Processing equipment, thermal compensation control method and system thereof and storage medium

Abstract

The invention relates to the field of machining equipment, in particular to machining equipment, a thermal compensation control method and system of the machining equipment and a storage medium. The machining equipment comprises a body, a moving part arranged on the body and a grating ruler used for measuring the position of the moving part; the thermal compensation control method comprises the steps of determining a thermal expansion coefficient of a grating ruler, a current temperature of a position where the grating ruler is located and a current distance between a measuring point of the grating ruler and an original point, and then calculating a first positioning error compensation value of the grating ruler according to the thermal expansion coefficient, the current temperature and the current distance of the grating ruler, and the measurement position of the moving part is compensated according to the first positioning error compensation value. According to the method, the moving part is fed more accurately according to the required displacement.

Description

Technical Field

[0001] The present invention relates to the field of processing equipment, and in particular, to a processing equipment and its thermal compensation control method, system, and storage medium. Background Art

[0002] Processing equipment, such as numerically controlled machine tools, machining centers, etc., is widely used in the manufacturing industry. With the increasing demand for high-precision machining in the manufacturing industry, the improvement of the machining stability of numerically controlled machine tools has been emphasized in the industry. At present, in the field of machine tools, the thermal error can reach 70% of the total manufacturing error. The full-closed-loop control system of numerically controlled machine tools has become the core technology for high-precision machining because it can directly measure the actual position of moving parts through grating scales and significantly eliminate the transmission chain errors (such as thermal expansion of lead screws, gear clearances, etc.). However, the accuracy of the full-closed-loop system is still restricted by thermal errors. Especially under the coupling effect of environmental temperature fluctuations and internal heat sources of the machine tool, it is easy to cause thermal expansion deformation of the grating scale, which directly affects the stability of machining accuracy.

[0003] In recent years, although the thermal compensation technology of the full-closed-loop system of machine tools has developed, such as thermal offset compensation based on temperature sensors, the existing compensation models are mainly based on the internal temperature detection of the machine tool (such as near the lead screw and spindle). The grating scale is also in a complex and changeable temperature field and is affected by motor heating, heat generated by lead screw friction, etc., and will also generate thermal deformation itself. This thermal deformation causes errors in moving parts (such as feed axes) due to the thermal expansion of the grating scale. For example, in the invention patent with the patent number CN107065771B, three temperature sensors are respectively arranged at positions such as the front bearing seat, lead screw, and rear bearing seat for temperature detection, while ignoring the influence of the thermal deformation generated by the grating scale itself.

[0004] Therefore, in order to improve the machining accuracy of the processing equipment system, it is necessary to accurately understand the change amount of the expansion or contraction of the grating scale, so as to compensate for this change amount, and as much as possible eliminate the error of the grating scale and improve the accuracy of the processing equipment. Summary of the Invention

[0005] To solve the above problems, the purpose of the present invention is to provide a processing equipment and its thermal compensation control method, system, and storage medium to solve the feed error of moving parts caused by the thermal deformation of the grating scale in the prior art.

[0006] The purpose of the present invention is achieved through the following technical solutions:

[0007] A thermal compensation control method for a processing equipment provided by the present invention, the processing equipment includes a main body, a moving part arranged on the main body, and a grating scale for measuring the position of the moving part, and is characterized in that the thermal compensation control method includes:

[0008] Determine the thermal expansion coefficient of the grating scale;

[0009] Obtain the current temperature of the grating scale and the current distance between the measurement point of the grating scale and the origin, where the position of the measurement point of the grating scale represents the position where the moving part is located;

[0010] Calculate the first positioning error compensation value of the grating scale according to the thermal expansion coefficient, current temperature and current distance of the grating scale;

[0011] Compensate the measured position of the moving part according to the first positioning error compensation value.

[0012] Further, along the length direction of the grating scale, obtain the temperatures at multiple positions of the grating scale, and obtain the current temperature of the grating scale at each position through curve fitting according to the temperatures at multiple positions.

[0013] Further, calculate the first positioning error compensation value according to the first error compensation formula, and the first error compensation formula is:

[0014]

[0015] where, E1 is the first positioning error compensation value; α is the thermal expansion coefficient of the grating scale; x is the current distance between the measurement point of the grating scale and the origin; T x is a function of the current temperature of the grating scale and the current distance x; t x is a function of the initial temperature of the grating scale and the current distance x.

[0016] Further, obtain the current ambient temperature of the grating scale, calculate the second positioning error compensation value of the grating scale according to the thermal expansion coefficient, current ambient temperature and current distance of the grating scale, and compensate the measured position of the moving part according to the first positioning error compensation value and the second positioning error compensation value.

[0017] Further, calculate the second positioning error compensation value according to the second error compensation formula, and the second error compensation formula is:

[0018] E2 = (T 环 - T 标 ) × α × x

[0019] where, E2 is the second positioning error compensation value; T 环 is the current ambient temperature at the position where the grating scale is located; T 标 is the standard temperature, where, at the standard temperature, the current positioning error value of the grating scale is zero; α is the thermal expansion coefficient of the grating scale; x is the current distance between the measurement point of the grating scale and the origin.

[0020] Further, along the length direction of the grating scale, obtain the temperatures at three or more positions at uniform intervals;

[0021] When compensating the measured position of the moving part according to the first positioning error compensation value and the second positioning error compensation value, the calculation formula for the final compensation value of the measured position of the moving part is:

[0022] E = -E1 - E2

[0023] Where E is the final compensation value.

[0024] Furthermore, the thermal expansion coefficient of the grating scale is calculated through the thermal expansion formula, and the thermal expansion formula is:

[0025]

[0026] Where α is the thermal expansion coefficient of the grating scale; ΔL is the expansion change amount of the grating scale measured when the moving part moves within the set stroke range during the experiment; ΔT is the change amount of the temperature of the grating scale measured when the moving part moves within the set stroke range during the experiment, and L is the set stroke range.

[0027] The second aspect of the embodiments of the present invention provides a thermal compensation control system for a processing device. The processing device includes a main body, a moving part arranged on the main body, and a grating scale for measuring the position of the moving part. The thermal compensation control system includes:

[0028] A coefficient calculation module, configured to determine the thermal expansion coefficient of the grating scale;

[0029] A parameter acquisition module, configured to acquire the current temperature of the grating scale and the current distance between the measurement point of the grating scale and the origin, where the position of the measurement point of the grating scale represents the position where the moving part is located;

[0030] An error calculation module, configured to calculate the first positioning error compensation value of the grating scale according to the thermal expansion coefficient, the current temperature, and the current distance of the grating scale;

[0031] An error compensation module, configured to compensate the measured position of the moving part according to the first positioning error compensation value.

[0032] The third aspect of the embodiments of the present invention provides a processing device, including a main body, a moving part arranged on the main body, and a grating scale for measuring the position of the moving part. The processing device further includes a thermal compensation control system, and the thermal compensation control system is used to implement the thermal compensation control method of the processing device in any one of the above, or the thermal compensation control system is the thermal compensation control system of the above-mentioned processing device.

[0033] The fourth aspect of the embodiments of the present invention provides a computer-readable storage medium. The computer-readable storage medium stores one or more programs, and the one or more programs can be executed by one or more processors to implement the steps in the thermal compensation control method of the processing device as described in any one of the above.

[0034] The beneficial effects of the present invention are as follows: During the processing of the processing equipment, the grating scale itself will also generate heat due to friction factors. This heat may cause the grating scale to deform, resulting in errors when the moving part feeds back according to the deformed grating scale. This application calculates the first positioning error compensation value of the grating scale based on the thermal expansion coefficient, current temperature, and current distance of the grating scale. Then, the measurement position of the moving part is compensated according to the first positioning error compensation value to make up for the part where the grating scale generates errors due to deformation, so that the moving part feeds more precisely according to the required displacement. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] The drawings described herein are used to provide a further understanding of the present invention, and constitute a part of this application. The schematic embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0036] Figure 1 is a flowchart of the thermal compensation control method for the processing equipment of the present invention;

[0037] Figure 2 is a schematic diagram of the expansion of the grating scale due to its own heat;

[0038] Figure 3 is a schematic diagram of the influence of the ambient temperature on the grating scale of the present invention;

[0039] Figure 4 is a schematic diagram of the principle of the thermal compensation control system for the processing equipment of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0040] In order to enable those skilled in the art to better understand the solution of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0041] In the first aspect of the embodiment of the present invention, a thermal compensation control method for a processing equipment is provided. The processing equipment includes a bed body, a moving part disposed on the body, and a grating scale for measuring the position of the moving part. Refer to Figure 1 and Figure 2 , the thermal compensation control method includes:

[0042] S100: Determine the thermal expansion coefficient of the grating scale;

[0043] S200: Obtain the current temperature of the grating scale and the current distance between the measurement point of the grating scale and the origin, where the position of the measurement point of the grating scale represents the position where the moving part is located;

[0044] S300: Calculate the first positioning error compensation value of the grating scale according to the thermal expansion coefficient, current temperature and current distance of the grating scale;

[0045] S400: Compensate the measured position of the moving part according to the first positioning error compensation value.

[0046] In the working state of the processing equipment of the prior art, the grating scale is also in a complex and changeable temperature field. Affected by factors such as motor heating and screw friction heat generation, it will also generate thermal deformation itself. This thermal deformation causes errors in the moving part (such as the feed axis) due to the thermal expansion of the grating scale. Therefore, it is necessary to calculate the thermal deformation amount of the grating scale according to the change of the temperature field of the grating scale, and finally eliminate the thermal expansion error caused by internal and external heat sources through error compensation. This application calculates the first positioning error compensation value of the grating scale according to the thermal expansion coefficient, current temperature and current distance of the grating scale. Then, the measured position of the moving part is compensated according to the first positioning error compensation value to make up for the part of the error caused by the deformation of the grating scale, so that the moving part can feed more accurately according to the required displacement.

[0047] Step S100 specifically includes:

[0048] Calculate the thermal expansion coefficient of the grating scale through the thermal expansion formula. The thermal expansion formula is:

[0049]

[0050] where α is the thermal expansion coefficient of the grating scale; ΔL is the expansion change amount of the grating scale measured when the moving part moves within the set stroke range during the experiment; ΔT is the change amount of the temperature of the grating scale measured when the moving part moves within the set stroke range during the experiment, and L is the set stroke range.

[0051] The thermal expansion coefficient of the grating scale is determined by the characteristics of the material and can be obtained specifically through experiments, such as through optical interference method, capacitance method, resistance method, mechanical expansion method, etc. In this embodiment, the thermal expansion coefficient of the grating scale is measured in advance through the following experiment. Specifically, during the experiment, record the expansion amount of the grating scale at a specific temperature, and obtain the thermal expansion coefficient according to the above thermal expansion formula. For example, if the original length of the grating scale is 1m, it expands by 20um, and the temperature change is 1℃, then the thermal expansion coefficient α is 20um / (1m×1℃) = 20×10 -6 C -1 . Here, only a numerical example is given for easy understanding, and the specific numerical unit can be determined according to needs in actual experiments or use.

[0052] Further, referring to Figure 2 , the thermal compensation control method is further optimized. Temperatures at multiple positions are obtained along the length direction of the grating scale, and the current temperature of the grating scale at each position is obtained through curve fitting. This method can capture the temperature distribution of the grating scale more accurately, thereby improving the accuracy and reliability of thermal compensation. The specific steps and details of this implementation manner will be elaborated in detail below.

[0053] Along the length direction of the grating scale, multiple temperature sensors are arranged according to actual needs and accuracy requirements. These sensors should be evenly distributed to ensure that the temperature changes of the grating scale can be comprehensively captured. When selecting temperature sensors, factors such as their measurement range, accuracy, response speed, and long-term stability should be considered to ensure the accuracy and reliability of the measurement results. Start the temperature acquisition system, and simultaneously record the temperature data measured by each temperature sensor. To ensure the accuracy of the data, the acquisition can be carried out after the processing equipment has been running stably for a period of time to eliminate the influence of transient temperature changes. Store the acquired temperature data in a specified data file for subsequent processing and analysis. Use mathematical software or programming tools to perform curve fitting on the acquired temperature data. The purpose of curve fitting is to find a curve that can accurately describe the temperature distribution of the grating scale. During the curve fitting process, different fitting functions (such as polynomial functions, exponential functions, etc.) can be tried, and the best fitting function can be determined by comparing the fitting errors. According to the temperature distribution curve obtained by fitting, as well as the thermal expansion coefficient and the current distance of the grating scale, calculate the positioning error compensation value caused by temperature.

[0054] To improve the accuracy of obtaining the temperature of the grating scale, temperatures at more than three positions are obtained at uniform intervals along the length direction of the grating scale to obtain the temperatures of the grating scale at multiple positions; for example, five temperature sensors are arranged along the length direction of the grating scale to obtain the temperatures of five positions of the grating scale. Figure 2 The dots in the two temperature function curves in

[0055] Further, referring to Figure 2 , calculate the first positioning error compensation value according to the first error compensation formula. The first error compensation formula is:

[0056]

[0057] where E1 is the first positioning error compensation value; α is the thermal expansion coefficient of the grating scale; x is the current distance between the measurement point of the grating scale and the origin; T x is a function of the current temperature of the grating scale and the current distance x; t xIt is a function of the initial temperature of the grating scale and the current distance x. The initial temperature is the temperature at different positions of the grating scale obtained before the processing equipment is started.

[0058] In this embodiment, the thermal compensation control method further refines the calculation method of the first positioning error compensation value and proposes a specific first error compensation formula. This formula comprehensively considers the thermal expansion coefficient of the grating scale, the current distance between the measurement point and the origin, and the functional relationship between the current temperature and the initial temperature of the grating scale changing with distance. The details of this embodiment will be elaborated below.

[0059] The above thermal expansion coefficient can be obtained by experimental measurement or by referring to the technical documentation of the grating scale. The current distance is measured by the grating scale to obtain the current distance between the moving part and the origin. The temperature functions T x , t x These two functions respectively represent the current temperature function and the initial temperature function of the grating scale at the current distance. They are obtained by collecting temperature data at multiple positions through temperature sensors arranged along the length direction of the grating scale, and the functional relationships between the current temperature and the initial temperature of the grating scale changing with distance at each position are obtained through curve fitting, referring to Figure 2 .

[0060] Arrange a sufficient number of temperature sensors on the grating scale to ensure that the temperature distribution can be comprehensively captured. Start the temperature acquisition system and record the temperature data of each temperature sensor at different positions. Process and analyze the collected temperature data, and obtain the functional relationships between the current temperature and the initial temperature of the grating scale at the current distance through curve fitting. Substitute the determined thermal expansion coefficient α, the current distance x, and the temperature functions T x and t x into the first error compensation formula. For example, within the current distance of x, the integral of (T x -t x ) is 25, and the thermal expansion coefficient α is 20×10 -6 °C -1 , then the first positioning error compensation value E2 is 5 μm. It should be noted that for the integral area of the temperature functions T x and t x here is only an example for illustration, and the detailed solution steps are not given. In actual use or experiments, it can be obtained by using existing theoretical knowledge with the help of mathematical software, programming tools, calculation software or programs. The specific numerical values of the first positioning error compensation value refer to Table (1):

[0061]

[0062] Table (1)

[0063] According to the first error compensation formula mentioned above, the values corresponding to each temperature difference can be calculated and plotted into Table (1). During actual use, the corresponding values can be directly called. For example, when x is 0.25m and the function integral of (T x -t x )dx is 25, the grating scale will expand by 5um. If the moving part needs to feed to the position of 0.25m, the moving part directly moves to the position of (0.25m - 5um).

[0064] In one embodiment, referring to Figure 3 , the current ambient temperature of the grating scale is obtained. According to the thermal expansion coefficient of the grating scale, the current ambient temperature, and the current distance, the second positioning error compensation value of the grating scale is calculated, and the measurement position of the moving part is compensated according to the first positioning error compensation value and the second positioning error compensation value. The current ambient temperature is the temperature of the working environment of the processing equipment, which can be obtained from a position far from the grating scale or a position around the grating scale.

[0065] In addition to considering that during the processing, the grating scale will also generate thermal deformation due to the influence of motor heating, screw friction heat generation, etc.; this embodiment further considers the influence of the ambient temperature on the thermal expansion of the grating scale to consider the thermal expansion amount of the grating scale caused by the ambient temperature. In this embodiment, the thermal compensation control method of the processing equipment is further optimized. The current ambient temperature of the grating scale is obtained, and the second positioning error compensation value is calculated accordingly. Finally, the measurement position of the moving part is compensated in combination with the first positioning error compensation value. The specific details of this embodiment will be described in detail below.

[0066] In some embodiments, in addition to directly measuring the current temperature of the grating scale through the temperature sensor installed on the grating scale, the current ambient temperature of the position where the grating scale is located is also obtained. This can more accurately reflect the actual temperature change of the grating scale, thereby improving the accuracy of positioning error compensation. According to the current temperature of the grating scale, the thermal expansion coefficient, and the current distance, the first positioning error compensation value is calculated. According to the current ambient temperature, the thermal expansion coefficient of the grating scale, and the current distance, the second positioning error compensation value is calculated; the purpose of this step is to further consider the influence of the ambient temperature change of the grating scale on the positioning accuracy.

[0067] The measurement position of the moving part is compensated by combining the first positioning error compensation value and the second positioning error compensation value. The first positioning error compensation value and the second positioning error compensation value are summed (or combined according to other appropriate algorithms) to obtain the final positioning error compensation value. According to the final positioning error compensation value, the measurement position of the moving part is adjusted to eliminate or reduce the positioning error caused by temperature change.

[0068] In one embodiment, referring to Figure 3, calculate the second positioning error compensation value according to the second error compensation formula, and the second error compensation formula is:

[0069] E2 = (T 环 - T 标 ) × α × x

[0070] where, E2 is the second positioning error compensation value; T 环 is the current ambient temperature at the position where the grating scale is located; T 标 is the standard temperature. Among them, at the standard temperature, the positioning error value of the grating scale is zero; α is the thermal expansion coefficient of the grating scale; x is the current distance between the measurement point of the grating scale and the origin.

[0071] Specifically, during the use process, the ambient temperature of the processing equipment will also affect the grating scale, causing the grating scale to expand. Usually, the standard temperature of the grating scale is generally set at 20°. In an environment with a temperature of 20°, the ambient temperature generally will not cause the grating scale to expand, and there is generally no error when initially measuring. When the processing equipment or the grating scale is used in an environment with a temperature of 23°, the ambient temperature of 23° will cause the grating scale to thermally expand. That is to say, before the processing equipment is started, the ambient temperature has already caused the grating scale to thermally expand. In order to reduce the error of the processing equipment, it is necessary to consider the deformation of the grating scale caused by this ambient temperature.

[0072] For example, if the initial ambient temperature is 21°, then according to the thermal expansion coefficient of 20×10 -6 C -1 obtained above, the initial compensation value at x is (21 - 20) × αx = 20×10 -6 C -1 x. The specific values of the second positioning error compensation value refer to Table (2):

[0073]

[0074] Table (2)

[0075] According to the above second error compensation formula, the second positioning error compensation values corresponding to each temperature difference can be calculated. These values are plotted in Table (2), and the corresponding values can be directly called during actual use. For example, when x is 0.25 m and the temperature difference is 1 °C, the second positioning error compensation value is 5 μm, and this compensation value of 5 μm is the expansion amount of the grating scale. Since the grating scale expands by 5 μm, when a compensation of 5 μm is assigned to the processing equipment, the moving part actually feeds to the position of the grating scale at (0.25 m - 5 μm), that is, a displacement of 5 μm is compensated. Similarly, when the temperature difference is 2 °C, the moving part moves to the position of 0.25 m on the grating scale, and the actual feed amount is fed to the position of (0.25 m - 10 μm), that is, a distance of 10 μm is compensated. For other specific positions, it can be analogized according to Table (2) above, and no further examples will be given here.

[0076] After calculating the second positioning error compensation value, apply it to the control system of the processing equipment to adjust the measurement position of the moving part. Combine the calculated second positioning error compensation value with the first positioning error compensation value to obtain the final positioning error compensation value. When compensating the measurement position of the moving part according to the first positioning error compensation value and the second positioning error compensation value, the calculation formula for the final compensation value of the measurement position of the moving part is:

[0077] E = -E1 - E2

[0078] Where E is the final compensation value.

[0079] It should be noted here that in actual operation, the obtained value of E is negative, and this negative value is compensated. For example, if E = -E1 - E2, that is, E = -5 - 5, then the total compensation value E is -10 μm. That is to say, the thermal expansion amount of the grating scale is -10 μm. When the moving part needs to feed and move to 0.25 m, a compensation of 10 μm is required, that is, (0.25 m - 10 μm). Combining the first positioning error compensation value and the second positioning error compensation value can obtain the expansion amount of the grating scale caused by the environmental temperature and the expansion amount caused by the self-heating of the grating scale itself. The combination of the two expansion amounts is the total expansion amount of the grating scale. Input the final positioning error compensation value into the control system of the processing equipment to adjust the position of the moving part, so as to eliminate or reduce the positioning error caused by temperature changes.

[0080] In the second aspect of the embodiments of the present invention, a thermal compensation control system for a processing equipment is provided. The processing equipment includes a main body, a moving part provided on the main body, and a grating scale for measuring the position of the moving part. Refer to Figure 4 , and the thermal compensation control system includes:

[0081] A coefficient calculation module 100, configured to determine the thermal expansion coefficient of the grating scale;

[0082] A parameter acquisition module 200 is configured to acquire the current ambient temperature at the position where the grating scale is located and the current distance between the measurement point of the grating scale and the origin, wherein the position of the measurement point of the grating scale represents the position where the moving component is located.

[0083] An error calculation module 300 is configured to calculate a first positioning error compensation value of the grating scale according to the thermal expansion coefficient, the current ambient temperature, and the current distance of the grating scale.

[0084] An error compensation module 400 is configured to compensate the measured position of the moving component according to the first positioning error compensation value.

[0085] This application calculates a first positioning error compensation value of the grating scale according to the thermal expansion coefficient, the current ambient temperature, and the current distance of the grating scale. Then, the measured position of the moving component is compensated according to the first positioning error compensation value to make up for the part of the error caused by the deformation of the grating scale, so that the moving component can feed more precisely according to the required displacement.

[0086] It should be specifically noted that, without conflict, the steps in the foregoing thermal compensation control method can be applied to the thermal compensation control system of this embodiment, which will not be elaborated here.

[0087] A third aspect of the embodiments of the present invention provides a processing device, including a body, a moving component provided on the body, and a grating scale for measuring the position of the moving component. The processing device further includes a thermal compensation control system, and the thermal compensation control system is configured to implement the thermal compensation control method of the processing device in any one of the above, or the thermal compensation control system is the thermal compensation control system of the processing device as described above.

[0088] Based on the thermal compensation control method of the above processing device, a fourth aspect of the embodiments of the present invention provides a computer-readable storage medium, and the computer-readable storage medium stores one or more programs, and the one or more programs can be executed by one or more processors to implement the steps in the thermal compensation control method of the processing device in the above embodiments.

[0089] The above are only the preferred embodiments of the present invention. It should be pointed out that for those of ordinary skill in the art, without departing from the principle of the present invention, several improvements and refinements can be made, and these improvements and refinements should also be regarded as the protection scope of the present invention.

Claims

1. A thermal compensation control method for a processing device, wherein the processing device comprises a body, a moving part arranged on the body, and a grating ruler for measuring the position of the moving part, wherein the moving direction of the moving part is consistent with the length direction of the grating ruler, and is characterized in that: The thermal compensation control method comprises: Determining the coefficient of thermal expansion of the grating ruler; Acquire the current temperature of the grating ruler and the current distance between the measuring point of the grating ruler and the origin, wherein the position of the measuring point of the grating ruler represents the position of the moving part; Calculating a first positioning error compensation value of the grating ruler according to the thermal expansion coefficient of the grating ruler, the current temperature and the current distance; The measured position of the moving part is compensated according to the first positioning error compensation value.

2. The thermal compensation control method for processing equipment according to claim 1, characterized in that: The temperature of the grating ruler at multiple positions along the length direction of the grating ruler is obtained, and the current temperature of the grating ruler at each position is obtained by curve fitting according to the temperatures at the multiple positions.

3. The thermal compensation control method for processing equipment according to claim 2, characterized in that: The first positioning error compensation value is calculated according to a first error compensation formula, where the first error compensation formula is: Wherein, E1 is the first positioning error compensation value; α is the thermal expansion coefficient of the grating ruler; x is the current distance between the measuring point of the grating ruler and the origin; T x is a function of the current temperature of the grating ruler and the current distance x; t x is a function of the initial temperature of the grating ruler and the current distance x.

4. The thermal compensation control method for processing equipment according to claim 3, characterized in that: The current ambient temperature of the grating ruler is obtained, a second positioning error compensation value of the grating ruler is calculated according to the thermal expansion coefficient of the grating ruler, the current ambient temperature and the current distance, and the measurement position of the moving part is compensated according to the first positioning error compensation value and the second positioning error compensation value.

5. The thermal compensation control method for processing equipment according to claim 4, characterized in that: The second positioning error compensation value is calculated according to a second error compensation formula, where the second error compensation formula is: E2=(T 环 -T 标 )×α×x Wherein, E2 is the second positioning error compensation value; T 环 is the current ambient temperature of the location of the grating ruler; T 标 is the standard temperature, wherein, at the standard temperature, the current positioning error value of the grating ruler is zero; α is the thermal expansion coefficient of the grating ruler; and x is the current distance between the measuring point of the grating ruler and the origin.

6. The thermal compensation control method for processing equipment according to claim 5, characterized in that: Acquiring temperatures at three or more positions at even intervals along the length direction of the grating ruler; When the measured position of the moving part is compensated according to the first positioning error compensation value and the second positioning error compensation value, the final compensation value calculation formula of the measured position of the moving part is: E=-E1-E2 Among them, E is the final compensation value.

7. The thermal compensation control method for processing equipment according to any one of claims 1 to 6, characterized in that: The thermal expansion coefficient of the grating ruler is calculated by the thermal expansion formula, and the thermal expansion formula is: Among them, α is the thermal expansion coefficient of the grating ruler; ΔL is the expansion change of the grating ruler measured when the moving part moves within the set stroke range during the experiment; ΔT is the change in temperature of the grating ruler measured when the moving part moves within the set stroke range during the experiment, and L is the set stroke range.

8. A thermal compensation control system for a processing device, the processing device comprising a body, a moving part arranged on the body, and a grating ruler for measuring the position of the moving part, the moving direction of the moving part is consistent with the length direction of the grating ruler, characterized in that: The thermal compensation control system comprises: A coefficient calculation module, used to determine the thermal expansion coefficient of the grating ruler; A parameter acquisition module, used for acquiring the current temperature of the grating ruler and the current distance between the measuring point of the grating ruler and the origin, wherein the position of the measuring point of the grating ruler represents the position of the moving part; An error calculation module, used for calculating a first positioning error compensation value of the grating ruler according to the thermal expansion coefficient of the grating ruler, the current temperature and the current distance; An error compensation module is used to compensate the measured position of the moving part according to the first positioning error compensation value.

9. A processing device, comprising a body, a moving part arranged on the body, and a grating ruler for measuring the position of the moving part, wherein the moving direction of the moving part is consistent with the length direction of the grating ruler, characterized in that: It also includes a thermal compensation control system, which is used to implement the thermal compensation control method of the processing equipment described in any one of claims 1 to 7, or the thermal compensation control system is the thermal compensation control system of the processing equipment described in claim 8.

10. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores one or more programs, and the one or more programs can be executed by one or more processors to implement the steps in the thermal compensation control method of the processing equipment as described in any one of claims 1-7.

Images