Vibration isolation air floating platform based on optical feedback and implementation process of vibration isolation air floating platform

Abstract

The invention provides a vibration isolation air floating platform based on optical feedback and an implementation process of the vibration isolation air floating platform, and relates to the field of optical imaging precise instruments. According to the vibration isolation air floating platform based on the laser ranging feedback, the laser ranging sensor is adopted as a monitoring feedback element of the air spring, and the vibration isolation air floating platform based on the laser ranging feedback is designed. The levelness deviation (including being parallel to the reference horizontal plane and forming a specific included angle with the reference horizontal plane) of the current air floating platform can be monitored in real time, the vibration isolation air floating assembly can be controlled in a remote mode, and therefore fine adjustment of the supporting table top is achieved. Moreover, the vibration isolation air flotation system can be flexibly assembled, is small in size, can serve as a supporting assembly to be integrated into an optical imaging precise instrument system, has the two technical advantages of buffering vibration isolation and remote control at the same time, and can be widely applied and popularized.

Description

Technical Field

[0001] The present invention relates to the field of optical imaging precision instruments, and particularly to a vibration isolation air-bearing platform based on optical feedback and its implementation process. Background Art

[0002] In the field of optical imaging precision instruments, vibration control is a key and non-negligible technical issue. A harsh vibration environment will seriously degrade the performance of optical precision instruments. Therefore, vibration isolation measures are required for all optical precision instruments.

[0003] In related technologies, vibration control devices mainly include metal types, damping types, rubber types, and air-bearing types. When facing a low-frequency vibration environment, installing an air-bearing platform for precision instrument equipment is an effective vibration control measure. Currently, air-bearing platforms usually use air spring isolators as vibration isolation components and granite, marble, or cast iron as the platform body. Such air-bearing platforms are bulky and heavy. The adjustment of the horizontal level of the air-bearing platform is achieved through devices such as height valves. The height valve adjusts the gas exchange in the air spring according to the vibration applied to the platform surface, changes the stiffness of the air spring, and thus realizes the adjustment of the horizontal level of the platform surface. This air-bearing control method uses mechanical devices for detection and adjustment, which is generally completed during the erection of the air-bearing system and becomes a closed type after completion, without a remote adjustment function.

[0004] However, the above-mentioned air-bearing platform is bulky and often appears as an accessory support device for precision instrument equipment, making it difficult to integrate with the main body device of the precision instrument, which is very inconvenient for optical imaging instruments that only require vibration isolation for local systems. In addition, in the actual application of optical imaging systems, there is often a need for fine-tuning and real-time monitoring of the horizontal level of the air-bearing platform surface. Especially in the case where harmful factors such as laser or radiation are generated inside the instrument during operation, the operator can only operate remotely, and mechanical adjustment devices obviously cannot meet such requirements. Summary of the Invention

[0005] (I) Technical Problems to be Solved

[0006] In view of the deficiencies of the prior art, the present invention provides a vibration isolation air-bearing platform based on optical feedback and its implementation process, solving the technical problems of the existing air-bearing platform being bulky and not supporting remote control.

[0007] (II) Technical Solutions

[0008] To achieve the above objectives, the present invention is realized through the following technical solutions:

[0009] A vibration isolation air-bearing platform based on optical feedback, characterized by comprising a support platform, a plurality of vibration isolation air-bearing components, and an air-bearing platform surface;

[0010] Each vibration isolation air bearing assembly is arranged between the support platform and the air bearing tabletop, and is used to remotely adjust the air bearing tabletop based on laser ranging.

[0011] Preferably, the vibration isolation air bearing platform further includes a gas supply device, an information processing unit, a communication cable, and a gas pipeline. Any one of the vibration isolation air bearing assemblies includes a mounting base plate, a laser ranging sensor, an air spring, and a pneumatic control valve;

[0012] The gas supply device, the pneumatic control valve, and the air spring are sequentially connected through the gas pipeline;

[0013] The information processing unit is respectively connected to the laser ranging sensor and the pneumatic control valve through the communication cable;

[0014] The mounting base plate is arranged on the support platform;

[0015] The laser ranging sensor, the air spring, and the pneumatic control valve are all arranged between the mounting base plate and the air bearing tabletop. The upper end surface of the air spring is fixedly connected to the air bearing tabletop;

[0016] Each laser ranging sensor is used to measure the distance between its laser emission point and the upper end surface of the corresponding air spring, and transmit it to the corresponding information processing unit; each information processing unit is used to generate a remote control signal based on the distance and transmit it to the corresponding pneumatic control valve; each pneumatic control valve is used to adjust the internal air pressure of the corresponding air spring based on the remote control signal, so as to jointly adjust the height and flatness deviation of the air bearing tabletop.

[0017] An implementation process of a vibration isolation air bearing platform as described above. The vibration isolation air bearing platform is provided with four vibration isolation air bearing assemblies. The implementation process includes:

[0018] S1. After the installation of the vibration isolation air bearing platform is completed, initial leveling is carried out, including:

[0019] Select the geometric center of the upper end surface of one vibration isolation air bearing assembly as the coordinate origin, and establish an orthogonal coordinate system OXYZ;

[0020] Based on the physical dimensions of the support platform, determine the coordinate system parameters L and W, and respectively obtain the coordinates A(0, 0, 0), B(0, W, 0), C(L, W, 0), D(L, 0, 0) of the geometric centers of the upper end surfaces of the air springs of the vibration isolation air bearing assemblies;

[0021] Based on the coordinates of the three geometric centers, obtain the equation of the reference horizontal plane P;

[0022] S2. Set the measured distance of each laser ranging sensor in the air bearing vibration isolation system in the current leveling state to zero;

[0023] S3. In the control system software, select the vibration isolation air bearing assembly as the air floating point and the vibration isolation air bearing assembly as the follow-up monitoring point;

[0024] S4. Set the stability parameters of the air floating vibration isolation system, including obtaining the target height H of the vibration isolation air floating component based on the task a0 , H b0 , H c0 , H d0 , and its corresponding stability coefficient K a , K b , K c , K d , and calculate the stability condition of the air floating vibration isolation system;

[0025] S5. Start the air floating vibration isolation system. After the system meets the stability condition, measure the actual distance H measured by each laser range finder a , H b , H c , H d , and respectively obtain the coordinates of the geometric center of the upper end face of the air spring of the vibration isolation air floating component after floating A1(0, 0, H a ), B1(0, W, H b ), C1(L, W, H c ), D1(L, 0, H d ); Based on the coordinates of the three geometric centers after floating, obtain the equation of the current plane P1, and calculate the angle θ between the current plane P1 and the reference horizontal plane P;

[0026] S6. According to the angle θ between the current plane P1 and the reference horizontal plane P, determine whether the flatness deviation required by the task is met. If so, complete the system setting and maintain the current state until the task is completed. Otherwise, transfer to S3 and repeat the above operations.

[0027] Preferably, after calculating the angle θ between the current plane P1 and the reference horizontal plane P, in S5, the effect diagram of the current plane P1 and the reference horizontal plane P and the angle θ between the two are also visually displayed on the interface of the control system software.

[0028] Preferably, the determining the target height H of the vibration isolation air floating component based on the task a0 , H b0 , H c0 , H d0 , includes:

[0029] Directly determine the target height H of the vibration isolation air floating component based on the task a0 , H b0 , H c0 , and obtain the coordinates of the target points A0, B0, C0 A1(0, 0, H a0 ), B1(0, W, H b0 ), C1(L, W, H c0 );

[0030] Calculate the equation of the target plane P0, M0x + N0y + S0z + T0 = 0, where n0 is a normal vector of the target plane P0, (M0, N0, S0) are its coordinates, and T0 is the first constant, which are calculated respectively by the following formulas:

[0031] M0 = W(H c0 -H b0 )

[0032] N0 = L(H b0 -H a0 )

[0033] S0 = -LW

[0034] T0 = LWH a0

[0035] Based on the equation of the target plane P0, calculate the target height H of the vibration isolation air floating assembly d0 value: H d0 = H c0 -H b0 +H a0 .

[0036] Preferably, the stable condition means: H i0 (1 - K i ) ≤ H i ≤ H i0 (1 + K i ), where i = a, b, c, d.

[0037] Preferably, obtaining the equation of the current plane P1 based on the coordinates of the three geometric centers after floating, and calculating the angle θ between the current plane P1 and the reference horizontal plane P includes:

[0038] Referring to the calculation process of the equation of the target plane P0, the equation of the current plane P1 is expressed as:

[0039] W(H c -H b )x + L(H b -H a )y - LWz + LW H a = 0

[0040] Calculate the angle θ between the current plane P1 and the reference horizontal plane P:

[0041]

[0042] where, arccos is the inverse cosine function.

[0043] (III) Beneficial effects

[0044] The present invention provides a vibration isolation air-bearing platform based on optical feedback and its implementation process. Compared with the prior art, it has the following beneficial effects:

[0045] The vibration isolation air-bearing platform provided by the present invention at least includes a support table, a plurality of vibration isolation air-bearing components and an air-bearing tabletop; each vibration isolation air-bearing component is arranged between the support table and the air-bearing tabletop and is used to remotely adjust the air-bearing tabletop based on laser ranging. By using laser ranging to replace the traditional mechanical adjustment method, the height and level deviation of the air-bearing tabletop can be remotely adjusted and monitored; and the vibration isolation air-bearing system can be flexibly assembled, is small in size, and can be integrated into an optical imaging precision instrument system as a support component, and is suitable for scenarios where local systems require vibration isolation. Description of the Drawings

[0046] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0047] Figure 1 It is a schematic model diagram of a vibration isolation air-bearing platform based on optical feedback provided by an embodiment of the present invention;

[0048] Figure 2 It is a schematic model diagram of a vibration isolation air-bearing component provided by an embodiment of the present invention;

[0049] Figure 3 It is a schematic coordinate diagram provided by an embodiment of the present invention. Detailed Embodiments

[0050] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention are clearly and completely described. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts fall within the protection scope of the present invention.

[0051] By providing a vibration isolation air-bearing platform based on optical feedback and its implementation process in the embodiments of the present application, the technical problem that the existing air-bearing platform is bulky and does not support remote control is solved.

[0052] The overall idea of the technical solutions in the embodiments of the present application to solve the above technical problems is as follows:

[0053] In the embodiments of the present invention, a laser ranging sensor is used as a monitoring and feedback element of the air spring, and a vibration isolation air-bearing platform based on laser ranging feedback is designed. The vibration isolation air-bearing system is integrated and controlled by an information processing unit. It can not only monitor the level deviation of the current air-bearing platform in real time (including being parallel to the reference horizontal plane and at a specific angle), but also control the vibration isolation air-bearing components remotely, so as to realize the fine adjustment of the support tabletop. Moreover, the vibration isolation air-bearing system can be flexibly assembled, is small in size, can be integrated into an optical imaging precision instrument system as a support component, and has two major technical advantages of buffering and vibration isolation and remote control, and can be widely promoted and applied.

[0054] To better understand the above technical solutions, the above technical solutions will be described in detail below in conjunction with the accompanying drawings of the specification and specific embodiments.

[0055] Embodiment 1:

[0056] As Figures 1 - 2 shown, an embodiment of the present invention provides a vibration isolation air-bearing platform based on optical feedback, which is characterized in that it includes a support table 1, a plurality of vibration isolation air-bearing components 2, an air-bearing tabletop 3, a gas supply device 4, an information processing unit 5, a communication cable 6 and a gas pipeline 7; any vibration isolation air-bearing component 2 includes a mounting base plate 8, a laser ranging sensor 9, an air spring 10 and a pneumatic control valve 11.

[0057] Each vibration isolation air-bearing component 2 is arranged between the support table 1 and the air-bearing tabletop 3 for remotely adjusting the air-bearing tabletop 3 based on laser ranging.

[0058] The gas supply device 4, the pneumatic control valve 11 and the air spring 10 are sequentially connected through the gas pipeline 7.

[0059] The information processing unit 5 is respectively connected to the laser ranging sensor 9 and the pneumatic control valve 11 through the communication cable 6. Exemplarily, the communication cable 6 can be divided into a laser ranging cable 6a and a valve control cable 6b here. The information processing unit 5 is connected to the laser ranging sensor 9 through the laser ranging cable 6a, and the information processing unit 5 is connected to the pneumatic control valve 11 through the valve control cable 6b, so as to realize data exchange and control signal transmission.

[0060] The mounting base plate 8 can be arranged on the support table 1 by means of threaded connection or the like.

[0061] The laser ranging sensor 9, the air spring 10 and the pneumatic control valve 11 are all arranged between the mounting base plate 8 and the air-bearing tabletop 3, and the upper end surface of the air spring 10 and the air-bearing tabletop 3 can be fixedly connected by means of threaded connection or the like.

[0062] Each laser ranging sensor 9 is used to measure the distance between its laser emission point and the upper end surface of the corresponding air spring 10, and transmits it to the corresponding information processing unit 5 through the laser ranging cable 6a.

[0063] Each information processing unit 5 is used to generate a remote control signal based on the distance and transmit it to the corresponding pneumatic control valve 11 through the pneumatic valve control cable 6b.

[0064] Each pneumatic control valve 11 is used to adjust the internal air pressure of the corresponding air spring 10 based on the remote control signal through the gas pipeline 7, so as to jointly adjust the height and flatness deviation of the air floating table surface 3.

[0065] The vibration isolation air floating system provided by the embodiment of the present invention is small in size, uses laser ranging to replace the traditional mechanical adjustment method, and is integrally controlled by the information processing unit, supporting remote control, which greatly facilitates the use of technicians.

[0066] Embodiment 2:

[0067] The embodiment of the present invention provides an implementation process of a vibration isolation air floating platform as described in Embodiment 1. Here, it is defined that the vibration isolation air floating platform is provided with four vibration isolation air floating components 2a, 2b, 2c, 2d, and the following Figure 3 is taken as an example of the coordinate relationship shown for illustration:

[0068] S1. After the installation of the vibration isolation air floating platform is completed, initial leveling is carried out, including:

[0069] Select the geometric center of the upper end surface of the air spring 10 of a vibration isolation air floating component 2a as the coordinate origin to establish an orthogonal coordinate system OXYZ;

[0070] Based on the physical dimensions of the support table 1, determine the coordinate system parameters L and W, and respectively obtain the coordinates A(0, 0, 0), B(0, W, 0), C(L, W, 0), D(L, 0, 0) of the geometric centers of the upper end surfaces of the air springs 10 of the vibration isolation air floating components 2a, 2b, 2c, 2d;

[0071] Based on the coordinates of the three geometric centers, obtain the equation of the reference horizontal plane P.

[0072] S2. Set the measurement distance of each laser ranging sensor 9 in the air floating vibration isolation system in the current leveling state to zero.

[0073] S3. In the control system software, select the vibration isolation air floating components 2a, 2b, 2c as the air floating points, and use the vibration isolation air floating component 2d as the follow-up monitoring point.

[0074] S4. Set the stability parameters of the air floating vibration isolation system, including obtaining the target height H of the vibration isolation air floating components 2a, 2b, 2c, 2d based on the task a0, H b0 , H c0 , H d0 , and its corresponding stability coefficient K a , K b , K c , K d , and calculate the stability condition of the air floating vibration isolation system.

[0075] Specifically, the target heights H a0 , H b0 , H c0 , H d0 of the air floating vibration isolation components 2a, 2b, 2c, 2d determined based on the task include:

[0076] Directly determine the target heights H a0 , H b0 , H c0 of the air floating vibration isolation components 2a, 2b, 2c based on the task, and obtain the coordinates A1(0, 0, H a0 ), B1(0, W, H b0 ), C1(L, W, H c0 ) of the target points A0, B0, C0;

[0077] Calculate the equation M0x + N0y + S0z + T0 = 0 of the target plane P0, where n0 is a normal vector of the target plane P0, (M0, N0, S0) are its coordinates, and T0 is the first constant, which are calculated respectively by the following formulas:

[0078] M0 = W(H c0 - H b0 )

[0079] N0 = L(H b0 - H a0 )

[0080] S0 = -LW

[0081] T0 = LWH a0

[0082] Based on the equation of the target plane P0, calculate the value of the target height H d0 of the air floating vibration isolation component 2d: H d0 = H c0 - H b0 + H a0 .

[0083] Furthermore, since H a0 , H b0 , H c0 are the air floating point values of the control air spring 10, H d0For the value of the follow-up monitoring point, a stability coefficient K needs to be set for it in this step. a , K b , K c , K d , generally, the value of K d should be greater than the other three. If the values of the four laser distance sensors after floating (represented by the geometric center coordinates of the upper end faces of the air springs 10 of the vibration isolation air floating components 2a, 2b, 2c, 2d) are H a , H b , H c , H d , then the stability conditions of the air floating vibration isolation system are as follows:

[0084] H i0 (1 - K i ) ≤ H i ≤ H i0 (1 + K i )

[0085] where i = a, b, c, d.

[0086] S5. Start the air floating vibration isolation system. After the system meets the stability conditions, measure the actual distances H a , H b , H c , H d through each laser distance sensor 9 respectively, and obtain the geometric center coordinates of the upper end faces of the air springs 10 of the vibration isolation air floating components 2a, 2b, 2c, 2d after floating as A1(0, 0, H a ), B1(0, W, H b ), C1(L, W, H c ), D1(L, 0, H d ); Based on the coordinates of the three geometric centers after floating, obtain the equation of the current plane P1 as Mx + Ny + Sz + T = 0, and calculate the angle θ between the current plane P1 and the reference horizontal plane P, where n is a normal vector of the plane P, (M, N, S) are its coordinates, and T is the second constant.

[0087] Specifically, the obtaining of the equation of the current plane P1 based on the coordinates of the three geometric centers after floating and the calculation of the angle θ between the current plane P1 and the reference horizontal plane P include:

[0088] Referring to the calculation process of the equation of the target plane P0 in the previous step S4, the equation of the current plane P1 can be obtained and expressed as:

[0089] W(H c - H b )x + L(H b - H a)y - LWz + LW H a = 0

[0090] Calculate the angle θ between the current plane P1 and the reference horizontal plane P:

[0091]

[0092] where arccos is the inverse cosine function.

[0093] To further facilitate the operator's control of the air - floating vibration isolation system, in an optional embodiment, after calculating the angle θ between the current plane P1 and the reference horizontal plane P, in step S5, the effect diagram of the current plane P1 and the reference horizontal plane P and the angle θ between the two are also visually displayed on the interface of the control system software.

[0094] S6. According to the angle θ between the current plane P1 and the reference horizontal plane P, determine whether the flatness deviation required by the task is satisfied. If so, complete the system setting and maintain the current state until the task is completed; otherwise, transfer to S3 and repeat the above operations.

[0095] So far, the embodiment of the present invention has completed all the content of the implementation process of the vibration isolation air - floating platform based on optical feedback.

[0096] In summary, compared with the prior art, the following beneficial effects are achieved:

[0097] 1. In the embodiment of the present invention, the vibration isolation air - floating component uses a laser range - finder sensor as the signal acquisition element and a pneumatic control valve as the control execution element. The two exchange data and transmit control signals with the information processing unit through a communication cable, forming a vibration isolation air - floating system that can remotely control the height and flatness deviation of the air - floating platform.

[0098] 2. In the embodiment of the present invention, three vibration isolation air - floating components can be arbitrarily selected as the air - floating points, and the fourth vibration isolation air - floating component is used as the follow - up monitoring point. A stability coefficient is set for the four vibration isolation air - floating components, and the stability efficiency control of the vibration isolation air - floating system is realized through the adjustment of the stability coefficient.

[0099] 3. In the embodiment of the present invention, laser range - finder sensors are provided on all four vibration isolation air - floating components. The sensor data of three air - floating points can be taken to generate the equation of the current plane, and the angle between this plane and the reference horizontal plane is calculated. After comparing with the flatness deviation required by the task, a judgment can be accurately made on whether it is necessary to finely adjust the support table.

[0100] It should be noted that in this text, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or also includes elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "comprising an..." does not exclude the presence of additional identical elements in the process, method, article or device comprising the said element.

[0101] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A vibration isolation air flotation platform based on optical feedback, characterized in that: It comprises a support platform (1), a plurality of vibration isolation air flotation components (2) and an air flotation table top (3); Each vibration isolation air flotation component (2) is arranged between the support platform (1) and the air flotation table (3), and is used for remotely adjusting the air flotation table (3) based on laser distance measurement.

2. The vibration isolation air flotation platform according to claim 1, characterized in that: The vibration isolation air flotation platform also includes an air supply device (4), an information processing unit (5), a communication cable (6) and a gas pipeline (7), and any vibration isolation air flotation component (2) includes a mounting base plate (8), a laser distance sensor (9), an air spring (10) and an air pressure control valve (11); The air supply device (4), the air pressure control valve (11) and the air spring (10) are connected in sequence through a gas pipeline (7); The information processing unit (5) is connected to the laser distance measuring sensor (9) and the air pressure control valve (11) respectively through a communication cable (6); The mounting base plate (8) is arranged on the supporting platform (1); The laser distance measuring sensor (9), the air spring (10) and the air pressure control valve (11) are all arranged between the mounting base plate (8) and the air floating table (3), and the upper end surface of the air spring (10) is fixedly connected to the air floating table (3); Each laser distance measuring sensor (9) is used to measure the distance between its laser emission point and the upper end surface of the corresponding air spring (10), and transmit the distance to the corresponding information processing unit (5); each information processing unit (5) is used to generate a remote control signal based on the distance, and transmit the remote control signal to the corresponding air pressure control valve (11); each air pressure control valve (11) is used to adjust the internal air pressure of the corresponding air spring (10) based on the remote control signal, so as to jointly adjust the height and flatness deviation of the air-floating table (3).

3. A process for implementing the vibration isolation air flotation platform as claimed in claim 2, characterized in that: The vibration isolation air flotation platform is provided with four vibration isolation air flotation components (2a, 2b, 2c, 2d), and the implementation process includes: S 1. After the vibration isolation air flotation platform is installed, perform initial leveling, including: Selecting the geometric center of the upper end surface of an air spring (10) of a vibration isolation air flotation component (2a) as the coordinate origin, and establishing an orthogonal coordinate system OXYZ; Determine coordinate system parameters L and W based on the physical dimensions of the support platform (1), and obtain coordinates A (0, 0, 0), B (0, W, 0), C (L, W, 0), and D (L, 0, 0) of the geometric center of the upper end surface of the air spring (10) of the vibration isolation air flotation assembly (2a, 2b, 2c, 2d); Based on the coordinates of the three geometric centers, obtain the equation of the reference horizontal plane P; S2, setting the measured distance of each laser distance measuring sensor (9) in the air floating vibration isolation system in the current leveling state to zero; S3. In the control system software, select the vibration isolation air flotation components (2a, 2b, 2c) as air flotation points, and the vibration isolation air flotation component (2d) as a follow-up monitoring point; S4. Setting the stability parameters of the air flotation vibration isolation system, including obtaining the target height H of the vibration isolation air flotation components (2a, 2b, 2c, 2d) based on the task a0 , H b0 , H c0 , H d0 , and its corresponding stability coefficient K a , K b , K c , K d , and calculate the stability conditions of the air-floating vibration isolation system; S5, start the air flotation vibration isolation system, and after the system meets the stability conditions, the actual distance H measured by each laser distance sensor (9) a , H b , H c , H d , respectively obtain the coordinates A1 (0, 0, H) of the geometric center of the upper end surface of the air spring (10) of the vibration isolation air flotation assembly (2a, 2b, 2c, 2d) after floating a )、B1(0,W,H b )、C1(L,W,H c )、D1(L,0,H d ); Based on the coordinates of the three geometric centers after floating, obtain the equation of the current plane P1, and calculate the angle θ between the current plane P1 and the reference horizontal plane P; S6. According to the angle θ between the current plane P1 and the reference horizontal plane P, determine whether the flatness deviation required by the task is met. If so, complete the system setting and maintain the current state until the task is completed. Otherwise, go to S3 and repeat the above operations.

4. The implementation process as claimed in claim 3, characterized in that: After calculating the angle θ between the current plane P1 and the reference horizontal plane P, the effect diagram of the current plane P1 and the reference horizontal plane P and the angle θ between the two are visually displayed on the interface of the control system software in S5.

5. The implementation process as claimed in claim 3, characterized in that: The target height H of the vibration isolation air flotation assembly (2a, 2b, 2c, 2d) is determined based on the task a0 , H b0 , H c0 , H d0 ,include: Directly determine the target height H of the vibration isolation air flotation assembly (2a, 2b, 2c) based on the task a0 , H b0 , H c0 , get the coordinates of the target points A0, B0, and C0 A1(0,θ,H a0 )、B1(0,W,H b0 )、C1(L,W,H c0 ); The equation for calculating the target plane P0 is M0x+N0y+S0z+T0=0, where n0 is a normal vector of the target plane P0, (M0, N0, S0) is its coordinate, and T0 is the first constant, which are calculated by the following formulas: M0=W(H c0 -H b0 ) N0=L(H b0 -H a0 ) S0=-LW T0=LWH a0 Based on the equation of the target plane P0, calculate the target height H of the vibration isolation air flotation component (2d). d0 Value: H d0 =H c0 -H b0 +H a0 .

6. The implementation process as claimed in claim 5, characterized in that: The stability condition refers to: H i0 (1-K i )≤H i ≤H i0 (1+K i ), where i = a, b, c, d.

7. The implementation process according to claim 6, characterized in that: The method of obtaining the equation of the current plane P1 based on the coordinates of the three geometric centers after floating, and calculating the angle θ between the current plane P1 and the reference horizontal plane P, includes: Referring to the calculation process of the equation of the target plane P0, the equation of the current plane P1 is expressed as: W(H c -H b )x+L(H b -H a )y-LWz+LW H a =0 Calculate the angle θ between the current plane P1 and the reference horizontal plane P: Here, arccos is the inverse cosine function.

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