Water beam correction method in water-jet guided laser optical mode

Abstract

The invention belongs to the technical field of water-jet guided laser processing, and relates to a water-jet guided laser optical mode water beam correction method, which comprises the following steps of: 1, constructing a triangular geometrical relationship; 2, arranging measuring points and sensors; 3, establishing three-dimensional space coordinates; 4, designing a control system; 5, calculating a deviation angle; 6, adjusting a control algorithm; 7, signal processing and data transmission; 8, performing cooperative control on the correction process; 9, the water-light debugging process is completed, and water-guided laser machining is carried out; according to the invention, the triangulation principle and reasonable arrangement are utilized, the water beam deviation angle can be measured with high precision, the theoretical precision reaches a sub-degree level, the measurement error is small under various interferences, and reliable data are provided for correction; therefore, the correction precision is high, and the machining precision requirement can be met.

Description

Technical Field

[0001] The present invention belongs to the technical field of water-jet guided laser processing, and relates to a method for correcting the water beam in an optical manner of water-jet guided laser. Background Art

[0002] As a new type of special processing technology, water-jet guided laser processing has been widely studied and applied in recent years. It uses water as the laser transmission medium, confines the laser beam in a tiny water beam, and thus realizes the processing of materials with high precision and low heat-affected zone. In the fields of microelectromechanical systems (MEMS) manufacturing, biomedical engineering, aerospace, etc., water-jet guided laser processing shows unique advantages. For example, when processing high-hardness and high-brittle materials, it can effectively avoid micro-cracks and thermal damage of the materials and improve the processing quality. During the water-jet guided laser processing, the direction accuracy of the water beam is crucial for the processing accuracy. Due to the influence of various factors, such as the tiny error of the water beam generation device, the interference of the external environment (such as vibration, temperature change, etc.), the water beam often deviates from the ideal vertical direction. This deviation will cause the uneven distribution of laser energy in the processing area, thus affecting key indicators such as processing dimensional accuracy and surface quality. For example, in micro-processing, the deviation of the water beam may cause the dimensional deviation of the processed micro-structure to exceed the allowable range. For the processing of biomedical implants, it may affect their compatibility with biological tissues and the realization of functions.

[0003] However, the existing methods for correcting the water beam deviation of water-jet guided laser have certain limitations. Some methods mainly rely on manual adjustment or empirical calibration, lacking precise measurement and automatic correction mechanisms. In addition, although some existing optical measurement methods can detect certain parameters of the water beam, they are not perfect for the precise measurement and rapid correction of the water beam deviation angle. For example, some detection methods based on simple optical reflection principles cannot accurately obtain the deviation angle of the water beam in three-dimensional space, and their stability and reliability are poor in complex processing environments.

[0004] Therefore, there is a need for a method and device that can accurately measure the water beam deviation angle and achieve rapid and accurate correction to improve the accuracy and stability of water-jet guided laser processing. Summary of the Invention

[0005] The present invention adopts a self-adjustment method for the perpendicularity and position of the water beam, and through self-correction adjustment of the center of the nozzle and perpendicular to the z-axis, the water beam itself will also perform perpendicular self-correction adjustment. Thus, it will overcome the problem that the water beam remains perpendicular to the z-axis during actual application and the center position of each calibration remains consistent. Thus, the qualified rate of processed parts can be improved and the debugging efficiency can be reduced.

[0006] The technical solution adopted by the present invention to solve the technical problem is: an optical method for correcting the water beam of water-jet guided laser, including the following steps:

[0007] Step S1, constructing triangle geometric relationships;

[0008] At least three non-collinear measuring points are set around the water-guided laser water beam, and each measuring point is equipped with a corresponding optical sensor; when the water beam passes through, due to the difference in refractive index between the water beam and the surrounding medium, light refraction and reflection phenomena will occur at the measuring point; the changes in light refraction and reflection are detected by the optical sensor, and the corresponding light signal information is recorded; by measuring the angular relationship between the light at different measuring points and the distance between the known measuring points, a triangular geometric relationship is constructed to calculate the position of the water beam in space;

[0009] Step S2, arrangement of measuring points and sensors;

[0010] In the axial direction of the water beam, the measuring points are distributed within the effective range where the water beam may deviate; in the plane perpendicular to the axial direction of the water beam, the measuring points are distributed in a triangular shape, and the size and shape of the triangle are designed according to factors such as the diameter of the water beam and the measurement accuracy; the types of optical sensors can be selected from photoelectric detectors, CCD image sensors, etc. Photoelectric detectors can detect changes in light intensity, and determine the incident angle of light by analyzing the distribution of light intensity through optical sensors. CCD image sensors can obtain more detailed light image information and determine the propagation direction of light by processing the image (such as edge detection, spot center positioning, etc.); different types of sensors can be selected or used in combination according to specific measurement needs and costs;

[0011] Step S3, establishing three-dimensional space coordinates;

[0012] The outlet center of the water jet generating device is taken as the origin, the ideal axial direction of the water jet is the z-axis (vertically upward is the positive direction), and two mutually perpendicular directions are randomly selected in the plane perpendicular to the z-axis as the x-axis and the y-axis to establish a three-dimensional space coordinate system;

[0013] Step S4, design of control system;

[0014] According to the light information detected by the optical sensor at the measuring point, the law of refraction and geometric relationship are used to trace the light; for the light emitted from the water beam and reaching the sensor, the direction vector of the light in space is calculated through the coordinates of the measuring point, the coordinates of the incident point of the light on the sensor, and the known relative position relationship between the measuring point and the sensor; by calculating the direction vectors of the light at multiple measuring points, the light propagation direction information of the water beam at different positions is obtained;

[0015] Step S5, deviation angle calculation;

[0016] The deviation angle of the water beam in three-dimensional space is determined by calculating the angle between the actual direction vector of the water beam and the ideal perpendicular direction vector; the deviation angle α of the water beam in the x-z plane is determined using the vector dot product formula; for the deviation angle β of the water beam in the y-z plane, it is determined through the vector dot product formula.

[0017] Step S6: Adjust the control algorithm;

[0018] Determine the adjustment angle of the mirror according to the calculation result of the deviation angle; assume that mirror M1 is used to correct the deviation of the water beam in the x-z plane, and mirror M2 is used to correct the deviation of the water beam in the y-z plane. For mirror M1, there is a certain functional relationship between its adjustment angle and the deviation angle of the water beam in the x-z plane; after calculating the deviation angles α and β, substitute them into the corresponding functions to obtain the adjustment angle of the mirror, and then precisely adjust the angle of the mirror through the motor control system to achieve the correction of the water beam;

[0019] Step S7: Signal processing and data transmission;

[0020] The optical signal detected by the optical sensor is converted into a digital signal after passing through signal processing circuits such as amplification and filtering; the digital signal is transmitted to the central processing unit CPU through a data transmission line (such as a high-speed data line, wireless communication module, etc.); the central processing unit CPU further processes and analyzes the received signal, and calculates the deviation angle of the water beam according to a preset algorithm;

[0021] Step S8: Coordinated control of the correction process;

[0022] After the central processing unit CPU calculates the deviation angle, a correction instruction is sent to the motor control system of the adjustment device; the motor control system precisely controls the rotation of the motor that adjusts the mirror according to the correction instruction to achieve the correction of the water beam;

[0023] Step S9: The water-light debugging process is completed, and water-guided laser processing is carried out.

[0024] Preferably, in step S4, the direction vector of the light is calculated by the following formula:

[0025]

[0026] In formula (1), x i , y i , z i represent the coordinates of the incident point of the light on the sensor s i , x pi , y pi , z pi represent the coordinates of the measurement point p i .

[0027] Preferably, in step S5, the adjusting device is composed of adjustable mirrors or refraction elements for changing the propagation direction of the water beam; at least two independently adjustable mirrors (M1, M2) are arranged on the propagation path of the water beam, and the mirrors are installed on a high-precision adjusting platform. The adjusting platform is driven by a motor to achieve precise angle adjustment; when a deviation angle of the water beam is detected, according to the calculated deviation angle value, the angle of the mirror is adjusted by controlling the rotation of the motor; the angle adjustment of the mirror follows the law of reflection, and by changing the incident angle and reflection angle of the light on the mirror, the propagation direction of the water beam is changed, so as to correct the deviation of the water beam.

[0028] Preferably, in step S8, the correction process needs to be completed in a short time to ensure the stability of the water beam during the processing; at the same time, the system continuously repeats the process of measurement - calculation - correction to respond to possible changes in the deviation of the water beam in real time, ensuring that the water beam always remains vertical.

[0029] Preferably, in step S5, the vector dot product formula is:

[0030]

[0031] In formula (2), α represents the deviation angle of the water beam in the x - z plane.

[0032] Preferably, in step S6, the function includes:

[0033] θ m1 = f(α) (3)

[0034] In formula (3), f represents a function determined according to the position of the mirror and the geometric relationship between the water beam and the mirror.

[0035] The beneficial effects of the present invention are:

[0036] 1. Precise measurement and correction accuracy: The present invention utilizes the principle of triangulation and reasonable layout to measure the deviation angle of the water beam with high precision, and the theoretical accuracy reaches the sub - degree level. Experimental verification shows that under various interferences, the measurement error does not exceed a specific value, providing reliable data for correction. Based on this and the adjusting device, the correction accuracy is also greatly improved, meeting the requirements of processing accuracy.

[0037] 2. Improve processing quality: The present invention can improve the dimensional accuracy by correcting the water beam, ensure the uniform distribution of laser energy in micro - machining, and reduce dimensional deviation. It can also improve the surface quality, reduce problems caused by uneven energy, reduce roughness, and reduce micro - defects.

[0038] 3. Improve processing efficiency; the real-time correction of the water beam in the present invention can reduce the processing failure rate, save materials, time, and energy. The processing process is more stable and efficient, which can shorten the processing time of a single workpiece and improve the equipment utilization rate.

[0039] 4. Stability and reliability; the measurement and correction system of the present invention has strong anti-interference ability and can work stably in a complex environment. During long-term processing, the system can automatically measure and correct to maintain the vertical state of the water beam, reducing the maintenance cost and downtime. Brief Description of the Drawings

[0040] Figure 1 It is a schematic structural diagram of the detection optical system of a water-guided laser optical method for water beam correction in the present invention.

[0041] In the figure, 1. Laser light source; 2. Collimator; 3. Water column; 4. Calibration plate; 5. Projection lens; 6. Detector and sensor. Detailed Embodiment

[0042] Next, the relevant technologies in the present invention will be clearly and completely described in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.

[0043] In this embodiment, by using the principle of triangulation and reasonably arranging measurement points and optical sensors around the water beam, the position information of the water beam in three-dimensional space can be accurately obtained, and then the deviation angle of the water beam relative to the ideal vertical direction can be calculated. The measurement method in this embodiment needs to have the characteristics of high precision and high sensitivity, and can work stably in a complex processing environment without being significantly affected by external interference factors (such as vibration, temperature change, electromagnetic field, etc. during the processing), so as to provide accurate data support for subsequent correction operations.

[0044] Based on the accurately measured deviation angle, in this embodiment, a regulating device capable of quickly and accurately adjusting the direction of the water beam is designed, so that it can automatically adjust according to the measured deviation angle and correct the water beam to the vertical direction. The correction process needs to have a fast response ability to reduce the processing error caused by the deviation of the water beam and improve the processing efficiency and quality. In addition, the automatic correction function should also have repeatability and stability to ensure that the water beam can always maintain the ideal vertical state during long-term processing, reducing the maintenance cost and the need for manual intervention.

[0045] The ultimate goal of this embodiment is to significantly improve the quality and efficiency of water-jet guided laser processing through precise correction of the water beam. In terms of processing accuracy, ensure that the dimensional accuracy and surface quality of the processed workpiece reach higher standards to meet the requirements of application fields with strict precision requirements (such as MEMS, biomedical engineering, etc.). In terms of processing efficiency, reduce the situations of processing failures or repeated processing caused by water beam deviation, shorten the processing cycle, and improve the utilization rate of the equipment. At the same time, by improving the processing quality and efficiency, reduce production costs, enhance the competitiveness of water-jet guided laser processing technology in the market, and promote its wide application in more fields.

[0046] The following details this embodiment. The present invention will be further described in detail in combination with specific embodiments of the schematic diagram of the principle structure of the new coupling optical path.

[0047] The system device for water-jet guided laser water beam correction in this embodiment mainly consists of an optical detection system, an adjustment device, and a control system. The following mainly describes the optical principle in detail, which is composed of a laser light source 1, a collimator 2, a water column 3, a calibration plate 4, a projection lens 5, a detector and a sensor 6, etc.

[0048] The light emitted by the light source passes through the collimator 2 and then irradiates on the water beam. The detector and sensor 6 receive the light signals reflected or scattered by the water beam and convert them into electrical signals and transmit them to the signal processing unit. The signal processing unit processes and analyzes the electrical signals, calculates the deviation angle of the water beam, and feeds it back to the control system. The controller receives the water beam deviation angle data transmitted by the optical detection system and generates a control signal according to the preset control algorithm. The motor of the adjustment device is controlled through the driver. The motor drives the slider to move on the guide rail through the lead screw, and a water beam nozzle is installed on the slider. By adjusting the position of the slider, the direction of the water beam can be changed, thereby realizing the correction of the water beam. The human-machine interface is used to display the status information of the water beam and the correction process, which is convenient for the operator to monitor and operate. This system is as Figure 1 shown:

[0049] The water-jet guided laser optical water beam correction method in this embodiment includes the following steps:

[0050] S1: Construction of triangular geometric relationships

[0051] At least three non-collinear measurement points (P1, P2, P3) are set around the water-jet guided laser water beam, and each measurement point is equipped with a corresponding optical sensor (S1, S2, S3). When the water beam passes through, due to the refractive index difference between the water beam and the surrounding medium (usually air), the phenomena of light refraction and reflection will occur at the measurement points. The optical sensor can detect these light changes and record the corresponding light signal information.

[0052] According to the principle of triangulation, by measuring the angular relationship of light between different measurement points and the distances between known measurement points, the geometric relationship of a triangle can be constructed. Assuming that the water beam can be regarded as a straight line, the light rays emitted from the water beam reach the sensor after refraction at the water beam - air interface. Using the law of refraction (Snell's law): n1sinθ1 = n2sinθ2 (where n1 and n2 are the refractive indices of water and air respectively, and θ1 and θ2 are the incident angle and the refraction angle), combined with geometric relationships such as the sine theorem and cosine theorem of a triangle, the position of the water beam in space can be calculated.

[0053] S2: Arrangement of measurement points and sensors

[0054] The arrangement of measurement points needs to consider the possible deviation range of the water beam and the measurement accuracy requirements. In the axial direction of the water beam, the measurement points should be distributed within the effective range where the water beam may deviate. For example, the measurement points start to be arranged at a certain distance from the outlet of the water beam generating device, and this distance is determined according to the stability and initial deviation of the water beam. In the plane perpendicular to the axial direction of the water beam, the measurement points are distributed in a triangular shape, and the size and shape of the triangle are designed according to factors such as the diameter of the water beam and the measurement accuracy.

[0055] The types of optical sensors can be selected as photodetectors, CCD image sensors, etc. The photodetector can detect the change in light intensity and determine the incident angle of the light ray by analyzing the light intensity distribution. The CCD image sensor can obtain more detailed light image information and determine the propagation direction of the light ray by processing the image (such as edge detection, spot center positioning, etc.). Different types of sensors can be selected or combined according to specific measurement requirements and costs.

[0056] S3: Establishment of three - dimensional space coordinates

[0057] To accurately calculate the deviation angle of the water beam, a three - dimensional space coordinate system is first established. Taking the center of the outlet of the water beam generating device as the origin, the ideal axial direction of the water beam as the z - axis (the positive direction is vertically upward), and any two mutually perpendicular directions in the plane perpendicular to the z - axis as the x - axis and y - axis.

[0058] S4: Ray tracing and coordinate calculation

[0059] According to the light ray information detected by the optical sensor at the measurement point, ray tracing is carried out using the law of refraction and geometric relationships. For the light ray emitted from the water beam and reaching the sensor, through the coordinates of the measurement point, the incident point coordinates of the light ray on the sensor, and the known relative position relationship between the measurement point and the sensor, the direction vector of the light ray in space can be calculated.

[0060] Assume that the incident point coordinates of the light ray on the sensor s i are (xi , y i , z i )(where z i can be calculated by measuring the distance between the measurement point and the sensor and the propagation direction of the light beam), the coordinates of the measurement point p i are (x pi , y pi , z pi ), then the direction vector of the light beam can be calculated by the following formula:

[0061]

[0062] By calculating the direction vectors of the light beam at multiple measurement points, the light propagation direction information of the water beam at different positions can be obtained.

[0063] S5: Deviation angle calculation

[0064] The deviation angle of the water beam in three-dimensional space can be determined by calculating the angle between the actual direction vector of the water beam and the ideal vertical direction vector (i.e., the z-axis direction vector ).

[0065] For the deviation angle α of the water beam in the x-z plane, the vector dot product formula can be used, where is the direction vector of the water beam in the x-z plane (obtained by synthesizing or averaging the direction vectors of the light beam at the measurement points in the x-z plane). Similarly, for the deviation angle β of the water beam in the y-z plane, it can also be calculated by a similar method.

[0066] The adjusting device mainly consists of adjustable mirrors or refracting elements for changing the propagation direction of the water beam. At least two independently adjustable mirrors are arranged on the propagation path of the water beam. The mirrors are installed on a high-precision adjusting platform, and the adjusting platform can be accurately adjusted in angle by driving with a motor.

[0067] When it is detected that the water beam has a deviation angle, according to the calculated deviation angle value, the angle of the mirror is adjusted by controlling the rotation of the motor. The angle adjustment of the mirror follows the law of reflection, and by changing the incident angle and reflection angle of the light beam on the mirror, the propagation direction of the water beam is changed, thereby realizing the correction of the deviation of the water beam.

[0068] S6: Adjusting control algorithm

[0069] The adjusting control algorithm determines the adjustment angle of the mirror according to the calculation result of the deviation angle. Assume that mirror M1 is used to correct the deviation of the water beam in the x-z plane, and mirror M2 is used to correct the deviation of the water beam in the y-z plane. For mirror M1, there is a certain functional relationship between its adjustment angle and the deviation angle of the water beam in the x-z plane.

[0070] According to geometric optics and the law of reflection, θ m1 = f(α) can be derived, where f is a function determined according to the position of the mirror and the geometric relationship between the water beam and the mirror. Similarly, for mirror M2, there is also a corresponding functional relationship θ m2 between its adjustment angle θ and the deviation angle β of the water beam in the y-z plane, that is, θ m1 = g(β).

[0071] In the actual control process, after calculating the deviation angles α and β, substitute them into the corresponding functions to obtain the adjustment angles of the mirrors, and then precisely adjust the angles of the mirrors through the motor control system to achieve the correction of the water beam.

[0072] S7: Signal processing and data transmission

[0073] The optical signals detected by the optical sensor are converted into digital signals after passing through signal processing circuits such as amplification and filtering. These digital signals are transmitted to the central processing unit (CPU) through data transmission lines (such as high-speed data lines, wireless communication modules, etc.). The CPU further processes and analyzes the received signals and calculates the deviation angle of the water beam according to the preset algorithm.

[0074] S8: Coordinated control of the correction process

[0075] After the CPU calculates the deviation angle, it sends a correction instruction to the motor control system of the adjustment device. The motor control system precisely controls the rotation of the motor adjusting the mirror according to the correction instruction to achieve the correction of the water beam. The whole process needs to be completed in a short time to ensure the stability of the water beam during the processing. At the same time, the system needs to continuously repeat the process of measurement - calculation - correction to respond to possible changes in the water beam deviation in real time and ensure that the water beam always remains vertical.

[0076] S9: Therefore, the entire water-light debugging process is completed and can be applied.

[0077] In traditional water-guided laser application scenarios, there are obvious deficiencies in its calibration method. Especially when performing high-precision hole-making tasks, the processing of holes can only be carried out by relying on the vertical direction of the water line itself. Due to the lack of effective calibration means, when the state of the water line fluctuates or changes, the state of hole-making will change accordingly. For example, a slight deviation in the angle of the water line may cause a deviation in the direction of hole-making, no longer meeting the preset standard requirements; and the instability of the flow rate or pressure of the water line will lead to a significant reduction in the uniformity of the holes, resulting in problems such as different hole diameters and increased roughness of the hole walls, seriously affecting the quality and precision of hole-making, making it difficult to guarantee the yield rate of the final product, especially prominent in mass production, causing a large amount of resource waste and cost increase.

[0078] In sharp contrast, the water beam correction method using the water-guided laser optical method in innovative applications nowadays demonstrates excellent performance advantages. First of all, regarding the visualization problem that has been plaguing the industry during the water-guided laser water line calibration process, this method provides a practical solution. By adopting advanced optical monitoring technology and image processing algorithms, the state of the water line that was originally difficult to directly observe and accurately control can be clearly presented in front of the operator. Whether it is the starting position, extension direction of the water line, or its morphological changes at different processing stages, real-time visual monitoring can be achieved, just like giving the operator a pair of "perspective eyes", enabling them to precisely observe every detail of the water line, thus providing accurate and reliable basis for subsequent calibration operations.

[0079] Secondly, a major breakthrough and simplification have been achieved in the debugging process. In the past, the water line calibration operation in a complex three-dimensional space coordinate system often required the operator to have profound professional knowledge and rich practical experience, and the operation process was extremely vulnerable to human factors. A slight mistake might lead to serious problems. However, the new correction method cleverly transforms the three-dimensional space coordinate system into a two-dimensional coordinate system state, greatly reducing the complexity and difficulty of the operation. The operator only needs to make simple parameter adjustments and calibrations on the two-dimensional plane to achieve precise control of the water line. At the same time, a fully optical system structure is used for real-time precise adjustment, which not only reduces the errors and uncertainties caused by manual operation, but also continuously monitors and adjusts the water line state during the entire processing process to ensure that the water line always maintains the best working state, effectively avoiding serious problems caused by unfamiliar operation or human negligence, and strongly guaranteeing the consistency and stability of the water line state, so that the holes processed in different batches and at different times can maintain a high degree of consistency in quality and accuracy.

[0080] Thirdly, from the perspective of hole-making quality, this water beam correction method plays a crucial role. In terms of the angle direction, through precise optical calibration and real-time adjustment mechanisms, it can ensure that the angle of hole-making strictly meets the design requirements, with the deviation controlled within an extremely small range, effectively avoiding the problem of hole angle inclination caused by water line deviation. In terms of roundness, by precisely controlling the uniformity of the water line and optimizing the processing technology parameters, the dimensions of the processed holes on the circumference are more uniform, greatly improving the roundness accuracy of the holes. For the hole morphology, the new method can effectively suppress defects such as increased hole wall roughness and burrs at the hole edge caused by unstable water lines, making the overall morphology of the holes smoother and more regular. Through the above multi-faceted quality improvement, the qualified rate of single-piece products has increased by more than 3 times compared with the traditional method. In mass production, the qualified rate of products has also increased by more than 2 times, which is of great significance for improving production efficiency, reducing production costs, and enhancing the market competitiveness of enterprises, laying a solid foundation for the wide application of water-guided laser in the field of high-precision hole-making.

[0081] In summary, by using the triangulation principle and reasonable layout, the present invention can measure the deviation angle of the water beam with high precision, and the theoretical precision reaches the sub-degree level. Under various interferences, the measurement error of the present invention is small, providing reliable data for correction; therefore, the correction precision of the present invention is high and can meet the processing precision requirements.

[0082] It should be emphasized that the above are only the preferred embodiments of the present invention, and there is no any form of limitation to the present invention. Any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. A water-guided laser optical water beam correction method, characterized in that: The following steps are involved: Step S1, constructing triangle geometric relationships; At least three non-collinear measuring points are set around the water-guided laser water beam, and each measuring point is equipped with a corresponding optical sensor; when the water beam passes through, the optical sensor detects the changes in the refraction and reflection of the light, and records the corresponding light signal information; by measuring the angular relationship between the light at different measuring points and the distance between the known measuring points, a triangular geometric relationship is constructed to calculate the position of the water beam in space; Step S2, arrangement of measuring points and sensors; In the axial direction of the water beam, the measuring points are distributed within the effective range where the water beam may deviate; in the plane perpendicular to the axial direction of the water beam, the measuring points are distributed in a triangular shape, and the incident angle of the light is determined by analyzing the distribution of light intensity through an optical sensor, and the propagation direction of the light is determined by processing the image; Step S3, establishing three-dimensional space coordinates; Taking the outlet center of the water jet generating device as the origin, the ideal axial direction of the water jet as the z-axis, and selecting any two mutually perpendicular directions in a plane perpendicular to the z-axis as the x-axis and the y-axis to establish a three-dimensional space coordinate system; Step S4, design of control system; Ray tracing is performed based on the light information detected by the optical sensor at the measuring point. For the light emitted from the water beam and reaching the sensor, the direction vector of the light in space is calculated through the coordinates of the measuring point, the coordinates of the incident point of the light on the sensor, and the known relative position relationship between the measuring point and the sensor. By calculating the direction vectors of the light at multiple measuring points, the light propagation direction information of the water beam at different positions is obtained. Step S5, deviation angle calculation; The deviation angle of the water beam in three-dimensional space is determined by calculating the angle between the actual direction vector of the water beam and the ideal vertical direction vector; the deviation angle α of the water beam in the xz plane is determined by the vector dot product formula; the deviation angle β of the water beam in the yz plane is determined by the vector dot product formula; Step S6, adjusting the control algorithm; The adjustment angle of the reflector is determined according to the calculation result of the deviation angle; after the deviation angles α and β are calculated, they are substituted into the function to obtain the adjustment angle of the reflector, and then the angle of the reflector is accurately adjusted through the motor control system to achieve the correction of the water beam; Step S7: signal processing and data transmission; The light signal detected by the optical sensor is converted into a digital signal after being processed by signal processing circuits such as amplification and filtering; the digital signal is transmitted to the central processing unit CPU through a data transmission line; the central processing unit CPU further processes and analyzes the received signal and calculates the deviation angle of the water beam; Step S8, coordinated control of the correction process; After the central processing unit CPU calculates the deviation angle, it sends a correction instruction to the motor control system of the adjustment device; the motor control system accurately controls the rotation of the motor of the adjustment mirror according to the correction instruction to achieve the correction of the water beam; Step S9: The water-laser debugging process is completed and water-guided laser processing is performed.

2. The water beam correction method of water-guided laser optics according to claim 1, characterized in that: In step S4, the direction vector of the light Calculated by the following formula: In formula (1), x i ,y i 、z i Indicates the light at the sensor s i The coordinates of the incident point on pi ,y pi 、z pi Indicates the measurement point p i The coordinates of .

3. The water beam correction method of water-guided laser optics according to claim 1, characterized in that: In step S5, the adjustment device is composed of an adjustable reflector or a refractive element, which is used to change the propagation direction of the water beam; at least two independently adjustable reflectors are arranged on the propagation path of the water beam, and the reflectors are mounted on a high-precision adjustment platform, and the adjustment platform is driven by a motor to achieve precise angle adjustment; when a deviation angle of the water beam is detected, the angle of the reflector is adjusted by controlling the rotation of the motor according to the calculated deviation angle value; the angle adjustment of the reflector follows the law of reflection, and the propagation direction of the water beam is changed by changing the incident angle and reflection angle of the light on the reflector, thereby achieving correction of the water beam deviation.

4. The water beam correction method of water-guided laser optics according to claim 1, characterized in that: In step S8, the correction process needs to be completed in a short time to ensure the stability of the water beam during the processing; at the same time, the system continuously repeats the measurement-calculation-correction process to respond to possible changes in water beam deviation in real time to ensure that the water beam always remains vertical.

5. The water beam correction method of water-guided laser optics according to claim 1, characterized in that: In step S5, the vector dot product formula is: In formula (2), α represents the deviation angle of the water jet in the xz plane.

6. The water beam correction method of water-guided laser optics according to claim 1, characterized in that: In step S6, the function includes: i m1 =f(a) (3) In formula (3), f represents a function determined according to the position of the reflector and the geometric relationship between the water beam and the reflector.

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