Automatic crystal ingot conveying device

Abstract

The invention discloses an automatic crystal ingot conveying device. The conveying device comprises a feeding module, a discharging module and a conveying module. The feeding module comprises a first supporting piece, a first synchronous plate, a first jacking assembly and a first conveying assembly. A first cavity is formed in the first supporting piece, and a plurality of first positioning rings are evenly arranged on the upper end face in the front-back direction. The distance between the circle centers of the adjacent first positioning rings is a first length; the first synchronous plate is slidably arranged in the first cavity; the first jacking assembly is arranged on the first synchronous plate; the first conveying assembly is at least partially arranged at the bottom of the first supporting piece and connected with the first synchronous plate. The discharging module and the feeding module are basically the same in structure. The conveying module is at least partially arranged between the feeding module and the discharging module and is arranged close to the rear sides of the feeding module and the discharging module. Through the arrangement, the conveying device can ensure the continuity and timeliness of crystal ingot conveying, the crystal ingot conveying efficiency is improved, and the consumption of human resources is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing, and particularly to an automatic ingot transfer device. Background Art

[0002] A wafer is the basis of a semiconductor integrated circuit. The manufacturing process includes crystal pulling, slicing, grinding, etc. During and between various manufacturing processes, the ingot is frequently handled and transferred. To ensure the smooth progress of wafer manufacturing, the loading and unloading of the ingot need to be timely and stable.

[0003] In the prior art, when loading and unloading the ingot, manual placement is usually adopted to place the ingot at the feed inlet of the ingot transfer device to ensure the accuracy and timeliness of the ingot placement. However, this feeding method consumes a large amount of human resources, and manual operation errors are likely to cause delays in ingot transfer and damage to the ingot and equipment. Summary of the Invention

[0004] In order to solve the deficiencies of the prior art, the purpose of the present invention is to provide an automatic ingot transfer device with higher loading and unloading efficiency.

[0005] Based on the above purpose, the present invention adopts the following technical solutions: An automatic ingot transfer device, comprising: a feeding module, a discharging module and a transfer module. The feeding module includes a first support member, a first synchronizing plate, a first lifting assembly and a first conveying assembly. A first cavity is provided in the first support member, and a plurality of first positioning rings for placing ingots are evenly arranged on the upper end surface in the front-rear direction. The distance between the centers of adjacent first positioning rings is a first length. The first synchronizing plate is slidably arranged in the first cavity. The first lifting assembly is at least partially arranged on the first synchronizing plate. The first conveying assembly is at least partially arranged at the bottom of the first support member and is connected to the first synchronizing plate. The discharging module includes a second support member, a second synchronizing plate, a second lifting assembly and a second conveying assembly. A second cavity is provided in the second support member, and a plurality of second positioning rings for placing ingots are evenly arranged on the upper end surface in the front-rear direction. The distance between the centers of adjacent second positioning rings is a second length. The second synchronizing plate is slidably arranged in the second cavity. The second lifting assembly is at least partially arranged on the second synchronizing plate. The second conveying assembly is at least partially arranged at the bottom of the second support member and is connected to the second synchronizing plate. The transfer module is at least partially arranged between the feeding module and the discharging module, and is arranged near the rear sides of the feeding module and the discharging module for transferring the ingot from the feeding module to the discharging module. When no ingot is placed on any of the first positioning rings, the first lifting assembly jacks up the ingots on all the first positioning rings located in front of this first positioning ring. The first conveying assembly drives the first synchronizing plate to drive the first lifting assembly and the ingots to slide backward by the first length. The first lifting assembly resets, so that the ingots correspondingly fall into the first positioning rings. The first conveying assembly drives the first synchronizing plate to slide forward by the first length to the original position. When no ingot is placed on any of the second positioning rings, the second lifting assembly jacks up the ingots on all the second positioning rings located behind this second positioning ring. The second conveying assembly drives the second synchronizing plate to drive the second lifting assembly and the ingots to slide forward by the second length. The second lifting assembly resets, so that the ingots correspondingly fall into the second positioning rings. The second conveying assembly drives the second synchronizing plate to slide backward by the second length to the original position.

[0006] Further, the transfer module includes a first support column, a second support column, a stator, a transfer member and a clamping member. The first support column is at least partially arranged on the right side of the rear end of the feeding module. The second support column is at least partially arranged on the left side of the rear end of the discharging module. The left and right ends of the stator are respectively connected to the first support column and the second support column. The transfer member is at least partially arranged on the top of the stator. The clamping member is connected to the transfer member and is slidably connected to the stator. The transfer member can drive the clamping member to slide along the extending direction of the stator.

[0007] Further, the transfer device further includes a fixture. The fixture is arranged at the bottom of the ingot, can be placed in the first positioning ring and the second positioning ring, and can be clamped by the clamping member.

[0008] Further, the first lifting assembly includes a cylinder, a lifting plate, and a rough positioning block; the cylinder is at least partially disposed at the bottom of the first synchronization plate and is connected to the first synchronization plate; the lifting plate is horizontally disposed at the top of the cylinder and is connected to the cylinder; the rough positioning block is disposed at the top of the lifting plate and is connected to the lifting plate.

[0009] Further, the top surface of the first support member is provided with a chute extending in the front-rear direction for accommodating the lifting plate and the rough positioning block.

[0010] Further, the left and right ends of the bottom of the first cavity are provided with slide rails extending in the front-rear direction, and the left and right ends of the bottom surface of the first synchronization plate are provided with sliders corresponding to the slide rails.

[0011] Further, the first conveying assembly includes a driving member and a connecting member; the driving member is disposed on the bottom surface of the first support member; the connecting member is connected to the driving member and the first synchronization plate.

[0012] Further, the left and right ends of the first positioning ring are provided with detecting members for detecting whether there is an ingot above it.

[0013] The present invention provides an automatic ingot transfer device. The feeding module of the transfer device is provided with a lifting assembly and a conveying assembly. When the ingot on any positioning ring is taken away or clamped by a clamping member, the lifting assembly can lift the ingots on all the positioning rings in front of the positioning ring, convey the ingots backward through the conveying assembly, and supplement the ingots to the vacant positioning ring, thereby avoiding the delay of ingot transfer and improving the transfer efficiency of the ingots. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a schematic structural view of the automatic transfer device provided by the present invention; Figure 2 is a cross-sectional view of the feeding module provided by the present invention; Figure 3 is a cross-sectional view of the discharging module provided by the present invention; Figure 4 is a schematic structural view of the transfer module provided by the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0015] Next, in combination with the embodiments of the present invention, the technical solutions in the embodiments will be clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0016] At the same time, in order to clearly illustrate the technical solutions of the present application, the upper side, lower side, left side, right side, front side, and rear side as Figure 1 shown are also defined.

[0017] As Figures 1 to 4 shown, the present application provides an automatic ingot transfer device, which can transfer ingots more efficiently. The automatic transfer device includes a feeding module 11, a discharging module 12, and a transfer module 13.

[0018] Among them, the feeding module 11 includes a first support member 111, a first synchronous plate 112, a first lifting assembly 113, and a first conveying assembly 114. Specifically, a first cavity 1111 is provided inside the first support member 111, and a plurality of first positioning rings 1112 are evenly arranged on the upper end surface in the front-rear direction. The first positioning rings 1112 are used for placing ingots. The first synchronous plate 112 is slidably arranged in the first cavity 1111. The first lifting assembly 113 is at least partially arranged on the first synchronous plate 112. The first conveying assembly 114 is at least partially arranged at the bottom of the first support member 111 and is connected to the first synchronous plate 112.

[0019] More specifically, the distance between the centers of adjacent first positioning rings 1112 is a first length L1. When no ingot is placed on any first positioning ring 1112, the first lifting assembly 113 jacks up the ingots on all the first positioning rings 1112 located in front of this first positioning ring 1112. The first conveying assembly 114 drives the first synchronous plate 112 to drive the first lifting assembly 113 and the ingots to slide backward by the first length L1. The first lifting assembly 113 resets, so that the ingots correspondingly fall into the first positioning rings 1112; the first conveying assembly 114 drives the first synchronous plate 112 to slide forward by the first length L1 to the original position.

[0020] The discharging module 12 includes a second support member 121, a second synchronous plate 122, a second lifting assembly 123, and a second conveying assembly 124. Specifically, a second cavity 1211 is provided inside the second support member 121, and a plurality of second positioning rings 1212 for placing ingots are evenly arranged on the upper end surface in the front-rear direction. The second synchronous plate 122 is slidably arranged in the second cavity 1211. The second lifting assembly 123 is at least partially arranged on the second synchronous plate 122. The second conveying assembly 124 is at least partially arranged at the bottom of the second support member 121 and is connected to the second synchronous plate 122.

[0021] More specifically, the distance between the centers of adjacent second positioning circles 1212 is the second length L2. When no ingot is placed on any second positioning circle 1212, the second lifting assembly 123 lifts the ingots on all the second positioning circles 1212 behind the second positioning circle 1212 where the second lifting assembly 123 is located. The second transfer assembly 124 drives the second synchronizing plate 122 to drive the second lifting assembly 123 and the ingots to slide forward by the second length L2. The second lifting assembly 123 resets, so that the ingots correspondingly fall into the second positioning circles 1212; the second transfer assembly 124 drives the second synchronizing plate 122 to slide backward by the second length L2 to the original position.

[0022] The transfer module 13 is at least partially disposed between the feeding module 11 and the discharging module 12, and is disposed near the rear sides of the feeding module 11 and the discharging module 12, and is used for transferring the ingots from the feeding module 11 to the discharging module 12.

[0023] Through the above settings, when the ingot on any first positioning circle 1112 is taken away, the first lifting assembly 113 and the first transfer assembly 114 can transfer the ingots on all the first positioning circles 1112 in front of the first positioning circle 1112 backward to supplement the vacant position, so as to ensure the continuity of the ingot transfer by the transfer module 13, improve the transfer efficiency of the ingots, and save human resources. Similarly, when there is no ingot on any second positioning circle 1212, the second lifting assembly 123 and the second transfer assembly can transfer the ingots on all the second positioning circles 1212 behind the second positioning circle 1212 forward to supplement the vacant position, so as to ensure the timely discharging of the ingots, avoid affecting the discharging of subsequent ingots, and improve the reliability of the discharging of the automatic transfer device.

[0024] As Figure 4 shown, the transfer module 13 includes a first support column 131, a second support column 132, a stator 133, a transfer member 134, and a clamping member 135. Specifically, the first support column 131 is at least partially disposed on the right side of the rear end of the feeding module 11, and the second support column 132 is at least partially disposed on the left side of the rear end of the discharging module 12. The left and right ends of the stator 133 are respectively connected to the first support column 131 and the second support column 132. The transfer member 134 is at least partially disposed on the top of the stator 133. Among them, the transfer member 134 can be a drag chain, a conveyor belt or other structures. The clamping member 135 is connected to the transfer member 134 and is slidably connected to the stator 133. The transfer member 134 can drive the clamping member 135 to slide along the extending direction of the stator 133 to drive the wafer to move. Among them, the clamping member 135 can be a robotic arm.

[0025] Further, the transfer device further includes a fixture 14. The fixture 14 is disposed at the bottom of the ingot and is substantially consistent with the bottom surface contour of the ingot. It can be placed in the first positioning circle 1112 and the second positioning circle 1212 and can be clamped by the clamping member 135.

[0026] As Figure 1 and Figure 2 shown, the first lifting assembly 113 includes a cylinder 1131, a lifting plate 1132, and a rough positioning block 1133. The cylinder 1131 is at least partially disposed at the bottom of the first synchronization plate 112 and is connected to the first synchronization plate 112. The cylinder 1131 is used to lift the lifting plate 1132. The lifting plate 1132 is horizontally disposed on the top of the cylinder 1131 and is connected to the cylinder 1131. The rough positioning block 1133 is disposed on the top of the lifting plate 1132 and is connected to the lifting plate 1132. Specifically, the rough positioning block 1133 corresponds to the first positioning ring 1112 and is used to roughly position the ingot, facilitating the placement of the ingot and the fixture 14 on the first positioning ring 1112.

[0027] More specifically, a chute 1113 for accommodating the lifting plate 1132 and the rough positioning block 1133 is provided on the top surface of the first support member 111 along the front-rear direction. When the first lifting assembly 113 lifts the ingot and the first transfer assembly 114 drives the synchronization plate to move backward, the lifting plate 1132 can move backward in the chute 1113. When the first lifting assembly 113 resets and the first transfer assembly 114 drives the synchronization plate to move forward, the rough positioning block 1133 can move forward in the chute 1113.

[0028] Furthermore, sliding rails 1114 extending along the front-rear direction are provided at the left and right ends of the bottom of the first cavity 1111, and sliding blocks 1121 corresponding to the sliding rails 1114 are provided at the left and right ends of the bottom surface of the first synchronization plate 112, so that the first synchronization plate 112 is slidably connected to the bottom of the first cavity 1111.

[0029] The first transfer assembly 114 includes a driving member 1141 and a connecting member 1142. The driving member 1141 is disposed on the bottom surface of the first support member 111. The connecting member 1142 is connected to the driving member 1141 and the first synchronization plate 112. The driving member 1141 can drive the first synchronization plate 112 to slide in the first cavity 1111 through the connecting member 1142.

[0030] Detection members 1115 for detecting whether there is an ingot above are provided at the left and right ends of the first positioning ring 1112. The detection members 1115 are used to detect whether there is an ingot on the first positioning ring 1112 to determine whether the first driving member 1141 and the first lifting assembly 113 need to operate. Among them, the detection members 1115 can be set as transmissive optical sensors to reduce the influence on the ingot.

[0031] It should be understood that the structures of the discharging module 12 and the feeding module 11 are basically the same and the functions are similar, so they will not be elaborated here.

[0032] In summary, the present application provides an automatic ingot transfer device. Among them, the feeding module 11 is provided with a detection member 1115 for detecting whether there is an ingot on the first positioning ring 1112. When there is no ingot on any of the first positioning rings 1112, the first lifting assembly 113 lifts the ingots on all the first positioning rings 1112 in front of the first positioning ring 1112, and the first conveying assembly 114 drives the first synchronous plate 112 to drive the first lifting assembly 113 and the ingot to move backward by a first length L1 to transfer the ingot to the vacant position, so as to ensure that when the clamping member 135 reaches the feeding module 11, it can timely clamp the ingot, improving the ingot transfer efficiency and reducing the input of human resources.

[0033] The above is the description of the embodiments of the present invention. Through the above description of the disclosed embodiments, those skilled in the art can implement or use the present invention. Various modifications to these embodiments will be obvious to those skilled in the art. The general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to these embodiments shown herein, but will conform to the widest scope consistent with the principles and novel points disclosed herein.

Claims

1. An automatic ingot transmission device, characterized in that: include: A feeding module (11), the feeding module (11) comprising a first support member (111), a first synchronization plate (112), a first lifting assembly (113) and a first conveying assembly (114); a first cavity (1111) is provided in the first support member (111), and a plurality of first positioning rings (1112) for placing crystal ingots are evenly provided on the upper end surface along the front-to-back direction; the distance between the centers of adjacent first positioning rings (1112) is a first length L1; the first synchronization plate (112) is slidably arranged in the first cavity (1111); the first lifting assembly (113) is at least partially arranged on the first synchronization plate (112); the first conveying assembly (114) is at least partially arranged at the bottom of the first support member (111) and connected to the first synchronization plate (112); A discharge module (12), the discharge module (12) comprising a second support member (121), a second synchronization plate (122), a second lifting assembly (123) and a second conveying assembly (124); a second cavity (1211) is provided in the second support member (121), and a plurality of second positioning rings (1212) for placing crystal ingots are evenly provided on the upper end surface along the front-to-back direction; the distance between the centers of adjacent second positioning rings (1212) is a second length L2; The second synchronous plate (122) is slidably disposed in the second cavity (1211); the second lifting assembly (123) is at least partially disposed on the second synchronous plate (122); the second conveying assembly (124) is at least partially disposed at the bottom of the second support member (121) and is connected to the second synchronous plate (122); a transmission module (13), the transmission module (13) being at least partially arranged between the feed module (11) and the discharge module (12), being arranged close to the rear sides of the feed module (11) and the discharge module (12), and being used for transmitting the crystal ingot from the feed module (11) to the discharge module (12); When no ingot is placed on any of the first positioning rings (1112), the first lifting assembly (113) lifts up the ingots on all the first positioning rings (1112) arranged on the front side of the first positioning ring (1112); the first conveying assembly (114) drives the first synchronous plate (112) to drive the first lifting assembly (113) and the ingot to slide backward by the first length L1; the first lifting assembly (113) is reset to allow the ingot to fall into the first positioning ring (1112) accordingly; the first conveying assembly (114) drives the first synchronous plate (112) to slide forward by the first length L1 to the original position; When no ingot is placed on any of the second positioning circles (1212), the second lifting assembly (123) lifts up the ingots on all the second positioning circles (1212) arranged on the rear side of the second positioning circle (1212); the second transmission assembly (124) drives the second synchronization plate (122) to drive the second lifting assembly (123) and the ingot to slide forward the second length L2; the second lifting assembly (123) is reset to allow the ingot to fall into the corresponding second positioning circle (1212); the second transmission assembly (124) drives the second synchronization plate (122) to slide backward the second length L2 to its original position.

2. The automatic ingot transport device according to claim 1, characterized in that: The transmission module (13) comprises a first support column (131), a second support column (132), a stator (133), a transmission member (134) and a clamping member (135); the first support column (131) is at least partially arranged on the right side of the rear end of the feeding module (11); the second support column (132) is at least partially arranged on the left side of the rear end of the discharging module (12); the left and right ends of the stator (133) are respectively connected to the first support column (131) and the second support column (132); the transmission member (134) is at least partially arranged on the top of the stator (133); the clamping member (135) is connected to the transmission member (134) and is slidably connected to the stator (133); the transmission member (134) can drive the clamping member (135) to slide along the extension direction of the stator (133).

3. The automatic ingot transport device according to claim 2, characterized in that: The transmission device also includes a clamp (14); the clamp (14) is arranged at the bottom of the ingot, can be placed in the first positioning ring (1112) and the second positioning ring (1212), and can be clamped by the clamping member (135).

4. The automatic ingot transport device according to claim 1, characterized in that: The first lifting assembly (113) comprises a cylinder (1131), a lifting plate (1132) and a coarse setting block (1133); the cylinder (1131) is at least partially arranged at the bottom of the first synchronization plate (112) and is connected to the first synchronization plate (112); the lifting plate (1132) is horizontally arranged at the top of the cylinder (1131) and is connected to the cylinder (1131); the coarse setting block (1133) is arranged at the top of the lifting plate (1132) and is connected to the lifting plate (1132).

5. The automatic ingot transport device according to claim 4, characterized in that: The top surface of the first support member (111) is provided with a sliding groove (1113) along the front-rear direction and capable of accommodating the lifting plate (1132) and the rough setting block (1133).

6. The automatic ingot transport device according to claim 1, characterized in that: Slide rails (1114) extending in the front-rear direction are provided at the left and right ends of the bottom of the first cavity (1111), and sliding blocks (1121) corresponding to the slide rails (1114) are provided at the left and right ends of the bottom surface of the first synchronization plate (112).

7. The automatic ingot transport device according to claim 1, characterized in that: The first transmission component (114) comprises a driving member (1141) and a connecting member (1142); the driving member (1141) is arranged on the bottom surface of the first supporting member (111); and the connecting member (1142) is connected to the driving member (1141) and the first synchronization plate (112).

8. The automatic ingot transport device according to claim 1, characterized in that: Detection components (1115) for detecting whether a crystal ingot exists above the first positioning ring (1112) are provided at the left and right ends thereof.

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