Contact pin and electric connection device

Abstract

This stylus (10) is provided with: a tip section (11) having a first contact region (111) facing a first direction (D1), a base end region (113) facing the first contact region (111), and a plurality of side surfaces; and a main body section (12) having a first end section (121) connected to the tip section (11) and extending in a second direction (D2) intersecting the first direction (D1), the main body section (12) having a second contact region (112) in a region separated from the first end section (121) in the second direction (D2). Among the side surfaces of the tip section (11), outer edge side surfaces (131, 132) that form the outer edge of the tip section (11) when viewed from the second direction (D2) include a linear oblique region that intersects obliquely with the first contact region (111).

Description

Technical Field

[0001] The present invention relates to a probe and an electrical connection device used for inspecting the electrical characteristics of a device. Background Art

[0002] In the process of inspecting the electrical characteristics of a device including a package in which a semiconductor integrated circuit or the like is mounted, an electrical connection device for electrically connecting the package and an inspection device is used. The electrical connection device includes probes that respectively contact an electrode pad disposed on a substrate such as a printed circuit board (PCB) and an electrode terminal of the device. The electrode terminal of the device and the electrode pad of the substrate connected to the inspection device are electrically connected by the probes.

[0003] Prior art documents

[0004] Patent documents

[0005] Patent Document 1: Japanese Unexamined Patent Application Publication No. 2019-35660 Summary of the Invention

[0006] Problems to be Solved by the Invention

[0007] Due to the multi-pinning and size reduction of the device to be inspected, the size and pitch of the electrode terminals are narrowed. Due to the narrowing of the electrode terminals, a phenomenon in which the probe erroneously contacts an electrode terminal adjacent to the electrode terminal with which it originally contacts (hereinafter referred to as "miscontact") is likely to occur. However, if the contact portion of the probe that contacts the electrode terminal is made thinner to prevent miscontact of the probe, the mechanical strength (hereinafter simply referred to as "strength") of the probe may be insufficient. That is, there is a risk that the probe may be damaged due to insufficient strength when the probe is strongly pressed against the electrode terminal of the device during the inspection of the device.

[0008] An object of the present invention is to provide a probe and an electrical connection device that can cope with the narrowing of the electrode terminals of an object to be inspected and can suppress a decrease in the strength of the probe.

[0009] Means for Solving the Problems

[0010] A probe according to one aspect of the present invention includes: a tip portion having a first contact region facing a first direction, a proximal region opposite to the first contact region, and a plurality of side surfaces; and a main body portion having a first end connected to the tip portion and extending in a second direction intersecting the first direction. The main body portion has a second contact region in a region separated from the first end in the second direction. An outer edge side surface of the side surfaces of the tip portion that forms an outer edge of the tip portion when viewed from the second direction includes a linear oblique region that obliquely intersects the first contact region.

[0011] Effects of the Invention

[0012] According to the present invention, it is possible to provide a stylus and an electrical connection device that can cope with the narrowing of the electrode terminals of the object to be inspected and can suppress a decrease in the strength of the stylus. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic perspective view showing the structure of the stylus of the first embodiment.

[0014] Figure 2 It is a schematic view showing the structure of the stylus of the first embodiment when viewed from the front.

[0015] Figure 3 It is a schematic view showing the structure of the stylus of the first comparative example when viewed from the front.

[0016] Figure 4 It is a schematic view showing the structure of the stylus of the second comparative example when viewed from the front.

[0017] Figure 5 It is a schematic view showing the structure of the tip portion of the stylus of the first modification of the first embodiment.

[0018] Figure 6 It is a schematic view showing another structure of the tip portion of the stylus of the first modification of the first embodiment.

[0019] Figure 7 It is a schematic view showing yet another structure of the tip portion of the stylus of the first modification of the first embodiment.

[0020] Figure 8 It is a schematic view showing the structure of the stylus of the second modification of the first embodiment.

[0021] Figure 9 It is a schematic cross-sectional view showing the structure of the electrical connection device of the first embodiment.

[0022] Figure 10 It is a schematic perspective view showing the structure of the electrical connection device of the first embodiment.

[0023] Figure 11 It is a schematic perspective view showing the structure of the stylus of the second embodiment.

[0024] Figure 12 It is a schematic view showing the structure of the stylus of the second embodiment when viewed from the front.

[0025] Figure 13 It is a schematic view showing the structure of another structure of the stylus of the second embodiment when viewed from the front. DETAILED DESCRIPTION OF THE INVENTION

[0026] Next, embodiments of the present invention will be described with reference to the accompanying drawings. In the following description of the drawings, the same or similar reference numerals are assigned to the same or similar parts. However, the drawings are schematic, and it should be noted that the ratios of the thicknesses of the respective parts are different from the actual ones. In addition, there are of course parts with different dimensional relationships and ratios between the drawings. The embodiments shown below illustrate devices and methods for embodying the technical idea of the present invention, and the embodiments of the present invention do not specify the materials, shapes, structures, configurations, etc. of the constituent parts as the following manner.

[0027] (First Embodiment)

[0028] Figure 1 The probe 10 of the first embodiment shown is used for inspecting the electrical characteristics of an object to be inspected. The probe 10 includes a tip portion 11 and a main body portion 12, and the main body portion 12 has a first end portion 121 connected to the tip portion 11.

[0029] As Figure 1 and Figure 2 shown, the tip portion 11 has a first contact area 111 facing the first direction D1, a base end area 113 opposite to the first contact area 111, and a plurality of side surfaces connecting the first contact area 111 and the base end area 113. As will be described later, the first contact area 111 of the tip portion 11 contacts the electrode terminal of the object to be inspected during the inspection of the object to be inspected. When viewed in a side view from a direction perpendicular to the first direction D1 and the second direction D2 respectively, the first contact area 111 includes a portion perpendicular to the first direction D1 and is curved. When viewed from the second direction D2, the first contact area 111 is linear. The tip portion 11 is joined to the main body portion 12 at the base end area 113.

[0030] The main body portion 12 extends along a second direction D2 intersecting the first direction D1. The main body portion 12 has a second contact area 112 in a region separated from the first end portion 121 connected to the tip portion 11 in the second direction D2. The second contact area 112 faces a third direction D3 opposite to the first direction D1. As Figure 1 shown, the second contact area 112 is set near the second end portion 122 of the main body portion 12. As will be described later, the second contact area 112 contacts an electrode pad disposed on a printed circuit board or the like during the inspection of the object to be inspected.

[0031] Hereinafter, a case where the cross-section perpendicular to the first direction D1 of the tip portion 11 (hereinafter also simply referred to as "cross-section") is rectangular will be exemplarily described.

[0032] When observing the tip portion 11 in the second direction D2 (hereinafter also referred to as "front view"), the side of the tip portion 11 facing the front of the drawing is called the "front side surface 133". The side surface facing the second direction D2 opposite to the front side surface 133 is called the "rear side surface 134".

[0033] Hereinafter, among the plurality of side surfaces of the tip portion 11, the side surface that forms the outer edge of the tip portion 11 when observed from the second direction D2 is also called the "outer edge side surface". In Figure 2 the front view shown, the outer edge side surface on the left side of the drawing is called the "first outer edge side surface 131", and the outer edge side surface on the right side of the drawing is called the "second outer edge side surface 132". Without separately defining the first outer edge side surface 131 and the second outer edge side surface 132, it is expressed as the outer edge side surface. When the cross-section of the tip portion 11 is a rectangular shape, the outer edge side surface is the side surface facing the direction orthogonal to the first direction D1 and the second direction D2 respectively.

[0034] Figure 2 The tip portion 11 shown includes a linear region (hereinafter referred to as the "oblique region") where both the first outer edge side surface 131 and the second outer edge side surface 132 obliquely cross with respect to the first contact region 111. The oblique regions of the first outer edge side surface 131 and the second outer edge side surface 132 are linearly continuous from the first contact region 111 to the base end region 113.

[0035] Hereinafter, the angle formed by the first contact region 111 and the oblique region of the outer edge side surface or the extension of the oblique region is also called the "cone angle". In other words, the cone angle is an obtuse angle formed by the plane perpendicular to the first direction D1 and the outer edge side surface. Since the outer edge side surface includes the oblique region, the tip portion 11 includes a conical region where the cross-section gradually becomes larger from the first contact region 111 toward the base end region 113.

[0036] The length perpendicular to the first direction D1 of each part of the stylus 10 in the front view is defined as the "width". The width of the first contact region 111 is also called the "tip width". As Figure 2 shown, the width of the region of the front side surface 133 connected to the first contact region 111 is the tip width W. The width of the main body portion 12 is equal to the width of the base end region 113 of the tip portion 11. In other words, the tip width W of the tip portion 11 is narrower than the width of the main body portion 12. The front side surface 133 is connected to the first contact region 111 at an arbitrary angle.

[0037] As Figure 1As shown, the back side surface 134 includes an inclined portion 134a connected to the first contact area 111, a planar portion 134b connected to the inclined portion 134a and extending along the second direction D2, and a connecting portion 134c connected to the planar portion 134b and connected to the main body portion 12. The inclined portion 134a forms an obtuse angle with the first contact area 111. The connecting portion 134c extends along the third direction D3.

[0038] As described above, the outer edge side surface of the tip portion 11 of the stylus 10 linearly and obliquely intersects with the first contact area 111 that contacts the object to be inspected. Therefore, the strength of the tip portion 11 is higher than that of the stylus of the comparative example described below.

[0039] Figure 3 In the stylus of the first comparative example shown, the cross-section of the stylus is constant in the range from the first contact area 111 to the base end area 113. Therefore, according to the first comparative example, breakage of the stylus due to the pressing applied to the first contact area 111 when the object to be inspected contacts the first contact area 111 can be suppressed. However, since the tip width of the first comparative example is relatively wide, false contact of the stylus is likely to occur.

[0040] Figure 4 The stylus of the second comparative example shown has a linear area S1 perpendicular to the first contact area 111 and a curved area S2 connecting the linear area S1 and the base end area 113 from the first contact area 111 toward the base end area 113. According to the second comparative example, since the tip width is narrow, false contact of the stylus can be suppressed. However, since the cross-sectional area of the area continuous from the first contact area 111 is small, the strength of the second comparative example is lower with respect to the pressing applied to the first contact area 111.

[0041] In contrast, Figure 2 The tip portion 11 shown includes a conical shape in which the cross-section gradually increases with a constant cone angle from the first contact area 111 toward the base end area 113. Therefore, even if the tip width W is narrowed to suppress false contact of the stylus 10, a decrease in the strength of the tip portion 11 can be suppressed.

[0042] In addition, according to Figure 2 the tip portion 11 shown, since the tip portion 11 can ensure a high strength, the tip width W can be narrowed to increase the surface pressure of the first contact area 111. Here, the surface pressure of the first contact area 111 is defined by the formula "load applied to the first contact area 111" / "tip width W". That is, by making the tip width W one-half, the surface pressure can be doubled. Thus, the electrode terminal of the object to be inspected can be strongly pressed against the first contact area 111, and good electrical connection between the stylus 10 and the object to be inspected can be achieved.

[0043] As described above, in the stylus 10 of the first embodiment, the outer edge side surface of the tip portion 11 includes an oblique region that obliquely intersects the first contact region 111, and the cross-section of the tip portion 11 is a conical shape. Therefore, according to the stylus 10, by making the tip width W of the tip portion 11 narrower than the width of the main body portion 12, it is possible to cope with the narrowing of the electrode terminals of the object to be inspected, and the strength of the tip portion 11 can be ensured.

[0044] In addition, compared with Figure 4 the second comparative example shown, the range along the first direction D1 in which the cross-sectional area of the tip portion 11 of the stylus 10 can be enlarged is larger. Therefore, it is possible to increase the allowable value of the current flowing through the stylus 10 and reduce the inductance of the current path. And, the back side surface 134 of the tip portion 11 includes a flat portion 134b that is continuous with the inclined portion 134a and extends along the second direction D2, and the inclined portion 134a is connected to the first contact region 111 at an obtuse angle. Therefore, compared with the case where the back side surface 134 is only the inclined portion 134a, the cross-sectional area of the tip portion 11 can be enlarged. Thereby, the inductance of the tip portion 11 can be further reduced.

[0045] The base material of the stylus 10 is preferably made of a nickel (Ni) alloy or the like. For example, a beryllium-nickel (Be-Ni) alloy or the like can also be used for the base material of the stylus 10. In addition, a Ni film can be plated on the surface of the base material, or a gold (Au) film can be plated on the surface of the plated Ni film. The stylus 10 is formed by stamping, for example. The taper angle is appropriately set according to the tip width W required for the first contact region 111 and the width of the main body portion 12 such as the pitch attached to the stylus 10.

[0046] <First Variation Example>

[0047] In the above description, an example in which the oblique region of the outer edge side surface linearly continues from the first contact region 111 to the base end region 113 has been described. However, the oblique region may be a part of the outer edge side surface.

[0048] For example, as Figure 5 shown in the front view, the outer edge side surface may include a plurality of oblique regions having different taper angles with respect to the first contact region 111. In Figure 5 the tip portion 11 shown, the taper angle formed by the oblique region connected to the base end region 113 and the first contact region 111 is smaller than the taper angle formed by the oblique region connected to the first contact region 111 and the first contact region 111. Therefore, Figure 5 the tip portion 11 shown in Figure 2 has a region where the cross-sectional area is larger than the cross-sectional area of the tip portion 11 shown in

[0049] In Figure 5 In the outer edge side shown, the change in the cone angle of the oblique region is once, but the cone angle can also be changed two or more times in the middle of the outer edge side. Alternatively, between a plurality of oblique regions with different cone angles, there may also be a region parallel to the first direction D1 or a region perpendicular to the first direction D1.

[0050] In addition, it can also be like Figure 6 shown in the front view, the outer edge side includes an oblique region connected to the first contact region 111 and a linear region connecting the oblique region and the base end region 113 and perpendicular to the first contact region 111. Since Figure 6 the tip portion 11 shown has a region with a larger cross-sectional area ratio than Figure 2 the cross-sectional area of the tip portion 11 shown, the strength of the tip portion 11 can be further improved or the inductance can be further reduced.

[0051] In addition, it can also be like Figure 7 shown in the front view, the outer edge side includes an oblique region connected to the base end region 113 and a linear region connecting the oblique region and the first contact region 111 and perpendicular to the first contact region 111. Figure 7 The tip portion 11 shown has the same width as the tip width within a certain range from the first contact region 111 toward the base end region 113. Therefore, even if the tip portion 11 wears from the first contact region 111 due to contact with the electrode terminal, the contact area between the electrode terminal and the tip portion 11 can be maintained constant.

[0052] <Second Variation Example>

[0053] In the above description, the case where both the first outer edge side 131 and the second outer edge side 132 include oblique regions has been described. However, it is also possible that either the first outer edge side 131 or the second outer edge side 132 includes an oblique region, and the other outer edge side does not include an oblique region. The outer edge side that does not include an oblique region extends perpendicular to the first contact region 111, for example. By making only one of the outer edge sides that include oblique regions, the interval of the main body portion 12 can be narrowed compared to the case where both outer edge sides include oblique regions.

[0054] For example, it can also be as Figure 8 shown, a probe 10 in which only the second outer edge side 132 includes an oblique region is arranged on one side of the probe 10 in which only the first outer edge side 131 includes an oblique region. It can also be that Figure 8 the pair of probes 10 shown are applied to a Kelvin connection in which the pair of probes 10 are in contact with the same electrode terminal, for example.

[0055] The probe 10 of the first embodiment is used, for example, in Figure 9The electrical connection device 1 shown Figure 9 The electrical connection device 1 shown is used for checking the electrical characteristics of the device 100. The device 100 is an object to be inspected with a semiconductor integrated circuit or the like mounted on a package. The electrical connection device 1 electrically connects the electrode terminal 101 of the device 100 and the electrode pad 201 of the substrate 200. Figure 1 By way of example, a case where the electrode terminal 101 is a lead electrode of a package is shown. The electrode pad 201 is electrically connected to an inspection device by means of a wiring pattern (not shown) formed on the substrate 200 or the like.

[0056] The electrical connection device 1 includes: a housing 20 having a first surface 21 and a second surface 22 opposite to the first surface 21; a probe 10 supported by the housing 20; and a first elastic portion 31 and a second elastic portion 32 disposed inside the housing 20. The probe 10 contacts the electrode terminal 101 and the electrode pad 201 respectively. The first elastic portion 31 and the second elastic portion 32 are disposed inside the housing 20 in contact with the probe 10 and the housing 20. Without separately defining the first elastic portion 31 and the second elastic portion 32, it is expressed as "elastic portion 30".

[0057] For ease of understanding the description of the operation of the electrical connection device 1, as Figure 9 shown, the X direction, the Y direction, and the Z direction are defined. In Figure 9 , the X direction is the left - right direction of the paper surface, the Y direction is the depth direction of the paper surface, and the Z direction is the up - down direction of the paper surface. Further, in the Z direction, the direction in which the device 100 is located when observed from the electrical connection device 1 is set as the upper direction, and the direction in which the electrical connection device 1 is located when observed from the device 100 is set as the lower direction. For example, the first contact area 111 of the probe 10 faces the upper direction, and the second contact area 112 faces the lower direction.

[0058] In Figure 9 , the electrical connection device 1 is disposed in the lower direction of the device 100 when observed from the Z direction. The first contact area 111 of the probe 10 is exposed on the first surface 21 of the housing 20, and the second contact area 112 of the probe 10 is exposed on the second surface 22 of the housing 20. The probe 10 is disposed in the housing 20 such that the first contact area 111 contacts the electrode terminal 101 of the device 100 when the interval between the electrical connection device 1 and the device 100 narrows along the Z direction. And the probe 10 is disposed in the housing 20 such that a part of the second contact area 112 contacts the electrode pad 201 of the substrate 200 as a contact portion. As will be described later, when inspecting the device 100, due to the change in the position of the first contact area 111 in the Z direction, the range of the contact portion in the second contact area 112 that contacts the electrode pad 201 changes.

[0059] The first elastic part 31 is disposed upward between the housing 20 and a recess provided at the first end portion 121 of the main body portion 12 below the top end portion 11 of the probe 10. The second elastic part 32 is disposed upward between the housing 20 and the second end portion 122 of the main body portion 12 above the second contact area 112. The second elastic part 32 is disposed inside a recess which is provided close to the second end portion 122 and has an opening facing upward.

[0060] A second contact area 112 is provided at a bent portion (hereinafter referred to as “bent part”) on the outer side of the probe 10 of the main body portion 12 which faces the recess in which the second elastic part 32 is disposed. That is, a partial arc-shaped area of the outer edge of the bent part is a contact part of the second contact area 112 which contacts the electrode pad 201.

[0061] The elastic part 30 has a cylindrical shape with an axis extending in the Y direction. That is, the axis of the elastic part 30 is perpendicular to the Z direction in which the first contact area 111 of the probe 10 is displaced, and is perpendicular to the X direction in which the main body portion 12 of the probe 10 extends. The elastic part 30 is held inside the housing 20 in a state of being sandwiched between the surface of the probe 10 and the inner wall of the housing 20.

[0062] When inspecting the device 100, the device 100 is relatively moved along the Z direction with respect to the electrical connection device 1, and the first contact area 111 of the probe 10 is pressed against the electrode terminal 101 of the device 100. Hereinafter, the state where the probe 10 and the electrode terminal 101 are in contact is also referred to as the “contact state”. On the other hand, the state where the probe 10 and the electrode terminal 101 are not in contact is referred to as the “non-contact state”. In the process of changing from the non-contact state to the contact state, the position of the first contact area 111 of the probe 10 is displaced in the Z direction due to the pressing force applied to the first contact area 111 between the first contact area 111 and the electrode terminal 101. According to the change in the position of the first contact area 111, the probe 10 changes its attitude inside the housing 20 in a state where the second contact area 112 is in contact with the surface of the electrode pad 201.

[0063] Specifically, corresponding to the downward displacement of the first end portion 121 of the stylus 10 caused by the pressing applied to the first contact region 111, the second end portion 122 of the stylus 10 is displaced in the upward direction while maintaining the state of contact between the second contact region 112 and the electrode pad 201. As the attitude of the stylus 10 changes, the range of the contact portion of the second contact region 112 that contacts the electrode pad 201 changes. Specifically, in the contact state, the contact portion of the second contact region 112 becomes a region closer to the first end portion 121 than in the non-contact state. Thus, the range of the contact portion changes along the outer edge of the bent portion according to the change in the attitude of the stylus 10, and therefore the range of the contact portion is different between the contact state and the non-contact state. Since the contact portion of the second contact region 112 is included in the arcuate region of the bent portion, the range of the second contact region 112 that contacts the electrode pad 201 changes smoothly according to the change in the attitude of the stylus 10. Therefore, even if the attitude of the stylus 10 changes, damage to the second contact region 112 and the electrode pad 201 can be suppressed.

[0064] Corresponding to the change in the attitude of the stylus 10 inside the housing 20 from the non-contact state to the contact state, the elastic portion 30 is sandwiched between the stylus 10 and the housing 20 and is compressed. That is, in the contact state, the elastic portion 30 undergoes elastic deformation. That is, the first elastic portion 31 is compressed between the first end portion 121 of the stylus 10 and the tip portion 11 and the housing 20. The second elastic portion 32 is compressed between the second end portion 122 of the stylus 10 and the housing 20. The elastically deformed elastic portion 30 applies a force to the stylus 10 in the direction to restore the attitude of the stylus 10 to the non-contact state. In other words, the elastic portion 30 applies a force to the stylus 10 in such a way as to press the first contact region 111 against the electrode terminal 101.

[0065] During the inspection of the device 100, the state in which the first contact region 111 abuts against the electrode terminal 101 and the second contact region 112 abuts against the electrode pad 201 is maintained by the elastic force of the elastic portion 30. Thereby, when inspecting the device 100, electrical connection between the electrode terminal 101 of the device 100 and the electrode pad 201 of the substrate 200 is ensured by means of the stylus 10.

[0066] As described above, when inspecting the device 100, due to the attitude change of the probe 10, the elastic part 30 sandwiched between the probe 10 and the housing 20 undergoes elastic deformation. Moreover, the elastic part 30 applies a force to the probe 10 in such a way that the first contact area 111 contacts the electrode terminal 101 of the device 100 with a predetermined pressing force. That is, the elastic part 30 applies a force to the probe 10 in a direction to offset the displacement of the first contact area 111 when the first contact area 111 is pressed against the electrode terminal 101. During the inspection of the device 100 when the first contact area 111 contacts the electrode terminal 101, the elastic part 30 is in a state of compressive deformation.

[0067] After the inspection of the device 100 is completed, the relative position of the device 100 in the Z direction with respect to the electrical connection device 1 is changed to increase the interval between the device 100 and the electrical connection device 1. By separating the electrode terminal 101 of the device 100 and the first contact area 111 of the probe 10, the pressing force applied to the first contact area 111 disappears. As a result, the shape of the elastic part 30 returns to the non-contact state, and the attitude of the probe 10 is restored to the non-contact state by the elastic force of the elastic part 30.

[0068] As the material of the elastic part 30, for example, an insulating material such as an elastomer can also be used. For example, resin materials such as silicone rubber and polyurethane rubber can also be used for the elastic part 30. In addition, the elastic part 30 can be set to a cylindrical shape with a hollow structure. By setting the elastic part 30 to a cylindrical shape, it is easy to control the contact load and the amount of displacement (hereinafter also referred to as "stroke") of the first contact area 111 caused by the contact with the electrode terminal 101. That is, by increasing the thickness of the cylindrical elastic part 30, the contact load can be increased and the stroke can be reduced. On the other hand, by reducing the thickness of the cylindrical elastic part 30, the contact load can be reduced and the stroke can be increased.

[0069] The material of the housing 20 is an insulating material. For example, an insulating ceramic material or the like is suitable for the material of the housing 20.

[0070] As described above, the electrical connection device 1 includes the probe 10 that contacts the electrode terminal 101 and the electrode pad 201 simultaneously, and the elastic part 30 that applies a force to the probe 10 in such a way as to press the tip part 11 against the electrode terminal 101. The contact load applied to the probe 10 when the probe 10 contacts the electrode terminal 101 is controlled by adjusting the elastic force of the elastic part 30. That is, the contact load is increased by enhancing the elastic force of the elastic part 30, and the contact load is reduced by weakening the elastic force of the elastic part 30. In addition, in the electrical connection device 1, the stroke is controlled by the elastic force of the elastic part 30. That is, the stroke is reduced by enhancing the elastic force of the elastic part 30, and the stroke is increased by weakening the elastic force of the elastic part 30.

[0071] By using the probe pin 10 in the electrical connection device 1, it is possible to suppress breakage of the probe pin 10 caused by the pressing force applied to the first contact area 111 when inspecting the device 100, and it is also possible to cope with the narrowing of the electrode terminal 101. In addition, it is possible to increase the allowable value of the current flowing through the probe pin 10 or reduce the inductance of the probe pin 10 when inspecting the device 100. As a result, various electrical characteristic inspections can be performed on the device 100 with high precision.

[0072] In addition, as Figure 9 shown, in a state where the probe pin 10 is sandwiched between the first elastic portion 31 and the housing 20, the connection portion 134c of the tip portion 11 abuts against the inner wall of the housing 20 that is connected to the opening of the first surface 21. Therefore, the probe pin 10 is not easily detached from the housing 20. And since the tip portion 11 presses against the inner wall of the housing 20, the positional accuracy of the first contact area 111 of the probe pin 10 is improved.

[0073] In Figure 9 only one probe pin 10 of the electrical connection device 1 is shown, but the electrical connection device 1 may also include a plurality of probe pins 10. For example, as Figure 10 shown, the electrical connection device 1 has a structure in which a plurality of probe pins 10 are arranged along the Y direction. The elastic portion 30 abuts against each of the plurality of probe pins 10 and extends along the Y direction. Figure 10 The electrical connection device 1 shown, for example, is suitable for use in inspecting a device 100 having a plurality of electrode terminals 101 arranged in the Y direction.

[0074] (Second Embodiment)

[0075] The probe pin 10 of the second embodiment is different from the probe pin 10 of the Figure 1 first embodiment shown in that Figure 11 the region of the main body portion 12 including the second contact area 112 surrounded by the dashed line S in Figure 12 has a conical shape. That is, as

[0076] Figure 11 and Figure 12The stylus 10 shown includes a tapered region where the cross-section perpendicular to the third direction D3 of the region of the main body 12 including the second contact region 112 gradually narrows toward the second contact region 112. The stylus 10 according to the second embodiment can narrow the width of the second contact region 112 and increase the strength of the stylus 10 with respect to the pressing force applied to the second contact region 112. By narrowing the width of the second contact region 112, for example, the situation where the stylus 10 protrudes with respect to the electrode pad 201 can be suppressed.

[0077] In addition, the stylus 10 of the second embodiment is substantially the same as the stylus 10 of the first embodiment, and repeated descriptions are omitted. For example, the second contact region 112 can be used as the top surface and various tapered shapes described with reference to Figure 2 , Figures 5 - 7 can be used. Alternatively, as shown in Figure 13 , only one of the sides of the side surface connected to the second contact region 112 observed from the second direction D2 obliquely intersects the second contact region 112.

[0078] In addition, the stylus 10 of the second embodiment can also be used for the electrical connection device 1 described with reference to Figure 9 . Thus, when inspecting the device 100, the protrusion of the second contact region 112 of the stylus 10 with respect to the electrode pad 201 or contact with an adjacent electrode pad 201 can be suppressed. That is, according to the stylus 10 of the second embodiment, an electrical connection device 1 that can cope with the narrowing of the electrode terminal 101 and the electrode pad 201 can be realized.

[0079] (Other Embodiments)

[0080] As described above, the present invention has been described using embodiments, but it should not be understood that the discussions and drawings that form a part of this disclosure limit the present invention. Based on this disclosure, those skilled in the art can clearly identify various alternative embodiments, examples, and application techniques. The present invention naturally includes various embodiments not described herein.

[0081] Reference Numeral Explanation

[0082] 1, electrical connection device; 10, stylus; 11, tip portion; 12, main body; 20, housing; 21, first surface; 22, second surface; 30, elastic portion; 31, first elastic portion; 32, second elastic portion; 100, device; 101, electrode terminal; 111, first contact region; 112, second contact region; 113, base end region; 121, first end; 122, second end; 131, first outer edge side surface; 132, second outer edge side surface; 133, front side surface; 134, back side surface; 200, substrate; 201, electrode pad.

Claims

1. A stylus used for inspecting the electrical characteristics of an object to be inspected, wherein, the stylus includes: a tip portion having a first contact area facing a first direction, a proximal area opposite to the first contact area, and a plurality of side surfaces connecting the first contact area and the proximal area; and a main body portion having a first end connected to the tip portion, extending in a second direction intersecting the first direction, and having a second contact area in a region separated from the first end in the second direction, an outer edge side surface among the plurality of side surfaces, which forms an outer edge of the tip portion when viewed from the second direction, includes a linear oblique region obliquely intersecting the first contact area.

2. The stylus according to claim 1, wherein, the tip portion includes a conical region where a cross-section perpendicular to the first direction gradually increases from the first contact area toward the proximal area.

3. The stylus according to claim 1, wherein, the oblique region linearly continues from the first contact area to the proximal area.

4. The stylus according to claim 1, wherein, the outer edge side surface includes a plurality of the oblique regions having different angles with the first contact area.

5. The stylus according to claim 1, wherein, the outer edge side surface includes: the oblique region connected to the first contact area; a straight region connecting the oblique region and the proximal area, perpendicular to the first contact area.

6. The stylus according to claim 1, wherein, the outer edge side surface includes: the oblique region connected to the proximal area; and a straight region connecting the oblique region and the first contact area, perpendicular to the first contact area.

7. The stylus according to claim 1, wherein, both of the two outer edge side surfaces include the oblique region.

8. The stylus according to claim 1, wherein, one of the two outer edge side surfaces includes the oblique region, and the other outer edge side surface does not include the oblique region.

9. The stylus according to claim 1, wherein, a side surface of the main body portion connected to the second contact area when viewed from the second direction includes a linear region obliquely intersecting the second contact area, the main body portion includes a conical region where a cross-section gradually narrows toward the second contact area.

10. An electrical connection device for electrically connecting an electrode terminal of an object to be inspected and an electrode pad connected to an inspection device, wherein, the electrical connection device includes: a housing having a first surface and a second surface opposite to the first surface; The stylus according to any one of claims 1 to 9, wherein the main body portion of the stylus is supported by the housing in such a manner that the first contact area is exposed on the first surface and the second contact area is exposed on the second surface, and the attitude of the stylus changes inside the housing in such a manner that the range of the contact portion of the second contact area in contact with the electrode pad corresponds to the displacement of the first contact area in contact with the electrode terminal along the first direction; and An elastic portion that is disposed inside the housing in contact with the stylus and the housing, elastically deforms corresponding to the change in the attitude of the stylus inside the housing, and applies a force to the stylus in a direction to cancel the displacement of the tip portion.

11. The electrical connection device according to claim 10, wherein the side surface of the plurality of side surfaces of the stylus facing the second direction includes: an inclined portion that is connected to the first contact area at an obtuse angle; a flat portion that is connected to the inclined portion and extends in the second direction; and a connecting portion that connects the flat portion and the housing, the connecting portion is in contact with the housing.

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