Optical excitation system

Abstract

The invention provides an optical excitation system comprising a light emitting device; the first lens group is arranged on the path of the light beam emitted by the light emitting device; the second lens group is arranged on a light beam path behind the first lens group; the imaging device is arranged on a light beam path behind the second lens group and is used for receiving the light beam behind the second lens group; and the supporting table is installed with the first lens group and the second lens group and used for supporting the first lens group and the second lens group, the supporting table is provided with a plurality of position points, the first lens group and the second lens group are configured to switch positions among the plurality of position points, and the height of the first lens group and the height of the second lens group above the supporting table are adjustable. The two lens groups are used for assembling different lenses, and the positions of the two lens groups in a three-dimensional space are adjusted by combining with the supporting table, so that convenient switching of optical excitation modes is realized.

Description

Technical Field

[0001] The present invention relates to the field of optical technologies, and in particular, to an optical excitation system. Background Art

[0002] In the process of optical experiments and spectral data acquisition, in order to ensure the efficiency of experiments and the accuracy of data, it is usually necessary to precisely control the spatial propagation path of the laser. Traditional optical systems need to achieve the switching of the optical path mode through cumbersome manual adjustment methods, which have problems such as complex operation, low precision, and poor repeatability. Therefore, there is an urgent need for a technical solution that can conveniently achieve the switching of the optical excitation mode and ensure the stability of the optical path.

[0003] It should be noted that the information disclosed in the above background art section is only used to enhance the understanding of the background of the present invention, and thus may include information that does not constitute the prior art known to those of ordinary skill in the art. Summary of the Invention

[0004] Aiming at the problems in the prior art, the purpose of the present invention is to provide an optical excitation system, which overcomes the difficulties of the prior art and can achieve convenient switching of the optical excitation mode.

[0005] The present disclosure provides an optical excitation system, which includes:

[0006] An optical emission device for emitting a light beam;

[0007] A first lens group disposed on the path of the light beam emitted by the optical emission device, the first lens group including a first lens mounting position;

[0008] A second lens group disposed on the light beam path behind the first lens group, arranged in parallel with the first lens group, the second lens group including a second lens mounting position;

[0009] An imaging device disposed on the light beam path behind the second lens group for receiving the light beam behind the second lens group;

[0010] A support platform mounted with the first lens group and the second lens group for supporting the first lens group and the second lens group, the support platform being provided with a plurality of position points, and the first lens group and the second lens group being configured to switch positions between the plurality of position points and be height-adjustable above the support platform;

[0011] Wherein, the first lens mounting position and the second lens mounting position are configured to switch the optical excitation mode by switching positions and installing corresponding lenses at corresponding positions.

[0012] In some embodiments, in the fixed-point excitation mode, the distance relationship between the first lens group and the second lens group satisfies:

[0013] d1 = f1 + f2, where d1 is the distance between the first lens group and the second lens group, and f1 and f2 respectively represent the focal lengths of the corresponding lenses installed in the first lens group and the second lens group.

[0014] In some embodiments, in the directional excitation mode, the distance relationship between the first lens group and the second lens group satisfies:

[0015] 1 / f3 = 1 / d0 + 1 / (d2 - f4);

[0016] where d0 is the distance between the second lens group and the imaging device, d2 is the distance between the first lens group and the second lens group, f3 is the focal length of the second lens group, and f4 is the focal length of the first lens group.

[0017] In some embodiments, the light emitting device includes:

[0018] A laser for emitting a laser beam;

[0019] A galvanometer, disposed on the path of the laser beam emitted by the laser, for reflecting the laser beam and causing the reflected beam to enter the first lens group, and the first lens group is located on the path of the reflected beam.

[0020] In some embodiments, in the directional excitation mode, the maximum rotation angle of the galvanometer satisfies the following condition:

[0021]

[0022] where f4 is the focal length of the first lens group, d3 is the distance between the first lens group and the galvanometer along the optical axis direction of the first lens group, is the diameter of the second lens group, d2 is the distance between the first lens group and the second lens group, and θ is 1 / 2 of the maximum rotation angle of the galvanometer.

[0023] In some embodiments, the support platform is provided with a plurality of mounting holes as the position points, and the first lens group and the second lens group are detachably mounted to the support platform through the corresponding mounting holes.

[0024] In some embodiments, both the first lens group and the second lens group are mounted to the support platform through a lens mount base, and the lens mount base is provided with a strip hole for aligning and mounting with the corresponding mounting hole.

[0025] In some embodiments, the first lens group and the second lens group are provided with a height adjustment mechanism;

[0026] The height adjustment mechanism includes a lifting rod and a spiral limiting component that cooperates with the lifting rod. The lifting rod is assembled with the corresponding lens mounting position, and the spiral limiting component abuts against the rod body of the lifting rod to keep it in a height position.

[0027] In some embodiments, each lens mounting position includes a lens mounting hole and a stop structure located on at least one outer side of the lens mounting hole. The stop structure is used to prevent the lens from moving out of the hole.

[0028] In some embodiments, the optical excitation system further includes: a first set of driving components, mounted with the first lens group, for driving the first lens group to switch positions between the multiple position points;

[0029] a second set of driving components, mounted with the second lens group, for driving the first lens group to switch positions between the multiple position points.

[0030] In some embodiments, the optical excitation system further includes: a third driving component, which is used to drive the support platform to move in a direction perpendicular to the optical axis direction of the first lens group.

[0031] The optical excitation system proposed by the embodiments of the present disclosure has the following advantages:

[0032] This optical excitation system uses two sets of lens groups to assemble different lenses, and combines the support platform to adjust the positions of the two sets of lens groups in three-dimensional space, realizing convenient switching of the optical excitation mode. Exemplarily, the optical excitation system of this embodiment can be compatible with two optical excitation modes, and can, without replacing the main optical elements (such as the light emitting device and the imaging device), adjust the positions of the two sets of lens groups in three-dimensional space through the support platform to achieve rapid switching between fixed-point excitation (real space) and directional excitation (K space).

[0033] It should be understood that the above general description and the following detailed description are only exemplary and explanatory, and cannot limit the present disclosure. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] By reading the detailed description of the non-limiting embodiments with reference to the following drawings, other features, purposes, and advantages of the present invention will become more obvious.

[0035] Figure 1 It is a schematic structural diagram of the optical excitation system provided by the embodiments of the present disclosure;

[0036] Figure 2 It is a three-dimensional assembly state diagram of the first lens group, the second lens group and the support platform in the optical excitation system provided by the embodiments of the present disclosure;

[0037] Figure 3 For Figure 1Schematic diagram of the optical path of the shown optical excitation system in the neutral position;

[0038] Figure 4 is Figure 1 Schematic diagram of the optical path of the shown optical excitation system in the fixed-point excitation optical path mode;

[0039] Figure 5 is Figure 1 Schematic diagram of the optical path of the shown optical excitation system in the directional excitation optical path mode;

[0040] Figure 6 Schematic diagram for deriving the positional relationship between the first mirror group, the second mirror group and the galvanometer in the directional (k-space) excitation mode;

[0041] Figure 7 is Figure 2 One of the partial perspective views corresponding to the shown optical excitation system;

[0042] Figure 8 is Figure 2 Another partial perspective view corresponding to the shown optical excitation system;

[0043] Figure 9 is Figure 2 Partial sectional perspective view of the first mirror group in the shown optical excitation system. Detailed implementation manners

[0044] Now, example embodiments will be described more fully with reference to the accompanying drawings. However, the example embodiments can be implemented in various forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that this disclosure will be more thorough and complete, and will fully convey the concept of the example embodiments to those skilled in the art. The features, structures, or characteristics described can be combined in any suitable manner in one or more embodiments.

[0045] In addition, the accompanying drawings are only schematic illustrations of the present disclosure and are not necessarily drawn to scale. The same reference numerals in the drawings denote the same or similar parts, and thus repeated descriptions thereof will be omitted. Some of the block diagrams shown in the drawings are functional entities and do not necessarily correspond to physically or logically independent entities. These functional entities can be implemented in software form, or in one or more hardware modules or integrated circuits, or in different networks and / or processor devices and / or microcontroller devices.

[0046] In addition, the concepts such as "first" and "second" mentioned in the present disclosure are only used to distinguish different devices, modules or units, and are not used to limit the order of functions performed by these devices, modules or units or their interdependent relationships.

[0047] In related technologies, as an important means of material analysis, spectroscopy has been widely used in various fields. Traditional spectroscopy techniques include two modes: Real Space and K-Space. Real Space technology directly collects the optical information presented by a sample in physical space and is commonly used in microscopic imaging and local spectroscopy measurements; while K-Space (also known as Fourier Space) technology uses the Fourier transform method to convert the Real Space signal into frequency information to obtain information on the periodicity, symmetry, and dynamic changes of the sample.

[0048] Although the above two techniques have their own advantages, most devices on the market currently cannot organically integrate the two excitation modes in a single optical path system. Often, it is necessary to independently build a system or perform cumbersome optical adjustments during the excitation process, resulting in complex system calibration, difficult to guarantee data consistency, and increasing equipment costs and maintenance difficulties.

[0049] Embodiments of the present disclosure provide an improved optical excitation system that can achieve an innovative optical path compatible with Real Space technology and K-Space technology. This optical excitation system comprehensively considers the different principles and requirements of the two technologies to ensure that in the same set of optical systems, it can not only efficiently collect the Real Space information of substances but also accurately obtain K-Space data, opening up a new path for the development of spectroscopy technology and effectively making up for the design gaps in existing spectroscopic detection technologies.

[0050] As Figure 1 shown, the optical excitation system includes:

[0051] An optical emission device 1 for emitting a light beam;

[0052] A first lens group 21 disposed on the path of the light beam emitted by the optical emission device 1. The first lens group 21 includes a first lens mounting position 211;

[0053] A second lens group 22 disposed on the light beam path behind the first lens group 21, arranged in parallel with the first lens group 21. The second lens group 22 includes a second lens mounting position 222;

[0054] An imaging device 3 disposed on the light beam path behind the second lens group 22 for receiving the light beam behind the second lens group 22.

[0055] Combined with Figure 2 shown, the optical excitation system further includes: A support platform 4 mounted with the first lens group 21 and the second lens group 22 for supporting the first lens group 21 and the second lens group 22. The support platform 4 is provided with a plurality of position points 4a, and the first lens group 21 and the second lens group 22 are configured to switch positions between the plurality of position points 4a and be height-adjustable above the support platform 4.

[0056] Using the optical excitation system of this embodiment, convenient switching between various optical excitation modes such as real-space mode and K-space mode can be achieved. The following is a specific description:

[0057] As Figure 3 shown, both the first lens group 21 and the second lens group 22 are placed in the neutral position. The neutral position means that no lens or optical element is installed at this position, so that the light beam emitted by the light emitting device 1 can pass directly or propagate along a preset path. As Figure 3 shown, the parallel light beam emitted by the light emitting device 1 passes through the neutral positions (represented by dotted lines) of the first lens group 21 and the second lens group 22, is received by the imaging device 3, and is projected onto the sample. During this process, the position of the imaging device 3 is adjusted. When the light spot on the sample reaches the minimum size, that is, when the minimum focusing state is achieved, the area of the light spot in the field of view is recorded, and the sample is fixed so that its position does not change anymore to ensure the stability of the laser focusing state during subsequent experiments.

[0058] As Figure 4 shown, the first lens 2111 is installed at the first lens installation position 211 of the first lens group 21 (as Figure 2 shown), and the second lens 2222 is installed at the second lens installation position 222 of the second lens group 22 (as Figure 2 shown), and the light beam emitted by the light emitting device 1 is accurately passed through the first lens 2111 and the second lens 2222, and always lies on the central axis of the first lens 2111 and the second lens 2222 during the transmission process. During this process, by setting the position points 4a (as Figure 2 shown) of the first lens 2111 and the second lens 2222 on the support platform 4 (as Figure 2 shown), the distance between the two lenses is set to a reasonable value. When the parallel light beam passes through the first lens 2111, the parallel light beam is focused by it. Theoretically, the light beam will be focused to the minimum size at the center position between the two lenses. Subsequently, the focused light beam continues to propagate, is collimated again by the second lens 2222, and is converted into a parallel light beam and smoothly enters the imaging device 3. On the premise that the imaging device 3 remains fixed, the parallel light beam is converged and forms the minimum light spot on the silicon wafer.

[0059] To ensure the accuracy and stability of the optical path, the position points of the first lens 2111 and the second lens 2222 on the support platform 4 are further adjusted, and the heights of the two are finely adjusted so that the position of the minimum focusing light spot coincides with the light spot position recorded in the steps as Figure 3 shown. When this goal is successfully achieved, it can be determined that the adjustment of the point excitation optical path mode is completed.

[0060] Fixed-point excitation refers to exciting a physical process at an exact position. For example, in the optical microscope of the imaging device 3, a laser is precisely irradiated on a specific point of the sample to excite fluorescence, luminescence, or other optical responses. The fixed-point excitation optical path mode is used for real-space analysis, that is, spectral measurement is directly carried out at the actual spatial position of the sample. In real-space imaging technology, fixed-point excitation, as a method of precisely controlling the illumination or excitation area, can improve the resolution and contrast of imaging.

[0061] At this time, the first lens 2111 and the second lens 2222 are real-space imaging lenses.

[0062] In the fixed-point excitation mode, the distance relationship between the first lens group 21 and the second lens group 22 satisfies:

[0063] d1 = f1 + f2, where d1 is the distance between the first lens group 21 and the second lens group 22, and f1 and f2 respectively represent the focal lengths of the corresponding lenses (such as the first lens 2111 and the second lens 2222) installed in the first lens group 21 and the second lens group 22.

[0064] Based on the above formula, according to the focal lengths of the first lens group 21 and the second lens group 22, the distance d1 between the two lens groups can be accurately calculated, so as to quickly and accurately adjust the fixed-point excitation mode.

[0065] For example, f1 = f2 = 200mm, d1 = 400mm. On the premise that the support table 4 remains fixed, the parallel light beam is converged by the imaging device 3 (specifically an objective lens) and focused on the silicon wafer to form the smallest spot.

[0066] As Figure 5 shown, next, the first lens 2111 and the second lens 2222 are replaced (as Figure 4 shown). Exemplarily, the first lens 2111 and the second lens 2222 are achromatic lenses, and the replaced third lens 23 and fourth lens 24 are focusing lenses. The focal lengths of the lenses before and after replacement are different, and the focal length of the lens before replacement is greater than that of the lens after replacement.

[0067] By changing the position points of the first lens group 21 and the second lens group 22 on the support table 4 (as Figure 2 shown), the distance between the third lens 23 and the fourth lens 24 is adjusted. Compare Figure 4 , Figure 5The distance between the third lens 23 and the fourth lens 24 shown is increased. The third lens 23 is closer to the light-emitting device 1 than the first lens 2111, and the fourth lens 24 is closer to the imaging device 3 than the second lens 2222. This ensures that after the parallel light beam acts on the third lens 23, it is focused at a specific position on the optical axis, and then is further converged by the fourth lens 24 so that it precisely falls on the front focal plane of the imaging device 3, completing the secondary convergence of the light spot, and the minimum light spot can be clearly imaged on the front focal plane of the imaging device 3 by the fourth lens 24.

[0068] In this process, by combining and adjusting the heights of the first lens group 21 and the second lens group 22 and their position points on the support table 4, the central position of the parallel light beam emitted by the imaging device 3 coincides with Figure 3 and Figure 4 the central position shown, then it can be determined that the adjustment of the directional excitation optical path mode is completed.

[0069] Selective Excitation means that during the imaging process, the nuclei or molecules in a specific region are selectively excited, and the light beam is irradiated onto the sample at a specific direction and angle, rather than being focused onto a point. In the optical path design, the light beam is collimated or converged onto the sample surface, but a minimum focused light spot is not formed. The directional excitation optical path mode is used for the analysis of K-Space, that is, the real-space signal is converted to the spatial frequency domain through Fourier transform, so as to extract information on the periodicity, symmetry or dynamic behavior of the sample.

[0070] At this time, both the third lens 23 and the fourth lens 24 are k-space modulation lenses.

[0071] In the directional excitation mode, the distance relationship between the first lens group 21 and the second lens group 22 satisfies:

[0072] 1 / f3 = 1 / d0 + 1 / (d2 - f4);

[0073] where d0 is the distance between the second lens group 22 and the imaging device 3, d2 is the distance between the first lens group 21 and the second lens group 22, f3 is the focal length of the second lens group 22, and f4 is the focal length of the first lens group 21.

[0074] In this embodiment, using the above formula, the distance d0 between the imaging device 3 and the second lens group 22 and the distance d2 between the first lens group 21 and the second lens group 22 can be adjusted. Thus, with the position of the imaging device 3 unchanged, d0 and d2 can be accurately calculated, so as to quickly and accurately adjust the directional excitation mode.

[0075] For example, f3 = f4 = 100 mm, d2 = 400 mm. At this time, the distance d0 between the imaging device 3 and the front focal plane of the second lens group 22 is approximately 156 mm. At this distance, the minimum light spot can be clearly imaged on the front focal plane of the imaging device 3 by the second lens group 22.

[0076] As can be seen from the above, as Figure 2 shown, the first lens mounting position 211 and the second lens mounting position 222 are configured to switch the optical excitation mode by switching positions and installing corresponding lenses at the corresponding positions. Specifically, two sets of lens groups are used to assemble different lenses, and the positions of the two sets of lens groups in the three-dimensional space are adjusted in combination with the support table 4 to achieve convenient switching of the optical excitation mode. Exemplarily, the optical excitation system of the present embodiment can be compatible with two optical excitation modes, and can, without replacing the main optical elements (such as the light emitting device 1 and the imaging device 3), adjust the positions of the two sets of lens groups in the three-dimensional space through the support table 4 to achieve rapid switching between fixed-point excitation (real space) and directional excitation (K space). The present embodiment breaks through the limitations of traditional spectral devices and is particularly suitable for fields that require high spatial resolution and frequency domain analysis.

[0077] As Figure 1 shown, exemplarily, the light emitting device 1 includes:

[0078] A laser 11 for emitting a laser beam;

[0079] A galvanometer 12 disposed on the path of the laser beam emitted by the laser 11 for reflecting the laser beam and causing the reflected beam to enter the first lens group 21, and the first lens group 21 is located on the path of the reflected beam.

[0080] In this embodiment, the laser 11 can be a continuous wave laser, and the diameter and wavelength of its output beam are selected according to needs and are not limited herein. The galvanometer 12 is mounted on a rotary displacement table (not shown in the figure), and the rotary displacement table has a certain rotation angle range for rotating the galvanometer 12. The galvanometer 12 includes at least two reflecting mirrors. As Figure 3 shown, the galvanometer 12 is used to reflect the vertical beam emitted by the laser 11 to make it a horizontal beam.

[0081] In this embodiment, based on the same stable light source (whether it is white light or laser), only the same galvanometer 12 needs to be shared, which greatly reduces the cost. In another way, a reflecting mirror can also be used to replace the galvanometer 12.

[0082] In this embodiment, as Figure 5 shown, the angle of the galvanometer 12 affects the beam landing point incident on the second lens group 22. For example, it should not exceed the lens range of the second lens group 22. At this time, in combination with Figure 6As shown, the maximum rotation angle of the galvanometer 12 satisfies the following conditions:

[0083]

[0084] Where f4 is the focal length of the first lens group 21, and d3 is the distance between the first lens group 21 and the galvanometer 12 along the optical axis direction of the first lens group 21. is the diameter of the second lens group 22, d2 is the distance between the first lens group 21 and the second lens group 22, and θ is 1 / 2 of the maximum rotation angle of the galvanometer 12.

[0085] In actual use, considering the diameter sizes of the lens elements installed in the first lens group 21 and the second lens group 22, the reflected light beam of the incident light beam by the galvanometer 12 has a certain range. The area of the lens closer to the galvanometer 12 (such as the first lens group 21) has a smaller influence, and the area of the lens farther from the galvanometer 12 (such as the second lens group 22) has a greater influence. Similarly, compared with real-space excitation, the K-space excitation mode has more stringent requirements for the angle. Therefore, it is assumed that the diameter of the lens in the second lens group 22 is When the light beam is reflected by the galvanometer 12 and refracted by the lens in the first lens group 21, it passes through the edge of the second lens group 22. At this time, the adjustment angle θ of the galvanometer 12 is defined as the maximum rotation angle. According to the above mathematical relationship, θ is deduced, and based on θ, the maximum rotation angle of the galvanometer 12 is further calculated, and the rotation of the galvanometer 12 is adjusted within this range to achieve precise control.

[0086] For the derivation of the above formula, refer to Figure 6 , assuming that the light beam incident on the second lens group 22 (as shown in Figure 5 ) just falls on its edge. At this time,

[0087]

[0088] x = tanα · f4 = d3 · tanθ

[0089] From this, the above tanθ formula can be deduced.

[0090] In addition, a multi-functional light source can be used to replace the laser 11 to achieve multi-light source adjustment.

[0091] In addition, the light emitting device may not include a galvanometer or a reflector, and by setting the appropriate position of the light source, the required light beam can be directly emitted.

[0092] As shown in Figure 2 , both the first lens group 21 and the second lens group 22 are installed on the support table 4 through their respective lens mounts 25. The support table 4 is provided with a plurality of mounting holes 40 as position points 4a, and the first lens group 21 and the second lens group 22 are detachably installed on the support table 4 through the corresponding mounting holes 40.

[0093] As Figure 7 shown, taking the second lens group 22 as an example, it is detachably mounted on the support table 4 through bolts 5. The bolts 5 sequentially pass through the lens frame base 251 of the first lens group 21 and the corresponding mounting holes 40 in the support table 4, and are fixed using nuts (not shown in the figure).

[0094] Figure 2 and Figure 7 the mounting holes 40 in [support table 4] are arranged in an array on the surface of the support table 4, which enables the first lens group 21 and the second lens group 22 to have multiple position points 4a on the support table 4 and be able to switch positions at multiple positions in a two-dimensional plane to adjust the imaging quality under different optical excitation modes.

[0095] As Figure 2 shown, the lens frame base 251 is provided with a strip-shaped hole 25a, and the strip-shaped hole 25a is used to align with and mount to the corresponding mounting hole 40. The strip-shaped hole 25a is in a long strip shape, and it can be aligned with multiple mounting holes 40. Each mounting hole 40 serves as a fixed mounting position, and multiple mounting holes 40 correspond to multiple fixed mounting positions, thereby being able to enhance the stability of the corresponding lens group.

[0096] As Figure 2 and Figure 8 shown, the strip-shaped hole 25a is a counterbore structure, which is used to support the nut of the bolt 5 and hide the nut to prevent it from protruding.

[0097] In the embodiments of the present disclosure, in addition to the above position point switching method, an automated drive mechanism can also be used to drive the position switching of the corresponding lens group. Exemplarily, the optical excitation system further includes:

[0098] a first set of drive components, mounted with the first lens group, for driving the first lens group to switch positions among the multiple position points;

[0099] a second set of drive components, mounted with the second lens group, for driving the first lens group to switch positions among the multiple position points.

[0100] For each set of drive components, a stepper motor + ball screw drive component can be used to achieve the position drive of the corresponding lens group. Each set of drive components can include a first direction drive component and a second direction drive component. The first direction drive component is used to drive the corresponding lens group to switch positions along the first direction, and the second direction drive component is used to drive the corresponding lens group to switch positions along the second direction. The first direction can be the optical axis direction of the corresponding lens group, used to adjust the distance between the two lens groups, and the second direction is perpendicular to the first direction. Among them, the drive component in each direction can use the above stepper motor + ball screw drive component.

[0101] By adopting the above driving component and combining with the control program, precise control of the position of the mirror group can be achieved.

[0102] As Figure 2 shown, the optical excitation system further includes a third driving component 6 (as Figure 8 shown), and the third driving component 6 is used to drive the support platform 4 to move in a direction AA' perpendicular to the optical axis direction of the first mirror group 21. As above Figure 3 steps, the third driving component 6 can be controlled to drive the support platform 4 to move, so that the first mirror group 21 and the second mirror group 22 move outside the parallel light beam emitted by the light emitting device 1, and thus the parallel light beam directly propagates to the imaging device 3.

[0103] When the first mirror group 21 and the second mirror group 22 are located outside the parallel light beam, the lens can be installed. As Figure 4 shown, after installing the first lens 2111 and the second lens 2222, control the third driving component 6 (as Figure 8 shown) to move onto the optical path of the parallel light beam emitted by the light emitting device 1, and make the optical axes of the first lens 2111 and the second lens 2222 located on the center line of the parallel light beam.

[0104] When the lens needs to be replaced, use the third driving component 6 to drive the two mirror groups to move outside the optical path of the parallel light beam. As Figure 5 shown, after replacing the third lens 23 and the fourth lens 24, move onto the optical path of the parallel light beam again.

[0105] Through the electromechanical control of the third driving component 6, the K-space modulation lens and the real-space imaging lens can be alternately inserted into the optical path of the parallel light beam, so as to achieve a rapid switching of the optical excitation mode on the premise of maintaining the stability of the light source, the coaxiality of the optical path and the consistency of the microscope objective.

[0106] As an implementation manner, the third driving component 6 can be a linear motor, or a stepper motor + ball screw driving component, which is not limited herein.

[0107] Correspondingly, the optical excitation system is also provided with a linear guide + slide block assembly (Linear Guide + Slide Block), wherein the linear guide 41 is arranged on the base 42, the slide block 43 is slidably matched with the linear guide 41, and the slide block 43 is installed with the support platform 4. When the third driving component 6 (as Figure 8 shown) drives the support platform 4 to move, the linear guide + slide block assembly 40 restricts its moving direction to ensure the stable movement of the first mirror group 21 and the second mirror group 22.

[0108] As Figure 2 and Figure 8As shown, a height adjustment mechanism 26 is provided for the first lens group 21 and the second lens group 22. The height adjustment mechanism 26 is used to adjust the height position of the corresponding lens mounting positions (such as 211 and 222).

[0109] In this embodiment, taking the second lens group 22 as an example, the height adjustment mechanism 26 includes a lifting rod 261 and a spiral limit assembly 262 that cooperates with the lifting rod 261. The lifting rod 261 is assembled with the corresponding second lens mounting position 222, and the spiral limit assembly 262 abuts against the rod body of the lifting rod 261 to keep its height position.

[0110] Specifically, the lens frame 223 of the second lens group 22 is installed with the lifting rod 261. Its lens holder 25 is provided with a through hole 25b, and the lifting rod 261 is slidably passed through the through hole 25b. The spiral limit assembly 262 includes a threaded hole 26a located inside the lens holder 25 and a limit bolt 2621 that cooperates with the threaded hole 26a. The threaded hole 26a communicates with the through hole 25b and their centerlines are perpendicular to each other. When the limit bolt 2621 is in a loose state, the lifting rod 261 can be raised or lowered to adjust the height of the second lens mounting position 222. After it reaches the desired position, the bolt 2621 is screwed to abut against the lifting rod 261 to fix the lifting rod 261, so that the second lens mounting position 222 and the lens assembled therein are kept stable.

[0111] Alternatively, a motor drive assembly can also be used to achieve precise control of the lifting rod. For example, when space permits, a linear motor is directly connected to the lifting rod to control the lifting movement of the lifting rod. It can also be that a rotary motor is combined with a corresponding transmission mechanism (such as a lead screw transmission mechanism or a belt transmission mechanism) to drive the lifting movement of the lifting rod. This implementation method can achieve automatic adjustment and precise adjustment of the height of the corresponding lens group.

[0112] As Figure 9 shown, each of the lens mounting positions (such as the first lens mounting position 211) includes a lens mounting hole 211a and a stop structure 27 located on at least one outer side of the lens mounting hole 211a. The stop structure 27 is used to block the first lens 2111 from moving out of the hole.

[0113] After the lens is installed in the lens mounting hole 211a, the stop structure 27 is assembled to block the lens. When the lens needs to be replaced, the stop structure 27 is disassembled, the lens is replaced, and then the stop structure 27 is assembled again.

[0114] As Figure 9 shown, the stop structure 27 is an annular structure and is threadedly installed with the lens mounting hole 211a to fix the first lens 2111.

[0115] As Figure 2As shown, the imaging device 3 includes a microscope objective 31. The light beam emitted from the second lens group 22 is received by the microscope 31 and projected onto the sample on the stage 32. Among them, the position of the stage 32 is adjustable.

[0116] As Figure 3 shown, to achieve the best focusing effect, the position of the stage 32 is precisely adjusted. The height and horizontal position of the stage 32 are slowly changed. When the light spot reaches the minimum size, that is, when the minimum focusing state is achieved, the area of the light spot in the field of view is recorded, and the stage 32 is fixed so that its position no longer changes to ensure the stability of the laser focusing state during subsequent experiments.

[0117] As Figure 4 shown, on the premise that the stage 32 remains fixed, the parallel light beam is converged by the microscope objective 31 and focused on the sample to form the minimum light spot.

[0118] Those skilled in the art will readily conceive of other embodiments of the present disclosure after considering the specification and practicing the invention disclosed herein. The present disclosure is intended to cover any variations, uses, or adaptations of the present disclosure that follow the general principles of the present disclosure and include known common knowledge or conventional technical means in the technical field not disclosed by the present disclosure. The specification and examples are only regarded as exemplary, and the true scope and spirit of the present disclosure are pointed out by the appended claims.

Claims

1. An optical excitation system, characterized in that: include: A light emitting device (1) for emitting a light beam; A first lens group (21) is arranged on the path of the light beam emitted by the light emitting device (1), and the first lens group (21) comprises a first lens mounting position (211); A second lens group (22) is arranged on a light beam path behind the first lens group (21) and is arranged in parallel with the first lens group (21), wherein the second lens group (22) comprises a second lens mounting position (222); An imaging device (3) is arranged on a light beam path behind the second lens group (22) and is used to receive the light beam behind the second lens group (22); A support platform (4) is installed with the first lens group (21) and the second lens group (22) and is used to support the first lens group (21) and the second lens group (22); the support platform (4) is provided with a plurality of position points (4a); the first lens group (21) and the second lens group (22) are configured to switch positions between the plurality of position points (4a) and to be height-adjustable above the support platform (4); The first lens mounting position and the second lens mounting position are configured to switch the optical excitation mode by installing corresponding lenses at corresponding positions through the switching position.

2. The optical excitation system according to claim 1, characterized in that: In the fixed-point excitation mode, the distance relationship between the first mirror group (21) and the second mirror group (22) satisfies: d1=f1+f2, wherein d1 is the distance between the first lens group (21) and the second lens group (22), and f1 and f2 represent the focal lengths of corresponding lenses (2111, 2222) installed in the first lens group (21) and the second lens group (22), respectively.

3. The optical excitation system according to claim 1, characterized in that: In the directional excitation mode, the distance relationship between the first mirror group (21) and the second mirror group (22) satisfies: 1 / f3=1 / d0+1 / (d2-f4); Wherein, d0 is the distance between the second lens group (22) and the imaging device (3), d2 is the distance between the first lens group (21) and the second lens group (22), f3 is the focal length of the second lens group (22), and f4 is the focal length of the first lens group (21).

4. The optical excitation system according to claim 1, characterized in that: The light emitting device (1) comprises: A laser (11) for emitting a laser beam; The galvanometer (12) is arranged on the path of the laser beam emitted by the laser (11) and is used to reflect the laser beam and make the reflected beam enter the first mirror group (21); the first mirror group (21) is located on the path of the reflected beam.

5. The optical excitation system according to claim 4, characterized in that: In the directional excitation mode, the maximum rotation angle of the galvanometer (12) satisfies the following conditions: Wherein, f4 is the focal length of the first lens group (21), d3 is the distance between the first lens group (21) and the galvanometer (12) along the optical axis direction of the first lens group (21), is the diameter of the second mirror group (22), d2 is the distance between the first mirror group (21) and the second mirror group (22), and θ is 1 / 2 of the maximum rotation angle of the galvanometer (12).

6. The optical excitation system according to claim 1, characterized in that: The support platform (4) is provided with a plurality of mounting holes (40) as the position points (4a), and the first lens group (21) and the second lens group (22) are detachably mounted on the support platform (4) through the corresponding mounting holes (40).

7. The optical excitation system according to claim 6, characterized in that: The first lens group (21) and the second lens group (22) are both mounted on the support platform (4) via a lens frame base (251); the lens frame base (251) is provided with a strip hole (25a); the strip hole (25a) is used to align with the corresponding mounting hole (40) and to be mounted.

8. The optical excitation system according to claim 1, characterized in that: The first lens group (21) and the second lens group (22) are provided with a height adjustment mechanism (26); The height adjustment mechanism (26) comprises a lifting rod (261) and a screw limiter assembly (262) matched with the lifting rod (261); the lifting rod (261) is assembled with the corresponding lens mounting position (211, 222); and the screw limiter assembly (262) abuts against the rod body of the lifting rod (261) to maintain its height position.

9. The optical excitation system according to claim 1, characterized in that: Each of the lens mounting positions (211, 222) comprises a lens mounting hole (211a) and a stop structure (27) located at least on one outer side of the lens mounting hole (211a), wherein the stop structure (27) is used to prevent the lens (2111, 2222) from moving out of the hole.

10. The optical excitation system according to claim 1, characterized in that: The optical excitation system further comprises: A first drive assembly, mounted on the first mirror group (21), and used to drive the first mirror group (21) to switch positions between the plurality of position points (4a); A second driving assembly is installed with the second mirror group (22) and is used to drive the second mirror group (22) to switch positions between the plurality of position points (4a).

11. The optical excitation system according to claim 1, characterized in that: The optical excitation system further comprises: a third driving component (6), wherein the third driving component (6) is used to drive the support platform (4) to move in a direction perpendicular to the optical axis direction of the first lens group (21).

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