Fluid control structure and control method suitable for micro-channel

Abstract

The invention relates to a fluid control structure suitable for micro-channels. A first micro-channel and a second micro-channel comprise first positions which are tightly attached to each other, and each first position comprises a through hole; an elastic film or an elastic sheet and a bulk acoustic wave chip facing the through hole are arranged at the through hole, and when the bulk acoustic wave chip is in a working state, jet flow force generated by liquid driven by the bulk acoustic wave chip acts on the elastic film, so that a second part of the elastic film shifts towards the second micro-channel to expose the through hole; and communicating the first micro-channel with the second micro-channel. A fluid control method is also provided. According to the application, the flowing or mixing control of the fluid in the micro-channel can be finer and more flexible.

Description

Technical Field

[0001] This application relates to the field of microfluidic technology, and particularly to a fluid control structure and a control method applicable to microchannels. Background Art

[0002] The size of a microchannel is tiny, and usually its aperture can reach the millimeter, micrometer or nanometer level. Currently, for the control of the liquid flow in the microchannel at this microscale, most are realized by a liquid injection device connected to the inlet of the microchannel, such as the control of liquid injection or pause, or the control of injection speed, etc.

[0003] This control method indirectly realizes the control of the liquid flow in the microchannel through the injection process of the liquid injection device. Moreover, since it is concentrated at the inlet of the microchannel, it belongs to a control with relatively coarse control granularity and can only realize the control of the overall liquid flow in the entire microchannel, and it is difficult to realize the fine and flexible control of the fluid in the microchannel.

[0004] Therefore, how to provide a fluid control structure applicable to a microchannel to achieve more fine and flexible control of the fluid flow or mixing in the microchannel is a technical problem to be solved. Summary of the Invention

[0005] In view of the above problems in the prior art, this application provides a fluid control structure applicable to a microchannel to improve the fineness and flexibility of the control of the fluid flow in the microchannel.

[0006] To achieve the above object, the first aspect of this application provides a fluid control structure applicable to a microchannel, including: a first microchannel and a second microchannel, the first microchannel and the second microchannel include a first position where they are tightly attached to each other, and the first position includes a through hole connecting the first microchannel and the second microchannel; an elastic membrane, including a first part and a second part extending from the first part; wherein, the first part is fixedly arranged at the first position and beside the through hole, and the second part is in a non-fixed state; and the elastic membrane covers the through hole in the natural state; a bulk acoustic wave chip that can act on the liquid in the first microchannel, and is used to, when the bulk acoustic wave chip is in a working state, the jet force generated by the bulk acoustic wave chip driving the liquid acts on the elastic membrane, so that the second part of the elastic membrane shifts towards the direction of the second microchannel to expose the through hole, and to connect the first microchannel and the second microchannel.

[0007] As described above, by controlling the elastic diaphragm with the bulk acoustic wave chip, the communication between the first microchannel and the second microchannel can be realized, and the control of the fluid flow direction and the like can be achieved. The fluid control structure of the microchannel can be arranged at the required position of the microchannel, so that the control of the fluid flow in the microchannel can be more precise and flexible.

[0008] As a possible implementation of the first aspect, the magnitude of the displacement of the second part is positively correlated with the magnitude of the jet force generated by the bulk acoustic wave chip, and / or the maximum value of the displacement blocks the fluid in the second microchannel with the elastic diaphragm.

[0009] As described above, the opening degrees of the first microchannel and the second microchannel can be controlled as required when acting as a three-way valve, and the control of the fluid mixing degree flowing into the downstream in the first microchannel and the second microchannel can be achieved.

[0010] As a possible implementation of the first aspect, the position of the bulk acoustic wave chip is such that the direction of the jet force generated by it is perpendicular to the through hole at the first position.

[0011] As described above, the jet force is perpendicular to the elastic diaphragm at the position directly opposite the through hole, and better utilization of the jet force to manipulate the elastic diaphragm can be achieved.

[0012] The second aspect of the present application provides a fluid control method, which uses the fluid control structure applicable to the microchannel described in any one of the first aspects. The method includes: putting the bulk acoustic wave chip into a working state, and the bulk acoustic wave chip drives the jet force generated by the liquid in the first microchannel to act on the elastic diaphragm, so that the second part of the elastic diaphragm shifts towards the direction of the second microchannel to expose the through hole, so as to connect the first microchannel and the second microchannel.

[0013] As a possible implementation of the second aspect, the orientation of the horizontal component force of the jet force acting on the elastic diaphragm is opposite to the fluid flow direction of the second microchannel. As a possible implementation of the second aspect, by controlling the jet force generated by the bulk acoustic wave chip driving the liquid, one of the following fluid controls can be achieved:

[0014] By generating the magnitude of the jet force, controlling the displacement amount generated by the elastic diaphragm, and the displacement amount does not block the fluid in the second microchannel, so that the fluid in the first microchannel flows into the second microchannel, mixes with the fluid in the second microchannel and flows towards the downstream of the second microchannel;

[0015] By generating the magnitude of the jet force, controlling the displacement amount generated by the elastic diaphragm, and the displacement amount blocks the fluid in the second microchannel, so that the fluid in the first microchannel flows into the second microchannel and flows towards the downstream of the second microchannel.

[0016] As a possible implementation of the second aspect, the direction of the horizontal component of the jet force acting on the elastic diaphragm is the same as the fluid flow direction in the second microchannel. As a possible implementation of the second aspect, by controlling the jet force generated by the bulk acoustic wave chip to drive the liquid, the following fluid control can be achieved:

[0017] By generating the magnitude of the jet force, controlling the displacement generated by the elastic diaphragm, and the displacement does not block the fluid in the second microchannel, so that the fluid in the first microchannel flows into the second microchannel, mixes with the fluid in the second microchannel and flows downstream of the second microchannel;

[0018] By generating the magnitude of the jet force, controlling the displacement generated by the elastic diaphragm, and the displacement blocks the fluid in the second microchannel, so that the fluid in the first microchannel flows into the second microchannel and flows upstream of the second microchannel;

[0019] By generating the magnitude of the jet force, controlling the displacement generated by the elastic diaphragm, and the displacement blocks the fluid in the second microchannel, so that the fluid in the second microchannel flows into the first microchannel and flows upstream or downstream of the first microchannel.

[0020] As a possible implementation of the second aspect, it further includes: by controlling the intermittent jet force generated by the bulk acoustic wave chip to drive the liquid, the following fluid control can be achieved:

[0021] By generating the intermittency of the jet force, controlling the intermittently generated displacement of the elastic diaphragm, and the displacement intermittently blocks the fluid in the second microchannel, so that the fluid in the first microchannel intermittently flows into the second microchannel and alternately flows downstream of the second microchannel with the liquid in the second microchannel;

[0022] By generating the intermittency of the jet force, controlling the intermittently generated displacement of the elastic diaphragm, and the displacement does not block the fluid in the second microchannel, so that the fluid in the first microchannel intermittently injects into the second microchannel, mixes with the liquid in the second microchannel and then flows downstream of the second microchannel.

[0023] As a possible implementation of the second aspect, when the fluid in the second microchannel is blocked, the contact part of the fluid in the first microchannel and the fluid in the second microchannel is mixed.

[0024] From the above, by controlling the magnitude of the jet force generated by the bulk acoustic wave chip, the continuity of the jet, and / or controlling the flow condition of the liquid in the second microchannel, the mixing mode of the liquids in the two microchannels can be affected, and the flow directions of the fluids in the two microchannels can be controlled to achieve flexible control. Description of the Drawings

[0025] Figure 1 is a schematic diagram of a fluid control structure applicable to a microchannel provided by the first embodiment of the present application;

[0026] Figure 2 is a schematic diagram of a fluid control structure applicable to a microchannel provided by the second embodiment of the present application;

[0027] Figure 3 is a schematic diagram of an elastic diaphragm including a tangent port provided by an embodiment of the present application;

[0028] Figure 4 is a schematic diagram of a fluid control structure applicable to a microchannel provided by the third embodiment of the present application;

[0029] Figure 5 is a schematic diagram of a fluid control structure applicable to a microchannel provided by the fourth embodiment of the present application.

[0030] It should be understood that in the above schematic diagrams of the structure, the sizes and shapes of the respective block diagrams are for reference only and should not constitute an exclusive interpretation of the embodiments of the present invention. The relative positions and inclusion relationships between the respective block diagrams presented in the schematic diagrams of the structure only schematically represent the structural associations between the block diagrams and do not limit the physical connection manners of the embodiments of the present invention. Detailed implementation manners

[0031] The following are examples in conjunction with the accompanying drawings to further illustrate the technical solutions provided by the present application. It should be understood that the system structures and service scenarios provided in the embodiments of the present application are mainly for illustrating possible implementation manners of the technical solutions of the present application and should not be construed as the only limitation of the technical solutions of the present application. Those of ordinary skill in the art know that with the evolution of the system structure and the emergence of new service scenarios, the technical solutions provided by the present application are equally applicable to similar technical problems.

[0032] It should be understood that the fluid control solutions applicable to microchannels provided by the embodiments of the present application include a fluid control structure applicable to microchannels and a control method for the fluid in the microchannel based on this structure. Since the principles of these technical solutions for solving problems are the same or similar, in the following introduction of specific embodiments, some repetitive parts may not be elaborated again, but it should be regarded that there are mutual references between these specific embodiments and they can be combined with each other.

[0033] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those of ordinary skill in the technical field to which this application belongs. In case of inconsistency, the meaning stated in this specification or the meaning derived from the content recorded in this specification shall prevail. Additionally, the terms used herein are for the purpose of describing the embodiments of this application only and are not intended to limit this application. For the purpose of accurately describing the technical content in this application and for accurately understanding the present invention, the following explanations or definitions of the terms used in this specification are given before the description of the specific embodiments:

[0034] 1) Bulk acoustic wave resonator: In this application, it refers to an acoustic wave resonator with a frequency generally greater than 1 GHz. Under the excitation of an input signal, it generates ultra-high-frequency vibrations, emits bulk acoustic waves, and can act on fluids.

[0035] 2) Jet and vortex are two phenomena of the bulk acoustic waves of the bulk acoustic wave resonator in fluids. Among them, the jet of the bulk acoustic wave resonator can generate pressure or thrust, and the vortex can generate drag force. In some embodiments, by controlling the density of the pulses input to the bulk acoustic wave resonator, the pulse interval, or the pulse duty cycle (the ratio of the high level of the pulse to one pulse period) in the pulse period, the bulk acoustic wave resonator can exhibit a jet that generates pressure or thrust or a vortex that generates drag force. For example, the smaller the pulse duty cycle (the shorter the pulse), the more it reflects the jet, and the lower the pulse density (the continuity of the pulses) or the larger the pulse interval, the more it reflects the jet, and vice versa, it is more inclined to generate a vortex.

[0036] The fluid control structure applicable to microchannels provided in this application can be arranged at one or more corresponding positions along the extension direction of the microchannel according to the functions realized by the control structure, so as to realize the control of multiple positions in the extension direction of the microchannel, improving the fineness and flexibility of the fluid flow control in the microchannel. The fluid control structure applicable to microchannels provided in this application can realize the valve functions of microchannels, such as two-way valves and three-way valves.

[0037] When the fluid control structure applicable to microchannels provided in this application is applied to the control of the flow of liquids in microchannels, multiple fluid control structures can also be used in cooperation to further realize complex functions. For example, when using multiple such fluid control structures to realize valve functions, it can be applied to the control of the selective gating and confluence of different types of fluid inputs at multiple input ports, or the selective gating control of outputs at multiple output ports, the proportion control when multiple fluids converge, etc.

[0038] Next, the solution provided in this application will be introduced in detail with reference to the drawings and embodiments.

[0039] The embodiment of the present application provides a fluid control structure applicable to a microchannel, which can realize the function of a valve in the microchannel, and this embodiment realizes the function of a three-way valve. As Figure 1 shown, the fluid control structure provided by this embodiment includes a microchannel, the microchannel includes a first microchannel and a second microchannel, an elastic diaphragm, and a bulk acoustic wave chip. Among them, this embodiment can realize the valve control of the fluids in the first microchannel and the second microchannel to connect to the downstream channel, where the downstream channel can be the downstream of the second microchannel.

[0040] Among them, the first microchannel and the second microchannel include a first position where they are tightly attached to each other, and the first position includes a through hole connecting the first microchannel and the second microchannel.

[0041] Among them, the elastic diaphragm includes a first part and a second part extending from the first part; among them, the first part is fixedly arranged at the first position and beside the through hole, and the second part is in a non-fixed state; and the elastic diaphragm covers the through hole in the natural state.

[0042] Among them, the bulk acoustic wave chip can act on the liquid in the first microchannel. When the bulk acoustic wave chip is in the working state, the jet force generated by the bulk acoustic wave chip on the liquid acts on the elastic diaphragm, causing the second part of the elastic diaphragm to shift towards the direction of the second microchannel to expose the through hole, and to connect the first microchannel and the second microchannel.

[0043] In some embodiments, the first microchannel and the second microchannel including a first position where they are tightly attached to each other means that the first microchannel and the second microchannel can be tightly attached at least at one place. In some embodiments, the first microchannel and the second microchannel are arranged in parallel and are tightly attached as a whole. Among them, the first microchannel and the second microchannel can be located in the same plane or in the upper and lower two planes.

[0044] In some embodiments, the first microchannel and the second microchannel are not arranged in parallel, and there is a first position where they are tightly attached in three-dimensional space. Among them, the first microchannel and the second microchannel can be located in the upper and lower two planes.

[0045] In some embodiments, the first microchannel and the second microchannel are not arranged in parallel, and at least one of them is a curved flow channel, and there is a first position where they are tightly attached in three-dimensional space. Among them, the first microchannel and the second microchannel can be located in the upper and lower two planes. In some other embodiments, the first microchannel and the second microchannel can also have a first position where they are tightly attached in the same plane, which can be the position at the tangency (similar to the tangency between a curved shape and a straight line) of the two flow channels.

[0046] In some embodiments, the magnitude of the displacement of the second portion of the elastic diaphragm is positively correlated with the magnitude of the jet force generated by the bulk acoustic wave chip. In some embodiments, the maximum value of the displacement amount blocks the fluid in the second microchannel by the elastic diaphragm.

[0047] In some embodiments, the degree of displacement of the second portion of the elastic diaphragm is positively correlated with the magnitude of the jet force generated by the bulk acoustic wave chip. Thus, the jet force can be adjusted as needed to achieve the mixing of the fluids in the first microchannel and the second microchannel based on different ratios (related to the displacement amount generated by the jet force acting on the second portion of the elastic diaphragm) and then flowing downstream of the second microchannel.

[0048] In some embodiments, the maximum degree of displacement of the second portion of the elastic diaphragm can contact the inner wall of the corresponding position of the second microchannel, thereby blocking the fluid in the second microchannel. Thus, the fluid in the first microchannel and the second microchannel can be selectively gated to flow downstream of the second microchannel.

[0049] In some embodiments, the elastic diaphragm can cover the through hole. The second portion of the elastic diaphragm is the opposite end away from its first portion. The pressure of the fluid in the second microchannel on the elastic diaphragm causes the second portion of the elastic diaphragm to closely adhere to the first position. When the bulk acoustic wave chip is not working, or the jet force generated is not yet sufficient to counteract the pressure of the fluid in the second microchannel on the elastic diaphragm, the elastic diaphragm isolates the first microchannel and the second microchannel. In some embodiments, the shape and size of the second portion of the elastic diaphragm can be larger than the through hole to cover the through hole and its edge. In other embodiments, the shape and size of the elastic diaphragm can exactly match the through hole to cover the through hole.

[0050] In other embodiments, the portions of the elastic diaphragm located around the through hole are fixedly connected. The elastic diaphragm can be as Figure 3 shown. The elastic diaphragm includes tangent openings. The second portion is located at one or more tangent openings on the elastic diaphragm. Figure 3 The linear tangent opening and the cross-shaped tangent opening are shown. Preferably, the center of the tangent opening is aligned with the center of the through hole. When the pressure difference between the fluids in the second microchannel and the first microchannel is within the threshold, the tangent opening is not deformed and is in a closed state, and the elastic diaphragm isolates the first microchannel and the second microchannel. When the bulk acoustic wave chip works, the jet force acts on the tangent opening, causing the tangent opening to open (i.e., the second portion is displaced). For the tangent opening method, the displacement amount of the second portion may be limited, which is more suitable for the example of the mixed fluid in the first microchannel and the second microchannel flowing downstream of the second microchannel.

[0051] In some embodiments, the bulk acoustic wave chip may be located at a position on the inner wall of the first microchannel or at a position adjacent to the inner wall. The position adjacent to the inner wall may be inside or outside the first microchannel, and this position can make the provided bulk acoustic wave chip face the through hole. When facing the through hole, the jet force generated by the bulk acoustic wave chip acting on the liquid can directly act on the elastic diaphragm at the through hole.

[0052] In some embodiments, the position of the bulk acoustic wave chip is such that the direction of the jet force generated by it is perpendicular to the through hole at the first position. That is, the bulk acoustic wave chip is oriented to face the through hole directly.

[0053] In some embodiments, according to the direction of the jet force to be generated, the bulk acoustic wave chip may be located at the bottom of the first microchannel or on the substrate supporting the microchannel, or at the side wall of the first microchannel, perpendicular to the substrate, etc.

[0054] In some embodiments, as Figure 1 shown in the first embodiment or Figure 2 shown in the second embodiment, for the first microchannel, the first position is the end position of the first microchannel. That is, the end of the first microchannel is in a closed state and is the first position. In other embodiments, as Figure 4 shown in the third embodiment or Figure 5 shown in the fourth embodiment, for the first microchannel, the first position is not the end position of the first microchannel, but a position on one side wall of the first microchannel.

[0055] In some embodiments, when the end of the first microchannel is in a closed state, the bulk acoustic wave chip can also be arranged at other positions in the first microchannel, and the generated jet force faces the extending direction of the first microchannel, and this extending direction points to the direction of extension towards the end. For example Figure 1 at the first bend on the left side of the first microchannel shown in

[0056] In some embodiments, the fluid flow direction in the second microchannel can be as Figure 1 or Figure 2As shown, the flow direction can be opposite to or the same as the orientation of the horizontal component of the jet force acting on the elastic diaphragm. By combining the control of the magnitude of the jet force, and / or the control of the magnitudes of the fluid forces in the first microchannel and the second microchannel, the flow direction of the fluid in the first microchannel and the second microchannel can be controlled. Moreover, within a certain area of the contact portion between the liquid in the first microchannel and the liquid in the second microchannel, especially in the area affected by the bulk acoustic wave chip, mixing of the contact portion occurs, or mixing occurs under the action of the bulk acoustic wave chip. Specifically, this will be described in detail in the fluid control method described later.

[0057] The embodiments of the present application provide a fluid control method for a microchannel, based on the fluid control structure of the microchannel described in the above embodiments or any one of their alternative embodiments. This fluid control method includes:

[0058] Put the bulk acoustic wave chip in a working state. The bulk acoustic wave chip drives the jet force generated by the liquid in the first microchannel to act on the elastic diaphragm, causing the second part of the elastic diaphragm to shift towards the second microchannel direction to expose the through hole, and to connect the first microchannel and the second microchannel.

[0059] After the two microchannels are connected, it means that the liquids in the two microchannels have the possibility of contact. Among them, the flow direction of the fluid in the two microchannels can also be controlled by controlling the magnitude of the jet force generated by the bulk acoustic wave chip, the continuity of the jet, and / or controlling the flow condition of the liquid in the second microchannel. The control of the mixing method of the liquids in the two microchannels will be further illustrated by examples later.

[0060] In some embodiments, the orientation of the horizontal component of the jet force acting on the elastic diaphragm, as Figure 1 shown, is opposite to the fluid flow direction of the second microchannel.

[0061] For the case where the horizontal component of the jet force is opposite to the fluid flow direction of the second microchannel, in some embodiments, by controlling the jet force generated by the bulk acoustic wave chip driving the liquid, the following fluid control can be achieved: by generating the magnitude of the jet force, controlling the displacement amount generated by the elastic diaphragm, where the displacement amount does not block the fluid in the second microchannel, enabling the fluid in the first microchannel to flow into the second microchannel, mixing with the fluid in the second microchannel and flowing downstream of the second microchannel.

[0062] In the case where the horizontal component of the jet force is opposite to the fluid flow direction of the second microchannel, in some embodiments, by controlling the jet force generated by driving the liquid with the bulk acoustic wave chip, the following fluid control can be achieved: by generating the magnitude of the jet force, controlling the displacement amount generated by the elastic diaphragm, the displacement amount blocks the fluid in the second microchannel, causing the fluid in the first microchannel to flow into the second microchannel and flow downstream in the second microchannel.

[0063] In the case where the displacement amount generated by the above-mentioned elastic diaphragm does not block the fluid in the second microchannel, in some embodiments, the bulk acoustic wave chip can generate continuous jets. The liquid in the first microchannel is continuously injected into the second microchannel, and at the same time, under the action of the jets of the bulk acoustic wave chip and the vortex effect generated by the continuous jets (the jets can act on the second microchannel opposite to the bulk acoustic wave chip), after continuously mixing with the liquid in the second microchannel, it continues to flow downstream in the second microchannel. Among them, whether the vortex effect acts significantly on the mixing is also related to the fluid flow rate in the second microchannel. The slower the flow rate, the more obvious this effect is.

[0064] In the case where the displacement amount generated by the above-mentioned elastic diaphragm does not block the fluid in the second microchannel, in some embodiments, the bulk acoustic wave chip can generate intermittent jets. The liquid in the first microchannel is intermittently injected into the second microchannel, and the intermittently injected liquid is surrounded by the liquid in the second microchannel for mixing and continues to flow downstream in the second microchannel with the liquid in the second microchannel.

[0065] In the case where the displacement amount generated by the above-mentioned elastic diaphragm blocks the fluid in the second microchannel, in some embodiments, the bulk acoustic wave chip can generate intermittent jets. The liquid in the first microchannel is intermittently injected into the second microchannel, and the liquid in the first microchannel is intermittently blocked, thereby forming a state where the liquids in the two channels alternate in sequence in the first microchannel and continue to flow downstream in the second microchannel.

[0066] In some embodiments, the orientation of the horizontal component of the jet force acting on the elastic diaphragm, as Figure 2 shown, is the same as the fluid flow direction of the second microchannel.

[0067] In the case where the horizontal component of the jet force is the same as the fluid flow direction of the second microchannel, in some embodiments, by controlling the jet force generated by driving the liquid with the bulk acoustic wave chip, the following fluid control can be achieved: by generating the magnitude of the jet force, controlling the displacement amount generated by the elastic diaphragm, the displacement amount does not block the fluid in the second microchannel, causing the fluid in the first microchannel to flow into the second microchannel, mix with the fluid in the second microchannel and flow downstream in the second microchannel.

[0068] When the horizontal component of the jet force is in the same direction as the fluid flow in the second microchannel, in some embodiments, by controlling the jet force generated by the bulk acoustic wave chip to drive the liquid, the following fluid control can be achieved: by generating the magnitude of the jet force, controlling the displacement amount generated by the elastic diaphragm, and the displacement amount blocks the fluid in the second microchannel, causing the fluid in the first microchannel to flow into the second microchannel and flow upstream in the second microchannel.

[0069] When the horizontal component of the jet force is in the same direction as the fluid flow in the second microchannel, in some embodiments, by controlling the jet force generated by the bulk acoustic wave chip to drive the liquid, the following fluid control can be achieved: by generating the magnitude of the jet force, controlling the displacement amount generated by the elastic diaphragm, and the displacement amount blocks the fluid in the second microchannel, causing the fluid in the second microchannel to flow into the first microchannel and flow upstream or downstream in the first microchannel.

[0070] In some embodiments, when the elastic diaphragm blocks the fluid in the second microchannel, the contact portion of the fluid in the first microchannel and the fluid in the second microchannel is mixed.

[0071] For the case where the displacement amount generated by the above elastic diaphragm does not block the fluid in the second microchannel, in some embodiments, the bulk acoustic wave chip can generate continuous jets. The liquid in the first microchannel is continuously injected into the second microchannel, and at the same time, under the action of the jets of the bulk acoustic wave chip and the eddy current effect generated by the continuous jets (the jets can act on the liquid in the second microchannel opposite to the bulk acoustic wave chip), it continuously mixes with the liquid in the contact area in the second microchannel and flows downstream in the second microchannel.

[0072] For the case where the displacement amount generated by the above elastic diaphragm does not block the fluid in the second microchannel, in some embodiments, the bulk acoustic wave chip can generate intermittent jets. The liquid in the first microchannel is intermittently injected into the second microchannel, and the intermittently injected liquid is surrounded by the liquid in the second microchannel for mixing and continues to flow downstream in the second microchannel with the liquid in the second microchannel.

[0073] For the case where the displacement amount generated by the above elastic diaphragm blocks the fluid in the second microchannel, in some embodiments, the bulk acoustic wave chip can generate intermittent jets. The liquid in the first microchannel is intermittently injected into the second microchannel, and the liquid in the first microchannel is intermittently blocked, so that a state of alternating liquid in the two channels is formed in the first microchannel and continues to flow downstream in the second microchannel.

[0074] In the case where the displacement amount generated by the above elastic diaphragm blocks the fluid in the second microchannel, in some embodiments, the bulk acoustic wave chip can generate a continuous jet, the liquid in the first microchannel is continuously injected into the second microchannel, and at the same time, under the action of the jet of the bulk acoustic wave chip and the vortex effect generated by the continuous jet (the jet can act on the second microchannel opposite to the bulk acoustic wave chip), the liquid in the contact area with the second microchannel is continuously mixed. Among them, if the liquid pressure in the second microchannel is higher than the liquid pressure in the first microchannel, the mixed liquid will flow into the first microchannel along with the liquid in the second microchannel. On the contrary, if the liquid pressure in the second microchannel is less than the liquid pressure in the first microchannel, the mixed liquid will flow into the upstream of the second microchannel along with the liquid in the first microchannel.

[0075] As can be seen from the above embodiments, by controlling the magnitude of the jet force generated by the bulk acoustic wave chip, the continuity of the jet, and / or controlling the flow of the liquid in the second microchannel, the mixing mode of the liquids in the two microchannels can be affected, and the flow direction of the fluids in the two microchannels can be controlled.

[0076] In several embodiments provided in the present application, it should be understood that the disclosed devices and methods are not limited to the above embodiments and can also be implemented in other ways. For example, the device embodiments described above are merely illustrative. For example, the division of the units is only a logical function division, and there may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the displayed or discussed mutual coupling or direct coupling or communication connection may be through some interfaces, and the indirect coupling or communication connection of the devices or units may be in electrical, mechanical or other forms.

[0077] The units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in one place or distributed to multiple network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0078] In addition, the terms "first, second, third, etc." or module A, module B, module C, etc. in the specification and claims are only used to distinguish similar objects and do not represent a specific order for the objects. It can be understood that, under the allowed circumstances, the specific order or sequence can be interchanged so that the embodiments of the present application described here can be implemented in an order other than that illustrated or described here.

[0079] In the above description, the reference numerals indicating steps, such as S10, S20, etc., do not necessarily mean that the steps will be executed in this order. The order of the front and rear steps can be interchanged or the steps can be executed simultaneously under allowable circumstances.

[0080] The term "comprising" as used in the specification and claims should not be construed as limited to the content listed thereafter; it does not exclude other elements or steps. Therefore, it should be interpreted as specifying the presence of the recited features, integers, steps or components, but not excluding the presence or addition of one or more other features, integers, steps or components and their groups. Thus, the statement "a device comprising devices A and B" should not be limited to a device consisting only of components A and B.

[0081] As used herein, the term "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the present application. Thus, the appearances of the phrases "in one embodiment" or "in an embodiment" in various places in this specification are not necessarily all referring to the same embodiment, but may refer to the same embodiment. In addition, in one or more embodiments, the various specific features, structures, or characteristics may be combined in any suitable manner, as will be apparent to those of ordinary skill in the art from the present disclosure.

[0082] Note that the above is only a preferred embodiment of the present application and the technical principles applied. Those skilled in the art will understand that the present application is not limited to the specific embodiments described herein. Various obvious changes, re-adjustments, and substitutions can be made by those skilled in the art without departing from the scope of protection of the present application. Therefore, although the present application has been described in more detail through the above embodiments, the present application is not limited to the above embodiments. Without departing from the concept of the present application, more other equivalent embodiments can be included, all of which fall within the scope of protection of the present application.

Claims

1. A fluid control structure applicable to a microchannel, characterized in that, Comprising: A first microchannel and a second microchannel, the first microchannel and the second microchannel including a first position where they are tightly attached to each other, and the first position including a through hole connecting the first microchannel and the second microchannel; An elastic diaphragm, including a first part and a second part extending from the first part; wherein, the first part is fixedly arranged at the first position and beside the through hole, and the second part is in a non-fixed state; and the elastic diaphragm covers the through hole in the natural state; A bulk acoustic wave chip capable of acting on the liquid in the first microchannel, for when the bulk acoustic wave chip is in a working state, the jet force generated by the bulk acoustic wave chip driving the liquid acts on the elastic diaphragm, causing the second part of the elastic diaphragm to shift towards the second microchannel direction to expose the through hole, and to connect the first microchannel and the second microchannel.

2. The structure according to claim 1, characterized in that, The magnitude of the displacement of the second part is positively correlated with the magnitude of the jet force generated by the bulk acoustic wave chip, and / or the maximum value of the displacement blocks the fluid in the second microchannel.

3. The structure according to claim 1 or 2, characterized in that, The position of the bulk acoustic wave chip is such that the direction of the jet force generated by it is perpendicular to the through hole at the first position.

4. A fluid control method, characterized in that, Using the fluid control structure for microchannels according to any one of claims 1 to 3, the method comprising: Putting the bulk acoustic wave chip in a working state, the jet force generated by the bulk acoustic wave chip driving the liquid in the first microchannel acts on the elastic diaphragm, causing the second part of the elastic diaphragm to shift towards the second microchannel direction to expose the through hole, so as to connect the first microchannel and the second microchannel.

5. The method according to claim 4, characterized in that, The orientation of the horizontal component force of the jet force acting on the elastic diaphragm is opposite to the fluid flow direction in the second microchannel.

6. The method according to claim 5, characterized in that, By controlling the jet force generated by the bulk acoustic wave chip driving the liquid, to achieve one of the following fluid controls: By controlling the magnitude of the jet force generated, controlling the displacement amount generated by the elastic diaphragm, the displacement amount not blocking the fluid in the second microchannel, enabling the fluid in the first microchannel to flow into the second microchannel, mixing with the fluid in the second microchannel and flowing downstream in the second microchannel; By controlling the magnitude of the jet force generated, controlling the displacement amount generated by the elastic diaphragm, the displacement amount blocking the fluid in the second microchannel, enabling the fluid in the first microchannel to flow into the second microchannel and flow downstream in the second microchannel.

7. The method according to claim 4, characterized in that, The orientation of the horizontal component force of the jet force acting on the elastic diaphragm is the same as the fluid flow direction in the second microchannel.

8. The method according to claim 7, characterized in that, By controlling the jet force generated by the bulk acoustic wave chip driving the liquid, to achieve one of the following fluid controls: By controlling the magnitude of the jet force generated, controlling the displacement amount generated by the elastic diaphragm, the displacement amount not blocking the fluid in the second microchannel, enabling the fluid in the first microchannel to flow into the second microchannel, mixing with the fluid in the second microchannel and flowing downstream in the second microchannel. By controlling the magnitude of the jet force, the displacement generated by the elastic diaphragm is controlled, and the displacement blocks the fluid in the second microchannel, causing the fluid in the first microchannel to flow into the second microchannel and flow upstream in the second microchannel; By controlling the magnitude of the jet force, the displacement generated by the elastic diaphragm is controlled, and the displacement blocks the fluid in the second microchannel, causing the fluid in the second microchannel to flow into the first microchannel and flow upstream or downstream in the first microchannel.

9. The method according to any one of claims 5 - 8, characterized in that, It further includes: By controlling the jet force intervals generated by the bulk acoustic wave chip to drive the liquid, one of the following fluid controls is achieved: By generating the intermittency of the jet force, the intermittently generated displacement of the elastic diaphragm is controlled, and the displacement intermittently blocks the fluid in the second microchannel, causing the fluid in the first microchannel to intermittently flow into the second microchannel and flow downstream in the second microchannel alternately with the liquid in the second microchannel; By generating the intermittency of the jet force, the intermittently generated displacement of the elastic diaphragm is controlled, and the displacement does not block the fluid in the second microchannel, causing the fluid in the first microchannel to intermittently inject into the second microchannel and flow downstream in the second microchannel after mixing with the liquid in the second microchannel.

10. The method according to any one of claims 4 - 9, characterized in that, When blocking the fluid in the second microchannel, The contact part of the fluid in the first microchannel and the fluid in the second microchannel is mixed.

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