Semiconductor compound semi-finished product casting equipment and method

Abstract

The invention relates to the technical field of semiconductor manufacturing, and discloses semiconductor compound semi-finished product casting equipment and method.The casting equipment has a first direction, a second direction and a third direction which are vertically intersected in pairs, and comprises a rack; the crucible is used for containing raw material powder; the heating furnace is used for heating the crucible, so that the raw material powder is heated to form molten liquid; the mold is used for casting and molding the semi-finished semiconductor compound product; the hoisting assembly is used for hoisting the crucible to move close to or away from the mold; and the deflector rod assembly is used for pushing the hoisted crucible to rotate so as to pour the molten liquid into the mold for molding. The device has the beneficial effects that the automation degree of semiconductor compound casting is improved, the labor intensity of workers and the safety risk are reduced, meanwhile, the transfer time of the crucible and the pouring speed of molten liquid in the crucible are controlled, and the production efficiency and the casting quality of semi-finished products are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing, and particularly to a semiconductor compound semi-finished product casting device and method. Background Art

[0002] Semiconductor compounds are the main materials for manufacturing electronic devices such as integrated circuits and transistors. Generally, a casting process is used to process the raw materials of semiconductor compounds to form semi-finished products, and then the semi-finished products are further processed to make corresponding electronic devices.

[0003] In the prior art, when casting the semi-finished products of semiconductor compounds, it is necessary to manually transport the crucible and pour the molten liquid in the crucible into the mold to form semi-finished products. During the transportation process, the manual labor intensity is high, and the casting process is in a high-temperature environment, which is not conducive to the physical health of workers. Moreover, when manually pouring the crucible, there is a certain safety risk. At the same time, it is not conducive to controlling the transportation time of the crucible and the pouring rate of the molten liquid in the crucible, resulting in low production efficiency and reduced casting quality of semi-finished products. Summary of the Invention

[0004] The purpose of the present invention is to provide a semiconductor compound casting device and method, which can improve the automation degree of semiconductor compound casting, reduce the labor intensity and safety risk of workers. At the same time, it is conducive to controlling the transportation time of the crucible and the pouring rate of the molten liquid in the crucible, improving the production efficiency and the casting quality of semi-finished products.

[0005] To achieve the above purpose, the present invention provides a semiconductor compound semi-finished product casting device, which has a first direction, a second direction and a third direction that are perpendicular to each other in pairs, and includes

[0006] A frame;

[0007] A crucible for containing raw material powder;

[0008] A heating furnace for heating the crucible to heat the raw material powder to form a molten liquid;

[0009] A mold for casting and forming semiconductor compound semi-finished products;

[0010] A hoisting assembly for hoisting the crucible to move close to or away from the mold;

[0011] A lever assembly for pushing the hoisted crucible to rotate and pour the molten liquid into the mold for forming.

[0012] Further, the hoisting assembly includes a first driving unit, a second driving unit, and a hook. The first driving unit is installed on the frame. The second driving unit is installed at the output end of the first driving unit and can move in the first direction driven by the first driving unit. The hook is connected to the output end of the second driving unit. The crucible is provided with a lug corresponding to the hook, and the second driving unit can drive the hook to move in the third direction.

[0013] Further, the first driving unit includes a first rack, a first guide rail, a mounting bracket, a first reduction motor, and a first gear. The first rack and the first guide rail extend in the first direction. The first rack and the first guide rail are arranged at intervals along the second direction on the frame. The mounting bracket is fixedly connected to the slider of the first guide rail. The first reduction motor is fixedly arranged on the mounting bracket, and its output end is connected to the first gear. The first reduction motor drives the first gear to engage with the first rack for transmission, thereby driving the mounting bracket to move in the first direction. The second driving unit is connected to the mounting bracket.

[0014] Further, the second driving unit includes a second rack, a second guide rail, a support plate, a second reduction motor, and a second gear. The second rack and the second guide rail extend in the third direction. The second rack and the second guide rail are arranged at intervals along the second direction on the mounting bracket. The support plate is fixedly connected to the slider of the second guide rail. The second reduction motor is fixedly arranged on the support plate, and its output end is connected to the second gear. The second gear engages with the second rack. The second reduction motor drives the second gear to engage with the second rack for transmission, thereby driving the support plate to move in the third direction. The lever assembly is installed on the support plate.

[0015] Further, the hook includes a straight portion and a bent portion. The extending direction of the straight portion is parallel to the third direction. One end of the straight portion is fixed to the second driving unit, and the other end of the straight portion is bent away from the support plate to form the bent portion. A limiting groove corresponding to the position of the lug is formed on the bent portion.

[0016] Further, the lever assembly includes a third driving unit and a lever unit. The third driving unit is in transmission connection with the lever unit, driving the lever unit to rotate to push the crucible to rotate and pour the molten liquid into the mold for molding.

[0017] Furthermore, the lever unit comprises a rotating shaft, a connecting rod, and a toggle shaft, wherein the rotating shaft is rotationally connected to the hoisting assembly and is transmission-connected to the third driving unit, the connecting rods are fixedly connected to both ends of the rotating shaft, the toggle shaft is arranged between the connecting rods, and the axial directions of the rotating shaft and the toggle shaft are parallel to the second direction;

[0018] The third driving unit drives the rotating shaft to rotate and then drives the shifting shaft to rotate, so that the outer wall of the shifting shaft contacts the outer wall of the crucible, and drives the crucible to rotate to pour the molten liquid into the mold for forming.

[0019] Furthermore, a tapered guide portion is symmetrically provided in the middle of the toggle shaft, and the outer diameter of one end of the tapered guide portion close to the middle of the toggle shaft is smaller than the outer diameter of the other end close to the end of the toggle shaft.

[0020] Furthermore, it also includes a funnel and a vibration unit. The funnel is arranged on the top of the mold and is used to introduce the molten liquid into the mold. The vibration unit is installed on the mold.

[0021] The present invention also provides a method for casting a semiconductor compound semi-finished product, based on any of the semiconductor compound semi-finished product casting equipment described above, comprising the following steps:

[0022] S1, the raw material powder in the crucible is heated to form a molten liquid;

[0023] S2, moving the crucible to above the mold, and tilting the crucible to allow the molten liquid to flow into the mold.

[0024] Compared with the prior art, the semiconductor compound casting equipment and method according to the embodiment of the present invention have the following beneficial effects: when casting a semiconductor compound semi-finished product, the crucible is transported and moved close to the mold by a hoisting assembly, and the hoisted crucible is pushed to rotate by a lever assembly to pour the molten liquid in the crucible into the mold for forming, thereby realizing automatic control of the transportation of the crucible and the pouring of the molten liquid, reducing the labor intensity of the workers, and being able to control the transportation time of the crucible and the pouring rate of the molten liquid in the crucible, thereby improving the production efficiency and the casting quality of the semi-finished product. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 2 is a schematic structural diagram of a semiconductor compound semi-finished product casting device according to an embodiment of the present invention;

[0026] Figure 2 is a schematic structural diagram of another perspective of a semiconductor compound semi-finished product casting device according to an embodiment of the present invention;

[0027] Figure 3is a diagram of the initial state of the semiconductor compound semi-finished product casting device according to an embodiment of the present invention;

[0028] Figure 4 It is a schematic diagram of the state of hoisting a crucible by a semiconductor compound semi-finished product casting device according to an embodiment of the present invention;

[0029] Figure 5 Schematic diagram of pouring molten liquid from a crucible of a semiconductor compound semi-finished product casting device according to an embodiment of the present invention;

[0030] Figure 6 It is a schematic assembly diagram of a first driving unit of a semiconductor compound semi-finished product casting device according to an embodiment of the present invention;

[0031] Figure 7 2 is a schematic structural diagram of a crucible of a semiconductor compound semi-finished product casting device according to an embodiment of the present invention;

[0032] Figure 8 2 is a schematic structural diagram of a second driving unit of a semiconductor compound semi-finished product casting device according to an embodiment of the present invention;

[0033] Figure 9 is a schematic structural diagram from another perspective of the second driving unit of the semiconductor compound semi-finished product casting equipment according to an embodiment of the present invention;

[0034] Figure 10 It is a schematic diagram of the appearance of a semiconductor compound semi-finished product casting device according to an embodiment of the present invention.

[0035] In the figure, 1, frame; 2, crucible; 21, lifting ear; 22, drainage port; 3, heating furnace; 4, mold; 5, lifting assembly; 51, first driving unit; 511, first rack; 512, first guide rail; 513, mounting frame; 514, first reduction motor; 515, first gear; 52, second driving unit; 521, second rack; 522, second guide rail; 523, support plate; 5231, support seat; 524, second reduction motor; 525, second gear; 53, hook; 531, straight part; 532, bend Part; 5321, limit groove; 54, cross bar; 6, lever assembly; 61, third drive unit; 611, third reduction motor; 612, first synchronous wheel; 613, second synchronous wheel; 614, transmission belt; 62, lever unit; 621, rotating shaft; 622, connecting rod; 623, toggle shaft; 6231, tapered guide; 624, reinforcing rod; 7, funnel; 8, vibration unit; 9, material cart; 10, housing; 101, exhaust duct; 102, control panel; X, first direction; Y, second direction; Z, third direction. DETAILED DESCRIPTION

[0036] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following embodiments are used to illustrate the present invention, but are not used to limit the scope of the present invention.

[0037] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "inner", "outer", etc. in the present invention is based on the positional relationship shown in the accompanying drawings. These terms are only used for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the devices and elements referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the present invention.

[0038] In the description of the present invention, it should be understood that the terms "first", "second", etc. are used in the present invention to describe various information, but this information should not be limited to these terms. These terms are only used to distinguish the same type of information from each other. For example, without departing from the scope of the present invention, "first" information may also be referred to as "second" information, and similarly, "second" information may also be referred to as "first" information.

[0039] As Figures 1 to 10 shown, a semiconductor compound semi-finished product casting device according to a preferred embodiment of the present invention is used to realize the automatic casting of semiconductor compound semi-finished products, and includes a frame 1, a crucible 2, a heating furnace 3, a mold 4, a hoisting assembly 5 and a lever assembly 6. For the convenience of description, refer to Figure 1 , define the length direction of the frame 1 as the first direction X, the width direction as the second direction Y, and the height direction as the third direction Z. Among them, the frame 1 serves as an installation carrier for installing other components. The crucible 2 is used to hold the raw material powder. The heating furnace 3 is used to heat the crucible 2 to heat the raw material powder to form a molten liquid; the mold 4 is used for casting and forming semiconductor compound semi-finished products; the hoisting assembly 5 is used to hoist the crucible 2 to move close to or away from the mold 4; the lever assembly 6 is used to push the hoisted crucible 2 to rotate to pour the molten liquid into the mold 4 for forming.

[0040] When casting the semiconductor compound semi-finished product, the raw material powder is put into the crucible 2 and placed in the heating furnace 3. The crucible 2 is heated to melt the raw material powder of the semiconductor compound into a liquid. Subsequently, the hoisting assembly 5 moves above the crucible 2, hoists the crucible 2 and moves it out of the heating furnace 3 to above the mold 4. The lever assembly 6 pushes the hoisted crucible 2 to rotate to pour the molten liquid into the mold 4 for forming. The overall automation degree is high, reducing the labor intensity of workers. The transfer time of the crucible 2 and the pouring rate of the molten liquid in the crucible 2 can be controlled, improving the production efficiency and the casting quality of the semi-finished product.

[0041] Specifically, refer to Figure 1 、 Figure 3, in this embodiment, the heating furnace 3 is placed on the frame 1. To avoid interference between the lifting assembly 5 and the lever assembly 6 during movement, the frame 1 is provided with a support plate 523 in the third direction Z. The support plate 523 is located at the middle position of the frame 1 and is used for placing the heating furnace 3. At the same time, the lifting assembly 5 and the lever assembly 6 are installed on the top of the frame 1.

[0042] Furthermore, to simplify the structure of the lifting assembly 5, in this embodiment, refer to Figures 1 to 5 , the lifting assembly 5 includes a first driving unit 51, a second driving unit 52 and a hook 53. Among them, the first driving unit 51 is installed on the frame 1, the second driving unit 52 is installed at the output end of the first driving unit 51 and can move in the first direction X under the drive of the first driving unit 51. The output end of the second driving unit 52 is connected with a hook 53. The crucible 2 is provided with a lifting lug 21 corresponding to the hook 53, and the second driving unit 52 can drive the hook 53 to move in the third direction Z. That is, through the coordinated action of the first driving unit 51 and the second driving unit 52, the hook 53 can move in the first direction X and the second direction Y for lifting the crucible 2. In this embodiment, refer to Figure 6 , the number of the lifting lugs 21 is two, and the number of the hooks 53 is also two, and they are arranged at intervals along the second direction Y on the support plate 523. To prevent the position between the hooks 53 from moving and improve the stability of the crucible 2 during lifting, a cross bar 54 is connected between the hooks 53, and the cross bar 54 extends in the second direction Y.

[0043] Furthermore, to facilitate the setting of the first driving unit 51, refer to Figure 6 , the first driving unit 51 includes a first rack 511, a first guide rail 512, a mounting bracket 513, a first reduction motor 514 and a first gear 515. Among them, the first rack 511 and the first guide rail 512 extend in the first direction X, the first rack 511 and the first guide rail 512 are arranged at intervals along the second direction Y on the frame 1, and the first rack 511 and the first guide rail 512 are fixedly arranged on the frame 1. The mounting bracket 513 is fixedly connected with the slider of the first guide rail 512. The first reduction motor 514 is fixedly arranged on the mounting bracket 513, and the output end is connected with a first gear 515. When the second reduction motor 524 operates, the first reduction motor 514 drives the first gear 515 to engage and drive with the first rack 511, thereby driving the mounting bracket 513 to move in the first direction X. Since the second driving unit 52 is connected with the mounting bracket 513, the second driving unit 52 is driven to move synchronously in the first direction X.

[0044] Similarly, to simplify the structure of the second driving unit 52, the structure of the second driving unit 52 is similar to that of the first driving unit 51. Specifically, refer to Figure 8 、 Figure 9, the second driving unit 52 includes a second rack 521, a second guide rail 522, a support plate 523, a second reduction motor 524 and a second gear 525. Among them, the second rack 521 and the second guide rail 522 extend in the third direction Z, and the second rack 521 and the second guide rail 522 are arranged at intervals along the second direction Y on the mounting frame 513. The support plate 523 is fixedly connected to the slider of the second guide rail 522. The second reduction motor 524 is fixedly arranged on the support plate 523 and the output end is connected with the second gear 525. The second gear 525 meshes with the second rack 521. When the second reduction motor 524 works, the second reduction motor 524 drives the second gear 525 to mesh and drive with the second rack 521, thereby driving the support plate 523 to move in the third direction Z. The third driving unit 61 is fixedly connected to the support plate 523, and the support plate 523 serves as the mounting carrier for the hook 53 and the lever assembly 6.

[0045] Further, in order to facilitate lifting the crucible 2 from the heating furnace 3, in this embodiment, refer to Figure 3 , Figure 8 , specifically, the hook 53 includes a straight portion 531 and a bent portion 532. Among them, the extending direction of the straight portion 531 is parallel to the third direction Z. One end of the straight portion 531 is fixedly connected to the second driving unit 52, and the other end of the straight portion 531 is bent toward the side away from the support plate 523 to form the bent portion 532. A limiting groove 5321 corresponding to the position of the lifting lug 21 is opened on the bent portion 532 to prevent the lifting lug 21 from disengaging from the hook 53. That is, when it is necessary to lift the crucible 2, the hook 53 moves to above the heating furnace 3 in the first direction X driven by the first driving unit 51. The hook 53 moves close to the frame 1 in the third direction Z driven by the second driving unit 52, so that the limiting groove 5321 is located below the lifting lug 21. Subsequently, the first driving unit 51 and the second driving unit 52 act synchronously, so that the limiting groove 5321 is located directly below the lifting lug 21. The hook 53 moves away from the frame 1 in the third direction Z driven by the second driving unit 52, so that the lifting lug 21 is caught in the limiting groove 5321, and the crucible 2 is lifted out of the heating furnace 3.

[0046] Further, in order to simplify the structure of the lever assembly 6 and improve the structural stability of the lever assembly 6, refer to Figure 8, the lever assembly 6 includes a third driving unit 61 and a lever unit 62, wherein the third driving unit 61 is in transmission connection with the lever unit 62, driving the lever unit 62 to rotate and push the crucible 2 to rotate and pour the molten liquid into the mold 4 for forming. In this embodiment, the lever unit 62 includes a rotating shaft 621, a connecting rod 622, and a shifting shaft 623, wherein the rotating shaft 621 is rotationally connected to the hanging assembly 5 and is transmission connected to the third driving unit 61. That is, the rotating shaft 621 is rotationally connected to the support plate 523. Specifically, in this embodiment, the support plate 523 is symmetrically provided with a support seat 5231 in the second direction Y, and a bearing is provided in the support seat 5231. The rotating shaft 621 is inserted in the bearing, so as to realize the rotating connection between the rotating shaft 621 and the hanging assembly 5. Connecting rods 622 are fixedly connected to both ends of the rotating shaft 621, and a toggle shaft 623 is provided between the connecting rods 622. The axial directions of the rotating shaft 621 and the toggle shaft 623 are parallel to the second direction Y; wherein, the third driving unit 61 drives the rotating shaft 621 to rotate and then drives the toggle shaft 623 to rotate, so that the outer wall of the toggle shaft 623 contacts the outer wall of the crucible 2, and pushes the crucible 2 to rotate around the axis of the ear 21 to pour the molten liquid into the mold 4 for forming.

[0047] Further, in order to facilitate the transmission connection between the third drive unit 61 and the lever unit 62, that is, the third drive unit 61 drives the lever unit 62 to rotate, specifically, the third drive unit 61 includes a third reduction motor 611, a first synchronous wheel 612, a second synchronous wheel 613, and a transmission belt 614, wherein the third reduction motor 611 is fixedly connected to the support plate 523, the output end of the third reduction motor 611 is connected to the first synchronous wheel 612, the second synchronous wheel 613 is fixedly sleeved on the rotating shaft 621, and a transmission belt 614 is connected between the first synchronous wheel 612 and the second synchronous wheel 613. When the third reduction motor 611 is working, the third reduction motor 611 drives the first synchronous wheel 612 to rotate, and drives the second synchronous wheel 613 to rotate through the transmission belt 614, and then drives the rotating shaft 621 to rotate, thereby realizing the transmission connection between the third drive unit 61 and the lever unit 62.

[0048] Furthermore, in order to facilitate the movement of the shaft 623 to limit the outer wall of the crucible 2 when pushing the crucible 2 and prevent the crucible 2 from moving in the second direction Y, in this embodiment, refer to Figure 8 The middle of the toggle shaft 623 is symmetrically provided with a tapered guide portion 6231, and the outer diameter of one end of the tapered guide portion 6231 close to the middle of the toggle shaft 623 is smaller than the outer diameter of the other end close to the end of the toggle shaft 623. In this way, the toggle shaft 623 is limited when pushing the outer wall of the crucible 2.

[0049] Further, in order to facilitate the molten liquid in the crucible 2 to flow out of the crucible, refer to Figure 7, a drainage port 22 is provided at the top of the crucible 2. When the toggle shaft 623 pushes the crucible 2, the toggle shaft 623 is on the same side of the drainage port 22.

[0050] Further, in some other embodiments, in order to improve the stability of the overall structure of the toggle rod unit 62, refer to Figure 8 , the toggle rod unit 62 further includes a reinforcing rod 624. Both ends of the reinforcing rod 624 are fixedly connected to a connecting rod 622 respectively, thereby improving the stability of the overall structure of the toggle rod unit 62.

[0051] Further, in order to facilitate the introduction of the molten liquid into the mold 4, and at the same time, the quality of the semi-finished product after cooling and forming, a funnel 7 and a vibration unit 8 are further included. Among them, the funnel 7 is arranged at the top of the mold 4 for introducing the molten liquid into the mold 4, and the vibration unit 8 is installed on the mold 4 for overflowing the bubbles in the molten liquid, making the molten liquid in the mold 4 evenly distributed, and improving the casting quality of the semi-finished product. In this embodiment, the vibration unit 8 adopts an ultrasonic vibration device.

[0052] Further, in order to facilitate the removal of the semi-finished product in the mold 4 after forming, refer to Figure 1 , a material cart 9 is provided at one end of the frame 1, and the mold 4 is installed on the material cart 9. When the semi-finished product is cooled and formed, the mold 4 and the semi-finished product can be directly transported to the blanking area through the material cart 9, further improving the degree of automation. In some other embodiments, in order to improve the safety during the overall operation of the casting equipment and prevent workers from contacting the high-temperature environment inside the equipment, refer to Figure 10 , the casting equipment further includes a housing 10. The housing 10 covers the frame 1. At the same time, an exhaust duct 101 is further provided at the top of the outer cover, which is beneficial to the cooling of the semi-finished product during forming. In order to facilitate the automatic control of the casting equipment and control the actions of the lifting assembly 5 and the toggle rod assembly 6 according to the casting requirements of different products, adjust the casting time and the pouring rate of the molten liquid, a control panel 102 is provided on the housing 10. The control panel 102 is electrically connected to the lifting assembly 5, the heating furnace 3, the toggle rod assembly 6, and the material cart 9 (which can be an AGV cart) for controlling the automatic process of the entire casting equipment.

[0053] The present invention also provides a method for casting a semiconductor compound semi-finished product, based on the above-mentioned semiconductor compound semi-finished product casting equipment, including the following steps:

[0054] S1. Heat the raw material powder in the crucible 2 to form a molten liquid;

[0055] S2. Move the crucible 2 above the mold 4, and tilt the crucible 2 so that the molten liquid flows into the mold 4.

[0056] For step S1, specifically, the crucible 2 containing the raw material powder is placed in the heating furnace 3, and the heating temperature and heating time of the heating furnace 3 are adjusted according to the casting parameters of the semi-finished product to be formed, so that the raw material powder in the crucible 2 is completely melted to form a molten liquid.

[0057] For step S2, specifically, the first driving unit 51 drives the second driving unit 52 and the hook 53 to move in the first direction X close to the heating furnace 3, and the second driving unit 52 drives the hook 53 to move in the third direction Z close to the frame 1, so that the hook 53 can cooperate with the crucible 2 to lift the crucible 2, and the first driving unit 51 and the second driving unit 52 work together to make the hook 53 lift the crucible 2 and move it out of the heating furnace 3, and the first driving unit 51 drives the crucible 2 to move in the first direction X to above the mold 4. At this time, the lever assembly 6 is actuated, that is, the third driving unit 61 drives the rotating shaft 621 to rotate, and then drives the lever to rotate and push the crucible 2 to rotate around the axis of the lifting ear 21, so that the bottom of the crucible 2 tilts upward, and then the molten liquid in the crucible 2 flows out into the mold 4. After the crucible completes the dumping action, each driving unit is reset.

[0058] In summary, the embodiments of the present invention provide a semiconductor compound casting device and method. When casting a semiconductor compound semi-finished product, the crucible 2 is transported by the lifting assembly 5 to move close to the mold 4, and the lifting crucible 2 is pushed to rotate by the lever assembly 6 to pour the molten liquid in the crucible 2 into the mold 4 for forming. The transportation of the crucible 2 and the pouring of the molten liquid are automatically controlled, which reduces the labor intensity of the workers, and can control the transportation time of the crucible 2 and the pouring rate of the molten liquid in the crucible 2, thereby improving the production efficiency and the casting quality of the semi-finished product.

[0059] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principles of the present invention. These improvements and substitutions should also be regarded as the scope of protection of the present invention.

Claims

1. A semiconductor compound semi-finished product casting device having a first direction, a second direction and a third direction which intersect each other perpendicularly, characterized in that: include frame; Crucible, used to hold raw material powder; A heating furnace, used for heating the crucible to heat the raw material powder to form a molten liquid; Molds, used for casting and molding semi-finished products of semiconductor compounds; A hoisting assembly, used for hoisting the crucible to move it close to or away from the mold; The lever assembly is used to push the hoisted crucible to rotate and pour the molten liquid into the mold for forming.

2. The semiconductor compound semi-finished product casting equipment according to claim 1, characterized in that: The lifting assembly includes a first driving unit, a second driving unit and a hook, the first driving unit is installed on the frame, the second driving unit is installed on the output end of the first driving unit, and can move in the first direction driven by the first driving unit, the output end of the second driving unit is connected to the hook, the crucible is provided with a lifting ear corresponding to the hook, and the second driving unit can drive the hook to move in the third direction.

3. The semiconductor compound semi-finished product casting equipment according to claim 2, characterized in that: The first driving unit includes a first rack, a first guide rail, a mounting frame, a first reduction motor and a first gear. The first rack and the first guide rail extend in the first direction. The first rack and the first guide rail are spaced apart on the frame along the second direction. The mounting frame is fixedly connected to a slider of the first guide rail. The first reduction motor is fixedly disposed on the mounting frame, and the output end is connected to the first gear. The first reduction motor drives the first gear to engage with the first rack for transmission, thereby driving the mounting frame to move in the first direction. The second driving unit is connected to the mounting frame.

4. The semiconductor compound semi-finished product casting equipment according to claim 3, characterized in that: The second driving unit includes a second rack, a second guide rail, a support plate, a second reduction motor and a second gear. The second rack and the second guide rail extend in the third direction. The second rack and the second guide rail are spaced apart on the mounting frame along the second direction. The support plate is fixedly connected to the slider of the second guide rail. The second reduction motor is fixedly arranged on the support plate and the output end is connected to the second gear. The second gear is meshed with the second rack. The second reduction motor drives the second gear to mesh with the second rack for transmission, thereby driving the support plate to move in the third direction. The shift rod assembly is installed on the support plate.

5. The semiconductor compound semi-finished product casting equipment according to claim 4, characterized in that: The hook includes a straight portion and a bent portion, the extension direction of the straight portion is parallel to the third direction, one end of the straight portion is fixed to the second driving unit, and the other end of the straight portion is bent toward a side away from the support plate to form the bent portion, and a limiting groove corresponding to the position of the hanging ear is provided on the bent portion.

6. The semiconductor compound semi-finished product casting equipment according to claim 1, characterized in that: The lever assembly comprises a third driving unit and a lever unit. The third driving unit is in transmission connection with the lever unit to drive the lever unit to rotate and push the crucible to rotate so as to pour the molten liquid into the mold for forming.

7. The semiconductor compound semi-finished product casting equipment according to claim 6, characterized in that: The lever unit comprises a rotating shaft, a connecting rod, and a toggle shaft. The rotating shaft is rotatably connected to the hoisting assembly and is transmission-connected to the third driving unit. The connecting rods are fixedly connected to both ends of the rotating shaft. The toggle shaft is arranged between the connecting rods. The axial directions of the rotating shaft and the toggle shaft are parallel to the second direction. The third driving unit drives the rotating shaft to rotate and then drives the shifting shaft to rotate, so that the outer wall of the shifting shaft contacts the outer wall of the crucible, and drives the crucible to rotate to pour the molten liquid into the mold for forming.

8. The semiconductor compound semi-finished product casting equipment according to claim 7, characterized in that: A conical guide portion is symmetrically arranged at the middle of the toggle shaft, and the outer diameter of one end of the conical guide portion close to the middle of the toggle shaft is smaller than the outer diameter of the other end close to the end of the toggle shaft.

9. The semiconductor compound semi-finished product casting equipment according to claim 1, characterized in that: It also includes a funnel and a vibration unit. The funnel is arranged on the top of the mold and is used to introduce the molten liquid into the mold. The vibration unit is installed on the mold.

10. A method for casting a semiconductor compound semi-finished product, based on the semiconductor compound semi-finished product casting equipment according to any one of claims 1 to 9, characterized in that: The following steps are involved: S1, the raw material powder in the crucible is heated to form a molten liquid; S2, moving the crucible to above the mold, and tilting the crucible to allow the molten liquid to flow into the mold.

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