X-ray detector of x-ray imaging system

Abstract

The purpose of the present invention is to provide an X-ray detector for an X-ray imaging system, the X-ray detector being capable of easily acquiring an X-ray transmission image having a desired resolution or detection sensitivity when the X-ray transmission image is acquired by an X-ray detector using a scanned X-ray sensor. To this end, an X-ray detector (40) is provided with: a plurality of X-ray line sensors (41, 42) in which X-ray detection elements are each arranged in a one-dimensional shape with respect to the horizontal direction, and each X-ray detection element group is arranged back-to-back or face-to-face; and a collimator provided at an end of the X-ray line sensor (41, 42) facing the X-ray source. The reception area sizes (S1, S2) of the X-ray detection element groups are different.

Description

Technical Field

[0001] The present invention relates to an X-ray detector for an X-ray imaging system, and in the case of obtaining an X-ray transmission image using an X-ray detector that uses a scanned X-ray line sensor, it is possible to simply obtain an X-ray transmission image having a desired resolution or detection sensitivity. Background Art

[0002] In recent years, the aging of buildings such as bridges has become a problem, and maintenance is an urgent task. As one of the methods for inspecting the interior of a building without damage for this maintenance, there is X-ray transmission image inspection. In this X-ray transmission image inspection, for example, an X-ray detector that uses an X-ray line sensor is used. The X-ray detector that uses an X-ray line sensor is well applied to non-destructive inspections for safety and industrial use.

[0003] For example, Patent Document 1 proposes an X-ray imaging system including: an X-ray source that irradiates X-rays; a detector that detects X-rays transmitted through an imaging object to be detected; a semiconductor detector array that moves inside the detector; a semiconductor detector array driving unit that moves the semiconductor detector array in the vertical direction; and a signal processing circuit that processes a measurement signal measured by the detector and forms the measurement signal into an image. This X-ray imaging system uses a semiconductor detector that is highly sensitive to high-energy X-rays.

[0004] Patent Document 1: Japanese Patent No. 6411775

[0005] However, in an X-ray detector that uses an X-ray line sensor, elements having a certain reception area (pixel size) are arranged in a one-dimensional shape. Therefore, the amount of transmitted X-rays is small. In the case of a small pixel size, an X-ray transmission image with high resolution but decreased detection sensitivity is obtained, and in the case of a large pixel size, an X-ray transmission image with low resolution but high detection sensitivity is obtained, resulting in a situation where a desired X-ray transmission image cannot be obtained.

[0006] In addition, it is also considered to replace it with an X-ray line sensor having a different pixel size and scan again, or perform a scan with a changed scan speed, but it takes twice the effort. Summary of the Invention

[0007] The present invention has been completed in view of the above problems, and an object thereof is to provide an X-ray detector for an X-ray imaging system, which can simply obtain an X-ray transmission image having a desired resolution or detection sensitivity in the case of obtaining an X-ray transmission image using an X-ray detector that uses a scanned X-ray line sensor.

[0008] In order to solve the above problems and achieve the object of the invention, the present invention is an X-ray detector of an X-ray imaging system for obtaining an X-ray transmission image. The X-ray imaging system includes: an X-ray source that irradiates X-rays; an X-ray detector that detects the X-rays transmitted through the object to be detected; and a signal processing circuit that processes the measurement signal measured by the X-ray detector and forms an image of the measurement signal. Among them, the X-ray detector has: a plurality of X-ray line sensors, in which the X-ray detection elements are respectively arranged in a one-dimensional shape with respect to the horizontal direction, and each group of X-ray detection elements is arranged back-to-back or face-to-face; and a collimator provided at the end of the plurality of X-ray line sensors facing the X-ray source. The X-ray detector is provided with a drive control mechanism that moves the X-ray detector in the vertical direction, and rotates the X-ray detector about the pixel pitch direction of the X-ray line sensors as an axis to be inclined with respect to the horizontal plane during this movement, so that the irradiation direction of the irradiated X-rays coincides with the X-ray introduction direction of the collimator.

[0009] In addition, based on the above invention, the present invention is characterized in that the receiving area sizes of each group of X-ray detection elements are different.

[0010] In addition, based on the above invention, the present invention is characterized in that the receiving area sizes of each group of X-ray detection elements are the same, and each group of X-ray detection elements is arranged offset in the horizontal direction.

[0011] In addition, based on the above invention, the present invention is characterized in that the X-ray introduction width of the collimator is greater than the width of the X-ray detection element.

[0012] In addition, based on the above invention, the present invention is characterized in that the X-ray introduction width of the collimator is a predetermined value or more obtained by adding twice the error width of the rear end portion of the collimator to the width of the X-ray detection element, and the error width of the rear end portion of the collimator corresponds to the X-ray introduction length of the collimator and the angle control error angle of the drive control mechanism.

[0013] In addition, based on the above invention, the present invention is characterized in that the X-ray line sensor has a scintillator and a photodetector that detects the scintillation light emitted by the scintillator.

[0014] In addition, based on the above invention, the present invention is characterized in that the X-ray detector has a temperature sensor that measures the temperature of the X-ray detection element, and the signal processing circuit corrects the X-ray transmission image based on the measured temperature measured by the temperature sensor and the relationship information between the temperature and the measurement signal obtained in advance.

[0015] In addition, based on the above invention, the X-ray source is a pulsed X-ray source that irradiates X-ray pulses, and the signal processing circuit obtains a non-irradiation signal between the X-ray pulses and corrects the X-ray transmission image based on this non-irradiation signal.

[0016] According to the present invention, when obtaining an X-ray transmission image by an X-ray detector using a scanned X-ray line sensor, an X-ray transmission image with a desired resolution or detection sensitivity can be simply obtained. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a perspective view showing the schematic structure of an X-ray imaging system according to Embodiment 1 of the present invention. Figure 2 is Figure 1 a side view of the X-Z plane of the X-ray imaging system shown. Figure 3 is a perspective view showing the structure inside the housing in a state where the outermost outer wall surface is removed. Figure 4 is a top view of the structure of the X-ray detector and a diagram schematically showing the components connected to the X-ray detector. Figure 5 is Figure 4 a cross-sectional view taken along line A-A of the X-ray detector shown. Figure 6 is a diagram showing the relationship between the X-ray introduction width of the collimator, the width of the scintillator, and X-rays according to Embodiment 1 of the present invention. Figure 7 is a diagram showing the relationship between the X-ray introduction width of the collimator, the width of the scintillator, and X-rays in a conventional X-ray detector. Figure 8 is a diagram showing the positional relationship between the collimator and the scintillator. Figure 9 is an explanatory diagram showing an example of determining the X-ray introduction width of the collimator. Figure 10 is an explanatory diagram showing an example of determining the X-ray introduction width of the collimator. Figure 11 is a diagram showing an example of comparing the X-ray transmission image based on the X-ray detector according to Embodiment 1 of the present invention and the X-ray transmission image based on a conventional X-ray detector. Figure 12 is a diagram showing the output waveform of X-rays when the X-ray source is a pulsed X-ray source. Figure 13 is an explanatory diagram for explaining the structure of an X-ray detector according to Embodiment 2 of the present invention. Figure 14It is an explanatory diagram showing the structure of the X-ray detector as Modification 3. Detailed implementation mode

[0018] Hereinafter, modes for implementing the present invention will be described with reference to the accompanying drawings.

[0019] <Embodiment 1> Figure 1 It is a perspective view showing a schematic structure of an X-ray imaging system 100 as Embodiment 1 of the present invention. Figure 2 is Figure 1 a side view of the X-Z plane of the X-ray imaging system 100 shown. As Figure 1 and Figure 2 shown, the X-ray imaging system 100 includes an X-ray source 5 that irradiates X-rays and an X-ray detector 1. The X-ray source 5 and the X-ray detector are arranged with the object to be detected 6 therebetween. The X-ray detector 1 detects the X-rays 7 that have passed through the object to be detected 6 and attenuated. The X-ray detector 1 includes a collimator 2 and an X-ray line sensor 3. The X-ray detection elements of the X-ray line sensor 3 are arranged in a one-dimensional shape with respect to the horizontal direction (±Y direction), and the X-ray line sensor 3 detects the X-rays 7 input via the collimator 2. The collimator 2 is provided at the end of the X-ray line sensor 3 facing the X-ray source 5 to prevent various scattered rays from entering the X-ray line sensor 3. As will be described later, the collimator 2 forms a parallel gap sandwiched between flat plates and extending in the horizontal direction. In addition, the collimator 2 may be a through hole formed in the horizontal direction for each element of the X-ray line sensor 3. Furthermore, the gap of the collimator 2 may not be parallel.

[0020] The X-ray detector 1 is arranged in an X-ray detection box 1a. The X-ray detector 1 moves simultaneously as the X-ray detection box 1a moves inside the frame 4. This movement (scanning) moves the X-ray detector 1 in the vertical direction (±Z direction), and along with this movement, the X-ray detector 1 rotates around the axis C with the pixel pitch direction (horizontal direction) of the X-ray line sensor 3 as the axis, that is, rotates in the X-Z plane and tilts with respect to the horizontal plane (X-Y plane), so that the irradiation direction of the irradiated X-rays coincides with the X-ray introduction direction of the collimator 2.

[0021] Figure 3It is a perspective view of the structure inside the housing 4 showing the state where the outermost peripheral outer wall surface is removed. The movement of the above-mentioned X-ray detector 1 inside the housing 4 is carried out by a drive control mechanism. The drive control mechanism has drive parts 11a, 11b based on a guiding structure at the pillar parts at the four corners of the housing 4. Here, the drive part 11a can move the collimator 2 side up and down by means of the X-ray detection cassette 1a. In addition, the drive part 11b can move the X-ray line sensor 3 side up and down by means of the X-ray detection cassette 1a. Moreover, these drive parts 11a, 11b are independent and can control the movement amount. In addition, the drive parts 11a, 11b can move up and down on the guide wires 12 provided at the pillar parts of the housing 4 at the four corners of the X-ray detection cassette 1a.

[0022] The X-ray detector 1 is set to set the inclination at each height position as shown by controlling the movement amounts of the drive part 11a and the drive part 11b provided on the pillar of the housing 4. The X-ray detector 1 is arranged on the straight line led out from the occurrence point of the X-ray source 5 regardless of which height position it is at. Figure 2 shown.

[0023] Figure 4 It is a top view of the structure of the X-ray detector 1 and a diagram schematically showing the components connected to the X-ray detector 1. In addition, Figure 5 is Figure 4 The A-A cross-sectional view of the X-ray detector 1 shown. As Figure 4 and Figure 5 shown, the end of the X-ray line sensor 3 facing the X-ray source 5 is arranged at the end in the X direction of the parallel gap of the collimator 2. The X-ray line sensor 3 has a scintillator 31 and a light detector. The scintillator 31 emits scintillation light by using the incident X-ray. The scintillation light is detected by the light detector 32 provided on the side part (±Z direction) of the scintillator 31. The scintillator 31 is provided with a distributor corresponding to each light detection element of the array arrangement of the light detector 32 to prevent the scattering and crosstalk of X-rays. In addition, the light detector 32 mounted on the side part of the scintillator 31 is not limited to being mounted in the ±Z direction of the scintillator 31, but is arbitrary. For example, it can also be mounted in the +X direction.

[0024] The light detector 32 is provided on the substrate 33, and the scintillator 31 is arranged above (Z direction) the light detector 32. In addition, in order not to leak the scintillation light to the outside in the area divided by the distributor, a reflective film is formed on the surface other than the light detector 32 side, and an optical waveguide film is provided on the surface on the light detector 32 side to waveguide the scintillation light to the light detector 32.

[0025] The signal processing circuit 10 is connected to the other end side (X direction) of the substrate 33, and wirings connecting the photodetector 32 and the signal processing circuit 10 are formed on the substrate 33. The signal processing circuit 10 amplifies the measurement signals from the respective elements of the photodetector 32, converts the amplified analog signals into digital signals, and generates an X-ray transmission image based on the converted digital signals. In addition, the number of element arrangements of the X-ray line sensor 3 is, for example, 512. In the present embodiment, it is divided into four parts according to 128 elements, and four signal processing circuits 10 process the divided measurement signals in parallel.

[0026] The X-ray transmission image output from the signal processing circuit 10 is output to the control unit 20, and the synthesized X-ray transmission image is output to the display unit 30. In addition, the control unit 20 drives and controls the above-described drive units 11a and 11b. The drive units 11a and 11b and the control unit 20 that drives and controls them are a drive control mechanism. In addition, the control unit 20 associates the drive control (scanning control) of the drive units 11a and 11b with the position of the acquired X-ray transmission image.

[0027] Figure 6 It is a diagram showing the relationship between the X-ray introduction width d2 of the collimator 2, the width d1 of the scintillator 31, and the X-ray 7 in the first embodiment. In addition, Figure 7 It is a diagram showing the relationship between the X-ray introduction width d2 of the collimator 2, the width d1 of the scintillator 31, and the X-ray 7 in a conventional X-ray detector. As Figure 6 shown, in the first embodiment, the X-ray introduction width d2 of the collimator 2 is larger than the width d1 of the scintillator 31 (X-ray detection element). In contrast, the X-ray introduction width d2 of the collimator 2 in a conventional X-ray detector is substantially the same as the width d1 of the scintillator 31.

[0028] Here, as Figure 6 shown, the following control is performed: the collimator 2 and the X-ray line sensor 3 are scanned in the ±Z directions, and according to the angle θ at which the X-ray 7 arrives, with the aid of the X-ray detection box 1a, it rotates about the axis C in the pixel pitch direction of the X-ray line sensor 3 so that the arrival direction of the X-ray 7 coincides with the X-ray introduction direction of the collimator 2. However, as Figure 7 shown, if there is an angular deviation θ1 between the arrival direction of the X-ray 7 and the X-ray introduction direction 2a of the collimator 2, in a conventional X-ray detector, the X-ray 7 that enters the collimator 2 irradiates the top portion and the inner wall of the collimator 2, and a region where the X-ray 7 cannot be received is generated in the region of the front surface of the collimator 2, resulting in shadows in the image, and the desired resolution or detection sensitivity cannot be obtained. In contrast, in Figure 6In the shown Embodiment 1, since the X-ray introduction width d2 of the collimator 2 is made larger than the width d1 of the scintillator 31, even if an angular deviation θ1 occurs, the X-rays 7 can reach all regions of the front surface of the collimator 2 and be received, and a desired resolution or detection sensitivity can be obtained.

[0029] Although the X-ray introduction width d2 of the collimator 2 is larger than the width d1 of the scintillator 31, specifically, as Figure 8 shown, the center of the front end (axis C) of the scintillator 31 is located at the center on the rear end side of the collimator 2. Each width between the scintillator 31 and the collimator 2 is set as an error width d3, and the X-ray introduction width d2 becomes a predetermined value obtained by adding the width d1 and twice the error width d3 (d2 = d1 + d3×2). In addition, the X-ray introduction width d2 only needs to be equal to or more than the predetermined value (d2 = d1 + d3×2).

[0030] The error width d3 is determined by the X-ray introduction length W of the collimator 2 and the angular deviation θ1 (half of the angular control error angle of the X-ray detection cassette 1a). Moreover, the X-ray introduction width d2 is determined by the width d1 of the scintillator 31 and the error width d3. For example Figure 9 shown, when the X-ray introduction length W is 150 mm and the angular deviation θ1 is 0.5° (angular control error angle = ±0.5°), according to the relationship d3 = W×tanθ1, the error width d3 is 1.31 mm. Here, when the width d1 is 1 mm, the X-ray introduction width d2 is set to be 3.62 mm or more, which is obtained by adding the width d1 and twice the error width d3. In this case, considering the uneven accuracy of the angular deviation θ1 and preventing the reception of scattered rays, ideally, the X-ray introduction width d2 is set to 5 mm. Similarly, as Figure 10 shown, when the X-ray introduction length W is 200 mm and the angular deviation θ1 is 0.5° (angular control error angle = ±0.5°), the error width d3 is 1.75 mm. Here, when the width d1 is 2 mm, the X-ray introduction width d2 is set to be 5.5 mm or more, which is obtained by adding the width d1 and twice the error width d3. In this case, considering the uneven accuracy of the angular deviation θ1 and preventing the reception of scattered rays, ideally, the X-ray introduction width d2 is set to 7 mm.

[0031] Figure 11 FIG. is a diagram showing an example of comparing the X-ray transmission image of the X-ray detector 1 based on this Embodiment 1 and the X-ray transmission image of a conventional X-ray detector. Figure 11 FIG. (a) shows an example of the X-ray transmission image D11 captured by the X-ray detector 1 of this Embodiment 1, Figure 11Figure (b) shows an example of the X-ray transmission image D12 obtained by imaging with a conventional X-ray detector. In addition, any of the X-ray transmission images D11 and D12 has a concrete member with steel bars as the object to be detected 6. In Figure 11 In figure (b), since the X-ray introduction width d2 of the collimator is the same as the width d1 of the scintillator 31, the X-ray transmission image D12 has a shadow 6b generated at a portion where the X-rays 7 cannot be received due to the angular deviation from the incident direction of the X-rays 7. However, in Figure 11 In figure (a), since the X-ray introduction width d2 of the collimator is larger than the width d1 of the scintillator 31, there is no portion where the X-rays 7 cannot be received even if there is an angular deviation from the incident direction of the X-rays 7, and a normal X-ray transmission image D11 without a shadow 6b or the like can be obtained.

[0032] <Modification Example 1> Here, since the X-ray detector 1 is used for outdoor inspection, the measurement signal is affected by the change in the atmospheric temperature. If the temperature of the X-ray detector 1 rises, the dark current increases. When generating the X-ray transmission image, although the measurement signal is calibrated using this dark current, if there is a difference between the dark current at the time of imaging and the dark current at the time of calibration, the image quality of the X-ray transmission image is affected. Therefore, it is necessary to correct the drift amount caused by the temperature at the time of imaging for the measurement signal at the time of imaging.

[0033] Therefore, in this Modification Example 1, a temperature sensor for measuring the temperature of the X-ray detection element is provided in the X-ray detector 1, temperature information is added to the head of the line information of the image, and the signal processing circuit 10 corrects the X-ray transmission image based on the measured temperature (temperature information) measured by the temperature sensor and the relationship information between the temperature and the measurement signal obtained in advance.

[0034] <Modification Example 2> In Modification Example 1, a temperature sensor is used to correct the temperature of the X-ray transmission image. However, in Modification Example 2, the X-ray source 5 is a pulsed X-ray source that irradiates X-ray pulses such as a LINAC, and the signal processing circuit 10 obtains a non-irradiation signal between the X-ray pulses and corrects the X-ray transmission image based on this non-irradiation signal.

[0035] That is, as Figure 12 shown, the non-irradiation signal (dark output) during the period Toff when the X-ray pulses are not irradiated is used to correct the image signal of each row. By using a pulsed X-ray source, image correction realized by obtaining the dark signal using the non-irradiation time of the X-rays can also be performed during imaging, so that a more accurate X-ray transmission image can be obtained.

[0036] <Embodiment 2> Here, when the object to be detected 6 is thick concrete or the like, since the amount of X-rays transmitted through the object to be detected 6 is small, it is desirable for the X-ray detector 1 to have high detection sensitivity. However, in order to have high detection sensitivity, it is necessary to increase the receiving area of the elements of the X-ray line sensor 3. On the other hand, if the size of the receiving area is increased, high resolution cannot be obtained. That is, in an X-ray line sensor 3 having a certain receiving area size, high detection sensitivity and high resolution cannot be obtained simultaneously. However, depending on the thickness change of the object to be detected 6 and the inspection content of the object to be detected 6, there are cases where high detection sensitivity is preferred and cases where high resolution is preferred.

[0037] Figure 13 FIG. is an explanatory diagram showing the structure of the X-ray detector 40 according to Embodiment 2 of the present invention. In addition, in Figure 13 the structure in which the collimator 2 is disassembled. As Figure 13 shown, the X-ray detector 40 includes X-ray line sensors 41 and 42. The X-ray detection elements of the X-ray line sensors 41 and 42 are respectively arranged in a one-dimensional shape with respect to the horizontal direction, and each group of X-ray detection elements is arranged back-to-back or face-to-face. Here, the receiving area size S1 of the scintillator of the X-ray line sensor 41 is different from the receiving area size S2 of the scintillator of the X-ray line sensor 42, and the receiving area size S2 is larger than the receiving area size S1.

[0038] In this case, an X-ray transmission image D1 is obtained from the X-ray line sensor 41, and an X-ray transmission image D2 is obtained from the X-ray line sensor 42. Moreover, the X-ray transmission image D1 is a high-resolution image compared with the X-ray transmission image D2, and the X-ray transmission image D2 is a high-detection-sensitivity image compared with the X-ray transmission image D1.

[0039] In the present Embodiment 2, a high-resolution X-ray transmission image D1 and a high-detection-sensitivity X-ray transmission image D2 can be obtained simultaneously by one scan. In addition, the group of X-ray detection elements is not limited to two, and three or more groups of X-ray detection elements can also be arranged.

[0040] In addition, the X-ray line sensors 41 and 42 are connected to the same collimator 2. Therefore, in the case of the collimator 2 without a partition in the element unit in the horizontal direction, even if the receiving area size is changed, it can be easily applied.

[0041] In addition, even if the receiving area sizes S1 and S2 are the same, the detection sensitivity can be improved as needed by synthesizing the measurement signals of the X-ray line sensors 41 and 42.

[0042] <Modification 3> Figure 14This is an explanatory diagram showing the structure of the X-ray detector 50 in Modification 3. Similar to Embodiment 2, the X-ray detector 50 in Modification 3 has X-ray line sensors 51 and 52 in which groups of X-ray detection elements are arranged back-to-back or face-to-face, but the receiving area sizes of each are the same receiving area size S1. However, the pitch of each group of X-ray detection elements of the X-ray line sensors 51 and 52 is arranged with a stagger in the horizontal direction.

[0043] Therefore, in the case where a plurality of groups of X-ray detection elements are connected in the horizontal direction to form one X-ray line sensor, although gaps are likely to be generated due to the joining between the groups of X-ray detection elements, the shadows generated by these gaps can be interpolated by the X-ray detection elements of the other party arranged back-to-back or face-to-face. As a result, a wide-range X-ray transmission image can be obtained with high image quality.

[0044] In the above-described embodiments and the like, the X-ray line sensor combines a scintillator and a light detector, but is not limited thereto, and may also be a semiconductor line sensor that directly detects X-rays.

[0045] In addition, each structure illustrated in the above-described embodiments and modifications is a functionally schematic structure and does not necessarily have to be physically the structure shown. That is, the manner of dispersion / integration of each device and component is not limited to the manner shown, and all or a part of them can be configured by being functionally or physically dispersed / integrated in any unit according to various usage situations. Explanation of Reference Numerals

[0046] 1 X-ray detector 1a X-ray detection cassette 2 Collimator 2a X-ray incident direction 3 X-ray line sensor 4 Housing 5 X-ray source 6 Object to be detected 7 X-rays 10 Signal processing circuit 11a, 11b Driving unit 12 Lead wire 20 Control unit 30 Display unit 31 Scintillator 32 Light detector 33 Substrate 40, 50 X-ray detector 41, 42, 51, 52 X-ray line sensor 100 X-ray imaging system C-axis D1, D2, D11, D12 X-ray transmission images d1 width d2 X-ray introduction width d3 error width S1, S2 receiving area size Toff period W X-ray introduction length θ angle θ1 angle deviation

Claims

1. An X-ray detector for an X-ray imaging system, which is an X-ray detector for an X-ray imaging system that obtains an X-ray transmission image. The X-ray imaging system includes: an X-ray source that irradiates X-rays; an X-ray detector that detects the X-rays transmitted through the object to be detected; and a signal processing circuit that processes the measurement signal measured by the X-ray detector and forms an image of the measurement signal. Characterized in that, The X-ray detector has: a plurality of X-ray line sensors, whose X-ray detection elements are respectively arranged in a one-dimensional shape with respect to the horizontal direction, and each group of X-ray detection elements is arranged back-to-back or face-to-face; and a collimator, which is arranged at the end of the plurality of X-ray line sensors facing the X-ray source. The X-ray detector is provided with a drive control mechanism, which moves the X-ray detector in the up and down direction, and rotates the X-ray detector around the pixel pitch direction of the X-ray line sensor as an axis to tilt with respect to the horizontal plane during this movement, so that the irradiation direction of the irradiated X-rays is consistent with the X-ray introduction direction of the collimator.

2. The X-ray detector for an X-ray imaging system according to claim 1, Characterized in that, The receiving area sizes of each group of X-ray detection elements are different.

3. The X-ray detector for an X-ray imaging system according to claim 1, Characterized in that, The receiving area sizes of each group of X-ray detection elements are the same, and each group of X-ray detection elements is arranged staggeredly in the horizontal direction.

4. The X-ray detector for an X-ray imaging system according to any one of claims 1 to 3, Characterized in that, The X-ray introduction width of the collimator is greater than the width of the X-ray detection element.

5. The X-ray detector for an X-ray imaging system according to any one of claims 1 to 3, Characterized in that, The X-ray introduction width of the collimator is a predetermined value or more obtained by adding twice the error width of the rear end portion of the collimator to the width of the X-ray detection element, and the error width of the rear end portion of the collimator corresponds to the X-ray introduction length of the collimator and the angle control error angle of the drive control mechanism.

6. The X-ray detector for an X-ray imaging system according to any one of claims 1 to 3, Characterized in that, The X-ray line sensor has a scintillator and a photodetector that detects the scintillation light emitted by the scintillator.

7. The X-ray detector for an X-ray imaging system according to any one of claims 1 to 3, Characterized in that, The X-ray detector has a temperature sensor that measures the temperature of the X-ray detection element, The signal processing circuit corrects the X-ray transmission image based on the measured temperature measured by the temperature sensor and the relationship information between the temperature and the measurement signal obtained in advance.

8. The X-ray detector for an X-ray imaging system according to any one of claims 1 to 3, Characterized in that, The X-ray source is a pulsed X-ray source that irradiates X-ray pulses. The signal processing circuit obtains a non-irradiation signal between the X-ray pulses and corrects the X-ray transmission image based on the non-irradiation signal.

Images