessel 10 can be simplified.

[0101] (Modification Example 5)

[0102] Refer to Figure 10 Describe Modification Example 5. The basic configuration of the network structure layer forming apparatus 1 is the same as that of the foregoing embodiment. Inside the pressure vessel 10, the treatment solution 21 is placed, and the glass substrates 22 are immersed in the treatment solution 21, which is the same as in the embodiment. However, in this modification example, the treatment solution 21 is directly placed in the pressure vessel 10 instead of the solution container 20. A plurality of glass substrates 22 are fixed by a substrate holding member 22a, and the glass substrates 22 are placed horizontally.

[0103] The stirring device 30 adopts a non-contact driving part with a substrate rotation method, including a driving rotating body 341 and a driven rotating body 342. The shapes and functions of the driving rotating body 341 and the driven rotating body 342 are the same as those in the third modification example, and the description thereof is omitted here. The rotation of the driving rotating body 341 drives the driven rotating body 342 to rotate in a non-contact manner. A substrate holding member 22a is provided on the upper surface of the driven rotating body 342. When the driven rotating body 334 rotates, the substrate holding member 22a rotates accordingly, and the glass substrate 22 also rotates. The treatment solution 21 is stirred by the rotation of the glass substrate 22. According to this modification example, since the treatment solution 21 is directly placed in the pressure vessel 10, the structure of the network structure layer forming device 1 can be simplified. In addition, since there is no need to place the solution container 20 inside the pressure vessel 10, the internal space of the pressure vessel 10 can be utilized more effectively, and more glass substrates 22 can be processed.

[0104] According to the present embodiment, by immersing the glass substrate 22 in the treatment solution 21 and placing it in the pressure vessel 10, and stirring the treatment solution 21 while applying pressure, it is possible to reduce the unevenness generated during the surface treatment of the glass substrate 22 and perform the treatment in a short time, and a network structure layer with a sufficient film thickness for functions such as anti-fouling can be formed.

[0105] According to the present embodiment, since the treatment unevenness can be reduced, it is possible to process large substrates and a large number of substrates.

[0106] According to the present embodiment, by rotating the glass substrate 22 to stir the treatment solution 21, the treatment solution 21 in the solution container 20 can be sufficiently stirred, so that the glass substrate 22 can be uniformly surface-treated.

[0107] According to the present embodiment, by directly stirring the treatment solution 21 using the stirring blade 35, the treatment solution 21 can be stirred in a simple manner, so that the glass substrate 22 can be uniformly surface-treated.

[0108] According to the present embodiment, since the glass substrate 22 can be rotated in a non-contact manner, there is no need to introduce a driving source (such as an introduction port, etc.) into the pressure vessel 10, which simplifies the structure of the network structure layer forming device 1 and thus reduces the cost.

[0109] According to the present embodiment, since the pressure device and the heating device are both provided, the temperature of the treatment solution 21 in the pressure vessel 10 can be rapidly increased, so that the surface treatment of the glass substrate 22 can be quickly performed.

[0110] According to the present embodiment, the gas supply device can promote the reaction of the treatment solution 21 by supplying a control gas that is the same as the gas generated by the reaction of the treatment solution 21.

[0111] In the present embodiment and Modifications 1-4, the treatment solution 21 is not directly placed into the pressure vessel 10, but rather the treatment solution 21 is placed into a durable solution container 20. Therefore, the mesh structure layer forming apparatus 1 can be used for a long time, thereby reducing costs.

[0112] In the present embodiment, the pressure vessel 10 and the solution container 20 are made of an alkali-resistant material, so the service life of the mesh structure layer forming apparatus 1 can be extended, thereby reducing costs.

[0113] The glass substrate 22 treated in the present embodiment is not limited to a plate-shaped glass substrate.

[0114] In the present embodiment, although a non-contact driving unit and a contact driving unit are used in combination, only the non-contact driving unit or only the contact driving unit may also be used. In addition, the combination method can also be selected as needed.

[0115] In the present embodiment and Modifications 3, 4, and 5, the substrate holding member 22a that holds the glass substrate 22 is rotated by the non-contact driving unit to stir the treatment solution 21, but the stirring method is not limited to rotation. For example, the first magnetic body can also be swung by swinging the second magnetic body of the non-contact driving unit, thereby stirring the solution.

[0116] In the present embodiment, although it is described that the pressure vessel 10 and the solution container 20 are made of a corrosion-resistant material, other components disposed inside the mesh structure layer forming apparatus 1, such as the non-contact driving unit, the contact driving unit, etc., can also be made of a corrosion-resistant material.

[0117] In Modifications 1 and 3, it is described that the pump 303a is used as the circulation device 303 to assist the stirring of the stirring device 30. However, the method of assisting or enhancing the stirring of the stirring device 30 is not limited to the circulation device 303. For example, a device for supplying new treatment solution 21 and a device for discharging the used treatment solution 21 can be provided, thereby forming a fluid flow inside the solution container 20.

[0118] In the present embodiment and Modification 4, the pressurizing device 40 generates water vapor 42 through the heater 41 for pressurization, or sends compressed air into the pressure vessel 10 through the compressor 60. However, the present invention is not limited to these pressurizing devices 40. For example, externally generated water vapor 42 can also be sent into the pressure vessel 10 for pressurization.

[0119] In the present embodiment and the modifications, various combinations of the stirring device 30, the pressurizing device 40, and the control gas supply device 50 are described, but these combinations are only examples and are not limited to the illustrated examples. In addition, the stirring device 30 and the pressurizing device 40 can include various forms, and the specific form to be selected is also not limited.

[0120] Industrial Applicability

[0121] The present invention can be used for a device for forming a network structure layer on the surface of a glass substrate and a method for manufacturing glass having a network structure layer.

[0122] Symbol Explanation

[0123] 1 Network structure layer forming device

[0124] 10 Pressure vessel

[0125] 11 Main body part

[0126] 11a First support part

[0127] 11aa Support part main body

[0128] 11ab Gear support part

[0129] 11b Second support part

[0130] 11ba Support part main body

[0131] 11bb Gear support part

[0132] 12 Upper end plate

[0133] 13 Lower end plate

[0134] 14 Leg

[0135] 20 Solution container

[0136] 21 Treatment solution

[0137] 22 Glass substrate

[0138] 22a Substrate holding member

[0139] 30 Stirring device

[0140] 31 First non-contact drive part

[0141] 31a First drive rotating body

[0142] 31b First driven rotating body

[0143] 32 First contact drive part

[0144] 32a First spur gear

[0145] 32b Second spur gear

[0146] 32c Third spur gear

[0147] 32d Fourth spur gear

[0148] 33 Second non-contact driving part

[0149] 33a Second driving rotating body

[0150] 33b Second driven rotating body

[0151] 34 Second contact driving part

[0152] 34a First bevel gear

[0153] 34b Second bevel gear

[0154] 34c Third bevel gear

[0155] 34d Fourth bevel gear

[0156] 34e First drive shaft

[0157] 34f Second drive shaft

[0158] 34g Third drive shaft

[0159] 35 Agitating blade

[0160] 40 Pressurizing device

[0161] 41 Heater

[0162] 42 Water vapor

[0163] 50 Control gas supply device

[0164] 60 Compressor

[0165] 301 Agitating blade

[0166] 302 Motor

[0167] 303 Circulation device

[0168] 303a Pump

[0169] 303b Pipe

[0170] 303c Filter

[0171] 311 Rotating shaft

[0172] 312 Motor

[0173] 321 Driving rotating body

[0174] 322 Driven rotating body

[0175] 331 Driving rotating body

[0176] 332 Driven rotating body

[0177] 333 Driving Rotating Body

[0178] 334 Driven Rotating Body

[0179] 341 Driving Rotating Body

[0180] 342 Driven Rotating Body

Claims

1. A reticular structure layer forming device for forming a reticular structure layer on the surface of a glass substrate, comprising: a pressure vessel that accommodates a treatment solution and a glass substrate immersed in the treatment solution under a predetermined pressure; a pressurizing device for pressurizing the pressure vessel; and a stirring device for stirring the treatment solution; The reticular structure layer forming device forms a reticular structure layer on the surface of the glass substrate in the treatment solution under an alkaline environment.

2. The reticular structure layer forming device according to claim 1, further comprising a heating device for heating the interior of the pressure vessel.

3. The reticular structure layer forming device according to claim 1, wherein, the stirring device is a substrate rotating device that stirs the treatment solution by rotating the glass substrate.

4. The reticular structure layer forming device according to claim 1, wherein, the stirring device is a solution stirring device that directly stirs the treatment solution by a stirring member.

5. The reticular structure layer forming device according to claim 1, further comprising a control gas supply device for supplying a control gas to the treatment solution to control the treatment speed.

6. The reticular structure layer forming device according to claim 5, wherein, the treatment solution is a solution containing bicarbonate, and the control gas supply device supplies the same control gas as the gas generated by the reaction of the treatment solution.

7. The reticular structure layer forming device according to claim 3, further comprising a substrate holding member for holding the glass substrate in the treatment solution, wherein, the substrate rotating device rotates the substrate holding member.

8. The reticular structure layer forming device according to claim 2, wherein, the glass substrate is treated in the treatment solution at 100 °C or higher by the heating device.

9. The reticular structure layer forming device according to claim 7, wherein, the substrate rotating device rotates the substrate holding member non - contactingly through a first magnetic body mounted on the substrate holding member and a second magnetic body disposed outside the container accommodating the treatment solution.

10. The reticular structure layer forming device according to any one of claims 1 - 9, further comprising a solution container disposed inside the pressure vessel, wherein, the treatment solution and the glass substrate are accommodated in the solution container.

11. The reticular structure layer forming device according to claim 10, wherein, the pressure vessel or the solution container is made of an alkali - resistant material.

12. A method for treating glass through a treatment solution in a pressure vessel to manufacture glass having a reticular structure layer, comprising: a step of pressurizing the interior of the pressure vessel; a step of stirring the treatment solution in the pressure vessel; and a step of forming a reticular structure layer on the surface of the glass substrate through the treatment solution under an alkaline environment.

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