Roll-to-roll CVD (Chemical Vapor Deposition) production equipment and process

Abstract

The invention discloses reel-to-reel CVD (Chemical Vapor Deposition) production equipment and a reel-to-reel CVD production process, and relates to the technical field of chemical vapor deposition. The reel-to-reel CVD production equipment is provided with an unwinding area, a pretreatment area, a growth area, a cooling area and a winding area which are hermetically communicated in sequence; the pretreatment area and the growth area are communicated through a pretreatment growth cavity penetrating from the front end of the pretreatment area to the rear end of the growth area; a heating unit is arranged around the pretreatment growth cavity, and a heat insulation layer is arranged on the periphery of the heating unit; the front end of the pretreatment area is communicated with an air inlet structure, and the rear end of the growth area is communicated with an exhaust structure. The cloth is kept in a uniform and stable moving state in a gas flow field in the forming process of the carbon series conducting layer, the pretreatment area, the growth area and the cooling area are reasonably arranged on the moving path of the cloth, the cloth directly moves into the growth area after an infiltrating material is removed in the pretreatment area, damage to the cloth cover caused by secondary winding and unwinding is avoided, and the production efficiency is improved. And meanwhile, the deposition and growth speed of the carbon-series conductive layer in the growth region is further increased by preheating in the pretreatment region.

Description

Technical Field

[0001] The present invention relates to the technical field of chemical vapor deposition, and particularly to an apparatus and process for preparing a carbon-based conductive layer using chemical vapor deposition (CVD). Background Art

[0002] High-temperature deposition of graphene on the surface of cloth by CVD is a common method for preparing graphene layers, usually statically grown in a tube furnace. However, due to the gradual loss of the carbon source during gas flow while the cloth is static, the deposition growth rate of the graphene layer at each position of the cloth inside the tube furnace gradually decreases along the gas flow direction, resulting in poor surface uniformity of the product.

[0003] The prior art uses a roll-to-roll growth process to solve the above problems. Patent CN104988471A discloses a rapid-cooling roll-to-roll plasma-enhanced CVD continuous growth furnace. This technical solution uses a roll-to-roll vacuum dynamic growth method, but limited by the inner diameter of the quartz tube, it is only applicable to small-width cloth and has a low growth efficiency of the graphene layer. Patent CN 118910593 A proposes a CVD method and system that uses a combination of static and dynamic methods to prepare a graphene layer. However, since the unwinding substrate does not go through a static growth process, only samples smaller than the length of the growth area can be prepared at intervals, continuous production cannot be achieved, and the substrate loss is large. At the same time, the conductivity detection of the conductive cloth prepared by the above processes all requires taking out the material after the equipment cools down, and the detection lag is serious, which cannot guarantee the product batch quality in time and has a high rejection rate. In addition, during the spinning and weaving process of the cloth, an infiltration material is used, and before depositing and growing the graphene layer at high temperature, it is necessary to first perform cleaning or calcination treatment to remove the infiltration material. Therefore, the cloth needs at least two winding and unwinding processes, the preparation cycle is long, and for the cloth with the infiltration material removed, the binding force between the fiber bundles is reduced, and it is easily damaged by external forces. Summary of the Invention

[0004] The present invention precisely aims to avoid the deficiencies of the above prior art and provides a roll-to-roll CVD production apparatus and process.

[0005] The present invention adopts the following technical solutions to solve the technical problems: A roll-to-roll CVD production apparatus includes two winding and unwinding zones for winding, unwinding the cloth and driving the cloth to move from the unwinding position to the winding position, and also has a cooling zone and two processing and growth zones; The two processing and growth zones are hermetically connected. The former is used as a pretreatment zone, and the latter is used as a growth zone; the cooling zone is hermetically connected and arranged at the rear end of the growth zone; in the two winding and unwinding zones, the former is used as an unwinding zone and is hermetically connected and arranged at the front end of the pretreatment zone, and the latter is used as a winding zone and is hermetically connected and arranged at the rear end of the cooling zone; During actual installation, the unwinding area, the pretreatment area, the growth area, the cooling area, and the winding area are preferably connected through flanges and fastening screws, and heat insulation materials and sealing rubber rings are preferably provided at the connection points. The pretreatment area and the growth area are connected through a pretreatment growth cavity that penetrates from the front end of the pretreatment area to the rear end of the growth area, and a cooling channel is provided to penetrate from the front end to the rear end in the cooling area. Circulating water cooling mechanisms are provided around the pretreatment growth cavity at the front and rear end faces of the treatment growth area. Prevent the structural high-temperature deformation at the connection between the treatment growth area and the unwinding area or the cooling area, which may affect the sealing performance. A cooling mechanism is provided around the cooling channel in the cooling area. The front end of the cloth is tensioned and wound into a roll in the unwinding area, the middle part is tensioned and passes through the pretreatment growth cavity and the cooling channel, and the rear end is tensioned and wound into a roll in the winding area. Support rollers for supporting the cloth can be rotatably installed at the bottom of the pretreatment growth cavity according to actual needs. The support rollers are preferably arranged at the junction of the pretreatment area and the growth area, and the rotating shafts of the support rollers are preferably horizontal axes perpendicular to the movement direction of the cloth.

[0006] Heating units are provided around the pretreatment growth cavity in the treatment growth area, and a heat insulation layer is provided outside the heating units. An air inlet structure is connected to the front end of the pretreatment area, and an exhaust structure is connected to the rear end of the growth area.

[0007] Furthermore, the air inlet structure includes a premixing tank, multiple air inlets, flow control valves, and multiple air inlet channels. Each of the air inlets is connected in parallel to the inlet of the premixing tank, each of the inlets of the air inlet channels is connected in parallel to the outlet of the premixing tank, and a flow control valve is provided between the outlet of the premixing tank and the inlets of the air inlet channels. The outlets of each of the air inlet channels are evenly connected to the top and bottom of the front end of the pretreatment growth cavity. The exhaust structure includes an exhaust pipe and a pressure maintaining valve. The pressure maintaining valve is connected to the exhaust pipe. The inlet of the exhaust pipe is connected to the bottom of the rear end of the pretreatment growth cavity, and the outlet is emptied.

[0008] The pressure maintaining valve can adjust and maintain the pressure in the pretreatment growth cavity while exhausting, providing a stable growth environment for the growth of the carbon-based conductive layer and improving the uniformity of the growth of the carbon-based conductive layer.

[0009] Furthermore, a liquid inlet structure is provided, and the liquid inlet structure includes a peristaltic pump and multiple liquid inlet channels. The inlets of the liquid inlet channels are connected in parallel to the outlet of the peristaltic pump, and the outlets of the liquid inlet channels are connected to the top of the pretreatment growth chamber in the middle of the pretreatment area.

[0010] To ensure that the temperature at the liquid inlet of the liquid inlet channel is high enough to instantaneously vaporize the liquid into vaporized liquid, and at the same time, it should also be ensured that the vaporized liquid has a sufficiently long flow area before entering the growth area, so that the vaporized liquid is mixed evenly with the mixed gas before entering the growth area; In actual setting, each of the air inlet channels is preferably arranged vertically, and each of the liquid inlet channels is preferably arranged uniformly in a vertical plane, and this plane is parallel to the plane where each of the air inlet channels is located.

[0011] Furthermore, the air inlet channel is arranged vertically at the front end face of the pretreatment area, and a plurality of partition plates are densely arranged inside it from top to bottom, and ventilation openings are staggered on adjacent partition plates; The staggered ventilation openings cause the mixed gas to flow turbulently in the air inlet channel to be mixed evenly; A stirring paddle connected to an external driving device is provided below each of the liquid inlet channels in the pretreatment growth chamber; To further improve the mixing uniformity of the mixed gas and to promote the uniform mixing of the vaporized liquid and the mixed gas; The inner wall of the pretreatment growth chamber is covered with a graphite plate.

[0012] To improve the heat transfer efficiency and the uniformity of temperature transfer, and to ensure the uniformity of the deposition of the carbon-based conductive layer.

[0013] It also includes baffles provided at the connection between the unwinding area and the pretreatment area and at the connection between the growth area and the cooling area; The baffle is located in the unwinding area and the cooling area, and is a pair of plate-like structures that are symmetric up and down, and is arranged to shield the opening at the connection between the unwinding area and the pretreatment area or to shield the opening at the connection between the growth area and the cooling area; it serves the functions of isolating gas and heat insulation; The cloth passes through the gap between a pair of baffles, and a cylindrical tube body is fixedly connected to the end of the baffle facing the cloth.

[0014] The tube body can effectively prevent the baffle from damaging the cloth. The tube body is preferably a high-temperature resistant quartz glass tube, which can maintain a high surface smoothness when in contact with the cloth for a long time and will not cause rust problems.

[0015] Furthermore, it also includes electrode guide rollers. One or more electrode guide rollers electrically connected between the positive and negative poles of the resistance detection mechanism are also provided in the winding area; The electrode guide rollers are arranged covering the width direction of the cloth, or each of the electrode guide rollers jointly covers the width direction of the cloth.

[0016] The electrode guide roller is used to cooperate with the resistance detection mechanism to detect the electrical conductivity of the fabric. In actual setting, the electrode guide roller can be a copper roller or a silver-plated roller that extends across the width of the fabric, used to detect the electrical conductivity of the entire width area of the fabric at the position where the electrode guide roller is located, or can be multiple electrode guide rollers with collinear or offset axes. Each electrode guide roller is used to detect the electrical conductivity of the fabric at its own position and within the corresponding width; considering the flatness of the fabric, when multiple electrode guide rollers are provided, they are preferably arranged collinearly.

[0017] Furthermore, the heating unit is a plurality of heating blocks that are uniformly and densely arranged around the pretreatment growth chamber along the length direction of the pretreatment growth chamber. The heating blocks are equipped with temperature controllers to control the heating temperature; It further includes multiple groups of temperature sensors. The measuring ends of each group of temperature sensors are all located inside the pretreatment growth chamber and are arranged along the length direction of the pretreatment growth chamber; the measuring ends of each group of temperature sensors are arranged around the pretreatment growth chamber in the same cross-section of the pretreatment growth chamber; A pressure sensor with its measuring end located inside the pretreatment growth chamber is also provided.

[0018] Furthermore, a winding and unwinding shaft, explosion-proof lamps, rubber rollers and guide rollers are provided in the winding and unwinding area, and an air inlet communicating with the washing gas valve control is opened in the winding and unwinding area; Each of the explosion-proof lamps is uniformly arranged in the winding and unwinding area; The winding and unwinding shafts connected with drive devices are respectively installed at the front and rear ends of the unwinding area and the winding area, and at least one guide roller is rotatably installed in front of or behind the winding and unwinding shafts respectively. A rubber roller is rotatably installed above the last guide roller in the unwinding area and the frontmost guide roller in the winding area; The fabric is tensioned and wound around the guide roller and is pressed between the rubber roller and the corresponding guide roller. The linear velocities of the three are kept consistent; In actual setting, the number and position of the guide rollers should be set according to the tensioning and traction requirements of the fabric, and at the same time, the situation where the turning angle of the fabric is too large during movement should be avoided; In addition, to ensure that the linear velocities of the rubber roller, the guide roller and the fabric are consistent, the pressure of the rubber roller on the fabric should be appropriately adjusted.

[0019] Furthermore, a linear velocity sensor, a deviation correction sensor and a tension sensor are also provided in the winding and unwinding area; The linear velocity sensor and the tension sensor are installed at the rotating shaft of any one of the guide rollers, and are respectively used to measure the rotation speed of the guide roller to obtain the linear velocity of the cloth; and to measure the pressure received by the guide roller to obtain the tension on the surface of the cloth and confirm the tension degree of the cloth. The detection end of the deviation correction sensor faces the cloth and is used to measure the positions of both side edges of the cloth. When the cloth deviates, the rewinding and unwinding motor is used to adjust the rewinding and unwinding positions of the rewinding and unwinding shafts to center the cloth.

[0020] A roll-to-roll CVD production process uses the above roll-to-roll CVD production equipment to prepare a carbon-based conductive layer on the surface of the cloth, and is characterized by including the following steps: First step, open the closed doors opened in the unwinding area and the winding area, install the cloth between the unwinding area and the winding area, adjust the cloth surface to be flat, and then close the closed doors to form a sealed environment in the two rewinding and unwinding areas, the two processing and growth areas, and the cooling area; Second step, open the air inlets of the two rewinding and unwinding areas and adjust the pressure maintaining valve to the free ventilation state. Introduce at least one inert gas such as nitrogen or argon into the two rewinding and unwinding areas, flush the cavity for 10 - 60 minutes with a ventilation flow rate of 5000 - 20000 sccm, and then continuously ventilate with a ventilation flow rate of 100 - 500 sccm. Adjust the control pressure of the pressure maintaining valve to a positive pressure of 0 - 10 KPa to maintain the relative positive pressure state of the rewinding and unwinding areas; Third step, start the circulating water cooling mechanism and the cooling mechanism; Divide the two processing and growth areas by at least two planes perpendicular to the moving direction of the cloth, and at least divide the multiple heating blocks in the pretreatment area and the growth area into two groups respectively. Each group of heating blocks shares one temperature controller; Set the heating target temperatures of at least two temperature controllers corresponding to the pretreatment area to 300 - 800 °C, and the heating target temperatures of the respective temperature controllers corresponding to the pretreatment area increase gradually from front to back; Set the heating target temperatures of at least two temperature controllers corresponding to the growth area to 500 - 1150 °C. The heating target temperatures of the respective temperature controllers corresponding to the growth area first increase and then decrease from front to back, and the heating target temperature of the foremost temperature controller is higher than the heating target temperature of the last temperature controller corresponding to the pretreatment area; Each heating block heats up to form a temperature gradient field with temperature rising from the front to the middle and decreasing at the back in the pretreatment and growth cavity; Fourth step, observe the readings of each temperature sensor to confirm that the heating unit is working properly; In the fifth step, obtain the average value T of the readings of each temperature sensor in a plane at the mid-position in the length direction of each heating block, and compare T with the corresponding target temperature. If the difference between the two is less than the preset allowable temperature difference, proceed to the sixth step; Otherwise, adjust the heating power of this group of heating blocks up or down through the corresponding temperature controller until the difference between T and the corresponding target temperature is less than the preset allowable difference, and then proceed to the sixth step; In the sixth step, introduce the mixed gas into the front end of the pretreatment growth chamber via the intake structure, or introduce the mixed gas and liquid into the front end and the middle of the pretreatment growth chamber via the intake structure and the liquid inlet structure respectively. The liquid is instantly vaporized into vaporized liquid after entering the pretreatment growth chamber; With the diffusion of the gas flow field direction, the mixed gas or the mixed gas and the vaporized liquid fully and evenly wrap the surface of the cloth, forming a uniformly distributed gas concentration field in the pretreatment growth chamber, and cracking to form active components in the area above the cracking temperature. The excess uncracked mixed gas or the mixed gas and the vaporized liquid, active components or other substances are discharged with the gas via the exhaust structure; Among them, the flow rate of the mixed gas is 500 - 3000 sccm of methane and / or 100 - 1000 sccm of acetylene, 50 - 200 sccm of hydrogen, and 100 - 2000 sccm of argon, The liquid is a low-carbon molecular solvent containing carbon, and the liquid flow rate is 0.1 - 20 mL / min; In the seventh step, after the mixed gas or the mixed gas and the liquid are introduced into the gas mixing channel for 10 - 60 minutes, the winding area starts to wind at a linear speed of 10 - 1000 mm / min, and the unwinding area unwinds accordingly, so that the cloth moves uniformly from the unwinding area to the winding area; In the eighth step, when the cloth is in the pretreatment area, the resin in the cloth continuously cracks, and amorphous carbon is formed on the surface of the cloth; When the cloth moves to the growth area, the active components obtained by the high-temperature cracking of the mixed gas or the mixed gas and the vaporized liquid rapidly nucleate and grow on the cloth to form a carbon-based conductive layer. The staff observes the appearance quality of the deposition growth of the carbon-based conductive layer on the surface of the cloth through the observation window opened by the roll-to-roll CVD production equipment; When the cloth moves to the cooling area, it is cooled in the cooling channel under the action of the cooling mechanism; When the cloth moves to the winding area, the deposition growth quality of the carbon-based conductive layer is detected in real time by the cooperation of the electrode guide roller and the resistance detection mechanism, and then wound; When the quality inspection data deviates from the standard data, the process parameters such as the moving speed of the cloth, the flow rate of the mixed gas or the mixed gas and the vaporized liquid should also be adjusted accordingly according to the guidance of the production manual to calibrate the deposition growth quality of the carbon-based conductive layer; In the ninth step, the intake structure stops admitting gas, or the intake structure and the liquid intake structure stop admitting gas and liquid. Each temperature controller controls each heating block to cool down at a set rate until it is turned off. After the temperature inside the roll-to-roll CVD production equipment drops to room temperature, stop introducing inert gas into the two unwind and rewind zones, turn off the circulating water cooling mechanism and the cooling mechanism, and open the closing door to take out the finished conductive cloth product.

[0021] After stopping admitting gas or stopping admitting gas and liquid, before the temperature inside the roll-to-roll CVD production equipment drops to room temperature, the remaining mixed gas or the mixed gas and the vaporized liquid in the pretreatment growth chamber will still continue to crack, and the active components will still deposit and grow on the cloth. However, the carbon-based conductive layer formed during this process does not meet the production requirements and should be removed after winding.

[0022] The present invention provides a roll-to-roll CVD production equipment and process, which has the following beneficial effects: 1. The present invention is provided with an unwind zone and a rewind zone, so that the cloth moves in a state of maintaining a uniform and stable gas flow field during the formation process of the carbon-based conductive layer, improving the uniformity of the carbon-based conductive layer. At the same time, a pretreatment zone, a growth zone and a cooling zone are reasonably arranged on the moving path of the cloth to form a temperature gradient field. After the wetting material is removed in the pretreatment zone, the cloth directly moves into the growth zone, avoiding the damage to the cloth surface caused by secondary unwinding and rewinding. At the same time, the preheating in the pretreatment zone is used to further improve the deposition and growth speed of the carbon-based conductive layer in the growth zone, realizing the uniform and efficient deposition and growth of the carbon-based conductive layer on the cloth surface.

[0023] 2. The intake structure of the present invention is uniformly connected to the front end of the pretreatment growth chamber, and the uniform intake of the mixed gas is realized in cooperation with the partition structure with multiple ventilation openings arranged in a staggered manner. The exhaust structure is connected to the rear end of the pretreatment growth chamber to exhaust gas in time, avoiding the problem of high-temperature cracking substances migrating to the cooling area for deposition. The exhaust structure also adjusts and maintains the pressure in the pretreatment growth chamber, providing a stable growth environment for the growth of the carbon-based conductive layer and further improving the uniformity of the growth of the carbon-based conductive layer.

[0024] 3. The liquid intake structure of the present invention provides a liquid carbon source that can be decomposed under relatively low temperature conditions for the deposition and growth of the carbon-based conductive layer, reducing the reaction temperature requirement. After the liquid carbon source cracks, it can provide a more uniform carbon atom distribution, which is beneficial to the formation of a continuous and less defective carbon-based conductive layer. At the same time, the diffusion and adsorption process of the liquid carbon source on the substrate surface is easier to control, which is beneficial to the improvement of the uniformity of the carbon-based conductive layer.

[0025] 4. The heating unit of the present invention is set as a plurality of heating blocks evenly distributed around the pretreatment growth chamber and densely arranged. By controlling the output power of each heating block and the graphite plate covered in the pretreatment growth chamber, the consistency of the temperature in the cross-section of the pretreatment growth chamber and the uniformity and stability of the temperature field in the radial direction of the pretreatment growth chamber are ensured, thereby ensuring the uniform and efficient deposition and growth of the carbon-based conductive layer.

[0026] 5. The electrode guide roller of the present invention is used to cooperate with the resistance detection mechanism to conduct quality inspection on the conductivity of the fabric before fabric winding, so as to confirm the quality of the carbon-based conductive layer in real time and improve the product quality stability.

[0027] 6. Before starting the growth and deposition of the carbon-based conductive layer during the winding and unwinding of the fabric, the present invention first introduces a mixed gas or a mixed gas and a vaporized liquid into the pretreatment growth chamber, pre-prepares sufficient active components in the growth area, increases the content and concentration of the active components in the pretreatment growth chamber, and improves the uniformity of the distribution of the active components; during the growth and deposition of the carbon-based conductive layer, the quantitative introduction of the mixed gas or the mixed gas and the vaporized liquid is maintained to achieve the balance between the feeding amount and the consumption amount, maintain the content and concentration of the active components in the pretreatment growth chamber, ensure that the fabric has a stable growth rate of the carbon-based conductive layer when migrating to the growth area, and has the same growth environment when migrating out of the growth area, and continuously and stably prepare the conductive glass fiber fabric. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 is the front sectional structure schematic diagram of the present invention; Figure 2 is the front sectional structure schematic diagram of the unwinding area of the present invention; Figure 3 is the front sectional structure schematic diagram of the pretreatment area of the present invention; Figure 4 is the left view structure schematic diagram at the front end face of the pretreatment area of the present invention; Figure 5 is the left sectional structure schematic diagram at the middle part of the treatment growth area of the present invention; Figure 6 is the front sectional structure schematic diagram of the growth area of the present invention; Figure 7 is the front sectional structure schematic diagram of the cooling area and the winding area of the present invention.

[0029] In the figure: 1. Unwinding and Rewinding Area, 1.1 Unwinding and Rewinding Shaft, 1.2 Explosion-proof Lamp, 1.3 Rubber Roll, 1.4 Guide Roll, 1.5 Air Inlet, 1.6 Gas Scrubbing Valve Control, 1a Unwinding Area, 1b Rewinding Area; 1b.1 Electrode Guide Roll; 2. Processing and Growth Area, 2.1 Pretreatment Growth Chamber, 2.2 Heating Unit, 2.3 Heat Insulation Layer, 2.4 Support Roll, 2.5 Circulating Water Cooling Mechanism, 2a Pretreatment Area, 2a.1 Air Intake Structure, 2a.11 Premixing Tank, 2a.12 Air Inlet, 2a.13 Flow Control Valve, 2a.14 Air Intake Channel, 2a.2 Liquid Intake Structure, 2a.21 Peristaltic Pump, 2a.22 Liquid Intake Channel; 2b Growth Area, 2b.1 Exhaust Structure, 2b.11 Exhaust Pipe, 2b.12 Pressure-maintaining Valve; 3. Cooling Area, 3.1 Cooling Channel, 3.2 Cooling Mechanism; 4. Cloth; 5. Baffle Plate. Detailed Implementation Manner

[0030] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention. Apparently, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without making creative efforts shall fall within the protection scope of the present invention.

[0031] A roll-to-roll CVD production device, as Figures 1 to 7 shown, its structural relationship is: including an unwinding area 1a, a pretreatment area 2a, a growth area 2b, a cooling area 3, and a rewinding area 1b that are hermetically connected in sequence from front to back. The unwinding area 1a, the pretreatment area 2a, the growth area 2b, the cooling area 3, and the rewinding area 1b are connected through flanges and fastening screws, and heat insulation materials and sealing rubber rings are provided at the connection points; The pretreatment area 2a and the growth area 2b are connected through a pretreatment growth chamber 2.1 that penetrates from the front end of the pretreatment area 2a to the back end of the growth area 2b. The inner wall of the pretreatment growth chamber 2.1 is covered with a graphite plate to improve the heat transfer efficiency and the uniformity of temperature transfer, and ensure the uniformity of the deposition of the carbon-based conductive layer.

[0032] A cooling channel 3.1 is provided in the cooling area 3 that penetrates from the front end to the back end; circulating water cooling mechanisms 2.5 are provided around the pretreatment growth chamber 2.1 at the front and back end faces of the pretreatment area 2a and the growth area 2b to prevent the structural high-temperature deformation at the connection between the processing and growth area 2 and the unwinding area 1a or the cooling area 3, which affects the sealing performance; The front end of the cloth 4 is tensioned and wound into a roll in the unwinding area 1a, the middle part is tensioned and passes through the pretreatment growth chamber 2.1 and the cooling channel 3.1, and the back end is tensioned and wound into a roll in the rewinding area 1b. The unwinding area 1a and the rewinding area 1b drive the cloth 4 to move from the unwinding position to the rewinding position; At the bottom inside the pre-treatment growth chamber 2.1, a support roller 2.4 for supporting the cloth 4 can be rotatably installed at the junction of the pre-treatment area 2a and the growth area 2b according to actual needs. The rotation axis of the support roller 2.4 is preferably a horizontal axis perpendicular to the movement direction of the cloth 4.

[0033] A heating unit 2.2 is arranged around the pre-treatment growth chamber 2.1 in the growth area 2, and a heat insulation layer 2.3 is arranged outside the heating unit 2.2; the heating unit 2.2 is a plurality of heating blocks densely arranged evenly around the pre-treatment growth chamber 2.1 along the length direction of the pre-treatment growth chamber 2.1, and each heating block is equipped with a temperature controller to control the heating temperature; It further includes multiple groups of temperature sensors. The measuring ends of each group of temperature sensors are all located inside the pre-treatment growth chamber 2.1 and are arranged along the length direction of the pre-treatment growth chamber 2.1; the measuring ends of each group of temperature sensors are arranged around the pre-treatment growth chamber 2.1 in the same cross-section of the pre-treatment growth chamber 2.1; An air inlet structure 2a.1 is communicatedly arranged at the front end of the pre-treatment area 2a, and an exhaust structure 2b.1 is communicatedly arranged at the rear end of the growth area 2b; The air inlet structure 2a.1 includes a premixing tank 2a.11, a plurality of air inlets 2a.12, a flow control valve 2a.13 and a plurality of air inlet channels 2a.14; Each air inlet 2a.12 is connected in parallel to the inlet of the premixing tank 2a.11. Each air inlet channel 2a.14 is arranged vertically at the front end face of the pre-treatment area 2a. A plurality of partition plates are densely arranged inside it from top to bottom, and ventilation openings are staggeredly arranged on adjacent partition plates; the staggeredly arranged ventilation openings enable the mixed gas to flow turbulently in the air inlet channel 2a.14 to be mixed evenly; the inlets of each air inlet channel 2a.14 are connected in parallel to the outlet of the premixing tank 2a.11, and a flow control valve 2a.13 is arranged in communication between the outlet of the premixing tank 2a.11 and the inlets of each air inlet channel 2a.14; The outlets of each air inlet channel 2a.14 are uniformly communicated to the top and bottom of the front end of the pre-treatment growth chamber 2.1; The exhaust structure 2b.1 includes an exhaust pipe 2b.11 and a pressure maintaining valve 2b.12; The pressure maintaining valve 2b.12 is communicatively arranged on the exhaust pipe 2b.11. The inlet of the exhaust pipe 2b.11 is communicated to the bottom of the rear end of the pre-treatment growth chamber 2.1, and the outlet is emptied; the pressure maintaining valve 2b.12 can adjust and maintain the pressure inside the pre-treatment growth chamber 2.1 while exhausting, providing a stable growth environment for the growth of the carbon-based conductive layer and improving the uniformity of the growth of the carbon-based conductive layer.

[0034] A liquid inlet structure 2a.2 is also provided. The liquid inlet structure 2a.2 includes a peristaltic pump 2a.21 and a plurality of liquid inlet channels 2a.22; Each liquid inlet channel 2a.22 is arranged in a vertically coplanar and evenly distributed manner, and this plane is parallel to the plane where each gas inlet channel 2a.14 is located; the inlets of each liquid inlet channel 2a.22 are connected in parallel to the outlet of the peristaltic pump 2a.21, and the outlets of each liquid inlet channel 2a.22 are connected to the top of the pretreatment growth chamber 2.1 in the middle of the pretreatment area 2a, so as to ensure that the temperature at the liquid inlet of the liquid inlet channel 2a.22 is high enough to instantly vaporize the liquid into vaporized liquid. At the same time, it should also ensure that the vaporized liquid has a long enough flow area before entering the growth area 2b, so that the vaporized liquid is mixed evenly with the mixed gas before entering the growth area 2b; In the pretreatment growth chamber 2.1, a stirring paddle connected to an external driving device is provided below each liquid inlet channel 2a.22 to further improve the mixing uniformity of the mixed gas and promote the uniform mixing of the vaporized liquid and the mixed gas.

[0035] In the winding and unwinding area 1, there are a winding and unwinding shaft 1.1, explosion-proof lamps 1.2, rubber rollers 1.3 and guide rollers 1.4, as well as a linear velocity sensor, a deviation correction sensor and a tension sensor. And the winding and unwinding area 1 is provided with an air inlet 1.5 connected to the gas washing valve control 1.6; Each explosion-proof lamp 1.2 is evenly arranged in the winding and unwinding area 1; At the front and rear ends of the unwinding area 1a and the winding area 1b, winding and unwinding shafts 1.1 connected to driving devices are respectively installed, and at least one guide roller 1.4 is rotatably installed in front of or behind the winding and unwinding shaft 1.1 respectively. Above the last guide roller 1.4 in the unwinding area 1a and the frontmost guide roller 1.4 in the winding area 1b, a rubber roller 1.3 is rotatably installed; The cloth is tensioned and wound around the guide roller 1.4 and is pressed between the rubber roller 1.3 and the corresponding guide roller 1.4, and the linear velocities of the three are kept consistent; In actual setting, the number and position of the guide rollers 1.4 should be set according to the tension and traction requirements of the cloth 4, and at the same time, the situation of too large turning angle when the cloth 4 moves should be avoided; In addition, in order to ensure that the linear velocities of the rubber roller 1.3, the guide roller 1.4 and the cloth 4 are consistent, the pressure of the rubber roller 1.3 on the cloth 4 should be appropriately adjusted.

[0036] The linear velocity sensor and the tension sensor are installed at the rotating shaft of any guide roller 1.4, and are respectively used to measure the rotation speed of the guide roller 1.4 to obtain the linear velocity of the cloth 4; and to measure the pressure received by the guide roller 1.4 to obtain the tension on the surface of the cloth 4 and confirm the tension degree of the cloth 4; the detection end of the deviation correction sensor faces the cloth 4 and is used to measure the positions of the two side edges of the cloth 4. So as to adjust the winding and unwinding position of the winding and unwinding shaft 1.1 by using the winding and unwinding motor when the cloth 4 deviates, so that the cloth 4 is centered.

[0037] There is also one or more electrode guide rollers 1b.1 electrically connected between the positive and negative poles of the resistance detection mechanism in the winding area 1b; the electrode guide rollers 1b.1 are silver-plated rollers with multiple axes collinear in the width direction of the covering cloth 4, and each electrode guide roller 1b.1 is used to detect the electrical conductivity of the cloth 4 at its own position and the corresponding width.

[0038] There are baffles 5 at the connection between the unwinding area 1a and the pretreatment area 2a and at the connection between the growth area 2b and the cooling area 3; The baffle 5 is located in the unwinding area 1a and the cooling area 3, and is a pair of plate-like structures that are symmetric up and down, covering the opening at the connection between the unwinding area 1a and the pretreatment area 2a or covering the opening at the connection between the growth area 2b and the cooling area 3; it functions to isolate air and heat; the cloth 4 passes through the gap between the pair of baffles 5, and a cylindrical tube body is fixedly connected to the end of the baffle 5 facing the cloth 4. The tube body can effectively prevent the baffle 5 from damaging the cloth 4. The tube body is preferably a high-temperature resistant quartz glass tube, which can maintain a high surface smoothness during long-term contact with the cloth and will not cause rust problems.

[0039] Example 1 Using the above roll-to-roll CVD production equipment, the deposition growth and forming of a carbon-based conductive layer on the cloth is carried out by the roll-to-roll CVD production process. The carbon-based conductive layer is composed of one or several of carbon nanotubes, multi-layer graphene, and amorphous carbon. The roll-to-roll CVD production process includes the following steps: First step, open the closed doors opened in the unwinding area 1a and the winding area 1b, install the cloth between the unwinding area 1a and the winding area 1b, adjust the cloth surface to be flat, and then close the closed doors to form a closed environment in the two unwinding and winding areas 1, the two processing and growth areas 2, and the cooling area 3; Second step, open the air inlets 1.5 of the two unwinding and winding areas 1 and adjust the pressure maintaining valve 2b.12 to the free ventilation state, introduce at least one inert gas such as nitrogen or argon into the two unwinding and winding areas 1, flush the cavity with a ventilation flow rate of 10000 sccm for 30 min, and then continuously ventilate with a ventilation flow rate of 200 sccm. Adjust the control pressure of the pressure maintaining valve 2b.12 to a positive pressure of 0.2 KPa to maintain the relative positive pressure state of the unwinding and winding areas 1; Third step, start the circulating water cooling mechanism 2.5 and the cooling mechanism 3.2; Divide the two processing and growth areas 2 by a plane perpendicular to the moving direction of the cloth, and divide the multiple heating blocks in the pretreatment area 2a and the growth area 2b into two groups respectively, that is, there are a total of four groups of heating blocks, and four temperature controllers are set accordingly; the heating target temperatures of the four temperature controllers are set to 300 °C, 800 °C, 1100 °C, and 700 °C in sequence from front to back, and the allowable temperature differences are ±10 °C, ±5 °C, ±5 °C, and ±20 °C respectively; Each heating block heats up to form a temperature gradient field in the pre-treatment growth chamber 2.1 with a temperature increase from the front to the middle and a temperature decrease at the rear; In the fourth step, observe the readings of each temperature sensor to confirm that the heating unit 2.2 is working properly; In the fifth step, obtain the average value T of the readings of each temperature sensor in a plane at the middle position in the length direction of the four groups of heating blocks, compare T with the corresponding target temperature. If the difference between the two is less than the allowable temperature difference, proceed to the sixth step; Otherwise, adjust the heating power of the corresponding group of heating blocks up or down through the corresponding temperature controller until the difference between T and the corresponding target temperature is less than the preset allowable difference, and then proceed to the sixth step; In the sixth step, introduce a mixed gas into the front end of the pre-treatment growth chamber 2.1 through the gas inlet structure 2a.1. The flow rate of the mixed gas is 2000 sccm of methane, 200 sccm of hydrogen, and 500 sccm of argon; In the seventh step, after the mixed gas is introduced into the gas mixing channel 2.1 for 20 minutes, the winding area 1b starts winding at a linear speed of 50 mm / min, and the unwinding area 1a unwinds accordingly, so that the quartz glass fiber cloth moves uniformly from the unwinding area 1a to the winding area 1b; In the eighth step, the staff observes the appearance quality of the deposition growth of the carbon-based conductive layer on the surface of the quartz glass fiber cloth through the observation window opened by the roll-to-roll CVD production equipment, and the deposition growth quality of the carbon-based conductive layer is detected in real time by the cooperation of the electrode guide roller 1b.1 and the resistance detection mechanism, and then winding is carried out; when the quality inspection data deviates from the standard data, the staff adjusts the process parameters accordingly according to the guidance of the production manual to calibrate the deposition growth quality of the carbon-based conductive layer; In the ninth step, the gas inlet structure 2a.1 and the liquid inlet structure 2a.2 stop gas intake and liquid intake, and each temperature controller controls each group of heating blocks to cool down at a set rate until they are turned off. After the temperature inside the roll-to-roll CVD production equipment drops to room temperature, stop introducing inert gas into the two unwinding and winding areas 1, turn off the circulating water cooling mechanism 2.5 and the cooling mechanism 3.2, open the closed door to take out the finished product of the conductive glass fiber cloth, and remove the part of the carbon-based conductive layer at the end of the quartz glass fiber cloth that does not meet the production requirements.

[0040] Example 2 Use the roll-to-roll CVD production equipment of Example 1 to deposit and grow the carbon-based conductive layer on the quartz glass fiber cloth by the roll-to-roll CVD production process, with the only difference being that: In the third step, the heating target temperatures of the four temperature controllers are set to 300 °C, 700 °C, 980 °C, and 600 °C in sequence from front to back; In the sixth step, a mixed gas and a liquid are respectively introduced into the front end and the middle part of the pretreatment growth chamber 2.1 through the gas inlet structure 2a.1 and the liquid inlet structure 2a.2. The liquid is instantly vaporized into a vaporized liquid after entering the pretreatment growth chamber 2.1. The flow rate of the mixed gas is 2000 sccm, hydrogen is 200 sccm, argon is 500 sccm, the liquid is an ethanol solution dissolved with 0.1% ferric chloride, and the liquid flow rate is 0.5 mL / min.

[0041] Example 3 Using the roll-to-roll CVD production equipment of Example 1, the deposition growth and forming of the carbon-based conductive layer on the quartz glass fiber cloth are carried out by the roll-to-roll CVD production process, with the only difference being that: In the third step, the heating target temperatures of the four temperature controllers are sequentially set to 300 °C, 600 °C, 950 °C, and 500 °C from front to back; In the sixth step, a mixed gas is introduced into the front end of the pretreatment growth chamber 2.1 through the gas inlet structure 2a.1. The flow rate of the mixed gas is 1000 sccm of acetylene, 100 sccm of hydrogen, and 200 sccm of argon.

[0042] Comparative Example 1 Using the roll-to-roll CVD production equipment of Example 1, the deposition growth and forming of the carbon-based conductive layer on the quartz glass fiber cloth are carried out by the roll-to-roll CVD production process, with the only difference being that: In the seventh step, the linear velocity is set to 100 mm / min.

[0043] Comparative Example 2 Using the roll-to-roll CVD production equipment of Example 1, the deposition growth and forming of the carbon-based conductive layer on the quartz glass fiber cloth are carried out by the roll-to-roll CVD production process, with the only difference being that: In the third step, the heating target temperatures of the four temperature controllers are sequentially set to 300 °C, 700 °C, 950 °C, and 600 °C from front to back.

[0044] Comparative Example 3 Using the roll-to-roll CVD production equipment of Example 1, the deposition growth and forming of the carbon-based conductive layer on the quartz glass fiber cloth are carried out by the roll-to-roll CVD production process, with the only difference being that: In the second step, after flushing the cavity, the inert gas is stopped from being introduced, that is, the unwinding and rewinding area 1 does not continuously introduce gas at a flow rate of 200 sccm.

[0045] Comparative Example 4 Using the roll-to-roll CVD production equipment of Example 3, the deposition growth and forming of the carbon-based conductive layer on the quartz glass fiber cloth are carried out by the roll-to-roll CVD production process, with the only difference being that: In the third step, the heating target temperatures of the four temperature controllers are set to 300 °C, 800 °C, 1100 °C, and 700 °C in sequence from front to back.

[0046] In each of the examples and comparative examples, the conductive glass fiber cloth was detected by the detection methods of surface resistance and coefficient of variation: Cut the obtained conductive glass fiber cloth into a test sample with a length of 500 mm × a width of 150 mm, mark the A side and the B side, and divide the test sample into 10×3 detection areas on average. Use a four-probe tester to detect the surface resistance at the center position of each area, and calculate the arithmetic mean and the coefficient of variation; The detection results of the conductive glass fiber cloth obtained in each of the examples and comparative examples are shown in Table 1 below: Table 1: Detection results of the conductive glass fiber cloth obtained in each of the examples and comparative examples It can be seen from the results in Table 1 that: (1) The results of Comparative Example 1 show that the surface resistance of the conductive glass fiber cloth can be effectively regulated by controlling the process parameters of the linear velocity (deposition time).

[0047] (2) The results of Comparative Example 2 show that when the temperature is reduced to 950 °C, although methane can still be cracked, its cracking efficiency is low, and only a small amount of deposition growth occurs on the quartz glass fiber cloth, and a complete conductive path is not formed, resulting in an excessively large surface resistance detection result.

[0048] (3) The results of Comparative Example 3 show that the regulation of the relative positive pressure state at the unwinding and rewinding positions is cancelled in the production process. Although methane has deposition growth and forms a conductive path, during the production process, affected by the high temperature in the treatment growth area, there is a phenomenon that the carbon source gas diffuses to the unwinding area, wasting a part of the carbon source and increasing the safety risk. In addition, when the carbon source gas is cracked into active components, it is easy to diffuse to the cooling area and deposit, resulting in carbon deposition in the cooling area.

[0049] (4) The results of Comparative Example 4 show that the higher the temperature, the higher the cracking efficiency of acetylene, but too high a temperature will cause the cracked carbon atoms to recombine rapidly and form acetylene black, which is deposited and grown on the quartz glass fiber cloth at the same time, but this will seriously contaminate the cloth surface and cause appearance defects.

[0050] (5) The results of Examples 1-3 show that by using the roll-to-roll CVD production equipment in Examples 1-3 and the roll-to-roll CVD production process in Examples 1-3 to deposit and grow a carbon-based conductive layer on the quartz glass fiber cloth, a conductive glass fiber cloth with uniform two sides and a small coefficient of variation of surface resistance can be prepared, effectively solving the problems of incomplete deposition of the carbon-based conductive layer, carbon deposition in the cooling area, and cloth surface contamination; Example 2 also shows that the introduction of the liquid-phase carbon source and the catalyst can enable the carbon-based conductive layer to maintain a sufficient deposition growth amount under relatively low temperature conditions, that is, while reducing the requirements for reaction conditions, a conductive glass fiber cloth with a lower sheet resistance can be obtained.

[0051] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "including a..." does not exclude the existence of additional identical elements in the process, method, article or device including the said element.

[0052] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A roll-to-roll CVD production device, comprising two reeling and unreeling areas (1) for reeling and unreeling a cloth (4) and driving the cloth (4) to move from an unreeling position to a reeling position, characterized in that: A cooling zone (3) and two processing and growing zones (2) are also provided; The two processing and growing zones (2) are arranged in a sealed communication, the front one is used as a pre-processing zone (2a), and the rear one is used as a growing zone (2b); the cooling zone (3) is arranged in a sealed communication at the rear end of the growing zone (2b); the front one of the two winding and unwinding zones is arranged in a sealed communication as an unwinding zone (1a) at the front end of the pre-processing zone, and the rear one is arranged in a sealed communication as a winding zone (1b) at the rear end of the cooling zone (3); The pretreatment zone (2a) and the growth zone (2b) are connected via a pretreatment growth chamber (2.1) extending from the front end of the pretreatment zone (2a) to the rear end of the growth zone (2b), and a cooling channel (3.1) is provided in the cooling zone (3) extending from the front end to the rear end; The front and rear end surfaces of the processing growth zone (2) are provided with a circulating water cooling mechanism (2.5) surrounding the pre-processing growth chamber (2.1); A cooling mechanism (3.2) is provided in the cooling zone (3) surrounding the cooling channel (3.1); The front end of the cloth (4) is tensioned and wound into a roll in the unwinding area (1a), and the middle part is tensioned and passed through the pre-treatment growth chamber ( 2.1) and the cooling channel (3.1), the rear end of which is tensioned and wound into a roll in the winding area (1b); A heating unit (2.2) is arranged in the processing growth zone (2) around the pre-processing growth chamber (2.1), and a heat insulation layer (2.3) is arranged on the periphery of the heating unit (2.2); the front end of the pre-processing zone (2a) is connected to an air intake structure (2a.1), and the rear end of the growth zone (2b) is connected to an exhaust structure (2b.1).

2. The roll-to-roll CVD production equipment according to claim 1, characterized in that: The air intake structure (2a.1) comprises a premixing tank (2a.11), a plurality of air intake ports (2a.12), a flow control valve (2a.13) and a plurality of air intake channels (2a.14); Each of the air inlets (2a.12) is connected in parallel to the inlet of the premixing tank (2a.11), the inlet of each of the air inlet channels (2a.14) is connected in parallel to the outlet of the premixing tank (2a.11), and the flow control valve (2a.13) is provided between the outlet of the premixing tank (2a.11) and the inlet of each of the air inlet channels (2a.14); The outlets of the air inlet channels (2a.14) are evenly connected to the top and bottom of the front end of the pretreatment growth chamber (2.1); The exhaust structure (2b.1) comprises an exhaust pipe (2b.11) and a pressure-maintaining valve (2b.12); The pressure-maintaining valve (2b.12) is connected to the exhaust pipe (2b.11); the inlet of the exhaust pipe (2b.11) is connected to the rear end bottom of the pretreatment growth chamber (2.1), and the outlet is emptied.

3. The roll-to-roll CVD production equipment according to claim 2, characterized in that: A liquid inlet structure (2a.2) is also provided, wherein the liquid inlet structure (2a.2) comprises a peristaltic pump (2a.21) and a plurality of liquid inlet channels (2a.22); The inlet of each of the liquid inlet channels (2a.22) is connected in parallel to the outlet of the peristaltic pump (2a.21), and the outlet of each of the liquid inlet channels (2a.22) is connected to the top of the pretreatment growth chamber (2.1) in the middle of the pretreatment area (2a).

4. The roll-to-roll CVD production equipment according to claim 3, characterized in that: The air intake passage (2a.14) It is arranged vertically at the front end surface of the pretreatment area (2a), and has a plurality of partitions arranged densely from top to bottom inside, and ventilation holes are staggered on adjacent partitions; A stirring paddle of an external driving device is provided below each of the liquid inlet channels (2a.22) in the pretreatment growth chamber (2.1); The inner wall of the pretreatment growth chamber (2.1) is covered with a graphite plate; It also includes baffles (5) arranged at the connection between the unwinding zone (1a) and the pretreatment zone (2a) and at the connection between the growth zone (2b) and the cooling zone (3); The baffle (5) is located in the unwinding zone (1a) and the cooling zone (3), and is a pair of plate-shaped structures that are symmetrical in the upper and lower directions, and is arranged to shield the opening at the connection between the unwinding zone (1a) and the pretreatment zone (2a) or to shield the opening at the connection between the growth zone (2b) and the cooling zone (3); The cloth (4) passes through the gap between a pair of baffles (5), and a tubular body with a cylindrical structure is fixedly connected to one end of the baffle (5) facing the cloth (4).

5. The roll-to-roll CVD production equipment according to claim 1, characterized in that: It also includes an electrode guide roller (1b.1), and the winding area (1b) is also provided with one or more electrode guide rollers (1b.1) electrically connected to the positive and negative electrodes of the resistance detection mechanism; The electrode guide roller (1b.1) is arranged to cover the width direction of the cloth (4), or the electrode guide rollers (1b.1) are arranged to cover the width direction of the cloth (4) together.

6. The roll-to-roll CVD production equipment according to claim 1, characterized in that: The heating unit (2.2) is a plurality of heating blocks uniformly and densely arranged along the length of the pretreatment growth chamber (2.1) and surrounding the pretreatment growth chamber (2.1), and the heating blocks are equipped with a temperature controller to control the heating temperature; It also comprises a plurality of groups of temperature sensors, wherein the measuring ends of each group of the temperature sensors are located in the pretreatment growth chamber (2.1) and are arranged along the length of the pretreatment growth chamber (2.1); the measuring ends of each group of the temperature sensors surround the pretreatment growth chamber (2.1) and are arranged in the same cross section of the pretreatment growth chamber (2.1); A pressure sensor is also provided, the measuring end of which is located in the pretreatment growth chamber (2.1).

7. The roll-to-roll CVD production equipment according to claim 1, characterized in that: The reeling and unwinding area (1) is provided with a reeling and unwinding shaft (1.1), an explosion-proof lamp (1.2), a rubber roller (1.3) and a guide roller (1.4), and the reeling and unwinding area (1) is provided with an air inlet (1.5) connected to an air washing valve control (1.6); Each of the explosion-proof lamps (1.2) is arranged in the reeling and unreeling area (1); The unwinding and rewinding shafts (1.1) connected to a drive device are respectively installed at the front and rear ends of the unwinding area (1a) and the rewinding area (1b), and at least one guide roller (1.4) is rotatably installed in front of or behind the unwinding and rewinding shafts (1.1), and the rubber roller (1.3) is rotatably installed above the guide roller (1.4) at the rear end of the unwinding area (1a) and the guide roller (1.4) at the front end of the rewinding area (1b); The cloth is tensioned and wound around the guide roller (1.4), and is pressed between the rubber roller (1.3) and the guide roller (1.4) corresponding to the rubber roller (1.3).

8. The roll-to-roll CVD production equipment according to claim 7, characterized in that: The rewinding and unwinding area (1) is also provided with a linear speed sensor, a deviation correction sensor and a tension sensor; The linear speed sensor and the tension sensor are mounted on the rotating shaft of any one of the guide rollers (1.4), and are used to measure the rotation speed of the guide roller (1.4) and the pressure exerted on the guide roller (1.4), respectively. The detection end of the deviation correction sensor faces the cloth (4), and is used to measure the edge positions on both sides of the cloth (4).

9. A roll-to-roll CVD production process, using the roll-to-roll CVD production equipment as described in any one of claims 1 to 9 to prepare a carbon-based conductive layer on a cloth surface, characterized in that: The following steps are involved: The first step is to open the closed doors of the unwinding area (1a) and the winding area (1b), install the cloth (4) between the unwinding area (1a) and the winding area (1b), adjust the cloth surface to be flush, and then close the closed doors to form a closed environment in the two winding and unwinding areas (1), the two processing and growing areas (2) and the cooling area (3); The second step is to open the air inlets (1.5) of the two rewinding and unwinding areas (1) and adjust the pressure retaining valve (2b.12) to a free ventilation state. At least one inert gas selected from nitrogen or argon is introduced into the two winding and unwinding areas (1), and the chamber is flushed at a ventilation flow rate of 5000-20000 sccm for 10-60 minutes, and then the ventilation is continued at a ventilation flow rate of 100-500 sccm, and the control pressure of the pressure-maintaining valve (2b.12) is adjusted to a positive pressure of 0-10 KPa to maintain a relative positive pressure state of the winding and unwinding areas (1); The third step is to start the circulating water cooling mechanism (2.5) and the cooling mechanism (3.2); The two processing and growing areas (2) are divided by at least two planes perpendicular to the moving direction of the cloth (4), and at least a plurality of heating blocks in the pre-treatment area (2a) and the growth area (2b) are respectively divided into two groups, and each group of heating blocks shares a temperature controller; The heating target temperatures of at least two temperature controllers corresponding to the pretreatment zone (2a) are set to 300-800° C., and the heating target temperatures of the temperature controllers corresponding to the pretreatment zone (2a) increase from front to back; The heating target temperatures of at least two temperature controllers corresponding to the growth zone (2b) are set to 500-1150°C, the heating target temperatures of the temperature controllers corresponding to the growth zone (2b) first increase and then decrease from front to back, and the heating target temperature of the first temperature controller is higher than the heating target temperature of the last temperature controller corresponding to the pretreatment zone (2a); Each heating block is heated to increase the temperature, thereby forming a temperature gradient field in the pretreatment growth chamber (2.1) with the temperature increasing from the front to the middle and decreasing from the rear; Step 4: Observe the readings of each temperature sensor to confirm that the heating unit (2.2) is working normally; The fifth step is to obtain the average value T of the readings of each temperature sensor in a plane located in the middle of the length of each group of heating blocks, and compare T with the corresponding target temperature. If the difference between the two is less than the preset allowable temperature difference, proceed to the sixth step; Otherwise, the heating power of the group of heating blocks is adjusted up or down by the corresponding temperature controller until the difference between T and the corresponding target temperature is less than the preset allowable difference, and then the sixth step is performed; Step 6: introducing a mixed gas into the front end of the pretreatment growth chamber (2.1) through the air inlet structure (2a.1), or introducing a mixed gas and a liquid into the front end and the middle of the pretreatment growth chamber (2.1) through the air inlet structure (2a.1) and the liquid inlet structure (2a.2), respectively, so that the liquid instantly vaporizes into vaporized liquid after entering the pretreatment growth chamber (2.1); As the gas flow field diffuses, the mixed gas or the mixed gas and the vaporized liquid are fully and evenly wrapped on the surface of the cloth (4), forming a uniformly distributed gas concentration field in the pre-treatment growth chamber (2.1), and are cracked in a region above the cracking temperature to form active components, and the excess un-cracked mixed gas or the mixed gas and the vaporized liquid, the active components or other substances are discharged along with the gas through the exhaust structure (2b.1); The mixed gas flow rate is methane 500~3000 sccm and / or acetylene 100~1000 sccm, hydrogen 50~200 sccm, argon 100~2000 sccm, The liquid is a carbon-containing low-molecular solvent, and the liquid flow rate is 0.1~20 mL / min; Step 7: After the mixed gas or the mixed gas and liquid is introduced into the gas mixing channel (2.1) for 10 to 60 minutes, the reeling area (1b) starts to reel at a line speed of 10 to 1000 mm / min, and the unwinding area (1a) unwinds accordingly, so that the cloth (4) moves from the unwinding area (1a) to the rewinding area (1b) at a uniform speed; In the eighth step, when the cloth (4) is located in the pretreatment zone (1a), the resin in the cloth (4) is continuously decomposed, and amorphous carbon is formed on the surface of the cloth (4); When the cloth (4) moves to the growth zone (1b), the active components of the mixed gas or the mixed gas and the vaporized liquid decomposed at high temperature rapidly nucleate and grow on the cloth (4) to form a carbon-based conductive layer, and the staff observes the appearance quality of the deposition and growth of the carbon-based conductive layer on the surface of the cloth (4) through the observation window provided in the roll-to-roll CVD production equipment; When the cloth (4) moves to the cooling zone (3), it is cooled in the cooling channel (3.1) under the action of the cooling mechanism (3.2); When the cloth (4) moves to the winding area (1b), the electrode guide roller (1b.1) and the resistance detection mechanism cooperate to detect the deposition growth quality of the carbon-based conductive layer in real time, and then the cloth is wound; In the ninth step, the air intake structure (2a.1) stops intake of air, or the air intake structure (2a.1) and the liquid intake structure (2a.2) stop intake of air and liquid, and each temperature controller controls each group of heating blocks to cool down at a set rate until they are closed. After the temperature in the roll-to-roll CVD production equipment drops to room temperature, the inert gas is stopped from being introduced into the two winding and unwinding areas (1), the circulating water cooling mechanism (2.5) and the cooling mechanism (3.2) are closed, and the closed door is opened to take out the finished conductive fabric.

10. The roll-to-roll CVD production process according to claim 9, characterized in that: A catalyst is dissolved in the carbon-containing low-molecular solvent; The carbon-containing low-molecular solvent in the sixth step is one or more of ethanol, dichloromethane, propanol, and chloroform, and the catalyst is ferric chloride or ferrocene.

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