Harmonic wave processing method and related device

Abstract

The invention provides a harmonic wave processing method and a related device, the harmonic wave processing method is applied to a harmonic wave processing device with a harmonic wave processing unit, and the harmonic wave processing method is used for filtering target harmonic waves in pulse radio frequency electric energy through the harmonic wave processing unit connected to a transmission path of the pulse radio frequency electric energy. The harmonic wave processing method comprises the following steps: acquiring waveform parameters of pulse radio frequency electric energy; and determining the waveform parameter of the target harmonic wave according to the waveform parameter of the pulse radio frequency electric energy. And controlling and adjusting the filtering parameter of the harmonic processing unit to correspond to the waveform parameter of the target harmonic so as to filter out the target harmonic in the pulse radio frequency electric energy. According to the invention, the target harmonic wave in the pulse radio frequency electric energy can be filtered.

Description

Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular, to a harmonic processing method, a harmonic processing device, a radio frequency power supply device, and a computer-readable storage medium. Background Art

[0002] Currently, with the development of radio frequency power supply technology, a pulsed radio frequency power supply has been proposed and widely used in various semiconductor devices. However, there are still many problems to be solved during the output process of pulsed radio frequency electrical energy. In particular, a large number of harmonics with unknown waveform parameters are generated in the pulsed radio frequency electrical energy, which greatly affects the output effect. Therefore, during the output process of pulsed radio frequency electrical energy, how to filter out the target harmonics in the pulsed radio frequency electrical energy and thereby improve the output effect has become a problem to be considered. Summary of the Invention

[0003] The present application provides a harmonic processing method, a harmonic processing device, a radio frequency power supply device, and a computer-readable storage medium, which can accurately filter out the target harmonics in pulsed radio frequency electrical energy.

[0004] In a first aspect, a harmonic processing method is provided. The harmonic processing method is applied to a harmonic processing device having a harmonic processing unit, and the harmonic processing method is used to filter out the target harmonics in the pulsed radio frequency electrical energy through the harmonic processing unit connected to the transmission path of the pulsed radio frequency electrical energy. Wherein, the harmonic processing method includes: obtaining the waveform parameters of the pulsed radio frequency electrical energy; determining the waveform parameters of the target harmonics according to the waveform parameters of the pulsed radio frequency electrical energy; and controlling and adjusting the filtering parameters of the harmonic processing unit to correspond to the waveform parameters of the target harmonics, so as to filter out the target harmonics in the pulsed radio frequency electrical energy.

[0005] In a possible implementation manner, each cycle period of the pulsed radio frequency electrical energy includes a first period and a second period, and the waveform of the pulsed radio frequency electrical energy in the first period is different from the waveform in the second period. Wherein, the obtaining the waveform parameters of the pulsed radio frequency electrical energy includes: obtaining the first waveform parameters of the pulsed radio frequency electrical energy in any first period; and obtaining the second waveform parameters of the pulsed radio frequency electrical energy in any cycle period. The target harmonics include a first sub-target harmonic and a second sub-target harmonic. The determining the waveform parameters of the target harmonics according to the waveform parameters of the pulsed radio frequency electrical energy includes: determining the waveform parameters of the first sub-target harmonic and the waveform parameters of the second sub-target harmonic according to the obtained first waveform parameters and the second waveform parameters.

[0006] In a possible implementation, the waveform of the pulsed radio frequency electrical energy in the first time period is a sine wave, and the waveform of the pulsed radio frequency electrical energy in the second time period is a straight line wave with an amplitude of zero. Wherein, the first waveform parameter includes a first angular frequency; obtaining the first waveform parameter of the pulsed radio frequency electrical energy in any first time period includes: obtaining the first angular frequency of the sine wave of the pulsed radio frequency electrical energy in any first time period. The second waveform parameter includes a second angular frequency; obtaining the second waveform parameter of the pulsed radio frequency electrical energy in any periodic time period includes: obtaining the second angular frequency of the pulsed radio frequency electrical energy in any periodic time period according to the time length of any periodic time period of the pulsed radio frequency electrical energy.

[0007] In a possible implementation, the waveform parameters of the first sub-target harmonic and the second sub-target harmonic include angular frequencies. Wherein, determining the waveform parameters of the first sub-target harmonic and the second sub-target harmonic according to the obtained first waveform parameter and second waveform parameter includes: determining the angular frequencies of the first sub-target harmonic and the second sub-target harmonic according to the first angular frequency and the second angular frequency.

[0008] In a possible implementation, determining the angular frequencies of the first sub-target harmonic and the second sub-target harmonic according to the first angular frequency and the second angular frequency includes: determining the angular frequency of the first sub-target harmonic according to the sum of the first angular frequency and the second angular frequency. Determining the angular frequency of the second sub-target harmonic according to the difference between the first angular frequency and the second angular frequency.

[0009] In a possible implementation, the filtering parameters of the harmonic processing unit include a first resonance frequency and a second resonance frequency. Wherein, controlling and adjusting the filtering parameters of the harmonic processing unit to correspond to the waveform parameters of the target harmonic to filter out the target harmonic in the pulsed radio frequency electrical energy includes: controlling and adjusting the first resonance frequency and the second resonance frequency of the harmonic processing unit to correspond to the angular frequencies of the first sub-target harmonic and the second sub-target harmonic respectively to filter out the target harmonic in the pulsed radio frequency electrical energy.

[0010] In a possible implementation, the harmonic processing unit further has adjustable first and second capacitance values. The control adjusts the first resonance frequency and the second resonance frequency of the harmonic processing unit to correspond to the angular frequency of the first sub-target harmonic and the angular frequency of the second sub-target harmonic respectively, so as to filter the target harmonic in the pulsed radio frequency electrical energy, including: controlling and adjusting the first capacitance value and the second capacitance value of the harmonic processing unit, so that the first resonance frequency and the second resonance frequency of the harmonic processing unit correspond to the angular frequency of the first sub-target harmonic and the angular frequency of the second sub-target harmonic respectively, so as to filter the target harmonic in the pulsed radio frequency electrical energy. Alternatively, controlling and adjusting the connection of the harmonic processing unit and the transmission path of the pulsed radio frequency electrical energy in a target manner, so that the first resonance frequency and the second resonance frequency of the harmonic processing unit correspond to the angular frequency of the first sub-target harmonic and the angular frequency of the second sub-target harmonic respectively, so as to filter the target harmonic in the pulsed radio frequency electrical energy.

[0011] In a second aspect, a harmonic processing device is further provided. The harmonic processing device uses the above-mentioned harmonic processing method to filter the target harmonic in the pulsed radio frequency electrical energy. Wherein, the harmonic processing device includes an input end, a harmonic processing unit and a control unit. The input end is used for inputting the pulsed radio frequency electrical energy. The harmonic processing unit is used for filtering the target harmonic in the pulsed radio frequency electrical energy. The control unit is used for obtaining the waveform parameters of the pulsed radio frequency electrical energy, determining the waveform parameters of the target harmonic according to the waveform parameters of the pulsed radio frequency electrical energy, and controlling and adjusting the filtering parameters of the harmonic processing unit to correspond to the waveform parameters of the target harmonic, so as to filter the target harmonic in the pulsed radio frequency electrical energy.

[0012] In a third aspect, a radio frequency power supply device is further provided. The radio frequency power supply device includes the above-mentioned harmonic processing device. The harmonic processing device uses the above-mentioned harmonic processing method to filter the target harmonic in the pulsed radio frequency electrical energy. Wherein, the harmonic processing device includes: an input end, which is used for inputting the pulsed radio frequency electrical energy; a harmonic processing unit, which is used for filtering the target harmonic in the pulsed radio frequency electrical energy; a control unit, which is used for obtaining the waveform parameters of the pulsed radio frequency electrical energy, determining the waveform parameters of the target harmonic according to the waveform parameters of the pulsed radio frequency electrical energy, and controlling and adjusting the filtering parameters of the harmonic processing unit to correspond to the waveform parameters of the target harmonic, so as to filter the target harmonic in the pulsed radio frequency electrical energy.

[0013] In a fourth aspect, a computer-readable storage medium is further provided. A computer program is stored in the computer-readable storage medium. When the computer program runs on a computer or a processor, the above-mentioned harmonic processing method is implemented.

[0014] The harmonic processing method, harmonic processing device, radio frequency power supply device, and computer-readable storage medium of the present application can determine the waveform parameters of the target harmonics during the output of pulsed radio frequency electrical energy, and control and adjust the filtering parameters of the harmonic processing unit to correspond to the waveform parameters of the target harmonics, so as to accurately filter out the target harmonics in the pulsed radio frequency electrical energy and improve the output effect. Description of the Drawings

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background art, the drawings required for use in the embodiments of the present application or the background art will be described below.

[0016] Figure 1 It is a flowchart of the harmonic processing method in some embodiments of the present application.

[0017] Figure 2 It is another flowchart of the harmonic processing method in some embodiments of the present application.

[0018] Figure 3 It is yet another flowchart of the harmonic processing method in some embodiments of the present application.

[0019] Figure 4 It is still another flowchart of the harmonic processing method in some embodiments of the present application.

[0020] Figure 5 It is yet another flowchart of the harmonic processing method in some embodiments of the present application.

[0021] Figure 6 It is still another flowchart of the harmonic processing method in some embodiments of the present application.

[0022] Figure 7 It is a block diagram of the harmonic processing device in some embodiments of the present application.

[0023] Figure 8 It is a block diagram of the harmonic processing unit in some embodiments of the present application.

[0024] Figure 9 It is a circuit diagram of the first harmonic processing module and the second harmonic processing module in some embodiments of the present application.

[0025] Figure 10 It is another circuit diagram of the first harmonic processing module in some embodiments of the present application.

[0026] Figure 11 It is a block diagram of the radio frequency power supply device in some embodiments of the present application.

[0027] Description of reference numerals in the drawings: 1. Radio frequency power supply device; 10. Harmonic processing device; 100. Input terminal; RF1. Pulse radio frequency electric energy; 200. Harmonic processing unit; 210. First harmonic processing module; C1. First capacitor; L1. First inductor; 220. Second harmonic processing module; C2. Second capacitor; L2. Second inductor; GND. Ground; 300. Control unit; 400. Output terminal. Detailed implementation manners

[0028] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Apparently, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the protection scope of the present application.

[0029] In the description of the embodiments of the present application, it should be noted that unless otherwise clearly defined and limited, the terms "connected" and "coupled" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations.

[0030] In the description of the embodiments of the present application, it should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above accompanying drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the features used in this way can be interchanged under appropriate circumstances so that the embodiments of the present application described here can be implemented in an order other than those illustrated or described here.

[0031] In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or server comprising a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0032] Please refer to Figure 1 , Figure 1 which is a flowchart of a harmonic processing method in some embodiments of the present application. The present application provides a harmonic processing method, which is applied to a harmonic processing device having a harmonic processing unit, and is used to filter out target harmonics in pulse radio frequency electric energy through the harmonic processing unit connected to the transmission path of the pulse radio frequency electric energy. Among them, as Figure 1 shown, the harmonic processing method includes:

[0033] Step S100: Obtain the waveform parameters of the pulsed radio frequency electrical energy.

[0034] Step S200: Determine the waveform parameters of the target harmonics according to the waveform parameters of the pulsed radio frequency electrical energy.

[0035] Step S300: Control and adjust the filtering parameters of the harmonic processing unit to correspond to the waveform parameters of the target harmonics, so as to filter out the target harmonics in the pulsed radio frequency electrical energy.

[0036] Thus, in the above harmonic processing method of the present application, the waveform parameters of the target harmonics during the output of the pulsed radio frequency electrical energy can be determined, and the filtering parameters of the harmonic processing unit are controlled and adjusted to correspond to the waveform parameters of the target harmonics, so as to accurately filter out the target harmonics in the pulsed radio frequency electrical energy and improve the output effect.

[0037] Please refer to Figure 2 , Figure 2 which is another flowchart of the harmonic processing method in some embodiments of the present application. Each cycle period of the pulsed radio frequency electrical energy includes a first period and a second period, and the waveform of the pulsed radio frequency electrical energy in the first period is different from that in the second period. Further, the target harmonics include a first sub-target harmonic and a second sub-target harmonic. Among them, as Figure 2 shown, the harmonic processing method may include:

[0038] Step S110: Obtain the first waveform parameters of the pulsed radio frequency electrical energy in any first period.

[0039] Step S120: Obtain the second waveform parameters of the pulsed radio frequency electrical energy in any cycle period.

[0040] Step S210: Determine the waveform parameters of the first sub-target harmonic and the second sub-target harmonic according to the obtained first waveform parameters and the second waveform parameters.

[0041] Step S300: Control and adjust the filtering parameters of the harmonic processing unit to correspond to the waveform parameters of the target harmonics, so as to filter out the target harmonics in the pulsed radio frequency electrical energy.

[0042] Thus, in the above harmonic processing method of the present application, for the periodic pulsed radio frequency electrical energy, and the waveform of the pulsed radio frequency electrical energy in the first period of each cycle is different from that in the second period, so it is necessary to obtain the first waveform parameters and the second waveform parameters, and the first waveform parameters correspond to any first period of the pulsed radio frequency electrical energy, and the second waveform parameters correspond to any cycle period of the pulsed radio frequency electrical energy.

[0043] Among them, step S110 and step S120 may be the steps specifically included in the foregoing step S100, that is, step S100 "obtain the waveform parameters of pulsed radio frequency electrical energy" may specifically include step S110: obtain the first waveform parameters of pulsed radio frequency electrical energy within any first time period, and step S120: obtain the second waveform parameters of pulsed radio frequency electrical energy within any periodic time period. Among them, step S210 may be the step specifically included in the foregoing step S200, that is, step S200 "determine the waveform parameters of the target harmonics according to the waveform parameters of pulsed radio frequency electrical energy" may specifically include step S210: determine the waveform parameters of the first sub-target harmonics and the waveform parameters of the second sub-target harmonics according to the obtained first waveform parameters and the second waveform parameters.

[0044] Please refer to Figure 3 , Figure 3 which is another flowchart of the harmonic processing method in some embodiments of the present application. The waveform of the pulsed radio frequency electrical energy in the first time period is a sine wave, the waveform of the pulsed radio frequency electrical energy in the second time period is a straight line wave with an amplitude of zero, and the first waveform parameters include the first angular frequency, and the second waveform parameters include the second angular frequency. Among them, as Figure 3 shown, the harmonic processing method may include:

[0045] Step S111: Obtain the first angular frequency of the sine wave of the pulsed radio frequency electrical energy within any first time period.

[0046] Step S121: Obtain the second angular frequency of the pulsed radio frequency electrical energy within any periodic time period according to the time length of any periodic time period of the pulsed radio frequency electrical energy.

[0047] Therefore, in the above harmonic processing method of the present application, when the waveform of the pulsed radio frequency electrical energy in the first time period is a sine wave and the waveform of the pulsed radio frequency electrical energy in the second time period is a straight line wave with an amplitude of zero, that is, when the pulsed radio frequency electrical energy outputs radio frequency electrical energy in the first time period of each cycle and stops outputting radio frequency electrical energy in the second time period of each cycle, the waveform parameters of the target harmonics can be quickly determined through the angular frequency, specifically the first angular frequency corresponding to the first waveform parameters and the second angular frequency corresponding to the second waveform parameters, and the first angular frequency is the angular frequency of the sine wave of the pulsed radio frequency electrical energy within any first time period, and the second angular frequency is the angular frequency of the pulsed radio frequency electrical energy within any periodic time period.

[0048] Among them, step S111 may be the specific steps included in the foregoing step S110, that is, step S110 "obtain the first waveform parameters of the pulsed RF electrical energy within any first time period", which may specifically include step S111: obtain the first angular frequency of the sine wave of the pulsed RF electrical energy within any first time period. Among them, step S121 may be the specific steps included in the foregoing step S120, that is, step S120 "obtain the second waveform parameters of the pulsed RF electrical energy within any cycle time period", which may specifically include step S121: obtain the second angular frequency of the pulsed RF electrical energy within any cycle time period according to the time length of any cycle time period of the pulsed RF electrical energy.

[0049] Specifically, the second angular frequency of the pulsed RF electrical energy within any cycle time period is the ratio of 2π to the time length of any cycle time period of the pulsed RF electrical energy.

[0050] Among them, step S111 and step S121 may be executed sequentially or simultaneously, and the present application is not limited thereto.

[0051] Furthermore, the target harmonics may include a first sub-target harmonic and a second sub-target harmonic, and the waveform parameters of the first sub-target harmonic and the second sub-target harmonic include angular frequency. Among them, as Figure 3 shown, the harmonic processing method may further include:

[0052] Step S211: Determine the angular frequencies of the first sub-target harmonic and the second sub-target harmonic according to the first angular frequency and the second angular frequency.

[0053] Step S300: Control and adjust the filtering parameters of the harmonic processing unit to correspond to the waveform parameters of the target harmonics, so as to filter out the target harmonics in the pulsed RF electrical energy.

[0054] Thus, in the above harmonic processing method of the present application, after obtaining the first angular frequency and the second angular frequency, the angular frequencies of the first sub-target harmonic and the second sub-target harmonic can also be correspondingly determined.

[0055] Among them, step S211 may be the specific steps included in the foregoing step S210, that is, step S210 "determine the waveform parameters of the first sub-target harmonic and the waveform parameters of the second sub-target harmonic according to the obtained first waveform parameters and second waveform parameters", which may specifically include step S211: determine the angular frequencies of the first sub-target harmonic and the second sub-target harmonic according to the first angular frequency and the second angular frequency.

[0056] Among them, Figure 1 、 Figure 2Specifically, step S300 in 3 may include: controlling and adjusting the filtering parameters of the harmonic processing unit to correspond to the waveform parameters of the first sub-target harmonic and the waveform parameters of the second sub-target harmonic, so as to filter out the first sub-target harmonic and the second sub-target harmonic in the pulsed RF electrical energy.

[0057] Please refer to Figure 4 , Figure 4 which is another flowchart of the harmonic processing method in some embodiments of the present application. Among them, as Figure 4 shown, the harmonic processing method may include:

[0058] Step S111: Obtain the first angular frequency of the sine wave of the pulsed RF electrical energy within any first time period.

[0059] Step S121: Obtain the second angular frequency of the pulsed RF electrical energy within any cycle time period according to the time length of any cycle time period of the pulsed RF electrical energy.

[0060] Step S212: Determine the angular frequency of the first sub-target harmonic according to the sum of the first angular frequency and the second angular frequency.

[0061] Step S213: Determine the angular frequency of the second sub-target harmonic according to the difference between the first angular frequency and the second angular frequency.

[0062] Therefore, in the above harmonic processing method of the present application, the angular frequencies of the first sub-target harmonic and the second sub-target harmonic are respectively determined according to the sum value and the difference value of the first angular frequency and the second angular frequency.

[0063] Among them, step S212 and step S213 may be the steps specifically included in the foregoing step S211, that is, step S211 "determine the angular frequencies of the first sub-target harmonic and the second sub-target harmonic according to the first angular frequency and the second angular frequency" may specifically include step S212: determine the angular frequency of the first sub-target harmonic according to the sum of the first angular frequency and the second angular frequency, and step S213: determine the angular frequency of the second sub-target harmonic according to the difference between the first angular frequency and the second angular frequency.

[0064] Specifically, when actually performing the output, according to the waveform of the pulsed radio frequency electrical energy, the relational expression of the waveform of the pulsed radio frequency electrical energy can be D×cos(ω1×t)+[sin(2π×D) / 4π]×[cos(ω2×t)+cos(ω3×t)], where ω1 is the first angular frequency, ω2 is the angular frequency of the first sub-target harmonic, that is, the sum of the first angular frequency and the second angular frequency, ω3 is the angular frequency of the second sub-target harmonic, that is, the difference between the first angular frequency and the second angular frequency, and D is the conduction duty cycle of the pulsed radio frequency electrical energy in each cycle period. Among them, D×cos(ω1×t) is the pulsed radio frequency electrical energy to be output, and [sin(2π×D) / 4π]×[cos(ω2×t)+cos(ω3×t)] is the target harmonic that is not desired to be output, and the target harmonic is composed of two parts, the first sub-target harmonic and the second sub-target harmonic, which are cos(ω2×t) and cos(ω3×t) respectively. The angular frequencies of the first sub-target harmonic and the second sub-target harmonic are ω2 and ω3 respectively. Furthermore, ω2 and ω3 are respectively determined according to the sum value and the difference value of the first angular frequency and the second angular frequency.

[0065] In some embodiments, the first angular frequency can be greater than the second angular frequency.

[0066] Furthermore, the ratio of the first angular frequency to the second angular frequency can be greater than a preset ratio.

[0067] Furthermore, the filtering parameters of the harmonic processing unit include a first resonance frequency and a second resonance frequency. Among them, as Figure 4 shown, the harmonic processing method may further include:

[0068] Step S310: Control and adjust the first resonance frequency and the second resonance frequency of the harmonic processing unit to correspond to the angular frequency of the first sub-target harmonic and the angular frequency of the second sub-target harmonic respectively, so as to filter out the target harmonic in the pulsed radio frequency electrical energy.

[0069] Thus, for the above harmonic processing method in the present application, for the corresponding first sub-target harmonic and second sub-target harmonic, the resonance method can be used to filter out the first sub-target harmonic and the second sub-target harmonic, and specifically includes a first resonance frequency and a second resonance frequency. By controlling and adjusting the first resonance frequency and the second resonance frequency of the harmonic processing unit to correspond to the angular frequency of the first sub-target harmonic and the angular frequency of the second sub-target harmonic respectively, the target harmonic in the pulsed radio frequency electrical energy can be accurately filtered out.

[0070] Among them, step S310 may be the steps specifically included in the aforementioned step S300, that is, step S300 "control and adjust the filtering parameters of the harmonic processing unit to correspond to the waveform parameters of the target harmonic to filter out the target harmonic in the pulsed RF electrical energy" may specifically include step S310: control and adjust the first resonance frequency and the second resonance frequency of the harmonic processing unit to correspond to the angular frequency of the first sub-target harmonic and the angular frequency of the second sub-target harmonic respectively, so as to filter out the target harmonic in the pulsed RF electrical energy.

[0071] Specifically, the resonance frequency and the angular frequency are converted through f = ω / 2π, where f is the frequency and ω is the angular frequency.

[0072] Specifically, the harmonic processing unit may include two resonance modules to respectively correspond to the first harmonic frequency and the second harmonic frequency.

[0073] Among them, Figure 4 Steps S111 and S112 in Figure 3 Please refer to the relevant introduction in the foregoing for details and will not be elaborated here.

[0074] Please refer to Figure 5 , Figure 5 which is another flowchart of the harmonic processing method in some embodiments of the present application. The harmonic processing unit also has adjustable first and second capacitance values. Among them, as Figure 5 shown, the harmonic processing method may include:

[0075] Step S111: Obtain the first angular frequency of the sine wave of the pulsed RF electrical energy in any first time period.

[0076] Step S121: Obtain the second angular frequency of the pulsed RF electrical energy in any periodic time period according to the time length of any periodic time period of the pulsed RF electrical energy.

[0077] Step S212: Determine the angular frequency of the first sub-target harmonic according to the sum of the first angular frequency and the second angular frequency.

[0078] Step S213: Determine the angular frequency of the second sub-target harmonic according to the difference between the first angular frequency and the second angular frequency.

[0079] Step S311: Control and adjust the first capacitance value and the second capacitance value of the harmonic processing unit so that the first resonance frequency and the second resonance frequency of the harmonic processing unit respectively correspond to the angular frequency of the first sub-target harmonic and the angular frequency of the second sub-target harmonic, so as to filter out the target harmonic in the pulsed RF electrical energy.

[0080] Among them, step S311 may be the steps specifically included in the foregoing step S310, that is, step S310 "control and adjust the first resonance frequency and the second resonance frequency of the harmonic processing unit to correspond to the angular frequency of the first sub-target harmonic and the angular frequency of the second sub-target harmonic respectively, so as to filter out the target harmonics in the pulsed RF electrical energy", and specifically may include step S311: control and adjust the first capacitance value and the second capacitance value of the harmonic processing unit, so that the first resonance frequency and the second resonance frequency of the harmonic processing unit correspond to the angular frequency of the first sub-target harmonic and the angular frequency of the second sub-target harmonic respectively, so as to filter out the target harmonics in the pulsed RF electrical energy.

[0081] Please refer to Figure 6 , Figure 6 which is yet another flowchart of the harmonic processing method in some embodiments of the present application. Alternatively, as Figure 6 shown, the harmonic processing method may also include:

[0082] Step S111: Obtain the first angular frequency of the sine wave of the pulsed RF electrical energy within any first time period.

[0083] Step S121: Obtain the second angular frequency of the pulsed RF electrical energy within any period time period according to the time length of any period time period of the pulsed RF electrical energy.

[0084] Step S212: Determine the angular frequency of the first sub-target harmonic according to the sum of the first angular frequency and the second angular frequency.

[0085] Step S213: Determine the angular frequency of the second sub-target harmonic according to the difference between the first angular frequency and the second angular frequency.

[0086] Step S312: Control and adjust the connection between the harmonic processing unit and the transmission path of the pulsed RF electrical energy in a target manner, so that the first resonance frequency and the second resonance frequency of the harmonic processing unit correspond to the angular frequency of the first sub-target harmonic and the angular frequency of the second sub-target harmonic respectively, so as to filter out the target harmonics in the pulsed RF electrical energy.

[0087] Thus, in the above harmonic processing method of the present application, by adjusting the capacitance value of a single capacitor or connecting multiple capacitors with different capacitance values, the first resonance frequency and the second resonance frequency are adjusted, and the first resonance frequency and the second resonance frequency of the harmonic processing unit correspond to the angular frequency of the first sub-target harmonic and the angular frequency of the second sub-target harmonic respectively, so that the target harmonics in the pulsed RF electrical energy can be accurately filtered out.

[0088] Among them, step S312 may be the steps specifically included in the foregoing step S310, that is, step S310 "control and adjust the first resonance frequency and the second resonance frequency of the harmonic processing unit to correspond to the angular frequency of the first sub-target harmonic and the angular frequency of the second sub-target harmonic respectively, so as to filter out the target harmonics in the pulsed RF electrical energy", which may specifically include step S312: control and adjust the connection between the harmonic processing unit and the transmission path of the pulsed RF electrical energy in a target manner, so that the first resonance frequency and the second resonance frequency of the harmonic processing unit correspond to the angular frequency of the first sub-target harmonic and the angular frequency of the second sub-target harmonic respectively, so as to filter out the target harmonics in the pulsed RF electrical energy.

[0089] Specifically, each resonance module of the harmonic processing unit may include an inductor and at least one capacitor to have a corresponding resonance frequency, and have an adjustable capacitance value. The two resonance modules of the harmonic processing unit respectively correspond to having an adjustable first capacitance value and a second capacitance value.

[0090] Among them, Figure 5 、 Figure 6 For the specific steps of step S111, step S121, step S212 and step S213 in Figure 4 reference may be specifically made to the relevant introduction in the foregoing

[0091] and will not be elaborated here.

[0092] Please refer to Figure 7 , Figure 7 which is a schematic block diagram of a harmonic processing device in some embodiments of the present application. As Figure 7 shown, the present application also provides a harmonic processing device 10. The harmonic processing device 10 uses the above harmonic processing method to filter out the target harmonics in the pulsed RF electrical energy RF1. Among them, the harmonic processing device 10 includes an input end 100, a harmonic processing unit 200, and a control unit 300. The input end 100 is used to input the pulsed RF electrical energy RF1. The harmonic processing unit 200 is used to filter out the target harmonics in the pulsed RF electrical energy RF1. The control unit 300 is used to obtain the waveform parameters of the pulsed RF electrical energy RF1, determine the waveform parameters of the target harmonics according to the waveform parameters of the pulsed RF electrical energy RF1, and control and adjust the filtering parameters of the harmonic processing unit 200 to correspond to the waveform parameters of the target harmonics, so as to filter out the target harmonics in the pulsed RF electrical energy RF1.

[0093] Please refer to again Figure 1 . As Figure 1 shown, the harmonic processing method includes:

[0094] Step S100: Obtain the waveform parameters of the pulsed RF electrical energy.

[0095] Step S200: Determine the waveform parameters of the target harmonics according to the waveform parameters of the pulsed RF electrical energy.

[0096] Step S300: Control the filtering parameters of the harmonic processing unit to correspond to the waveform parameters of the target harmonics, so as to filter out the target harmonics in the pulsed RF electrical energy.

[0097] As Figure 7 shown, the control unit 300 can be connected to both the input end 100 and the harmonic processing unit 200, and the input end 100 can be connected to the harmonic processing unit 200.

[0098] In some embodiments, the control unit 300 is configured to obtain the first waveform parameters of the pulsed RF electrical energy RF1 in any first time period, and obtain the second waveform parameters of the pulsed RF electrical energy RF1 in any cycle time period, and determine the waveform parameters of the first sub-target harmonics and the second sub-target harmonics according to the obtained first waveform parameters and the second waveform parameters.

[0099] Further, the control unit 300 is configured to obtain the first angular frequency of the sine wave of the pulsed RF electrical energy RF1 in any first time period, and obtain the second angular frequency of the pulsed RF electrical energy RF1 in any cycle time period according to the time length of any cycle time period of the pulsed RF electrical energy RF1, and determine the angular frequencies of the first sub-target harmonics and the second sub-target harmonics according to the first angular frequency and the second angular frequency.

[0100] Specifically, the control unit 300 determines the angular frequency of the first sub-target harmonics according to the sum of the first angular frequency and the second angular frequency, and determines the angular frequency of the second sub-target harmonics according to the difference between the first angular frequency and the second angular frequency.

[0101] Please refer to together Figure 8 , Figure 8 which is a block diagram of the harmonic processing unit in some embodiments of the present application. As Figure 7 , Figure 8 shown, the harmonic processing unit 200 may include a first harmonic processing module 210 and a second harmonic processing module 220, and both the first harmonic processing module 210 and the second harmonic processing module 220 are connected to the input end 100.

[0102] In some embodiments, the first harmonic processing module 210 has a first resonance frequency, and the second harmonic processing module 220 has a second resonance frequency.

[0103] In some embodiments, the harmonic processing device 10 may further include an output terminal 400. The first harmonic processing module 210 and the second harmonic processing module 220 are connected between the input terminal 100 and the output terminal 400. The output terminal 400 is configured to output the pulsed radio frequency electrical energy RF1 with the target harmonics filtered out.

[0104] In some embodiments, the control unit 300 is connected to both the first harmonic processing module 210 and the second harmonic processing module 220. The control unit 300 is configured to control and adjust the first resonance frequency of the first harmonic processing module 210 and the second resonance frequency of the second harmonic processing module 220 to correspond to the angular frequency of the first sub-target harmonic and the angular frequency of the second sub-target harmonic respectively, so as to filter out the target harmonics in the pulsed radio frequency electrical energy RF1.

[0105] Please refer to Figure 9 , Figure 9 together, which is a circuit schematic diagram of the first harmonic processing module and the second harmonic processing module in some embodiments of the present application. As shown in Figure 7 、 Figure 8 、 Figure 9 ,the first harmonic processing module 210 may include a first capacitor C1 and a first inductor L1. The first capacitor C1 and the first inductor L1 are sequentially connected between the connection point between the input terminal 100 and the output terminal 400 and the ground GND. Among them, the first capacitor C1 is an adjustable capacitor. The second harmonic processing module 220 may include a second capacitor C2 and a second inductor L2. The second capacitor C2 and the second inductor L2 are sequentially connected between the connection point between the input terminal 100 and the output terminal 400 and the ground GND. Among them, the second capacitor C2 is an adjustable capacitor. Thus, the first harmonic processing module 210 has an adjustable first capacitor C1 value, and the second harmonic processing module 220 has an adjustable second capacitor C2 value.

[0106] In some embodiments, the control unit 300 is configured to control and adjust the capacitance value of the first capacitor C1 and the capacitance value of the second capacitor C2, so as to correspondingly adjust the first capacitor C1 value and the second capacitor C2 value, and correspondingly make the first resonance frequency of the first harmonic processing module 210 and the second resonance frequency of the second harmonic processing module 220 correspond to the angular frequency of the first sub-target harmonic and the angular frequency of the second sub-target harmonic respectively, so as to filter out the target harmonics in the pulsed radio frequency electrical energy RF1.

[0107] Please refer to Figure 10 , Figure 10 together, which is another circuit schematic diagram of the first harmonic processing module in some embodiments of the present application. Taking the first harmonic processing module 210 as an example for illustration, the second harmonic processing module 220 may have the same circuit structure as the first harmonic processing module 210. Specifically, as shown inFigure 7 , Figure 8 , Figure 10 As shown, the first harmonic processing module 210 may include at least two first switches, at least two first capacitors C1, and at least two first inductors L1. Each corresponding first switch, first capacitor C1, and first inductor L1 are connected in series between the connection point between the input terminal 100 and the output terminal 400 and the ground GND. The value of the first capacitor C1 changes according to the number of first switches turned on. When the target number of first switches are turned on, the harmonic processing unit 200 is connected to the transmission path of the pulsed radio frequency electrical energy RF1 in a target manner.

[0108] In some embodiments, the control unit 300 is configured to control and adjust the first harmonic processing module 210 and the second harmonic processing module 220 to be connected to the transmission path of the pulsed radio frequency electrical energy RF1 in a target manner, such that the first resonance frequency of the first harmonic processing module 210 and the second resonance frequency of the second harmonic processing module 220 respectively correspond to the angular frequency of the first sub-target harmonic and the angular frequency of the second sub-target harmonic, so as to filter the target harmonics in the pulsed radio frequency electrical energy RF1.

[0109] Wherein, the transmission path of the pulsed radio frequency electrical energy RF1 is also the transmission path between the input terminal 100 and the output terminal 400.

[0110] In one or more embodiments, the control unit 300 may be a general-purpose processor such as a central processing unit (CPU), or may be a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field-programmable gate array (FPGA), or other programmable logic devices, discrete gate logic devices, transistor logic devices, etc. logical control devices, or may also be a microprocessor such as a micro control unit (MCU). The control unit 300 may further include an adjustment device such as a rotating motor to perform the adjustment step.

[0111] Wherein, the steps of the harmonic processing method and the functional operations performed by the harmonic processing device 10 correspond to each other, and the relevant content can be referred to each other.

[0112] The harmonic processing method and harmonic processing device 10 of the present application can, through the above steps and structures, determine that the target harmonics in the output process of the pulsed radio frequency electrical energy RF1 specifically include the first sub-target harmonics and the second sub-target harmonics, and can respectively determine the angular frequencies of the first sub-target harmonics and the second sub-target harmonics, and then control and adjust the filtering parameters of the harmonic processing unit 200 to correspond to the angular frequencies of the first sub-target harmonics and the second sub-target harmonics, so as to accurately filter all the target harmonics in the pulsed radio frequency electrical energy RF1, improving the output effect.

[0113] Please refer to Figure 11 , Figure 11 which is a block schematic diagram of a radio frequency power supply device in some embodiments of the present application. As Figure 11 shown, the present application also provides a radio frequency power supply device 1, and the radio frequency power supply device 1 includes the above-mentioned harmonic processing device 10.

[0114] Please refer to again Figure 7 . As Figure 7 shown, the harmonic processing device 10 uses the above-mentioned harmonic processing method to filter the target harmonics in the pulsed radio frequency electrical energy RF1. Among them, the harmonic processing device 10 includes an input end 100, a harmonic processing unit 200, and a control unit 300. The input end 100 is used to input the pulsed radio frequency electrical energy RF1. The harmonic processing unit 200 is used to filter the target harmonics in the pulsed radio frequency electrical energy RF1. The control unit 300 is used to obtain the waveform parameters of the pulsed radio frequency electrical energy RF1, determine the waveform parameters of the target harmonics according to the waveform parameters of the pulsed radio frequency electrical energy RF1, and control and adjust the filtering parameters of the harmonic processing unit 200 to correspond to the waveform parameters of the target harmonics, so as to filter the target harmonics in the pulsed radio frequency electrical energy RF1.

[0115] Among them, for the more specific structure of the harmonic processing device 10, reference can be made to the relevant content of the harmonic processing device 10 in any of the foregoing embodiments, which will not be elaborated here.

[0116] In some embodiments, the radio frequency power supply device 1 may further include a radio frequency source, and the radio frequency source is connected to the harmonic processing device 10, and the radio frequency source is used to output the pulsed radio frequency electrical energy RF1.

[0117] In some embodiments, the radio frequency power supply device 1 is used to be connected to a load, so as to transmit the pulsed radio frequency electrical energy RF1 output by the radio frequency source to the load after filtering the target harmonics through the harmonic processing unit 200.

[0118] The harmonic processing method, harmonic processing device 10, and radio frequency power supply device 1 of the present application can, through the above steps and structures, determine that the target harmonics during the output of pulsed radio frequency electrical energy RF1 specifically include a first sub-target harmonic and a second sub-target harmonic, and can respectively determine the angular frequencies of the first sub-target harmonic and the second sub-target harmonic. Furthermore, the filtering parameters of the harmonic processing unit 200 are controlled to correspond to the angular frequencies of the first sub-target harmonic and the second sub-target harmonic, so as to accurately filter all the target harmonics in the pulsed radio frequency electrical energy RF1, improving the output effect.

[0119] The present application also provides a computer-readable storage medium storing a computer program that, when running on a computer or a processor, implements the harmonic processing method of any of the foregoing embodiments.

[0120] In the multiple embodiments provided by the present application, it should be understood that the disclosed methods, devices, and equipment can be implemented in other ways. For example, the device embodiments described above are merely illustrative; for example, the division of units is only a logical function division, and there can be other division methods in actual implementation; for example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the displayed or discussed couplings or direct couplings or communication connections to each other can be through some interfaces, and the indirect couplings or communication connections of devices or units can be in electrical, mechanical, or other forms.

[0121] The units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they can be located in one place or distributed to multiple network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0122] In addition, in each embodiment of the present invention, the functional units can be integrated into one processing unit, or each unit can be physically included separately, or two or more units can be integrated into one unit. The above integrated units can be implemented in the form of hardware or in the form of a combination of hardware and software functional units.

[0123] The integrated units implemented in the form of software functional units can be stored in a computer-readable storage medium. The above-mentioned software functional units stored in a storage medium include several instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) to execute some steps of the methods according to the embodiments of the present invention. The foregoing storage medium includes: various media such as USB flash drives, mobile hard disks, read-only memories (ROM), random access memories (RAM), magnetic disks, or optical discs that can store program codes.

[0124] The above description is only a specific implementation manner of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present application can easily think of changes or substitutions, which should be covered by the protection scope of the present application; without conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. A harmonic processing method, characterized in that: Applied to a harmonic processing device having a harmonic processing unit, the harmonic processing method is used to filter out target harmonics in pulsed radio frequency power by the harmonic processing unit connected to a transmission path of pulsed radio frequency power; Wherein, the harmonic processing method comprises: Obtaining waveform parameters of pulsed radio frequency electric energy; Determining waveform parameters of target harmonics according to waveform parameters of pulsed radio frequency electric energy; The filter parameters of the harmonic processing unit are controlled and adjusted to correspond to the waveform parameters of the target harmonics, so as to filter out the target harmonics in the pulsed radio frequency electric energy.

2. The harmonic processing method according to claim 1, characterized in that: Each cycle period of the pulsed radio frequency electric energy includes a first period and a second period, and a waveform of the pulsed radio frequency electric energy in the first period is different from a waveform in the second period; Wherein, the waveform parameters of the pulsed radio frequency electric energy are obtained, including: Acquire a first waveform parameter of the pulsed radio frequency electric energy in any first time period; Obtaining a second waveform parameter of the pulsed radio frequency electric energy in any period of time; The target harmonic includes a first sub-target harmonic and a second sub-target harmonic, and the waveform parameters of the target harmonic are determined according to the waveform parameters of the pulsed radio frequency electric energy, including: The waveform parameters of the first sub-target harmonic and the waveform parameters of the second sub-target harmonic are determined according to the acquired first waveform parameters and second waveform parameters.

3. The harmonic processing method according to claim 2, characterized in that: The waveform of the pulsed radio frequency electric energy in the first time period is a sine wave, and the waveform of the pulsed radio frequency electric energy in the second time period is a straight wave with zero amplitude; Wherein, the first waveform parameter includes a first angular frequency; the obtaining of the first waveform parameter of the pulsed radio frequency electric energy in any first time period includes: obtaining the first angular frequency of the sine wave of the pulsed radio frequency electric energy in any first time period; The second waveform parameter includes a second angular frequency; and obtaining the second waveform parameter of the pulsed radio frequency electric energy in any cycle period includes: obtaining the second angular frequency of the pulsed radio frequency electric energy in any cycle period according to the time length of any cycle period of the pulsed radio frequency electric energy.

4. The harmonic processing method according to claim 3, characterized in that: The waveform parameters of the first sub-target harmonic and the second sub-target harmonic include angular frequency; The step of determining the waveform parameters of the first sub-target harmonic and the waveform parameters of the second sub-target harmonic according to the acquired first waveform parameters and second waveform parameters includes: The angular frequencies of the first sub-target harmonic and the second sub-target harmonic are determined according to the first angular frequency and the second angular frequency.

5. The harmonic processing method according to claim 4, characterized in that: The step of determining the angular frequencies of the first sub-target harmonic and the second sub-target harmonic according to the first angular frequency and the second angular frequency includes: Determining the angular frequency of the first sub-target harmonic according to the sum of the first angular frequency and the second angular frequency; The angular frequency of the second sub-target harmonic is determined according to the difference between the first angular frequency and the second angular frequency.

6. The harmonic processing method according to claim 5, characterized in that: The filtering parameters of the harmonic processing unit include a first resonant frequency and a second resonant frequency; The control and adjustment of the filtering parameters of the harmonic processing unit correspond to the waveform parameters of the target harmonics to filter out the target harmonics in the pulsed radio frequency power, including: The first resonant frequency and the second resonant frequency of the harmonic processing unit are controlled and adjusted to correspond to the angular frequency of the first sub-target harmonic and the angular frequency of the second sub-target harmonic, respectively, so as to filter out the target harmonics in the pulsed radio frequency electric energy.

7. The harmonic processing method according to claim 6, characterized in that: The harmonic processing unit also has an adjustable first capacitance value and a second capacitance value, and the control and adjustment of the first resonant frequency and the second resonant frequency of the harmonic processing unit correspond to the angular frequency of the first sub-target harmonic and the angular frequency of the second sub-target harmonic respectively, so as to filter out the target harmonic in the pulsed radio frequency electric energy, including: Controlling and adjusting a first capacitance value and a second capacitance value of the harmonic processing unit so that a first resonant frequency and a second resonant frequency of the harmonic processing unit correspond to an angular frequency of a first sub-target harmonic and an angular frequency of a second sub-target harmonic, respectively, to filter out target harmonics in pulsed radio frequency electric energy; Alternatively, the harmonic processing unit is controlled and adjusted to be connected with the transmission path of the pulsed RF power in a target manner so that the first resonant frequency and the second resonant frequency of the harmonic processing unit correspond to the angular frequency of the first sub-target harmonic and the angular frequency of the second sub-target harmonic, respectively, so as to filter out the target harmonics in the pulsed RF power.

8. A harmonic processing device, characterized in that: The harmonic processing device uses the harmonic processing method according to any one of claims 1 to 7 to filter out target harmonics in the pulsed radio frequency electric energy; Wherein, the harmonic processing device comprises: An input terminal, used for inputting the pulsed radio frequency electric energy; A harmonic processing unit, used for filtering out the target harmonics in the pulsed radio frequency electric energy; A control unit is used to obtain the waveform parameters of the pulsed radio frequency electric energy, determine the waveform parameters of the target harmonics according to the waveform parameters of the pulsed radio frequency electric energy, and control and adjust the filtering parameters of the harmonic processing unit to correspond to the waveform parameters of the target harmonics, so as to filter out the target harmonics in the pulsed radio frequency electric energy.

9. A radio frequency power supply device, characterized in that: It comprises the harmonic processing device as claimed in claim 8.

10. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a computer program, and when the computer program runs on a computer or a processor, the harmonic processing method according to any one of claims 1 to 7 is implemented.

Images