Fluid device system

Abstract

The invention provides a fluid equipment system which can reduce the size of the fluid equipment system. The present invention is provided with: a flow path member (50); a first valve that is provided in the first region (A1) and that switches the flow state of the first flow path; a second valve that is provided in the second region (A2) and that switches the flow state of the second flow path; and a third valve that is provided in the third region (A3) and that switches an inflow state of a fluid from a third flow path to a second flow path, the first flow path guiding the fluid flowing in from the inflow port (101a) to the first outflow port (101b1), and the second flow path guiding the fluid flowing in from the third valve to the second outflow port (101b2). The third flow path guides the fluid flowing in from the first flow path to a third flow outlet (101b3), and the flow inlet (101a) is connected to the flow rate adjusting device and opens toward a fourth region (A4) that coincides with the third region (A3) in the first direction (DR1) and coincides with the first region (A1) in the second direction (DR2).

Description

Technical Field

[0001] The present invention relates to a fluid equipment system. Background Art

[0002] Conventionally, a fluid equipment that discharges a fluid supplied from a supply source to an inlet to any one of a plurality of outlets has been known (for example, refer to Patent Document 1). The fluid equipment disclosed in Patent Document 1 includes: a first fluid unit having a plurality of first flow paths through which a fluid flows along a first direction; and a second fluid unit having a plurality of second flow paths through which the fluid flows along a second direction intersecting the first direction, and a plurality of on-off valves are respectively arranged at a plurality of positions where the plurality of first flow paths and the plurality of second flow paths intersect. The fluid equipment disclosed in Patent Document 1 can discharge the fluid flowing into the plurality of first flow paths through which the fluid flows along the first direction from a desired second flow path through which the fluid flows along the second direction intersecting the first direction to the outside by switching the opening and closing states of the plurality of on-off valves.

[0003] Prior Art Documents

[0004] Patent Documents

[0005] Patent Document 1: Japanese Unexamined Patent Application Publication No. 2017-2919 Summary of the Invention

[0006] Problems to be Solved by the Invention

[0007] However, in the fluid equipment disclosed in Patent Document 1, since the positions in the first direction of the plurality of second flow paths are different, the size of the fluid equipment in the first direction is increased according to the number of discharge ports for discharging the fluid to the outside from the second flow paths. In Figure 1 the illustrated example, in order to provide discharge ports for five second fluid units, it is necessary to arrange five columns of second flow path components, so that the size of the fluid equipment is increased.

[0008] The present invention has been completed in view of such a situation, and an object thereof is to reduce the size of a fluid equipment system that selectively guides a fluid flowing into an inlet to a plurality of outlets.

[0009] Means for Solving the Problems

[0010] In order to solve the above problems, the present invention adopts the following method.

[0011] The fluid equipment system according to the first aspect of the present invention includes: a flow path component provided on a setting surface; a first valve provided in a first region of the flow path component when observing the setting surface from above, and switching the flow state of the fluid flowing in the first flow path; a second valve provided in a second region of the flow path component when observing the setting surface from above, and switching the flow state of the fluid flowing in the second flow path; a third valve provided in a third region of the flow path component when observing the setting surface from above, and switching the inflow state of the fluid from the third flow path to the second flow path; a fluid equipment supplying fluid to the flow path component, the second region is a region that coincides with the first region in a first direction parallel to the setting surface and is adjacent to the first region in a second direction parallel to the setting surface and orthogonal to the first direction, the third region is a region that is adjacent to the second region in the first direction and coincides with the second region in the second direction, in the first region, a fluid inlet for fluid to flow in from the fluid equipment and a first fluid outlet for the fluid flowing in from the fluid inlet to flow out to the outside are formed, in the second region, a second fluid outlet for the fluid to flow out to the outside is formed, in the third region, a third fluid outlet for the fluid to flow out to the outside is formed, the first flow path is formed in the first region in such a manner as to guide the fluid flowing in from the fluid inlet to the first fluid outlet via the first valve, the second flow path is formed in the second region and the third region in such a manner as to guide the fluid flowing in from the third valve to the second fluid outlet via the second valve, the third flow path is formed in the first region, the second region and the third region in such a manner as to guide the fluid flowing in from the first flow path to the third fluid outlet, the fluid inlet is connected to the fluid equipment and opens toward a fourth region that coincides with the third region in the first direction and coincides with the first region in the second direction.

[0012] According to the fluid equipment system of the first aspect of the present invention, the fluid flows into the fluid inlet formed in the first region of the flow path component along the first direction. In addition, the fluid flows out from the first fluid outlet formed in the first region of the flow path component, the second fluid outlet formed in the second region of the flow path component, and the third fluid outlet formed in the third region of the flow path component along the first direction. Since the direction in which the fluid flows into the flow path component and the direction in which the fluid flows out from the flow path component are the same direction, the size of the fluid equipment system can be miniaturized compared with the case where they are set to different directions.

[0013] In addition, the inlet is connected to the fluid device and opens toward a fourth region that coincides with the third region in the first direction and the first region in the second direction. Since the fluid device connected to the inlet and the flow path component can be connected in the fourth region, the size of the fluid device system can be reduced.

[0014] The fluid device system according to the second aspect of the present invention has the following further configuration in the first aspect. That is, the first valve switches between a first outflow state in which fluid flows from the inlet to the first outlet and a first cutoff state in which fluid does not flow from the inlet to the first outlet, the second valve switches between a second outflow state in which fluid flows from the third flow path to the second outlet and a second cutoff state in which fluid does not flow from the third flow path to the second outlet, and the third valve adjusts the flow rate of the fluid flowing from the third flow path into the second flow path in the second outflow state.

[0015] According to the fluid device system of the second aspect of the present invention, the first valve can switch between a first outflow state in which fluid flows out of the first outlet and a second cutoff state in which fluid does not flow out of the first outlet. In addition, the second valve can switch between a second outflow state in which fluid flows out of the second outlet and a first cutoff state in which fluid does not flow out of the second outlet. Further, the third valve can adjust the flow rate of the fluid flowing from the third flow path into the second flow path in the second outflow state.

[0016] The fluid device system according to the third aspect of the present invention has the following further configuration in the first or second aspect. That is, the third flow path is arranged below the second flow path in the vertical direction in the second region.

[0017] According to the fluid device system of the third aspect of the present invention, since the third flow path is arranged below the second flow path in the vertical direction in the second region, the second flow path and the third flow path can be appropriately arranged in the second region of the flow path component without interference.

[0018] The fluid device system according to the fourth aspect of the present invention includes: a flow path member disposed on a setting surface; a first valve disposed in a first region of the flow path member when observing the setting surface from above, and switching the inflow state of fluid from a first flow path to a second flow path; a second valve disposed in a second region of the flow path member when observing the setting surface from above, and switching the flow state of the fluid flowing in the second flow path; a third valve disposed in a third region of the flow path member when observing the setting surface from above, and switching the inflow state of fluid from a third flow path to a fourth flow path; a fourth valve disposed in a fourth region of the flow path member when observing the setting surface from above, and switching the flow state of the fluid flowing in the fourth flow path. The second region is a region adjacent to the first region in a first direction parallel to the setting surface and coinciding with the first region in a second direction parallel to the setting surface and orthogonal to the first direction. The third region is a region coinciding with the first region in the first direction and adjacent to the first region in the second direction. The fourth region is a region coinciding with the second region in the first direction and coinciding with the third region in the second direction. In the first region, a first inlet through which fluid flows in and a first outlet through which the fluid flowing in from the first inlet flows out along one side in the first direction are formed. In the second region, a second inlet through which fluid flows in and a second outlet through which the fluid flows out along the other side in the first direction are formed. In the third region, a third outlet through which the fluid flows out along the one side in the first direction is formed. In the fourth region, a fourth outlet through which the fluid flows out along the other side in the first direction is formed. The first flow path is formed in the first region to guide the fluid flowing in from the first inlet to the first outlet. The second flow path is formed in the first region and the second region to guide the fluid flowing in from the first valve to the second outlet via the second valve. The third flow path is formed in the second region, the third region, and the fourth region to guide the fluid flowing in from the second inlet to the third outlet. The fourth flow path is formed in the third region and the fourth region to guide the fluid flowing in from the third valve to the fourth outlet via the fourth valve.

[0019] In the fluid equipment system according to the fourth aspect of the present invention, since the first valve, the second valve, the third valve, and the fourth valve are respectively arranged in four adjacent regions, namely the first region, the second region, the third region, and the fourth region, the size of the fluid equipment system can be miniaturized compared with the case where a part of them is arranged in non-adjacent regions.

[0020] In addition, in the fluid equipment system according to the fourth aspect of the present invention, the fluid flows out from the first outlet formed in the first region of the flow path member and the third outlet formed in the third region of the flow path member on one side in the first direction, and the fluid flows out from the second outlet formed in the second region of the flow path member and the fourth outlet formed in the fourth region of the flow path member on the other side in the first direction. The respective directions in which the fluid flows out from the flow path member are the first direction, and the outflow directions are divided into one side and the other side. Therefore, the size of the fluid equipment system can be miniaturized compared with the case where they are set to different directions or only flow out to one side or the other side.

[0021] The fluid equipment system according to the fifth aspect of the present invention has the following structure in the fourth aspect. That is, the first valve adjusts the flow rate of the fluid flowing from the first flow path into the second flow path, the second valve switches the state where the fluid flows out from the second outlet and the state where the fluid does not flow out from the second outlet, the third valve adjusts the flow rate of the fluid flowing from the third flow path into the fourth flow path, and the fourth valve switches the state where the fluid flows out from the fourth outlet and the state where the fluid does not flow out from the fourth outlet.

[0022] In the fluid equipment system according to the fifth aspect of the present invention, the flow rate of the fluid flowing from the first flow path into the second flow path can be adjusted by the first valve. In addition, the state where the fluid flows out from the second outlet and the state where the fluid does not flow out from the second outlet can be switched by the second valve. In addition, the flow rate of the fluid flowing from the third flow path into the fourth flow path can be adjusted by the third valve. In addition, the state where the fluid flows out from the fourth outlet and the state where the fluid does not flow out from the fourth outlet can be switched by the fourth valve.

[0023] The fluid equipment system according to the sixth aspect of the present invention has the following structure in the fourth aspect or the fifth aspect. That is, the third flow path is arranged below the fourth flow path in the vertical direction in the fourth region.

[0024] In the fluid device system according to the sixth aspect of the present invention, since the third flow path is arranged below the fourth flow path in the vertical direction in the fourth region, the third flow path and the fourth flow path can be appropriately arranged in the fourth region of the flow path component without interference.

[0025] Advantages of the Invention

[0026] According to the present invention, it is possible to miniaturize the size of a fluid device system that selectively guides a fluid flowing in from a fluid inlet to a plurality of fluid outlets. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a top view showing the fluid device system of the first embodiment of the present invention.

[0028] Figure 2 It is a schematic structural diagram showing the fluid device system of the first embodiment of the present invention.

[0029] Figure 3 It is Figure 1 A sectional view taken along the line A-A of the fluid device system shown.

[0030] Figure 4 It is Figure 1 A sectional view taken along the line B-B of the fluid device system shown.

[0031] Figure 5 It is Figure 1 A sectional view taken along the line C-C of the fluid device system shown.

[0032] Figure 6 It is Figure 1 A top view of the flow path component shown.

[0033] Figure 7 It is a top view showing the fluid device system of the second embodiment of the present invention.

[0034] Figure 8 It is a schematic structural diagram showing the fluid device system of the second embodiment of the present invention.

[0035] Figure 9 It is Figure 7 A sectional view taken along the line D-D of the fluid device system shown.

[0036] Figure 10 It is Figure 7 A sectional view taken along the line E-E of the fluid device system shown.

[0037] Figure 11 It is Figure 7 A sectional view taken along the line F-F of the fluid device system shown.

[0038] Figure 12 The Figure 7 G-G direction view sectional view of the fluid equipment system shown

[0039] Figure 13 The Figure 7 top view of the flow path component shown

[0040] Figure 14 It is a top view showing a modified example of the flow path component representing the second embodiment of the present invention Detailed implementation mode

[0041] [First Embodiment]

[0042] Hereinafter, regarding the fluid equipment system 100 of the first embodiment of the present invention, it will be described with reference to the drawings Figure 1 It is a top view showing the fluid equipment system 100 of one embodiment of the present invention Figure 2 It is a schematic structural diagram showing the fluid equipment system 100 of the first embodiment of the present invention

[0043] As Figure 1 shown, the fluid equipment system 100 of the present embodiment includes: a first valve 10, a second valve 20, a third valve 30, a flow rate adjusting device (fluid equipment) 40, and a flow path component 50

[0044] As Figure 2 shown, the fluid equipment system 100 of the present embodiment is a device capable of causing the fluid (such as pure water or a chemical solution such as hydrofluoric acid) supplied from the flow rate adjusting device 40 to the inlet 101a to flow out to at least any one of the first outlet 101b1, the second outlet 101b2, and the third outlet 101b3

[0045] The first valve 10 is a shut-off valve that switches the flow state of the fluid flowing in the first flow path 110. As Figure 2 shown, the first flow path 110 is a flow path that allows the fluid to flow from the inlet 101a to the first outlet 101b1 via the branch position B1

[0046] Figure 3 The Figure 1 A-A direction view sectional view of the fluid equipment system shown. As Figure 3 shown, the first valve 10 includes a switching mechanism 12. The switching mechanism 12 contacts or separates the valve body portion 11 along the vertical direction VD with the valve seat portion 51 of the flow path component 50, thereby switching between the first outflow state where the fluid flows from the inlet 101a to the first outlet 101b1 and the first shut-off state where the fluid does not flow from the inlet 101a to the first outlet 101b1

[0047] The second valve 20 is a shut-off valve that switches the flow state of the fluid flowing in the second flow path 120. As Figure 2 shown, the second flow path 120 is a flow path that allows the fluid to flow from the branch position B2 to the second flow outlet 101b2.

[0048] Figure 4 is Figure 1 a B-B cross-sectional view of the fluid equipment system shown. Figure 5 is Figure 1 a C-C cross-sectional view of the fluid equipment system 100 shown. As Figure 4 and Figure 5 shown, the second valve 20 includes a switching mechanism 22. The switching mechanism 22 makes the valve body portion 21 contact or separate from the valve seat portion 52 of the flow path member 50 along the vertical direction VD, thereby switching between a second flow-out state in which the fluid flows from the third flow path 130 through the second flow path 120 to the second flow outlet 101b2 and a second shut-off state in which the fluid does not flow from the third flow path 130 through the second flow path 120 to the second flow outlet 101b2.

[0049] The third valve 30 is a flow rate regulating valve that switches the inflow state of the fluid from the third flow path 130 to the second flow path 120. As Figure 2 shown, the third flow path 130 is a flow path that allows the fluid to flow from the branch position B1 through the branch position B2 to the third flow outlet 101b3.

[0050] As Figure 4 shown, the third valve 30 includes an adjusting mechanism 32. The adjusting mechanism 32 adjusts the flow rate of the fluid flowing from the third flow path 130 into the second flow path 120 in the second flow-out state where the fluid flows from the third flow path 130 through the second flow path 120 to the second flow outlet 101b2. The adjusting mechanism 32 adjusts the flow rate of the fluid flowing from the third flow path 130 into the second flow path 120 by making the valve body portion 31 approach or separate from the valve seat portion 53 of the flow path member 50 along the vertical direction VD.

[0051] The flow rate regulating device 40 is a device that regulates the inflow rate of the fluid flowing into the inlet 101a of the flow path member 50. The flow rate regulating device 40 includes a flow rate measuring unit (not shown) and a flow rate regulating unit (not shown). The flow rate regulating device 40 controls the flow rate regulating unit so that the flow rate measured by the flow rate measuring unit is consistent with a preset flow rate. The flow rate regulating device 40 supplies the fluid with the preset flow rate to the inlet 101a of the flow path member 50. In addition, instead of the flow rate regulating device 40, a flow meter that does not have a flow rate regulating unit but only has a flow rate measuring unit may be provided.

[0052] In the fluid device system 100 of the present embodiment, the first valve 10 is used to switch whether the fluid flowing in from the inlet 101a flows out from the first outlet 101b1, the second valve 20 is used to switch whether the fluid flowing in from the inlet 101a flows out from the second outlet 101b2, and the third valve 30 is used to adjust the flow rate of the fluid flowing out from the second outlet 101b2. The fluid device system 100 can supply the fluid with a set flow rate preset by the flow rate adjusting device 40 to the first outlet 101b1, the second outlet 101b2, and the third outlet 101b3 respectively at a desired flow rate.

[0053] The flow path component 50 is a component disposed on the installation surface S with the base components 61, 62, and 63 interposed therebetween. The flow path component 50 is formed of, for example, a fluororesin material. As Figure 3 and Figure 5 shown, the flow path component 50 is disposed in a state of being sandwiched between the base component 61 and the first valve 10. As Figure 4 and Figure 5 shown, the flow path component 50 is disposed in a state of being sandwiched between the base component 62 and the second valve 20. As Figure 4 shown, the flow path component 50 is disposed in a state of being sandwiched between the base component 63 and the third valve 30.

[0054] The base components 61, 62, and 63 are respectively fixed to the installation surface S by fastening bolts (not shown). In addition, the flow path component 50 is respectively fixed to the base components 61, 62, and 63 by fastening bolts (not shown).

[0055] Figure 6 is, Figure 1 a top view of the flow path component 50 shown. As Figure 6 shown, the flow path component 50 has a first region A1 where the first valve 10 is disposed, a second region A2 where the second valve 20 is disposed, and a third region A3 where the third valve 30 is disposed when observing the installation surface S from above. The first region A1 is a rectangular region with the positions P12, P13, P22, and P23 as vertices. The second region A2 is a rectangular region with the positions P22, P23, P32, and P33 as vertices. The third region A3 is a rectangular region with the positions P21, P22, P31, and P32 as vertices.

[0056] As Figure 6As shown, the second region A2 is a region that coincides with the first region A1 in the first direction DR1 parallel to the installation surface S and is adjacent to the first region A1 in the second direction DR2 parallel to the installation surface S and orthogonal to the first direction DR1. The third region A3 is a region that is adjacent to the second region A2 in the first direction DR1 and coincides with the second region A2 in the second direction DR2.

[0057] In the first region A1, an inlet 101a through which fluid flows in from the flow rate regulating device 40 along the first direction DR1 and a first outlet 101b1 through which the fluid flowing in from the inlet 101a flows out to the outside along the first direction DR1 are formed. The inlet 101a is connected to the flow rate regulating device 40 and opens toward the fourth region A4.

[0058] The fourth region A4 is a region that coincides with the third region A3 in the first direction DR1 and coincides with the first region A1 in the second direction DR2. The fourth region A4 is a rectangular region with vertices at positions P11, P12, P21, and P22.

[0059] In the second region A2, a second outlet 101b2 through which fluid flows out to the outside along the first direction DR1 is formed. In the third region A3, a third outlet 101b3 through which fluid flows out to the outside along the first direction DR1 is formed.

[0060] The first flow channel 110 is formed in the first region A1 in such a way that it guides the fluid flowing in from the inlet 101a to the first outlet 101b1 via the first valve 10. The first flow channel 110 has a valve chamber 110a that houses the valve body portion 11 of the first valve 10, an inflow channel 110b that connects the inlet 101a and the valve chamber 110a, and an outflow channel 110c that connects the valve chamber 110a and the first outlet 101b1.

[0061] The second flow channel 120 is formed in the second region A2 and the third region A3 in such a way that it guides the fluid flowing in from the third valve 30 to the second outlet 101b2 via the second valve 20. The second flow channel 120 has a valve chamber 120a that houses the valve body portion 21 of the second valve 20, an inflow channel 120b that connects the valve chamber 120d of the third valve 30 and the valve chamber 120a, an outflow channel 120c that connects the valve chamber 120a and the second outlet 101b2, and a valve chamber 120d that houses the valve body portion 31 of the third valve 30.

[0062] The third flow path 130 is formed in the first region A1, the second region A2, and the third region A3 so as to guide the fluid flowing in from the first flow path 110 toward the third flow outlet 101b3. The third flow path 130 has a connection flow path 130b that connects the connection portion 131 below the valve chambers 110a and 120a, and an outflow flow path 130c that connects the connection portion 131 and the third flow outlet 101b3. In the second region A2, the third flow path 130 is disposed below the outflow flow path 120c of the second flow path 120 in the vertical direction VD.

[0063] The functions and effects of the fluid equipment system 100 of the present embodiment described above will be described.

[0064] According to the fluid equipment system 100 of the present embodiment, fluid flows into the inlet 101a formed in the first region A1 of the flow path member 50. Further, the fluid flows out from the first flow outlet 101b1 formed in the first region A1 of the flow path member 50, the second flow outlet 101b2 formed in the second region A2 of the flow path member 50, and the third flow outlet 101b3 formed in the third region A3 of the flow path member 50 along the second direction DR2 orthogonal to the first direction DR1. Since the direction in which the fluid flows into the flow path member 50 and the direction in which the fluid flows out from the flow path member 50 are the same direction, the size of the fluid equipment system 100 can be made smaller than the case where they are set to different directions.

[0065] In addition, the inlet 101a is connected to the flow rate adjusting device 40 and opens toward the fourth region A4 that coincides with the third region A3 in the first direction DR1 and coincides with the first region A1 in the second direction DR2. Since the flow rate adjusting device 40 connected to the inlet 101a and the flow path member 50 can be connected in the fourth region A4, the size of the fluid equipment system 100 can be made smaller.

[0066] [Second Embodiment]

[0067] Hereinafter, the fluid equipment system 100A of the second embodiment of the present invention will be described with reference to the drawings. Figure 7 FIG. is a plan view showing the fluid equipment system 100A of the second embodiment of the present invention. Figure 8 FIG. is a schematic configuration diagram showing the fluid equipment system 100A of the second embodiment of the present invention.

[0068] The fluid equipment system 100 of the first embodiment is a system that allows the fluid flowing into the flow path component 50 from a single inlet 101a to flow out through three outlets, namely the first outlet 101b1, the second outlet 101b2, and the third outlet 101b3. In contrast, the fluid equipment system 100A of the present embodiment is a system that allows the fluid flowing into the flow path component 50A from the first inlet 101Aa1 to flow out through the first outlet 101Ab1 and the second outlet 101Ab2, and allows the fluid flowing into the flow path component 50A from the second inlet 101Aa2 to flow out through the third outlet 101Ab3 and the fourth outlet 101Ab4.

[0069] As Figure 7 shown, the fluid equipment system 100A of the present embodiment includes: a first valve 10A, a second valve 20A, a third valve 30A, a fourth valve 40A, and a flow path component 50A.

[0070] As Figure 8 shown, the fluid equipment system 100A of the present embodiment is a device that can allow the fluid (such as pure water or hydrofluoric acid solution) supplied to the first inlet 101Aa1 to flow out through at least one of the first outlet 101Ab1 and the second outlet 101Ab2, and allow the fluid supplied to the second inlet 101Aa2 to flow out through at least one of the third outlet 101Ab3 and the fourth outlet 101Ab4.

[0071] The first valve 10A is a flow control valve that switches the inflow state of the fluid from the first flow path 210 to the second flow path 220. As Figure 8 shown, the first flow path 210 is a flow path that allows the fluid to flow from the first inlet 101Aa1 through the branch position B1 to the first outlet 101Ab1.

[0072] Figure 9 is Figure 7 a D-D cross-sectional view of the fluid equipment system 100A shown. Figure 11 is Figure 7 an F-F cross-sectional view of the fluid equipment system 100A shown. As Figure 9 and Figure 11 shown, the first valve 10A includes an adjustment mechanism 12A for adjusting the flow rate of the fluid flowing from the first flow path 210 into the second flow path 220. The adjustment mechanism 12A adjusts the flow rate of the fluid flowing from the first flow path 210 into the second flow path 220 by bringing the valve body portion 11A closer to or separating from the valve seat portion 51A of the flow path component 50A along the vertical direction VD.

[0073] The second valve 20A is a shut-off valve that switches the flow state of the fluid flowing in the second flow path 220. AsFigure 8 As shown, the second flow path 220 is a flow path through which fluid flows from the branch position B1 via the first valve 10A and the second valve 20A to the second flow outlet 101Ab2.

[0074] As Figure 9 shown, the second valve 20A includes a switching mechanism 22A. The switching mechanism 22A makes the valve body portion 21A contact or separate from the valve seat portion 52A of the flow path member 50A along the vertical direction VD, thereby switching the flow state in which fluid flows from the first flow path 210 via the second flow path 220 to the second flow outlet 101Ab2 and the shut-off state in which fluid does not flow from the first flow path 210 via the second flow path 220 to the second flow outlet 101Ab2.

[0075] The third valve 30A is a flow rate regulating valve that switches the inflow state of fluid from the third flow path 230 to the fourth flow path 240. As Figure 8 shown, the third flow path 230 is a flow path through which fluid flows from the second flow inlet 101Aa2 via the branch position B2 to the third flow outlet 101Ab3.

[0076] Figure 10 is Figure 7 a cross-sectional view taken along the E-E direction of the fluid equipment system 100A shown. As Figure 10 and Figure 11 shown, the third valve 30A includes an adjusting mechanism 32A for adjusting the flow rate of fluid flowing from the third flow path 230 to the fourth flow path 240. The adjusting mechanism 32A makes the valve body portion 31A approach or separate from the valve seat portion 53A of the flow path member 50A along the vertical direction VD, thereby adjusting the flow rate of fluid flowing from the third flow path 230 to the fourth flow path 240.

[0077] The fourth valve 40A is a shut-off valve that switches the flow state of fluid flowing in the fourth flow path 240. As Figure 8 shown, the fourth flow path 240 is a flow path through which fluid flows from the branch position B2 via the third valve 30A and the fourth valve 40A to the fourth flow outlet 101Ab4.

[0078] Figure 12 is Figure 7 a cross-sectional view taken along the G-G direction of the fluid equipment system 100A shown. As Figure 10 and Figure 12As shown, the fourth valve 40A includes a switching mechanism 42A. The switching mechanism 42A makes the valve body portion 41A contact or separate from the valve seat portion 54A of the flow path component 50A along the vertical direction VD, thereby switching between a flow state in which fluid flows from the third flow path 230 through the fourth flow path 240 to the fourth flow outlet 101Ab4 and a shut-off state in which fluid does not flow from the third flow path 230 through the fourth flow path 240 to the fourth flow outlet 101Ab4.

[0079] In the fluid equipment system 100A of the present embodiment, the flow rate of the fluid flowing from the first flow path 210 into the second flow path 220 is adjusted by the first valve 10A, and whether the fluid flowing in from the first inlet 101Aa1 flows out from the second outlet 101b2 is switched by the second valve 20A. In addition, in the fluid equipment system 100A, the flow rate of the fluid flowing from the third flow path 230 into the fourth flow path 240 is adjusted by the third valve 30A, and whether the fluid flowing in from the second inlet 101Aa2 flows out from the fourth outlet 101b4 is switched by the fourth valve 40A.

[0080] The flow path component 50A is a component provided on the installation surface S with the base components 61A, 62A, 63A, and 64A interposed therebetween. The flow path component 50A is formed of, for example, a fluororesin material. As Figure 9 and Figure 11 shown, the flow path component 50A is configured in a state of being sandwiched between the base component 61A and the first valve 10A. As Figure 9 and Figure 12 shown, the flow path component 50A is configured in a state of being sandwiched between the base component 62A and the second valve 20A. As Figure 10 and Figure 11 shown, the flow path component 50A is configured in a state of being sandwiched between the base component 63A and the third valve 30A. As Figure 10 and Figure 12 shown, the flow path component 50A is configured in a state of being sandwiched between the base component 64A and the fourth valve 40A.

[0081] The base components 61A, 62A, 63A, and 64A are respectively fixed to the installation surface S by fastening bolts (not shown). In addition, the flow path component 50A is respectively fixed to the base components 61A, 62A, 63A, and 64A by fastening bolts (not shown).

[0082] Figure 13 is Figure 7 a top view of the flow path component 50A shown. As Figure 13As shown, the flow path component 50A has a first region A1 where the first valve 10A is provided, a second region A2 where the second valve 20A is provided, and a third region A3 where the third valve 30A is provided when observing the setting surface S in a plan view. The first region A1 is a rectangular region with vertices at positions P11, P12, P21, and P22. The second region A2 is a rectangular region with vertices at positions P12, P13, P22, and P23. The third region A3 is a rectangular region with vertices at positions P21, P22, P31, and P32. The fourth region A4 is a rectangular region with vertices at positions P22, P23, P32, and P33.

[0083] As Figure 13 shown, the second region A2 is a region adjacent to the first region A1 in the first direction DR1 parallel to the setting surface S and coinciding with the first region A1 in the second direction DR2 parallel to the setting surface S and orthogonal to the first direction DR1. The third region A3 is a region coinciding with the first region A1 in the first direction DR1 and adjacent to the first region A1 in the second direction DR2. The fourth region A4 is a region coinciding with the second region A2 in the first direction DR1 and coinciding with the third region A3 in the second direction DR2.

[0084] In the first region A1, a first fluid inlet 101Aa1 for fluid to flow in and a first fluid outlet 101Ab1 for the fluid flowing in from the first fluid inlet 101Aa1 to flow out to the outside along one side of the first direction DR1 ( Figure 13 the left side) are formed. In the second region A2, a second fluid inlet 101Aa2 for fluid to flow in and a second fluid outlet 101Ab2 for the fluid to flow out to the outside along the other side of the first direction DR1 ( Figure 13 the right side) are formed. In the third region A3, a third fluid outlet 101Ab3 for the fluid to flow out to the outside along one side of the first direction DR1 is formed. In the fourth region A4, a fourth fluid outlet 101Ab4 for the fluid to flow out to the outside along the other side of the first direction DR1 is formed.

[0085] The first flow path 210 is formed in the first region A1 in such a way as to guide the fluid flowing in from the first fluid inlet 101Aa1 to the first fluid outlet 101Ab1. The first flow path 210 has an outflow flow path 210b that connects the first fluid inlet 101Aa1 and the first fluid outlet 101Ab1.

[0086] The second flow path 220 is formed in the first region A1 and the second region A2 so as to guide the fluid flowing in from the first valve 10A to the second flow outlet 101Ab2 via the second valve 20A. The second flow path 220 has a valve chamber 220a that houses the valve body portion 21A, a connecting flow path 220b that connects the valve chamber 220a and the valve chamber 210a, and an outflow flow path 220c that connects the valve chamber 220a and the second flow outlet 101Ab2.

[0087] The third flow path 230 is formed in the second region A2, the third region A3, and the fourth region A4 so as to guide the fluid flowing in from the second inlet 101Aa2 to the third outlet 101Ab3. The third flow path 230 is a flow path that connects the second inlet 101Aa2 and the third outlet 101Ab3. In the fourth region A4, the third flow path 230 is disposed below the outflow flow path 240c of the fourth flow path 240 in the vertical direction VD.

[0088] The fourth flow path 240 is formed in the third region A3 and the fourth region A4 so as to guide the fluid flowing in from the third valve 30A to the fourth outlet 101Ab4 via the fourth valve 40A. The fourth flow path 240 has a valve chamber 240a that houses the valve body portion 41A, a connecting flow path 240b that connects the valve chamber 240a and the valve chamber 240d, an outflow flow path 240c that connects the valve chamber 240a and the fourth outlet 101Ab4, and a valve chamber 240d that houses the valve body portion 31A of the third valve 30A.

[0089] Instead of Figure 13 the shown flow path member 50A, Figure 14 the modified example of the flow path member 50B shown in Figure 14 is adopted. Figure 14 The shown flow path member 50B is different from Figure 13 the shown flow path member 50A in that after the fluids flowing out from the second outlet 101Ab2 and the fourth outlet 101Ab4 merge inside, they are guided to a single fifth outlet 101Ab5. By adopting the flow path member 50B instead of the flow path member 50A, the fluids flowing out from the second outlet 101Ab2 and the fourth outlet 101Ab4 can be discharged to the outside from the single fifth outlet 101Ab5.

[0090] In the fluid equipment system 100A according to the present embodiment, since the first valve 10A, the second valve 20A, the third valve 30A, and the fourth valve 40A are respectively arranged in four adjacent regions, namely the first region A1, the second region A2, the third region A3, and the fourth region A4, the size of the fluid equipment system 100A can be made smaller compared with the case where a part of them is arranged in non-adjacent regions.

[0091] In addition, in the fluid equipment system 100A according to the present embodiment, the fluid flows out from the first outlet 101Ab1 formed in the first region A1 of the flow path member 50A and the third outlet 101Ab3 formed in the third region A3 of the flow path member 50A on one side of the first direction DR1, and the fluid flows out from the second outlet 101Ab2 formed in the second region A2 of the flow path member 50A and the fourth outlet 101Ab4 formed in the fourth region A4 of the flow path member 50A on the other side of the first direction DR1. The respective directions in which the fluid flows out from the flow path member 50A are the first direction DR1, and the outflow directions are divided into one side and the other side. Therefore, the size of the fluid equipment system 100A can be made smaller compared with the case where they are set to different directions or only allowed to flow out to one side or the other side.

[0092] Symbolic description

[0093] 10, 10A, first valve;

[0094] 11, 11A, valve body part;

[0095] 12, switching mechanism;

[0096] 12A, adjusting mechanism;

[0097] 20, 20A, second valve;

[0098] 21, 21A, valve body part;

[0099] 22, 22A, switching mechanism;

[0100] 30, 30A, third valve;

[0101] 31, 31A, valve body part;

[0102] 32, 32A, adjusting mechanism;

[0103] 40, fluid equipment;

[0104] 50, 50A, flow path member;

[0105] 51, 52, 53, valve seat part;

[0106] 61, 61A, 62, 62A, 63, 63A, 64A, base member;

[0107] 100, 100A, fluid equipment system;

[0108] 101a, fluid inlet;

[0109] 101Aa1, first fluid inlet;

[0110] 101Aa2, second fluid inlet;

[0111] 101b1, 101Ab1, first fluid outlet;

[0112] 101b2, 101Ab2, second fluid outlet;

[0113] 101b3, 101Ab3, third fluid outlet;

[0114] 110, 210, first flow channel;

[0115] 110a, 120a, 210a, 220a, 240a, 240d, valve chamber;

[0116] 110b, inlet flow channel;

[0117] 110c, outlet flow channel;

[0118] 120, second flow channel;

[0119] 120b, inlet flow channel;

[0120] 120c, outlet flow channel;

[0121] 130, third flow channel;

[0122] 130b, connecting flow channel;

[0123] 130c, outlet flow channel;

[0124] 131, connecting part;

[0125] A1, first region;

[0126] A2, second region;

[0127] A3, third region;

[0128] A4, fourth region;

[0129] B1, B2, branching position;

[0130] DR1, first direction;

[0131] DR2, second direction;

[0132] VD, vertical direction;

[0133] S, setting surface.

Claims

1. A fluid equipment system, comprising: A flow channel component, which is disposed on the setting surface; a first valve disposed in the first region of the flow channel member when the installation surface is viewed from above and configured to switch a flow state of a fluid flowing through the first flow channel; a second valve disposed in the second region of the flow channel member when the installation surface is viewed from above and configured to switch a flow state of a fluid flowing through the second flow channel; a third valve which is disposed in a third region of the flow channel member when the installation surface is viewed from above and switches an inflow state of the fluid from the third flow channel to the second flow channel; a fluid device for supplying fluid to the flow channel component, The second region is a region that coincides with the first region in a first direction parallel to the installation surface and is adjacent to the first region in a second direction parallel to the installation surface and orthogonal to the first direction. The third region is a region adjacent to the second region in the first direction and coincident with the second region in the second direction. The first region includes an inlet for allowing a fluid to flow in from the fluid device and a first outlet for allowing the fluid flowing in from the inlet to flow out to the outside along the first direction. A second outlet is formed in the second region to allow the fluid to flow out to the outside along the first direction. A third outflow port is formed in the third region for allowing the fluid to flow out to the outside along the first direction. The first flow path is formed in the first region so as to guide the fluid flowing in from the inlet to the first outlet via the first valve. The second flow path is formed in the second region and the third region so as to guide the fluid flowing in from the third valve to the second outflow port via the second valve. The third flow channel is formed in the first region, the second region, and the third region so as to guide the fluid flowing in from the first flow channel to the third outflow port. The inlet is connected to the fluid device and opens toward a fourth region that coincides with the third region in the first direction and coincides with the first region in the second direction.

2. The fluid device system according to claim 1, wherein: The first valve switches between a first outflow state in which the fluid flows from the inlet to the first outlet and a first flow-blocking state in which the fluid does not flow from the inlet to the first outlet. The second valve switches between a second outflow state in which the fluid flows from the third flow channel to the second outflow port and a second flow cutoff state in which the fluid does not flow from the third flow channel to the second outflow port. The third valve adjusts a flow rate of the fluid flowing from the third flow channel into the second flow channel in the second outflow state.

3. The fluid device system according to claim 1 or claim 2, wherein: The third flow channel is arranged in the second region below the second flow channel in the vertical direction.

4. A fluid equipment system, comprising: A flow channel component, which is disposed on the setting surface; a first valve disposed in the first region of the flow channel member when the installation surface is viewed from above and switches an inflow state of the fluid from the first flow channel to the second flow channel; a second valve disposed in the second region of the flow channel member when the installation surface is viewed from above and configured to switch a flow state of the fluid flowing through the second flow channel; a third valve, which is disposed in a third region of the flow channel member when the installation surface is viewed from above and switches an inflow state of the fluid from the third flow channel to the fourth flow channel; a fourth valve which is disposed in a fourth region of the flow channel member when the installation surface is viewed from above and switches a flow state of a fluid flowing through the fourth flow channel, The second region is a region adjacent to the first region in a first direction parallel to the installation surface and coincident with the first region in a second direction parallel to the installation surface and orthogonal to the first direction. The third region is a region that coincides with the first region in the first direction and is adjacent to the first region in the second direction. The fourth region is a region that coincides with the second region in the first direction and coincides with the third region in the second direction. The first region includes a first inlet for inflow of a fluid and a first outlet for allowing the fluid flowing in from the first inlet to flow out to the outside along one side of the first direction. The second region includes a second inlet for inflow of the fluid and a second outlet for outflow of the fluid along the other side of the first direction. A third outflow port is formed in the third region so as to allow the fluid to flow out to the outside along the one side of the first direction. A fourth outflow port is formed in the fourth region for allowing the fluid to flow out to the outside along the other side of the first direction. The first flow channel is formed in the first region so as to guide the fluid flowing in from the first inlet to the first outlet. The second flow path is formed in the first region and the second region so as to guide the fluid flowing in from the first valve to the second outflow port via the second valve. The third flow channel is formed in the second region, the third region, and the fourth region so as to guide the fluid flowing in from the second inlet to the third outlet. The fourth flow path is formed in the third region and the fourth region so as to guide the fluid flowing in from the third valve to the fourth outflow port via the fourth valve.

5. The fluid device system according to claim 4, wherein: The first valve adjusts the flow rate of the fluid flowing from the first flow channel to the second flow channel. The second valve switches between a state in which the fluid flows out from the second outlet and a state in which the fluid does not flow out from the second outlet. The third valve adjusts the flow rate of the fluid flowing from the third flow channel to the fourth flow channel. The fourth valve switches between a state in which the fluid flows out from the fourth outflow port and a state in which the fluid does not flow out from the fourth outflow port.

6. The fluid equipment system according to claim 4 or claim 5, wherein: The third flow channel is arranged in the fourth region below the fourth flow channel in the vertical direction.

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