A kind of hard disk substrate processing with planet wheel convenient to detach grinding device

Abstract

The application belongs to the technical field of substrate processing equipment, and particularly relates to a hard disk substrate processing grinding device with a star wheel convenient to disassemble, which aims at the problem that the existing hard disk substrate grinding device lacks a leveling measure for the upper grinding disc, and proposes the following scheme, which comprises a bearing seat, the inner wall of the bottom of the bearing seat is fixedly connected with a boss, the upper side of the boss is fixedly connected with an electric motor three, the output end of the electric motor three is fixedly connected with a rotating seat, and the outer part of the rotating seat is provided with a fixing table, and the outer part of the fixing table is fixedly connected with the inner wall of the bearing seat. The hard disk substrate processing grinding device with a star wheel convenient to disassemble can quickly and conveniently level the newly installed or replaced upper grinding disc, so that the situation that the upper grinding disc cannot be kept horizontal due to the tolerance and equipment wear is reduced, and the size of the ground aluminum substrate is ensured to meet the requirements, and the product quality of the aluminum substrate is ensured.

Description

Technical Field

[0001] This invention relates to the field of substrate processing equipment technology, and in particular to a grinding device for hard disk substrate processing with a planetary wheel that is easy to disassemble. Background Technology

[0002] A hard drive is one of the main storage media in a computer, consisting of one or more aluminum or glass platters. The platters are coated with a ferromagnetic material. Hard drives include solid-state drives (SSDs), hard disk drives (HDDs), and hybrid drives. The vast majority of hard drives are fixed-function drives, permanently sealed and fixed within the hard drive enclosure.

[0003] After the existing hard disk substrate grinding device is disassembled and replaced, due to the long-term use of the device and the tolerance of the parts, the upper grinding disc will have a certain angular deviation after installation. The upper grinding disc cannot be kept horizontal, which will have a great impact on the grinding of the aluminum block in the planetary wheel, making the aluminum substrate unable to meet the usage requirements. Summary of the Invention

[0004] This invention discloses a grinding device for hard disk substrate processing with an easily detachable planetary wheel, aiming to solve the technical problem in the prior art that existing hard disk substrate grinding devices lack upper grinding disc leveling measures.

[0005] This invention proposes a grinding device for hard disk substrate processing with easily detachable planetary wheels, comprising a base, a boss fixedly connected to the bottom inner wall of the base, a motor three fixedly connected to the upper side of the boss, a rotating seat fixedly connected to the output end of the motor three, and a fixed platform provided on the outside of the rotating seat, the outside of the fixed platform being fixedly connected to the inner wall of the base, a quick disassembly module provided on the base, an external gear ring one fixedly connected to the outside of the rotating seat, a lower grinding disc fixedly connected to the upper side of the fixed platform, an internal gear ring fixedly connected to the inner wall of the base, and three circumferentially equidistant planetary wheels provided on the upper side of the lower grinding disc, the planetary wheels meshing with both the external gear ring one and the internal gear ring, an upper grinding disc provided above the base, and a horizontal calibration module provided above the upper grinding disc; The horizontal calibration module includes a threaded rod; The quick-release module includes an arc-shaped rod.

[0006] Equipped with a lower grinding disc, planetary wheel, leveling module, quick disassembly module, and upper grinding disc, the device utilizes the leveling module to quickly and conveniently level the newly installed or replaced upper grinding disc. This reduces the occurrence of situations where the upper grinding disc cannot maintain a level position due to tolerances and equipment wear, thereby ensuring that the dimensions of the ground aluminum substrate meet the requirements and guaranteeing the product quality of the aluminum substrate.

[0007] In a preferred embodiment, a fixing plate is fixedly connected to the upper side of the upper grinding disc, and a mounting plate is provided above the fixing plate. The mounting plate has three circumferentially equidistant grooves, each containing a slidingly connected fitting block. The bottom of each fitting block is fixedly connected to the upper side of the fixing plate. The mounting plate also has three circumferentially equidistant circular holes, each containing a threaded rod. A bracket is fixedly connected to the outside of the support base, and a top plate is fixedly connected to the upper side of the bracket. A hydraulic rod is provided on the top plate. Ball heads are fixedly connected to the bottom of each of the three threaded rods, and spherical seats are provided on the outside of each ball head. The bottom of each spherical seat is fixedly connected to the upper side of the fixing plate. External toothed rings are provided on the outside of each threaded rod. Second, the bottom of each of the two external toothed rings is movably connected to the upper side of the mounting plate, and each of the two external toothed rings is provided with a locking ring. A rack is fixedly connected to the inner wall of each locking ring, and the rack engages with the outer toothed ring on the same side. An oil tank is fixedly connected to the upper side of the top plate, and an annular pipe is connected to the outside of the oil tank via a flange. Three circumferentially spaced conduits are connected to the outside of the annular pipe via a flange. One end of each conduit passes through the top plate and is connected to a tee pipe via a flange. A stabilizing buckle is slidably connected to the outside of each of the three locking rings. The bottom of each stabilizing buckle is fixedly connected to the upper side of the mounting plate. A spring is fixedly connected to the side of each stabilizing buckle away from the outer toothed ring. The end of each spring away from the stabilizing buckle engages with the inner wall of the locking ring on the same side. The upper grinding disc is fixedly connected to the wall, and multiple equally spaced fine holes are opened on the mounting plate, fixing plate, and upper grinding disc. The end of the tee pipe away from the annular pipe passes through the mounting plate and fixing plate and is located inside the upper grinding disc. A pump is fixedly connected to the upper side of the top plate, and the output end of the pump is connected to the annular pipe through a round pipe. A knob is provided on the outside of each of the three threaded rods, and the bottom of the knob is fixedly connected to the upper side of the external toothed ring II on the same side. A limit rod is provided on the outside of each locking ring, and U-shaped seat I and U-shaped seat II are respectively provided at both ends of the limit rod. An isolation cover is fixedly connected to the output end of the hydraulic rod, and a drive motor is fixedly connected to the top inner wall of the isolation cover. The output end of the drive motor is connected to the upper side of the mounting plate through a coupling. Each of the three limiting rods has a narrow opening, and a round shaft is fixedly connected inside each narrow opening. Each U-shaped seat has a round groove, and the inner wall of each groove is movably connected to the outside of the round shaft. A coil spring is fixedly connected to the outside of each round shaft, and a receiving groove is fixedly connected to the end of each coil spring away from the round shaft. The receiving groove is fixedly connected to the side opposite to the U-shaped seat. Each of the three U-shaped seats has a slot, and a pin is slidably connected inside each slot. A spring is wrapped around the outside of each pin. One end of the spring is fixedly connected to the outside of the pin, and the other end is fixedly connected to the outside of the U-shaped seat on the same side. Each limiting rod has a groove at the end away from the round shaft, and the inner wall of the groove is engaged with the outside of the pin on the same side.

[0008] By incorporating a horizontal calibration module, which utilizes the up-and-down movement of three threaded rods forming an equilateral triangle to quickly change the angle between the mounting plate and the fixing plate, the horizontal adjustment of the upper grinding disc is achieved. This greatly improves the calibration efficiency of the upper grinding disc, simplifies the calibration process, reduces downtime, and ensures the smoothness of the grinding process.

[0009] In a preferred embodiment, the fixed platform has three circumferentially equidistant rectangular slots, three arc-shaped rods are respectively located in the three rectangular slots, and one end of each arc-shaped rod is fixedly connected to a push plate. The bottom of each of the three push plates is in contact with the upper side of the fixed platform, and the end of each arc-shaped rod away from the push plate is movably connected to a push-pull rod. The end of each of the three push-pull rods away from the arc-shaped rod is movably connected to a slide rod. The inner wall of the support base has three circumferentially equidistant narrow slots, each narrow slot containing a slide groove. An isolation frame is provided outside each slide groove, and the isolation frame is connected to... The outer sides of the support base are all fixedly connected; each slide rod is equipped with a lead screw, one end of which is movably connected to the inner wall of the slide groove, and the other end is equipped with a second motor, the outer side of which is fixedly connected to the inner wall of the slide groove. The output end of the slide groove is connected to one side of the lead screw on the same side through a coupling. An arc-shaped rod is fixedly connected to the upper side of each slide rod. The end of the arc-shaped rod away from the slide rod is in contact with the bottom of the push-pull rod. A guide is slidably connected to the outer side of the arc-shaped rod. The end of the guide is away from the arc-shaped rod and is fixedly connected to the bottom of the fixed platform.

[0010] By incorporating a quick-release module, which utilizes a sliding rod and an arc-shaped rod, the device can effectively detach the planetary wheel, which has been adsorbed by coolant on the lower grinding disc, from the lower grinding disc after grinding. This reduces the difficulty of removing the planetary wheel from the device, allowing workers to complete the planetary wheel removal and placement operations more quickly and improving efficiency.

[0011] As can be seen from the above, the grinding device for hard disk substrate processing with a planetary wheel that is easy to disassemble provided by the present invention can quickly and conveniently level the newly installed or disassembled upper grinding wheel, thereby reducing the occurrence of the upper grinding wheel not being able to keep level due to tolerance and equipment wear, thus ensuring that the dimensions of the ground aluminum substrate meet the requirements and guaranteeing the product quality of the aluminum substrate. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the overall structure of a grinding device for hard disk substrate processing with a planetary wheel that is easy to disassemble, as proposed in this invention. Figure 2 This is a cross-sectional view of a grinding device for hard disk substrate processing with a planetary wheel that is easy to disassemble, as proposed in this invention. Figure 3This is a schematic diagram of the horizontal calibration module structure of a grinding device for hard disk substrate processing with a planetary wheel that is easy to disassemble, as proposed in this invention. Figure 4 This is a schematic diagram of the locking ring structure of a grinding device for hard disk substrate processing with a planetary wheel that is easy to disassemble, as proposed in this invention. Figure 5 This is a schematic diagram of the limiting rod structure of a grinding device for hard disk substrate processing with a planetary wheel that is easy to disassemble, as proposed in this invention. Figure 6 This is a schematic diagram of the quick-disassembly module structure of a grinding device for hard disk substrate processing with an easily detachable planetary wheel, as proposed in this invention. Figure 7 This is a schematic diagram of the arc-shaped rod structure of a grinding device for hard disk substrate processing with a planetary wheel that is easy to disassemble, as proposed in this invention.

[0013] In the diagram: 1. Foundation; 2. Bracket; 3. Top plate; 4. Lower grinding disc; 5. Planetary wheel; 6. Rotating seat; 7. External gear ring one; 8. Horizontal calibration module; 801. Groove; 802. Fitting block; 803. Threaded rod; 804. Ball head; 805. Spherical seat; 806. External gear ring two; 807. Locking ring; 808. Rack; 809. Knob; 810. Stabilizing buckle; 811. Spring one; 812. Limiting rod; 813. U-shaped seat one; 814. Coil spring; 815. Receiving groove; 816. U-shaped seat two ; 817, Spring II; 818, Pin; 819, Groove; 9, Quick-release module; 901, Push plate; 902, Slide groove; 903, Isolation frame; 904, Lead screw; 905, Slide rod; 906, Motor II; 907, Push-pull rod; 908, Arc rod; 909, Guide component; 10, Upper grinding disc; 11, Internal gear ring; 12, Hydraulic rod; 13, Pump; 14, Oil tank; 15, Ring pipe; 16, T-pipe; 17, Mounting plate; 18, Fixing plate; 19, Fixing platform; 20, Motor III. Detailed Implementation

[0014] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0015] The present invention discloses a grinding device for hard disk substrate processing with a planetary wheel that is easy to disassemble. It is mainly used in scenarios where existing hard disk substrate grinding devices lack upper grinding disc leveling measures.

[0016] Reference Figures 1-7A grinding device for hard disk substrate processing with easily detachable planetary wheels includes a base 1. A boss is bolted to the inner wall of the bottom of the base 1. A motor 20 is bolted to the upper side of the boss. A rotating seat 6 is bolted to the output end of the motor 20. A fixed platform 19 is provided on the outside of the rotating seat 6. The outside of the fixed platform 19 is bolted to the inner wall of the base 1. A quick disassembly module 9 is provided on the base 1. An external gear ring 7 is bolted to the outside of the rotating seat 6. A lower grinding disc 4 is bolted to the upper side of the fixed platform 19. An internal gear ring 11 is bolted to the inner wall of the base 1. Three planetary wheels 5 are circumferentially distributed on the upper side of the lower grinding disc 4. The planetary wheels 5 mesh with both the external gear ring 7 and the internal gear ring 11. An upper grinding disc 10 is provided above the base 1. A horizontal calibration module 8 is provided above the upper grinding disc 10. The horizontal calibration module 8 includes a threaded rod 803; The quick-release module 9 includes an arc-shaped rod 908.

[0017] Specifically, after disassembling and replacing the upper grinding disc 10, the leveling module 8 is used to level the upper grinding disc 10, so that the newly installed upper grinding disc 10 is parallel to the lower grinding disc 4 and the planetary wheel 5. The aluminum block to be ground is placed in the planetary wheel 5, and the hydraulic rod 12 is activated, causing the hydraulic rod 12 to drive the upper grinding disc 10 to fit against the top of the aluminum block. The drive motor and motor 20 are activated, and the external gear ring 7 on the rotating seat 6 drives the planetary wheel 5 to rotate. Through meshing with the internal gear ring 11, the planetary wheel 5 rotates in a circular motion while also rotating on its own axis, causing the output end of the hydraulic rod 12 to slowly extend, so that the upper grinding disc 10 and the lower grinding disc 4 continuously... The aluminum block is double-sided ground. During the grinding process, the pump 13 is started, and the pump 13 sprays the cooling oil in the oil tank 14 onto the lower grinding disc 4. After grinding is completed, the aluminum substrate is removed. When it is necessary to remove the planetary wheel 5, the planetary wheel 5 attached to the lower grinding disc 4 is popped out using the quick disassembly module 9. The device uses the level calibration module 8 to quickly and conveniently level the newly installed or disassembled upper grinding disc 10, thereby reducing the occurrence of the upper grinding disc 10 not being able to keep level due to tolerance and equipment wear, thus ensuring that the dimensions of the ground aluminum substrate meet the requirements and guaranteeing the product quality of the aluminum substrate.

[0018] Reference Figure 3 , Figure 4 and Figure 5In a preferred embodiment, a fixing plate 18 is bolted to the upper side of the upper grinding disc 10. A mounting plate 17 is positioned above the fixing plate 18. The mounting plate 17 has three circumferentially equidistant grooves 801, each containing a slidingly connected fitting block 802. The bottom of each fitting block 802 is bolted to the upper side of the fixing plate 18. The mounting plate 17 also has three circumferentially equidistant circular holes, each containing a threaded rod 803. A bracket 2 is bolted to the outside of the support base 1. A top plate 3 is bolted to the upper side of the bracket 2, and a hydraulic rod 12 is mounted on the top plate 3. The bottoms of the three threaded rods 803 are all bolted to the upper side of the upper grinding disc 1. A ball head 804 is bolted to the top of the mounting plate 18. Each ball head 804 has a ball seat 805 on its exterior. The bottom of each ball seat 805 is bolted to the upper side of the mounting plate 18. An external toothed ring 806 is bolted to the exterior of each threaded rod 803. The bottom of each external toothed ring 806 is rotatably connected to the upper side of the mounting plate 17 via a bearing. A locking ring 807 is bolted to the exterior of each external toothed ring 806. A rack 808 is bolted to the inner wall of each locking ring 807. Each rack 808 engages with the external toothed ring 806 on the same side. An oil tank 14 is bolted to the top of the top plate 3. An annular pipe 15 is flanged to the exterior of the oil tank 14. The annular pipe 15 is flanged to the exterior of the annular pipe 15. The flange connects to three circumferentially spaced conduits, one end of which passes through the top plate 3 and is connected to a tee pipe 16 via a flange. Stabilizing buckles 810 are slidably connected to the outside of each of the three locking rings 807. The bottom of each stabilizing buckle 810 is bolted to the upper side of the mounting plate 17. A spring 811 is bolted to the side of each stabilizing buckle 810 away from the outer toothed ring 806. The end of each spring 811 away from the stabilizing buckle 810 is bolted to the inner wall of the locking ring 807 on the same side. Multiple equidistant fine holes are provided on the mounting plate 17, the fixing plate 18, and the upper grinding disc 10. The end of each tee pipe 16 away from the annular pipe 15 passes through the mounting plate 17 and the fixing plate 18. The fixed plate 18 is located inside the upper grinding disc 10. The upper side of the top plate 3 is connected to the pump 13 by bolts. The output end of the pump 13 is connected to the annular pipe 15 through a round pipe. The three threaded rods 803 are all equipped with knobs 809 on the outside. The bottom of each knob 809 is connected to the upper side of the external toothed ring 806 on the same side by bolts. The locking ring 807 is equipped with a limit rod 812 on the outside. The two ends of the limit rod 812 are respectively equipped with U-shaped seat 813 and U-shaped seat 816. The output end of the hydraulic rod 12 is connected to the isolation cover by bolts. The top inner wall of the isolation cover is connected to the drive motor by bolts. The output end of the drive motor is connected to the upper side of the mounting plate 17 through a coupling.Each of the three limiting rods 812 has a narrow opening, and a round shaft is bolted into each of the narrow openings. Each U-shaped seat 813 has a round groove, the inner wall of which is rotatably connected to the outside of the round shaft via a bearing. A coil spring 814 is bolted to the outside of each round shaft, and a receiving groove 815 is bolted to the end of each coil spring 814 away from the round shaft. The receiving groove 815 is bolted to the side opposite to the U-shaped seat 813. Each of the three U-shaped seats 816 has a slot, and a pin 818 is slidably connected into each slot. A spring 817 surrounds the outside of each pin 818. One end of the spring 817 is bolted to the outside of the pin 818, and the other end is bolted to the outside of the U-shaped seat 816 on the same side. Each limiting rod 812 has a groove 819 at the end away from the round shaft, and the inner wall of the groove 819 engages with the outside of the pin 818 on the same side.

[0019] Specifically, when leveling the upper grinding disc 10, the pin 818 is pulled out by overcoming the tension of the second spring 817, so that the pin 818 releases the lock on the limit rod 812. The limit rod 812 is rotated by overcoming the torque of the coil spring 814, so that the limit rod 812 releases the lock on the rack 808. The locking ring 807 is pushed lightly, and the locking ring 807 slides on the stabilizing buckle 810, so that the rack 808 releases the lock on the second toothed ring 806. The knob 809 is rotated, and the knob 809 drives the second toothed ring 806 to rotate, so that the threaded rod 803 rises or falls on the mounting plate 17, and the ball head 804 slides in the ball seat 805, changing the angle between the fixing plate 18 and the mounting plate 17. After the three threaded rods 803 are adjusted, the locking ring 807 is released, and the limit rod 812 and the locking ring 807 are locked again. At this time, the upper grinding disc 10 is in a horizontal position.

[0020] In specific application scenarios, the horizontal calibration module 8 is mainly used in the horizontal calibration process. That is, the horizontal calibration module 8 uses the up and down movement of three threaded rods 803 forming an equilateral triangle to quickly change the angle between the mounting plate 17 and the fixed plate 18, thereby realizing the horizontal adjustment of the upper grinding disc 10. This greatly improves the calibration efficiency of the upper grinding disc 10, simplifies the calibration process, reduces the downtime of the device, and ensures the smoothness of the grinding process.

[0021] Reference Figure 6 and Figure 7In a preferred embodiment, the fixed platform 19 has three circumferentially equidistant rectangular slots. Three arc-shaped rods 908 are located in the three rectangular slots, and one end of each arc-shaped rod 908 is bolted to a push plate 901. The bottom of each push plate 901 is in contact with the upper side of the fixed platform 19. The end of each arc-shaped rod 908 away from the push plate 901 is rotatably connected to a push-pull rod 907 via a bearing. The end of each push-pull rod 907 away from the arc-shaped rod 908 is rotatably connected to a slide rod 905 via a bearing. The inner wall of the support base 1 has three circumferentially equidistant narrow slots, each containing a slide groove 902. An isolation frame 903 is provided outside each slide groove 902. The isolation frame 903 is connected to the support base 1. The opposite sides of the slide rods are all connected by bolts; each slide rod 905 is equipped with a lead screw 904, one end of which is rotatably connected to the inner wall of the slide groove 902 via a bearing, and the other end is equipped with a second motor 906. The exterior of the second motor 906 is connected to the inner wall of the slide groove 902 by bolts. The output end of the slide groove 902 is connected to one side of the lead screw 904 on the same side via a coupling. The upper side of each slide rod 905 is connected to an arc-shaped rod 908 by bolts. The end of the arc-shaped rod 908 away from the slide rod 905 is in contact with the bottom of the push-pull rod 907. The exterior of the arc-shaped rod 908 is slidably connected to a guide 909. The end of the guide 909 away from the arc-shaped rod 908 is connected to the bottom of the fixed platform 19 by bolts.

[0022] Specifically, since cooling oil is sprayed on the lower grinding disc 4, the cooling oil will adhere the planetary wheel 5 to the lower grinding disc 4. When it is necessary to remove the planetary wheel 5 from the device, the second motor 906 is started. The second motor 906 drives the lead screw 904 to rotate, thereby moving the slide rod 905 towards the center position of the support seat 1. The push-pull rod 907 connected to the slide rod 905 pushes the arc rod 908 to move. Under the restraint of the guide member 909, the arc rod 908 maintains a fixed radius of rotation. As the slide rod 905 continues to move, the angle between the push-pull rod 907 and the slide rod 905 gradually increases, thereby pushing the arc rod 908 out of the rectangular groove on the fixed platform 19. The push plate 901 connected to the arc rod 908 will push the outside of the planetary wheel 5 that is attached to the lower grinding disc 4, causing the planetary wheel 5 to flip and detach from the lower grinding disc 4, and the planetary wheel 5 can be removed.

[0023] In specific application scenarios, the quick disassembly module 9 is mainly used in the quick disassembly process. That is, the quick disassembly module 9 uses the slide bar 905 and the arc rod 908 to enable the device to effectively detach the planetary wheel 5, which is adsorbed by coolant on the lower grinding disc 4, from the lower grinding disc 4 after grinding. This reduces the difficulty of removing the planetary wheel 5 from the device, allowing the staff to complete the removal and placement of the planetary wheel 5 more quickly and improving the removal and placement efficiency.

[0024] Working principle: After disassembling and replacing the upper grinding disc 10, the upper grinding disc 10 is leveled. Overcoming the tension of spring 817, the pin 818 is pulled out, releasing it from locking the limit rod 812. Overcoming the torque of the coil spring 814, the limit rod 812 is rotated, releasing it from locking the rack 808. The locking ring 807 is gently pushed, sliding on the stabilizing buckle 810, releasing the rack 808 from locking the outer gear ring 806. The knob 809 is rotated, causing the outer gear ring 806 to rotate, thus allowing the threaded rod 803 to move on the mounting plate. As the ball head 804 slides in the spherical seat 805, it changes the angle between the fixed plate 18 and the mounting plate 17. After adjusting the three threaded rods 803, the locking ring 807 is released, and the limit rod 812 is relocked to the locking ring 807. At this time, the upper grinding disc 10 is in a horizontal position. The aluminum block to be ground is placed in the planetary wheel 5. The hydraulic rod 12 is activated, causing the hydraulic rod 12 to drive the upper grinding disc 10 to fit against the top of the aluminum block. The drive motor and motor 20 are activated, and the external gear ring 7 on the rotating seat 6 drives the planetary wheel 5 to rotate. Through meshing with the internal gear ring 11, the planetary wheel 5 rotates. The planetary wheel 5 rotates in a circular motion while simultaneously rotating on its own axis, causing the output end of the hydraulic rod 12 to slowly extend. This allows the upper grinding disc 10 and lower grinding disc 4 to continuously grind the aluminum block on both sides. During the grinding process, the pump 13 is activated, spraying cooling oil from the oil tank 14 onto the lower grinding disc 4. After grinding is complete, the aluminum substrate is removed. Because the lower grinding disc 4 is sprayed with cooling oil, the planetary wheel 5 will adhere to it. When it is necessary to remove the planetary wheel 5 from the device, the second motor 906 is activated. The second motor 906 drives the lead screw 904 to rotate, thereby causing the slide rod 905 to... The slide bar 905 moves towards the center of the support 1, causing the push-pull rod 907 connected to the slide bar 905 to push the arc-shaped rod 908 to move. Under the constraint of the guide member 909, the arc-shaped rod 908 rotates with a fixed radius. As the slide bar 905 continues to move, the angle between the push-pull rod 907 and the slide bar 905 gradually increases, causing the push-pull rod 907 to push the arc-shaped rod 908 out of the rectangular groove on the fixed platform 19. The push plate 901 connected to the arc-shaped rod 908 will push the outside of the planetary wheel 5 attached to the lower grinding disc 4, causing the planetary wheel 5 to flip and detach from the lower grinding disc 4, and the planetary wheel 5 can be removed.

[0025] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A grinding device for hard disk substrate processing with a planetary wheel that is easy to disassemble, comprising a support base (1), characterized in that, The bottom inner wall of the support base (1) is fixedly connected to a boss, the upper side of the boss is fixedly connected to a motor three (20), the output end of the motor three (20) is fixedly connected to a rotating seat (6), and a fixed platform (19) is provided on the outside of the rotating seat (6). The outside of the fixed platform (19) is fixedly connected to the inner wall of the support base (1). A quick disassembly module (9) is provided on the support base (1). An external gear ring one (7) is fixedly connected to the outside of the rotating seat (6). A lower grinding disc (4) is fixedly connected to the upper side of the fixed platform (19). An internal gear ring (11) is fixedly connected to the inner wall of the support base (1). Three planetary wheels (5) are equidistantly distributed in a circle on the upper side of the lower grinding disc (4). The planetary wheels (5) mesh with the external gear ring one (7) and the internal gear ring (11). An upper grinding disc (10) is provided above the support base (1), and a horizontal calibration module (8) is provided above the upper grinding disc (10). The horizontal calibration module (8) includes a threaded rod (803); The quick-release module (9) includes an arc-shaped rod (908); A fixing plate (18) is fixedly connected to the upper side of the upper grinding disc (10). An mounting plate (17) is provided above the fixing plate (18). Three circumferentially distributed grooves (801) are provided on the mounting plate (17). A fitting block (802) is slidably connected in each groove (801). The bottom of the fitting block (802) is fixedly connected to the upper side of the fixing plate (18). Three circumferentially distributed circular holes are provided on the mounting plate (17). A threaded rod (803) is provided in each circular hole. A bracket (2) is fixedly connected to the outside of the support base (1). A top plate (3) is fixedly connected to the upper side of the bracket (2). A hydraulic rod (12) is provided on the top plate (3). Each of the three threaded rods (803) has a ball head (804) fixedly connected to its bottom. Each ball head (804) has a ball seat (805) on its outer side. The bottom of each ball seat (805) is fixedly connected to the upper side of the fixing plate (18). Each threaded rod (803) has an external toothed ring (806) on its outer side. The bottom of each external toothed ring (806) is movably connected to the upper side of the mounting plate (17), and each external toothed ring (806) has a locking ring on its outer side. 807), the inner wall of the locking ring (807) is fixedly connected with a rack (808), the rack (808) is engaged with the outer toothed ring (806) on the same side, the top plate (3) is fixedly connected with an oil tank (14), the outside of the oil tank (14) is connected with an annular pipe (15) through a flange, the outside of the annular pipe (15) is connected with three circumferentially distributed conduits through a flange, one end of each conduit passes through the top plate (3) and is connected with a tee pipe (16) through a flange; The fixed platform (19) has three rectangular slots that are equidistantly distributed around the circumference. Three arc-shaped rods (908) are located in the three rectangular slots respectively, and one end of each arc-shaped rod (908) is fixedly connected to a push plate (901). The bottom of each of the three push plates (901) is in contact with the upper side of the fixed platform (19), and the end of each arc-shaped rod (908) away from the push plate (901) is movably connected to a push-pull rod (907). The three push-pull rods (907) are movably connected to the end away from the arc rod (908) with a slide rod (905), and the inner wall of the support base (1) is provided with three circumferentially distributed narrow grooves, each of which is provided with a slide groove (902). Each slide groove (902) is provided with an isolation frame (903) on the outside of the slide groove (902), and the isolation frame (903) is fixedly connected to the side of the support base (1) opposite to the outside. Each slide rod (905) is equipped with a lead screw (904). One end of the lead screw (904) is movably connected to the inner wall of the slide groove (902), and the other end is equipped with a second motor (906). The outside of the second motor (906) is fixedly connected to the inner wall of the slide groove (902). The output end of the slide groove (902) is connected to one side of the lead screw (904) on the same side through a coupling. An arc rod (908) is fixedly connected to the upper side of each slide rod (905). The end of the arc rod (908) away from the slide rod (905) is in contact with the bottom of the push-pull rod (907). A guide (909) is slidably connected to the outside of the arc rod (908). The end of the guide (909) away from the arc rod (908) is fixedly connected to the bottom of the fixed platform (19).

2. The grinding device for hard disk substrate processing with a detachable planetary wheel according to claim 1, characterized in that, All three locking rings (807) are slidably connected to a stabilizing buckle (810). The bottom of the stabilizing buckle (810) is fixedly connected to the upper side of the mounting plate (17). The side of the stabilizing buckle (810) away from the outer toothed ring (806) is fixedly connected to a spring (811). The end of the spring (811) away from the stabilizing buckle (810) is fixedly connected to the inner wall of the locking ring (807) on the same side. The mounting plate (17), the fixing plate (18), and the upper grinding disc (10) are all provided with multiple equally spaced fine holes. The end of the three-way pipe (16) away from the annular pipe (15) passes through the mounting plate (17) and the fixing plate (18) and is located inside the upper grinding disc (10). The top plate (3) is fixedly connected to a pump (13). The output end of the pump (13) is connected to the annular pipe (15) through a round pipe.

3. The grinding device for hard disk substrate processing with a detachable planetary wheel according to claim 1, characterized in that, The three threaded rods (803) are all provided with knobs (809) on the outside. The bottom of each knob (809) is fixedly connected to the upper side of the external toothed ring (806) on the same side. Each locking ring (807) is provided with a limit rod (812) on the outside. Both ends of the limit rod (812) are provided with U-shaped seat one (813) and U-shaped seat two (816) respectively. The output end of the hydraulic rod (12) is fixedly connected to an isolation cover. The top inner wall of the isolation cover is fixedly connected to a drive motor. The output end of the drive motor is connected to the upper side of the mounting plate (17) through a coupling.

4. The grinding device for hard disk substrate processing with a detachable planetary wheel according to claim 3, characterized in that, Each of the three limiting rods (812) has a narrow opening, and a round shaft is fixedly connected inside each narrow opening. Each of the U-shaped seats (813) has a round groove, and the inner wall of the round groove is movably connected to the outside of the round shaft. A coil spring (814) is fixedly connected to the outside of each round shaft. A receiving groove (815) is fixedly connected to the end of the coil spring (814) away from the round shaft. The receiving groove (815) is fixedly connected to the side opposite to the U-shaped seat (813).

5. The grinding device for hard disk substrate processing with a detachable planetary wheel according to claim 4, characterized in that, Each of the three U-shaped seats (816) has a slot, and a pin (818) is slidably connected in the slot. A spring (817) surrounds the outside of each pin (818). One end of the spring (817) is fixedly connected to the outside of the pin (818), and the other end is fixedly connected to the outside of the U-shaped seat (816) on the same side. The end of the limiting rod (812) away from the round shaft has a groove (819), and the inner wall of the groove (819) is engaged with the outside of the pin (818) on the same side.

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